Adjustable electrostatic chuck in the electrostatic area

Abstract

The application provides an electrostatic chuck with adjustable electrostatic area, belonging to the field of electrostatic chucks, which comprises a chuck body, a dielectric block installed at the top end of the outer shell of the chuck body, a plurality of electrostatic blocks installed above the dielectric block in a radial direction of the chuck body, a pressing mechanism arranged below the dielectric block and used for driving the plurality of electrostatic blocks to move towards or away from the axis of the chuck body synchronously, a jacking mechanism installed on the electrostatic block, a plurality of uniformly distributed air holes provided at the top of the electrostatic block, and a conveying channel connected to the air holes. The pressing mechanism is provided to provide extrusion and push, so that the plurality of electrostatic blocks can move towards or away from the axis of the chuck body synchronously, and the electrostatic blocks share the adjusting structure. Compared with the prior art, the adjusting structure does not need to be arranged on each electrostatic block independently, thereby simplifying the overall structure.

Description

TECHNICAL FIELD

[0001] The present application relates to electrostatic chuck, particularly to electrostatic chuck with adjustable electrostatic area. BACKGROUND

[0002] Electrostatic chuck is a precision device that uses electrostatic adsorption principle to fix objects. Its core structure includes electrode layer, insulating layer and substrate. When a voltage is applied to the electrode layer, a static electric field is generated on the surface of the chuck, which forms a static attraction between the chuck and the adsorbed object, thereby firmly adsorbing the object on the surface of the chuck.

[0003] In the prior art, to meet the adsorption needs of objects of different sizes, the electrostatic area at the top of the electrostatic chuck used to generate electrostatic adsorption is designed to have adjustable position. The specific implementation is to provide an independent adjusting structure on each electrostatic block constituting the electrostatic area, which however brings new problems: each electrostatic block needs to be equipped with an independent driving source and transmission components, thereby making the overall design of the electrostatic block adjusting structure complex. SUMMARY

[0004] The present application provides an electrostatic chuck with adjustable electrostatic area to solve the technical problem that the electrostatic area cannot share the adjusting structure and be adjusted synchronously by a single adjusting structure.

[0005] The present application solves the above technical problems by the following technical solutions:

[0006] The present application provides an electrostatic chuck with adjustable electrostatic area, comprising a chuck body, a dielectric block mounted to the top end of the housing of the chuck body, a plurality of electrostatic blocks, each of which is movably mounted in a slot radially opened on the top of the dielectric block, an extrusion mechanism arranged below the dielectric block, the extrusion mechanism being used to drive the plurality of electrostatic blocks to move synchronously towards or away from the axis of the chuck body, a jacking mechanism mounted to the electrostatic block, a plurality of evenly distributed air holes opened on the top of the electrostatic block, and a delivery channel connected to the air holes.

[0007] In the present technical solution, all electrostatic blocks on the electrostatic chuck share one adjusting structure, which realizes synchronous adjustment of all electrostatic blocks by a single adjusting structure and simplifies the overall structure.

[0008] Preferably, the extrusion mechanism comprises a movable seat and a motor fixedly installed at the bottom of the dielectric block, a stud is fixedly installed at the output shaft end of the motor, and a baffle disc is fixedly installed at the bottom end of the stud, a screw hole is formed in the middle of the movable seat, the screw hole is threadedly connected with the stud, the stud penetrates through the screw hole, and a plurality of inclined grooves are arranged in an annular array around the movable seat; the distance between the inclined grooves and the stud gradually increases from top to bottom.

[0009] In the technical solution, the movable seat is driven to move up and down, and the inclined grooves provide extrusion and pushing, so that all the electrostatic blocks move and are positioned; each electrostatic block is not provided with a separate positioning structure, and the problem of complex structure is avoided.

[0010] Preferably, a plurality of sliding grooves are formed in an annular array on the dielectric block, a sliding seat is slidably connected with each of the sliding grooves, the top of the sliding seat is fixedly connected with the bottom surface of the electrostatic block, the bottom surface of the electrostatic block is attached to the top surface of the dielectric block, a baffle seat is fixedly installed at the bottom of the sliding seat, and the baffle seat is attached to the bottom surface of the dielectric block.

[0011] In the technical solution, the sliding seat and the sliding groove are designed to provide sliding guidance for the movement of the electrostatic block, and the baffle seat provides a blocking action, so that the electrostatic block cannot fall off the dielectric block and is limited in the vertical direction.

[0012] Preferably, an abutting rod is fixedly installed at the bottom of the baffle seat, a roller is rotatably installed at one end of the abutting rod, and the roller is slidably installed in the inclined groove.

[0013] In the technical solution, the roller provides rolling friction to reduce friction and wear, and the roller slides in the inclined groove to provide vertical limiting and guiding for the movable seat; the movable seat does not need to be additionally provided with a vertical guiding structure.

[0014] Preferably, a second groove is formed in one side wall of the sliding groove, a first spring is installed in the second groove, and one end of the first spring abuts against one side wall of the sliding seat.

[0015] In the technical solution, when the electrostatic block moves away from the axis of the suction disc body, the first spring is compressed, and the elastic force of the compressed first spring can provide a restoring force for the electrostatic block to move close to the axis of the suction disc body.

[0016] Preferably, the jacking mechanism comprises a jacking rod; the jacking rod is L-shaped, comprising a vertical part and a horizontal part; a vertical slot with a top opening is formed on the sliding seat; the vertical part of the jacking rod is slidingly installed into the vertical slot; a side slot in communication with the vertical slot is formed on one side of the sliding seat; the horizontal part of the jacking rod penetrates through the side slot and is slidingly connected with the side slot; a guide hole is formed in the middle of the electrostatic block, and the top end of the guide hole is provided with an opening; and the vertical part of the jacking rod is slidingly connected with the guide hole.

[0017] In the technical solution, the jacking mechanism is used for jacking up the object on the electrostatic block by the jacking rod, so that the object is separated from the electrostatic block.

[0018] Preferably, a first recess is formed on one side of the sliding groove; a vertical telescopic rod is fixedly installed in the end of the first recess away from the sliding groove; a sliding strip is fixedly connected with the output shaft of the telescopic rod; a strip-shaped slot is formed in the horizontal part of the jacking rod; the sliding strip is slidingly connected with the strip-shaped slot; and the cross section of the strip-shaped slot and the sliding strip is in convex letter type structure.

[0019] In the technical solution, the telescopic rod is used for providing vertical driving for the jacking rod, so that the jacking rod moves up and down; and the sliding strip and the strip-shaped slot are used for forming a telescopic structure in the horizontal direction, so as to adapt to the horizontal movement of the electrostatic block.

[0020] Preferably, a third recess is formed on the bottom wall of one side of the first recess close to the sliding groove; a pressing mechanism is arranged in the third recess; the pressing mechanism comprises a pressing block; the pressing block is connected into the third recess in a matched mode; a second spring is arranged in the third recess; a bottom slot is formed in the bottom of the pressing block; the second spring extends into the bottom slot; the two ends of the second spring are fixedly connected with the bottom wall of the third recess and the top surface of the bottom slot, respectively; and the top of the pressing block abuts against the bottom surface of the horizontal part of the jacking rod.

[0021] In the technical solution, after the electrostatic block is moved and positioned, the pressing mechanism is used for providing pressing limiting, so as to avoid the movement of the electrostatic block under external force.

[0022] Preferably, the conveying channel comprises an inner cavity formed on the electrostatic block; the bottom of the inner cavity is open; the bottom of the inner cavity is in communication with the top of the sliding groove; and the air hole is in communication with the inner cavity.

[0023] In the technical solution, the conveying channel is used for inputting air flow into the air hole; and the air hole is used for uniformly blowing air to the object above the electrostatic block.

[0024] Preferably, the top of the electrostatic block is provided with a plurality of convex parts distributed uniformly; an interval slot is formed between every two adjacent convex parts; and the air hole is arranged in the interval slot.

[0025] In the technical solution, the air hole is arranged in the interval groove, so that air can be conveniently blown to the object on the top surface of the electrostatic block.

[0026] On the basis of common knowledge in the art, the above-mentioned preferred conditions can be combined arbitrarily, thereby obtaining each preferred example of the present application.

[0027] The positive progress effect of the present application is that:

[0028] The electrostatic chuck with adjustable electrostatic area provided above is provided with an extrusion mechanism, the extrusion mechanism provides extrusion and pushing, a plurality of electrostatic blocks can be synchronously moved close to or away from the shaft center of the chuck body, the design of adjustable electrostatic area is realized, the adsorption demand of objects of different sizes is met, and compared with the prior art, the adjustment structure does not need to be arranged on each electrostatic block, the overall structure is simplified, further, the jacking mechanism and the abutting mechanism are arranged, after the adjustment of the electrostatic block, the jacking mechanism is in a low position state, the jacking rod thereon is stored in the electrostatic block and presses down the abutting mechanism to generate abutting pressure, the adjusted electrostatic block is positioned, when the object needs to be separated from the electrostatic block, the jacking mechanism can jacking up the object, the object is automatically separated from the electrostatic block, the object is conveniently taken down, at the same time, the jacking mechanism is separated from the abutting mechanism, the abutting effect is lost, when the electrostatic block is adjusted and moved next time, friction and wear with the abutting mechanism are avoided, further, through the arrangement of the conveying channel and the air hole, the object placed on the electrostatic block can be uniformly blown, the conveying channel is composed of the inner cavity arranged on the electrostatic block and the sliding groove arranged on the dielectric block, and the inner cavity bottom and the sliding groove always have partial overlapping alignment before and after the movement and adjustment of the electrostatic block, the two always keep communication, at the same time, the bottom surface of the electrostatic block always covers and shields the sliding groove, air leakage from other positions is avoided, so that the blowing effect of the air hole on the electrostatic block is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a schematic structural view of the whole of the present application.

[0030] Figure 2 It is a schematic structural view of the whole of the present application.

[0031] Figure 3 It is a schematic structural view of the inside of the top of the shell of the present application.

[0032] Figure 4 It is a schematic structural view of the inside of the top of the shell of the present application.

[0033] Figure 5 It is a schematic structural view of the inside of the top of the shell of the present application. Figure 4

[0034] Figure 6 It is a schematic structural view of the electrostatic block of the present application. ​

[0035] Figure 7 It is the structural schematic view of the movable seat and the abutting rod of the application.

[0036] Figure 8 It is the structural schematic view of the top driving mechanism and the sliding seat of the application.

[0037] Figure 9 It is the sectional structural schematic view of the sliding bar and the bar-shaped slot of the application.

[0038] Explanation of reference signs

[0039] In the figure: 1, suction cup body; 101, outer shell; 2, dielectric block; 201, sliding groove; 202, first groove; 203, second groove; 204, third groove; 3, electrostatic block; 301, inner cavity; 302, air hole; 303, guide hole; 4, extrusion mechanism; 401, movable seat; 4011, inclined slot; 4012, screw hole; 402, stud; 403, motor; 404, baffle disc; 5, top driving mechanism; 501, top driving rod; 502, telescopic rod; 503, sliding bar; 504, bar-shaped slot; 6, abutting rod; 601, roller; 7, sliding seat; 701, vertical slot; 702, side slot; 8, baffle seat; 9, first spring; 10, abutting mechanism; 1001, pressing block; 1002, bottom slot; 1003, second spring. DETAILED DESCRIPTION

[0040] The application will be further described in the following by way of examples, but the application is not limited to the scope of the examples.

[0041] As Figures 1-9 shown, the electrostatic suction cup with adjustable electrostatic area comprises a suction cup body 1, and further comprises:

[0042] a dielectric block 2, which is installed at the top end of the outer shell 101 of the suction cup body 1;

[0043] a plurality of electrostatic blocks 3, which are respectively movably installed in a plurality of slots radially opened on the top of the dielectric block 2; in the specific implementation, the number of the electrostatic blocks 3 can be four, and the four electrostatic blocks 3 can be away from or close to each other to adjust the size of the electrostatic area adsorption surface.

[0044] an extrusion mechanism 4, which is arranged below the dielectric block 2 and is used to drive the plurality of electrostatic blocks 3 to synchronously close to or away from the shaft center of the suction cup body 1;

[0045] a top driving mechanism 5, which is installed on the electrostatic block 3;

[0046] The top of the electrostatic block 3 is provided with a plurality of uniformly distributed air holes 302, and the air holes 302 are communicated with conveying channels.

[0047] As shown in Figure 3 , Figure 4 and Figure 7 , as a specific technical solution, the extrusion mechanism 4 includes a movable seat 401 and a motor 403 fixedly installed at the bottom of the dielectric block 2, the output shaft end of the motor 403 is fixedly installed with a stud 402, and the bottom end of the stud 402 is fixedly installed with a baffle disc 404, the middle part of the movable seat 401 is provided with a threaded hole 4012, the threaded hole 4012 is threadedly connected with the stud 402, and the stud 402 penetrates through the threaded hole 4012, and a plurality of inclined grooves 4011 are arranged in an annular array around the movable seat 401; the distance between the inclined grooves 4011 and the stud 402 gradually increases from top to bottom. The motor 403 is a servo motor 403.

[0048] As shown in Figures 3-4 , as a specific technical solution, a plurality of slide grooves 201 are arranged in an annular array on the dielectric block 2, and a plurality of slide grooves 201 are slidably connected with slide seats 7, the top of the slide seat 7 is fixedly connected with the bottom surface of the electrostatic block 3, and the bottom surface of the electrostatic block 3 is attached to the top surface of the dielectric block 2, and the bottom of the slide seat 7 is fixedly installed with a baffle seat 8, and the baffle seat 8 is attached to the bottom surface of the dielectric block 2.

[0049] As shown in Figure 3 , Figure 4 and Figure 7 , as a specific technical solution, the bottom of the baffle seat 8 is fixedly installed with an abutting rod 6, one end of the abutting rod 6 is rotatably installed with a roller 601, and the roller 601 is slidably installed in the inclined groove 4011.

[0050] As shown in Figures 3-4 , as a specific technical solution, one side wall of the slide groove 201 is provided with a second groove 203, the first spring 9 is installed in the second groove 203, and one end of the first spring 9 is abutted to one side wall of the slide seat 7.

[0051] As shown in Figures 3-4 , at this time, all the electrostatic blocks 3 are in a state close to the axis of the suction disc body 1, and at this time, the roller 601 is abutted and attached to the top groove wall of the inclined groove 4011; in the process of driving the movable seat 401 to move upward, the roller 601 is extruded and pushed by the inclined groove 4011, so that the abutting rod 6, the baffle seat 8, the slide seat 7 and the electrostatic block 3 move away from the axis of the suction disc body 1.

[0052] And in the process of moving away from the chuck body 1 axis of the electrostatic block 3, the sliding seat 7 slides in the sliding groove 201 (the sliding seat 7 is provided with a sealing ring between the sliding groove 201 side wall, and the bottom of the electrostatic block 3 is provided with a sealing pad to provide sealing), and the first spring 9 is compressed; subsequently in the driving activity seat 401 downward reset movement, through the compression of the first spring 9, the sliding seat 7 resets in the sliding groove 201, and drives the electrostatic block 3, the stop seat 8 and the abutting rod 6 to reset movement, that is, the electrostatic block 3 moves close to the chuck body 1 axis direction, wherein the roller 601 on the abutting rod 6 is always abutting in the inclined groove 4011 through the elastic force of the first spring 9.

[0053] Through the above, all the electrostatic block 3 is synchronized to move close to or away from the chuck body 1 axis, that is, the electrostatic area is adjustable, and different sizes of the adsorption surface are provided to meet the adsorption needs of different sizes of objects.

[0054] And through the design of the roller 601, the roller 601 rolls with the inclined groove 4011 to reduce friction and wear.

[0055] In specific implementation, the up and down movement of the activity seat 401 is driven by the motor 403 to rotate the stud 402 forward or reverse, and then the stud 402 is screwed with the screw hole 4012 on the activity seat 401 through the screw thread, and the vertical limiting effect is provided by the sliding of the roller 601 in the inclined groove 4011, so that the activity seat 401 moves up and down in the vertical direction.

[0056] The bottom end of the stud 402 is provided with a stop disc 404, and the diameter of the stop disc 404 is greater than the hole diameter of the screw hole 4012; when the activity seat 401 is in the low position, as shown in Figure 4 , the bottom of the activity seat 401 is attached to the top surface of the stop disc 404, and the stop disc 404 is used to block the activity seat 401 to avoid the activity seat 401 from falling off the stud 402.

[0057] As shown in Figure 4 , Figure 8 and Figure 9 , as a specific technical solution, the jacking mechanism 5 comprises a jacking rod 501; the jacking rod 501 is L-shaped, comprising a vertical part and a horizontal part, a vertical slot 701 with a top opening is formed in the sliding seat 7, the vertical part of the jacking rod 501 is slidably installed in the vertical slot 701, a side slot 702 communicating with the vertical slot 701 is formed in one side of the sliding seat 7, the horizontal part of the jacking rod 501 penetrates through the side slot 702, and the horizontal part of the jacking rod 501 is slidably connected with the side slot 702, a guide hole 303 is formed in the middle of the electrostatic block 3, and the top end of the guide hole 303 is provided with an opening, and the vertical part of the jacking rod 501 is slidably connected with the guide hole 303.

[0058] As Figure 4 , Figure 8 and Figure 9 shown, as a specific technical solution, one side of the chute 201 is provided with a first recess 202, and a vertical telescopic rod 502 is fixedly installed in the end of the first recess 202 away from the chute 201, the output shaft of the telescopic rod 502 is fixedly connected with a sliding bar 503, the horizontal part of the knock rod 501 is provided with a strip-shaped groove 504, the sliding bar 503 is in sliding connection with the strip-shaped groove 504, and the cross section of the strip-shaped groove 504 and the sliding bar 503 is in a convex letter type structure. The telescopic rod 502 is an electric push rod, a pneumatic cylinder or a hydraulic cylinder.

[0059] Through the convex letter type arrangement of the strip-shaped groove 504 and the sliding bar 503, the horizontal part of the knock rod 501 and the sliding bar 503 are prevented from falling off in the vertical direction, the sliding bar 503 can drive the knock rod 501 to move up and down together, and the sliding bar 503 and the horizontal part of the knock rod 501 can relatively move in the horizontal direction, so as to be suitable for the horizontal movement adjustment of the electrostatic block 3.

[0060] As Figures 4-5 shown, as a specific technical solution, the first recess 202 is provided with a third recess 204 on the side bottom wall close to the chute 201, a abutting mechanism 10 is arranged in the third recess 204, the abutting mechanism 10 comprises a pressing block 1001, the pressing block 1001 is in matched connection into the third recess 204, a second spring 1003 is arranged in the third recess 204, a bottom groove 1002 is formed in the bottom of the pressing block 1001, the second spring 1003 extends into the bottom groove 1002, and the two ends of the second spring 1003 are fixedly connected with the bottom wall of the third recess 204 and the top surface of the bottom groove 1002 respectively; the top of the pressing block 1001 is in abutment with the bottom surface of the horizontal part of the knock rod 501.

[0061] Before the static block 3 is adjusted, the telescopic rod 502 is retracted, the slide bar 503 drives the jacking rod 501 to move upwards, the horizontal part of the jacking rod 501 is separated from the pressing block 1001, the pressing block 1001 is moved upwards by the elastic force of the second spring 1003, and the jacking rod 501 loses the compression and limiting of the pressing block 1001. When the subsequent static block 3 is adjusted and moved, the jacking rod 501 does not slide with the pressing block 1001, thereby reducing the resistance and wear. The slide bar 503 and the strip-shaped groove 504 are always connected and not separated before and after the static block 3 is adjusted. After the static block 3 is adjusted, the telescopic rod 502 is extended, the slide bar 503 drives the jacking rod 501 to move downwards, the vertical part of the jacking rod 501 is received in the guide hole 303 of the static block 3 and does not protrude, and the jacking rod 501 does not affect the placement of the object on the top of the static block 3. When the jacking rod 501 moves downwards, the horizontal part of the jacking rod 501 presses the pressing block 1001 of the pressing mechanism 10, and the horizontal part of the jacking rod 501 is attached to the bottom groove wall of the first groove 202. The pressing block 1001 is pushed into the third groove 204 and compresses the second spring 1003. The compression elastic force of the second spring 1003 makes the top of the pressing block 1001 press on the horizontal part of the jacking rod 501, thereby providing a large friction force for the jacking rod 501 to provide limiting and positioning for the slide seat 7 and the static block 3, and limiting the static block 3 after adjustment.

[0062] After the static block 3 is adjusted, the object is placed on the static block 3 and is adsorbed. The object is processed in the adsorbed and fixed state. After the processing is completed, the telescopic rod 502 is retracted, the jacking rod 501 is moved upwards, the top of the jacking rod 501 protrudes from the top of the guide hole 303, the object is lifted, the object is separated from the static block 3, and the object is conveniently taken out.

[0063] As shown in Figure 4 , as a specific technical solution, the conveying channel comprises an inner cavity 301 formed in the static block 3, the bottom of the inner cavity 301 is open, the bottom of the inner cavity 301 is communicated with the top of the chute 201, and the air hole 302 is communicated with the inner cavity 301.

[0064] As shown in Figure 4 , the opening of the bottom of the inner cavity 301 has sufficient width in the horizontal direction. When the static block 3 moves close to or away from the axis of the suction cup body 1, the opening of the bottom of the inner cavity 301 is always communicated with the top of the chute 201, and the static block 3 continuously covers and shields the top of the chute 201. The helium gas enters the chute 201 and can only be input into the inner cavity 301.

[0065] In the specific implementation, the suction cup body 1 is provided with a helium gas conveying passage and a temperature control structure, helium gas is conveyed to the bottom of the dielectric block 2, then input into the inner cavity 301 through the chute 201, and then blown to the bottom surface of the object from the top of the electrostatic block 3 through the air holes 302; and the air holes 302 are uniformly distributed on the electrostatic block 3, so that the bottom of the object is uniformly blown.

[0066] As shown in Figure 3 , Figure 4 and Figure 6 , as a specific technical solution, the top of the electrostatic block 3 is provided with a plurality of uniformly distributed protruding portions, an interspace is formed between every two adjacent protruding portions, and the air holes 302 are arranged in the interspace.

[0067] By arranging the protruding portions and the air holes 302 in the interspace between the protruding portions, the air holes 302 are facilitated to blow helium gas to the bottom surface of the object on the top surface of the electrostatic block 3.

[0068] The present application is not limited to the above-mentioned embodiments, and any changes in shape or structure fall within the protection scope of the present application. Those skilled in the art can make various changes or modifications to the embodiments without departing from the principles and essence of the present application, and these changes and modifications fall within the protection scope of the present application.

Claims

1. An electrostatic chuck with an adjustable electrostatic area, comprising a chuck body (1); characterized in that: Also includes: a dielectric block (2), the dielectric block (2) being mounted to the top end of the housing (101) of the suction cup body (1); Electrostatic blocks (3), the number of the electrostatic blocks (3) is several, and the several electrostatic blocks (3) are movably mounted on several slots provided in the radial direction of the top of the dielectric block (2); An extrusion mechanism (4), the extrusion mechanism (4) being arranged below the dielectric block (2), and the extrusion mechanism (4) being used to drive a plurality of the electrostatic blocks (3) to synchronously approach or move away from the axis of the suction cup body (1); A pushing mechanism (5), wherein the pushing mechanism (5) is mounted on the electrostatic block (3); The top of the electrostatic block (3) is provided with a plurality of evenly distributed air holes (302), and the air holes (302) are connected to a conveying channel; The extrusion mechanism (4) comprises a movable seat (401) and a motor (403) fixedly mounted to the bottom of the dielectric block (2); a stud (402) is fixedly mounted on the output shaft end of the motor (403); and a baffle (404) is fixedly mounted on the bottom end of the stud (402); a screw hole (4012) is provided in the middle of the movable seat (401); the screw hole (4012) is threadedly connected to the stud (402), and the stud (402) passes through the screw hole (401). 2), the movable seat (401) is provided with a plurality of inclined grooves (4011) distributed in a circular array around the periphery; the spacing between the inclined grooves (4011) and the studs (402) gradually increases from top to bottom; the dielectric block (2) is provided with a plurality of sliding grooves (201) distributed in a circular array, and the plurality of sliding grooves (201) are all slidably connected to a sliding seat (7), the top of the sliding seat (7) is fixedly connected to the bottom surface of the electrostatic block (3), and the electrostatic block (3) is fixedly connected to the bottom surface of the electrostatic block (3). ) is fitted with the top surface of the dielectric block (2); a stopper (8) is fixedly installed on the bottom of the sliding seat (7); the stopper (8) is fitted with the bottom surface of the dielectric block (2); the pushing mechanism (5) includes a pushing rod (501); the pushing rod (501) is L-shaped, and the pushing rod (501) includes a vertical portion and a horizontal portion; a vertical slot (701) with a top opening is provided on the sliding seat (7), and the vertical portion of the pushing rod (501) is slidably mounted. Installed in the vertical groove (701), one side of the sliding seat (7) is provided with a side groove (702) connected to the vertical groove (701), the horizontal portion of the pushing rod (501) passes through the side groove (702), and the horizontal portion of the pushing rod (501) is slidably connected to the side groove (702), the middle portion of the electrostatic block (3) is provided with a guide hole (303), and the top end of the guide hole (303) is provided with an opening, and the vertical portion of the pushing rod (501) is slidably connected to the guide hole (303).

2. The electrostatic chuck with adjustable electrostatic area according to claim 1, wherein: An abutment rod (6) is fixedly mounted on the bottom of the blocking seat (8), a roller (601) is rotatably mounted on one end of the abutment rod (6), and the roller (601) is slidably mounted in the inclined groove (4011).

3. The electrostatic chuck with adjustable electrostatic area according to claim 1, wherein: A second groove (203) is formed on one side wall of the slide groove (201), a first spring (9) is installed in the second groove (203), and one end of the first spring (9) abuts against a side wall of the sliding seat (7).

4. The electrostatic chuck with adjustable electrostatic area according to claim 1, wherein: A first groove (202) is provided on one side of the slide groove (201), a vertical telescopic rod (502) is fixedly installed in one end of the first groove (202) away from the slide groove (201), an output shaft of the telescopic rod (502) is fixedly connected to a slide bar (503), a strip groove (504) is provided on the horizontal portion of the push rod (501), the slide bar (503) is slidably connected to the strip groove (504), and the cross-sections of the strip groove (504) and the slide bar (503) are convex-shaped structures.

5. The electrostatic chuck with adjustable electrostatic area according to claim 4, wherein: A third groove (204) is provided on the bottom wall of the first groove (202) on one side close to the slide groove (201), and a tightening mechanism (10) is provided in the third groove (204). The tightening mechanism (10) includes a pressure block (1001), and the pressure block (1001) is connected to the third groove (204). A second spring (1003) is provided in the third groove (204). A bottom groove (1002) is provided at the bottom of the pressure block (1001), and the second spring (1003) extends into the bottom groove (1002). The two ends of the second spring (1003) are fixedly connected to the bottom wall of the third groove (204) and the top surface of the bottom groove (1002) respectively; the top of the pressure block (1001) is in contact with the bottom surface of the horizontal portion of the push rod (501).

6. The electrostatic chuck with adjustable electrostatic area according to claim 1, wherein: The conveying channel includes an inner cavity (301) opened on the electrostatic block (3), the bottom of the inner cavity (301) is open, and the bottom of the inner cavity (301) is connected to the top of the chute (201), and the air hole (302) is connected to the inner cavity (301).

7. The electrostatic chuck with adjustable electrostatic area according to claim 1, wherein: The top of the electrostatic block (3) is provided with a plurality of evenly distributed protrusions, and grooves are formed between every two adjacent protrusions, and the air holes (302) are provided in the grooves.

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