On / off valve and semiconductor processing apparatus

Abstract

The application provides a kind of on-off valve and semiconductor processing equipment, on-off valve includes valve body and valve film, the valve body has pressurized chamber, fluid inlet, fluid outlet, with fluid inlet communication first flow channel, with fluid outlet communication second flow channel, pressurized chamber with first flow channel and / or second flow channel communication, pressurized chamber is used to pressurize fluid inside first flow channel and / or second flow channel, valve film can block and conduct first flow channel and / or second flow channel.This on-off valve is by setting pressurized chamber in valve body, and make pressurized chamber with first flow channel and / or second flow channel communication, by pressurized chamber to pressurize fluid in first flow channel and / or second flow channel, high pressure fluid can quickly fill the cavity of valve film opening when valve film opens, effectively prevent the generation of micro-bubble in the process of valve film opening of on-off valve.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, and more specifically, relates to an on / off valve and a semiconductor processing device. Background Technology

[0002] With the rapid development of the semiconductor industry, the requirements for fluid control systems in the production process are becoming increasingly stringent, especially in the precise control of high-purity, high-viscosity fluids. As a key component of the fluid control system, the performance of on / off valves directly affects the quality and efficiency of semiconductor manufacturing.

[0003] In semiconductor manufacturing, fluid transport systems require high cleanliness, zero contamination, and high reliability. Traditional ball valves, during opening and closing, easily generate tiny particles due to friction between the ball and valve seat. These particles contaminate the fluid system and reduce semiconductor product yield. To address this issue, diaphragm valves are widely used in the semiconductor industry due to their structural characteristics. However, existing diaphragm valves create cavities within the flow channels inside the valve body during opening. When handling high-viscosity fluids, these cavities easily generate microbubbles that are difficult to eliminate. For example, these microbubbles generated during photoresist delivery in semiconductor equipment can severely affect the uniformity of photoresist coating and product quality in semiconductor manufacturing. Summary of the Invention

[0004] The present invention provides an on / off valve and a semiconductor processing device, which can prevent the generation of microbubbles in the flow channel inside the valve body during the opening process of the on / off valve.

[0005] The technical solution adopted by the present invention to solve its technical problem is as follows: The first aspect of the present invention provides an on / off valve, including a valve body and a valve diaphragm; The valve body has a pressurization chamber, a fluid inlet, a fluid outlet, a first flow channel communicating with the fluid inlet, and a second flow channel communicating with the fluid outlet. The pressurization chamber is connected to the first flow channel and / or the second flow channel. The pressurization chamber is used to pressurize the fluid inside the first flow channel and / or the second flow channel. The valve diaphragm can block and open the first flow channel and the second flow channel.

[0006] Preferably, there is a first flow between the pressurized chamber and the valve diaphragm, a second flow between the pressurized chamber and the fluid inlet, and a third flow between the pressurized chamber and the fluid outlet, wherein the first flow is smaller than the smaller of the second flow and the third flow.

[0007] Preferably, the valve diaphragm includes a flexible diaphragm and a drive block, the flexible diaphragm and the drive block are fixedly connected, and the drive block is used to drive the flexible diaphragm to block and open the first flow channel and the second flow channel.

[0008] Preferably, the valve body is provided with a mounting groove, the flexible diaphragm is disposed in the mounting groove, and the edge of the flexible diaphragm is interference-fitted with the valve body.

[0009] Preferably, the valve body has an arc-shaped structure corresponding to the flexible diaphragm.

[0010] Preferably, the center of the flexible diaphragm has a protruding structure for sealing the first flow channel and / or the second flow channel, and the protruding structure of the flexible diaphragm has a raised structure opposite to the arcuate structure between the edge of the flexible diaphragm.

[0011] Preferably, the mounting groove is provided with a clamping block for the flexible diaphragm.

[0012] Preferably, the valve body is provided with a valve cover, the valve cover is fixedly connected to the valve body, the valve cover is pressed onto the pressing block, and the valve cover is provided with a first air passage for pressurizing the pressurizing chamber and a second air passage for pressurizing the driving block to drive the driving block to move axially.

[0013] Preferably, the on / off valve further includes a first pressure regulating mechanism connected to the first air passage and a second pressure regulating mechanism connected to the second air passage.

[0014] Preferably, a pressure boosting block is provided in the pressure chamber, and the pressure boosting block is dynamically and sealed to the pressure chamber. Gas flowing in from the first airway is used to drive the pressure boosting block to move so that the pressure chamber is pressurized.

[0015] Preferably, the on / off valve further includes a valve diaphragm driving structure, which is used to drive the valve diaphragm to block and open the first flow channel and the second flow channel.

[0016] Preferably, the on / off valve further includes a pressure boosting structure, which is used to boost the pressure in the pressurized chamber.

[0017] Preferably, there are two pressurized chambers, one of which is connected to the first flow channel and the other is connected to the second flow channel.

[0018] A second aspect of the present invention provides a semiconductor processing apparatus, including a delivery pipe and an on / off valve disposed on the delivery pipe, wherein the on / off valve is an on / off valve as described above.

[0019] The on / off valve provided by this invention includes a valve body and a valve diaphragm. The valve body has a pressurization chamber, a fluid inlet, a fluid outlet, a first flow channel communicating with the fluid inlet, and a second flow channel communicating with the fluid outlet. The pressurization chamber is connected to the first flow channel and / or the second flow channel and is used to pressurize the fluid inside the first flow channel and / or the second flow channel. The valve diaphragm can block and open the first flow channel and / or the second flow channel. By setting a pressurization chamber in the valve body and connecting the pressurization chamber to the first flow channel and / or the second flow channel, the on / off valve pressurizes the fluid in the first flow channel and / or the second flow channel. When the valve diaphragm opens, the high-pressure fluid can quickly fill the cavity where the valve diaphragm opens, effectively preventing the generation of microbubbles during the valve diaphragm opening process. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A cross-sectional structural diagram of the on / off valve provided in an embodiment of the present invention; Figure 2 An exploded view of the on / off valve provided in an embodiment of the present invention; Figure 3 A schematic diagram of the connection structure between the flexible diaphragm and the drive block of the on / off valve provided in an embodiment of the present invention; Figure 4 for Figure 3 AA-direction cross-section. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] In the description of this invention, it should be understood that the terms “comprising” and “having” as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0024] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that the term "and / or" as used herein is merely a description of the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can represent: A alone, A and B simultaneously, and B alone. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0026] In the semiconductor industry, in process liquid circuits with high requirements for cleanliness and corrosion resistance, on / off valves often employ PTFE diaphragms to isolate the upstream and downstream of the circuit, achieving the function of liquid circuit on / off. PTFE diaphragm valves seal the liquid circuit by controlling the opening and closing of the diaphragm. During the process of the PTFE diaphragm opening from closed, a certain amount of cavity is formed. For low-viscosity fluids, due to the low flow resistance, the fluid can quickly fill the cavity area. For high-viscosity fluids, due to the high flow resistance, the fluid filling speed of the cavity is much slower than the PTFE diaphragm opening speed, resulting in a vacuum during diaphragm opening. Moreover, the fluid is difficult to uniformly fill all positions within the valve, easily generating microbubbles. Furthermore, due to the high viscosity of the fluid, the generated negative pressure bubbles are difficult to eliminate. Based on the above reasons, this application provides an on / off valve and semiconductor processing equipment.

[0027] The on / off valve and semiconductor processing equipment provided by the present invention will be described in detail below with reference to specific embodiments.

[0028] Figure 1 This is a cross-sectional schematic diagram of the on / off valve provided in an embodiment of the present invention. Figure 2For an exploded view of the on / off valve provided in an embodiment of the present invention, please refer to [link / reference]. Figure 1 , Figure 2 A first aspect of the present invention provides an on / off valve, including a valve body 1 and a valve diaphragm 2. The valve body 1 has a pressurization chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 communicating with the fluid inlet 12, and a second flow channel 15 communicating with the fluid outlet 13. The pressurization chamber 11 is communicating with the first flow channel 14 and / or the second flow channel 15. The pressurization chamber 11 is used to pressurize the fluid toward the inside of the first flow channel 14 and / or the second flow channel 15. The valve diaphragm 2 is capable of blocking and opening the first flow channel 14 and the second flow channel 15.

[0029] In this embodiment, the valve body 1 is a one-piece molded metal structure made of stainless steel, which has good corrosion resistance and mechanical strength. The valve body 1 has a through-flow first flow channel 14 and a second flow channel 15. One end of the first flow channel 14 is connected to the fluid inlet 12, and one end of the second flow channel 15 is connected to the fluid outlet 13. The fluid inlet 12 and the fluid outlet 13 are respectively located on both sides of the valve body 1 for connecting to external pipelines.

[0030] In this embodiment, the valve diaphragm 2 can block and open the first flow channel 14 and the second flow channel 15. The valve diaphragm 2 is installed on the valve body 1 and is used to control the on / off state of the first flow channel 14 and the second flow channel 15. The valve diaphragm 2 in this embodiment is made of PTFE material, has a smooth surface, and maintains a seal with the inner wall of the valve body 1, ensuring that the valve diaphragm 2 can move flexibly while effectively blocking the flow channels.

[0031] In this embodiment, the pressurizing chamber 11 is disposed inside the valve body 1, and the pressurizing chamber 11 is connected to both the first flow channel 14 and the second flow channel 15. The volume of the pressurizing chamber 11 in this embodiment can be designed according to actual needs, for example, the volume of the pressurizing chamber 11 is 1-5 cubic centimeters. Exemplarily, the pressurizing chamber 11 in this embodiment is pressurized by a pressurizing block that is movably and sealingly connected to the valve body 1. By driving the pressurizing block to move, the volume of the pressurizing chamber 11 is changed, thereby pressurizing the pressurizing chamber 11. Since the pressurizing chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15, the pressurization of the pressurizing chamber 11 causes pressure to act on the fluid in the first flow channel 14 and / or the second flow channel 15. During the opening of the valve diaphragm 2, the high-pressure fluid formed by the pressurization of the pressurizing chamber 11 will replenish the cavity formed by the opening of the valve diaphragm 2, thereby preventing the generation of microbubbles during the opening of the on / off valve.

[0032] The on / off valve provided in this embodiment includes a valve body 1 and a valve diaphragm 2. The valve body 1 has a pressurizing chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 communicating with the fluid inlet 12, and a second flow channel 15 communicating with the fluid outlet 13. The pressurizing chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15, and is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve diaphragm 2 can block and open the first flow channel 14 and / or the second flow channel 15. By setting a pressurizing chamber 11 in the valve body 1 and connecting the pressurizing chamber 11 to the first flow channel 14 and / or the second flow channel 15, the on / off valve pressurizes the fluid in the first flow channel 14 and / or the second flow channel 15. When the valve diaphragm 2 opens, the high-pressure fluid can quickly fill the cavity opened by the valve diaphragm 2, effectively preventing the generation of microbubbles during the opening process of the on / off valve diaphragm 2.

[0033] Furthermore, there is a first flow path between the pressurized chamber 11 and the valve diaphragm 2, a second flow path between the pressurized chamber 11 and the fluid inlet 12, and a third flow path between the pressurized chamber 11 and the fluid outlet 13. The first flow path is smaller than the minimum of the second and third flow paths. In this embodiment, during use, the on / off valve connects the fluid inlet 12 to the upstream pipeline and the fluid outlet 13 to the downstream pipeline. The first flow path is smaller than the minimum of the second and third flow paths. This design ensures that the pressure of the fluid in the pressurized chamber 11 can effectively act on the valve diaphragm 2, while reducing the influence of the pressurized chamber 11 on the pressure of the fluid inlet 12 and the fluid outlet 13.

[0034] During the opening process of the on / off valve in this embodiment, the fluid in the pressurized chamber 11 is compressed by pressurizing the chamber, that is, the liquid pressure in the first flow channel 14 and / or the second flow channel 15 increases. During the opening process of the valve diaphragm 2, due to the high viscosity of the fluid, the first flow is less than the minimum of the second flow and the third flow. During the use of the on / off valve, the distance from the upstream and downstream pipeline outlets to the pressurized chamber 11 of the on / off valve is much greater than the distance from the pressurized chamber 11 to the valve diaphragm 2. According to the law of least resistance, the high-pressure fluid in the pressurized chamber 11 will preferentially fill the cavity opened by the valve diaphragm 2. Under the action of high pressure, the fluid fills the cavity opened by the valve diaphragm 2 at a relatively fast speed. Moreover, due to the pressurization, the liquid fills the cavity opened by the valve diaphragm 2 evenly, preventing the generation of microbubbles during the opening process of the valve diaphragm 2.

[0035] Figure 3 This is a schematic diagram of the connection structure between the flexible diaphragm and the drive block of the on / off valve provided in an embodiment of the present invention. Figure 4 for Figure 3 Please refer to the AA-direction cross-section. Figure 1-4In this embodiment, the valve diaphragm 2 includes a flexible diaphragm 21 and a drive block 22. The flexible diaphragm 21 and the drive block 22 are fixedly connected. The drive block 22 can drive the flexible diaphragm 21 to block and open the first flow channel 14 and the second flow channel 15. The flexible diaphragm 21 in this embodiment is made of polytetrafluoroethylene (PTFE). PTFE has excellent corrosion resistance and can withstand the erosion of corrosive media such as acids, alkalis, and solvents at room temperature, making it suitable for various corrosive environments. PTFE can maintain its good performance at extremely high temperatures, with an operating temperature range from -200℃ to +260℃, making it suitable for applications under extreme temperature conditions. The PTFE diaphragm has an extremely low coefficient of friction, enabling it to achieve good sealing performance during the sealing process, reducing wear and friction. Moreover, the smooth surface of PTFE has anti-adhesion properties, making it difficult for solid particles or dirt to adhere, which helps reduce valve maintenance and cleaning work. The drive block 22 in this embodiment is made of metal materials, such as stainless steel or aluminum alloy, and has sufficient rigidity and strength. The flexible diaphragm 21 and drive block 22 in this embodiment are connected by threads, making the connection method simple.

[0036] In this embodiment, the central portion of the flexible diaphragm 21 is fixedly connected to the drive block 22, and the edge portion contacts the valve body 1 to form a seal. The diameter of the drive block 22 is smaller than the diameter of the flexible diaphragm 21. For example, the diameter of the drive block 22 is 50%-70% of the diameter of the flexible diaphragm 21. In this embodiment, the drive block 22 is movably and sealingly connected to the valve cover 4 provided on the valve body 1.

[0037] In this embodiment, the valve body 1 is provided with a mounting groove 17, and a flexible diaphragm 21 is disposed in the mounting groove 17. The edge of the flexible diaphragm 21 is interference-fitted with the valve body 1. This interference fit ensures the sealing between the flexible diaphragm 21 and the valve body 1.

[0038] In this embodiment, the valve body 1 has an arc-shaped structure corresponding to the flexible diaphragm 21. For example, the portion of the valve body 1 corresponding to the flexible diaphragm 21 is hemispherical. This hemispherical structure reduces dead zones at the corners, minimizing the risk of air bubbles caused by these dead zones during valve diaphragm 2 opening. The center of the flexible diaphragm 21 has a protruding structure 211 for sealing the first flow channel 14 and / or the second flow channel 15. Between the protruding structure 211 and the edge of the flexible diaphragm 21, there is a raised structure 212 that faces away from the arc-shaped structure. The design of the raised structure 212 allows the flexible diaphragm 21 to deform uniformly under pressure, avoiding stress concentration and extending the service life of the flexible diaphragm 21. Simultaneously, the raised structure 212 also reduces the driving force required to seal the first flow channel 14 and the second flow channel 15, improving the sensitivity of the valve diaphragm 2.

[0039] In this embodiment, a diaphragm clamping block 3 is provided in the mounting groove 17. The diaphragm clamping block 3 is made of the same material as the valve body 1 and has a smooth surface. The function of the diaphragm clamping block 3 is to firmly fix the edge of the flexible diaphragm 21 in the mounting groove 17, further preventing the flexible diaphragm 21 from shifting during operation.

[0040] In this embodiment, a valve cover 4 is provided on the valve body 1. The valve cover 4 is fixedly connected to the valve body 1 and is pressed onto the clamping block 3. The valve cover 4 is provided with a first air passage 41 for pressurizing the pressurizing chamber 11 and a second air passage 42 for pressurizing and driving the drive block 22 to move axially. In this embodiment, the valve cover 4 is made of the same material as the valve body 1 and is fixedly connected to the valve body 1 by bolts. The number of bolts is 4-8, which are evenly distributed on the valve cover 4. In this embodiment, the valve cover 4 is pressed onto the clamping block 3, that is, the upper surface of the clamping block 3 protrudes from the mounting groove 17. After the valve cover 4 is fixedly connected to the valve body 1, the valve cover 4 further serves to press the flexible diaphragm 21.

[0041] In this embodiment, one end of the first airway 41 is connected to an external air source device, and the other end of the first airway 41 is connected to the pressurized chamber 11. One end of the second airway 42 is connected to an external air source device, and the other end of the second airway 42 is connected to the space above the drive block 22. This embodiment does not impose any particular limitation on the dimensions of the first airway 41 and the second airway 42.

[0042] For example, the on / off valve further includes a first pressure regulating mechanism connected to the first air passage 41 and a second pressure regulating mechanism connected to the second air passage 42. Both the first and second pressure regulating mechanisms are conventional pneumatic pressure regulating structures, capable of precisely controlling the air pressure in the first and second air passages 41 and 42. During the operation of the on / off valve, the first pressure regulating mechanism first adjusts the air pressure in the first air passage 41 to a preset value, applying pressure to the fluid in the first flow channel 14 and / or the second flow channel 15. Then, the air source device draws air through the second air passage 42, driving the valve diaphragm 2 to move and open the valve, controlling the conduction of the first and second flow channels 14 and 15. When it is necessary to block the flow channels, the air source device pressurizes through the second air passage 42, causing the drive block 22 to move the flexible diaphragm 21 downwards, and the flexible diaphragm 21 blocks the first and second flow channels 14 and 15.

[0043] Exemplarily, both the first and second pressure regulating mechanisms in this embodiment include a pressure sensor and a controller. The first pressure regulating mechanism can monitor the pressure inside the pressurizing chamber 11 in real time through the pressure sensor, and the controller controls the working state of the gas source device according to the feedback information from the pressure sensor to ensure that the pressure inside the pressurizing chamber 11 is maintained at an appropriate pressure. Exemplarily, this embodiment can flexibly adjust the pressurization value inside the pressurizing chamber 11 to adapt to fluids of different viscosities.

[0044] In this embodiment, a pressure boosting block 5 is provided inside the pressurizing chamber 11. The pressure boosting block 5 is dynamically and sealedly connected to the pressurizing chamber 11. The pressure boosting block in this embodiment is made of stainless steel with a smooth surface. A sealing structure made of fluororubber is provided around the pressure boosting block 5. In this embodiment, an air source device is connected through the first air passage 41 to drive the pressure boosting block 5 to move, thereby pressurizing the pressurizing chamber 11.

[0045] The operating principle of the on / off valve in this embodiment is as follows: the drive block 22 and the valve cover 4 form a cylinder-like structure. The second air passage 42 on the valve cover 4 can be supplied with compressed air or a vacuum can be drawn, driving the drive block 22 to move up and down, thereby driving the flexible diaphragm 21 to control the on / off state of the first flow channel 14 and the second flow channel 15. The first air passage 41 above the pressure booster block 5 can be supplied with compressed air to drive the pressure booster block 5 to move downward so that the pressure chamber 11 is pressurized.

[0046] The process of the on / off valve from closed to open is as follows: Compressed air is supplied to the first air passage 41 above the pressure booster block 5, driving the pressure booster block 5 to move downward. The fluid in the pressure chamber 11 is compressed and drawn out through the second air passage 42. The driving block 22 drives the flexible diaphragm 21 to move upward and open. Due to the high viscosity of the fluid, the first flow between the pressure chamber 11 and the valve diaphragm 2 is shorter than the second flow between the pressure chamber 11 and the fluid inlet 12 and the third flow between the pressure chamber 11 and the fluid outlet 13. That is, the distance from the outlet of the upstream and downstream pipelines connected to the on / off valve to the pressure chamber 11 is much greater than the distance from the pressure chamber 11 to the flexible diaphragm 21. According to the law of least resistance, the high-pressure fluid in the pressure chamber 11 will preferentially fill the cavity opened by the flexible diaphragm 21. Under high pressure, the fluid fills the cavity opened by the flexible diaphragm 21 at a relatively fast speed, and the liquid fills the diaphragm cavity evenly due to the pressurization, preventing the generation of microbubbles in the pipeline during the opening of the on / off valve.

[0047] When the valve is closed, the first air passage 41 above the booster block 5 stops supplying positive pressure and switches to atmospheric conditions. The booster block 5 moves slowly upward and resets under the influence of the liquid circuit pressure. Compressed air is supplied through the second air passage 42 above the drive block 22 of the valve diaphragm 2. The compressed air drives the drive block 22 together with the flexible diaphragm 21 to block the circuit of the first flow channel 14 and the second flow channel 15.

[0048] In one specific embodiment, the on / off valve further includes a diaphragm driving structure, which is used to drive the diaphragm 2 to block and open the first flow channel 14 and the second flow channel 15. Exemplarily, the diaphragm driving structure includes a cylinder and a piston, with the cylinder fixed to the valve cover and the piston connected to the drive block 22. This embodiment uses a cylinder structure for the diaphragm driving structure, which has higher energy conversion efficiency, longer service life, and higher reliability. Of course, other linear drive structures can also be used for the diaphragm driving structure in this embodiment; this embodiment does not impose any particular limitation on the specific structure of the diaphragm driving structure.

[0049] Furthermore, the on / off valve also includes a pressure boosting structure for pressurizing the pressure chamber 11. Exemplarily, the pressure boosting structure in this embodiment is also a cylinder structure, with the cylinder barrel fixed to the valve cover and the piston used to pressurize the pressure chamber 11. Exemplarily, the piston is fixedly connected to the pressure boosting block 5 disposed within the pressure chamber 11. Of course, the pressure boosting structure in this embodiment can also employ other linear drive structures to drive the pressure boosting block 5 to move; this embodiment does not impose any particular limitation on the specific structure of the pressure boosting structure.

[0050] In one specific embodiment, there are two pressurizing chambers 11, one of which is connected to the first flow channel 14, and the other is connected to the second flow channel 15. The two pressurizing chambers 11 have equal volumes. The two pressurizing chambers 11 are symmetrically distributed on the valve body 1. The on / off valve of this embodiment can simultaneously pressurize the fluid in the first flow channel 14 and the second flow channel 15. When the two pressurizing chambers 11 are pressurized, the high-pressure fluid in the first flow channel 14 and the second flow channel 15 will fill the cavity opened by the valve diaphragm 2 more quickly. Under high pressure, the fluid fills the cavity opened by the valve diaphragm 2 more quickly. Pressurizing the pressurizing chambers 11 makes the liquid fill the cavity opened by the valve diaphragm 2 evenly, which better prevents the generation of microbubbles during the opening of the on / off valve.

[0051] The on / off valve provided in this invention includes a valve body and a valve diaphragm. The valve body has a pressurized chamber, a fluid inlet, a fluid outlet, a first flow channel communicating with the fluid inlet, and a second flow channel communicating with the fluid outlet. The pressurized chamber is connected to the first and / or second flow channels and is used to pressurize the fluid inside the first and / or second flow channels. The valve diaphragm can block and open the first and / or second flow channels. By providing a pressurized chamber in the valve body and connecting it to the first and / or second flow channels, the on / off valve pressurizes the fluid in the first and / or second flow channels. When the valve diaphragm opens, the high-pressure fluid can quickly fill the cavity where the valve diaphragm opens, effectively preventing the generation of microbubbles during the valve diaphragm opening process.

[0052] A second aspect of the present invention provides a semiconductor processing apparatus, including a delivery pipeline and an on / off valve disposed on the delivery pipeline, wherein the on / off valve is the on / off valve described in the above embodiment.

[0053] Please see Figure 1 and Figure 2 The on / off valve includes a valve body 1 and a valve diaphragm 2; The valve body 1 has a pressurization chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 communicating with the fluid inlet 12, and a second flow channel 15 communicating with the fluid outlet 13. The pressurization chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The pressurization chamber 11 is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve diaphragm 2 can block and open the first flow channel 14 and the second flow channel 15.

[0054] Specifically, the semiconductor processing equipment is used in the semiconductor wafer manufacturing process and includes processing units and transport pipelines connecting the processing units. The transport pipelines are made of stainless steel and are used to transport high-viscosity fluids, etc. On / off valves are installed on the transport pipelines to control the flow of fluid within the pipelines. Exemplarily, the on / off valves are connected to the transport pipelines via flanges made of stainless steel, with sealing rings made of fluororubber between the flanges. The flanges are fixed together by bolts, with 6-12 bolts evenly distributed around the flanges. Exemplarily, the semiconductor processing equipment in this embodiment is a photolithography device, wherein the transport pipelines are used to transport photoresist.

[0055] Existing diaphragm valves form cavities within the flow channels inside the valve body 1 during opening. When handling high-viscosity fluids, these cavities easily generate microbubbles that are difficult to eliminate. For example, these microbubbles generated during photoresist delivery in semiconductor equipment can severely affect the uniformity of photoresist coating and product quality in semiconductor manufacturing. The on / off valve provided in this embodiment includes a valve body 1 and a valve diaphragm 2. The valve body 1 has a pressurization chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 communicating with the fluid inlet 12, and a second flow channel 15 communicating with the fluid outlet 13. The pressurization chamber 11 communicates with the first flow channel 14 and / or the second flow channel 15, and is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve diaphragm 2 can block and open the first flow channel 14 and / or the second flow channel 15. The on / off valve has a pressurized chamber 11 inside the valve body 1, which is connected to the first flow channel 14 and / or the second flow channel 15. The pressurized chamber 11 pressurizes the fluid in the first flow channel 14 and / or the second flow channel 15. When the valve diaphragm 2 opens, the high-pressure fluid can quickly fill the cavity of the valve diaphragm 2, effectively preventing the generation of microbubbles during the opening of the valve diaphragm 2.

[0056] The on / off valve of the semiconductor processing equipment in this embodiment can eliminate microbubbles generated during photoresist delivery, thereby improving the uniformity of photoresist coating and the quality of semiconductor products.

[0057] In the above description, the terms "an embodiment," "some embodiments," "example," "specific example," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0058] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An on / off valve, characterized in that: Includes valve body and valve diaphragm; The valve body has a pressurization chamber, a fluid inlet, a fluid outlet, a first flow channel communicating with the fluid inlet, and a second flow channel communicating with the fluid outlet. The pressurization chamber is connected to the first flow channel and the second flow channel. The pressurization chamber is used to pressurize the fluid inside the first flow channel and the second flow channel. The valve diaphragm can block and open the first flow channel and the second flow channel. There is a first flow between the pressurized chamber and the valve diaphragm, a second flow between the pressurized chamber and the fluid inlet, and a third flow between the pressurized chamber and the fluid outlet. The first flow is smaller than the smaller of the second flow and the third flow.

2. The on / off valve according to claim 1, characterized in that: The valve diaphragm includes a flexible diaphragm and a drive block, the flexible diaphragm and the drive block are fixedly connected, and the drive block is used to drive the flexible diaphragm to block and open the first flow channel and the second flow channel.

3. The on / off valve according to claim 2, characterized in that: The valve body is provided with a mounting groove, and the flexible diaphragm is disposed in the mounting groove. The edge of the flexible diaphragm is interference-fitted with the valve body.

4. The on / off valve according to claim 2, characterized in that: The valve body has an arc-shaped structure corresponding to the flexible diaphragm.

5. The on / off valve according to claim 4, characterized in that: The center of the flexible diaphragm has a protruding structure for sealing the first flow channel and / or the second flow channel, and there is a raised structure between the protruding structure of the flexible diaphragm and the edge of the flexible diaphragm that is opposite to the arc surface structure.

6. The on / off valve according to claim 3, characterized in that: The mounting groove is provided with a clamping block for the flexible diaphragm.

7. The on / off valve according to claim 6, characterized in that: The valve body is provided with a valve cover, which is fixedly connected to the valve body. The valve cover is pressed onto the clamping block. The valve cover is provided with a first air passage for pressurizing the pressurizing chamber and a second air passage for pressurizing the driving block to drive the driving block to move axially.

8. The on / off valve according to claim 7, characterized in that: The on / off valve further includes a first pressure regulating mechanism connected to the first air passage and a second pressure regulating mechanism connected to the second air passage.

9. The on / off valve according to claim 7, characterized in that: A pressure boosting block is provided in the pressurization chamber. The pressure boosting block is dynamically and sealed to the pressurization chamber. Gas flowing in from the first airway is used to drive the pressure boosting block to move so that the pressurization chamber is pressurized.

10. The on / off valve according to claim 1, characterized in that: The on / off valve also includes a valve diaphragm driving structure, which is used to drive the valve diaphragm to block and open the first flow channel and the second flow channel.

11. The on / off valve according to claim 1, characterized in that: The on / off valve also includes a pressure boosting structure, which is used to boost the pressure in the pressurized chamber.

12. The on / off valve according to any one of claims 1-11, characterized in that: The number of pressurized chambers is two, one of which is connected to the first flow channel, and the other is connected to the second flow channel.

13. A semiconductor processing apparatus, characterized in that: It includes a conveying pipeline and an on / off valve disposed on the conveying pipeline, wherein the on / off valve is the on / off valve according to any one of claims 1-12.

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