Three-axis accelerometer applied to vehicle
By setting a stop frame and a multi-directional three-dimensional protection structure in the three-axis accelerometer, the problems of reduced detection accuracy and shortened life caused by vehicle vibration are solved, higher impact resistance and detection accuracy are achieved, and the miniaturization and integration of the device are promoted.
Patent Information
- Application Number
- CN202510867397.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-26
- Publication Date
- 2025-09-05
AI Technical Summary
Existing triaxial accelerometers have insufficient shock resistance in vehicle vibration environments, resulting in reduced detection accuracy and shortened service life.
The stop frame, the first stop block and the second stop block are used to limit the excessive displacement of the detection module, and a stable packaging environment is formed by enclosing the substrate, the cover plate and the stop frame. Combined with the buffer gap and the multi-directional three-dimensional protection structure, abnormal vibration is suppressed.
The overload resistance and detection accuracy of the accelerometer are improved, the service life is extended, and the miniaturization and integration of the device are achieved.
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Figure CN120594887A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of accelerometers, and more particularly, relates to a three-axis accelerometer applied to a vehicle. Background Art
[0002] An accelerometer is a device that measures the linear acceleration of a vehicle. Currently, the mainstream accelerometer on the market is the MEMS accelerometer. Based on integrated circuit technology and micromachining techniques, MEMS accelerometers integrate electronic and mechanical components on a single chip to measure acceleration. They offer a range of advantages, including small size, light weight, low cost, low energy consumption, and high integration. Capacitive MEMS accelerometers use capacitance to detect micro-displacements of a test mass in an acceleration field due to inertial forces. Because these micro-displacements cause changes in the detection capacitance, the capacitance signal undergoes pre-amplification and signal conditioning, then is output as a DC voltage, indirectly detecting acceleration.
[0003] MEMS accelerometers mainly include single-axis accelerometers, dual-axis accelerometers and three-axis accelerometers. The structure of the three-axis accelerometer is that the X-axis, Y-axis and Z-axis accelerometers are integrated on the same substrate, and each measures the acceleration in that direction.
[0004] With the development of the automotive industry, triaxial accelerometers are often used to monitor vehicle driving conditions and vibrations. However, the inevitable shaking of vehicles during driving can cause vibrations in the triaxial accelerometers installed on them. Severe vehicle shaking can easily cause the detection components within the triaxial accelerometer to collide with each other, potentially damaging the accelerometer. Summary of the Invention
[0005] The present invention aims to provide a three-axis accelerometer for use in vehicles, aiming to solve the problem that the existing three-axis accelerometers have insufficient shock resistance, resulting in the detection accuracy being easily affected after being subjected to vibration forces.
[0006] To achieve the above object, the technical solution adopted by the present invention is:
[0007] A three-axis accelerometer for use in vehicles is provided, comprising a detection unit and a stopper frame arranged around the periphery of the detection unit, a substrate arranged below the detection unit, and a cover plate arranged above the detection unit. The substrate, the cover plate, and the stopper frame together form a storage space for accommodating the detection unit. The detection unit comprises an X-axis detection module, a Z-axis detection module, and a Y-axis detection module, which are sequentially spaced along the X direction within the stopper frame. A first stopper is provided between the X-axis detection module and the Z-axis detection module, and a second stopper is provided between the Z-axis detection module and the Y-axis detection module.
[0008] In a possible implementation, the three-axis accelerometer applied to a vehicle further includes a third stop block connected to the bottom of the cover plate, and the third stop block and the detection unit form a buffer gap in the vertical direction.
[0009] In one possible implementation, the Z-axis detection module includes a detection structure and a first detection electrode located at the bottom of the detection structure, and also includes a second detection electrode located at the top of the substrate, and the first detection electrode and the second detection electrode are correspondingly distributed in the upper and lower directions.
[0010] In a possible implementation, a detection stop block is provided at the bottom of each of the X-axis detection module, the Z-axis detection module, and the Y-axis detection module, and the detection stop block and the substrate form a detection space in the upper and lower directions.
[0011] In a possible implementation, a plurality of the detection stop blocks are provided at intervals along the X direction at the bottom of the Z-axis detection module, and the heights of the plurality of detection stop blocks gradually decrease toward a side away from the Z-axis elastic beam.
[0012] In a possible implementation, the Z-axis detection module includes at least one detection stop block located at a distal end of the detection structure, where the distal end is a side of the detection structure that is away from the Z-axis elastic beam along the X direction.
[0013] In one possible implementation, the stop outer frame includes a frame body and a plurality of top corner stops connected to the frame body, the frame body is a rectangular frame structure, and is arranged around the periphery of the detection unit, the top corner stops are located on the inner side of the frame body, and the plurality of top corner stops correspond one-to-one to the top corners of the frame body.
[0014] In one possible implementation, the stop outer frame also includes a plurality of limit stops connected to the inner side of the frame body, and the plurality of limit stops are arranged between two adjacent top corner stops in the X direction, wherein a part of the limit stops corresponds to the gap between the X-axis detection module and the Z-axis detection module in the Y direction, and another part of the limit stops corresponds to the gap between the Z-axis detection module and the Y-axis detection module in the Y direction, and the X-axis detection module, the Z-axis detection module and the Y-axis detection module respectively have avoidance areas adapted to the limit stops.
[0015] In one possible implementation, the stop frame also includes a plurality of reinforced stops connected to the inner side of the frame body, the reinforced stop is arranged between two adjacent top corner stops in the Y direction, and the plurality of reinforced stops, the first stop block and the second stop block are correspondingly distributed along the X direction.
[0016] The beneficial effect of the three-axis accelerometer for vehicles provided by the present invention is that, compared with the prior art, by providing a stop frame, a first stop block, and a second stop block, the excessive displacement of the X-axis detection module, the Y-axis detection module, and the Z-axis detection module in the X and Y directions under vibration or impact can be effectively limited, reducing the mechanical vibration interference of the sensitive components, thereby improving the accelerometer's overload resistance during vehicle driving. Moreover, the provision of the stop frame, the first stop block, and the second stop block can suppress abnormal vibration of the detection module. The substrate, the cover plate, and the stop frame together enclose a housing space, providing a stable packaging environment for the detection unit, reducing the impact of external shock and vibration on the internal sensitive components, thereby extending the service life of the accelerometer. In addition, the X-axis detection module, the Z-axis detection module, and the Y-axis detection module are all arranged in the housing space. Compared with the solution of arranging a stop frame outside each detection module separately, the degree of integration is improved, which is conducive to miniaturization of the entire device. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0018] Figure 1 An internal top view of a three-axis accelerometer applied to a vehicle provided by an embodiment of the present invention;
[0019] Figure 2 A cross-sectional view of a three-axis accelerometer applied to a vehicle provided by an embodiment of the present invention;
[0020] Figure 3 This is a cross-sectional view of the Z-axis detection module used in an embodiment of the present invention when it is overloaded;
[0021] Figure 4 This is a cross-sectional view of a Z-axis detection module used in an embodiment of the present invention.
[0022] In the figure: 1. X-axis detection module; 2. Z-axis detection module; 201. Z-axis elastic beam; 202. Detection structure; 203. First detection electrode; 204. Second detection electrode; 3. Y-axis detection module; 4. Stop frame; 401. Frame body; 402. Top corner stop; 403. Limit stop; 404. Reinforcement stop; 5. First stop block; 6. Second stop block; 7. Cover plate; 8. Base plate; 9. Third stop block; 10. Detection stop block. DETAILED DESCRIPTION
[0023] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0024] In the claims, specification and the above-mentioned drawings of the present invention, unless otherwise expressly limited, the terms "first", "second" or "third" are used to distinguish different objects, rather than to describe a specific order. Unless otherwise specified, other directional words, such as "vertical", "clockwise", "counterclockwise" and the like, indicating directions or positional relationships are based on the directions and positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the specific scope of protection of the present invention. In the claims, specification and the above-mentioned drawings of the present invention, unless otherwise expressly limited, the terms "fixed connection" or "fixed connection" should be understood in a broad sense, that is, any connection method without a displacement relationship or relative rotation relationship between the two, that is, including non-detachable fixed connection, detachable fixed connection, integrated connection and fixed connection through other devices or elements. In the claims, specification and the above-mentioned drawings of the present invention, the terms "including", "having" and their variations are intended to mean "including but not limited to".
[0025] It should be noted that Figure 3 In the figure, (a) is a schematic diagram of the detection structure when there is no signal input; (b) is a schematic diagram of the deformation of the detection structure when an overload signal is input.
[0026] It should be noted that Figure 4 In the figure, (a) is a schematic diagram of the detection structure and the substrate in the prior art; (b) is a schematic diagram of adding a second detection electrode at the bottom of the detection structure when the distance between the substrate and the detection structure remains unchanged; (c) is a schematic diagram of the detection structure and the substrate when the detection distance remains unchanged.
[0027] Please also refer to Figures 1 to 4 The present invention now provides a three-axis accelerometer for use in a vehicle. The three-axis accelerometer for use in a vehicle comprises a detection unit and a stopper frame 4 surrounding the detection unit, as well as a base plate 8 disposed below the detection unit and a cover plate 7 disposed above the detection unit. The base plate 8, cover plate 7, and stopper frame 4 together form a housing for accommodating the detection unit. The detection unit comprises an X-axis detection module 1, a Z-axis detection module 2, and a Y-axis detection module 3, which are sequentially spaced along the X direction within the stopper frame 4. A first stopper 5 is disposed between the X-axis detection module 1 and the Z-axis detection module 2, and a second stopper 6 is disposed between the Z-axis detection module 2 and the Y-axis detection module 3.
[0028] Compared with the prior art, the three-axis accelerometer for vehicles provided by the present invention can effectively limit the excessive displacement of the X-axis detection module 1, the Y-axis detection module 3, and the Z-axis detection module 2 in the X and Y directions under vibration or impact by providing a stop frame 4, a first stop block 5, and a second stop block 6, thereby reducing the mechanical vibration interference of the sensitive components, thereby improving the accelerometer's overload resistance during vehicle driving. Moreover, the provision of the stop frame 4, the first stop block 5, and the second stop block 6 can suppress abnormal vibrations of the detection modules. The base plate 8, the cover plate 7, and the stop frame 4 together enclose a housing space, providing a stable packaging environment for the detection unit, reducing the impact of external shocks and vibrations on the internal sensitive components, thereby extending the service life of the accelerometer. In addition, the X-axis detection module, the Z-axis detection module, and the Y-axis detection module are all arranged in the housing space. Compared with the solution of arranging a stop frame outside each detection module separately, the degree of integration is improved, which is conducive to miniaturization of the entire device.
[0029] In some embodiments, see Figure 2 The three-axis accelerometer applied to the vehicle further includes a third stop block 9 connected to the bottom of the cover plate 7, and the third stop block 9 forms a buffer gap with the detection unit in the up and down directions.
[0030] In this embodiment, a multi-directional three-dimensional protective structure is formed by providing a stop frame 4, a first stop block 5, a second stop block 6, and a third stop block 9 connected to the bottom of the cover plate 7. This structure effectively limits excessive displacement of the X-axis, Y-axis, and Z-axis detection modules 2 in all directions. The buffer gap formed between the third stop block 9 and the detection unit in the vertical direction not only allows the detection unit to move as needed within the normal measurement range to complete Z-axis acceleration detection, but also provides buffer protection during severe vibration. This three-dimensional protective design significantly improves the impact resistance of the accelerometer during vehicle driving. By suppressing abnormal vibration of the detection module in the X, Y, and Z directions, it avoids damage to the accelerometer due to vehicle bumps, sudden acceleration, or sudden deceleration. At the same time, the provision of the third stop block 9 optimizes the mechanical limit in the vertical direction and works in synergy with the horizontal stop structure to form a complete anti-vibration protection system that does not affect the normal operation of the detection unit while effectively absorbing and dissipating impact energy.
[0031] In some embodiments, see Figure 4 The Z-axis detection module 2 includes a detection structure 202 and a first detection electrode 203 provided at the bottom of the detection structure 202, and also includes a second detection electrode 204 provided at the top of the substrate 8. The first detection electrode 203 and the second detection electrode 204 are correspondingly distributed in the upper and lower directions.
[0032] By aligning the first detection electrode 203 at the bottom of the detection structure 202 with the second detection electrode 204 at the top of the substrate 8, a highly sensitive capacitive detection structure 202 is formed. When acceleration occurs in the Z-axis direction, micro-displacements of the detection structure 202 directly alter the capacitance between the two electrodes. This symmetrical electrode arrangement significantly improves the detection accuracy and response speed of Z-axis acceleration. The corresponding arrangement of the first detection electrode 203 and the second detection electrode 204 also enhances the symmetry and stability of the structure, maintaining stable capacitance characteristics in the presence of vehicle vibration and reducing the generation of false signals.
[0033] Optionally, the distance between the detection structure 202 and the substrate 8 is h, the distance between the second detection electrode 204 and the detection gap is d, and the thickness of the first detection electrode 203 is s. Since the second detection electrode 204 is only provided on the substrate 8 in the prior art, the detection distance formed between the second detection electrode 204 and the detection structure 202 is d. In the present application, the first detection electrode 203 is provided at the bottom of the detection structure 202, so the detection distance is the distance between the first detection electrode 203 and the second detection electrode 204 (ds). Due to the reduction in the detection gap, the detection capacitance will increase accordingly, thereby improving the capacitance sensitivity. At this time, while ensuring that the detection sensitivity remains unchanged, the mechanical sensitivity can be reduced by increasing the structural stiffness. The increase in structural stiffness can enable the elastic beam to provide a greater elastic restoring torque. This change can effectively avoid the problem of adhesion failure of the structure, thereby significantly improving the reliability of the overall structure.
[0034] Optionally, the spacing between the existing detection structure 202 and the substrate 8 is h, and the distance between the second detection electrode 204 and the detection gap is d. Since the second detection electrode 204 is only provided on the substrate 8 in the prior art, the detection distance formed between the second detection electrode 204 and the detection structure 202 is d. Now, let the thickness of the first detection electrode 203 be s, the distance between the first detection electrode 203 and the second detection electrode 204 be d, and the spacing between the substrate 8 and the detection structure 202 be (h + s). From a static mechanics perspective, as the gap between the detection structure 202 and the substrate 8 increases, the surface adhesion force decreases accordingly, thereby reducing the probability of adhesion failure of the structure. From a dynamic response perspective, when subjected to Z-axis acceleration, the detection structure 202 twists and causes the distal end to contact the substrate 8. At this time, the elastic beam will generate a stronger restoring torque due to the greater deformation. This mechanism can effectively suppress the problem of structural adhesion failure and significantly improve the reliability of the system.
[0035] In some embodiments, see Figure 2The bottoms of the X-axis detection module 1, the Z-axis detection module 2 and the Y-axis detection module 3 are respectively provided with detection stop blocks 10, and the detection stop blocks 10 and the substrate 8 form a detection space in the up and down directions.
[0036] The detection space formed by the detection stop block 10 and the substrate 8 provides a limit constraint for the movement of each detection module. When the detection module is displaced by external forces such as acceleration, the detection stop block 10 prevents the detection module from excessive movement or even a hard collision with the substrate 8, effectively avoiding adhesion failure or mechanical damage to the detection structure 202 due to excessive displacement. Furthermore, the presence of the detection space ensures that the detection modules perform detection activities within a reasonable range, making the detection process more stable and reliable, improving the product's impact and overload resistance, and reducing the chance of damage to the accelerometer due to impact.
[0037] In some embodiments, see Figure 3 A plurality of detection stop blocks 10 are provided at intervals along the X direction at the bottom of the Z-axis detection module 2 , and the heights of the plurality of detection stop blocks 10 gradually decrease toward the side away from the Z-axis elastic beam 201 .
[0038] Multiple detection stop blocks 10 spaced apart along the X-axis effectively prevent excessive displacement of the detection module in the Z-direction when the Z-axis detection module is subjected to Z-direction acceleration, which could result in a collision between the Z-axis detection module 2 and the substrate 8. The design of the multiple detection stop blocks 10, whose height gradually decreases toward the side facing away from the Z-axis elastic beam, can adapt to different degrees of displacement of the detection module. When the detection module displacement is small, only the higher stop blocks first interact with the substrate 8 to provide initial position limiting. As the displacement increases, the lower stop blocks successively participate in the position limiting. This progressive position limiting method can more gently constrain the movement of the detection module, reducing the impact force generated by sudden position limiting. It can also disperse the force acting on the detection module, reducing the risk of structural damage caused by localized excessive force. In addition, this structural design ensures that the Z-axis detection module can remain within a reasonable range of motion when subjected to different accelerations through the detection space formed by the detection stop blocks 10 and the substrate 8 and the gradually changing height limit mechanism, thereby ensuring the stability of the detection process, improving detection accuracy, and effectively enhancing the reliability and service life of the Z-axis detection module.
[0039] In some embodiments, see Figure 3 The Z-axis detection module 2 includes at least one detection stop block 10 located at the distal end of the detection structure 202 , where the distal end is a side of the detection structure 202 away from the Z-axis elastic beam 201 along the X direction.
[0040] The detection stop block 10 is arranged at the distal end of the detection structure 202, which can accurately limit the torsion or displacement generated by the Z-axis detection module when subjected to Z-direction acceleration. In particular, when the distal end of the detection structure 202 is significantly deflected due to force, the distal detection stop block 10 can preferentially contact the substrate 8, forming an effective blocking effect, preventing the detection structure 202 from excessive displacement and hard collision with the substrate 8, thereby avoiding structural damage. This arrangement allows the elastic beam to maintain a more reasonable stress state during the movement of the detection structure 202, reducing the additional stress on the elastic beam due to excessive displacement of the distal end, thereby protecting the performance of the elastic beam and extending its service life. In addition, the detection space formed by the distal detection stop block 10 and the substrate 8 can ensure that the detection structure 202 is reliably limited at the distal position when subjected to acceleration, so that the motion range of the detection structure 202 is strictly controlled within a reasonable range, thereby ensuring the stability of the detection process.
[0041] In some embodiments, see Figure 1 The stop outer frame 4 includes a frame body 401 and multiple corner stops 402 connected to the frame body 401. The frame body 401 is a rectangular frame structure and is arranged around the periphery of the detection unit. The corner stops 402 are located on the inner side of the frame body 401, and the multiple corner stops 402 correspond one-to-one to the corners of the frame body 401.
[0042] The rectangular frame body 401 can form a rigid support boundary around the detection unit, and the top corner stops 402 distributed on the inner side of the top corners of the frame body 401 can limit the displacement range of the detection unit through a multi-point limit method when the detection unit is subjected to vibration or impact from different directions. When vibrations are generated during vehicle driving, causing the detection unit to displace toward the stop outer frame 4, the top corner stops 402 can first contact the edge area of the detection unit, dispersing the impact force to multiple top corner positions, avoiding the generation of single-point concentrated force between the detection unit and the stop outer frame 4, thereby reducing structural damage or deformation caused by excessive local force. At the same time, the limiting structure formed by the multiple top corner stops 402 and the frame body 401 can more accurately constrain the displacement of the detection unit in all directions within the plane, allowing the three-axis accelerometer to maintain high-precision acceleration detection in complex vehicle vibration environments, providing more reliable data support for vehicle status monitoring.
[0043] In some embodiments, see Figure 1The stop outer frame 4 also includes a plurality of limit stops 403 connected to the inner side of the frame body 401. The plurality of limit stops 403 are arranged between two adjacent vertex stops 402 in the X direction, wherein a portion of the limit stops 403 corresponds to the gap between the X-axis detection module 1 and the Z-axis detection module 2 in the Y direction, and another portion of the limit stops 403 corresponds to the gap between the Z-axis detection module 2 and the Y-axis detection module 3 in the Y direction, and the X-axis detection module 1, the Z-axis detection module 2 and the Y-axis detection module 3 respectively have avoidance areas adapted to the limit stops 403.
[0044] The addition of limit stops 403 creates denser limit points in the X-direction, forming a "multi-point surface" limit structure together with corner stops 402. When the detection unit is subjected to X- or Y-direction vibration, limit stops 403 precisely insert into the gaps between the detection modules and cooperate with the avoidance zones. Through structural interlocking, they limit the planar displacement of the detection units and prevent collisions between the detection modules due to excessive vibration. Furthermore, the placement of limit stops 403 corresponding to the gaps disperses impact forces to non-sensitive areas of the detection modules, reducing direct impacts on sensitive components. The provision of the avoidance zones ensures the buffering and limiting function of limit stops 403 while avoiding interference with the mechanical movement of the detection units during normal operation. This allows the triaxial accelerometer to effectively control the displacement of the detection units through a multi-level limit structure when subjected to complex vibrations, while also ensuring the independent motion accuracy of the detection modules, significantly improving the device's impact resistance in the dynamic vehicle environment.
[0045] In some embodiments, see Figure 1 The stop outer frame 4 also includes a plurality of reinforced stops 404 connected to the inner side of the frame body 401. The reinforced stop 404 is arranged between two adjacent top corner stops 402 in the Y direction, and the plurality of reinforced stops 404, the first stop block 5 and the second stop block 6 are correspondingly distributed along the X direction.
[0046] The provision of reinforced stops 404 creates a support structure in the Y-direction that complements the X-direction stops. Together with corner stops 402 and limit stops 403, they form a three-dimensional rigid framework. When the vehicle generates vibration or impact in the Y-direction during driving, reinforced stops 404 directly absorb and disperse the impact force, preventing the concentrated transmission of vibration energy to the detection unit. Simultaneously, the correspondingly distributed reinforced stops 404 along the X-direction, along with the first and second stop blocks, form a "well"-shaped limit support network within the detection unit's XY plane. This not only effectively limits the detection unit's displacement in all directions within the plane, but also, through structural linkage, enhances the entire stop frame 4's anti-twisting capability, reducing frame deformation caused by severe vibration.
[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A three-axis accelerometer for a vehicle, characterized in that: The detection unit comprises a detection unit and a stopper frame arranged around the periphery of the detection unit, a substrate arranged below the detection unit and a cover plate arranged above the detection unit. The substrate, the cover plate and the stopper frame together form a storage space for accommodating the detection unit. The detection unit comprises an X-axis detection module, a Z-axis detection module and a Y-axis detection module which are sequentially spaced along the X direction in the stopper frame. A first stopper block is provided between the X-axis detection module and the Z-axis detection module, and a second stopper block is provided between the Z-axis detection module and the Y-axis detection module.
2. The three-axis accelerometer for a vehicle according to claim 1, wherein: The three-axis accelerometer applied to a vehicle further includes a third stop block connected to the bottom of the cover plate, and the third stop block and the detection unit form a buffer gap in the up and down directions.
3. The three-axis accelerometer for a vehicle according to claim 1, wherein: The Z-axis detection module includes a detection structure and a first detection electrode arranged at the bottom of the detection structure, and also includes a second detection electrode arranged at the top of the substrate. The first detection electrode and the second detection electrode are correspondingly distributed in the upper and lower directions.
4. The three-axis accelerometer for a vehicle according to claim 3, wherein: The bottoms of the X-axis detection module, the Z-axis detection module, and the Y-axis detection module are respectively provided with detection stop blocks, and the detection stop blocks and the substrate form a detection space in the upper and lower directions.
5. The three-axis accelerometer for a vehicle according to claim 4, wherein: A plurality of detection stop blocks are provided at intervals along the X direction at the bottom of the Z-axis detection module, and the heights of the plurality of detection stop blocks gradually decrease toward the side away from the Z-axis elastic beam.
6. The three-axis accelerometer for a vehicle according to claim 5, wherein: The Z-axis detection module includes at least one detection stop block located at the distal end of the detection structure, and the distal end is a side of the detection structure away from the Z-axis elastic beam along the X direction.
7. The three-axis accelerometer for a vehicle according to claim 1, wherein: The stop outer frame includes a frame body and a plurality of top corner stops connected to the frame body. The frame body is a rectangular frame structure and is arranged around the periphery of the detection unit. The top corner stops are located on the inner side of the frame body, and the plurality of top corner stops correspond one-to-one to the top corners of the frame body.
8. The three-axis accelerometer for a vehicle according to claim 7, wherein: The stop outer frame also includes a plurality of limit stops connected to the inner side of the frame body, and the plurality of limit stops are arranged between two adjacent top corner stops in the X direction, wherein a part of the limit stops corresponds to the gap between the X-axis detection module and the Z-axis detection module in the Y direction, and another part of the limit stops corresponds to the gap between the Z-axis detection module and the Y-axis detection module in the Y direction, and the X-axis detection module, the Z-axis detection module and the Y-axis detection module respectively have avoidance areas adapted to the limit stops.
9. The three-axis accelerometer for a vehicle according to claim 8, wherein: The stop outer frame also includes a plurality of reinforced stops connected to the inner side of the frame body, the reinforced stops are arranged between two adjacent top corner stops in the Y direction, and the plurality of reinforced stops, the first stop block and the second stop block are correspondingly distributed along the X direction.
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