Transfer system of vacuum coating production line

Abstract

The transfer system of the vacuum coating production line comprises a transfer device and a plurality of process cavities arranged around the transfer device, and the transfer device comprises a rotating seat, a plurality of transfer manipulators used for transferring workpiece carriers and a rotation driving assembly used for driving the rotating seat to rotate. The rotating seat is rotationally mounted and can drive the transfer manipulator to move to the position of any process chamber through rotation, and the transfer manipulator is mounted on the rotating seat through the position adjusting assembly in a manner of being capable of adjusting the position around the rotating axis of the rotating seat. The transfer system of the vacuum coating production line has the advantages of being simple in structure, low in manufacturing and maintenance cost, low in control difficulty, stable and reliable in workpiece carrier transfer, flexible to use and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a transfer system for a vacuum coating production line. Background Art

[0002] Multi-chamber vacuum coating lines are the core equipment for achieving large-scale, high-efficiency, and high-quality production in the modern coating industry. These lines typically consist of multiple process chambers connected in series and a supporting workpiece carrier and transport system.

[0003] In the current mainstream multi-chamber vacuum coating line design, the process chambers are generally arranged in series along a straight line. Each process chamber is equipped with an independently driven conveyor (such as rollers, chains, or conveyors). When workpiece carriers need to be transferred between process chambers, they are transferred by docking the ends of the conveyor systems of adjacent process chambers.

[0004] However, this traditional layout and delivery method has significant defects: 1. Low space utilization: Linear series arrangement causes the overall length of the production line to increase linearly with the number of process chambers, occupying a large amount of factory space. Especially when there are many process links (a large number of process chambers), the long linear layout has strict requirements on the site, and the problem of space waste is particularly prominent.

[0005] 2. The conveying system is complex, costly, and difficult to control: Each process chamber requires an independent drive mechanism (motor, transmission, control system, etc.), resulting in a complex equipment structure and a large number of parts.

[0006] 3. Multiple independent drive systems significantly increase the manufacturing and maintenance costs of the equipment. Coordinating the actions of multiple independent drive units to achieve precise synchronization and relay transmission requires complex control logic, making debugging and maintenance difficult. Furthermore, the conveyor system requires significant space within the process chamber, increasing the overall size of the process chamber and impacting the installation and layout of other functional devices within the chamber.

[0007] 4. Poor workpiece carrier conveying stability and positioning accuracy: When transferring workpiece carriers between adjacent chambers, they must undergo multiple handovers between two independently driven conveyor units. Each handover carries the risk of cumulative positioning errors, making it difficult to ensure high-precision and repeatable positioning of the carrier within the chamber and during the handover process. Synchronization deviations or mechanical backlash between the drive units can easily cause the carrier to wobble, become stuck, or shift during transfer. Summary of the Invention

[0008] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a transfer system for a vacuum coating production line with a simple structure, low manufacturing and maintenance costs, low control difficulty, stable and reliable workpiece carrier transfer, and flexible use.

[0009] In order to solve the above technical problems, the present invention adopts the following technical solutions: A transfer system for a vacuum coating production line includes a transfer device and multiple process chambers arranged around the transfer device. The transfer device includes a rotating seat, multiple transfer robots for transferring workpiece carriers, and a rotating drive assembly for driving the rotating seat to rotate. The rotating seat is rotatably installed and can move the transfer robots to the position of any process chamber by rotation. The transfer robots are installed on the rotating seat through a position adjustment assembly in a manner that allows them to adjust their position around the rotating axis of the rotating seat.

[0010] As a further improvement of the above technical solution: The position adjustment component includes a moving seat connected to the transfer robot and a track provided on the rotating seat. The moving seat is installed on the track through a guiding mechanism and can move along the track. The position adjustment component also includes a driving mechanism for driving the moving seat to move along the track to adjust the position.

[0011] The transfer robot includes a base, a telescopic arm and a clamp for picking up and placing a workpiece carrier. The base is installed on a movable seat, the telescopic arm is installed on the base in a horizontal reciprocating motion manner through a translation component, and the clamp is installed on the telescopic arm in a height-adjustable manner through a lifting component.

[0012] The guiding mechanism cooperates with the track to ensure that the horizontal reciprocating direction of the telescopic arm of the transfer robot always remains perpendicular to the rotation axis of the rotating seat.

[0013] The track extends along an arc track centered on the rotation axis of the rotating seat. The guiding mechanism includes a plurality of rollers rotatably mounted on the moving seat. The plurality of rollers are arranged on both sides of the track and clamp the track to guide the moving seat to move along the track.

[0014] The track is provided with a convex rail portion, and the roller is provided with an annular positioning groove which is clamped on the convex rail portion.

[0015] The translation assembly includes two first guide mechanisms respectively arranged on both sides of the telescopic arm and a first driving mechanism for driving the telescopic arm to move back and forth horizontally. The first guide mechanism includes a first guide rail installed on the telescopic arm and a first slider installed on the base. The first guide rail and the first slider guide and cooperate with each other. The first driving mechanism includes a first rack installed on the telescopic arm and a first gear installed on the base and driven to rotate by a first motor. The first gear is engaged with the first rack.

[0016] The lifting assembly includes two second guide mechanisms and a second driving mechanism for driving the lifting movement of the clamp. The second guide mechanism includes a second guide rail installed on the clamp and a second slider installed on the telescopic arm. The second guide rail and the second slider guide cooperation. The second driving mechanism includes a second rack installed on the clamp and a second gear installed on the telescopic arm and driven by the second motor to rotate. The second gear is engaged with the second rack.

[0017] The position adjustment component enables the transfer robot to adjust its position between at least two adjacent process chambers.

[0018] The driving mechanism includes an endless belt, a plurality of steering wheels 55 and a driving wheel driven by a rotating driving member. The driving wheel and the steering wheel are rotatably mounted on a rotating seat. The endless belt is wound around the driving wheel and the steering wheel. The endless belt has a driving section. The driving section is located on the side of the track corresponding to the rotating axis of the rotating seat. The driving section is connected to the moving seat.

[0019] The movable seat and the driving section are connected via a movable connection mechanism, and the movable connection mechanism allows the movable seat and the driving section to move away from and approach each other in the radial direction of the rotating seat.

[0020] The movable connection mechanism includes two connecting rods fixed on the movable seat and a connecting block connected to the driving section. The connecting block is inserted between the two connecting rods. Both ends of the connecting block are provided with limiting parts to prevent the connecting block from falling out of the space between the two connecting rods.

[0021] The driving mechanism comprises a rack mounted on the track and a gear mounted on the moving seat and driven to rotate by a rotary driving member, wherein the gear is meshed with the rack.

[0022] Compared with the prior art, the advantages of the present invention are: The transfer system of the vacuum coating production line of the present invention has multiple process chambers arranged around the transfer device. It only needs to set up a rotating seat, multiple transfer robots and a group of rotating drive components to realize the picking and placing of workpiece carriers in each process chamber and the transfer of workpiece carriers between each process chamber. It has a simple and compact structure, low equipment manufacturing and maintenance costs, and low control difficulty. The workpiece carrier does not need to be handed over multiple times during the transfer between each process chamber, which can ensure high-precision and high-repeatability positioning of the workpiece carrier during the transfer process, and improve the accuracy and stability of the workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber, which can reduce the size of the process chamber and facilitate the installation and layout of other functional devices in the process chamber. In addition, the transfer robot can adjust its position on the rotating seat around the rotating axis of the rotating seat. Each transfer robot can also independently move the transfer workpiece carrier within a certain range to meet the needs of different production procedures and production processes. It has high flexibility in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the top view of the transfer system in Example 1.

[0024] Figure 2 This is a schematic diagram of the main structure of the transfer device in Example 1.

[0025] Figure 3 This is a schematic diagram of the top view of the transfer device in Example 1.

[0026] Figure 4 This is a schematic diagram of the three-dimensional structure of the position adjustment component in Example 1.

[0027] Figure 5 This is a bottom-up structural diagram of the position adjustment component in Example 1.

[0028] Figure 6 This is a schematic diagram of the three-dimensional structure of the transfer robot in Example 1.

[0029] Figure 7 This is a schematic diagram of the main structure of the transfer robot in Example 1.

[0030] Legend: 1. Process chamber; 2. Rotating seat; 3. Transfer robot; 31. Base; 32. Telescopic arm; 33. Clamp; 34. Translation assembly; 35. Lifting assembly; 4. Rotation drive assembly; 5. Position adjustment assembly; 51. Moving seat; 52. Track; 521. Convex rail portion; 53. Roller; 531. Annular positioning groove; 54. Driving wheel; 55. Steering wheel; 56. Annular belt; 561. Driving section; 57. Connecting rod; 58. Connecting block; 581. Limiting portion; 100. Workpiece carrier. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] Example 1 like Figures 1 to 3As shown, the transfer system of the vacuum coating production line of this embodiment includes a transfer device and multiple process chambers 1 arranged around the transfer device. The process chamber 1 is not equipped with a conveying system for conveying the workpiece carrier 100. The transfer device includes a rotating seat 2, multiple transfer robots 3 for conveying the workpiece carrier 100, and a rotating drive component 4 for driving the rotating seat 2 to rotate. The rotating seat 2 is rotatably installed and can move the transfer robot 3 to any position of the process chamber 1 by rotating. The transfer robot 3 is installed on the rotating seat 2 through a position adjustment component 5 in a manner that the position can be adjusted around the rotation axis of the rotating seat 2. The transfer system of the vacuum coating production line has multiple process chambers 1 arranged around a transfer device. It only needs to set up a rotating base 2, multiple transfer robots 3 and a group of rotating drive components 4 to realize the picking and placing of workpiece carriers 100 in each process chamber 1 and the transfer of workpiece carriers 100 between each process chamber 1. Its structure is simple and compact, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier 100 does not need to be handed over multiple times during the transfer between each process chamber 1, which can ensure high-precision and high-repeatability positioning of the workpiece carrier 100 during the transfer process, and improve the accuracy and stability of the transfer of the workpiece carrier 100. At the same time, there is no need to set up a conveying system in the process chamber 1, which can reduce the size of the process chamber 1 and facilitate the installation and layout of other functional devices in the process chamber 1. In addition, the transfer robot 3 can adjust its position on the rotating base 2 around the rotation axis of the rotating base 2. Each transfer robot 3 can also independently move the transfer workpiece carrier 100 within a certain range, and can more flexibly transfer the workpiece carrier 100 between each process chamber 1 to meet the needs of different production processes and production processes. It has high flexibility in use.

[0033] In this embodiment, the position adjustment assembly 5 includes a movable base 51 connected to the transfer robot 3 and a track 52 provided on the rotating base 2. The movable base 51 is mounted on the track 52 via a guide mechanism and can move along the track 52. The position adjustment assembly 5 also includes a driving mechanism for driving the movable base 51 to move along the track 52 to adjust its position. The position adjustment assembly 5 has a simple structure and low cost.

[0034] In this embodiment, Figure 6 and Figure 7As shown, the transfer robot 3 includes a base 31, a telescopic arm 32, and a clamp 33 for picking up and placing the workpiece carrier 100. The base 31 is mounted on the movable base 51, and the telescopic arm 32 is mounted on the base 31 in a horizontal reciprocating manner via a translation assembly 34. The clamp 33 is mounted on the telescopic arm 32 in a height-adjustable manner via a lifting assembly 35. The translation assembly 34 drives the telescopic arm 32 to move horizontally and reciprocatingly, allowing the workpiece carrier 100 to enter and exit the process chamber 1. The lifting assembly 35 drives the clamp 33 to move to different heights to lower and raise the workpiece carrier 100, thereby achieving the picking up and placing of the workpiece carrier 100 and allowing the workpiece carrier 100 to enter the process chamber 1. The transfer robot 3 has the advantages of simple structure, easy control, and stable and reliable operation. The above-mentioned clamp 33 adopts the existing conventional mechanism for picking up and placing the workpiece carrier 100.

[0035] In this embodiment, the guide mechanism cooperates with the track 52 to ensure that the horizontal reciprocating motion direction of the telescopic arm 32 of the transfer robot 3 always remains perpendicular to the rotation axis of the rotating base 2. When the transfer robot 3 moves to the position of each process chamber 1, the path of the horizontal reciprocating motion driven by the telescopic arm 32 to the clamp 33 is consistent with the relative angle of each process chamber 1. In this way, even if the entrance and exit of the process chamber 1 are relatively narrow, the telescopic arm 32 can drive the clamp 33 to enter and exit each process chamber 1 normally, and pick up and place the workpiece carrier 100 in the set position and posture, ensuring the accuracy, stability and reliability of the workpiece carrier 100, and reducing the control difficulty.

[0036] In this embodiment, Figure 4 and Figure 5 As shown, the track 52 extends along an arc-shaped trajectory centered on the rotation axis of the rotating base 2. The guide mechanism includes multiple rollers 53 rotatably mounted on the mobile base 51. The multiple rollers 53 are located on both sides of the track 52 and clamp the track 52 to guide the mobile base 51 along the track 52. This assembly structure of multiple rollers 53 and the track 52 ensures that the horizontal reciprocating direction of the telescopic arm 32 of the transfer robot 3 is perpendicular to the rotation axis of the rotating base 2 when the transfer robot 3 moves to any position along the track 52. It has a simple structure, low cost, and good stability of the transfer robot 3.

[0037] In this embodiment, the track 52 is provided with a convex rail portion 521, and the roller 53 is provided with an annular positioning groove 531 that is clamped on the convex rail portion 521, which can improve the stability, movement accuracy and load-bearing capacity of the transfer robot 3.

[0038] In this embodiment, the translation assembly 34 includes two first guide mechanisms, one on each side of the telescopic arm 32, and a first drive mechanism for driving the telescopic arm 32 in horizontal reciprocating motion. The first guide mechanism includes a first guide rail mounted on the telescopic arm 32 and a first slider mounted on the base 31. The first guide rail and the first slider cooperate in guiding each other. The first drive mechanism includes a first rack mounted on the telescopic arm 32 and a first gear mounted on the base 31 and driven by a first motor. The first gear meshes with the first rack. The first motor drives the first gear to rotate, forcing the telescopic arm 32 to reciprocate horizontally via the first rack. This translation assembly 34 has a simple structure, is easy to control, and operates stably and reliably.

[0039] In this embodiment, the lifting assembly 35 includes two second guide mechanisms and a second drive mechanism for driving the clamp 33 to move upward and downward. The second guide mechanism includes a second guide rail mounted on the clamp 33 and a second slider mounted on the telescopic arm 32. The second guide rail and the second slider cooperate with each other in a guiding manner. The second drive mechanism includes a second rack mounted on the clamp 33 and a second gear mounted on the telescopic arm 32, driven by a second motor. The second gear meshes with the second rack. The second motor drives the second gear, which, via the second rack, forces the clamp 33 to move upward and downward. This lifting assembly 35 has a simple structure, is easy to control, and operates stably and reliably.

[0040] In this embodiment, the position adjustment assembly 5 enables the transfer robot 3 to adjust its position between two adjacent process chambers 1. That is, each transfer robot 3 can transfer a workpiece carrier 100 between two adjacent process chambers 1 via the position adjustment assembly 5. In other embodiments, the position adjustment assembly 5 can also be configured to enable the transfer robot 3 to adjust its position between three or more adjacent process chambers 1.

[0041] In this embodiment, the drive mechanism includes an endless belt 56, a plurality of steering wheels 55, and a drive wheel 54 driven by a rotary drive member. The drive wheel 54 and steering wheel 55 are rotatably mounted on the rotating base 2. The endless belt 56 is wound around the drive wheel 54 and steering wheel 55. The endless belt 56 has a drive section 561 located on the side of the track 52 corresponding to the rotation axis of the rotating base 2 and connected to the movable base 51. The rotating drive member drives the drive wheel 54 to rotate, causing the endless belt 56 to move forward and backward. The drive section 561 also reciprocates, thereby driving the movable base 51 to reciprocate along the track 52, thereby achieving the purpose of adjusting the position of the transfer robot 3. Because the drive mechanism uses the endless belt 56 to pull the movable base 51, it provides a certain buffering effect, reduces the impact during startup and shutdown, and can reduce the shaking amplitude of the transfer robot 3, making the transfer robot 3 less susceptible to damage and reducing the structural strength and rigidity requirements of the robot arm. Preferably, the drive wheel 54 and steering wheel 55 are gears, and the endless belt 56 is a toothed belt, which is highly precise.

[0042] In this embodiment, the movable base 51 and the driving section 561 are connected by a movable connection mechanism. This movable connection mechanism allows the movable base 51 and the driving section 561 to move away from and toward each other in the radial direction of the rotating base 2. This eliminates the need for the driving section 561 to be strictly parallel to the track 52, while still allowing the movable base 51 to smoothly reciprocate along the track 52. This can reduce the number of steering wheels 55, lowering the difficulty and cost of assembly and commissioning.

[0043] In this embodiment, the movable connection mechanism includes two connecting rods 57 fixed to the movable base 51 and a connecting block 58 connected to the driving section 561. The connecting block 58 is inserted between the two connecting rods 57. The connecting block 58 is provided with stoppers 581 at each end to prevent the connecting block 58 from falling out of the space between the two connecting rods 57. The connecting rods 57 move relative to the connecting block 58 between the stoppers 581 at each end of the connecting block 58. This movable connection mechanism has a simple structure and is easy to manufacture and assemble.

[0044] The multiple process chambers 1 of this embodiment can be configured as needed to complete any process in the coating process, such as cleaning, preheating, coating, etc. The specific configuration can refer to the existing coating machine.

[0045] Example 2 The transfer system of the vacuum coating production line of this embodiment is essentially the same as that of Example 1. The main difference is that in this embodiment, the drive mechanism includes a rack mounted on a track 52 and a gear mounted on a movable base 51 and driven by a rotary drive member, with the gear meshing with the rack. The rotary drive member can be a motor. This embodiment has a simpler drive mechanism structure and lowers cost.

[0046] The above is only a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above embodiment. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of the present invention should also be considered as the scope of protection of the present invention.

Claims

1. A transfer system for a vacuum coating production line, characterized by: The invention comprises a transfer device and a plurality of process chambers (1) arranged around the transfer device, wherein the transfer device comprises a rotating seat (2), a plurality of transfer manipulators (3) for transferring workpiece carriers (100), and a rotation drive assembly (4) for driving the rotating seat (2) to rotate. The rotating seat (2) is rotatably mounted and can move the transfer manipulators (3) to the position of any process chamber (1) by rotating. The transfer manipulators (3) are mounted on the rotating seat (2) through a position adjustment assembly (5) in a manner that the position can be adjusted around the rotation axis of the rotating seat (2).

2. The transfer system for a vacuum coating production line according to claim 1, characterized in that: The position adjustment assembly (5) includes a movable seat (51) connected to the transfer robot (3) and a track (52) provided on the rotating seat (2); the movable seat (51) is mounted on the track (52) via a guide mechanism and can move along the track (52); the position adjustment assembly (5) further includes a driving mechanism for driving the movable seat (51) to move along the track (52) to adjust its position.

3. The transfer system for the vacuum coating production line according to claim 2, characterized in that: The transfer robot (3) comprises a base (31), a telescopic arm (32) and a clamp (33) for picking up and placing a workpiece carrier (100), wherein the base (31) is mounted on a movable seat (51), the telescopic arm (32) is mounted on the base (31) in a horizontal reciprocating motion manner via a translation assembly (34), and the clamp (33) is mounted on the telescopic arm (32) in a height-adjustable manner via a lifting assembly (35).

4. The transfer system for a vacuum coating production line according to claim 3, characterized in that: The guide mechanism cooperates with the track (52) so that the horizontal reciprocating motion direction of the telescopic arm (32) of the transfer manipulator (3) always remains perpendicular to the rotation axis of the rotating seat (2).

5. The transfer system for the vacuum coating production line according to claim 3, characterized in that: The track (52) extends along an arc-shaped track centered on the rotation axis of the rotating seat (2). The guiding mechanism includes a plurality of rollers (53) rotatably mounted on the movable seat (51). The plurality of rollers (53) are arranged on both sides of the track (52) and clamp the track (52) to guide the movable seat (51) to move along the track (52).

6. The transfer system for the vacuum coating production line according to claim 5, characterized in that: The track (52) is provided with a convex track portion (521), and the roller (53) is provided with an annular positioning groove (531) which is clamped on the convex track portion (521).

7. The transfer system for a vacuum coating production line according to claim 3, characterized in that: The translation assembly (34) includes two first guide mechanisms respectively arranged on both sides of the telescopic arm (32) and a first driving mechanism for driving the telescopic arm (32) to move horizontally back and forth, the first guide mechanism includes a first guide rail mounted on the telescopic arm (32) and a first slider mounted on the base (31), the first guide rail and the first slider are guided in cooperation, the first driving mechanism includes a first rack mounted on the telescopic arm (32) and a first gear mounted on the base (31) and driven to rotate by a first motor, the first gear being engaged with the first rack.

8. The transfer system of the vacuum coating production line according to claim 3, characterized in that: The lifting assembly (35) includes two second guide mechanisms and a second drive mechanism for driving the clamp (33) to move up and down, the second guide mechanism includes a second guide rail installed on the clamp (33) and a second slider installed on the telescopic arm (32), the second guide rail and the second slider are guided together, the second drive mechanism includes a second rack installed on the clamp (33) and a second gear installed on the telescopic arm (32) and driven to rotate by a second motor, and the second gear is engaged with the second rack.

9. The transfer system of the vacuum coating production line according to claim 2, characterized in that: The position adjustment component (5) enables the transfer robot (3) to adjust its position between at least two adjacent process chambers (1).

10. The transfer system of the vacuum coating production line according to any one of claims 2 to 9, characterized in that: The driving mechanism comprises an annular belt (56), a plurality of steering wheels (55), and a driving wheel (54) driven to rotate by a rotary driving member. The driving wheel (54) and the steering wheel (55) are rotatably mounted on the rotating seat (2). The annular belt (56) is wound around the driving wheel (54) and the steering wheel (55). The annular belt (56) has a driving section (561). The driving section (561) is located on a side of the track (52) corresponding to the rotation axis of the rotating seat (2). The driving section (561) is connected to the moving seat (51).

11. The transfer system of the vacuum coating production line according to claim 10, characterized in that: The movable seat (51) and the driving section (561) are connected via a movable connection mechanism, and the movable connection mechanism allows the movable seat (51) and the driving section (561) to move away from and approach each other in the radial direction of the rotating seat (2).

12. The transfer system for a vacuum coating production line according to claim 11, characterized in that: The movable connection mechanism comprises two connecting rods (57) fixed on the movable seat (51) and a connecting block (58) connected to the driving section (561); the connecting block (58) is inserted between the two connecting rods (57); and both ends of the connecting block (58) are provided with limiting portions (581) for preventing the connecting block (58) from falling out of the space between the two connecting rods (57).

13. The transfer system of the vacuum coating production line according to any one of claims 2 to 9, characterized in that: The driving mechanism comprises a rack mounted on a track (52) and a gear mounted on a movable seat (51) and driven to rotate by a rotary drive member, wherein the gear is engaged with the rack.

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