Fluid control device

Abstract

The invention provides a miniaturized fluid control device with high cooling efficiency. In the fluid control device, a pump and a valve are arranged side by side in a first direction. A pump; a first hole formed in the pump housing; a second hole formed in the pump housing; and a vibrator disposed in the pump housing and capable of delivering gas from the first hole to the second hole. The valve is provided with: a second hole formed in the first valve housing member in the valve housing; a third bore formed in the second valve housing part in the valve housing; and an exhaust passage formed in the second valve housing member. The second valve housing member is provided with a protruding portion that is configured from a portion that does not overlap the outer shape of the pump housing when viewed from the first direction. The protruding portion includes at least a portion of the exhaust passage. The outer end surface of the exhaust passage, which opens to the outside, faces the pump side in the first direction. The vibrating body includes a vibrating body protrusion protruding from the pump housing when viewed from the first direction. When viewed from the first direction, at least a portion of the outer end surface of the exhaust passage is located outside the pump housing.

Description

Technical Field

[0001] The present invention relates to a fluid control device for conveying fluids such as gas. Background Art

[0002] Patent Document 1 describes a fluid control device. The fluid control device of Patent Document 1 includes a pump housing, a quick exhaust valve, and a heat sink. The quick exhaust valve includes a discharge hole and an exhaust path.

[0003] The heat sink is physically connected to the pump housing, and a portion of the heat sink is disposed at a position facing the exhaust passage.

[0004] The fluid control device supplies air to the cuff connected to the discharge hole of the quick exhaust valve when the pump is driven, and discharges the air accumulated in the cuff from the exhaust passage of the quick exhaust valve when the pump is stopped.

[0005] The air exhausted from the exhaust passage contacts the fins and cools them. The cooling of the fins cools the pump housing.

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2016-200067

[0007] However, in conventional fluid control devices such as Patent Document 1, cooling of the pump housing requires fins, which results in an increase in size. In addition, since the pump housing is indirectly cooled, it is difficult to achieve high cooling efficiency. Summary of the Invention

[0008] Therefore, an object of the present invention is to provide a compact fluid control device having high cooling efficiency.

[0009] In a fluid control device according to one embodiment of the invention, a pump including a pump housing and a valve including a valve housing are arranged side by side in a first direction. The pump includes a first hole formed in the pump housing, a second hole formed in the pump housing, and a vibrator disposed in the pump housing and capable of delivering gas from the first hole to the second hole. The valve includes a second hole formed in a first valve housing member of the valve housing connected to the pump housing, a third hole formed in a second valve housing member of the valve housing disposed opposite the first valve housing member, and an exhaust passage formed in the second valve housing member of the valve housing.

[0010] The second valve housing component of the valve housing includes a protrusion formed of a portion that does not overlap with the outer shape of the pump housing when viewed from the first direction. The protrusion includes at least a portion of the exhaust passage. The outer end surface of the exhaust passage, which opens to the outside, faces the pump side in the first direction. The vibrator includes a vibrator protrusion that protrudes from the pump housing when viewed from the first direction. At least a portion of the outer end surface of the exhaust passage is located outward of the pump housing when viewed from the first direction.

[0011] In this structure, the gas exhausted from the valve's exhaust path flows along the outer surface of the pump housing. This creates an exhaust flow that flows along the outer surface of the pump housing. This allows the pump housing to be directly cooled by the exhaust flow without the use of heat sinks or other fins. Furthermore, the exhausted gas also flows around the vibrator's protrusion. This direct cooling of the vibrator's protrusion by the exhaust flow cools the vibrator within the pump housing.

[0012] According to this invention, a compact fluid control device with high cooling efficiency can be configured. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is an external perspective view of a fluid control device according to an embodiment of the present invention.

[0014] Figure 2 It is an exploded perspective view of a fluid control device according to an embodiment of the present invention.

[0015] Figure 3 It is an exploded perspective view of a fluid control device according to an embodiment of the present invention.

[0016] Figure 4 This is a plan view of the fluid control device according to the embodiment of the present invention as viewed from a first direction.

[0017] Figure 5 It is a side cross-sectional view showing the structure of a fluid control device according to an embodiment of the present invention.

[0018] Description of Reference Numerals

[0019] 10...fluid control device; 20...vibrating body; 31-37, 371, 372...housing component; 40...membrane; 50...membrane; 400...membrane fixing component; 211, 212, 213...plate; 221, 222...piezoelectric element; E20, E211, E212, E213, E31, E32, E33, E34, E35, E36, E371 , E372...outer peripheral end; P211, P212, P213, P32, P33, P34, P35, P36...protrusions; 311, 312, 321, 331, 341, 342, 353, 362, 3711, 3712, 3714, 3721...through holes; 351, 361...recesses; 352, 3713...grooves; 360...base. DETAILED DESCRIPTION

[0020] A fluid control device according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1It is an external perspective view of a fluid control device according to an embodiment of the present invention. Figure 2 、 Figure 3 It is an exploded perspective view of a fluid control device according to an embodiment of the present invention. Figure 4 This is a plan view of the fluid control device according to the embodiment of the present invention as viewed from a first direction. Figure 5 It is a side cross-sectional view showing the structure of a fluid control device according to an embodiment of the present invention. Figure 5 This is a side cross-sectional view schematically shown to facilitate understanding of the structure of the fluid control device.

[0021] The fluid control device 10 includes a vibrating body 20, a plurality of housing members 31-37, membranes 40 and 50, and a membrane fixing member 400. Housing members 34 and 35 correspond to housing members constituting the pump housing and also correspond to portions of the first valve housing member. Housing member 36 corresponds to a portion of the first valve housing member, and housing member 37 corresponds to the second valve housing member. While the fluid control device 10 illustrates a configuration in which a common housing member is used between the pump housing and the valve housing, the housing members constituting the pump housing and the valve housing may also be separate.

[0022] The vibrating body 20 includes a plurality of flat plates 211, 212, 213 and a plurality of piezoelectric bodies 221, 222. The flat plates 211, 212, 213 are made of metal and are deformable (vibrable) by stress generated by deformation of the piezoelectric bodies 221, 222.

[0023] The flat plate 211 has a substantially circular outer peripheral end E211 in a plan view. The flat plate 211 includes a protrusion P211 that protrudes outward from the outer peripheral end E211. The protrusion P211 has a substantially rectangular shape in a plan view, for example.

[0024] The flat plate 212 has a substantially circular outer peripheral end E212 in a plan view. The flat plate 212 includes a protrusion P212 that protrudes outward from the outer peripheral end E212. The protrusion P212 has a substantially rectangular shape in a plan view, for example.

[0025] The flat plate 213 has a substantially circular outer peripheral end E213 in a plan view. The flat plate 213 includes a protrusion P213 that protrudes outward from the outer peripheral end E213. The protrusion P213 is, for example, substantially rectangular in a plan view.

[0026] The shapes of the outer peripheral end E211 of the plate 211, the outer peripheral end E212 of the plate 212, and the outer peripheral end E213 of the plate 213 are substantially the same. The protrusions P211, P212, and P213 correspond to the vibrating body protrusions of the present invention.

[0027] The plurality of piezoelectric bodies 221 and 222 are circular in a plan view.

[0028] In the vibrating body 20, a flat plate 211, a piezoelectric body 221, a flat plate 212, a piezoelectric body 222, and a flat plate 213 are stacked in this order along the first direction. The flat plate 211, the piezoelectric body 221, the flat plate 212, the piezoelectric body 222, and the flat plate 213 are stacked so that their centers are substantially aligned when viewed from the first direction. Thus, the vibrating body 20 constitutes a bimorph actuator.

[0029] At this time, when viewed from the first direction, the outer peripheral ends E211 , E212 , and E213 of the plurality of flat plates 211 , 212 , and 213 are substantially aligned, and the position where these outer peripheral ends E211 , E212 , and E213 overlap becomes the outer peripheral end E20 of the vibrating body 20 .

[0030] The case member 31 is a flat plate having a substantially circular outer peripheral end E31 in a plan view. The shape of the outer peripheral end E31 is substantially the same as the outer peripheral end E20 of the vibrating body 20. The case member 31 includes a protrusion P31 that protrudes outward from the outer peripheral end E31.

[0031] The housing member 31 includes a through-hole 311 and a plurality of through-holes 312. When viewed from the side of the opening of each through-hole, the through-hole 311 and the plurality of through-holes 312 are circular. The through-hole 311 is formed at a position that includes the center of the housing member 31 when viewed from above, with the center of the through-hole 311 being approximately aligned with the center of the circle formed by the outer peripheral end E31. Between the through-hole 311 and the outer peripheral end E31, the plurality of through-holes 312 are formed at approximately equal angular intervals in the circumferential direction surrounding the through-hole 311.

[0032] The housing member 32 is a circular annular body having a substantially circular outer peripheral end E32 in a plan view. The outer peripheral end E32 has substantially the same shape as the outer peripheral end E31. The housing member 32 includes a protrusion P32 that protrudes outward from the outer peripheral end E32.

[0033] The case member 32 is an annular body having a through hole 321. The diameter of the through hole 321 is larger than the diameter of the circle formed by the plurality of through holes 312 of the case member 31.

[0034] The housing member 33 is a circular annular body having a substantially circular outer peripheral end E33 in a plan view. The outer peripheral end E33 has substantially the same shape as the outer peripheral ends E31 and E32. The housing member 33 includes a protrusion P33 that protrudes outward from the outer peripheral end E33.

[0035] The case member 33 includes a through hole 331 as an inner space of the annular body. The diameter of the through hole 331 is substantially the same as the diameter of the through hole 321 of the case member 32.

[0036] The housing member 34 is a flat plate having a substantially circular outer peripheral end E34 in a plan view. The outer peripheral end E34 has substantially the same shape as the outer peripheral end E33. The housing member 34 includes a protrusion P34 that protrudes outward from the outer peripheral end E34.

[0037] The housing member 34 includes a through-hole 341 and a plurality of through-holes 342. When viewed from the side of the opening of each through-hole, the through-hole 341 and the plurality of through-holes 342 are circular. The through-hole 341 is formed at a position that includes the center of the housing member 34 when viewed from above, with the center of the through-hole 341 being approximately aligned with the center of the circle formed by the outer peripheral end E34. The plurality of through-holes 342 are formed circumferentially between the through-hole 341 and the outer peripheral end E34.

[0038] The housing member 35 is a flat plate having a substantially circular outer peripheral end E35 in a plan view. The outer peripheral end E35 has substantially the same shape as the outer peripheral end E34. The housing member 35 includes a protrusion P35 that protrudes outward from the outer peripheral end E35.

[0039] The housing member 35 includes a recessed portion 351, a plurality of grooves 352, and a plurality of through-holes 353. The recessed portion 351 is recessed from one main surface of the housing member 35. When viewed from the open side of the recessed portion 351, the recessed portion 351 has a circular shape. The recessed portion 351 is formed at a position that includes the center of the housing member 35 when viewed from above, and the center of the recessed portion 351 is substantially aligned with the center of the circle formed by the outer peripheral end E35.

[0040] Similar to the recess 351, the plurality of grooves 352 are recessed from one main surface of the housing member 35. The plurality of grooves 352 are strip-shaped. The plurality of grooves 352 are formed radially from the recess 351 toward the outer peripheral end E35. The plurality of grooves 352 are formed at predetermined angular intervals around the periphery of the recess 351. The plurality of grooves 352 extend to the outer peripheral end E35 and open to the outside from the outer peripheral end E35.

[0041] The through holes 353 are circular when viewed from the opening side of each through hole. The through holes 353 are formed circumferentially between the recess 351 and the outer peripheral end E35. The through holes 353 are formed between the grooves 352 in the circumferential direction surrounding the recess 351.

[0042] The housing member 36 is a flat plate having a substantially circular outer peripheral end E36 in a plan view. The outer peripheral end E36 has substantially the same shape as the outer peripheral end E35. The housing member 36 includes a protrusion P36 that protrudes outward from the outer peripheral end E36.

[0043] The housing member 36 includes a recessed portion 361, a plurality of through-holes 362, and a base 360. The recessed portion 361 is recessed from one main surface of the housing member 36. When viewed from the open side of the recessed portion 361, the recessed portion 361 has a circular shape. The recessed portion 361 is formed at a position that includes the center of the housing member 36 when viewed from above, and the center of the recessed portion 361 is substantially aligned with the center of the circle formed by the outer peripheral end E36.

[0044] When viewed from the side of the opening of each through-hole, the plurality of through-holes 362 are elliptical. The plurality of through-holes 362 are formed circumferentially with respect to the center of the housing member 36. The plurality of through-holes 362 are formed so that the longitudinal direction of the ellipse is parallel to the radial direction with respect to the center of the housing member 36. When viewed from above, the plurality of through-holes 362 overlap with the recess 361 and communicate with the interior space of the recess formed by the recess 361 and the membrane 50.

[0045] The base 360 ​​is cylindrical and protrudes from the bottom surface of the recess 361. The base 360 ​​is formed at a position that includes the center of the case member 36 in a plan view.

[0046] The case member 37 includes a case member 371 and a case member 372 .

[0047] The housing member 371 is a flat plate having a substantially circular outer peripheral end E371 in a plan view. The outer peripheral end E371 is larger than the outer peripheral ends E31 to E36. The housing member 371 includes a protrusion that protrudes outward from the outer peripheral end E371.

[0048] The housing member 371 includes a through-hole 3711 , a through-hole 3712 , a groove 3713 , and a through-hole 3714 .

[0049] The through hole 3711 is circular when viewed from its opening surface. The through hole 3711 is formed at a position including the center of the housing member 371 when viewed from above, and the center of the through hole 3711 is substantially aligned with the center of the circle formed by the outer peripheral end E371.

[0050] When viewed from the through-hole opening, through-holes 3712 and 3714 are circular. The diameters of through-holes 3712 and 3714 are smaller than the diameter of through-hole 3711. Through-holes 3712 and 3714 are formed between through-hole 3711 and outer peripheral end E371. Through-holes 3712 and 3714 are radially aligned with the center of housing member 37, with through-hole 3714 being located closer to outer peripheral end E371 than through-hole 3712.

[0051] The groove 3713 is recessed from one main surface of the housing member 371. In a plan view, the groove 3713 is formed between the through hole 3712 and the through hole 3714. The groove 3713 communicates with the through hole 3712 and the through hole 3714.

[0052] There are two sets of the through hole 3712 , the groove 3713 , and the through hole 3714 , and these sets are arranged at positions that are point-symmetrical with respect to the center of the case member 37 as a reference point.

[0053] The housing member 372 is a flat plate having a substantially circular outer peripheral end E372 in a plan view. The outer peripheral end E372 has the same shape as the outer peripheral end E371. The housing member 372 includes a protrusion that protrudes outward from the outer peripheral end E372.

[0054] The housing member 372 includes a through-hole 3721. When viewed from the side of the through-hole's opening, the through-hole 3721 is circular. The through-hole 3721 is formed so as to include the center of the housing member 372 when viewed from above. The center of the through-hole 3721 is substantially aligned with the center of the circle formed by the outer peripheral end E372. The diameter of the through-hole 3721 is smaller than that of the through-hole 3711 of the housing member 371.

[0055] Shell member 372 abuts against the surface of shell member 371 where the groove 3713 forms an opening. Thus, shell member 371 and shell member 372 form an exhaust path comprised of through-hole 3712, groove 3713 whose opening is blocked by shell member 371, and through-hole 3714. Shell member 371 and shell member 372 may be separate or integral.

[0056] The membrane 40 is made of a flexible material and has a circular shape.

[0057] The membrane 50 is made of a flexible material. The membrane 50 is circular. The membrane 50 includes a through hole 500. When viewed from the opening side of the through hole, the through hole 500 is circular. The diameter of the through hole 500 is smaller than the diameter of the base 360 ​​of the housing member 36.

[0058] In the first direction, case members 31 and 32 are stacked and arranged on one side of vibrating body 20. In the first direction, case members 33 to 37 are stacked and arranged on the other side of vibrating body 20. More specifically, the following structure is employed.

[0059] The housing member 32 is disposed on the side of the vibrating body 20 that faces the plate 211 and is connected to the plate 211. At this time, the outer peripheral end E32 of the housing member 32 is aligned with the outer peripheral end E20 of the vibrating body 20 when viewed from the first direction.

[0060] The case member 31 is disposed on the side of the case member 32 opposite to the vibrating body 20 and connected to the case member 32. At this time, the outer peripheral end E31 of the case member 31 and the outer peripheral end E32 of the case member 32 are aligned when viewed from the first direction.

[0061] The housing member 33 is disposed on the side of the vibrating body 20 that faces the plate 213 and is connected to the plate 213. At this time, the outer peripheral end E33 of the housing member 33 is aligned with the outer peripheral end E20 of the vibrating body 20 when viewed from the first direction.

[0062] The case member 34 is disposed on the side of the case member 33 opposite to the vibrating body 20 and connected to the case member 33. At this time, the outer peripheral end E34 of the case member 34 is aligned with the outer peripheral end E33 of the case member 33 when viewed from the first direction.

[0063] The through hole 341 and the plurality of through holes 342 in the housing member 34 are in communication with the through hole 331 of the housing member 33 .

[0064] The housing member 35 is disposed on the side of the housing member 34 opposite to the housing member 33 and is connected to the housing member 34. At this time, the housing member 35 is connected to the housing member 34 so that the side where the recess 351 and the plurality of grooves 352 are opened is on the side closer to the housing member 34. Furthermore, when viewed from the first direction, the outer peripheral end E35 of the housing member 35 is aligned with the outer peripheral end E34 of the housing member 34.

[0065] The recess 351 and the plurality of grooves 352 in the housing member 35 are in communication with the through-holes 341 of the housing member 34. The plurality of through-holes 353 in the housing member 35 are in communication with the plurality of through-holes 342 in the housing member 34, respectively.

[0066] The housing member 36 is disposed on the side of the housing member 35 opposite to the housing member 34 and is connected to the housing member 35. At this time, the housing member 36 is connected to the housing member 35 with the side opposite to the side where the recess 361 forms an opening being on the side closer to the housing member 35. Furthermore, when viewed from the first direction, the outer peripheral end E36 of the housing member 36 is aligned with the outer peripheral end E35 of the housing member 35.

[0067] The plurality of through holes 362 of the case member 36 communicate with the plurality of through holes 353 of the case member 35 .

[0068] The housing member 371 is disposed on the side of the housing member 36 opposite to the housing member 35 and is connected to the housing member 36. At this time, when viewed from the first direction, the outer peripheral end E371 of the housing member 371 and the outer peripheral end E372 of the housing member 37, which constitute the housing member 37, are aligned with the outer peripheral end E36 of the housing member 36.

[0069] The through holes 3711 and 3712 of the housing member 37 communicate with the recess 361 of the housing member 36. The through hole 3714 of the housing member 37 is located outside the outer peripheral end E36 of the housing member 36. In the housing member 37, the through hole 3711 communicates with the through hole 3721.

[0070] The membrane 40 is disposed in a space surrounded by the vibrating body 20, the housing member 33, and the housing member 34. The membrane 40 is fixed by the membrane fixing member 400 so as to include the center position of the flat plate 213. The membrane 40 is fixed at its center and fixed in a movable state at its periphery.

[0071] Membrane 50 is disposed in the space (inside recess 361) enclosed by housing members 36 and 37. Membrane 50 is secured by being sandwiched between housing members 36 and 37 at its outer periphery. Membrane 50 is secured with its central portion movable. When viewed from the first direction, through-hole 500 of membrane 50 overlaps base 360.

[0072] With this structure, when a driving voltage is applied to the vibrating body 20, the vibrating body 20 generates bending vibration. The driving voltage is applied to the vibrating body 20 using, for example, the flat plates 211, 212, and 213, and in this case, the protrusions can be utilized.

[0073] When vibrating body 20 flexurally vibrates, the volume of the space (pump space) enclosed by vibrating body 20, housing member 33, and housing member 34 changes. Consequently, gas outside fluid control device 10 is drawn from groove 352 through recess 351 and through-hole 341 into the space (pump space) enclosed by vibrating body 20, housing member 33, and housing member 34.

[0074] The gas sucked into the space surrounded by the vibrating body 20 , the housing member 33 , and the housing member 34 flows into the space (valve space) surrounded by the housing member 36 and the housing member 37 through the through holes 342 , 353 , and 362 .

[0075] Thus, the fluid control device 10 functions as a pump by forming a pump housing from multiple housing members 31-36 and including the vibrating body 20. Furthermore, the groove 352 corresponds to the suction port (first port) of the fluid control device 10, and the through-holes 342, 353, and 362 correspond to the communication ports (second ports) of the fluid control device 10.

[0076] At this time, the membrane 40 deforms due to the flow of gas. When gas is sucked into the pump space from the groove 352, the membrane 40 does not block the flow path. When gas flows from the through hole 342, the membrane 40 blocks the flow path. Thus, the fluid control device 10 can suppress the backflow of gas.

[0077] The gas flowing into the space (valve space) enclosed by the housing members 36 and 37 pushes the membrane 50 upward, causing it to detach from the base 360. As a result, the gas flows through the through-hole 500 of the membrane 50 toward the through-holes 3711 and 3721 of the housing member 37, and is discharged from the through-hole 3721 to the outside of the fluid control device 10. In other words, the through-hole 3721 corresponds to the discharge hole (third hole) of the fluid control device 10.

[0078] At this time, the film 50 blocks the through-hole 3712 , so the fluid control device 10 can suppress leakage of gas through the through-hole 3712 , the groove 3713 , and the through-hole 3714 .

[0079] If the application of the driving voltage to the vibrating body 20 stops, the bending vibration of the vibrating body 20 stops. In this case, for example, if a cuff (not shown) is provided at the through-hole 3721, gas will flow back from the cuff through the through-hole 3721. This backflowing gas pushes the membrane 50 downward, causing the membrane 50 to abut against the base 360. As a result, the through-hole 500 of the membrane 50 is blocked by the base 360. Therefore, the fluid control device 10 can prevent the backflowing gas from flowing back to the pump side.

[0080] Then, the membrane 50 moves toward the base 360, thereby opening the through-hole 3712. As a result, the backflowing gas is exhausted through the through-hole 3712, the groove 3713, and the through-hole 3714. That is, the through-hole 3712, the groove 3713, and the through-hole 3714 correspond to the exhaust path of the fluid control device 10.

[0081] In this manner, the fluid control device 10 functions as a valve by configuring the valve housing with the plurality of housing members 36 and 37 and including the membrane 50 .

[0082] In this configuration, the outer peripheral end E37 of the housing member 37 is larger than the outer peripheral ends E31-E36 of the other housing members 31-36 constituting the fluid control device 10. Thus, the through hole 3714 constituting the exhaust passage is located outside the outer peripheral end of the pump housing.

[0083] The through hole 3714 is open on the side of the case members 31 to 36. That is, the end surface (outer end surface) OP3712 of the exhaust passage exposed to the outside is exposed toward the pump case.

[0084] Therefore, the gas discharged through the exhaust passage (exhaust flow) flows toward the pump housing side (refer to Figure 1 、 Figure 5The exhaust flow is indicated by the thick arrows. Gas exhausted from the exhaust path flows along the outer surface of the pump housing (the outer surface formed by the outer peripheral ends E31-E36 of the multiple housing components 31-36). This creates an exhaust flow along the outer surface of the pump housing. This eliminates the need for heat sinks and other cooling fins, directly cooling the pump housing. Consequently, the fluid control device 10 achieves high cooling efficiency despite its compact size.

[0085] Furthermore, when viewed from the first direction, the multiple protrusions P211, P212, and P213 of the vibrator 20 do not overlap with the end surface OP3712 of the exhaust passage, which is exposed to the outside. Consequently, a portion of the exhaust gas is not blocked by the pump housing or the multiple protrusions P211, P212, and P213 of the vibrator 20, thereby preventing the gas flow from being obstructed. Furthermore, interference with the exhaust flow by the multiple protrusions P211, P212, and P213 is suppressed. Consequently, the fluid control device 10 achieves high cooling efficiency.

[0086] Furthermore, when viewed from the first direction, the protruding portions of the multiple housing components 31-36 do not overlap with the end surface OP3712 exposed to the outside of the exhaust passage. This prevents the exhaust flow from being blocked or disrupted by the protruding portions of the multiple housing components 31-36. Consequently, the fluid control device 10 achieves high cooling efficiency.

[0087] Furthermore, when viewed from the first direction, the closer the end surface OP3712 exposed to the exhaust passage is to the outer peripheral end of the pump housing (the outer peripheral ends E31-E36 of the multiple housing components 31-36), the more preferable it is. Furthermore, when viewed from the first direction, the end surface OP3712 exposed to the exhaust passage may have a portion overlapping the outer peripheral end of the pump housing. This further enhances the cooling effect of the exhaust gas.

[0088] Furthermore, it is preferable to have multiple exhaust paths. This increases the area available for cooling the pump housing, improving the cooling effect. For example, in this embodiment, two exhaust paths are used, resulting in a higher cooling effect than a single exhaust path. Furthermore, by having three or more exhaust paths, the cooling effect can be further enhanced.

[0089] Furthermore, the plurality of exhaust passages are preferably arranged at positions that are point-symmetrical with respect to the center of the valve housing when viewed from the first direction. This suppresses cooling variations in the circumferential direction and improves the cooling effect.

[0090] Furthermore, in the fluid control device 10, the plurality of flat plates 211, 212, and 213 have protrusions P211, P212, and P213, respectively. These protrusions P211, P212, and P213 protrude from the pump housing. Therefore, the exhaust gas also flows around these protrusions P211, P212, and P213. Consequently, the exhaust gas directly cools these protrusions P211, P212, and P213, cooling the vibrating element 20 within the pump housing.

[0091] In this case, the flat plate 211 having the protrusion P211 , the flat plate 212 having the protrusion P212 , and the flat plate 213 having the protrusion P213 are made of metal and therefore have high thermal conductivity.

[0092] <1> A fluid control device, wherein a pump including a pump housing and a valve including a valve housing are arranged side by side in a first direction, wherein:

[0093] The above pump has:

[0094] a first hole formed in the pump housing;

[0095] a second hole formed in the pump housing; and

[0096] The vibrating body is arranged in the pump housing and can deliver gas from the first hole to the second hole.

[0097] The above valve has:

[0098] The second hole is formed in the first valve housing member on the side of the valve housing connected to the pump housing;

[0099] a third hole formed in a second valve housing member disposed in the valve housing and facing the first valve housing member; and

[0100] An exhaust passage is formed in the second valve housing member of the valve housing.

[0101] The second valve housing member includes a protrusion that is formed of a portion that does not overlap with the outer shape of the pump housing when viewed from the first direction.

[0102] The protrusion has at least a portion of the exhaust passage.

[0103] The outer end surface of the exhaust passage that opens to the outside faces the pump side in the first direction.

[0104] The vibrating body includes a vibrating body protrusion that protrudes from the pump housing when viewed from the first direction.

[0105] When viewed from the first direction, at least a portion of the outer end surface of the exhaust passage is located outside the pump housing.

[0106] <2> The fluid control device according to <1>, wherein:

[0107] When viewed from the first direction, the outer end surface of the exhaust passage does not overlap with the vibrating body protrusion.

[0108] <3> The fluid control device according to <1> or <2>, wherein:

[0109] equipped with a plurality of the above-mentioned exhaust paths,

[0110] The plurality of exhaust passages are arranged at positions that are point-symmetrical with respect to the center of the valve housing when viewed from the first direction.

[0111] <4> The fluid control device according to any one of <1> to <3>, wherein:

[0112] The outer end surface of the exhaust passage has a portion overlapping with the pump housing when viewed from the first direction.

[0113] <5> The fluid control device according to any one of <1> to <4>, wherein:

[0114] The vibrating body has a laminated structure formed of a piezoelectric body and a vibrating body made of metal.

[0115] The vibrating body is held by the pump housing and includes the vibrating body protrusion.

Claims

1. A fluid control device comprising a pump including a pump housing and a valve including a valve housing arranged side by side in a first direction, wherein: The pump has: a first hole formed in the pump housing; a second hole formed in the pump housing; and a vibrating body, disposed in the pump housing, capable of delivering gas from the first hole to the second hole; The valve has: The second hole is formed in the first valve housing component on the side of the valve housing connected to the pump housing; a third hole formed in a second valve housing member disposed in the valve housing and arranged opposite to the first valve housing member; as well as an exhaust passage formed in the second valve housing member of the valve housing, The second valve housing member includes a protrusion formed of a portion that does not overlap with the outer shape of the pump housing when viewed from the first direction. The protrusion is provided with at least a portion of the exhaust passage, The outer end surface of the exhaust passage that opens to the outside faces the pump side in the first direction. The vibrator includes a vibrator protrusion that protrudes from the pump housing when viewed from the first direction. When viewed from the first direction, at least a portion of the outer end surface of the exhaust passage is located outside the pump housing.

2. The fluid control device according to claim 1, wherein: When viewed from the first direction, the outer end surface of the exhaust passage does not overlap with the vibrator protrusion.

3. The fluid control device according to claim 1 or 2, wherein: A plurality of the exhaust passages are provided, The plurality of exhaust passages are arranged at positions that are point-symmetrical with respect to the center of the valve housing when viewed from the first direction.

4. The fluid control device according to any one of claims 1 to 3, wherein: When viewed from the first direction, the outer end surface of the exhaust passage has a portion overlapping with the pump housing.

5. The fluid control device according to any one of claims 1 to 4, wherein: The vibrating body has a laminated structure formed of a piezoelectric body and a vibrating body made of metal. The vibrating body is held by the pump housing and includes the vibrating body protrusion.

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