Method, device and equipment for controller to interact with human-computer interaction device and medium

Abstract

The application provides a method and device for a controller to interact with a human-computer interaction device, equipment and a medium. The method is suitable for a many-to-many network architecture and comprises the following steps: when a binding request sent by one of the human-computer interaction devices is received, permission verification is performed based on a target device identifier; if the permission verification is passed, it is detected whether the current controller is already bound to a human-computer interaction device; if not, the current controller is bound to one of the human-computer interaction devices; heartbeat detection is performed; if the heartbeat detection is successful, it is determined whether an operation instruction sent by one of the human-computer interaction devices is received within a predetermined time period after the success; if the heartbeat detection fails or an operation instruction sent by one of the human-computer interaction devices is not received within the predetermined time period after the success, the binding between one of the human-computer interaction devices and the current controller is released. The application can realize flexible connection between any human-computer interaction device and any controller and support multi-task parallel operation.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a method, apparatus, device, and medium for interaction between a controller and a human-machine interface device. Background Technology

[0002] In the field of semiconductor equipment control, semiconductor equipment is generally controlled through a human-machine interface (HMI) system composed of a human-machine interface device (HMI) and a controller (such as a programmable logic controller, PLC). For example, wafer cleaning equipment typically includes multiple independent process modules, each controlled by a dedicated controller, and each controller is communicatively connected to a corresponding HMI device. Traditional HMI systems mainly have the following two architectures:

[0003] The first architecture is a one-to-one structure where one human-machine interface device corresponds to one controller. Under this architecture, operators need to control the corresponding controller on the human-machine interface device at a specific workstation. The interaction flexibility is insufficient, and dynamic collaboration cannot be supported. When cross-workstation scheduling is required, operators need to frequently move to the locations of different human-machine interface devices.

[0004] The second architecture is a one-to-many architecture where one human-computer interaction device corresponds to multiple controllers. For scenarios requiring multiple devices to operate collaboratively, this architecture does not support a single human-computer interaction device operating multiple controllers simultaneously. Summary of the Invention

[0005] To address the problems of insufficient flexibility in the interaction between controllers and human-machine interaction devices in the prior art, and the inability to meet the dynamic collaborative operation of multiple controllers, the present invention provides a method, apparatus, device, and medium for the interaction between controllers and human-machine interaction devices.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] In a first aspect, the present invention provides a method for a controller to interact with a human-computer interaction device, wherein a plurality of controllers and a plurality of human-computer interaction devices are interconnected via a switch, the method being applicable to the controllers and comprising:

[0008] When a binding request is received from one of the human-computer interaction devices, and the binding request includes the target device identifier of the one of the human-computer interaction devices, permission verification is performed based on the target device identifier;

[0009] If the permission verification passes, check whether the controller is already bound to a human-computer interaction device;

[0010] If not bound, the current controller will be bound to one of the human-computer interaction devices so that the current controller and the one of the human-computer interaction devices can interact with each other.

[0011] A heartbeat detection is performed to determine whether the controller and one of the human-machine interaction devices are in a normal communication connection state.

[0012] If the heartbeat detection is successful, determine whether an operation command sent by one of the human-computer interaction devices has been received within a predetermined time after the success.

[0013] If the heartbeat detection fails, or if no operation command is received from one of the human-computer interaction devices within a predetermined time after the heartbeat detection is successful, the binding of one of the human-computer interaction devices to the current controller will be released.

[0014] Furthermore, the method also includes: when an operation instruction is received from one of the human-computer interaction devices within a predetermined time after a successful heartbeat detection, executing the operation instruction and returning to the step of performing heartbeat detection.

[0015] Furthermore, after the permission verification is passed, the method further includes:

[0016] Identify the target permission level corresponding to the target device identifier;

[0017] When an operation instruction is received from one of the human-computer interaction devices within a predetermined time after a successful heartbeat detection, it is determined whether the operation instruction matches the target permission level. If they match, the operation instruction is executed; otherwise, the operation instruction is refused to be executed.

[0018] Return to the steps described for performing heartbeat detection.

[0019] Furthermore, when bound to one of the human-computer interaction devices, the method further includes: if an operation instruction is received from another human-computer interaction device, then the operation instruction is refused to be executed.

[0020] Further, the permission verification based on the target device identifier includes:

[0021] The target device identifier is matched with the pre-stored device identifier. If the match is successful, the permission verification is passed.

[0022] Furthermore, the method also includes:

[0023] The operation log records the binding request received by the controller, the bound human-computer interaction device, and the received operation instructions.

[0024] Furthermore, the method also includes encrypting the data during the data interaction between the controller and one of the human-computer interaction devices.

[0025] Secondly, the present invention provides a device for interaction between a controller and a human-computer interaction device, wherein a plurality of controllers and a plurality of human-computer interaction devices are interconnected via a switch, the device is adapted to the controller, and includes:

[0026] The permission verification module is used to perform permission verification based on the target device identifier when it receives a binding request sent by one of the human-computer interaction devices, and the binding request includes the target device identifier of the one of the human-computer interaction devices.

[0027] The binding module is used to detect whether the current controller has been bound to a human-computer interaction device when the permission verification is passed. If it is not bound, the current controller is bound to one of the human-computer interaction devices so that the current controller and one of the human-computer interaction devices can interact with each other.

[0028] A heartbeat detection module is used to detect whether the controller and one of the human-machine interaction devices are in a normal communication connection state.

[0029] The timeout detection module is used to determine whether an operation command sent by one of the human-computer interaction devices has been received within a predetermined time after the heartbeat detection is successful.

[0030] The binding unbinding module is used to unbind one of the human-computer interaction devices from the current controller when the heartbeat detection fails or when no operation command is received from one of the human-computer interaction devices within a predetermined time after the heartbeat detection is successful.

[0031] Thirdly, the present invention provides a semiconductor device, the semiconductor device including multiple process modules, multiple controllers and multiple human-machine interaction devices, wherein the multiple process modules and the multiple controllers are connected in a one-to-one correspondence, wherein the multiple controllers and the multiple human-machine interaction devices are interconnected through a switch, and the controllers are used to implement the method of interaction between the controllers and the human-machine interaction devices as described above.

[0032] Fourthly, the present invention provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method for interaction between the controller and the human-computer interaction device as described above.

[0033] Fifthly, the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the method for interaction between a controller and a human-computer interaction device as described above.

[0034] By adopting the above technical solution, the present invention has the following beneficial effects:

[0035] This invention breaks through the limitations of traditional one-to-one or one-to-many architectures. By interconnecting multiple controllers and multiple human-machine interface devices through switches, it constructs a many-to-many parallel interactive network system. Simultaneously, by providing corresponding intelligent interaction methods, it enables real-time data interaction between any human-machine interface device and any controller within the same network system, supporting multiple sets of interactive operations simultaneously, greatly improving the operational parallelism and management efficiency of the network system. Furthermore, this invention allows human-machine interface devices to flexibly switch to interact with any idle controller (i.e., not bound to other human-machine interface devices) as needed. When a controller is idle, a human-machine interface device can quickly bind to that controller and perform data interaction according to user commands, without complex manual configuration or restart operations. In addition, to ensure control stability and security, this invention designs an exclusive interaction mode, allowing binding only when the controller is idle to the currently requesting human-machine interface device. After binding, the interaction permissions of other human-machine interface devices are automatically cut off, achieving secure isolation of interaction and eliminating the risk of control chaos. Attached Figure Description

[0036] Figure 1 This is a network system architecture diagram of multiple controllers and multiple human-computer interaction devices in this invention;

[0037] Figure 2 This is a flowchart of the method for the controller to interact with the human-computer interaction device in Embodiment 1 of the present invention;

[0038] Figure 3 This is a structural block diagram of the system in Embodiment 3 of the present invention that allows the controller to interact with the human-computer interaction device.

[0039] Figure 4 This is a hardware architecture diagram of the electronic device in Embodiment 4 of the present invention. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention.

[0041] The terminology used in this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of this disclosure. The singular forms “a,” “the,” and “the” as used in this disclosure and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

[0042] This invention provides a method, apparatus, device, and medium for interaction between a controller and a human-machine interface device, thereby achieving a breakthrough in realizing the dynamic interaction capability between any human-machine interface device and any controller within the same device cluster. This can meet the high-precision control requirements of multi-station collaborative monitoring and multi-process parallel operation in semiconductor equipment.

[0043] Example 1

[0044] This embodiment provides a method for a controller to interact with a human-computer interaction device, which is applied to, for example... Figure 1 The distributed system architecture shown includes multiple controllers and multiple human-machine interface devices connected via switches (such as Ethernet switches), with communication links established based on the Modbus TCP protocol. Each controller and each human-machine interface device is assigned a unique static ID as its identifier; the IDs of controllers and human-machine interface devices can be the same or different.

[0045] In this embodiment, the controller includes, but is not limited to, a PLC controller, and the human-machine interaction device includes, but is not limited to, a touch screen. The configuration software of the human-machine interaction device is configured with communication parameters, and the interface of the human-machine interaction device displays the identifier of the controller currently bound to it.

[0046] The aforementioned distributed system architecture can be applied to control semiconductor equipment, such as wafer cleaning equipment. Each controller is connected to a corresponding process module of the semiconductor equipment to monitor and operate that module.

[0047] When a user needs a human-computer interaction device to interact with a designated controller, the user inputs an interaction command into the corresponding human-computer interaction device. This interaction command carries the identifier of the corresponding controller to instruct the human-computer interaction device to interact with the corresponding controller.

[0048] When a human-computer interaction device receives an interaction command from a user, it first checks whether it is already bound to another controller (excluding the designated controller). If it is bound, it first unbinds itself from the other controllers and then sends a binding request to the corresponding controller. If it is not bound, it directly sends a binding request to the corresponding controller. This binding request includes the target device identifier corresponding to the requesting human-computer interaction device.

[0049] After the human-computer interaction device sends a binding request, subsequent steps will be executed by the corresponding controller. The method for interaction between the controller and the human-computer interaction device provided in this embodiment is applicable to any controller, such as... Figure 2 As shown, the method specifically includes the following steps:

[0050] Step S1: When a binding request is received from one of the human-computer interaction devices, and the binding request includes the target device identifier corresponding to the one of the human-computer interaction devices, permission verification is performed based on the target device identifier. If the permission verification passes, step S2 is executed; otherwise, the binding is rejected, and a permission verification failure message is sent back to the one of the human-computer interaction devices.

[0051] In one feasible approach, the specific process for performing permission verification in this step is as follows: the target device identifier is matched with multiple pre-stored device identifiers. If it matches one of the pre-stored device identifiers, the permission verification passes; if it does not match any of the pre-stored device identifiers, the permission verification fails.

[0052] Step S2: Detect whether the current controller has been bound to a human-machine interface device. If it has been bound, to ensure the stability and security of the control, no further operations will be performed to ensure that the bound human-machine interface device can exclusively interact with the current controller. If it has not been bound, it means that the current controller is in an idle state, and then proceed to step S3.

[0053] Step S3: Bind the current controller to one of the human-machine interaction devices so that the current controller and the human-machine interaction device can interact with each other.

[0054] Step S4: Start heartbeat detection to check whether the current controller and one of the human-machine interaction devices are in a normal communication connection state. If the heartbeat detection is successful, proceed to step S5; otherwise, proceed to step S6.

[0055] In one feasible approach, heartbeat detection is performed by the following steps: sending a heartbeat request packet to one of the human-computer interaction devices at a predetermined period (e.g., 100ms); if a response packet is received from one of the human-computer interaction devices in response to the heartbeat request packet, the heartbeat detection is successful; otherwise, the heartbeat detection fails.

[0056] Step S5: Determine whether an operation command sent by one of the human-computer interaction devices has been received within a predetermined time (e.g., 30 seconds) after the heartbeat detection is successful. If no command is received, proceed to step S6; otherwise, proceed to step S7.

[0057] Step S6: Unbind one of the human-computer interaction devices from the current controller.

[0058] This step involves actively unbinding the controller, thereby releasing controller resources in a timely manner for use by other human-computer interaction devices.

[0059] S7, execute the operation command sent by one of the human-computer interaction devices, and return to step S4 to perform heartbeat detection.

[0060] Thus, one of the human-computer interaction devices can control the current controller in real time.

[0061] Furthermore, after step S3, if the current controller receives an operation command from another human-machine interaction device besides the one mentioned above, it will refuse to execute the operation command.

[0062] Through the above steps, this invention breaks through the limitations of traditional one-to-one or one-to-many architectures. By connecting multiple controllers and multiple human-computer interaction devices to each other through switches, a many-to-many parallel interactive network system is constructed. At the same time, by providing corresponding intelligent interaction methods, real-time data interaction between any human-computer interaction device and any controller within the same network system is realized, supporting multiple sets of interactive operations to be performed simultaneously, which greatly improves the operational parallelism and management efficiency of the network system.

[0063] Moreover, the present invention allows the human-computer interaction device to flexibly switch to interact with any idle controller (i.e., not bound to other human-computer interaction devices) as needed. When a controller is idle, the human-computer interaction device can quickly bind to the controller and perform data interaction according to the user's instructions, without the need for complicated manual configuration or restart operations.

[0064] In addition, to ensure the stability and security of control, the present invention designs an exclusive interaction mode, which can only bind to the currently requested human-computer interaction device when the controller is idle. After binding, the interaction permissions of other human-computer interaction devices will be automatically cut off, realizing safe isolation of interaction and eliminating the risk of control chaos.

[0065] Preferably, this embodiment can also effectively avoid the risk of instruction conflicts and operational errors caused by simultaneous control of multiple human-computer interaction devices through data encryption transmission and operation log auditing mechanisms.

[0066] Specifically, the method in this embodiment may further include: encrypting the data during the data interaction between the current controller and one of the human-computer interaction devices.

[0067] The method in this embodiment may further include: recording the binding requests received by the current controller, the bound human-computer interaction devices, and the received operation instructions in the operation log to support audit tracing.

[0068] Example 2

[0069] This embodiment adds the following permission identification step to the method of embodiment 1: after the permission verification is passed, the target permission level corresponding to the target device identifier is identified.

[0070] In one feasible approach, permission levels can be divided into three levels: monitoring, operation, and management. The monitoring level only allows read operations, the operation level allows read and write operations, and the management level, in addition to allowing read operations, also allows the execution of specific commands.

[0071] In this embodiment, the controller pre-stores the permission levels corresponding to different device identifiers. By matching them, the target permission level corresponding to the target device identifier can be determined.

[0072] Due to the addition of the above-mentioned permission recognition step, this embodiment adjusts step S7 of embodiment 1 to (other steps are the same as in embodiment 1): determine whether the operation instruction sent by one of the human-computer interaction devices matches the target permission level. If they match, execute the operation instruction; if they do not match, refuse to execute the operation instruction. Then, return to step S4 to perform heartbeat detection.

[0073] This embodiment, based on the many-to-many flexible interaction and exclusive control mechanism of Embodiment 1, further enhances the security of the network system by introducing hierarchical permission control based on device identifiers.

[0074] Example 3

[0075] This embodiment provides a device for interaction between a controller and a human-computer interaction device, wherein, as shown in the example... Figure 3 As shown, multiple controllers and multiple human-machine interaction devices are interconnected through switches, forming a many-to-many distributed network architecture.

[0076] The device in this embodiment is applicable to any controller, and as... Figure 3 As shown, the device specifically includes the following modules:

[0077] The permission verification module 11 is used to perform permission verification based on the target device identifier when it receives a binding request sent by one of the human-computer interaction devices and the binding request includes the target device identifier of one of the human-computer interaction devices.

[0078] The binding module 12 is used to detect whether the current controller has been bound to a human-computer interaction device when the permission verification is passed. If it is not bound, the current controller is bound to one of the human-computer interaction devices so that the current controller and the human-computer interaction device can interact with each other.

[0079] Heartbeat detection module 13 is used to perform heartbeat detection to detect whether the current controller and one of the human-machine interaction devices are in a normal communication connection state;

[0080] The timeout detection module 14 is used to determine whether an operation command sent by one of the human-computer interaction devices has been received within a predetermined time after the heartbeat detection is successful.

[0081] The binding unbinding module 15 is used to unbind one of the human-machine interaction devices from the current controller when the heartbeat detection fails or when no operation command is received from one of the human-machine interaction devices within a predetermined time after the heartbeat detection is successful.

[0082] In one feasible embodiment, the apparatus further includes an operation execution module, which executes the operation instruction and re-calls the heartbeat detection module 13 when it receives an operation instruction sent by one of the human-computer interaction devices within a predetermined time after a successful heartbeat detection.

[0083] In one feasible embodiment, the apparatus further includes a level identification module and an operation execution module. The level identification module identifies the target permission level corresponding to the target device identifier. The operation execution module, upon receiving an operation command from one of the human-machine interaction devices within a predetermined time after a successful heartbeat detection, determines whether the operation command matches the target permission level. If they match, the operation command is executed and the heartbeat detection module 13 is invoked again; if they do not match, the operation command is rejected and the heartbeat detection module 13 is invoked again.

[0084] In one feasible approach, after the current controller is bound to one of the human-machine interaction devices, if it receives an operation instruction from another human-machine interaction device, the operation execution module refuses to execute the operation instruction.

[0085] In one feasible approach, the permission verification module 11 is specifically used to match the target device identifier with the pre-stored device identifier. If the match is successful, the permission verification passes.

[0086] In one feasible embodiment, the apparatus further includes a log recording module for recording in the operation log the binding request received by the current controller, the bound human-computer interaction devices, and the received operation instructions.

[0087] In one feasible embodiment, the apparatus further includes an encryption module for encrypting data during data interaction between the current controller and one of the human-machine interaction devices.

[0088] This embodiment breaks through the limitations of traditional one-to-one or one-to-many architectures. By connecting multiple controllers and multiple human-machine interaction devices to each other through switches, a many-to-many parallel interactive network system is constructed. At the same time, by providing corresponding interaction methods, real-time data interaction between any human-machine interaction device and any controller within the same network is realized, supporting multiple sets of human-machine operations to be performed simultaneously, which greatly improves the system's operational parallelism and management efficiency.

[0089] Moreover, this embodiment allows the human-computer interaction device to flexibly switch to interact with any idle controller (i.e., not bound to other human-computer interaction devices) as needed. When a controller is idle, the human-computer interaction device can quickly bind to the controller and interact with it according to the user's instructions, without the need for complicated manual configuration or restart operations.

[0090] In addition, this embodiment designs an exclusive interaction mode to ensure the stability and security of control. It can only bind to one of the human-machine interaction devices when the controller is idle. After binding, the interaction permissions of other human-machine interaction devices will be automatically cut off, realizing safe isolation of interaction and eliminating the risk of control chaos.

[0091] Example 4 This example provides a semiconductor device, which includes multiple process modules, multiple controllers, and multiple human-machine interaction devices. The multiple process modules and the multiple controllers are connected in a one-to-one correspondence. The multiple controllers and the multiple human-machine interaction devices are interconnected via a switch, and the controllers are used to implement the method of interaction between the controllers and the human-machine interaction devices as provided in Example 1.

[0092] In this embodiment, the semiconductor equipment is, for example, a wafer cleaning device, the human-machine interaction device is preferably a touch screen, and the controller is preferably a PLC.

[0093] Example 5

[0094] This embodiment provides an electronic device, which can be represented in the form of a computing device (e.g., a server device), including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, it can implement the steps of the method for the controller to interact with the human-computer interaction device provided in Embodiment 1.

[0095] Figure 4 A schematic diagram of the hardware structure of this embodiment is shown, as follows: Figure 4 As shown, the electronic device 30 specifically includes:

[0096] At least one processor 31, at least one memory 32, and a bus 33 for connecting different system components (including the processor 31 and the memory 32), wherein:

[0097] Bus 33 includes a data bus, an address bus, and a control bus.

[0098] The memory 32 includes volatile memory, such as random access memory (RAM) 321 and / or cache memory 322, and may further include read-only memory (ROM) 323.

[0099] The memory 32 also includes a program / utility 325 having a set (at least one) of program modules 324, including but not limited to: an operating system, one or more application programs, other program modules, and program data, each or some combination of these examples may include an implementation of a network environment.

[0100] The processor 31 executes various functional applications and data processing by running computer programs stored in the memory 32, such as the steps of the method for a controller to interact with a human-computer interaction device provided in Embodiment 1 of the present invention.

[0101] Electronic device 30 can further communicate with one or more external devices 34 (e.g., keyboard, pointing device, etc.). This communication can be performed via input / output (I / O) interface 35. Furthermore, electronic device 30 can also communicate with one or more networks (e.g., local area network (LAN), wide area network (WAN), and / or public network, such as the Internet) via network adapter 36. Network adapter 36 communicates with other modules of electronic device 30 via bus 33. It should be understood that, although not shown in the figures, other hardware and / or software modules can be used in conjunction with electronic device 30, including but not limited to: microcode, device drivers, redundant processors, external disk drive arrays, RAID (disk array) systems, tape drives, and data backup storage systems.

[0102] It should be noted that although several units / modules or sub-units / modules of the electronic device have been mentioned in the detailed description above, this division is merely exemplary and not mandatory. In fact, according to the embodiments of this application, the features and functions of two or more units / modules described above can be embodied in one unit / module. Conversely, the features and functions of one unit / module described above can be further divided and embodied by multiple units / modules.

[0103] Example 6

[0104] This embodiment provides a computer-readable storage medium storing a computer program thereon, which, when executed by a processor, implements the steps of the method for interaction between a controller and a human-computer interaction device provided in Embodiment 1.

[0105] The readable storage medium may be more specifically adopted, including but not limited to: portable disk, hard disk, random access memory, read-only memory, erasable programmable read-only memory, optical storage device, magnetic storage device, or any suitable combination thereof.

[0106] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A method for interaction between a controller and a human-computer interaction device, characterized in that, The controller is a PLC, and the human-machine interface device is an HMI. Multiple PLCs and multiple HMIs are interconnected via a switch and a communication link is established based on the Modbus TCP protocol. Each PLC and each HMI is assigned a unique static ID as its respective device identifier. Each PLC is connected one-to-one with multiple process modules of the semiconductor equipment to monitor and operate the corresponding process module. The method is applicable to the PLC and includes: When a binding request is received from one of the HMIs, and the binding request includes the target device identifier of the one of the HMIs, permission verification is performed based on the target device identifier; If the permission verification fails, a permission verification failure message will be sent to one of the HMIs. If the permission verification passes, then check whether the current PLC has been bound to an HMI; If not bound, the current PLC will be bound to one of the HMIs so that the current PLC and the HMI can interact with each other. Perform heartbeat detection to check whether the PLC and one of the HMIs are in a normal communication connection state; If the heartbeat detection is successful, determine whether an operation command sent by one of the HMIs has been received within a predetermined time after the success. If the heartbeat detection fails, or if no operation command is received from one of the HMIs within a predetermined time after a successful heartbeat detection, then the binding between one of the HMIs and the current PLC is released.

2. The method as described in claim 1, characterized in that, The method further includes: when an operation instruction sent by one of the HMIs is received within a predetermined time after a successful heartbeat detection, executing the operation instruction and returning to the step of performing heartbeat detection.

3. The method as described in claim 1, characterized in that, After the permission verification is successful, the method further includes: Identify the target permission level corresponding to the target device identifier; When an operation instruction is received from one of the HMIs within a predetermined time after a successful heartbeat detection, it is determined whether the operation instruction matches the target permission level. If they match, the operation instruction is executed; otherwise, the operation instruction is refused to be executed. Return to the steps described for performing heartbeat detection.

4. The method as described in claim 1, characterized in that, The permission verification based on the target device identifier includes: matching the target device identifier with a pre-stored device identifier; if the match is successful, the permission verification passes.

5. The method according to any one of claims 1-4, characterized in that, The method further includes: The operation log records the binding requests received by the PLC, the bound HMIs, and the received operation instructions.

6. The method according to any one of claims 1-4, characterized in that, The method further includes encrypting the data during the data interaction between the current PLC and one of the HMIs.

7. The method according to any one of claims 1-4, characterized in that, The method further includes: when bound to one of the HMIs, if an operation instruction is received from another of the HMIs, the operation instruction is refused to be executed.

8. A device for interaction between a controller and a human-computer interaction device, characterized in that, The controller is a PLC, and the human-machine interface device is an HMI. Multiple PLCs and multiple HMIs are interconnected via a switch and a communication link is established based on the Modbus TCP protocol. Each PLC and each HMI is assigned a unique static ID as its respective device identifier. Each PLC is connected one-to-one with multiple process modules of the semiconductor equipment to monitor and operate the corresponding process module. The device is applicable to the PLC and includes: The permission verification module is used to perform permission verification based on the target device identifier when it receives a binding request sent by one of the HMIs, and the binding request includes the target device identifier of one of the HMIs. If the permission verification fails, it will send a message of permission verification failure to one of the HMIs. The binding module is used to detect whether the current PLC is already bound to an HMI when the permission verification is passed. If it is not bound, the current PLC is bound to one of the HMIs so that the current PLC and one of the HMIs can interact with each other. A heartbeat detection module is used to detect whether the PLC and one of the HMIs are in a normal communication connection state. The timeout detection module is used to determine whether an operation command sent by one of the HMIs has been received within a predetermined time after a successful heartbeat detection. The binding unbinding module is used to unbind one of the HMIs from the current PLC when the heartbeat detection fails or when no operation instruction is received from one of the HMIs within a predetermined time after the heartbeat detection is successful.

9. A semiconductor device, the semiconductor device comprising a plurality of process modules, a plurality of controllers, and a plurality of human-machine interface devices, wherein the controllers are PLCs, the human-machine interface devices are HMIs, and the plurality of process modules and the plurality of PLCs are connected in a one-to-one correspondence to monitor and operate the corresponding process module, characterized in that, The multiple PLCs and multiple HMIs are interconnected through a switch and a communication link is established based on the Modbus TCP protocol. Each PLC and each HMI is assigned a unique static ID as its respective device identifier, and the PLC is used to implement the method of the controller interacting with the human-machine interface device as described in any one of claims 1-7.

10. An electronic device comprising a memory, a processor, and a computer program stored in the memory and capable of running on the processor, characterized in that, When the processor executes the computer program, it implements the method for the controller to interact with the human-computer interaction device as described in any one of claims 1-7.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the method of the controller interacting with the human-computer interaction device as described in any one of claims 1 to 7.

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