Air inlet device of epitaxial furnace

Abstract

The invention belongs to the technical field of epitaxial growth, and particularly relates to an epitaxial furnace gas inlet device which comprises a furnace body, one side of the furnace body is communicated with a gas inlet cylinder, the surface of the gas inlet cylinder is sleeved with a rotating ring, the annular circumferential surface of the rotating ring is uniformly and fixedly connected with a plurality of first magnetic blocks, and the side face of the rotating ring is fixedly connected with a gear ring; according to the gas inlet device of the epitaxial furnace, the gear ring is arranged; during use, a gear ring rotates to drive a first magnetic block on the surface of a rotating ring to rotate synchronously, the first magnetic block and a second magnetic block have magnetic attraction, the second magnetic block drives a rotating piece to rotate synchronously under the action of magnetic force, the rotating piece drives a rotating cylinder to rotate, and the rotating cylinder drives a stirring rod to rotate; process gas in the gas inlet cylinder is mixed when the stirring rod rotates, and the output end of the driving motor does not need to be inserted into the gas inlet cylinder in the whole process, so that accelerated aging of a sealing gasket caused by heat generated by friction is avoided, long-term use is facilitated, and further optimization of a stirring structure of an existing gas inlet container is realized.

Description

Technical Field

[0001] The invention belongs to the technical field of epitaxial growth, in particular to an air intake device for an epitaxial furnace. Background Art

[0002] Silicon carbide semiconductors have excellent properties such as large bandgap, excellent stability, high thermal conductivity, high critical breakdown field strength, and high saturated electron drift velocity. They are ideal semiconductor materials for making high-temperature, high-frequency, high-power and strong radiation power electronic devices. Compared with traditional silicon devices, silicon carbide devices can operate normally under electric field strengths that are 10 times that of silicon devices. In addition, the silicon carbide material used to make silicon carbide devices is usually a silicon carbide epitaxial wafer grown on a silicon carbide substrate.

[0003] The silicon carbide epitaxial furnace is a reaction chamber used to grow silicon carbide epitaxial wafers. CVD (chemical vapor deposition) is usually used to grow silicon carbide epitaxial wafers. Therefore, an air intake container is set outside the epitaxial furnace. The air intake container is used to receive external process gases and mix different process gases. The mixed process gases are then injected into the epitaxial furnace through a conduit for chemical vapor deposition. This process requires that different process gases are fully mixed inside the air intake container. The existing air intake method is to set up multiple branch pipes and main pipes, and control the gases in the branch pipes to enter the main pipe at different time periods for mixing. In order to improve the mixing process gas To ensure mixing uniformity, the staff can set up a stirring structure inside the air intake container, and drive the stirring structure to rotate through an external motor. Specifically, the output end of the external motor passes through the interior of the air intake container and is connected to the stirring structure. During actual use, the air intake container needs to be kept sealed, and a sealing gasket needs to be installed at the position where the output end of the external motor passes through the air intake container. The sealing effect of the sealing gasket needs to be checked regularly to avoid aging of the sealing gasket affecting the sealing effect. When the output end of the external motor rotates continuously, friction will be generated with the sealing gasket, and the frictional heat will cause the aging of the sealing gasket to be accelerated. This is not conducive to long-term use, so the existing stirring structure of the air intake container needs to be further optimized.

[0004] To this end, the present invention provides an air intake device for an epitaxial furnace. Summary of the Invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The technical solution adopted by the present invention to solve the technical problem is as follows: an air intake device for an epitaxial furnace according to the present invention comprises a furnace body, an air intake cylinder is connected to one side of the furnace body, a rotating ring is sleeved on the surface of the air intake cylinder, a plurality of first magnetic blocks are evenly fixed to the annular circumference of the rotating ring, a gear ring is fixed to the side of the rotating ring, a gear is meshed with the bottom end of the gear ring, and the gear is externally connected to a drive motor, which is used to drive the gear to rotate; A rotating plate is rotatably provided inside the air intake cylinder, and the rotating plate is rotatably connected to the inner wall of the end of the air intake cylinder. A plurality of second magnetic blocks are evenly fixed to the annular surface of the rotating plate, and there is magnetic attraction between the first magnetic block and the second magnetic block. A rotating cylinder is fixed to the side of the rotating plate, and a plurality of stirring rods are fixed to the side of the rotating cylinder. The end of the air intake cylinder is connected to an air intake pipe.

[0007] Preferably, a plurality of first through holes are provided on the surface of the rotating cylinder, the first through holes are provided at the connection position between the rotating cylinder and the stirring rod, a through cavity connected to the first through hole is provided inside the stirring rod, a through hole is provided on the side of the rotating piece, the rotating cylinder is connected to the through hole, and one end of the air intake pipe is located inside the air intake cylinder and is connected to the through hole and is rotatably connected.

[0008] Preferably, a filling block is inserted into the through-cavity, a slide groove is provided on the side of the filling block, a slider is slidably connected to the inside of the slide groove, a connecting spring is fixedly connected between the slider and the inner wall of the slide groove, a support block is fixedly connected to the side of the slider outside the slide groove, an inclined plate fixedly connected to the surface of the stirring rod is provided at the end of the support block close to the stirring rod, the support block is slidably connected to the inclined surface of the inclined plate, a fixed plate is fixedly connected to the end of the filling block outside the through-cavity, a guide rod is fixedly connected to the surface of the fixed plate, and the guide rod passes through the stirring rod.

[0009] Preferably, a plurality of second through holes are evenly formed on the surface of the rotating cylinder, a plurality of inflation tubes connected to the second through holes are fixedly connected to the surface of the rotating cylinder, an inflation block is slidably connected to the interior of the inflation tube, the inflation block is located at the end of the inflation tube away from the rotating cylinder, a buffer spring is fixedly connected to the side of the inflation block, and a bracket is fixedly connected to the end of the buffer spring away from the inflation block, and the bracket is fixedly connected to the inner wall of the inflation tube; A plurality of sealing plates for sealing the second through holes are fixedly connected inside the rotating cylinder. An air hole communicating with the second through hole is opened on the side of the sealing plate facing the center of the rotating cylinder. An expansion airbag is fixedly connected to the side of the sealing plate facing the center of the rotating cylinder.

[0010] Preferably, during the process of the rotating drum decelerating from rotation to stationary state, the expansion airbag still remains inflated when the through cavity inside the stirring rod is blocked by the filling block.

[0011] Preferably, a pair of limiting rings are sleeved on the surface of the air intake cylinder, and the pair of limiting rings limit the positions of the rotating ring and the gear ring on the air intake cylinder.

[0012] Preferably, a pair of limiting rings are rotatably provided with a plurality of balls on opposite sides.

[0013] Preferably, the surface of the air inlet cylinder is connected to an air pump.

[0014] Preferably, the center of the rotating piece coincides with the center of the rotating ring.

[0015] Preferably, the internal structure of the air intake cylinder is made of corrosion-resistant plastic.

[0016] The beneficial effects of the present invention are as follows: 1. The epitaxial furnace air intake device described in the present invention is provided with a gear ring; when in use, the gear ring rotates, which drives the first magnetic block on the surface of the rotating ring to rotate synchronously, and there is magnetic attraction between the first magnetic block and the second magnetic block. Therefore, when the first magnetic block rotates, the second magnetic block will drive the rotating plate to rotate synchronously under the action of the magnetic force, and the rotating plate drives the rotating cylinder to rotate, and the rotating cylinder drives the stirring rod to rotate. When the stirring rod rotates, it mixes the process gas inside the air intake cylinder. The whole process does not require the output end of the driving motor to be inserted into the air intake cylinder, which avoids the frictional heat that causes the sealing gasket to age faster, is conducive to long-term use, and realizes further optimization of the existing air intake container stirring structure.

[0017] 2. The epitaxial furnace air intake device described in the present invention is configured by setting a limit ring; a pair of the limit rings limits the position of the rotating ring and the gear ring on the air intake cylinder; and prevents the rotating ring and the gear ring from moving on the surface of the air intake cylinder, causing the gear ring and the drive gear to lose their meshing position. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below with reference to the accompanying drawings.

[0019] Figure 1 It is a perspective view of the present invention; Figure 2 It is a side schematic diagram of the present invention; Figure 3 It is a schematic diagram of the gear ring connection structure of the present invention; Figure 4 It is a schematic diagram of the air intake cylinder of the present invention; Figure 5 It is a schematic diagram of the internal structure of the air intake cylinder of the present invention; Figure 6 is a schematic diagram of a rotating drum of the present invention; Figure 7 Schematic diagram of the stirring rod connection structure of the present invention; Figure 8 It is a schematic diagram of the slider connection structure of the present invention; Figure 9 It is a schematic diagram of the connection structure of the inflation tube of the present invention; Figure 10 It is a schematic diagram of the position of the inflatable block of the present invention; Figure 11 It is a schematic diagram of the inflatable block connection structure of the present invention.

[0020] In the figure: 1. furnace body; 11. air inlet cylinder; 2. swivel; 21. first magnetic block; 22. gear ring; 23. driving gear; 24. driving motor; 3. rotating plate; 30. second magnetic block; 31. rotating cylinder; 32. stirring rod; 33. first through hole; 34. filling block; 341. fixing plate; 342. guide rod; 35. slide groove; 36. slider; 37. connecting spring; 38. supporting block; 39. inclined plate; 4. second through hole; 41. inflation pipe; 42. sealing plate; 43. expansion airbag; 44. inflation block; 45. buffer spring; 46. bracket; 5. air inlet pipe. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0022] like Figures 1 to 2 As shown, an air intake device for an epitaxial furnace according to an embodiment of the present invention includes a furnace body 1, an air intake cylinder 11 is provided on one side of the furnace body 1, a rotating ring 2 is sleeved on the surface of the air intake cylinder 11, a plurality of first magnetic blocks 21 are evenly fixed to the annular circumference of the rotating ring 2, a gear ring 22 is fixed to the side of the rotating ring 2, a gear 23 is meshed with the bottom end of the gear ring 22, and a drive motor 24 is externally connected to the gear 23 for driving the gear 23 to rotate; A rotating piece 3 is rotatably provided inside the air intake cylinder 11. The rotating piece 3 is rotatably connected to the inner wall of the end of the air intake cylinder 11. A plurality of second magnetic blocks 30 are evenly fixed to the annular surface of the rotating piece 3. The first magnetic block 21 and the second magnetic block 30 are magnetically attracted to each other. A rotating cylinder 31 is fixed to the side of the rotating piece 3. A plurality of stirring rods 32 are fixed to the side of the rotating cylinder 31. The end of the air intake cylinder 11 is connected to the air intake pipe 5. When the air intake container is actually used, it is necessary to keep the air intake container sealed, and a sealing gasket needs to be installed at the position where the output end of the external motor passes through the air intake container, and the sealing effect of the sealing gasket needs to be checked regularly to prevent the sealing effect from being affected by aging of the sealing gasket. When the output end of the external motor rotates continuously, friction will be generated with the sealing gasket, and the frictional heat will cause the aging of the sealing gasket to accelerate; therefore, the existing stirring structure of the air intake container needs to be further optimized; to solve the above problems, the embodiment of the present invention provides a gear ring 22, a rotating plate 3 and other structures, and the specific use process is as follows: when in use, the air intake pipe 5 is externally connected to an inflation pump body, and the inflation pump body fills the external process gas into the interior of the air intake cylinder 11 through the air intake pipe 5, and then controls the drive motor 24 to start, and the drive motor 24 drives the start The gear 23 rotates, driving the gear ring 22 to drive the gear ring 22 to rotate on the surface of the air inlet cylinder 11. When the gear ring 22 rotates, it will drive the first magnetic block 21 on the surface of the rotating ring 2 to rotate synchronously. The first magnetic block 21 and the second magnetic block 30 are magnetically attracted. Therefore, when the first magnetic block 21 rotates, the second magnetic block 30 will drive the rotating piece 3 to rotate synchronously under the action of the magnetic force. The rotating piece 3 drives the rotating cylinder 31 to rotate, and the rotating cylinder 31 drives the stirring rod 32 to rotate. When the stirring rod 32 rotates, it mixes the process gas inside the air inlet cylinder 11. The whole process does not require the output end of the drive motor 24 to be inserted into the air inlet cylinder 11, which avoids frictional heat generation that causes accelerated aging of the sealing gasket, is conducive to long-term use, and realizes further optimization of the existing air inlet container stirring structure; It should be noted that an exhaust pump is provided between the furnace body 1 and the air inlet cylinder 11 . After the process gas cylinders in the air inlet cylinder 11 are mixed, the mixed process gas can be injected into the furnace body 1 through the exhaust pump.

[0023] A plurality of first through holes 33 are provided on the surface of the rotating cylinder 31. The first through holes 33 are provided at the connection position between the rotating cylinder 31 and the stirring rod 32. A through cavity connected to the first through hole 33 is provided inside the stirring rod 32. A through hole is provided on the side of the rotating piece 3. The rotating cylinder 31 is connected to the through hole. One end of the air inlet pipe 5 located inside the air inlet cylinder 11 is connected to the through hole and is rotatably connected. When the process gas is filled into the air inlet cylinder 11 through the air inlet pipe 5, the air inlet pipe 5 will inject the process gas into the rotating cylinder 31 through the through hole, and then enter the through cavity inside the stirring rod 32 through the first through hole 33, and finally be discharged through the through cavity. As the stirring rod 32 rotates inside the air inlet cylinder 11, the process gas will be discharged at different positions of the air inlet cylinder 11, thereby accelerating the mixing speed of the process gases and improving the efficiency of the process gas mixing.

[0024] The cam 36 is secured to the cam 36 by a spring 37 which is secured to the cam 36 and to the support 38. The cam 36 is secured to the cam 36 by a spring 37 which is secured to the cam 36 and to the support 38. The support block 38 is supported by the inclined surface of the inclined plate 39, and then drives the support block 38 to move linearly relative to the stirring rod 32. The support block 38 drives the filling block 34 to move synchronously through the slider 36. When the filling block 34 is driven to move, the blocked through-cavity is opened, so that the process gas entering the rotating cylinder 31 enters the through-cavity in the stirring rod 32 through the first through hole 33, and then is discharged through the through-cavity; in this process, the fixed plate 341 drives the guide rod 342 to move synchronously. Since the guide rod 342 passes through the stirring rod 32, the filling block 34 will move linearly relative to the through-cavity and will not leave the through-cavity. When the process gas mixing is completed, the stirring rod 32 stops rotating. Then, under the action of the connecting spring 37, the slider 36 drives the support block 38 to reset. When the support block 38 returns to its initial position, the filling block 34 is synchronously reset to the position of blocking the through-cavity. The through-cavity is blocked, preventing the process gas inside the air inlet cylinder 11 from flowing back into the through-cavity.

[0025] A plurality of second through holes 4 are uniformly formed on the surface of the rotating cylinder 31. A plurality of inflation tubes 41 in communication with the second through holes 4 are fixedly connected to the surface of the rotating cylinder 31. An inflation block 44 is slidably connected to the interior of the inflation tube 41. The inflation block 44 is located at the end of the inflation tube 41 away from the rotating cylinder 31. A buffer spring 45 is fixedly connected to the side of the inflation block 44. A bracket 46 is fixedly connected to the end of the buffer spring 45 away from the inflation block 44. The bracket 46 is fixedly connected to the inner wall of the inflation tube 41. A plurality of blocking plates 42 are fixedly connected to the interior of the rotating cylinder 31 for blocking the second through hole 4. An air hole communicating with the second through hole 4 is formed on the side of the blocking plate 42 facing the center of the rotating cylinder 31. An expansion airbag 43 is fixedly connected to the side of the blocking plate 42 facing the center of the rotating cylinder 31. When the rotating cylinder 31 is not rotating, the inflation block 44 inside the inflation tube 41 is pulled toward the sealing plate 42 by the action of the buffer spring 45, and the air inside the inflation tube 41 is squeezed through the air holes opened on the side of the sealing plate 42 and filled into the expansion airbag 43, so that the expansion airbag 43 expands in the rotating cylinder 31, and drives the process gas in the rotating cylinder 31 into the through cavity in the stirring rod 32. When the rotating cylinder 31 rotates, the inflation block 44 is reset to a position away from the sealing plate 42 under the action of centrifugal force, and then the expansion airbag 43 contracts and no longer expands to avoid affecting the circulation of the process gas in the rotating cylinder 31.

[0026] During the process of the rotating cylinder 31 decelerating from rotation to stationary state, the expansion airbag 43 remains inflated when the through cavity inside the stirring rod 32 is blocked by the filling block 34; so that during the deceleration of the rotating cylinder 31, the process gas inside the rotating cylinder 31 will first be squeezed into the through cavity inside the stirring rod 32. When the rotating cylinder 31 further decelerates, the filling block 34 will further reset to squeeze out the process gas inside the through cavity, and finally the through cavity will be blocked, thereby realizing the emptying of the process gas in the rotating cylinder 31 and avoiding the influence of residual gas on the purity of the process gas thereafter.

[0027] A pair of limiting rings 25 are sleeved on the surface of the air intake cylinder 11, which limit the position of the swivel 2 and the gear ring 22 on the air intake cylinder 11, thereby preventing the swivel 2 and the gear ring 22 from moving on the surface of the air intake cylinder 11, causing the gear ring 22 and the driving gear 23 to lose their meshing position.

[0028] A pair of limiting rings 25 are rotatably provided with a plurality of balls on opposite sides; the friction force between the swivel 2 and the gear ring 22 is reduced, friction loss between the swivel 2 and the gear ring 22 is prevented, and the service life of the swivel 2 and the gear ring 22 is extended.

[0029] The surface of the air inlet cylinder 11 is connected to a vacuum pump 110; during initial use, the air inside the air inlet cylinder 11 is discharged through the vacuum pump 110 to ensure the purity of the process gas that is subsequently rushed in; the center of the rotating piece 3 coincides with the center of the rotating ring 2; so that the straight line position corresponding to the first magnetic block 21 and the second magnetic block 30 is the shortest, so that the magnetic attraction between the first magnetic block 21 and the second magnetic block 30 is the largest, ensuring the effect of driving the rotating piece 3 to rotate by magnetic force.

[0030] The internal structure of the air intake cylinder 11 is made of corrosion-resistant plastic, which increases the service life of the air intake cylinder 11 and its internal structure.

[0031] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the foregoing embodiments. The foregoing embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An epitaxial furnace air inlet device, characterized in that: The furnace body comprises a furnace body, one side of which is connected to an air intake cylinder, a rotating ring is sleeved on the surface of the air intake cylinder, a plurality of first magnetic blocks are evenly fixed to the annular surface of the rotating ring, a side of the rotating ring is fixed to a gear ring, the bottom end of the gear ring is meshed with a gear, and the gear is externally connected to a drive motor, and the drive motor is used to drive the gear to rotate; A rotating plate is rotatably provided inside the air intake cylinder, and the rotating plate is rotatably connected to the inner wall of the end of the air intake cylinder. A plurality of second magnetic blocks are evenly fixed to the annular surface of the rotating plate, and there is magnetic attraction between the first magnetic block and the second magnetic block. A rotating cylinder is fixed to the side of the rotating plate, and a plurality of stirring rods are fixed to the side of the rotating cylinder. The end of the air intake cylinder is connected to an air intake pipe.

2. The epitaxial furnace air inlet device according to claim 1, characterized in that: A plurality of first through holes are provided on the surface of the rotating cylinder, the first through holes are provided at the connection position between the rotating cylinder and the stirring rod, a through cavity connected to the first through hole is provided inside the stirring rod, a through hole is provided on the side of the rotating piece, the rotating cylinder is connected to the through hole, and one end of the intake pipe located inside the intake cylinder is connected to the through hole and is rotatably connected.

3. The epitaxial furnace air inlet device according to claim 2, characterized in that: A filling block is inserted into the through-hole, and a slide groove is provided on the side of the filling block. A slider is slidably connected to the inside of the slide groove, and a connecting spring is fixedly connected between the slider and the inner wall of the slide groove. A support block is fixedly connected to the side of the slider outside the slide groove, and an inclined plate fixedly connected to the surface of the stirring rod is provided at the end of the support block close to the stirring rod. The support block is slidably connected to the inclined surface of the inclined plate, and a fixed plate is fixedly connected to the end of the filling block outside the through-hole, and a guide rod is fixedly connected to the surface of the fixed plate, and the guide rod passes through the stirring rod.

4. The epitaxial furnace air inlet device according to claim 3, characterized in that: A plurality of second through holes are evenly formed on the surface of the rotating cylinder, a plurality of inflation tubes connected to the second through holes are fixedly connected to the surface of the rotating cylinder, an inflation block is slidably connected to the interior of the inflation tube, the inflation block is located at the end of the inflation tube away from the rotating cylinder, a buffer spring is fixedly connected to the side of the inflation block, and a bracket is fixedly connected to the end of the buffer spring away from the inflation block, and the bracket is fixedly connected to the inner wall of the inflation tube; A plurality of sealing plates for sealing the second through holes are fixedly connected inside the rotating cylinder. An air hole communicating with the second through hole is opened on the side of the sealing plate facing the center of the rotating cylinder. An expansion airbag is fixedly connected to the side of the sealing plate facing the center of the rotating cylinder.

5. The epitaxial furnace air inlet device according to claim 4, characterized in that: During the process of the rotating drum decelerating from rotation to stationary state, the expansion airbag is first inflated to fill the interior of the rotating drum, and then the through cavity inside the stirring rod is blocked by the filling block.

6. The epitaxial furnace air inlet device according to claim 1, characterized in that: A pair of limiting rings are sleeved on the surface of the air intake cylinder, and the pair of limiting rings limit the positions of the rotating ring and the gear ring on the air intake cylinder.

7. The epitaxial furnace air inlet device according to claim 6, characterized in that: A plurality of balls are rotatably arranged on opposite sides of a pair of limiting rings.

8. The epitaxial furnace air inlet device according to claim 1, characterized in that: The surface of the air inlet cylinder is connected to and provided with an air pump.

9. The epitaxial furnace air inlet device according to claim 1, characterized in that: The center of the rotating piece coincides with the center of the rotating ring.

10. The epitaxial furnace air inlet device according to claim 1, characterized in that: The internal structure of the air intake cylinder is made of corrosion-resistant plastic.

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