Workpiece carrying frame for vacuum coating machine and vacuum coating machine

Abstract

The invention discloses a workpiece carrying frame for a vacuum coating machine and the vacuum coating machine, the workpiece carrying frame comprises a revolution shaft and a revolution frame rotatably mounted on the revolution shaft, a plurality of rotation shafts used for connecting and mounting workpieces are mounted on the revolution frame, and the rotation shafts are mounted on the revolution frame in a swinging manner through a swinging mechanism; linkage assemblies for driving the rotation shafts to rotate synchronously when the revolution frame rotates are arranged between the respective rotation shafts and the revolution shaft; and the workpiece carrying frame for the vacuum coating machine further comprises a swing adjusting assembly for adjusting the swing angles of the rotation shafts. The vacuum coating machine is provided with the workpiece carrier. The multiple rotation shafts are divided into multiple shaft sets arranged around the revolution shaft at intervals, and each shaft set comprises the multiple rotation shafts sequentially arranged in the axial direction of the revolution frame at intervals. According to the invention, the coating uniformity and quality of complex workpieces can be improved, the requirements of diversified advanced processes are met, and the use flexibility and compatibility are good.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a workpiece carrier for a vacuum coating machine and a vacuum coating machine. Background Art

[0002] Vacuum coating technologies (such as physical vapor deposition (PVD) and chemical vapor deposition (CVD)) are widely used in modern manufacturing to deposit thin-film coatings on workpiece surfaces with specific functionalities (such as wear resistance, corrosion resistance, decorative properties, optical properties, and electrical conductivity). Within this technology, workpiece carriers (also known as workpiece turntables or fixtures), as core components of coating equipment, perform the critical task of positioning and supporting multiple workpieces and enabling them to move in a predetermined pattern within the coating chamber. Their performance directly impacts the efficiency and quality of coating production (e.g., film uniformity, adhesion, and structural density).

[0003] To improve the uniformity of coating thickness across the workpiece surface, especially on complex surfaces, and to overcome the line-of-sight deposition advantage inherent in fixed placement (i.e., faster deposition rates and greater film thickness in areas facing the sputtering or evaporation source), modern vacuum coating equipment generally employs a rotatable workpiece carrier design. This design enables the workpiece to continuously move during the coating process, changing its angle and position relative to the coating source (e.g., sputtering target, evaporation boat), thereby averaging the deposition angle, effectively reducing shadowing effects, and improving overall film thickness uniformity.

[0004] Currently, mainstream rotary workpiece carriers often utilize planetary gear trains or similar transmission mechanisms to achieve compound motion of the workpiece: that is, the workpiece not only orbits around a common central axis (the revolution axis) but also rotates around a local axis (the rotation axis). For example, a workpiece carrier disclosed in Chinese Patent Application Publication No. CN215887213U utilizes this typical dual-axis rotation structure. By combining revolution and rotation, it improves the uniformity of film thickness distribution to a certain extent. However, in the prior art, the revolution and rotation axes of such rotatable workpiece carriers are typically designed to be parallel. The degrees of freedom provided by this parallel axis rotation mode (primarily compound rotation within a two-dimensional plane) are too simple and limited. While effective in improving film thickness uniformity on workpieces with simple geometries (such as flat surfaces and regular external surfaces), it is significantly insufficient in improving the coating uniformity, coverage, and quality of workpieces with complex geometries (especially those with deep holes, grooves, cavities, sharp edges, and complex curved surfaces). At the same time, its single motion mode is difficult to adapt to the increasingly advanced coating processes that require more sophisticated workpiece movement. Therefore, it is urgent to develop a new workpiece carrier technology with higher degrees of freedom of movement, which can more flexibly adjust the posture and angle of the workpiece in the coating space, thereby significantly improving the uniformity and quality of coating on complex workpieces and adapting to the diverse needs of advanced processes. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a workpiece carrier and vacuum coating machine for a vacuum coating machine that can improve the uniformity and quality of coating of complex workpieces, adapt to the needs of diversified advanced processes, and have good flexibility and compatibility.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions: A workpiece carrier for a vacuum coating machine comprises a revolving shaft and a revolving frame rotatably mounted on the revolving shaft, a plurality of self-rotating shafts for connecting and mounting workpieces are mounted on the revolving frame, the self-rotating shafts are mounted on the revolving frame in a swingable manner through a swinging mechanism, and a linkage assembly is provided between each rotating shaft and the revolving shaft for driving the self-rotating shaft to rotate synchronously when the revolving frame rotates, the workpiece carrier for the vacuum coating machine also comprises a swinging adjustment assembly for adjusting the swinging angle of the self-rotating shaft; the plurality of self-rotating shafts are divided into a plurality of shaft groups arranged at intervals around the revolving shaft, and each shaft group comprises a plurality of self-rotating shafts arranged at intervals in sequence along the axial direction of the revolving frame.

[0007] As a further improvement of the above technical solution: The swing mechanism includes a swing seat, the swing seat is connected to a hinge shaft and is hingedly mounted on the revolution frame through the hinge shaft, and the rotation shaft is rotatably mounted on the swing seat.

[0008] The swing adjustment assembly includes one or more adjustment rods rotatably mounted on a revolution frame. The hinge shaft of the swing seat is connected to the adjustment rod via a connecting mechanism. The connecting mechanism causes the hinge shaft to rotate and adjust the angle accordingly when the adjustment rod is rotated.

[0009] The connecting mechanism is a worm gear mechanism arranged between the hinge shaft and the adjusting rod.

[0010] Each adjusting rod is connected to the hinge shaft of the swing seat of multiple rotating shafts in a shaft group.

[0011] The adjusting rod is connected to an adjusting control mechanism for facilitating the rotation of the adjusting rod to adjust the rotation angle of the adjusting rod.

[0012] The adjustment and control mechanism includes an active adjustment gear rotatably mounted on a revolution frame, and each adjustment rod is connected to and mounted with a driven adjustment gear meshing with the active adjustment gear.

[0013] The active adjustment gear is provided with a screwing portion for easy manual screwing.

[0014] The adjustment and control mechanism is a tool joint with a polygonal hole arranged at the end of the adjustment rod.

[0015] The swing seat includes a sleeve portion and two swing arms respectively connected to both sides of the sleeve portion. The revolution frame is provided with two outwardly protruding connecting ears. The two swing arms are respectively hinged to the two connecting ears through hinge shafts. The rotation shaft is sleeved and installed in the sleeve portion.

[0016] The linkage assembly includes a first linkage gear, a second linkage gear and a transmission shaft rotatably mounted on the revolving frame, the first linkage gear is fixedly mounted on the revolving shaft, the second linkage gear is connected to the transmission shaft, the first linkage gear is meshed with the second linkage gear, and the transmission shaft is connected to the rotating shaft through a universal joint.

[0017] The revolution frame is provided with a plurality of strip beams extending along the axial direction. The plurality of strip beams are evenly spaced around the revolution axis, and a group of shaft groups is installed on each strip beam.

[0018] Rotating seats are installed at both ends of the revolution shaft, and the two ends of the strip beam are respectively connected to the rotating seats at both ends of the revolution shaft in a detachable manner.

[0019] A plurality of support frames arranged in sequence and spaced apart along the axial direction are rotatably mounted on the revolution shaft, and each strip beam is connected to the support frame.

[0020] The present invention also provides a vacuum coating machine, which is provided with the above-mentioned workpiece carrier for the vacuum coating machine.

[0021] As a further improvement of the above technical solution: The vacuum coating machine includes a transfer chamber and multiple process chambers connected to the transfer chamber. The multiple process chambers are arranged around the transfer chamber. A material inlet and outlet with a first openable and closable door is provided between each process chamber and the transfer chamber. The transfer chamber is connected to a material loading and unloading device for supplying and receiving workpiece carriers. A transfer device for transferring workpiece carriers between the loading and unloading device and each process chamber is provided in the transfer chamber. Each process chamber is provided with a driving device for installing the workpiece carrier in the process chamber with the revolution axis vertically arranged and driving the revolution frame to rotate.

[0022] The driving device includes a lifting drive component and a rotation drive component for docking with the revolution frame to drive the revolution frame to rotate around the revolution axis. The rotation drive component is arranged at the top of the process chamber, and the lifting drive component is arranged at the bottom of the process chamber and can support the revolution axis for lifting and lowering movement. When the lifting drive component supports the revolution axis for upward movement, the revolution frame can dock with the rotation drive component. When the lifting drive component supports the revolution axis for downward movement, the revolution frame can be separated from the rotation drive component.

[0023] Compared with the prior art, the advantages of the present invention are: The workpiece carrier for the vacuum coating machine of the present invention has multiple rotating shafts installed on the revolution frame. The rotating shafts are installed on the revolution frame in a swingable manner. When the workpiece is loaded and installed on the rotating shaft for coating, the workpiece can not only rotate around the revolution shaft, but the rotating shaft can also rotate around the axis of the rotating shaft with the workpiece. Compared with the existing technology, the workpiece can have a higher degree of freedom of movement, and the posture and angle of the workpiece in the coating space can be adjusted more flexibly, which can improve the uniformity and quality of the coating of complex workpieces and meet the needs of diversified advanced processes. In addition, the swing adjustment component can also adjust the swing angle of the rotating shaft to meet the needs of the workpiece rotating around the axis of different angles, and has good flexibility and compatibility. The multiple rotating shafts are divided into multiple groups of shaft groups arranged at intervals around the revolution shaft. Each group of shaft groups has multiple rotating shafts arranged at intervals along the axial direction of the revolution frame, so that the workpieces are arranged evenly and reasonably on the revolution frame, which is conducive to installing as many workpieces as possible on the revolution frame and ensuring the quality of the coating.

[0024] Since the vacuum coating machine of the present invention is provided with the workpiece carrier for the vacuum coating machine of the present invention, the vacuum coating machine of the present invention also has the advantages possessed by the workpiece carrier for the vacuum coating machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the three-dimensional structure of the workpiece carrier for the vacuum coating machine in Example 1.

[0026] Figure 2 for Figure 1 Enlarged structural diagram at point A in the middle.

[0027] Figure 3 for Figure 1 Enlarged structural diagram at point B in the middle.

[0028] Figure 4 for Figure 1 Enlarged structural diagram at point C in the middle.

[0029] Figure 5 This is a schematic diagram of the three-dimensional structure of the workpiece carrier for the vacuum coating machine in Example 2.

[0030] Figure 6 for Figure 5 Enlarged structural diagram at point D in the middle.

[0031] Figure 7 This is a schematic diagram of the top cross-sectional structure of the vacuum coating machine in Example 3.

[0032] Figure 8 This is a schematic diagram of the main cross-sectional structure of the process chamber in Example 3.

[0033] Legend: 1. Revolution axis; 11. Rotating seat; 2. Revolution frame; 21. Strip beam; 23. Support frame; 3. Rotation axis; 4. Linkage assembly; 41. First linkage gear; 42. Second linkage gear; 43. Drive shaft; 44. Universal joint; 5. Swing adjustment assembly; 51. Adjustment rod; 511. Tool joint; 52. Worm gear mechanism; 53. Active adjustment gear; 531. Screwing part; 54. Driven adjustment gear; 6. Swing seat; 61. Socket part; 62. Swing arm; 63. Connecting lug; 7. Articulated shaft; 101. Process chamber; 102. Transfer chamber; 103. Material inlet and outlet; 1031. First openable and closable door; 104. Material loading and unloading device; 105. Transfer device; 106. Lifting drive assembly; 107. Rotation drive assembly. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] Example 1 like Figure 1 As shown, the workpiece carrier for the vacuum coating machine of this embodiment includes a revolving shaft 1 and a revolving frame 2 rotatably mounted on the revolving shaft 1, a plurality of self-rotating shafts 3 for connecting and mounting workpieces are mounted on the revolving frame 2, the self-rotating shafts 3 are mounted on the revolving frame 2 in a swingable manner through a swinging mechanism, and a linkage assembly 4 is provided between each revolving shaft 3 and the revolving shaft 1 for driving the self-rotating shaft 3 to rotate synchronously when the revolving frame 2 rotates. The workpiece carrier for the vacuum coating machine also includes a swinging adjustment assembly 5 for adjusting the swinging angle of the self-rotating shaft 3; the plurality of self-rotating shafts 3 are divided into a plurality of shaft groups arranged at intervals around the revolving shaft 1, and each shaft group includes a plurality of self-rotating shafts 3 arranged at intervals in sequence along the axial direction of the revolving frame 2. The workpiece carrier for the vacuum coating machine has multiple self-rotating shafts 3 mounted on a revolution frame 2. The self-rotating shafts 3 are mounted on the revolution frame 2 in a swingable manner. When a workpiece is loaded and mounted on the self-rotating shafts 3 for coating, the workpiece can not only rotate around the revolution axis 1, but the self-rotating shafts 3 can also rotate the workpiece around the axis of the self-rotating shaft 3. Compared with the existing technology, the workpiece can have a higher degree of freedom of movement, and the posture and angle of the workpiece in the coating space can be more flexibly adjusted, which can improve the uniformity and quality of the coating of complex workpieces and meet the needs of diversified advanced processes. In addition, the swing adjustment component 5 can also adjust the swing angle of the self-rotating shaft 3 to meet the needs of the workpiece rotating around the axis at different angles, and has good flexibility and compatibility. The multiple self-rotating shafts 3 are divided into multiple groups of shafts arranged at intervals around the revolution axis 1. Each group of shafts has multiple self-rotating shafts 3 arranged in sequence along the axial direction of the revolution frame 2, so that the workpieces are evenly and reasonably arranged on the revolution frame 2, which is conducive to installing as many workpieces as possible on the revolution frame 2 and ensuring the coating quality.

[0036] In this embodiment, Figure 2As shown, the swing mechanism includes a swing base 6, which is connected to a hinge shaft 7 and hingedly mounted on the revolving frame 2 via the hinge shaft 7. The rotation shaft 3 is rotatably mounted on the swing base 6. The rotation shaft 3 can rotate and also move axially relative to the swing base 6. The swing base 6 can rotate about the hinge shaft 7 relative to the revolving frame 2, thereby enabling the rotation shaft 3 to both rotate and swing. This mounting structure for the rotation shaft 3 is simple in structure, easy to manufacture and assemble, and stable and reliable in operation.

[0037] In this embodiment, the swing adjustment assembly 5 includes multiple adjustment rods 51 rotatably mounted on the revolving frame 2. The hinge shaft 7 of the swinging seat 6 is connected to the adjustment rods 51 via a connecting mechanism. Rotating the adjustment rods 51 causes the hinge shaft 7 to rotate and adjust the angle accordingly. To adjust the swing angle of the rotation axis 3, simply rotate the adjustment rods 51, causing the hinge shaft 7 to rotate and adjust the angle accordingly. This provides simple adjustment. Each adjustment rod 51 is rotatably mounted in conjunction with multiple rotating sleeves connected to the revolving frame 2.

[0038] In this embodiment, the connecting mechanism is a worm gear mechanism 52 arranged between the articulated shaft 7 and the adjusting rod 51. The worm gear mechanism 52 has a self-locking function. Rotating the adjusting rod 51 can drive the articulated shaft 7 to rotate, and the articulated shaft 7 cannot reversely drive the adjusting rod 51 to rotate when subjected to external torque. There is no need to set up an additional locking mechanism to ensure that the rotating shaft 3 remains at the adjusted swing angle. Its structure is simple and the cost is low.

[0039] In this embodiment, each adjustment rod 51 is connected to the hinge shaft 7 of the swing base 6 of multiple rotation shafts 3 in a shaft group. That is, the hinge shafts 7 of the swing base 6 of multiple rotation shafts 3 in a shaft group are simultaneously connected to the same adjustment rod 51. Each adjustment rod 51 simultaneously adjusts the swing angle of multiple rotation shafts 3, which can reduce the number of adjustment rods 51, making the structure simpler and more compact, and reducing costs.

[0040] In this embodiment, the adjusting rod 51 is connected to an adjusting control mechanism for facilitating the rotation of the adjusting rod 51 to adjust the rotation angle of the adjusting rod 51 , thereby facilitating the adjustment operation.

[0041] In this embodiment, Figure 3 As shown, the adjustment control mechanism includes an active adjustment gear 53 rotatably mounted on the revolving frame 2. Each adjustment rod 51 is connected to a driven adjustment gear 54 that meshes with the active adjustment gear 53. Simply rotating the active adjustment gear 53 simultaneously rotates all adjustment rods 51, thereby simultaneously adjusting the swing angles of all rotating shafts 3. This makes adjustment simple and convenient, and the consistent rotation angles of all adjustment rods 51 also ensure consistent swing angle changes for all rotating shafts 3, helping to ensure consistent swing angles for all rotating shafts 3 after adjustment.

[0042] In this embodiment, the active adjustment gear 53 is provided with a screwing portion 531 for easy manual screwing, so as to facilitate manual operation and adjustment.

[0043] In this embodiment, the swing seat 6 includes a sleeve portion 61 and two swing arms 62 connected to either side of the sleeve portion 61. The revolving frame 2 is provided with two protruding connecting lugs 63. The two swing arms 62 are respectively hingedly connected to the two connecting lugs 63 via hinge shafts 7. The rotation shaft 3 is sleeved and mounted within the sleeve portion 61. The two swing arms 62 are respectively hingedly connected to the two connecting lugs 63, providing strong connection strength, smooth rotation, and high load-bearing capacity.

[0044] In this embodiment, Figure 4 As shown, the linkage assembly 4 includes a first linkage gear 41, a second linkage gear 42, and a transmission shaft 43 rotatably mounted on the revolving frame 2. The first linkage gear 41 is fixedly mounted on the revolving shaft 1, and the second linkage gear 42 is connected to the transmission shaft 43. The first linkage gear 41 and the second linkage gear 42 mesh with each other, and the transmission shaft 43 is connected to the rotating shaft 3 via a universal joint 44. The linkage assembly 4 uses a gear mechanism that cooperates with the first linkage gear 41 and the second linkage gear 42, which has the advantages of simple structure, low cost, easy assembly and maintenance, and stable and reliable transmission. The first linkage gear 41 and the second linkage gear 42 are specifically bevel gears or spur gears. In other embodiments, the linkage assembly 4 may also use a non-gear mechanism, as long as it can achieve synchronous rotation of the rotating shaft 3 when the revolving frame 2 is driven to rotate.

[0045] In this embodiment, the revolution frame 2 is equipped with multiple axially extending strip beams 21, evenly spaced about the revolution axis 1. Each strip beam 21 is mounted with a shaft assembly, specifically, multiple axially spaced rotation shafts 3. This results in a simple structure, lightweight, and easy fabrication and assembly of the revolution frame 2. In this embodiment, only one adjustment rod 51 is provided for each strip beam 21, connecting and adjusting the swing angle of all the rotation shafts 3 on that beam 21.

[0046] In this embodiment, both ends of the revolution axis 1 are equipped with a rotating rotating seat 11, and the two ends of the strip beam 21 are respectively connected to the rotating seats 11 at both ends of the revolution axis 1 in a detachable manner. During production and assembly, the two manufactured rotating seats 11 are respectively installed at the two ends of the revolution axis 1, the rotation axis 3 is installed on the strip beam 21, and then the strip beam 21 is connected and fixed on the two rotating seats 11. It is simple to assemble and convenient to disassemble each strip beam 21 separately for replacement and maintenance. Moreover, if the installation space permits, the number of strip beams 21 can be increased or decreased as needed, which is flexible and convenient to use. For example, the rotating seat 11 of this embodiment is a hexagonal structure, and three strip beams 21 are specifically installed. In other cases, no more than six other strip beams 21 can be installed on the rotating seat 11 of the hexagonal structure as needed. In other embodiments, the rotating seat 11 can also be set to other shapes, and a larger number of strip beams 21 can be set. In this embodiment, the rotating seat 11 is rotatably mounted on the revolution shaft 1 through a bearing mechanism, and the rotation shaft 3 is mounted on the strip beam 21 through a bearing mechanism or a sleeve structure. The strip beam 21 and the rotating seat 11 are connected with screws.

[0047] In this embodiment, a plurality of support frames 23 arranged in sequence along the axial direction are rotatably mounted on the revolution shaft 1, and each strip beam 21 is connected to the support frame 23, which can prevent the strip beam 21 from deforming and improve the installation stability and load-bearing capacity of the strip beam 21.

[0048] Example 2 The workpiece carrier for the vacuum coating machine of this embodiment is basically the same as that of embodiment 1, except that Figure 5 and Figure 6 As shown, in this embodiment, the adjustment control mechanism is a tool connector 511 with a polygonal hole provided at the end of the adjustment rod 51. Each adjustment rod 51 is provided with a tool connector 511. Simply equip yourself with a tool having a polygonal plug that matches the polygonal hole, insert the polygonal plug into the polygonal hole, and then twist the adjustment rod 51. This embodiment has a simpler structure and lowers the cost.

[0049] Example 3 A vacuum coating machine is provided with the workpiece carrier for vacuum coating machines of embodiment 1 or 2. The vacuum coating machine of this embodiment, because it is provided with the workpiece carrier for vacuum coating machines of embodiment 1 or 2, also has the advantages of the workpiece carrier for vacuum coating machines.

[0050] In this embodiment, Figure 7 and Figure 8As shown, the vacuum coating machine includes a transfer chamber 102 and a plurality of process chambers 101 connected to the transfer chamber 102, the plurality of process chambers 101 are arranged around the transfer chamber 102, and a material inlet and outlet 103 with a first openable and closable door 1031 is provided between each process chamber 101 and the transfer chamber 102, the transfer chamber 102 is connected to a material loading and unloading device 104 for supplying and receiving workpiece carriers, a transfer device 105 for transferring workpiece carriers between the loading and unloading device 104 and each process chamber 101 is provided in the transfer chamber 102, and each process chamber 101 is provided with a driving device for installing the workpiece carrier in the process chamber 101 with the revolution axis 1 vertically arranged and driving the revolution frame 2 to rotate.

[0051] The vacuum coating machine arranges multiple process chambers 101 around a transfer chamber 102, and a transfer device 105 is arranged in the transfer chamber 102 to transfer the workpiece carrier. The overall space occupied is small, the site requirement is low, and only one transfer device 105 is needed to realize the transfer of the workpiece carrier between the feed and discharge device 104 and each process chamber 101. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier does not need to be handed over multiple times during the transfer between the feed and discharge device 104 and each process chamber 101, which can ensure high-precision and high-repeatability positioning of the workpiece carrier during the transfer process, and improve the accuracy and stability and reliability of the workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber 101, which can reduce the size of the process chamber 101 and facilitate the installation and layout of other functional devices in the process chamber 101. In addition, the workpiece carrier is usually larger in the axial direction, and the driving device of each process chamber 101 can install the workpiece carrier in the process chamber 101 with the revolution axis 1 vertically arranged, and drive the revolution frame 2 to rotate, so that the size of each process chamber 101 in the radial direction of the transfer chamber 102 is small, which can reduce the footprint of the entire vacuum coating machine. At the same time, the revolution axis 1 is arranged in the vertical direction, and the rotation axis 3 is arranged in the horizontal direction. The axis of rotation of the rotation axis 3 with the workpiece installed thereon is arranged horizontally, so that impurities and other contaminants are not easily attached to the workpiece, and impurities and other contaminants on the workpiece are also easy to fall off, which makes it easy to improve the coating quality.

[0052] In this embodiment, the driving device includes a lifting drive component 106 and a rotating drive component 107 for docking with the revolution frame 2 to drive the revolution frame 2 to rotate around the revolution axis 1. The rotating drive component 107 is arranged at the top of the process chamber 101, and the lifting drive component 106 is arranged at the bottom of the process chamber 101 and can support the revolution axis 1 for lifting and lowering movement. When the lifting drive component 106 supports the revolution axis 1 for upward movement, the revolution frame 2 can be docked with the rotating drive component 107, so that the workpiece carrier is stably and reliably clamped between the lifting drive component 106 and the rotating drive component 107, and the rotating drive component 107 can drive the revolution frame 2 to rotate around the revolution axis 1. When the lifting drive component 106 supports the revolution axis 1 for downward movement, the revolution frame 2 can be disengaged from the rotating drive component 107, thereby facilitating the loading and unloading of the workpiece carrier. The combination of the lifting drive assembly 106 and the rotating drive assembly 107 has the advantages of simple structure, low cost and easy control while being able to load and unload the workpiece carrier and drive the revolution frame 2 to rotate.

[0053] Preferably, the above-mentioned lifting drive component 106 includes a support and a lifting drive mechanism that drives the connecting seat to lift and lower the movement. The support has a positioning hole for inserting the lower end of the revolving shaft 1 for positioning. After the lower end of the revolving shaft 1 is inserted into the positioning hole, it can be supported and positioned on the support. The rotation drive component 107 includes a connector and a motor that drives the connector to rotate. The connector is provided with a socket hole that is socketed and positioned with the upper end of the revolving frame 2. When the lifting drive component 106 drives the revolving shaft 1 to rise, the upper end of the revolving frame 2 is inserted into the socket hole for docking. The motor drives the connecting head to drive the revolving frame 2 to rotate. When the lifting drive component 106 drives the revolving shaft 1 to descend, the upper end of the revolving frame 2 exits the socket hole, thereby realizing the separation of the revolving frame 2 from the rotation drive component 107.

[0054] The multiple process chambers 101 of this embodiment can be configured as needed to complete any one of the processes in the coating process, such as cleaning, preheating, coating, etc. The specific configuration can refer to the existing coating machine. The first openable and closable door 1031 can be an isolation door that completely isolates the process chamber 101 and the transfer chamber 102 when closed, such as a gate valve, or it can be a door that does not completely isolate the process chamber 101 and the transfer chamber 102 when closed and only blocks the material inlet and outlet 103, such as a roller shutter. The feed and discharge device 104 includes a feed and discharge chamber and a first carrier support assembly installed in the feed and discharge chamber. The feed and discharge chamber is provided with two feed and discharge ports with gate valves, one of which is connected to the transfer chamber 102. The transfer device 105 can use a commercially available manipulator.

[0055] The above is only a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above embodiment. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of the present invention should also be considered as the scope of protection of the present invention.

Claims

1. A workpiece carrier for a vacuum coating machine, comprising a revolution shaft (1) and a revolution frame (2) rotatably mounted on the revolution shaft (1), characterized in that: The revolution frame (2) is provided with a plurality of self-rotating shafts (3) for connecting and installing workpieces. The self-rotating shafts (3) are mounted on the revolution frame (2) in a swingable manner through a swing mechanism. A linkage assembly (4) is provided between each of the rotation shafts (3) and the revolution shaft (1) for driving the self-rotating shafts (3) to rotate synchronously when the revolution frame (2) rotates. The workpiece carrier for the vacuum coating machine also includes a swing adjustment assembly (5) for adjusting the swing angle of the self-rotating shaft (3); the plurality of self-rotating shafts (3) are divided into a plurality of shaft groups arranged at intervals around the revolution shaft (1), and each shaft group includes a plurality of self-rotating shafts (3) arranged at intervals along the axial direction of the revolution frame (2).

2. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The swing mechanism comprises a swing seat (6), the swing seat (6) is connected to a hinge shaft (7) and is hingedly mounted on the revolution frame (2) via the hinge shaft (7), and the rotation shaft (3) is rotatably mounted on the swing seat (6).

3. The workpiece carrier for a vacuum coating machine according to claim 2, characterized in that: The swing adjustment assembly (5) includes one or more adjustment rods (51) rotatably mounted on the revolution frame (2), and the hinge shaft (7) of the swing seat (6) is connected to the adjustment rod (51) via a connecting mechanism. When the adjustment rod (51) is rotated, the connecting mechanism causes the hinge shaft (7) to rotate and adjust the angle accordingly.

4. The workpiece carrier for a vacuum coating machine according to claim 3, characterized in that: The connecting mechanism is a worm gear mechanism (52) provided between the hinge shaft (7) and the adjusting rod (51).

5. The workpiece carrier for a vacuum coating machine according to claim 3, characterized in that: Each adjusting rod (51) is connected to a hinge shaft (7) of a swing seat (6) of a plurality of rotating shafts (3) in a shaft group.

6. The workpiece carrier for a vacuum coating machine according to claim 3, characterized in that: The adjusting rod (51) is connected to an adjusting control mechanism for facilitating rotation of the adjusting rod (51) to adjust the rotation angle of the adjusting rod (51).

7. The workpiece carrier for a vacuum coating machine according to claim 6, characterized in that: The adjustment control mechanism comprises an active adjustment gear (53) rotatably mounted on the revolution frame (2), and each adjustment rod (51) is connected to a driven adjustment gear (54) meshing with the active adjustment gear (53).

8. The workpiece carrier for a vacuum coating machine according to claim 7, characterized in that: The active adjustment gear (53) is provided with a screwing portion (531) that is convenient for manual screwing.

9. The workpiece carrier for a vacuum coating machine according to claim 6, characterized in that: The adjustment and control mechanism is a tool joint (511) provided at the end of the adjustment rod (51) and having a polygonal hole.

10. The workpiece carrier for a vacuum coating machine according to claim 2, characterized in that: The swing seat (6) includes a sleeve portion (61) and two swing arms (62) respectively connected to both sides of the sleeve portion (61). The revolution frame (2) is provided with two outwardly protruding connecting ears (63). The two swing arms (62) are respectively hinged to the two connecting ears (63) through hinge shafts (7). The rotation shaft (3) is sleeved and installed in the sleeve portion (61).

11. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The linkage assembly (4) comprises a first linkage gear (41), a second linkage gear (42) and a transmission shaft (43) rotatably mounted on the revolving frame (2); the first linkage gear (41) is fixedly mounted on the revolving shaft (1); the second linkage gear (42) is connected to the transmission shaft (43); the first linkage gear (41) and the second linkage gear (42) are meshed with each other; and the transmission shaft (43) is connected to the rotating shaft (3) via a universal joint (44).

12. The workpiece carrier for a vacuum coating machine according to any one of claims 1 to 11, characterized in that: The revolution frame (2) is provided with a plurality of strip beams (21) extending in the axial direction. The plurality of strip beams (21) are evenly spaced around the revolution axis (1), and a group of shaft groups is mounted on each strip beam (21).

13. The workpiece carrier for a vacuum coating machine according to claim 12, characterized in that: Both ends of the revolution shaft (1) are equipped with rotating seats (11), and the two ends of the strip beam (21) are respectively connected to the rotating seats (11) at both ends of the revolution shaft (1) in a detachable manner.

14. The workpiece carrier for a vacuum coating machine according to claim 12, wherein: A plurality of support frames (23) arranged in sequence and spaced apart along the axial direction are rotatably mounted on the revolution shaft (1), and each strip beam (21) is connected to the support frame (23).

15. A vacuum coating machine, characterized in that: The vacuum coating machine is provided with the workpiece carrier for the vacuum coating machine according to any one of claims 1 to 14.

16. The vacuum coating machine according to claim 15, wherein: The vacuum coating machine includes a transfer chamber (102) and a plurality of process chambers (101) connected to the transfer chamber (102), wherein the plurality of process chambers (101) are arranged around the transfer chamber (102), and a material inlet and outlet (103) with a first openable and closable door (1031) is provided between each process chamber (101) and the transfer chamber (102), and the transfer chamber (102) is connected to a material loading and unloading device (104) for supplying and receiving workpiece carriers, and a transfer device (105) for transferring workpiece carriers between the material loading and unloading device (104) and each process chamber (101) is provided in the transfer chamber (102), and each process chamber (101) is provided with a driving device for installing the workpiece carrier in the process chamber (101) in a manner in which the revolution axis (1) is vertically arranged and driving the revolution frame (2) to rotate.

17. The vacuum coating machine according to claim 16, wherein: The driving device includes a lifting drive component (106) and a rotating drive component (107) for docking with the revolution frame (2) to drive the revolution frame (2) to rotate around the revolution axis (1), wherein the rotating drive component (107) is arranged at the top of the process chamber (101), and the lifting drive component (106) is arranged at the bottom of the process chamber (101) and can support the revolution axis (1) for lifting and lowering movement, and when the lifting drive component (106) supports the revolution axis (1) for upward movement, the revolution frame (2) can dock with the rotating drive component (107), and when the lifting drive component (106) supports the revolution axis (1) for downward movement, the revolution frame (2) can be separated from the rotating drive component (107).

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