Air floating guide rail-mechanical guide rail composite guiding differential driving motion platform

Through the combination of the air-floating slide rail and the mechanical slide composite guide and differential adjustment components, the problems of low straightness of the mechanical guide rail and insufficient rigidity of the air-floating guide rail are solved, and a high-precision and stable motion platform is realized, with good acceleration performance and load-bearing capacity.

CN120557513APending Publication Date: 2025-08-29GUANGDONG UNIV OF TECH +1
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Patent Information

Application Number
CN202510975322.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-15
Publication Date
2025-08-29

AI Technical Summary

Technical Problem

The mechanical guide rail has low straightness in high-precision motion control, and the air-floating guide rail is not rigid enough in high-dynamic performance scenarios, making it difficult to meet the comprehensive performance requirements.

Method used

The air-floating slide rail is combined with the mechanical slide rail, combined with the differential adjustment component, and the high straightness of the air-floating guide rail and the high rigidity of the mechanical guide rail, reduce the friction influence through the air-film separation, and achieve accurate displacement adjustment through the differential adjustment component.

Benefits of technology

A comprehensive motion platform with high precision, high stability and good acceleration performance is realized to meet the needs of high-precision motion control.

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Abstract

The invention relates to the technical field of motion platforms, in particular to an air floating guide rail-mechanical guide rail composite guiding differential driving motion platform. In order to solve the problems that a mechanical guide rail is high in rigidity, good in acceleration performance but low in straightness, an air-floating guide rail is high in straightness but weak in rigidity, the mechanical guide rail and the air-floating guide rail both have limitations, and comprehensive performance requirements are difficult to meet, the following technical scheme is provided: the air-floating guide rail comprises an air-floating slide rail and a sliding platform slidably mounted outside the air-floating slide rail; the sliding platform moves in the length direction of at least one set of mechanical sliding rails located on the air floatation sliding rails, and first sliding tables are arranged on the mechanical sliding rails in a sliding mode. The differential adjusting assembly is arranged between the sliding platform and the first sliding table, the differential adjusting assembly comprises a second servo motor which is movably arranged, and the second servo motor is in sliding fit with the sliding platform or the mechanical sliding rail. According to the invention, the movement precision and the adjustment precision are improved, the comprehensive performance and the stability are enhanced, and the limitation of a single guide rail is effectively solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of motion platforms, and in particular to an air-floating guide rail-mechanical guide rail composite guided differential drive motion platform. Background Art

[0002] As the core component for achieving linear motion, the performance of the guide rail directly affects the operating accuracy and work efficiency of the entire equipment. At present, the commonly used guide rail types are mainly mechanical guide rails and air-floating guide rails, but both have certain limitations in practical applications. Mechanical guide rails have high rigidity due to their own structural characteristics, which enables them to maintain a stable operating state when bearing large loads. Especially under conditions that require rapid acceleration, they can show excellent acceleration performance. Therefore, they have been widely used in scenarios with high requirements for load capacity and dynamic response. However, since it is difficult to completely eliminate processing errors in the manufacturing process of mechanical guide rails, and they will cause wear due to factors such as friction during long-term use, their straightness accuracy is relatively low, making it difficult to meet the needs of high-precision motion control.

[0003] In contrast, air-bearing guides utilize an air film formed by gas lubrication to separate moving parts from the guide base, significantly reducing the effects of friction. This allows for extremely high straightness accuracy, playing a vital role in fields with stringent requirements for motion straightness, such as precision measurement and semiconductor manufacturing. However, air-bearing guides are relatively weak in rigidity and are prone to deformation or vibration when faced with large loads or when rapid acceleration is required, limiting their application in high-dynamic performance scenarios. In light of this, the present invention proposes a differentially driven motion platform with a composite air-bearing and mechanical guide. Summary of the Invention

[0004] The purpose of the present invention is to address the problem in the background technology that mechanical guide rails have high rigidity and good acceleration performance but low straightness, while air-floating guide rails have high straightness but weak rigidity. Both have limitations and are difficult to meet the comprehensive performance requirements. An air-floating guide rail-mechanical guide rail composite guided differential drive motion platform is proposed.

[0005] The technical solution of the present invention: an air-floating guide rail-mechanical guide rail composite guided differentially driven motion platform, including an air-floating slide rail and a sliding platform slidably installed on the outside of the air-floating slide rail, the sliding platform moves along the length direction of at least one group of mechanical slide rails located on the air-floating slide rail, and a first slide is slidably arranged on the mechanical slide rail; a differential adjustment component is arranged between the sliding platform and the first slide, and the differential adjustment component includes a movably arranged second servo motor, the second servo motor is slidably matched with the sliding platform or the mechanical slide rail, and a coaxial rod is installed at the output end of the second servo motor, the coaxial rod is composed of two sections of screw rods with the same rotation direction and different leads, the sliding platform and the first slide respectively correspond to the two sections of thread of the screw rod, and when the coaxial rod rotates, the displacement of the sliding platform is controlled by the difference in the leads of the two screws.

[0006] Optionally, a limiting support mechanism is also included, which includes at least one group of mechanical slide rails parallel to the air-floating slide rails, and a first slider is slidably connected to the mechanical slide rails. The first slider is fixedly connected to the first slide table, and when the first slide table moves, it drives the sliding platform to move synchronously.

[0007] Optionally, it also includes a driving mechanism installed on one side of the air-floating slide rail, the driving mechanism is used to drive the sliding platform to move, the driving mechanism includes a side plate fixedly connected to the air-floating slide rail, a first servo motor is installed on the side plate, the output end of the first servo motor is fixedly connected to a first screw rod, a first threaded sleeve is threadedly connected to the first screw rod, the outer ring of the first threaded sleeve is fixedly connected to a first connecting plate, and the first connecting plate is fixedly connected to the first slide.

[0008] Optionally, the mechanical slide rail is fixedly connected to the air-floating slide rail, and the mechanical slide rail is arranged parallel to the first screw rod.

[0009] Optionally, the coaxial rod is composed of a second screw rod and a third screw rod that are coaxially and linearly connected, and the second screw rod and the third screw rod have the same rotation direction but different leads.

[0010] Optionally, the differential adjustment assembly also includes a second connecting plate, a second threaded sleeve is installed in the second connecting plate, the second screw rod is threadedly connected to the second threaded sleeve, the output end of the second servo motor is fixedly connected to the second screw rod or the third screw rod, and a mounting block is installed on the outside of the second servo motor.

[0011] Optionally, the position limiting support mechanism further includes a second slide fixedly connected to the bottom of the mounting block, a second slider is installed at the bottom of the second slide, and the second slider is slidably connected to the mechanical slide rail.

[0012] Optionally, a third threaded sleeve is threadedly connected to the third screw rod, and a third connecting plate is fixedly connected to the outer ring of the third threaded sleeve.

[0013] Optionally, the second connecting plate and the third connecting plate are fixedly connected to the sliding platform or the first sliding platform respectively.

[0014] Optionally, the second screw rod and the third screw rod are arranged parallel to the mechanical slide rail.

[0015] In summary, this application includes at least one of the following beneficial technical effects:

[0016] The present invention separates the air-floating slide rail from the sliding platform through an air film, and takes advantage of the high linearity of the air-floating guide rail to provide a basic high-precision guide for the sliding platform, greatly reducing the impact of friction on linearity. At the same time, the mechanical slide rail cooperates with the first slider, taking advantage of the high rigidity of the mechanical guide rail to enhance the stability of the platform during acceleration and load-bearing, making up for the defect of insufficient rigidity of the air-floating guide rail. The application of the air-floating guide rail ensures high linearity of the overall movement. The combination of the two enables the platform to have good acceleration performance and load-bearing capacity, while achieving high-precision linear motion, and significantly improving the overall performance.

[0017] Furthermore, the simultaneous differential adjustment component utilizes the characteristics of the second and third screws having the same rotation direction but different leads to form a differential drive. When the second servo motor drives the two to rotate synchronously, the actual displacement of the sliding platform is the difference between the two leads, achieving precise adjustment of the sliding platform position and meeting the requirements of high-precision motion control.

[0018] In summary, the present invention not only improves the motion accuracy and adjustment precision, but also enhances the overall performance and stability, and effectively solves the limitations of a single guide rail. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the structure of the air-floating guide-mechanical guide composite guided differential drive motion platform;

[0020] Figure 2 yes Figure 1 Schematic cross-sectional view of ;

[0021] Figure 3 It is a schematic cross-sectional structure diagram of the driving mechanism;

[0022] Figure 4 It is a schematic diagram of the cross-sectional structure of the differential adjustment component.

[0023] Reference numerals:

[0024] 1. Air-floating slide rail; 2. Sliding platform; 3. Driving mechanism; 31. Side plate; 32. First servo motor; 33. First screw rod; 34. First threaded sleeve; 35. First connecting plate;

[0025] 4. Differential adjustment assembly; 41. Second connecting plate; 42. Second threaded sleeve; 43. Second screw rod; 44. Third screw rod; 45. Second servo motor; 46. Mounting block; 47. Third threaded sleeve; 48. Third connecting plate;

[0026] 5. Position limiting support mechanism; 51. Mechanical slide rail; 52. First slider; 53. First slide platform; 54. Second slide platform; 55. Second slider. DETAILED DESCRIPTION

[0027] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0028] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention.

[0029] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0032] Example

[0033] like Figure 1 and Figure 2As shown, the air-floating guide rail-mechanical guide rail composite guided differential drive motion platform proposed in the present invention includes an air-floating slide rail 1 and a sliding platform 2 slidably mounted on the outside of the air-floating slide rail 1. The air film formed by gas lubrication is used to separate the air-floating slide rail 1 from the sliding platform 2, which greatly reduces the impact of friction, thereby achieving extremely high straightness accuracy and ensuring that the sliding platform 2 always maintains a stable trajectory during movement.

[0034] Furthermore, the motion platform also includes a position-limiting support mechanism 5, which includes at least one set of mechanical rails 51 parallel to the air-floating slide 1. The sliding platform 2 moves along the length of the at least one set of mechanical rails 51 located on the air-floating slide 1. A first slide 53 is slidably mounted on the mechanical rails 51, and a first slider 52 is slidably connected to the mechanical rails 51. The two sets of first sliders 52 slide smoothly, reducing frictional resistance during movement. The first slider 52 is fixedly connected to the first slide 53. The mechanical rail 51 is highly rigid and, in conjunction with the first slider 52, can provide precise guidance for the movement of the first slide 53. The first slide 53 moves smoothly under the position-limiting action of the first slider 52 and the mechanical rail 51. When the first slide 53 moves, it drives the sliding platform 2 to move synchronously. Both sets of mechanical slides 51 are fixedly connected to the air-floating slide 1. The stable connection ensures the stability of the overall structure. The two sets of mechanical slides 51 are symmetrically arranged. The symmetrical arrangement can evenly distribute the force on the first slide 53 and prevent it from tilting during movement. The mechanical slides 51 are arranged parallel to the first screw 33. The mechanical slides 51 are also arranged parallel to the air-floating slide 1. Therefore, when the first screw 33 rotates to drive the first slide 53 to move, it can be limited by the mechanical slides 51, ensuring the accuracy of the movement direction. At the same time, it is rigidly supported by the first slider 52 and the mechanical slides 51, which enhances the platform's load-bearing capacity. The air-floating slide 1 reduces friction and improves the smoothness of movement. The second servo motor 45 is fixedly connected to the bottom of the mounting block 46 with the second slide 54. The second slide 54 has a stable structure and can drive the relevant components to move synchronously and accurately. The second servo motor 45 drives the second slide 54 to move synchronously through the mounting block 46. Two groups of second sliders 55 are installed at the bottom of the second slide 54. The second sliders 55 have good sliding performance and can ensure the smooth movement of the second slide 54. The two groups of second sliders 55 are respectively slidably connected to the two groups of mechanical slide rails 51. Similarly, the second slide 54 moves smoothly under the limiting effect of the second sliders 55 and the mechanical slide rails 51.

[0035] Furthermore, if Figure 2 and Figure 4As shown, the above-mentioned motion platform also includes a differential adjustment component 4 arranged between the sliding platform 2 and the first slide 53. The differential adjustment component 4 includes a second servo motor 45 that is movably arranged. The second servo motor 45 slides with the sliding platform 2 or the mechanical slide 51. The output end of the second servo motor 45 is installed with a coaxial rod. The coaxial rod is composed of two sections of screw rods with the same rotation direction and different leads. The sliding platform 2 and the first slide 53 correspond to the two sections of the screw thread respectively. When the coaxial rod rotates, the displacement of the sliding platform 2 is controlled by the difference in the leads of the two screws. It is used to accurately adjust the position of the sliding platform 2 to meet the needs of high-precision motion control. The coaxial rod is composed of a second screw rod 43 and a third screw rod 44 that are coaxially connected in a straight line. The concentricity of the connection between the two is high, which can ensure stability during rotation. The differential adjustment component 4 also includes a second connecting plate 41 fixedly connected to the top of the first slide 53. The second connecting plate 41 is firmly connected and can stably transmit the movement of the first slide 53 to subsequent components. A second threaded sleeve 42 is installed in the second connecting plate 41. The second threaded sleeve 42 is tightly connected to the second connecting plate 41 to ensure its fixed position. The second screw rod 43 is threadedly connected to the second threaded sleeve 42. The thread of the second screw rod 43 has high precision, which can achieve accurate displacement transmission. The second screw rod 43 moves along its own length when rotating. The output end of the second servo motor 45 is fixedly connected to the third screw rod 44 away from the end of the second screw rod 43. The firm connection ensures the high efficiency of power transmission. After the second servo motor 45 is started, it drives the second screw rod 43 and the third screw rod 44 to rotate synchronously. The second servo motor 45 has high control precision and can provide accurate power output for the rotation of the screw rod. When the second screw rod 43 moves, it drives the second servo motor 45 to move synchronously through the third screw rod 44. A mounting block 46 is installed on the outside of the second servo motor 45. The mounting block 46 can firmly fix the second servo motor 45 and reduce its vibration during operation. A third threaded sleeve 47 is threadedly connected to the third screw rod 44. The third threaded sleeve 47 and the third screw rod 44 precisely cooperate to achieve precise displacement conversion. When the third screw rod 44 rotates, it drives the third threaded sleeve 47 to move along its length. A third connecting plate 48 is fixedly connected to the outer ring of the third threaded sleeve 47. This secure connection allows the third connecting plate 48 to accurately transmit the displacement of the third threaded sleeve 47 to the sliding platform 2. The third connecting plate 48 is fixedly connected to the bottom of the sliding platform 2. When the third threaded sleeve 47 moves, it drives the sliding platform 2 through the third connecting plate 48. The second and third screw rods 43 and 44 are arranged parallel to the mechanical slide rail 51. This parallel arrangement ensures consistency in the movement directions of the various components and prevents motion interference. Thus, the rotation of the second screw rod 43 drives the second slide 54 to move, allowing it to be supported by the mechanical slide rail 51, further enhancing motion stability.

[0036] For further information, see Figure 2 and Figure 3The above-mentioned motion platform includes a driving mechanism 3 installed on one side of the air-floating slide 1. The driving mechanism 3 includes a side plate 31 fixedly connected to one end of the air-floating slide 1. The side plate 31 provides a stable installation base for subsequent components, ensuring the stability of the overall structure of the driving mechanism 3. A first servo motor 32 is installed on the side of the side plate 31 away from the air-floating slide 1, providing a power source for the movement of the entire platform. The position of the first servo motor 32 is fixed, and its output torque is stable, which can provide continuous and reliable power for the rotation of the first screw rod 33. The output end of the first servo motor 32 passes through the side plate 31 and is fixedly connected to the first screw rod 33. The thread precision of the first screw rod 33 is high, and it can accurately convert the rotational motion of the first servo motor 32 into linear motion. After the first servo motor 32 is started, it drives the first screw rod 33 to rotate. A first threaded sleeve 34 is threadedly connected to the first screw rod 33. The first threaded sleeve 34 and the threads of the first screw rod 33 are tightly matched, allowing stable movement along the length of the first screw rod 33 when the first screw rod 33 rotates. When the first screw rod 33 rotates, the first threaded sleeve 34 is driven to move along the length of the first screw rod 33. A first connecting plate 35 is fixedly connected to the outer ring of the first threaded sleeve 34. The first connecting plate 35 is firmly connected and can effectively transmit the movement of the first threaded sleeve 34. The bottom of the first connecting plate 35 is fixedly connected to the first slide 53. When the first threaded sleeve 34 moves, it drives the first slide 53 through the first connecting plate 35.

[0037] It is worth mentioning that the second screw rod 43 and the third screw rod 44 have the same rotation direction but different leads. Assuming the lead of the second screw rod 43 is 0.5 mm and the lead of the third screw rod 44 is 0.4 mm, when the second servo motor 45 drives the second screw rod 43 and the third screw rod 44 to rotate one circle, since the position of the first slide 53 is fixed when the first screw rod 33 is not rotating, and thus the position of the second connecting plate 41 and the second threaded sleeve 42 is fixed, the second screw rod 43 moves 0.5 mm along its own length during one rotation, thereby driving the third screw rod 44 and the second servo motor 45 to move 0.5 mm. Since the second screw rod 43 and the third screw rod 44 have the same rotation direction, when the third screw rod 44 rotates one circle, it drives the sliding platform 2 to move 0.4 mm in the opposite direction through the third threaded sleeve 47 and the third connecting plate 48. As a result, when the second servo motor 45 drives the second screw rod 43 and the third screw rod 44 to rotate one circle, the sliding platform 2 only moves 0.1 mm, thereby realizing precise adjustment of the position of the sliding platform 2 and meeting the requirements of high-precision motion control.

[0038] In this embodiment, the air-floating guide rail 1 is separated from the sliding platform 2 by an air film formed by gas lubrication. The high linearity of the air-floating guide rail is utilized to provide a basic high-precision guide for the movement of the sliding platform 2, significantly reducing the impact of friction on linearity. The drive mechanism 3 serves as the main power source of the platform. It outputs power through the first servo motor 32 to drive the first screw rod 33 to rotate. Since the first threaded sleeve 34 is threadedly connected to the first screw rod 33, the rotational motion is converted into the linear motion of the first threaded sleeve 34, which in turn drives the first slide 53 to move through the first connecting plate 35. The first servo motor 32, the first screw rod 33, the first threaded sleeve 34 and the first connecting plate 35 can also be replaced with a linear motor to cooperate with a mover to drive the first slide 53. At this time, the first slider 52 at the bottom of the first slide 53 slides along the mechanical slide rail 51, and the advantage of the strong rigidity of the mechanical guide rail is reflected: on the one hand, the mechanical slide rail 51 forms a limit for the first slide 53, ensuring that it moves stably in a direction parallel to the air-floating slide rail 1 to avoid deviation; on the other hand, the cooperation between the mechanical slide rail 51 and the first slider 52 provides rigid support, which enhances the stability of the platform during acceleration and load-bearing, and makes up for the defect of insufficient rigidity of the air-floating guide rail.

[0039] When fine-tuning is required, the second servo motor 45 drives the second screw 43 and the third screw 44 to rotate synchronously. Since the second threaded sleeve 42 is fixed to the first slide 53 via the second connecting plate 41, the second screw 43 moves along its own length during rotation, and the third screw 44 drives the second servo motor 45, the mounting block 46, and the second slide 54 to move synchronously. The second slider 55 at the bottom of the second slide 54 slides along the mechanical slide rail 51, further ensuring the smoothness of movement. At the same time, the rotation of the third screw 44 causes the third threaded sleeve 47 to move in the opposite direction, and drives the sliding platform 2 to move via the third connecting plate 48. Due to the difference in the lead of the second screw 43 and the third screw 44, when the two rotate synchronously for one circle, the actual displacement of the sliding platform 2 is the difference between the two leads. Through this differential drive method, the rotational motion of the second servo motor 45 is converted into a small and precise displacement of the sliding platform 2, achieving high-precision adjustment.

[0040] The above specific embodiment is merely an optional embodiment of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above embodiment, those skilled in the art can make various alternative improvements and combinations to the above specific embodiment.

Claims

1. Air-floating guide rail-mechanical guide rail composite guided differential drive motion platform, characterized by: include: An air-floating slide rail (1) and a sliding platform (2) slidably mounted on the outside of the air-floating slide rail (1), wherein the sliding platform (2) moves along the length direction of at least one set of mechanical slide rails (51) located on the air-floating slide rail (1), and a first slide platform (53) is slidably arranged on the mechanical slide rail (51); A differential adjustment component (4) is arranged between the sliding platform (2) and the first slide (53), and the differential adjustment component (4) includes a second servo motor (45) that is movably arranged. The second servo motor (45) is slidably matched with the sliding platform (2) or the mechanical slide rail (51). A coaxial rod is installed at the output end of the second servo motor (45). The coaxial rod is composed of two sections of screw rods with the same rotation direction and different leads. The sliding platform (2) and the first slide (53) are respectively matched with the two sections of the screw rod. When the coaxial rod rotates, the displacement of the sliding platform (2) is controlled by the difference in the leads of the two screws.

2. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 1, characterized in that: The invention also includes a position limiting support mechanism (5), wherein the position limiting support mechanism (5) includes at least one set of mechanical slide rails (51) parallel to the air-floating slide rail (1), and a first slider (52) is slidably connected to the mechanical slide rail (51), and the first slider (52) is fixedly connected to the first slide platform (53), and when the first slide platform (53) moves, it drives the sliding platform (2) to move synchronously.

3. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 2, characterized in that: It also includes a driving mechanism (3) installed on one side of the air-floating slide rail (1), and the driving mechanism (3) is used to drive the sliding platform (2) to move. The driving mechanism (3) includes a side plate (31) fixedly connected to the air-floating slide rail (1), and a first servo motor (32) is installed on the side plate (31). The output end of the first servo motor (32) is fixedly connected to a first screw rod (33), and a first threaded sleeve (34) is threadedly connected to the first screw rod (33). The outer ring of the first threaded sleeve (34) is fixedly connected to a first connecting plate (35), and the first connecting plate (35) is fixedly connected to the first slide (53).

4. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 3, characterized in that: The mechanical slide rail (51) is fixedly connected to the air-floating slide rail (1), and the mechanical slide rail (51) is arranged in parallel with the first screw rod (33).

5. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 4, characterized in that: The coaxial rod is composed of a second screw rod (43) and a third screw rod (44) which are coaxially and linearly connected. The second screw rod (43) and the third screw rod (44) have the same rotation direction but different leads.

6. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 5, characterized in that: The differential adjustment assembly (4) further includes a second connecting plate (41), a second threaded sleeve (42) is installed in the second connecting plate (41), the second screw rod (43) is threadedly connected to the second threaded sleeve (42), the output end of the second servo motor (45) is fixedly connected to the second screw rod (43) or the third screw rod (44), and a mounting block (46) is installed on the outside of the second servo motor (45).

7. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 6, characterized in that: The position-limiting support mechanism (5) further comprises a second slide (54) fixedly connected to the bottom of the mounting block (46); a second slider (55) is mounted on the bottom of the second slide (54); and the second slider (55) is slidably connected to the mechanical slide rail (51).

8. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 7, characterized in that: A third threaded sleeve (47) is threadedly connected to the third screw rod (44), and an outer ring of the third threaded sleeve (47) is fixedly connected to a third connecting plate (48).

9. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 8, characterized in that: The second connecting plate (41) and the third connecting plate (48) are fixedly connected to the sliding platform (2) or the first sliding platform (53), respectively.

10. The air-floating guide rail-mechanical guide rail composite guided differential drive motion platform according to claim 9, characterized in that: The second screw rod (43) and the third screw rod (44) are arranged in parallel with the mechanical slide rail (51).