A link type dual-arm vacuum robot

Abstract

The application discloses a connecting rod type double-arm vacuum manipulator and relates to the field of wafer conveying. The connecting rod type double-arm vacuum manipulator comprises a shaft end output part, a constraint hole extending along an axial direction is arranged on an end face of the shaft end output part; a stop assembly is provided with a radial constraint block, the radial constraint block can be partially or completely inserted into the constraint hole, a wedge-shaped groove is arranged on the end face of the shaft end output part in a first direction, and a groove width of the wedge-shaped groove is gradually expanded from a groove bottom to a groove opening; a locking assembly comprises a locking piece and a pressing piece, when the locking piece drives the pressing piece to move into the wedge-shaped groove along the axial direction, the radial constraint block is deformed in a radial expansion mode until an outer side surface of the radial constraint block is in interference fit with an inner wall of the constraint hole. The above scheme effectively overcomes problems of stress concentration, weak rigidity and easy loosening caused by insufficient number of bolts, ensures efficient transmission of torque and bending moment, and meets the design requirements of the high-integration vacuum manipulator.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor wafer transfer equipment, and particularly relates to a connecting rod type double-arm vacuum manipulator. BACKGROUND

[0002] In the process of manufacturing semiconductor devices, the precision and stability of wafer handling in a vacuum environment are extremely high. In order to meet the needs of cleanliness, repeatability, positioning accuracy and automatic continuous operation in the process flow, the vacuum transmission system becomes a key link, and the vacuum manipulator as the core component of wafer handling, its structure design directly affects the yield and productivity of the whole equipment. With the development of equipment towards high integration and miniaturization, the design of manipulator tends to be compact and lightweight.

[0003] Among many vacuum manipulator configurations, the connecting rod type structure is widely used due to its excellent kinematic characteristics. Such a manipulator usually realizes precise transmission under complex paths through multiple rotating and telescopic mechanisms, and its power source depends on the direct drive of the motor output shaft. However, especially in compact structure design, the radial size of the motor output shaft is limited by both the structure layout and the cavity packaging space, making the output end mounting area for connecting the manipulator arm extremely limited. In the existing design, the motor output shaft and the manipulator arm are usually connected by a bolt flange connection. When the available mounting area of the end face of the motor output shaft is insufficient, it is not possible to arrange a sufficient number of standard bolts to withstand the torque and bending moment during transmission, resulting in insufficient overall connection rigidity, uneven stress distribution, and easily causing fatigue damage and connection loosening. More seriously, this weak connection can easily lead to a decline in system stability and mechanism failure in long-term high-frequency operation, impact load bearing, or high-repetition positioning accuracy applications.

[0004] Therefore, under the current design trend of high-integration equipment, how to realize reliable and high-strength torque transmission connection between the motor output shaft and the manipulator arm in extremely limited installation space has become a key technical problem to be solved. SUMMARY

[0005] The purpose of the present application is to provide a connecting rod type double-arm vacuum manipulator to solve the problem of how to realize high-rigidity and high-reliability anti-torque connection between the power output shaft and the manipulator arm part when the size of the motor output shaft is small and the mounting area is severely limited in the prior art.

[0006] To achieve the above purpose, the technical scheme of the present application is as follows:

[0007] A connecting rod type double-arm vacuum manipulator, comprising a body, an arm pivotally connected to the body, and a power source for driving the arm to rotate, comprising:

[0008] An axial end output portion is provided at an output shaft end portion of the power source, and an end surface of the axial end output portion is provided with a restriction hole extending in an axial direction;

[0009] A stop assembly is provided with a fastening portion detachably connected to the arm, and a radial restriction block extending from the fastening portion to the axial end output portion, the radial restriction block being partially or completely inserted into the restriction hole and being in clearance fit with a hole wall, the radial restriction block being provided with a wedge-shaped slot in a first direction toward an end surface of the axial end output portion, and a slot width of the wedge-shaped slot being gradually increased from a slot bottom to a slot opening;

[0010] A locking assembly includes a locking member and a pressing member, the pressing member being provided with an arc-shaped surface in sliding fit with the wedge-shaped slot, and the locking member being axially penetrated through the stop assembly and being connected to the pressing member, the locking member being used to drive the pressing member to move in an axial direction of the radial restriction block;

[0011] When the locking member drives the pressing member to move in the axial direction into the wedge-shaped slot, the arc-shaped surface is in wedge fit with an inner wall of the wedge-shaped slot, and the radial restriction block is forced to generate radial expansion deformation until an outer side surface of the radial restriction block is in interference fit with the inner wall of the restriction hole.

[0012] The continuous rod type double-arm vacuum manipulator has the following advantages: first, the fastening portion of the stop assembly is detachably connected to the arm, and preliminary positioning and bearing are performed. Then, the radial restriction block and the locking assembly are cooperated: the locking member drives the pressing member to move in the axial direction, the arc-shaped surface of the pressing member slides along the gradually increased inner wall of the wedge-shaped slot of the radial restriction block, and the radial restriction block is forced to generate controllable radial expansion deformation, and finally, the radial restriction block is in high-strength interference fit with the inner wall of the restriction hole of the output shaft end portion of the power source. In the extremely limited axial and radial space, the torsional strength, connection rigidity and bending resistance of the traditional bolt connection mode are far exceeded. The above scheme effectively overcomes the problems of stress concentration, weak rigidity and easy loosening caused by insufficient number of bolts, ensures efficient and uniform transmission of torque and bending moment, significantly improves the stability and reliability of the system in long-term high-frequency operation and high-precision positioning scenarios, and meets the design requirements of high-integration vacuum manipulators.

[0013] Further, the wedge-shaped slot extends through both sides of the radial restriction block in a second direction, and the inner wall of the wedge-shaped slot has bilaterally symmetrical guide slopes.

[0014] With the above scheme, since the two ends of the wedge-shaped slot in the second direction are connected to the outside, and the wedge-shaped slot has bilaterally symmetrical guide slopes, the guide slopes are connected to the outside, so that the pressing member can obtain uniform radial component force during axial driving, thereby more accurately guiding the synchronous expansion of the radial restriction block and forming a stable interference fit.

[0015] Furthermore, a first strip groove is formed at the bottom of the wedge-shaped groove along the first direction, and the first strip groove passes through both sides of the radial constraint block along the second direction.

[0016] With the above solution, when the extrusion piece advances along the wedge-shaped groove and causes the radial constraint block to expand outward, the through structure of the first strip groove allows the constraint block to shrink and expand slightly at the bottom of the groove, thereby avoiding stress concentration or even brittle fracture caused by excessive constraint.

[0017] Furthermore, a tensioning screw hole is provided on the extrusion member, the stop assembly includes a stop block, the fastening portion is located on the stop block, a penetrating mounting hole is provided on the bottom wall of the wedge-shaped groove, a locking countersunk hole is provided on the stop block, and the locking member includes a locking screw, which passes through the locking countersunk hole and the mounting hole and is threadedly connected to the tensioning screw hole.

[0018] With this solution, the stopper is fixedly connected to the bottom wall of the radial restraint block via the mounting slot, forming a single, integrated base. The tensioning screw hole in the extrusion, the locking countersunk hole in the stopper, and the mounting hole extending through the bottom wall of the wedge-shaped slot together form an axial tightening path. When the locking screw passes through the locking countersunk hole and the mounting hole, threadedly engaging the tensioning screw hole, it creates an integrated preload between the stopper assembly, the radial restraint block, and the extrusion.

[0019] Furthermore, the extrusion piece includes an integrally formed main body and an arc-shaped portion, the arc-shaped portions are located on both sides of the main body, the arc-shaped surface is located on the arc-shaped portion, and the tensioning screw hole is vertically opened on the main body.

[0020] Furthermore, the stop block is provided with a mounting groove along the first direction, the bottom wall of the mounting groove is fixedly connected to the radial constraint block, and the shaft end output portion is inserted into the mounting groove.

[0021] By adopting the above solution, the installation groove and the shaft end output part are plugged in and matched, which not only realizes the radial constraint of the shaft end output part, but also saves the longitudinal installation space of the stop block, which meets the design requirements of compact integration of semiconductor equipment.

[0022] Furthermore, the arm includes a boom assembly and a first arm and a second arm pivotally connected to the boom assembly, the boom assembly includes a first boom and a second arm pivotally connected to the first boom, a sinking groove is provided on the top of the second boom, the stop assembly is arranged in the sinking groove, the first boom and the second boom are provided with axial holes that are connected to each other, and the shaft end output part is inserted into the axial hole.

[0023] This solution, by creating a sunken groove at the top of the second boom and embedding the stop assembly within it, places the stop assembly and the second boom on the same plane, eliminating the space occupied by traditional supports on the outside or bottom of the boom. Furthermore, the interconnected shaft holes between the first and second booms allow the output shaft to be directly inserted into these holes, eliminating the need for additional transition flanges or extended shaft connectors, further reducing structural thickness and component count. This compact layout not only significantly saves installation space but also shortens the power transmission path, improving the overall rigidity and torsional resistance of the mechanism.

[0024] Furthermore, at least two positioning posts are provided on the stop assembly, and at least two positioning slots are provided on the top of the second arm, and the positioning posts are inserted into the positioning slots.

[0025] By adopting the above scheme, the cooperation of multiple positioning posts and positioning grooves can automatically correct the angle of the stop assembly during assembly, ensuring that the assembly is correctly positioned when inserted; on the other hand, the positioning posts and positioning grooves provide additional radial limits, making it less likely for the stop assembly to undergo micro-deviations when subjected to vibration loads.

[0026] Furthermore, the stop block is provided with an opening penetrating the stop block along the second direction, and the opening is communicated with the mounting groove.

[0027] Furthermore, the fastening portion is located at both ends of the stop block, the fastening portion is provided with a fixing countersunk hole, and the fastening portion is provided with a fixing screw, and the fixing screw thread passes through the fixing countersunk hole and is fixedly connected to the second arm.

[0028] Furthermore, second strip grooves are formed at both ends of the stop block along the first direction, and the second strip grooves pass through both sides of the stop block along the second direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the overall structure of a connecting rod type dual-arm vacuum manipulator according to an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the arm structure according to an embodiment of the present invention;

[0031] Figure 3 This is a schematic structural diagram of a boom assembly according to an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the exploded structure of the boom assembly according to an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of a stop block according to an embodiment of the present invention;

[0034] Figure 6This is a schematic diagram of the structure of the extrusion block according to an embodiment of the present invention;

[0035] Figure 7 Schematic diagram of the connection structure of the boom assembly according to an embodiment of the present invention.

[0036] Reference numerals: 1, body; 2, arm; 21, arm assembly; 211, first arm; 2111, end portion; 212, second arm; 2121, sinking groove; 2122, positioning groove; 2123, fixing screw hole; 213, bearing; 214, pressure cover; 22, first arm; 221, first left forearm; 222, first right forearm; 223, first end effector; 23, second arm; 231, second left forearm; 232, second right forearm; 233, second end effector; 3 , shaft end output part; 31, constraint hole; 4, stop assembly; 41, stop block; 411, mounting groove; 412, locking countersunk hole; 413, fixing countersunk hole; 414, fixing screw; 415, second strip groove; 416, opening; 42, radial constraint block; 421, wedge-shaped groove; 4211, mounting hole; 422, first strip groove; 43, positioning column; 5, locking assembly; 51, locking member; 52, extrusion member; 521, arcuate surface; 522, main body; 523, tensioning screw hole. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] The following is combined with Figure 1 - Attachment Figure 7 , the specific implementation methods of the present invention are further described in detail.

[0039] Reference Figure 1-Figure 3In some embodiments of the present application, a linkage type dual-arm vacuum manipulator comprises a body 1, an arm 2 pivotally connected to the body 1, and a power source for driving the arm 2 to rotate, the arm 2 comprising a large arm assembly 21 and a first arm 22 and a second arm 23 pivotally connected to the large arm assembly 21, the large arm assembly 21 comprising a first large arm 211 and a second large arm 212 pivotally connected to the first large arm 211; the first arm 22 comprising a first left small arm 221 pivotally connected to the first large arm 211, a first right small arm 222 pivotally connected to the second large arm 212, and a first end effector 223, the first left small arm 221 and the first right small arm 222 being configured to drive the first end effector 223 to perform a telescopic motion; the second arm 23 comprising a second left small arm 231 pivotally connected to the first large arm 211, a second right small arm 232 pivotally connected to the second large arm 212, and a second end effector 233, the second left small arm 231 and the second right small arm 232 being configured to drive the second end effector 233 to perform a telescopic motion.

[0040] With reference to Figure 4 and Figure 5 In some specific embodiments of the present application, the first large arm 211 and the second large arm 212 have end portions 2111, the first large arm 211 and the second large arm 212 have shaft holes formed at the center positions of the end portions 2111, and the shaft holes are in communication with each other when the end portions 2111 of the first large arm 211 and the second large arm 212 are overlapped.

[0041] With reference to Figure 4 In some embodiments of the present application, a linkage type dual-arm vacuum manipulator comprises a shaft end output portion 3, a stop assembly 4, and a locking assembly 5. The second large arm 212 is synchronously drivingly connected to the shaft end output portion 3, the shaft end output portion 3 is located at one end of an output shaft of the power source, and the shaft end output portion 3 has a constraint hole 31 extending in the axial direction. In some specific embodiments of the present application, the constraint hole 31 is in the shape of a strip hole. Specifically, after the output shaft of the power source passes through the shaft holes of the first large arm 211 and the second large arm 212, the output shaft and the second large arm 212 are fixed and torque is transmitted by the stop assembly 4 and the locking assembly 5.

[0042] With reference to Figure 5In some embodiments of the present invention, the stop assembly 4 includes a fastening portion and a radial constraint block 42, and the fastening portion is detachably connected to the arm 2. In some specific embodiments of the present invention, the fastening portion integrates a thin-walled metal sleeve (not shown) with a hydraulic chamber disposed therein. High-pressure oil is injected to cause the sleeve to radially expand, forming an interference fit with the inner bore of the arm 2; after pressure relief, the sleeve contracts for removal. Preferably, the stop assembly 4 is further provided with at least two positioning posts 43, located at either end of the stop assembly 4. At least two positioning slots 2122 are defined at the top of the second arm 212, and the positioning posts 43 are inserted into the positioning slots 2122. In some other embodiments of the present invention, both the positioning posts 43 and the positioning slots 2122 are conical (not shown), achieving high-precision alignment through self-centering of the conical surface. The conical surface fit provides uniform radial pressure and strong torsional resistance.

[0043] Reference Figure 5 In some specific embodiments of the present invention, a radial constraint block 42 is inserted into the constraint hole 31. A wedge-shaped groove 421 is formed on the end surface of the radial constraint block 42 facing the shaft end output portion 3 along a first direction (referenced to D1). The width of the wedge-shaped groove 421 gradually increases from the bottom of the groove to the groove opening. The distance between the inner walls of the wedge-shaped groove 421 gradually increases from the bottom of the groove to the groove opening. Specifically, the cross-section of the wedge-shaped groove 421 is an isosceles trapezoid; as shown in FIG. Figure 5 , where the short side of the isosceles trapezoid is at the top and the long side is at the bottom, causing the opening of the wedge-shaped groove 421 to gradually expand downward. In some other embodiments, the wedge-shaped groove 421 retains only one hypotenuse, with the other side being a vertical wall, forming a right-angled trapezoidal cross-section. The vertical wall provides rigid support, while the hypotenuse guides expansion, simplifying processing and saving space.

[0044] Reference Figure 5-Figure 7 In some embodiments of the present invention, the locking assembly 5 includes a locking member 51 and an extrusion member 52. The extrusion member 52 has an arcuate surface 521 that slides with the wedge groove 421. The locking member 51 axially penetrates the stop assembly 4 and is connected to the extrusion member 52. In some specific embodiments of the present invention, the extrusion member 52 is in the shape of a strip column, and arcuate surfaces 521 are provided on both sides thereof to facilitate sliding with the guide slope. The locking member 51 is used to drive the extrusion member 52 to move axially along the radial constraint block 42; wherein, when the wedge-shaped driving portion moves axially along the radial constraint block 42, the arcuate surface 521 moves along the extension direction of the inner wall of the wedge groove 421, and forces the radial constraint block 42 to produce radial expansion deformation until the outer side surface of the radial constraint block 42 forms an interference fit with the inner wall of the constraint hole 31.

[0045] Reference Figure 5In some specific embodiments of the present invention, a wedge-shaped groove 421 extends through the radial constraint block 42 along the second direction (referenced as D2). The wedge-shaped groove 421 has bilaterally symmetrical guide ramps that communicate with the outside world. Because both ends of the wedge-shaped groove 421 along the second direction are open to the outside world, the extrusion element 52 receives a uniform radial force component between the two openings 416 during axial driving, thereby more precisely guiding the synchronous expansion of the radial constraint block 42 and forming a stable interference fit.

[0046] In some embodiments of the present invention, a first strip groove 422 is formed at the bottom of the wedge-shaped groove 421 along the axial direction of the radial constraint block 42, and the first strip groove 422 runs through both sides of the radial constraint block 42 along the second direction. The presence of the first strip groove 422 can provide a controllable deformation buffer zone for the constraint block 42 when it is subjected to the radial expansion force generated by the gradual push of the extrusion member 52, so that a certain elastic deformation space is maintained at both ends. Specifically, when the extrusion member 52 advances along the wedge-shaped groove 421 and causes the radial constraint block 42 to expand outward, the through structure of the first strip groove 422 allows the constraint block to undergo slight contraction and expansion at the bottom of the groove, thereby avoiding stress concentration or even brittle fracture caused by excessive constraint.

[0047] Reference Figure 5 and Figure 6 In some specific embodiments of the present invention, the extrusion member 52 includes an integrally formed main body 522 and an arcuate portion. The arcuate portion is located on both sides of the main body 522, and the arcuate surface 521 is located on the arcuate portion. In some specific embodiments of the present invention, the main body 522 is provided with two tensioning screw holes 523 in the vertical direction. The stop assembly 4 includes a stop block 41, a fastening portion is located on the stop block 41, the stop block 41 is provided with a mounting groove 411, the bottom wall of the mounting groove 411 is fixedly connected to the radial constraint block 42, the bottom wall of the wedge-shaped groove 421 is provided with a through mounting hole 4211, the stop block 41 is provided with a locking countersunk hole 412, and the locking member 51 includes a locking screw, which passes through the locking countersunk hole 412 and the mounting hole 4211 and is threadedly connected to the tensioning screw hole 523. In addition, the plug-in fit between the mounting groove 411 and the shaft end output part 3 not only realizes the radial constraint of the shaft end output part 3, but also saves the longitudinal installation space of the stop block 41, which meets the design requirements of compact integration of semiconductor equipment.

[0048] In some specific embodiments of the present invention, there are two locking screws. The stop block 41 is fixedly connected to the bottom wall of the radial constraint block 42 via the mounting groove 411, forming an integrated base. The tensioning screw hole 523 on the extrusion member 52, the locking countersunk hole 412 on the stop block 41, and the mounting hole 4211 extending through the bottom wall of the wedge-shaped groove 421 collectively constitute an axial tightening path. When the locking screw passes through the locking countersunk hole 412 and the mounting hole 4211 in sequence and threadedly engages with the tensioning screw hole 523, an integrated preload force is generated between the stop assembly 4, the radial constraint block 42, and the extrusion member 52. In some embodiments of the present invention, the stop block is provided with an opening 416 extending through the stop block along the second direction, and the opening 416 is connected to the mounting groove.

[0049] Reference Figure 7 In some embodiments of the present invention, a bearing 213 is disposed between the first arm 211 and the second arm 212. The outer ring of the bearing 213 abuts the first arm 211, while the inner ring of the bearing 213 abuts the second arm 212. By placing a precision bearing 213 between the first and second arms 211, low-friction rotational support between the two arms can be achieved while maintaining a compact structure. The outer ring of the bearing 213 abuts the first arm 211, while the inner ring abuts the second arm 212. This evenly distributes radial and axial loads to the bearing 213 raceway through the rolling elements, rather than directly acting on the metal surface. This significantly reduces sliding resistance and frictional wear. Furthermore, the high-precision rolling contact guide helps control the motion clearance, ensuring smoother rotation of the arm 2 and significantly improving repeatability. In some embodiments of the present invention, a pressure cap 214 is disposed at the bottom of the first arm 211 to press the bearing 213.

[0050] In some embodiments of the present invention, a sunken groove 2121 is formed at the top of the second arm 212, and the stop assembly 4 is disposed within the sunken groove 2121. By providing the sunken groove 2121 at the top of the second arm 212 and embedding the stop assembly 4 therein, the stop assembly 4 forms a coplanar surface with the second arm 212, thus avoiding the space occupied by conventional support members on the outside or bottom of the arm.

[0051] In some specific embodiments of the present invention, the fastening portions are located at both ends of the stop block 41. Fixing screws 414 are provided on the fastening portions. Fixing screw holes 2123 are defined in the second arm 212. The fixing screws 414 thread through the fixing countersunk holes 413 and are threadedly connected to the fixing screw holes 2123 of the second arm 212. In some specific embodiments of the present invention, two fixing screws 414 are located at both ends of the stop block 41.

[0052] Reference Figure 5In some specific embodiments of the present invention, second strip grooves 415 are formed at both ends of the stop block 41, facing the side of the shaft end output portion 3. The second strip grooves 415 extend through the stop block 41 along the second direction. The second strip grooves 415 at both ends of the stop block 41 provide a controllable elastic deformation space for the fastening area when the fastening screw is pressed in. When the screw applies a pressing force, the through-structure at the bottom of the groove allows the stop block 41 to locally bend slightly, thereby effectively alleviating stress concentration caused by overtightening the screw and preventing cracks in the stop block 41 material. At the same time, the resulting elastic buffering characteristics can automatically compensate for assembly tolerances, making the contact pressure between the fastening screw and the stop block 41 more uniform.

[0053] The beneficial effects of a connecting rod type double-arm vacuum manipulator provided by the present invention are: first, a detachable connection with the manipulator arm 2 is achieved through the fastening portion of the stop assembly 4, thereby establishing an initial positioning and bearing basis. Subsequently, the unique radial constraint block 42 and the locking assembly 5 work in synergy: the locking member 51 drives the extrusion member 52 to move axially, and its arcuate surface 521 slides along the gradually expanding inner wall of the constraint block wedge groove 421, forcing the constraint block to produce a controllable radial expansion deformation. The expanded radial constraint block 42 and the constraint hole 31 form an interference fit, which greatly increases the connection contact area and finally forms a high-strength interference fit with the inner wall of the constraint hole 31 at the end of the power source output shaft. The above scheme realizes that a high-rigidity, high-reliability torsion-resistant connection can be obtained without adding additional bolts under the conditions that the motor output shaft is small in size and the fixing area is severely limited. The contact surface far exceeds that of direct screw fixation, significantly improving torsional rigidity and load-bearing capacity. The extrusion member 52 is locked in the wedge-shaped groove 421, preventing relative rotation or slipping of the locking member 51 during operation. The guide slope converts axial force into radial expansion force, creating a controllable interference fit between the radial constraint block 42 and the inner wall of the constraint hole 31, significantly increasing the contact surface pressure. This significantly improves the system's stability, reliability, and fatigue life in long-term high-frequency operation, impact loads, and high-precision positioning scenarios, meeting the design requirements of highly integrated vacuum manipulators.

[0054] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A connecting rod type double-arm vacuum manipulator, comprising a body (1), an arm (2) pivotally connected to the body (1), and a power source for driving the arm (2) to rotate, characterized in that: include: A shaft end output portion (3) is provided at the end of the output shaft of the power source, and an end surface of the shaft end output portion (3) is provided with a constraint hole (31) extending in the axial direction; A stop assembly (4) having a fastening portion detachably connected to the arm (2), and a radial constraint block (42) extending from the fastening portion toward the shaft end output portion (3), wherein the radial constraint block (42) can be partially or completely inserted into the constraint hole (31) and form a clearance fit with the hole wall, and a wedge-shaped groove (421) is formed on the end surface of the radial constraint block (42) toward the shaft end output portion (3) along a first direction, and the groove width of the wedge-shaped groove (421) is gradually expanded from the groove bottom toward the groove opening; A locking assembly (5) comprising a locking member (51) and an extrusion member (52), wherein the extrusion member (52) has an arcuate surface (521) that slides with the wedge-shaped groove (421), the locking member (51) axially penetrates the stop assembly (4) and is connected to the extrusion member (52), and the locking member (51) is used to drive the extrusion member (52) to move axially along the radial constraint block (42); When the locking member (51) drives the extrusion member (52) to move axially into the wedge-shaped groove (421), the arcuate surface (521) forms a wedge-tight fit with the inner wall of the wedge-shaped groove (421), and forces the radial constraint block (42) to undergo radial expansion deformation until the outer side surface of the radial constraint block (42) forms an interference fit with the inner wall of the constraint hole (31).

2. A connecting rod type double-arm vacuum manipulator according to claim 1, characterized in that: The wedge-shaped groove (421) passes through both sides of the radial constraint block (42) along the second direction, and the inner wall of the wedge-shaped groove (421) has a bilaterally symmetrical guide slope surface.

3. The connecting rod type double-arm vacuum manipulator according to claim 1, characterized in that: A first strip groove (422) is formed at the bottom of the wedge-shaped groove (421) along a first direction, and the first strip groove (422) passes through both sides of the radial constraint block (42) along a second direction.

4. A connecting rod type double-arm vacuum manipulator according to claim 3, characterized in that: A tensioning screw hole (523) is provided on the extrusion member (52), the stop assembly (4) includes a stop block (41), the fastening portion is located on the stop block (41), a through-going mounting hole (4211) is provided on the bottom wall of the wedge-shaped groove (421), a locking countersunk hole (412) is provided on the stop block (41), and the locking member (51) includes a locking screw, which passes through the locking countersunk hole (412) and the mounting hole (4211) and is threadedly connected to the tensioning screw hole (523).

5. A connecting rod type double-arm vacuum manipulator according to claim 4, characterized in that: The extrusion piece (52) comprises an integrally formed main body portion (522) and an arc portion, the arc portion being located on both sides of the main body portion (522), the arc surface (521) being located on the arc portion, and the tensioning screw hole (523) being vertically opened on the main body portion (522).

6. A connecting rod type double-arm vacuum manipulator according to claim 4, characterized in that: The stop block (41) is provided with a mounting groove (411) along a first direction, the bottom wall of the mounting groove (411) is fixedly connected to the radial constraint block (42), and the shaft end output portion (3) is inserted into the mounting groove (411).

7. The connecting rod type double-arm vacuum manipulator according to claim 5, characterized in that: The arm (2) includes a large arm assembly (21) and a first arm (22) and a second arm (23) pivotally connected to the large arm assembly (21); the large arm assembly (21) includes a first large arm (211) and a second large arm (212) pivotally connected to the first large arm (211); a sinking groove (2121) is provided on the top of the second large arm (212); the stop assembly (4) is arranged in the sinking groove (2121); the first large arm (211) and the second large arm (212) are provided with mutually connected shaft holes, and the shaft end output part (3) is inserted into the shaft hole.

8. The connecting rod type double-arm vacuum manipulator according to claim 7, characterized in that: At least two positioning columns (43) are also provided on the stop assembly (4), and at least two positioning grooves (2122) are provided on the top of the second large arm (212), and the positioning columns (43) are inserted into the positioning grooves (2122).

9. The connecting rod type double-arm vacuum manipulator according to claim 6, characterized in that: The stop block (41) is provided with an opening (416) penetrating the stop block (41) along the second direction, and the opening (416) is communicated with the mounting groove (411).

10. The connecting rod type double-arm vacuum manipulator according to claim 7, characterized in that: The fastening portion is located at both ends of the stop block (41), and a fixing countersunk hole (413) is provided on the fastening portion. A fixing screw (414) is provided on the fastening portion, and the fixing screw (414) is threaded through the fixing countersunk hole (413) and fixedly connected to the second arm (212).

11. The connecting rod type double-arm vacuum manipulator according to claim 10, characterized in that: Second strip grooves (415) are provided at both ends of the stop block (41) along the first direction, and the second strip grooves (415) pass through both sides of the stop block (41) along the second direction.

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