Two-dimensional large-angle fast reflecting mirror device based on rigid support

Abstract

The invention relates to the technical field of fast reflecting mirrors, in particular to a two-dimensional large-angle fast reflecting mirror device based on rigid support, which comprises a moving magnet type electromagnetic driving assembly and an eddy current sensor assembly which are arranged on the periphery of the central position in a base; the moving magnet type electromagnetic driving assembly drives the rigid supporting assembly to drive the reflector lens to deflect within a set angle, and the eddy current sensor assembly is used for detecting the deflection angle of the reflector lens. The rigid supporting assembly comprises a mirror holder, a supporting frame, a supporting long shaft and a supporting short shaft; the reflecting mirror lens is connected with the mirror holder, the mirror holder is arranged in the supporting frame through the supporting long shaft, and the supporting frame is connected with the base through the supporting short shaft; the mirror holder rotates in the first direction through the supporting long shaft and rotates in the second direction through the supporting short shaft. According to the invention, the rigid supporting assembly is driven by the moving magnet type electromagnetic driving assembly, so that the reflector lens deflects in two orthogonal directions around the supporting long axis and the supporting short axis, the limitation that the deflection angle of the existing reflector system is small is broken through, and two-dimensional large-angle and high-precision light beam deflection can be realized.

Description

Technical Field

[0001] The invention relates to the technical field of fast reflection mirrors, and in particular to a two-dimensional large-angle fast reflection mirror device based on rigid support. Background Art

[0002] Mirror deflection devices are key components in modern optical systems, widely used in fields such as LiDAR, target tracking, image stabilization, space communications, and beam scanning. Traditional mirror drive methods, including piezoelectric ceramic actuators, micromotors, and voice coil motors, achieve rapid mirror deflection control to a certain extent, but still have significant deficiencies in key performance parameters.

[0003] Among them, the excessively small deflection angle is one of the main technical bottlenecks of existing technologies. Due to the limitations of travel or mechanical design, the deflection angle of the mirror of common piezoelectric or micro-motor drive structures is usually only a few milliradians to tens of milliradians, which is difficult to meet the application requirements of large-scale scanning or large-angle optical path control. In addition, in terms of achieving two-dimensional deflection, existing systems usually achieve two-dimensional rotation by superimposing two sets of independent single-axis drive structures or flexible hinge mechanisms. However, such structures have problems such as low system resonance frequency, poor motion stability, and complex control.

[0004] On the other hand, moving-magnet electromagnetic drive technology, with its advantages of fast response, compact structure, and ease of control, shows promising application prospects in small precision optical-mechanical systems. However, current moving-magnet drive structures used in reflector devices are mostly focused on single-axis deflection. When achieving large-angle two-dimensional deflection, they still face technical challenges such as unstable support structures, low deflection accuracy, large hysteresis, and lags in sensor detection methods. In particular, achieving large-angle, continuous, and controllable two-dimensional deflection lacks a complete solution that combines structural optimization, precise response, and closed-loop detection. Summary of the Invention

[0005] (1) Purpose of the invention

[0006] The purpose of the present invention is to provide an over-moving magnetic electromagnetic drive component to drive a rigid support component, so that the reflector lens is deflected in two orthogonal directions around the support long axis and the support short axis respectively, breaking through the limitation of the small deflection angle of the existing reflector system, and realizing a two-dimensional large-angle, high-precision light beam deflection based on a rigid support two-dimensional large-angle fast reflector device.

[0007] (2) Technical solution

[0008] To solve the above problems, the present invention provides a two-dimensional large-angle fast reflector device based on rigid support, comprising:

[0009] Reflector lens, rigid support assembly, moving magnet electromagnetic drive assembly, eddy current sensor assembly and base;

[0010] The reflector lens is connected to the base via a rigid support assembly;

[0011] The reflector lens, the rigid support assembly and the base are coaxially connected in sequence;

[0012] The dynamic magnetic electromagnetic drive assembly and the eddy current sensor assembly are arranged around the center position inside the base; the dynamic magnetic electromagnetic drive assembly drives the rigid support assembly to drive the reflector lens to deflect within a set angle, and the eddy current sensor assembly is used to detect the deflection angle of the reflector lens;

[0013] The rigid support assembly includes a mirror holder, a support frame, a support long axis and a support short axis;

[0014] The reflector lens is connected to the mirror holder, the mirror holder is arranged in the support frame through the support long axis, and the support frame is connected to the base through the support short axis;

[0015] The mirror holder rotates in a first direction via the supporting long axis and rotates in a second direction via the supporting short axis.

[0016] In another aspect of the present invention, preferably, the center lines of the mirror holder, the supporting long axis and the supporting frame coincide with each other, the supporting frame is provided with a pair of first through holes at both ends along the first center line, and the supporting long axis passes through the pair of first through holes to rotatably connect the mirror holder and the supporting frame.

[0017] In another aspect of the present invention, preferably, the supporting short shafts are provided in a pair, the supporting frame is provided with a pair of second through holes at both ends along the second center line, and the pair of supporting short shafts are respectively provided in the pair of second through holes;

[0018] The outer periphery of the supporting short shaft is sequentially sleeved with a spacer ring, a miniature deep groove ball bearing and a wave spring. The miniature deep groove ball bearing is used to provide low-friction support when the supporting frame rotates relative to the base in the second direction, and the wave spring is used to apply axial preload to the miniature deep groove ball bearing.

[0019] In another aspect of the present invention, preferably, the eddy current sensor assembly includes an eddy current circuit board and at least two pairs of eddy current sensor probes; the eddy current sensor probes include a multilayer coil, and the multilayer coil is arranged on the eddy current circuit board by printing, and each pair of the eddy current sensor probes are symmetrically arranged on the eddy current circuit board.

[0020] In another aspect of the present invention, preferably, the base includes a base body, a base circuit board and a base bottom cover, wherein the base circuit board is arranged at an end of the base body away from the reflector lens; the base bottom cover seals the base circuit board; and the eddy current circuit board is arranged at an end of the base body close to the reflector lens.

[0021] The eddy current circuit board includes a welding pin, and the base body is provided with a welding pin through hole. The welding pin and the welding pin through hole are adapted to each other, and the eddy current circuit board is connected to the base circuit board through the welding pin and the welding pin through hole.

[0022] In another aspect of the present invention, preferably, a limit block is further included, and the limit block presses the eddy current circuit board and the base body tightly.

[0023] In another aspect of the present invention, preferably, the moving magnet type electromagnetic drive assembly comprises two pairs of permanent magnets and two pairs of drive coils, and the drive coils and permanent magnets are symmetrically arranged in pairs around the central axis of the reflector lens;

[0024] The two pairs of driving coils are respectively vertically embedded in the mounting grooves on the base body, and the permanent magnets are arranged inside the driving coils in a one-to-one correspondence.

[0025] In another aspect of the present invention, preferably, the end of the permanent magnet away from the reflector lens is configured as a conical structure, or as a structure combining a conical shape and an arc shape.

[0026] In another aspect of the present invention, preferably, a connecting piece is further included, and one end of the permanent magnet close to the reflector lens is connected to the mirror holder through the connecting piece.

[0027] In another aspect of the present invention, preferably, a connecting slot is provided at the bottom of the mirror holder, the position and number of the connecting slot correspond to the connecting piece, and the dynamic magnetic electromagnetic drive component is fixedly connected to the mirror holder through the connecting piece and the connecting slot.

[0028] (3) Beneficial effects

[0029] The above technical solution of the present invention has the following beneficial technical effects:

[0030] The present invention uses a dynamic magnetic electromagnetic drive assembly to drive a rigid support assembly, causing the reflector lens to deflect in two orthogonal directions around the support's major and minor axes, respectively. This overcomes the narrow deflection angle limitations of existing reflector systems and enables high-precision, two-dimensional beam deflection at large angles, meeting the application requirements of wide-range scanning and pointing control. The rigid support assembly, comprising a mirror holder, a support frame, a major and minor support axis, utilizes a rigid shaft connection and embedded fit. The overall structural design is compact, with minimal motion clearance and high support rigidity. This improves the stability and response consistency of the reflector during dynamic deflection, while avoiding the nonlinearity and hysteresis issues inherent in flexible mechanisms. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention;

[0032] Figure 2 is a cross-sectional view of the overall structure of an embodiment of the present invention;

[0033] Figure 3 is a bottom view of a rigid support assembly according to one embodiment of the present invention;

[0034] Figure 4 is a schematic diagram of an eddy current sensor assembly according to an embodiment of the present invention;

[0035] Figure 5 is a schematic diagram of a permanent magnet according to an embodiment of the present invention;

[0036] Figure 6 is a cross-sectional view of a base according to an embodiment of the present invention;

[0037] Figure 7 This is a block diagram of input and output relationships of an embodiment of the present invention;

[0038] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet type electromagnetic drive assembly according to one embodiment of the present invention;

[0039] Figure 9 It is a schematic diagram of signal output of an eddy current sensor assembly according to an embodiment of the present invention.

[0040] Reference numerals:

[0041] 1: Reflector lens,

[0042] 2: Rigid support assembly, 210: Mirror support, 220: Support frame, 230: Support long axis, 240: Support short axis,

[0043] 3: Moving magnetic electromagnetic drive assembly, 310: Permanent magnet, 320: Drive coil,

[0044] 4: Eddy current sensor assembly, 410: Eddy current circuit board, 411: welding pin, 420: Eddy current sensor probe,

[0045] 5: base, 510: base body, 520: base circuit board, 530: base bottom cover,

[0046] 6: Limit block, 7: Connecting piece, 8: Motor wire, 9: Communication cable. DETAILED DESCRIPTION

[0047] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present invention.

[0048] The accompanying drawings illustrate schematic diagrams of structures according to embodiments of the present invention. These figures are not drawn to scale; for clarity, some details are exaggerated and some details may be omitted. The shapes of the various regions and layers shown in the figures, as well as their relative sizes and positions, are merely exemplary and may deviate in practice due to manufacturing tolerances or technical limitations. Those skilled in the art may design regions / layers with different shapes, sizes, and relative positions as needed.

[0049] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0050] In the description of the present invention, it should be noted that the terms “first” and “second” are only used for descriptive purposes and should not be understood as indicating or implying relative importance.

[0051] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, identical elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0053] Example 1

[0054] A two-dimensional large-angle fast reflector device based on rigid support, Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention; Figure 2FIG. 1 is a cross-sectional view of the overall structure of an embodiment of the present invention; FIG. Figure 1 and Figure 2 Shown, including:

[0055] Reflector lens 1, rigid support assembly 2, dynamic magnetic electromagnetic drive assembly 3, eddy current sensor assembly 4 and base 5; the reflector lens 1 is an optical element used to reflect external incident laser or visible light beams, and is the core execution unit for realizing rapid spatial light beam control. The lens is usually made of metal-coated materials with high reflectivity to improve reflection efficiency and reduce light loss; in this embodiment, the diameter of the reflector lens 1 is 40mm±0.05mm. The thickness of the lens can be selected from 1.8mm, 2mm, 2.2mm, etc., and the typical thickness is 1.8mm±0.05mm. The lens base material can be any reflector material such as fused quartz, K9, aluminum, etc. In this embodiment, fused quartz is used, and the mirror surface of the reflector lens 1 is coated with a silver film. The base 5 serves as the fixed support part of the device, providing a stable installation foundation for the remaining components.

[0056] The reflector lens 1 is connected to the base 5 via a rigid support component 2 ; the rigid support component 2 is used to connect the reflector lens 1 and the base 5 , and is used to carry the reflector lens 1 and transmit the driving force of the moving magnet electromagnetic drive component 3 .

[0057] The reflector lens 1, the rigid support assembly 2 and the base 5 are coaxially connected in sequence;

[0058] The dynamic magnetic electromagnetic drive assembly 3 and the eddy current sensor assembly 4 are arranged around the center position of the base 5; the dynamic magnetic electromagnetic drive assembly 3 drives the rigid support assembly 2 to drive the reflector lens 1 to deflect within a set angle, and the eddy current sensor assembly 4 is used to detect the deflection angle of the reflector lens 1;

[0059] Figure 3 FIG. 1 is a bottom view of a rigid support assembly according to an embodiment of the present invention. Figure 3 As shown, the rigid support assembly 2 includes a mirror holder 210, a support frame 220, a support long axis 230 and a support short axis 240; the rigid support assembly 2 adopts a dual-axis structure design to achieve two-dimensional deflection control of the reflector lens in space, corresponding to free rotation in two orthogonal directions.

[0060] The reflector lens 1 is connected to the mirror holder 210, which is disposed within the support frame 220 via the support long axis 230. The support frame 220 is connected to the base 8 via the support short axis 240. The mirror holder 210 rotates in a first direction via the support long axis 230 and in a second direction via the support short axis 240. Furthermore, in this embodiment, the first direction and the second direction are orthogonal.

[0061] Furthermore, in this embodiment, the centerlines of the mirror holder 210, the supporting shaft 230, and the supporting frame 220 coincide. The supporting frame 220 is provided with a pair of first through-holes at either end along the first centerline. The supporting shaft 230 extends through the pair of first through-holes, rotatably connecting the mirror holder 210 to the supporting frame 220. The mirror holder 210 is a supporting component for mounting the reflector lens 1. Its plate-like structure offers excellent flatness and rigidity, ensuring stable mounting and uniform force distribution for the reflector lens. The mirror holder 210 is mounted within the supporting frame 220 via the supporting shaft 230, creating a first degree of rotational freedom. The supporting shaft 230 serves as a rotating shaft connecting the mirror holder and the supporting frame, with its axis defined as the first centerline, corresponding to the rotation of the reflector lens in the first direction. The two ends of the supporting shaft 230 extend through the pair of first through-holes in the supporting frame 220, forming a symmetrical rotational connection. During use, the mirror holder 210 can precisely rotate about the supporting shaft 230, thereby driving the lens to achieve angular control in the first direction.

[0062] The supporting short shafts 240 are provided as a pair, and the supporting frame 220 is provided with a pair of second through holes at both ends along the second center line, and the pair of supporting short shafts 240 are respectively provided in the pair of second through holes;

[0063] The outer circumference of the support short shaft 240 is sequentially sheathed with a spacer ring, a miniature deep groove ball bearing, and a wave spring. The miniature deep groove ball bearing is used to provide low-friction support when the support frame 220 rotates in the second direction relative to the base 5, and the wave spring is used to apply an axial preload to the miniature deep groove ball bearing. The support frame 220 is the skeletal structure of the entire rigid support assembly, used to support the mirror holder 210 and form a second degree of freedom connection with the base 5. The support frame 220 has high overall strength and bending rigidity, ensuring the stability of the reflector during dynamic motion. A pair of second through holes are provided at its ends along the second centerline for the support short shaft 240 to pass through. The support short shaft 240 is a pair, symmetrically arranged on both sides, with their axes defined as the second centerline, which is orthogonal to the first centerline. Through the support short shaft 240, the support frame 220 can be rotated about the second direction relative to the base 5, thereby forming a cross-biaxial rotation mechanism. To ensure smooth and precise rotation, the outer circumference of the support short shaft 240 is sequentially sheathed with a spacer ring, a miniature deep groove ball bearing, and a wave spring. Miniature deep groove ball bearings are the core rotating support element of this structure. They offer advantages such as compact structure, low rotational resistance, and stable operation, making them suitable for applications involving small rotation angles and high-frequency motion. These bearings effectively reduce frictional losses when the support frame 220 rotates relative to the base 5 in the second direction, improving angle control accuracy and response speed.

[0064] To prevent loosening and vibration during long-term operation, a wave spring is installed on one side of the bearing, applying a constant axial preload to it, providing both compression and vibration reduction. Wave springs are elastic elements with excellent compression characteristics and return capacity, helping to maintain the stability and longevity of the bearing system.

[0065] The structure of the rigid support assembly 2 enables high-precision rotational motion of the reflector lens in two orthogonal directions. Through the optimal coordination of bearings and springs, it effectively improves the mechanical stability, rotational sensitivity, and long-term reliability of the overall system. Furthermore, the centerlines of the mirror holder, support shaft, and support frame are designed to coincide, further enhancing the assembly's symmetry and balance, reducing eccentric torque and avoiding nonlinear errors and mechanical coupling interference during lens rotation.

[0066] in, Figure 4 FIG. 1 is a schematic diagram of an eddy current sensor assembly according to an embodiment of the present invention. Figure 4As shown, the base 5 includes a base body 510, a base circuit board 520, and a base bottom cover 530. The eddy current sensor assembly 4 includes an eddy current circuit board 410 and at least two pairs of eddy current sensor probes 420. The eddy current sensor probes 420 include multi-layer coils, which are printed on the eddy current circuit board 410, and each pair of eddy current sensor probes 420 are symmetrically arranged on the eddy current circuit board 410. The eddy current sensor assembly 4 in this embodiment is arranged inside the base 5 and is mainly used to monitor the deflection angle of the reflector lens in real time, thereby achieving closed-loop control and precise adjustment of the reflection system. The eddy current sensor probes 420 are used to detect the deflection angle of the reflector assembly 1. The eddy current circuit board 410 serves as the carrier for the eddy current sensor assembly 4, carrying and connecting each eddy current sensor probe 420. The eddy current sensor probe 420 is a component for non-contact angular displacement detection. Its structure utilizes multiple layers of micro-coils, integrated onto the surface of the eddy current circuit board 410 using a precision printed circuit process. Compared to traditional mechanical sensors, it offers a simpler design, lower costs, and improved consistency, making it particularly suitable for applications involving high-frequency vibration and rapid scanning. Each pair of eddy current sensor probes 420 are symmetrically arranged on the eddy current circuit board 410. In this embodiment, two pairs of probes are arranged vertically in a cross-shaped pattern, respectively, to sense angular changes in the reflector assembly in two orthogonal directions. Each pair of eddy current sensor probes 420 are symmetrically arranged on the circuit board 410, located at corresponding locations outside the mirror holder 210 or support frame 220. This symmetrical arrangement allows for differential measurement, improving the detection's anti-interference capability and stability. It also enables multi-axis measurement of two-dimensional angles, monitoring the deflection of the mirror lens along two orthogonal rotational axes. A small gap is maintained between the eddy current sensor probe 420 and the mirror support. The gap will change during the deflection movement of the reflector, which will cause the electromagnetic parameters sensed by the probe to change. The eddy current circuit board calculates the small changes in voltage, inductance or impedance, and ultimately outputs a displacement or angle signal that is proportional to the angle change. The four eddy current sensor probes 420 can measure the four azimuth deflections of the reflector assembly, and the eddy current sensor probes 420 maintain a preset distance from the center position of the mirror support. Furthermore, the number of sensors is not limited here, and the number of sensors can be increased on this basis as long as the deflection of the reflector assembly can be measured and fed back.

[0067] The moving-magnet electromagnetic drive assembly 3 comprises two pairs of permanent magnets 310 and two pairs of drive coils 320, symmetrically arranged around the central axis of the reflector lens 1. The interaction between the magnetic field and the current generates a driving torque, enabling highly responsive angular adjustment of the reflector lens within space. This structure not only simplifies the complex mechanical structure of traditional rotating motors but also offers significant advantages such as fast response, high control accuracy, and a compact structure.

[0068] The two pairs of drive coils 320 are respectively vertically embedded in the mounting grooves on the base body 510 and bonded to the side walls of the mounting grooves of the base body 510 by injecting epoxy resin. The permanent magnets 310 are arranged one-to-one inside the drive coils 320. The symmetrical layout design can effectively balance the magnetic force distribution of the system, reduce system jitter and structural offset caused by uneven torque, and improve drive stability and deflection symmetry. The two pairs of drive coils 320 are respectively embedded in the preset mounting grooves of the base body 510 in the vertical direction for easy installation. Each permanent magnet 310 is arranged one-to-one inside its own drive coil 320, so that when a control current is passed through the drive coil 320, a spatially varying magnetic field can be generated around the permanent magnet, which interacts with the inherent magnetic field of the permanent magnet, thereby generating an electromagnetic force or torque acting on the reflector support structure. This torque is transmitted to the reflector lens through the rigid support assembly, realizing the deflection movement of the lens in a predetermined direction. By controlling the current size and the power-on sequence, the deflection angle and direction of the reflector can be precisely controlled to meet the application requirements of two-dimensional large-angle control. The permanent magnet 310 and the drive coil 320 are arranged in a one-to-one correspondence in the coil cavity, which is the response body of the electromagnetic force. Its material is a magnetic material such as aluminum nickel cobalt, iron chromium cobalt, ferrite, samarium cobalt, and neodymium iron boron. Preferably, neodymium iron boron is used as the permanent magnet material in this embodiment to ensure high remanence, high coercive force and stable magnetic properties. The material of the drive coil 320 can be, but is not limited to, conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, copper enameled wire is used as the coil material in this embodiment.

[0069] Figure 5 Schematic diagram of a permanent magnet according to an embodiment of the present invention. Figure 5 As shown, the end of the permanent magnet 310 away from the reflector lens 1 is set to a conical structure, or a structure combining a cone and an arc. Compared with traditional cylindrical or square column permanent magnets, the conical structure reduces the bottom volume while ensuring the magnetic properties, making the entire dynamic magnetic assembly more compact and providing a larger operating space. The nearly conical magnet gives the magnet a large amount of movement space, which can prevent the collision between the magnet and the coil due to excessive deflection angle when the fast reflector is deflected at a large angle. The vertically placed coil can reduce the difficulty of assembly and reduce costs.

[0070] Figure 6: is a cross-sectional view of a base according to an embodiment of the present invention, Figure 6 As shown, the base circuit board 520 is disposed at the end of the base body 510 away from the reflector lens 1; the base bottom cover 530 seals the base circuit board 520; the eddy current circuit board 410 is disposed at the end of the base body 510 close to the reflector lens 1; the base circuit board 520 is mounted to the bottom of the base body via screws, slots, or guide rails, and is sealed and encapsulated by the base bottom cover 530 below to achieve structural protection, dustproofing, moisture-proofing, and electromagnetic shielding. The bottom cover can be made of metal or high-strength plastic, and a silicone gasket is provided in the sealing area to improve environmental adaptability.

[0071] The eddy current circuit board 410 includes solder pins 411. The base body 510 is provided with solder pin holes. The solder pins 411 and solder pin holes match each other, and the eddy current circuit board 410 is connected to the base circuit board 520 via the solder pins 411 and solder pin holes. The eddy current circuit board 410 is located at the end of the base body 510 near the reflector lens 1. This circuit board integrates multiple eddy current sensor probes 420 for non-contact, real-time monitoring of the lens's deflection angle and transmits the signal acquisition results to the base circuit board 520 below for processing. Signal transmission on the eddy current circuit board 410 is achieved via solder pins 411 provided on its surface. The base body 510 is provided with solder pin holes at corresponding locations for plug-in vertical connection between the eddy current circuit board 410 and the base circuit board 520. The solder pins 411 pass through these solder pin holes and insert into corresponding sockets on the base circuit board 520 below, thereby achieving circuit connectivity. It avoids problems such as poor contact and easy breakage that may occur in traditional cable connection methods, improves connection reliability and vibration resistance, and is especially suitable for use scenarios under long-term operation and high-frequency vibration conditions.

[0072] It also includes a limit block 6, which presses the eddy current circuit board 410 against the base body 510. In order to ensure that the eddy current circuit board 410 is firmly fixed inside the base body 510 and does not shift, a limit block 6 is also provided. The limit block 6 is made of hard material, such as POM, aluminum alloy or stainless steel, and its structure can be L-shaped, wedge-shaped or groove-shaped, and precisely matched according to the shape of the inner cavity of the base body. The limit block 6 is installed between the eddy current circuit board 410 and the base body 510 during the assembly process, and the circuit board is firmly pressed to the preset mounting surface by mechanical limiting, preventing it from loosening, offsetting or unstable connection caused by vibration during operation. Through the layered circuit system, vertical plug-in electrical connection scheme and limit structure design, compact integration, stable connection and reliable support of various functional modules are achieved.

[0073] Furthermore, this embodiment further includes a connecting piece 7. The end of the permanent magnet 310 near the reflector lens 1 is connected to the mirror holder 210 via the connecting piece 7. The mirror holder 210 is provided with connecting slots at its bottom, the position and number of which correspond to the connecting piece 7. The dynamic magnet electromagnetic drive assembly 3 is fixedly connected to the mirror holder 210 via the connecting piece 7 and the connecting slots. The end of the permanent magnet 310 near the reflector lens 1 is connected to the mirror holder 210 via the connecting piece 7, enabling rigid force transmission from the magnetic force generating component to the mirror support component. The connecting piece 7 serves as an intermediate connecting member, with one end fixedly connected to the permanent magnet 310 and the other end inserted or embedded in the connecting slot at the bottom of the mirror holder 210, forming a stable mechanical connection. During the driving process, the electromagnetic force is effectively transmitted to the mirror holder, thereby driving the reflector lens to achieve precise angular deflection. The number and position of the connecting slots correspond one-to-one with the arrangement of the connecting piece 7, ensuring that the connecting piece is precisely positioned and obtains sufficient clamping force after insertion. By adding a connecting piece between the permanent magnet and the mirror holder and setting a matching connecting slot at the bottom of the mirror holder, a high-strength, assemblable, and easy-to-maintain rigid connection is achieved between the moving magnet electromagnetic drive component and the core supporting structure of the reflector.

[0074] Figure 7 FIG. 1 shows an input-output relationship block diagram of an embodiment of the present invention, as shown in FIG. Figure 7 As shown,

[0075] The host computer outputs control instructions to the moving magnet electromagnetic drive component 3 through the motor line 8, the eddy current sensor probe 420 detects the deflection signal and transmits it to the base circuit board 520, and the base circuit board 520 generates an analog signal and transmits it to the host computer through the communication cable for closed-loop control.

[0076] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet type electromagnetic drive assembly according to one embodiment of the present invention; Figure 9 FIG. 1 is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention. Figure 8 and Figure 9 As shown, it also includes a motor line 8, the two ends of which connect the moving magnet electromagnetic drive assembly 3 and the host computer. The motor line 8 includes four groups of control cables, each group including a positive line and a negative line. The moving magnet electromagnetic drive assembly 3 is controlled by the host computer. The motor line includes four groups of cables: X red line, X black line, Y red line, and Y black line, which control the X+, X-, Y+, and Y- direction coils respectively. Each group of cables contains two positive and negative cables, and a total of eight cables are assembled with the DLL-5557-8Y connector to control the voice coil motor. The DLL-5557-8Y connector has eight interfaces, with two interfaces in a group and four groups distributed vertically. Each group of interfaces corresponds to a group of cables, connected from left to right to the X red line, X black line, Y red line, and Y black line respectively.

[0077] The sensor assembly integrates the measured fast-reflector rotation angle information into the FH62S-10S-0.5SH connector via a circuit board. Communication cable 9 connects to the connector, providing direct feedback of this angle information to the user as an analog signal. The FH62S-10S-0.5SH connector has ten ports: ports 1, 3, 5, and 8 are grounded; ports 2 and 4 are connected to -5.5V and +5.5V, respectively; and ports 6, 7, 9, and 10 output ADY-, ADY+, ADX-, and ADX+ signals, respectively.

[0078] The present invention uses a dynamic magnetic electromagnetic drive assembly to drive a rigid support assembly, causing the reflector lens to deflect in two orthogonal directions around the support's major and minor axes, respectively. This overcomes the narrow deflection angle limitations of existing reflector systems and enables high-precision, two-dimensional beam deflection at large angles, meeting the application requirements of wide-range scanning and pointing control. The rigid support assembly, comprising a mirror holder, a support frame, a major and minor support axis, utilizes a rigid shaft connection and embedded fit. The overall structural design is compact, with minimal motion clearance and high support rigidity. This improves the stability and response consistency of the reflector during dynamic deflection, while avoiding the nonlinearity and hysteresis issues inherent in flexible mechanisms.

[0079] It should be understood that the above-described specific embodiments of the present invention are merely illustrative or illustrative of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention should be included within the scope of protection of the present invention. In addition, the appended claims are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.

[0080] While the above description does not provide detailed technical details regarding patterning and etching of each layer, those skilled in the art will appreciate that various conventional methods can be used to form layers, regions, and the like in desired shapes. Furthermore, those skilled in the art may devise methods that differ from those described above to achieve the same structure.

[0081] The present invention has been described above with reference to the embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Those skilled in the art may make various substitutions and modifications without departing from the scope of the present invention, and such substitutions and modifications are intended to fall within the scope of the present invention.

[0082] Although the embodiments of the present invention have been described in detail, it should be understood that the various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention.

[0083] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A two-dimensional large-angle fast reflector device based on rigid support, characterized in that: include: Reflector lens (1), rigid support assembly (2), dynamic magnetic electromagnetic drive assembly (3), eddy current sensor assembly (4) and base (5); The reflector lens (1) is connected to the base (5) via a rigid support assembly (2); The reflector lens (1), the rigid support assembly (2) and the base (5) are coaxially connected in sequence; The dynamic magnetic electromagnetic drive component (3) and the eddy current sensor component (4) are arranged around the center position inside the base (5); the dynamic magnetic electromagnetic drive component (3) drives the rigid support component (2) to drive the reflector lens (1) to deflect within a set angle, and the eddy current sensor component (4) is used to detect the deflection angle of the reflector lens (1); The rigid support assembly (2) comprises a mirror holder (210), a support frame (220), a support long axis (230) and a support short axis (240); The reflector lens (1) is connected to the mirror holder (210), the mirror holder (210) is arranged in the support frame (220) via the support long axis (230), and the support frame (220) is connected to the base (8) via the support short axis (240); The mirror holder (210) rotates in a first direction via the supporting long axis (230) and rotates in a second direction via the supporting short axis (240).

2. The two-dimensional large-angle fast reflection mirror device based on rigid support according to claim 1, characterized in that: The center lines of the mirror holder (210), the supporting long axis (230) and the supporting frame (220) coincide with each other; the supporting frame (220) is provided with a pair of first through holes at both ends along the first center line; the supporting long axis (230) passes through the pair of first through holes to rotatably connect the mirror holder (210) and the supporting frame (220).

3. The two-dimensional large-angle fast reflection mirror device based on rigid support according to claim 1, characterized in that: The supporting short shafts (240) are provided in a pair, the supporting frame (220) is provided with a pair of second through holes at both ends along the second center line, and the pair of supporting short shafts (240) are respectively provided in the pair of second through holes; The outer periphery of the supporting short shaft (240) is sequentially sleeved with a spacer ring, a miniature deep groove ball bearing and a wave spring, the miniature deep groove ball bearing is used to provide low-friction support when the supporting frame (220) rotates relative to the base (5) in the second direction, and the wave spring is used to apply an axial preload force to the miniature deep groove ball bearing.

4. The two-dimensional large-angle fast reflection mirror device based on rigid support according to claim 1, characterized in that: The eddy current sensor assembly (4) comprises an eddy current circuit board (410) and at least two pairs of eddy current sensor probes (420); the eddy current sensor probes (420) comprise multi-layer coils, the multi-layer coils are arranged on the eddy current circuit board (410) by printing, and each pair of eddy current sensor probes (420) are symmetrically arranged on the eddy current circuit board (410).

5. The two-dimensional large-angle rapid reflection mirror device based on rigid support according to claim 4, characterized in that: The base (5) comprises a base body (510), a base circuit board (520) and a base bottom cover (530), wherein the base circuit board (520) is arranged at an end of the base body (510) away from the reflector lens (1); the base bottom cover (530) seals the base circuit board (520); and the eddy current circuit board (410) is arranged at an end of the base body (510) close to the reflector lens (1). The eddy current circuit board (410) includes a welding pin (411), a welding pin through hole is provided on the base body (510), the welding pin (411) and the welding pin through hole are adapted to each other, and the eddy current circuit board (410) is connected to the base circuit board (520) via the welding pin (411) and the welding pin through hole.

6. The two-dimensional large-angle rapid reflection mirror device based on rigid support according to claim 4, characterized in that: It also includes a limiting block (6), which presses the eddy current circuit board (410) and the base body (510) tightly together.

7. The two-dimensional large-angle rapid reflection mirror device based on rigid support according to claim 4, characterized in that: The dynamic magnetic electromagnetic drive assembly (3) comprises two pairs of permanent magnets (310) and two pairs of drive coils (320), wherein the drive coils (320) and the permanent magnets (310) are symmetrically arranged in pairs around the central axis of the reflector lens (1); The two pairs of driving coils (320) are respectively vertically embedded in the mounting grooves on the base body (510), and the permanent magnets (310) are arranged inside the driving coils (320) in a one-to-one correspondence.

8. The rigid support-based two-dimensional large-angle rapid reflection mirror device according to claim 7, characterized in that: The end of the permanent magnet (310) away from the reflector lens (1) is configured as a conical structure, or as a structure combining a conical shape and an arc shape.

9. The rigid support-based two-dimensional large-angle rapid reflection mirror device according to claim 7, characterized in that: It also includes a connecting piece (7), and one end of the permanent magnet (310) close to the reflector lens (1) is connected to the mirror holder (210) through the connecting piece (7).

10. The rigid support-based two-dimensional large-angle rapid reflection mirror device according to claim 9, characterized in that: The bottom of the mirror holder (210) is provided with connection slots, the positions and number of the connection slots correspond to the connection pieces (7), and the dynamic magnetic electromagnetic drive assembly (3) is fixedly connected to the mirror holder (210) via the connection pieces (7) and the connection slots.

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