Workpiece carrier for a vacuum coater and vacuum coater

Abstract

The application discloses a workpiece carrier for a vacuum coating machine and the vacuum coating machine, wherein the workpiece carrier comprises a revolution shaft and a revolution frame rotatably installed on the revolution shaft; a plurality of self-rotation shafts for connecting and installing workpieces are installed on the revolution frame; the axis of the self-rotation shafts extends along the radial direction of the revolution frame; and a linkage mechanism for driving the self-rotation shafts to rotate synchronously when the revolution frame rotates is arranged between each self-rotation shaft and the revolution shaft. The vacuum coating machine is provided with the workpiece carrier for the vacuum coating machine. The application has the advantages of improving the uniformity and quality of coating of complex workpieces and adapting to diversified advanced process requirements.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment technology, specifically to a workpiece carrier for a vacuum coating machine and a vacuum coating machine. Background Technology

[0002] Vacuum coating technologies (such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) are widely used in modern manufacturing to prepare thin film coatings with specific functions (such as wear resistance, corrosion resistance, decoration, optics, and conductivity) on workpiece surfaces. In this technology, the workpiece carrier (or workpiece rotating frame, tooling fixture) is one of the core actuators of the coating equipment, undertaking the crucial task of positioning and supporting multiple workpieces and ensuring their movement within the coating chamber in a predetermined manner. Its performance directly affects the efficiency and quality of the coating production (film uniformity, adhesion, structural density, etc.).

[0003] To improve the uniformity of film thickness distribution on workpiece surfaces, especially complex surfaces, and to overcome the deposition advantage of the line-of-sight direction caused by fixed placement (i.e., faster deposition rate and larger film thickness in areas facing the sputtering or evaporation source), modern vacuum coating equipment generally adopts a rotatable workpiece carrier design. This design continuously moves the workpiece during the coating process, changing its angle and position relative to the coating source (such as a sputtering target or evaporation boat), thereby averaging the deposition angle, effectively reducing shading effects, and improving overall film thickness uniformity.

[0004] Currently, most mainstream rotary workpiece carriers employ planetary gear systems or similar transmission mechanisms to achieve composite motion of the workpiece: the workpiece not only revolves around a common central axis (revolution axis) but also rotates around a local axis (rotation axis). For example, a workpiece carrier disclosed in Chinese Patent Application Publication No. CN215887213U uses this typical dual-axis rotation structure, which improves the uniformity of film thickness distribution to a certain extent through the superposition of revolution and rotation. However, in the prior art, the revolution axis and rotation axis of such rotatable workpiece carriers are usually designed to be parallel to each other. The degree of freedom of motion provided by this parallel axis rotation mode (mainly composite rotation in a two-dimensional plane) is too singular and limited. Although it is effective in improving the film thickness uniformity of workpieces with simple geometries (such as planes and regular outer surfaces), it is significantly insufficient in improving the coating uniformity, coverage, and quality of workpieces with complex geometries (especially those with deep holes, grooves, cavities, sharp edges, and complex curved surface features). Meanwhile, its single motion mode is also difficult to adapt to the increasingly sophisticated coating processes that require more precise workpiece movement. Therefore, there is an urgent need to develop a new workpiece carrier technology with higher degrees of freedom of movement, the ability to more flexibly adjust the posture and angle of the workpiece in the coating space, thereby significantly improving the uniformity and quality of coating on complex workpieces, and adapting to the diverse needs of advanced processes. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a workpiece carrier and vacuum coating machine for vacuum coating machines that can improve the uniformity and quality of coating on complex workpieces and meet the needs of diverse advanced processes.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A workpiece carrier for a vacuum coating machine includes a revolution shaft and a revolution frame rotatably mounted on the revolution shaft. The revolution frame is equipped with multiple spin shafts for connecting and mounting workpieces. The axis of each spin shaft extends radially along the revolution frame. A linkage mechanism is provided between each spin shaft and the revolution shaft to drive the spin shaft to rotate synchronously when the revolution frame rotates.

[0008] As a further improvement to the above technical solution:

[0009] An anti-jamming device is provided between the rotating shaft and the linkage mechanism to disconnect the transmission between the rotating shaft and the linkage mechanism when the rotating shaft jams.

[0010] The anti-jamming device is a friction transmission device that disconnects the transmission when the transmission torque exceeds a set torque value.

[0011] The friction transmission device includes a first friction disc, a second friction disc, and a transmission shaft connected to a linkage mechanism. The first friction disc is connected to a rotation shaft, and the second friction disc is connected to the transmission shaft. The axial end faces of the first and second friction discs press against each other to perform friction transmission. The friction transmission device also includes a first adjustment component for adjusting the pressing force between the first and second friction discs.

[0012] The first friction disc is movably mounted on the rotation shaft in such a way that it can reciprocate along the axial direction to adjust the distance between it and the second friction disc. The first adjustment assembly includes a first adjustable elastic clamping mechanism that applies an elastic clamping force to the first friction disc to adjust the clamping force between the first friction disc and the second friction disc.

[0013] The first friction disc is provided with a sliding rod portion, and the end of the rotating shaft is provided with a guide hole. The sliding rod portion is installed in the guide hole and slides in cooperation with the guide hole along the axial direction of the rotating shaft. The first adjustable elastic clamping mechanism is located between the rotating shaft and the sliding rod portion.

[0014] The first adjustable elastic clamping mechanism includes a first telescopic spring installed in the guide hole and a compression adjustment mechanism for adjusting the compression of the first telescopic spring. One end of the first telescopic spring is connected to the slide rod and applies an elastic clamping force to the slide rod to press the first friction disc against the second friction disc.

[0015] The compression adjustment mechanism includes a first pressure plate and a first adjusting nut. The first adjusting nut is threadedly connected to the rotation shaft and can be adjusted along the axial direction of the rotation shaft by screwing. The first pressure plate is located in the guide hole and abuts against the end of the first telescopic spring away from the slide rod. The rotation shaft is provided with a strip groove communicating with the guide hole. The first pressure plate is provided with an abutting part that extends out of the strip groove and abuts against the first adjusting nut.

[0016] The second friction disc has a friction disc shaft, and the transmission shaft has a connecting hole. The friction disc shaft is inserted into the connecting hole and can move axially relative to the transmission shaft. The first adjustment assembly includes a first rotating frame rotatably connected to the first friction disc and a second rotating frame rotatably connected to the second friction disc. A plurality of first high thermal expansion ratio material connectors are connected between the first rotating frame and the second rotating frame. When the first high thermal expansion ratio material connectors contract, they force the second rotating frame to move closer to the first rotating frame so that the axial end faces of the first friction disc and the second friction disc press against each other. When the first high thermal expansion ratio material connectors expand due to heat, they force the second rotating frame to move away from the first rotating frame to reduce the pressing force between the first friction disc and the second friction disc or to disengage the first friction disc from the second friction disc.

[0017] The friction disc shaft has a linkage part, and the connecting hole has a linkage hole section and an idle hole section. When the axial end faces of the second friction disc and the first friction disc are pressed together, the linkage part engages with the linkage hole section to perform transmission. When the first friction disc disengages from the second friction disc to a set distance, the linkage part is located in the idle hole section and does not perform transmission.

[0018] Both the first friction disc and the second friction disc have radially extending toothed inserts on their contacting end faces.

[0019] Both the first and second friction discs have a wear-resistant material layer on their axial end faces where they press against each other.

[0020] The friction transmission device includes a first friction wheel and a second friction wheel. The first friction wheel is connected to a rotation shaft, and the second friction wheel is connected to a linkage mechanism. The circumferential surfaces of the first friction wheel and the second friction wheel press against each other to perform friction transmission. The anti-jamming device also includes a second adjustment component for adjusting the clamping force between the first friction wheel and the second friction wheel.

[0021] The second adjustment component includes a guide mounting hole provided on the revolution frame, the spin shaft is installed in the guide mounting hole and can reciprocate along the guide mounting hole to adjust the distance between the first friction wheel and the second friction wheel, and the second adjustment component also includes a second adjustable elastic clamping mechanism that applies an elastic clamping force to the spin shaft to adjust the clamping force between the first friction wheel and the second friction wheel.

[0022] The second adjustable elastic clamping mechanism includes a second pressure plate, a screw, a second adjusting nut, and a third rotating frame rotatably connected to a rotation shaft. The third rotating frame is provided with multiple guide posts. The second pressure plate and the multiple guide posts are guided and engaged in the direction in which the first friction wheel presses against the second friction wheel. Each guide post is fitted with a second telescopic spring that is pressed between the second pressure plate and the third rotating frame. The screw is fixed on the revolution frame. The second adjusting nut is threadedly connected to the screw and can be adjusted by screwing to force the second pressure plate to move closer to the third rotating frame along the multiple guide posts.

[0023] The second adjustable elastic clamping mechanism includes a fixed base and a fourth rotating frame rotatably connected to a rotation shaft. The transmission shaft is mounted on the fixed base. A plurality of second high thermal expansion ratio material connectors are connected between the fixed base and the fourth rotating frame. When the second high thermal expansion ratio material connectors contract, they force the fourth rotating frame to move closer to the fixed base so that the circumferential surfaces of the first friction wheel and the second friction wheel press against each other. When the second high thermal expansion ratio material connectors expand due to heat, they force the fourth rotating frame to move away from the fixed base to reduce the clamping force between the first friction wheel and the second friction wheel or to disengage the first friction wheel from the second friction wheel.

[0024] The first friction wheel and the second friction wheel are cylindrical wheels or conical wheels.

[0025] The anti-jamming device is a constant torque clutch that disconnects the transmission when the transmission torque exceeds a set torque value.

[0026] The constant torque clutch device includes a connector on a rotating shaft and a connecting shaft connected to a linkage mechanism. The connector has a insertion hole, and the connecting shaft is inserted into the insertion hole in a manner that allows it to rotate relative to the connector. The connecting shaft has a plurality of recesses evenly spaced around the axis. The connector has at least one reciprocating linkage member, which can extend into and retract from the recesses through reciprocating motion. The constant torque clutch device also includes an elastic clamping component that applies an elastic clamping force to the linkage member to cause the linkage member to extend into the recesses. The contact surface between the linkage member and the recesses is configured such that when the transmission torque exceeds a set torque value, the connecting shaft can force the linkage member to overcome the action of the elastic clamping component and retract from the recesses.

[0027] The connector has a through mounting hole that connects to the insertion hole from the outside. The elastic clamping assembly includes a clamping member, a third telescopic spring, and an adjusting sleeve. The linkage member, the third telescopic spring, and the clamping member are sequentially installed in the through mounting hole in a radially outward direction. The adjusting sleeve is threadedly fitted onto the connector and can be adjusted in the axial direction of the connector by screwing. The adjusting sleeve has a tapered hole. The clamping member extends out of the through mounting hole and abuts against the inner wall of the tapered hole. The inner wall of the tapered hole forces the clamping member to compress the third telescopic spring.

[0028] The anti-jamming device is a hydraulic coupling connected between the rotating shaft and the linkage mechanism.

[0029] The anti-jamming device is a magnetic coupler connected between the rotating shaft and the linkage mechanism.

[0030] The orbital frame is equipped with a sealed outer shell that surrounds and encloses the anti-jamming device.

[0031] The linkage mechanism includes a first gear and a second gear that mesh with each other. The first gear is fixedly mounted on the revolution shaft, and the second gear is connected to the rotation shaft.

[0032] The orbiter is equipped with a joint mechanism for connecting with a rotary drive component to drive the orbiter to rotate.

[0033] The orbital frame includes multiple strip beams extending along the axial direction, with the multiple strip beams evenly spaced around the orbital axis, and multiple rotation shafts arranged sequentially and at intervals along the axial direction installed on each strip beam.

[0034] Both ends of the revolution shaft are equipped with rotating seats, and both ends of the strip beam are detachably connected to the rotating seats at both ends of the revolution shaft.

[0035] Multiple support frames are rotatably mounted on the revolution axis and arranged sequentially at intervals along the axial direction. Each strip beam is connected to the support frame.

[0036] The present invention also provides a vacuum coating machine, wherein the vacuum coating machine is provided with the above-mentioned workpiece carrier for vacuum coating machine.

[0037] As a further improvement to the above technical solution:

[0038] The vacuum coating machine includes a transfer chamber and multiple process chambers connected to the transfer chamber. The multiple process chambers are arranged around the transfer chamber. Each process chamber and the transfer chamber are provided with a material inlet and outlet with a first openable and closable door. The transfer chamber is connected to an inlet and outlet device for supplying and receiving workpiece carriers. The transfer chamber is provided with a transfer device for transferring workpiece carriers between the inlet and outlet device and each process chamber. Each process chamber is provided with a drive device for mounting the workpiece carriers vertically in a revolution axis and driving the revolution carriers to rotate.

[0039] The driving device includes a lifting drive assembly and a rotary drive assembly for docking with the orbital frame to drive the orbital frame to rotate around the orbital axis. The rotary drive assembly is located at the top of the process chamber, and the lifting drive assembly is located at the bottom of the process chamber and can support the orbital axis for lifting and lowering. When the lifting drive assembly supports the orbital axis to move upward, it can dock with the orbital frame. When the lifting drive assembly supports the orbital axis to move downward, it can disengage the orbital frame from the rotary drive assembly.

[0040] Compared with the prior art, the advantages of the present invention are as follows:

[0041] The workpiece carrier for a vacuum coating machine of the present invention has multiple rotating shafts mounted on a revolution frame. The axis of the rotating shaft extends radially along the revolution frame. When a workpiece is loaded and mounted on the rotating shaft for coating, the workpiece can rotate around the revolution axis while the rotating shaft can also carry the workpiece to rotate synchronously around a rotation axis that is not parallel to the revolution axis. Compared with the prior art, this allows the workpiece to have a higher degree of freedom of movement, and can more flexibly adjust the posture and angle of the workpiece in the coating space. This can improve the coating uniformity and quality of complex workpieces and meet the needs of diverse advanced processes.

[0042] The vacuum coating machine of the present invention also has the advantages of the workpiece carrier for vacuum coating machines because it is equipped with the workpiece carrier of the present invention. Attached Figure Description

[0043] Figure 1 This is a three-dimensional structural diagram of the workpiece carrier in Example 1.

[0044] Figure 2 This is a schematic diagram of the main structure of the workpiece carrier in Example 1.

[0045] Figure 3 for Figure 2 Enlarged cross-sectional view of the structure (AA).

[0046] Figure 4 This is a side view of the workpiece carrier in Example 1.

[0047] Figure 5 for Figure 4 Schematic diagram of the cross-sectional structure of the middle BB.

[0048] Figure 6 for Figure 5 Enlarged structural diagram at point C.

[0049] Figure 7 This is a schematic diagram of the main structure of the workpiece carrier in Example 2.

[0050] Figure 8 This is a three-dimensional structural diagram of the workpiece carrier in Example 3.

[0051] Figure 9 This is a schematic diagram of the main structure of the workpiece carrier in Example 3.

[0052] Figure 10 for Figure 9 Enlarged cross-sectional view of the DD structure.

[0053] Figure 11 This is a side view of the workpiece carrier in Example 3.

[0054] Figure 12 for Figure 11 Schematic diagram of the cross-sectional structure of the EE.

[0055] Figure 13 for Figure 12 Enlarged structural diagram at point F.

[0056] Figure 14 This is a three-dimensional structural diagram of the first friction disc in Example 4.

[0057] Figure 15 This is a cross-sectional view of the anti-jamming device in Example 5.

[0058] Figure 16 This is a three-dimensional structural diagram of the anti-jamming device in Example 5.

[0059] Figure 17 This is a cross-sectional view of the connection between the friction disc shaft and the connecting hole in Example 5.

[0060] Figure 18 This is a three-dimensional structural diagram of the anti-jamming device in Example 6.

[0061] Figure 19 This is a three-dimensional structural diagram of the anti-jamming device in Example 7.

[0062] Figure 20 This is a cross-sectional view of the anti-jamming device in Example 8.

[0063] Figure 21 This is a schematic diagram of the main structure of the constant torque clutch device in Example 9.

[0064] Figure 22 for Figure 21 Enlarged cross-sectional view of the GG structure.

[0065] Figure 23 for Figure 21 Enlarged cross-sectional view of the middle HH structure.

[0066] Figure 24 This is a schematic diagram of the structure in Example 10 where the rotating shaft is connected to the linkage mechanism via a hydraulic coupling.

[0067] Figure 25 This is a top sectional view of the vacuum coating machine in Example 12.

[0068] Figure 26 This is a schematic diagram of the main cross-sectional structure of the process chamber in Example 12.

[0069] Legend:

[0070] 1. Revolution shaft; 11. Rotating seat; 2. Revolution frame; 22. Strip beam; 3. Rotation shaft; 31. Guide hole; 32. Strip groove; 33. Connector; 331. Insertion hole; 332. Through mounting hole; 4. Linkage mechanism; 41. Drive shaft; 411. Connecting hole; 4111. Linkage hole section; 4112. Idle hole section; 42. First gear; 43. Second gear; 44. Connecting shaft; 441. Concave part; 5. Anti-jamming device; 51. First friction disc; 511. Sliding rod part; 512. Toothed gear; 52. Second friction disc; 521. Friction disc shaft; 5211. Linkage part; 53. First adjusting component; 531. First telescopic spring; 532. First pressure plate; 533. First adjusting nut; 534. First rotating frame; 535. Second rotating frame; 536. First high-heat... 54. First friction wheel; 55. Second friction wheel; 56. Second adjusting assembly; 561. Second pressure plate; 562. Screw; 563. Second adjusting nut; 564. Third rotating frame; 565. Guide post; 566. Second telescopic spring; 567. Fixed seat; 568. Fourth rotating frame; 569. Second high thermal expansion ratio material connector; 57. Linkage component; 58. Elastic clamping assembly; 581. Clamping component; 582. Third telescopic spring; 583. Adjusting sleeve; 5831. Conical hole; 6. Sealing shell; 7. Support frame; 101. Process chamber; 102. Transfer chamber; 103. Material inlet / outlet; 1031. First openable / closable door; 104. Feeding / discharging device; 105. Transfer device; 106. Lifting drive assembly; 107. Rotation drive assembly. Detailed Implementation

[0071] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0072] Example 1

[0073] like Figures 1 to 5As shown, the workpiece carrier for a vacuum coating machine in this embodiment includes a revolution shaft 1 and a revolution frame 2 rotatably mounted on the revolution shaft 1. Multiple spin shafts 3 for connecting and mounting workpieces are mounted on the revolution frame 2. The axis of each spin shaft 3 extends radially along the revolution frame 2. A linkage mechanism 4 is provided between each spin shaft 3 and the revolution shaft 1 to drive the spin shaft 3 to rotate synchronously when the revolution frame 2 rotates. This workpiece carrier for a vacuum coating machine, with multiple spin shafts 3 mounted on the revolution frame 2 and the axis of each spin shaft 3 extending radially along the revolution frame 2, allows the workpiece to rotate around the revolution shaft 1 while simultaneously rotating around a rotation axis that is not parallel to the revolution shaft 1, carrying the workpiece synchronously. Compared to existing technologies, this allows the workpiece to have higher degrees of freedom of movement, enabling more flexible adjustment of the workpiece's posture and angle in the coating space. This improves the uniformity and quality of coating on complex workpieces and adapts to the needs of diverse advanced processes.

[0074] In this embodiment, as Figure 6 As shown, the linkage mechanism 4 includes a first gear 42 and a second gear 43 that mesh with each other. The first gear 42 is fixedly mounted on the revolution shaft 1, and the second gear 43 is connected to the rotation shaft 3. When the revolution frame 2 is driven to rotate around the revolution shaft 1, the interaction of the first gear 42 and the second gear 43 causes the rotation shaft 3 to rotate around its own axis. This linkage mechanism 4 uses a gear mechanism with the first gear 42 and the second gear 43 meshing together, requiring no additional power, and has the advantages of simple structure, low cost, easy assembly and maintenance, and stable and reliable transmission. In this embodiment, the first gear 42 and the second gear 43 are specifically bevel gears. In other embodiments, the linkage mechanism 4 can also use a non-gear mechanism, as long as it can achieve synchronous rotation of the rotation shaft 3 when the revolution frame 2 is driven to rotate.

[0075] In this embodiment, the orbital frame 2 is provided with a joint mechanism for connecting with the rotary drive component to drive the orbital frame 2 to rotate, which facilitates connection with the rotary drive component configured in the vacuum coating machine to realize automatic driving of the orbital frame 2 to rotate. The joint mechanism can be a square joint, a non-circular hole, etc.

[0076] In this embodiment, the revolution frame 2 includes multiple strip beams 22 extending axially. The multiple strip beams 22 are evenly spaced around the revolution axis 1, and multiple rotation shafts 3 are installed on each strip beam 22, which are sequentially spaced along the axial direction of the revolution frame 2. Not only is the structure of the revolution frame 2 simple, lightweight, and easy to manufacture and assemble, but it also allows for a uniform and reasonable arrangement of workpieces on the revolution frame 2, which is beneficial for installing as many workpieces as possible on the revolution frame 2.

[0077] In this embodiment, rotating seats 11 are installed at both ends of the revolution shaft 1, and the two ends of the strip beam 22 are detachably connected to the rotating seats 11 at both ends of the revolution shaft 1. During manufacturing and assembly, the two manufactured rotating seats 11 are installed at the two ends of the revolution shaft 1, the rotation shaft 3 is installed on the strip beam 22, and then the strip beam 22 is connected and fixed to the two rotating seats 11. The assembly is simple, and it is easy to disassemble each strip beam 22 individually for replacement and maintenance. Furthermore, the number of strip beams 22 can be increased or decreased as needed, provided the installation space allows, making it flexible and convenient to use. For example, in this embodiment, the rotating seat 11 has a hexagonal structure and specifically installs three strip beams 22. In other cases, up to six other strip beams 22 can be installed on the hexagonal rotating seat 11 as needed. In other embodiments, the rotating seat 11 can also be configured in other shapes, and more strip beams 22 can be provided. In this embodiment, the rotating seat 11 is rotatably mounted on the revolution shaft 1 through a bearing mechanism, and the self-rotating shaft 3 is rotatably mounted on the strip beam 22 through a bearing mechanism or a bushing structure. The strip beam 22 and the rotating seat 11 are connected by screws.

[0078] In this embodiment, multiple support frames 7 are rotatably mounted on the revolution shaft 1, arranged sequentially at intervals along the axial direction. Each strip beam 22 is connected to the support frame 7. The support frame 7 strengthens the connection and supports the strip beam 22, which can prevent the strip beam 22 from deforming and improve the installation stability and load-bearing capacity of the strip beam 22.

[0079] In this embodiment, the workpiece carrier for the vacuum coating machine has a revolution frame 2 that rotates around a revolution axis 1. The axes of each rotation axis 3 extend radially along the revolution frame 2. When the revolution axis 1 is installed vertically inside the vacuum coating machine, the axis of rotation of the workpiece mounted on the self-rotating axis 3 will always remain horizontally arranged, making it difficult for impurities and other contaminants to adhere to the workpiece, and making it easy for impurities and other contaminants on the workpiece to fall off, thus improving the coating quality.

[0080] Example 2

[0081] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 1, with the main difference being, for example... Figure 7 As shown, in this embodiment, the first gear 42 and the second gear 43 are spur gears, and the orbital frame 2 is provided with only two strip beams 22.

[0082] Example 3

[0083] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 1, with the main difference being, for example... Figures 8 to 11As shown, in this embodiment, an anti-jamming device 5 is provided between the rotating shaft 3 and the linkage mechanism 4 to disconnect the transmission between the rotating shaft 3 and the linkage mechanism 4 when the rotating shaft 3 is jammed. When a single rotating shaft 3 jams due to insufficient assembly precision, deformation, wear, damage, or contamination by dust and impurities, the anti-jamming device 5 automatically disconnects the transmission between the jammed rotating shaft 3 and the linkage mechanism 4. This will not affect the normal rotation of the entire orbital frame 2 and other rotating shafts 3, ensuring that the workpieces installed on other rotating shafts 3 can move normally and complete the coating process. This avoids the situation where all workpieces on the orbital frame 2 cannot move normally for coating due to the jamming of a few rotating shafts 3.

[0084] In this embodiment, the anti-jamming device 5 is a friction transmission device that disconnects the transmission when the transmission torque exceeds a set torque value. Specifically, as shown... Figure 12 and Figure 13 As shown, the friction transmission device includes a first friction disc 51, a second friction disc 52, and a transmission shaft 41 connected to the linkage mechanism 4 (second gear 43). The first friction disc 51 is connected to the rotation shaft 3, and the second friction disc 52 is connected to the transmission shaft 41. The axial end faces of the first friction disc 51 and the second friction disc 52 press against each other for friction transmission. The friction transmission device also includes a first adjusting component 53 for adjusting the pressing force between the first friction disc 51 and the second friction disc 52. When the rotation shaft 3 rotates normally, the axial end faces of the first friction disc 51 and the second friction disc 52 press against each other for friction transmission, enabling the linkage mechanism 4 to drive the rotation shaft 3 to rotate synchronously. When the rotation shaft 3 is jammed, the transmission torque between the first friction disc 51 and the second friction disc 52 will increase. When the torque exceeds a certain level, slippage will occur, thereby achieving the purpose of disconnecting the transmission between the rotation shaft 3 and the linkage mechanism 4. This friction drive device, employing a first friction disc 51 and a second friction disc 52 pressed together for frictional transmission, achieves the function of disconnecting transmission when the transmission torque exceeds a set torque value. It also boasts advantages such as simple and compact structure, low cost, and ease of implementation. The friction drive device is equipped with a first adjustment component 53, which allows adjustment of the clamping force between the first friction disc 51 and the second friction disc 52. This adjustment also regulates the torque required for slippage of the first and second friction discs 51 and 52, facilitating production assembly, improving assembly and usage flexibility, and adapting to different process torque requirements.

[0085] In this embodiment, the first friction disc 51 is movably mounted on the rotating shaft 3 in such a way that it can reciprocate axially to adjust the distance between it and the second friction disc 52. The first adjusting component 53 includes a first adjustable elastic clamping mechanism that applies an elastic clamping force to the first friction disc 51 to adjust the clamping force between the first friction disc 51 and the second friction disc 52. This first adjustable elastic clamping mechanism can adjust the magnitude of the elastic clamping force applied to the first friction disc 51. The combination of the reciprocating installation method of the first friction disc 51 and the first adjustable elastic clamping mechanism results in a simple and compact structure that is convenient for manufacturing, assembly, and debugging. Furthermore, by applying an elastic clamping force to the first friction disc 51, the first adjustable elastic clamping mechanism ensures that the axial end faces of the first friction disc 51 and the second friction disc 52 are pressed against each other, enabling the first friction disc 51 and the second friction disc 52 to maintain a stable mutual pressing contact and ensuring the stability and reliability of the transmission.

[0086] In this embodiment, the first friction disc 51 is provided with a sliding rod portion 511, and the end of the rotating shaft 3 is provided with a guide hole 31. The sliding rod portion 511 is installed in the guide hole 31 and slides in cooperation with the guide hole 31 along the axial direction of the rotating shaft 3. The first adjustable elastic clamping mechanism is located between the rotating shaft 3 and the sliding rod portion 511. Its structure is simple and compact, low in cost, and stable and reliable in operation.

[0087] In this embodiment, the first adjustable elastic clamping mechanism includes a first telescopic spring 531 installed in the guide hole 31 and a compression adjustment mechanism for adjusting the compression of the first telescopic spring 531. One end of the first telescopic spring 531 is connected to the slide rod 511 and applies an elastic clamping force to the slide rod 511 to press the first friction disc 51 against the second friction disc 52. Using the first telescopic spring 531 is cost-effective; the elastic clamping force applied to the first friction disc 51 can be adjusted simply by adjusting the compression of the first telescopic spring 531. The compression adjustment mechanism has multiple optional structural forms, allowing for flexible selection based on installation space, ease of adjustment, and other time-related requirements.

[0088] In this embodiment, the compression adjustment mechanism includes a first pressure plate 532 and a first adjusting nut 533. The first adjusting nut 533 is threadedly connected to the rotating shaft 3 and its position can be adjusted axially along the rotating shaft 3 by screwing. The first pressure plate 532 is located inside the guide hole 31 and abuts against the end of the first telescopic spring 531 away from the slide rod 511. The rotating shaft 3 is provided with a strip groove 32 communicating with the guide hole 31. The first pressure plate 532 is provided with an abutting part extending from the strip groove 32 and abutting against the first adjusting nut 533. By screwing the first adjusting nut 533 to adjust its connection position on the rotating shaft 3, the first pressure plate 532 with the abutting part can be pushed to move axially to adjust the compression of the first telescopic spring 531. This compression adjustment mechanism has a simple and compact structure, low cost, and is easy to adjust.

[0089] In this embodiment, the rotating frame 2 is provided with a sealed outer shell 6 that surrounds and encloses the anti-jamming device 5, which can prevent impurities caused by wear from leaking and affecting the coating quality, and can also prevent coating materials during the coating process from entering the anti-jamming device 5 and affecting its operation.

[0090] In a preferred embodiment, both the axial end faces of the first friction disc 51 and the second friction disc 52 that are in mutual pressing contact are provided with a wear-resistant material layer, which can reduce the frictional loss of the first friction disc 51 and the second friction disc 52 and improve the stability and reliability of the friction transmission. The wear-resistant material layer can be made of materials such as tungsten carbide.

[0091] Example 4

[0092] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in embodiment 3. The main difference is that in this embodiment, the end faces of the first friction disk 51 and the second friction disk 52 that are in contact with each other are provided with radially extending teeth 512. For details on the structure of the first friction disk 51, please refer to [link to relevant documentation]. Figure 14 As shown, the second friction disc 52 has the same structure as the first friction disc 51. The teeth 512 of the first friction disc 51 and the second friction disc 52 engage with each other. When the transmission torque between them exceeds a set torque value, the teeth 512 disengage, causing slippage between the first friction disc 51 and the second friction disc 52, thus interrupting the transmission. In this embodiment, the first friction disc 51 and the second friction disc 52 are equipped with teeth 512, resulting in smooth engagement, high transmission efficiency, and reduced wear during stable operation. The specific configuration of the teeth 512 can be found in existing technology.

[0093] Example 5

[0094] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 3, with the main difference being, for example... Figure 15 and Figure 16As shown, in this embodiment, the second friction disc 52 has a friction disc shaft 521, and the transmission shaft 41 is provided with a connecting hole 411. The friction disc shaft 521 is inserted into the connecting hole 411, and the friction disc shaft 521 cooperates with the connecting hole 411 to enable the friction disc shaft 521 to move axially relative to the transmission shaft 41. The first adjusting assembly 53 includes a first rotating frame 534 rotatably connected to the first friction disc 51 and a second rotating frame 535 rotatably connected to the second friction disc 52. Multiple [unclear] connections are made between the first rotating frame 534 and the second rotating frame 535. A first high thermal expansion ratio material connector 536, when contracting, forces the second rotating frame 535 to move closer to the first rotating frame 534, which can press the axial end faces of the first friction disc 51 and the second friction disc 52 into close contact. When the first high thermal expansion ratio material connector 536 expands due to heat, it forces the second rotating frame 535 to move away from the first rotating frame 534, which can reduce the pressing force between the first friction disc 51 and the second friction disc 52 or cause the first friction disc 51 to detach from the second friction disc 52. When the rotating shaft 3 is not jammed, the first friction disc 51 and the second friction disc 52 normally perform friction transmission. When the rotating shaft 3 is jammed, the increased transmission torque causes the first friction disc 51 and the second friction disc 52 to slip. The heat generated by the relative motion and friction between the two is transferred to the first high thermal expansion ratio material connector 536 through the first rotating frame 534 and the second rotating frame 535. The first high thermal expansion ratio material connector 536 expands due to heat, causing the first rotating frame 534 and the second rotating frame 535 to move away from each other, thereby reducing the clamping force between the first friction disc 51 and the second friction disc 52, causing them to slip, or forcing the first friction disc 51 and the second friction disc 52 to disengage, thus achieving the purpose of disconnecting the transmission. In this embodiment, the first adjusting component 53 can automatically reduce the clamping force between the first friction disc 51 and the second friction disc 52 when the rotating shaft 3 is jammed, reducing the transmission torque required for slippage, and can even completely disengage the first friction disc 51 and the second friction disc 52. Its transmission disconnection effect is good, which helps to reduce the wear of the first friction disc 51 and the second friction disc 52. The aforementioned first high thermal expansion ratio material connector 536 can be made of existing high expansion alloy materials.

[0095] In this embodiment, preferably, such as Figure 17As shown, the friction disc shaft 521 has a linkage part 5211, and the connecting hole 411 has a linkage hole section 4111 and an idle hole section 4112. When the axial end faces of the second friction disc 52 and the first friction disc 51 are pressed together, the linkage part 5211 engages with the linkage hole section 4111 to perform transmission. When the first friction disc 51 disengages from the second friction disc 52 to a set distance, the linkage part 5211 is located in the idle hole section 4112 and does not perform transmission. Under normal transmission conditions, the axial end faces of the second friction disc 52 and the first friction disc 51 are pressed together. At this time, the linkage part 5211 engages with the linkage hole section 4111 for transmission. When the first high thermal expansion ratio material connector 536 expands due to heat, the first rotating frame 534 and the second rotating frame 535 move away from each other. At this time, the linkage part 5211 of the friction disc shaft 521 moves to the idle hole section 4112. The linkage part 5211 and the idle hole section 4112 can rotate relative to each other, preventing the transmission shaft 41 from driving the friction disc shaft 521 to rotate. This forms a double disconnect transmission, which can further improve the disconnect transmission effect. The linkage part 5211 can adopt a polygonal joint structure. The linkage hole section 4111 is set as a polygonal hole that can transmit torque when engaged with the polygonal joint structure. The idle hole section 4112 is set as a circular hole that allows the polygonal joint structure to rotate freely within the range.

[0096] Example 6

[0097] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 3, with the main difference being, for example... Figure 18 As shown, in this embodiment, the friction transmission device includes a first friction wheel 54 and a second friction wheel 55. The first friction wheel 54 is connected to the rotation shaft 3, and the second friction wheel 55 is connected to the linkage mechanism 4. The circumferential surfaces of the first friction wheel 54 and the second friction wheel 55 press against each other for friction transmission, that is, the first friction wheel 54 and the second friction wheel 55 press against each other in their radial directions. The anti-jamming device 5 also includes a second adjusting component 56 for adjusting the pressing force between the first friction wheel 54 and the second friction wheel 55. This friction transmission device, using the form of a first friction wheel 54 and a second friction wheel 55, can reduce the space occupied in the axial direction of the rotation shaft 3, and is suitable for workpiece carriers with limited space in the axial direction of the rotation shaft 3. Furthermore, the structure of two friction wheels pressing against each other in the circumferential direction for friction transmission can slip even with lower torque, resulting in high sensitivity.

[0098] In this embodiment, the second adjustment component 56 includes a guide mounting hole (not shown in the figure) provided on the revolution frame 2. The rotation shaft 3 is installed in the guide mounting hole and can reciprocate along the guide mounting hole to adjust the distance between the first friction wheel 54 and the second friction wheel 55. The second adjustment component 56 also includes a second adjustable elastic clamping mechanism that applies an elastic clamping force to the rotation shaft 3 to adjust the clamping force between the first friction wheel 54 and the second friction wheel 55. The second adjustable elastic clamping mechanism can adjust the magnitude of the elastic clamping force applied to the rotation shaft 3. The combination of the reciprocating installation method of the rotation shaft 3 and the second adjustable elastic clamping mechanism results in a simple and compact structure that is convenient for manufacturing, assembly, and debugging. Furthermore, the second adjustable elastic clamping mechanism applies an elastic clamping force to the rotation shaft 3 to make the circumferential surfaces of the first friction wheel 54 and the second friction wheel 55 press against each other, ensuring that the first friction wheel 54 and the second friction wheel 55 maintain a stable mutual pressing contact and guaranteeing the stability and reliability of the transmission.

[0099] In this embodiment, the second adjustable elastic clamping mechanism includes a second pressure plate 561, a screw 562, a second adjusting nut 563, and a third rotating frame 564 rotatably connected to the rotation shaft 3. The third rotating frame 564 has multiple guide posts 565. The second pressure plate 561 and the multiple guide posts 565 are guided and engaged along the direction in which the first friction wheel 54 presses against the second friction wheel 55. Each guide post 565 is fitted with a second telescopic spring 566 pressed between the second pressure plate 561 and the third rotating frame 564. The screw 562 is fixed to the revolution frame 2. The second adjusting nut 563 is threadedly connected to the screw 562 and its position can be adjusted by screwing to force the second pressure plate 561 to move closer to the third rotating frame 564 along the multiple guide posts 565. Tightening the second adjusting nut 563 to adjust its connection position on the screw 562 forces the second pressure plate 561 closer to or further away from the third rotating frame 564, thereby adjusting the magnitude of the elastic clamping force applied to the rotation shaft 3. The second adjustable elastic clamping mechanism has a simple and compact structure, is easy to adjust, and has high stability and reliability in operation. Preferably, the orbital frame 2 is equipped with a guiding mechanism to guide the second pressure plate 561 or guide post 565 to improve operational stability.

[0100] In this embodiment, the first friction wheel 54 and the second friction wheel 55 are cylindrical wheels.

[0101] Example 7

[0102] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 6, with the main difference being, for example... Figure 19As shown, in this embodiment, the first friction wheel 54 and the second friction wheel 55 are conical wheels. The second adjustable elastic clamping mechanism includes a fixed base 567 and a fourth rotating frame 568 rotatably connected to the rotation shaft 3. The transmission shaft 41 is mounted on the fixed base 567. A plurality of second high thermal expansion ratio material connectors 569 are connected between the fixed base 567 and the fourth rotating frame 568. When the second high thermal expansion ratio material connectors 569 contract, they force the fourth rotating frame 568 to move closer to the fixed base 567, which can press the circumferential surfaces of the first friction wheel 54 and the second friction wheel 55 into contact with each other. When the second high thermal expansion ratio material connectors 569 expand due to heat, they force the fourth rotating frame 568 to move away from the fixed base 567, which can reduce the clamping force between the first friction wheel 54 and the second friction wheel 55 or cause the first friction wheel 54 to disengage from the second friction wheel 55. When the rotating shaft 3 is not jammed, the first friction wheel 54 and the second friction wheel 55 normally perform friction transmission. When the rotating shaft 3 is jammed, the increased transmission torque causes the first friction wheel 54 and the second friction wheel 55 to slip. The heat generated by the relative motion and friction between the two is transferred to the second high thermal expansion ratio material connector 569 through the fourth rotating frame 568 and the fixed seat 567. The second high thermal expansion ratio material connector 569 expands due to heat, causing the fourth rotating frame 568 to move away from the fixed seat 567, thereby reducing the clamping force between the first friction wheel 54 and the second friction wheel 55, causing them to slip, or forcing the first friction wheel 54 and the second friction wheel 55 to disengage, thus achieving the purpose of disconnecting the transmission. In this embodiment, the second adjustable elastic clamping mechanism can automatically reduce the clamping force between the first friction disc 51 and the second friction disc 52 when the rotating shaft 3 is jammed, reducing the transmission torque required for slippage, and can even completely disengage the first friction wheel 54 and the second friction wheel 55. Its transmission disconnection effect is good, which helps to reduce the wear of the first friction wheel 54 and the second friction wheel 55. The aforementioned second high thermal expansion ratio material connector 569 can be made of existing high expansion alloy materials.

[0103] Example 8

[0104] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 7, with the main difference being, for example... Figure 20 As shown, in this embodiment, the second adjustable elastic clamping mechanism adopts the structure of the first adjusting component 53 in embodiment 3, except that the first friction disc 51 and the second friction disc 52 are replaced with the first friction wheel 54 and the second friction wheel 55 in the form of conical wheels.

[0105] Example 9

[0106] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 3. The main difference is that in this embodiment, the anti-jamming device 5 is a constant torque clutch device that disconnects the transmission when the transmission torque exceeds a set torque value. Specifically, as shown... Figures 21 to 23As shown, the constant torque clutch device includes a connector 33 on a rotating shaft 3 and a connecting shaft 44 connected to a linkage mechanism 4. The connector 33 has a insertion hole 331, and the connecting shaft 44 is inserted into the insertion hole 331 in a manner that allows it to rotate relative to the connector 33. The connecting shaft 44 has a plurality of recesses 441 evenly spaced around the axis. The connector 33 has a plurality of reciprocating linkages 57, the number of which is the same as the number of recesses 441. Each linkage 57 can extend into and exit the recess 441 through reciprocating motion. The constant torque clutch device also includes an elastic clamping component 58 that applies an elastic clamping force to the linkage 57 to cause the linkage 57 to extend into the recess 441. The contact surface between the linkage 57 and the recess 441 is configured such that when the transmission torque exceeds a set torque value, the connecting shaft 44 can force the linkage 57 to overcome the action of the elastic clamping component 58 and exit the recess 441. The specific arrangement of the contact surfaces of the linkage 57 and the recessed portion 441 can be referenced from torque wrenches or other existing torque clutches that can disengage when a set torque is reached. In this embodiment, the linkage 57 is provided with a hemispherical surface, and the recessed portion 441 is provided with an arc-shaped surface, so that the linkage 57 can exit the recessed portion 441 along the arc-shaped surface. When the spin shaft 3 rotates normally, the linkage 57 extends into the recessed portion 441 under the action of the elastic clamping component 58, so that the connecting shaft 44 can rotate with the connecting head 33 and the spin shaft 3. When the spin shaft 3 is jammed, the transmission torque between the connecting head 33 and the connecting shaft 44 increases, and the linkage 57 will disengage from the recessed portion 441 along the surface of the recessed portion 441, thereby causing slippage. This constant torque clutch device is small in size, easy to integrate and set at the end of the spin shaft 3, has strong anti-pollution properties, long service life, and high transmission efficiency.

[0107] In this embodiment, the connector 33 is provided with a through mounting hole 332 that connects to the insertion hole 331 from the outside. The elastic clamping assembly 58 includes a clamping member 581, a third telescopic spring 582, and an adjusting sleeve 583. The linkage member 57, the third telescopic spring 582, and the clamping member 581 are sequentially installed in the through mounting hole 332 in a radially outward direction. The adjusting sleeve 583 is threadedly fitted onto the connector 33 and can be adjusted in the axial direction of the connector 33 by screwing. The adjusting sleeve 583 has a tapered hole 5831. The clamping member 581 extends out of the through mounting hole 332 and abuts against the inner wall of the tapered hole 5831. The inner wall of the tapered hole 5831 forces the clamping member 581 to compress the third telescopic spring 582. By adjusting the position of the adjusting sleeve 583 on the connector 33, the depth of the clamping member 581 within the through mounting hole 332 can be adjusted and limited through the inner wall of the tapered hole 5831, thereby adjusting the compression degree of the third telescopic spring 582. This allows for adjustment of the elastic clamping force applied to the linkage member 57, and consequently, the torque required for the linkage member 57 to exit the recess 441. This elastic clamping assembly 58 has a simple structure, low cost, is easy to manufacture and assemble, is easy to adjust, and has good transmission stability.

[0108] Example 10

[0109] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 3, with the main difference being, for example... Figure 24 As shown, in this embodiment, the anti-jamming device 5 is a hydraulic coupler connected between the rotating shaft 3 and the linkage mechanism 4. This hydraulic coupler is existing technology and can be a commercially available component.

[0110] Example 11

[0111] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in embodiment 3. The main difference is that in this embodiment, the anti-jamming device 5 is a magnetic coupler connected between the rotation shaft 3 and the linkage mechanism 4. This magnetic coupler is existing technology and can be a commercially available component.

[0112] Example 12

[0113] A vacuum coating machine is provided, which is equipped with any one of the workpiece carriers used in vacuum coating machines according to Embodiments 1 to 12. The vacuum coating machine of this embodiment, by providing any one of the workpiece carriers used in vacuum coating machines according to Embodiments 1 to 12, also possesses the advantages of the workpiece carriers used in vacuum coating machines.

[0114] In this embodiment, as Figure 25 and Figure 26 As shown, the vacuum coating machine includes a transfer chamber 102 and multiple process chambers 101 connected to the transfer chamber 102. The multiple process chambers 101 are arranged around the transfer chamber 102. Each process chamber 101 and the transfer chamber 102 are provided with a material inlet / outlet 103 with a first openable / closeable door 1031. The transfer chamber 102 is connected to a feeding / discharging device 104 for supplying and receiving workpiece carriers. The transfer chamber 102 is provided with a transfer device 105 for transferring workpiece carriers between the feeding / discharging device 104 and each process chamber 101. Each process chamber 101 is provided with a drive device for installing the workpiece carrier in the process chamber 101 in a vertical arrangement with a revolution axis 1 and driving the revolution frame 2 to rotate.

[0115] This vacuum coating machine arranges multiple process chambers 101 around a transfer chamber 102. A transfer device 105 is installed in the transfer chamber 102 to transfer the workpiece carrier. The machine occupies little space and has low site requirements. Only one transfer device 105 is needed to transfer the workpiece carrier between the feeding / discharging device 104 and each process chamber 101. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier does not need to be handed over multiple times during the transfer between the feeding / discharging device 104 and each process chamber 101, which can ensure high precision and high repeatability of the workpiece carrier positioning during the transfer process, improve the accuracy and stability of the workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber 101, which can reduce the size of the process chamber 101 and facilitate the installation and layout of other functional devices in the process chamber 101. Furthermore, the workpiece carrier is usually large in the axial direction, while the drive device of each process chamber 101 can install the workpiece carrier in the process chamber 101 with the revolution axis 1 arranged vertically and drive the revolution frame 2 to rotate, so that the radial dimension of each process chamber 101 in the transfer chamber 102 is small, which can reduce the footprint of the entire vacuum coating machine. At the same time, the revolution axis 1 is arranged in the vertical direction, and the rotation axis 3 is arranged in the horizontal direction. The axis of rotation of the workpiece mounted on the rotation axis 3 is arranged horizontally, so that impurities and other contaminants are not easy to adhere to the workpiece, and impurities and other contaminants on the workpiece are easy to fall off, which can improve the coating quality.

[0116] In this embodiment, the driving device includes a lifting drive assembly 106 and a rotary drive assembly 107 for docking with the orbital frame 2 to drive the orbital frame 2 to rotate around the orbital axis 1. The rotary drive assembly 107 is located at the top of the process chamber 101, and the lifting drive assembly 106 is located at the bottom of the process chamber 101 and can support the orbital axis 1 to move up and down. When the lifting drive assembly 106 supports the orbital axis 1 to move up, it can dock the orbital frame 2 with the rotary drive assembly 107, so that the workpiece carrier is stably and reliably clamped between the lifting drive assembly 106 and the rotary drive assembly 107. The rotary drive assembly 107 can drive the orbital frame 2 to rotate around the orbital axis 1. When the lifting drive assembly 106 supports the orbital axis 1 to move down, it can disengage the orbital frame 2 from the rotary drive assembly 107, thereby facilitating the loading and unloading of the workpiece carrier. The combination of lifting drive assembly 106 and rotation drive assembly 107 enables loading and unloading of the workpiece carrier and driving the rotation of the revolution frame 2, while having the advantages of simple structure, low cost and easy control.

[0117] Preferably, the lifting drive assembly 106 includes a support and a lifting drive mechanism for lifting and lowering the drive connecting seat. The support has a positioning hole for the lower end of the rotating shaft 1 to be inserted and positioned. After the lower end of the rotating shaft 1 is inserted into the positioning hole, it can be supported and positioned on the support. The rotation drive assembly 107 includes a connector and a motor for driving the connector to rotate. The connector is provided with a socket hole for positioning and engaging with the upper end of the rotating frame 2. When the lifting drive assembly 106 drives the rotating shaft 1 to move upward, the upper end of the rotating frame 2 is inserted into the socket hole to achieve docking. The motor drives the connector to drive the rotating frame 2 to rotate. When the lifting drive assembly 106 drives the rotating shaft 1 to move downward, the upper end of the rotating frame 2 is disengaged from the rotation drive assembly 107.

[0118] The multiple process chambers 101 in this embodiment can be configured as needed to complete any step in the coating process, such as cleaning, preheating, and coating. Specific configuration can be referenced from existing coating machines. The first openable / closable door 1031 can be an isolation door that completely isolates the process chambers 101 and the transfer chamber 102 when closed, such as a gate valve; or it can be a door that does not completely isolate the process chambers 101 and the transfer chamber 102 when closed, only blocking the material inlet / outlet 103, such as a roller shutter. The feeding / discharging device 104 includes a feeding / discharging chamber and a first carrier assembly installed inside the feeding / discharging chamber. The feeding / discharging chamber has two feeding / discharging ports with gate valves, one of which communicates with the transfer chamber 102. The transfer device 105 can be a commercially available robotic arm.

[0119] The vacuum coating machine is existing technology. Its process chamber is equipped with a lifting device for supporting and raising the revolution shaft 1, and a rotation drive device that engages with the revolution frame 2 when the revolution shaft 1 is raised to drive the revolution frame 2 to rotate around the revolution shaft 1. Both the lifting device and the rotation drive device can be set with reference to existing technology.

[0120] The above description is merely a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the inventive concept should also be considered within the scope of protection of the present invention.

Claims

1. A workpiece carrier for a vacuum coating machine, comprising a revolution shaft (1) and a revolution frame (2) rotatably mounted on the revolution shaft (1), characterized in that: The revolution frame (2) is equipped with multiple rotating shafts (3) for connecting and installing workpieces. The axis of the rotating shafts (3) extends along the radial direction of the revolution frame (2). Each rotating shaft (3) is provided with a linkage mechanism (4) between itself and the revolution shaft (1) to drive the rotating shaft (3) to rotate synchronously when the revolution frame (2) rotates. An anti-jamming device (5) is provided between the rotating shaft (3) and the linkage mechanism (4) to disconnect the transmission between the rotating shaft (3) and the linkage mechanism (4) when the rotating shaft (3) is jammed. The anti-jamming device (5) is a friction transmission device that disconnects the transmission when the transmission torque exceeds the set torque value; the friction transmission device includes a first friction disc (51), a second friction disc (52) and a transmission shaft (41) connected to the linkage mechanism (4). The first friction disc (51) is connected to the rotation shaft (3), and the second friction disc (52) is connected to the transmission shaft (41). The axial end faces of the first friction disc (51) and the second friction disc (52) press against each other to perform friction transmission. The friction transmission device also includes a first adjustment component (53) for adjusting the pressing force between the first friction disc (51) and the second friction disc (52).

2. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The first friction disc (51) is movably mounted on the rotation shaft (3) in such a way that it can reciprocate along the axial direction to adjust the distance between it and the second friction disc (52). The first adjustment assembly (53) includes a first adjustable elastic clamping mechanism that applies an elastic clamping force to the first friction disc (51) to adjust the clamping force between the first friction disc (51) and the second friction disc (52).

3. The workpiece carrier for a vacuum coating machine according to claim 2, characterized in that: The first friction disc (51) is provided with a sliding rod (511), and the end of the rotating shaft (3) is provided with a guide hole (31). The sliding rod (511) is installed in the guide hole (31) and slides in cooperation with the guide hole (31) along the axial direction of the rotating shaft (3). The first adjustable elastic clamping mechanism is located between the rotating shaft (3) and the sliding rod (511).

4. The workpiece carrier for a vacuum coating machine according to claim 3, characterized in that: The first adjustable elastic clamping mechanism includes a first telescopic spring (531) installed in the guide hole (31) and a compression adjustment mechanism for adjusting the compression of the first telescopic spring (531). One end of the first telescopic spring (531) is connected to the slide rod (511) and applies an elastic clamping force to the slide rod (511) so that the first friction disc (51) presses the second friction disc (52).

5. The workpiece carrier for a vacuum coating machine according to claim 4, characterized in that: The compression adjustment mechanism includes a first pressure plate (532) and a first adjusting nut (533). The first adjusting nut (533) is threadedly connected to the rotating shaft (3) and can be adjusted along the axial direction of the rotating shaft (3) by screwing. The first pressure plate (532) is located in the guide hole (31) and abuts against the end of the first telescopic spring (531) away from the slide rod (511). The rotating shaft (3) is provided with a strip groove (32) communicating with the guide hole (31). The first pressure plate (532) is provided with an abutting part that extends out of the strip groove (32) and abuts against the first adjusting nut (533).

6. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The second friction disc (52) has a friction disc shaft (521), and the drive shaft (41) is provided with a connecting hole (411). The friction disc shaft (521) is inserted into the connecting hole (411) and can move axially relative to the drive shaft (41). The first adjusting assembly (53) includes a first rotating frame (534) rotatably connected to the first friction disc (51) and a second rotating frame (535) rotatably connected to the second friction disc (52). A plurality of first high thermal expansion ratio materials are connected between the first rotating frame (534) and the second rotating frame (535). When the first high thermal expansion ratio material connector (536) contracts, it forces the second rotating frame (535) to move closer to the first rotating frame (534) so ​​that the axial end faces of the first friction disk (51) and the second friction disk (52) press against each other. When the first high thermal expansion ratio material connector (536) expands due to heat, it forces the second rotating frame (535) to move away from the first rotating frame (534) to reduce the pressing force between the first friction disk (51) and the second friction disk (52) or to disengage the first friction disk (51) from the second friction disk (52).

7. The workpiece carrier for a vacuum coating machine according to claim 6, characterized in that: The friction disc shaft (521) has a linkage part (5211), and the connecting hole (411) has a linkage hole section (4111) and an idle hole section (4112). When the axial end faces of the second friction disc (52) and the first friction disc (51) are pressed together, the linkage part (5211) engages with the linkage hole section (4111) to perform transmission. When the first friction disc (51) disengages from the second friction disc (52) to a set distance, the linkage part (5211) is located in the idle hole section (4112) and does not perform transmission.

8. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: Both the first friction disc (51) and the second friction disc (52) have radially extending toothed teeth (512) on their contacting end faces.

9. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The axial end faces of the first friction disc (51) and the second friction disc (52) that are pressed together are both provided with a wear-resistant material layer.

10. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The orbital frame (2) is provided with a sealed outer shell (6) that surrounds and encloses the anti-jamming device (5).

11. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The linkage mechanism (4) includes a first gear (42) and a second gear (43) that mesh with each other. The first gear (42) is fixedly installed on the revolution shaft (1), and the second gear (43) is connected to the rotation shaft (3).

12. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The orbiter (2) is provided with a joint mechanism for connecting with the rotation drive to drive the orbiter (2) to rotate.

13. The workpiece carrier for a vacuum coating machine according to any one of claims 1 to 12, characterized in that: The orbital frame (2) includes multiple strip beams (22) that extend along the axial direction. The multiple strip beams (22) are evenly spaced around the orbital axis (1), and multiple rotation axes (3) that are arranged sequentially along the axial direction are installed on each strip beam (22).

14. The workpiece carrier for a vacuum coating machine according to claim 13, characterized in that: Both ends of the revolution shaft (1) are equipped with rotating seats (11), and both ends of the strip beam (22) are respectively connected to the rotating seats (11) at both ends of the revolution shaft (1) in a detachable manner.

15. The workpiece carrier for a vacuum coating machine according to claim 13, characterized in that: Multiple support frames (7) are rotatably mounted on the revolution shaft (1) and are arranged sequentially at intervals along the axial direction. Each strip beam (22) is connected to the support frame (7).

16. A vacuum coating machine, characterized in that: The vacuum coating machine is provided with a workpiece carrier for the vacuum coating machine as described in any one of claims 1 to 15.

17. The vacuum coating machine according to claim 16, characterized in that: The vacuum coating machine includes a transfer chamber (102) and multiple process chambers (101) connected to the transfer chamber (102). The multiple process chambers (101) are arranged around the transfer chamber (102). Each process chamber (101) and the transfer chamber (102) are provided with a material inlet and outlet (103) with a first openable and closable door (1031). The transfer chamber (102) is connected to an inlet and outlet device (104) for supplying and receiving workpiece carriers. The transfer chamber (102) is provided with a transfer device (105) for transferring workpiece carriers between the inlet and outlet device (104) and each process chamber (101). Each process chamber (101) is provided with a drive device for installing the workpiece carrier in the process chamber (101) in a vertical arrangement with a revolution axis (1) and driving the revolution frame (2) to rotate.

18. The vacuum coating machine according to claim 17, characterized in that: The driving device includes a lifting drive assembly (106) and a rotary drive assembly (107) for docking with the orbital frame (2) to drive the orbital frame (2) to rotate around the orbital axis (1). The rotary drive assembly (107) is located at the top of the process chamber (101), and the lifting drive assembly (106) is located at the bottom of the process chamber (101) and can support the orbital axis (1) to move up and down. When the lifting drive assembly (106) supports the orbital axis (1) to move up, it can dock the orbital frame (2) with the rotary drive assembly (107). When the lifting drive assembly (106) supports the orbital axis (1) to move down, it can disengage the orbital frame (2) from the rotary drive assembly (107).

Images