Sample sealing and transferring device and method

Abstract

The embodiment of the invention discloses a sample sealing and transferring device and method which are applied to a scanning electron microscope, and the sealing and transferring device comprises a sealing and transferring cavity, a sealing assembly and a sample transferring assembly, a first window and a second window are formed in the surface of the first side of the sealed transfer cavity, and a material opening is formed in the surface of the second side; the first side and the second side are oppositely arranged; the sealing assembly comprises a first lifting assembly and a sealing piece. The sealing piece is arranged at one end of the first lifting assembly and arranged in the sealed transfer cavity. The first lifting assembly is movably connected with the sealed transfer cavity through the first window and used for driving the sealing piece to move in the sealed transfer cavity so as to seal or open the material opening. The sample transfer assembly is movably connected with the sealed transfer cavity through the second window and is used for driving the to-be-tested sample to enter and exit from the sealed transfer cavity through the material opening. The device has the advantages of simple structure, convenience in operation, good sealing effect, low cost and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of sample transfer devices, and in particular to a sample sealing transfer device and method. Background Art

[0002] Scanning electron microscopy (SEM) can characterize the microscopic morphology, structure, and characteristics of material samples, making it a crucial tool for studying the microstructure of all-solid-state battery materials. Some materials under investigation (such as sulfide solid electrolytes) are sensitive to water and oxygen in the air and are prone to chemical reactions. Therefore, when analyzing and observing these materials using SEM, the samples must be isolated from air to prevent chemical reactions that could alter their morphology.

[0003] However, existing sample transfer devices compatible with scanning electron microscopes have some shortcomings. For example, the material port sealing mechanism is relatively complex, the pull rod rotation mechanism is easily deformed, and the material port seal is press-type rather than embedded. These can easily lead to seal failure, causing the sample to come into contact with air and undergo chemical reactions.

[0004] Therefore, there is an urgent need for a sample sealing and transferring device with good sealing effect, simple structure and easy operation to solve the above technical problems. Summary of the Invention

[0005] To solve this technical problem, the technical solution provided by this application is as follows:

[0006] In one aspect, the present invention provides a sample sealing transfer device comprising a sealing transfer chamber, a sealing assembly, and a sample transfer assembly;

[0007] The surface of the first side of the sealed transfer chamber is provided with a first window and a second window, and the surface of the second side is provided with a material port; the first side and the second side are arranged opposite to each other;

[0008] The sealing assembly includes a first lifting assembly and a sealing sheet; the sealing sheet is disposed at one end of the first lifting assembly and is disposed in the sealing transfer chamber; the first lifting assembly is movably connected to the sealing transfer chamber through the first window, and is used to drive the sealing sheet to move in the sealing transfer chamber to seal or open the material port;

[0009] The sample transfer assembly is movably connected to the sealed transfer chamber through the second window, and is used to drive the sample to be tested into and out of the sealed transfer chamber through the material port.

[0010] In some possible implementations, the sealing assembly further includes a first guide sleeve, a first sealing ring, and a positioning sleeve;

[0011] The first guide sleeve is fixed on the first window, and the positioning sleeve is detachably arranged on the first guide sleeve;

[0012] The first guide sleeve is provided with a first opening, and the positioning sleeve is provided with a second opening concentric with the first opening, so that the first lifting assembly is sequentially inserted into the positioning sleeve and the first guide sleeve and movably connected with the sealing transfer cavity;

[0013] The first sealing ring is arranged on the side surface of the first opening. In some possible implementations,

[0014] In some possible implementations, the first lifting assembly includes a sealing sheet pull rod, a fixing member, a fixing ring, and a first handle;

[0015] The sealing sheet pull rod passes through the fixing member, the fixing ring, the positioning sleeve and the first guide sleeve in sequence and is connected to the sealing sheet; the fixing member is movably connected to the sealing sheet pull rod, and the fixing ring is fixedly arranged on the surface of the sealing sheet pull rod;

[0016] The first handle is arranged on an end of the sealing sheet pull rod away from the sealing transfer cavity.

[0017] In some possible implementations, the positioning sleeve is provided with a first notch and a second notch, the depth of the second notch is greater than the depth of the first notch, and the second notch and the first notch are located in different areas of the positioning sleeve;

[0018] A positioning pin is also fixedly mounted on the sealing sheet pull rod, and the first notch and the second notch are used to limit the positioning pin.

[0019] In some possible implementations, a second sealing ring is installed on the sealing sheet, so that the sealing sheet and the material port form an embedded transverse seal;

[0020] The second sealing ring includes an O-ring.

[0021] In some possible implementations, the sample transfer assembly includes a second lifting assembly and a sample material table;

[0022] The second lifting assembly is movably connected to the sealed transfer chamber through the second window, and the sample material table is arranged at one end where the second lifting assembly enters the sealed transfer chamber; the second lifting assembly is used to drive the sample material table into and out of the sealed transfer chamber through the material port.

[0023] In some possible implementations, the second lifting assembly includes a material table pull rod, and a second handle provided at one end of the material port pull rod away from the sealed transfer chamber, and the other end of the material table pull rod is provided with the sample material table;

[0024] The second window is fixedly provided with a second guide sleeve, and the second guide sleeve is provided with a third opening, and the material platform pull rod is movably connected to the sealed transfer chamber through the third opening.

[0025] In some possible implementations, a third sealing ring is provided on a side of the third opening.

[0026] In some possible implementations, the sealed transfer chamber is composed of a conical sealing seat and a sealing cover, wherein the sealing cover is fixedly connected to the conical sealing seat and seals one side surface of the conical sealing seat;

[0027] The first window and the second window are arranged on the sealing cover, and the material port is arranged on a side surface of the conical sealing seat opposite to the sealing cover.

[0028] On the other hand, the present application also provides a sample sealing transfer method, which is applied to the above-mentioned sample sealing transfer device, and the method comprises:

[0029] Controlling the first lifting assembly to drive the sealing plate to move so as to open the material port, and transferring the sample sealing transfer device into the glove box;

[0030] Controlling the sample transfer assembly to be transferred to the outside of the sealed transfer cavity through the material port, and loading the sample to be tested into the sample transfer assembly;

[0031] Controlling the sample transfer assembly to be re-transferred into the sealed transfer chamber, and controlling the first lifting assembly to drive the sealing sheet to move, so as to seal the material port;

[0032] Transferring the sample sealing transfer device to a target position, and controlling the first lifting assembly to move the sealing sheet to open the material port;

[0033] The sample transfer component is controlled to be transferred to the target position through the material port, and the sample transfer component is retracted to complete the sealed transfer of the sample to be tested.

[0034] The above technical solution provided by this application has the following beneficial effects:

[0035] The embodiment of the present invention discloses a sample sealing transfer device and method for use in a scanning electron microscope. The sealed transfer device includes a sealed transfer chamber, a sealing assembly, and a sample transfer assembly. A first window and a second window are provided on the surface of a first side of the sealed transfer chamber, and a material port is provided on the surface of the second side. The first side and the second side are arranged relative to each other. The sealing assembly includes a first lifting assembly and a sealing plate. The sealing plate is provided at one end of the first lifting assembly and is disposed within the sealed transfer chamber. The first lifting assembly is movably connected to the sealed transfer chamber through the first window, and is used to drive the sealing plate to move within the sealed transfer chamber to seal or open the material port. The sample transfer assembly is movably connected to the sealed transfer chamber through the second window, and is used to drive a sample to be tested into and out of the sealed transfer chamber through the material port. The device has the advantages of simple structure, easy operation, good sealing effect, and low cost, and is suitable for transferring air-sensitive samples between a glove box and a scanning electron microscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 This is a schematic structural diagram of a sample sealing and transferring device provided in an embodiment of the present application;

[0038] Figure 2 This is a structural diagram of a first lifting assembly provided in an embodiment of the present application;

[0039] Figure 3 This is a structural diagram of a positioning sleeve provided in an embodiment of the present application;

[0040] Figure 4 is a structural schematic diagram of a second lifting assembly provided in an embodiment of the present application;

[0041] Figure 5 This is a schematic flow chart of a sample sealing and transferring method provided in an embodiment of the present application;

[0042] Figure 6 This is a working schematic diagram of a sample sealing and transferring device provided in an embodiment of the present application.

[0043] Among them, the reference numerals in the figure correspond to:

[0044] 1-sealed transfer chamber; 11-first window; 12-second window; 13-material port; 14-conical sealing seat; 15-sealing cover;

[0045] 2-sealing assembly; 21-first lifting assembly; 211-sealing plate pull rod; 212-fixing member; 213-fixing ring; 214-first handle; 215-locating pin; 22-sealing plate; 221-second sealing ring; 23-first guide sleeve; 231-first sealing ring; 24-locating sleeve; 241-first notch; 242-second notch; 25-second guide sleeve; 251-third sealing ring;

[0046] 3-sample transfer assembly; 31-second lifting assembly; 311-material table pull rod; 312-second handle; 32-sample material table;

[0047] 41-SEM vacuum chamber; 42-feeding mechanism; 43-SEM loading platform. DETAILED DESCRIPTION

[0048] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection of this application.

[0049] References to "one embodiment" or "an embodiment" herein refer to specific features, structures, or characteristics that may be included in at least one implementation of the present application. Throughout the description of this application, it should be understood that the terms "upper," "lower," "top," and "bottom," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplification. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and are therefore not to be construed as limiting the present application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly specifying the number of the technical features referred to. Thus, a feature designated "first" or "second" may explicitly or implicitly include one or more of the features. Furthermore, the terms "first," "second," etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential sequence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0050] When a numerical range is disclosed herein, the above range is considered to be continuous and includes the minimum and maximum values ​​of the range, as well as every value between such minimum and maximum values. Further, when a range refers to an integer, every integer between the minimum and maximum values ​​of the range is included. In addition, when multiple ranges are provided to describe a feature or characteristic, the ranges can be merged. In other words, unless otherwise indicated, all ranges disclosed herein should be understood to include any and all subranges included therein. For example, a specified range from "1 to 10" should be considered to include any and all subranges between a minimum of 1 and a maximum of 10. Exemplary subranges of the range 1 to 10 include, but are not limited to, 1 to 6.1, 3.5 to 7.8, 5.5 to 10, etc.

[0051] like Figure 1 As shown, an embodiment of the present application provides a sample sealing and transferring device, comprising a sealed transfer chamber 1, a sealing assembly 2 and a sample transfer assembly 3; a first window 11 and a second window 12 are provided on the surface of the first side of the sealed transfer chamber 1, and a material port 13 is provided on the surface of the second side; the first side and the second side are arranged opposite to each other; the sealing assembly 2 comprises a first lifting assembly 21 and a sealing plate 22; the sealing plate 22 is arranged at one end of the first lifting assembly 21 and is arranged in the sealed transfer chamber 1; the first lifting assembly 21 is movably connected to the sealed transfer chamber 1 through the first window 11, and is used to drive the sealing plate 22 to move in the sealed transfer chamber 1 to seal or open the material port 13; the sample transfer assembly 3 is movably connected to the sealed transfer chamber 1 through the second window 12, and is used to drive the sample to be tested to enter and exit the sealed transfer chamber 1 through the material port 13.

[0052] In the embodiment of the present application, the sample sealing transfer device is suitable for an electron scanning microscope, in particular a small desktop scanning electron microscope, and is used to complete the transfer of samples between a glove box and a scanning electron microscope.

[0053] like Figure 1 As shown, the sample sealing transfer device consists of a sealed transfer chamber 1, a sealing assembly 2 and a sample transfer assembly 3. The surface of the first side of the sealed transfer chamber 1 (i.e., the bottom surface) is provided with a material port 13, which is a channel for the sample to be tested to enter and exit the sealed transfer. The second side surface opposite to the first side (i.e., the top surface) is provided with a first window 11 and a second window 12. The first window 11 is used to install the sealing assembly 2, and the second window 12 is used to install the sample transfer assembly 3, and the first window 11 and the second window 12 do not overlap.

[0054] The sealing assembly 2 is used to seal or open the material port 13. Specifically, the sealing assembly 2 includes a first lifting assembly 21 and a sealing piece 22. The sealing piece 22 is fixedly arranged at one end of the first lifting assembly 21, and the sealing piece 22 is arranged in the sealing transfer chamber 1, and is used to seal or open the material port 13 under the drive of the first lifting assembly 21; the first lifting assembly 21 is movably connected to the sealing transfer chamber 1 through the first window 11, as shown in FIG. Figure 1 As described above, part of it is arranged outside the sealed transfer chamber 1 , so that the sealing piece 22 located at the other end of the first lifting assembly 21 can be driven to move by controlling one end of the first lifting assembly 21 .

[0055] The first lifting assembly 21 is a direct-connected pull rod mechanism, which can not only drive the sealing plate 22 to move up and down along the first window 11, but also use itself as a rotation axis to drive the sealing plate 22 to move up and down while rotating. This not only reduces the volume of the sealed transfer chamber 1, but also avoids interference with the operation of the sample transfer assembly 3.

[0056] The sample transfer component 3 enters and exits the sealed transfer chamber 1 through the material port 13 so that the sample to be tested can be transferred. Specifically, the sample transfer component 3 is movably connected to the sealed transfer chamber 1 through the second window 12. By controlling the end of the sample transfer component 3 located outside the sealed transfer chamber 1, it can enter and exit the sealed transfer chamber 1 when the material port 13 is opened.

[0057] Optionally, in order to ensure the sealing effect, the first window 11 and the first lifting assembly 21 and the second window 12 and the sealing transfer assembly must be completely sealed to prevent air from entering the sealing transfer chamber 1.

[0058] In the embodiment of the present application, the first lifting component 21 drives the sealing plate 22 to seal the material port 13, so that the sealing plate 22 and the material port 13 form an embedded transverse seal, and the sealing effect is reliable. The improved direct-connected pull rod mechanism has a simple structure, easy operation, and high mechanical stability, and will not be deformed or rotated out of place to affect the sealing effect.

[0059] As an optional embodiment, the sealed transfer chamber 1 is composed of a conical sealing seat 14 and a sealing cover 15, the sealing cover 15 is fixedly connected to the conical sealing seat 14, and seals one side surface of the conical sealing seat 14; the first window 11 and the second window 12 are arranged on the sealing cover 15, and the material port 13 is arranged on the side surface of the conical sealing seat 14 opposite to the sealing cover 15.

[0060] like Figure 1As shown, a conical sealing seat 14 and a sealing cover 15 form a sealed transfer chamber 1. The bottom surface of the conical sealing seat 14 is provided with the material port 13. The top is an open structure with a sealing cover 15. The sealing cover 15 is fixedly connected to the conical sealing seat 14. The first window 11 and the second window 12 are provided on the sealing cover 15. The sealed transfer chamber 1 is configured as a conical sealing seat 14 and a sealing cover 15 to form a sealed transfer chamber 1 for transferring samples to be tested, which has the advantages of simple structure and small size.

[0061] As an optional embodiment, the sealing assembly 2 also includes a first guide sleeve 21, a first sealing ring 231 and a positioning sleeve 24; the first guide sleeve 21 is fixed on the first window 11, and the positioning sleeve 24 is detachably arranged on the first guide sleeve 21; the first guide sleeve 21 is provided with a first opening, and the positioning sleeve 24 is provided with a second opening concentric with the first opening, so that the first lifting assembly 21 is sequentially passed through the positioning sleeve 24 and the first guide sleeve 21, and is movably connected to the sealed transfer chamber 1; the first sealing ring 231 is arranged on the side surface of the first opening.

[0062] like Figure 1 As shown, the sealing assembly 2 further includes a first guide sleeve 21 fixed to the first window 11. The first guide sleeve 21 guides the movement of the first lifting assembly 21. Specifically, the bottom of the first guide sleeve 21 is embedded in the first window 11, and a detachable positioning sleeve 24 is mounted on the top. The first guide sleeve 21 is perpendicular to the surface of the first side of the sealing transfer chamber 1. The first guide sleeve 21 is provided with a first opening, and the positioning sleeve 24 is also provided with a second opening concentric with the first opening. The first opening and the second opening are for the first lifting assembly 21 to pass through.

[0063] A first sealing sheet 22 is provided on the side surface of the first opening to ensure a sealing effect between the first lifting assembly 21 and the first guide sleeve 21 . Specifically, the first sealing sheet 22 is provided on the top side surface and the bottom side surface of the first opening.

[0064] Optionally, in order to ensure the sealing effect between the first guide sleeve 21 and the positioning sleeve 24, the side where the first guide sleeve 21 is connected to the positioning sleeve 24 is set to a convex structure, and the corresponding side of the positioning sleeve 24 is set to a concave structure, and the two cooperate with each other.

[0065] Optionally, the height of the first guide sleeve 21 is greater than the depth of the first window 11 .

[0066] Optionally, in order to ensure the sealing effect between the first guide sleeve 21 and the first window 11, a protruding structure is provided on both sides of the outer surface of the first guide sleeve 21, and the direction of the protruding structure is parallel to the upper surface of the first side of the sealed transfer chamber 1, and the bottom of the protruding structure is in contact with the upper surface of the first side of the sealed transfer chamber 1.

[0067] like Figure 1 and Figure 2 As shown, the first lifting assembly 21 includes a sealing plate rod 211, a fixing member 212, a fixing ring 213 and a first handle 214; the sealing plate rod 211 passes through the fixing member 212, the fixing ring 213, the positioning sleeve 24 and the first guide sleeve 21 in sequence and is connected to the sealing plate 22; and the fixing member 212 is movably connected to the sealing plate rod 211, and the fixing ring 213 is fixedly arranged on the surface of the sealing plate rod 211; the first handle 214 is arranged on the end of the sealing plate rod 211 away from the sealed transfer chamber 1.

[0068] In the embodiment of the present application, the first lifting assembly 21 includes a material sheet pull rod, and a first handle 214 arranged at one end of the material sheet pull rod away from the sealed transfer chamber 1. The other end of the material sheet pull rod is provided with the sealing sheet 22. The material sheet pull rod is used to drive the sealing sheet 22 to move. A fixing part 212 and a fixing ring 213 are also nested on the material sheet pull rod. The fixing part 212 is movably connected to the material sheet pull rod, and the fixing ring 213 is fixedly set on the surface of the sealing sheet pull rod 211 and is arranged around the material sheet pull rod.

[0069] By moving the position of the fixing member 212, a force can be applied to the fixing ring 213, thereby transmitting the force to the sealing sheet 22 through the material sheet pull rod, so that the sealing sheet 22 is pressed at the material port 13 to enhance the sealing effect.

[0070] Optionally, the fixing member 212 includes a locking nut, which applies force to a fixing ring 213 fixed on the material sheet pull rod, so that the sealing sheet 22 is pressed at the material port 13. The above parts constitute a thread locking mechanism.

[0071] Optionally, the structure of the fixing member 212 is a groove type, the opening direction of the groove is facing one end of the fixing ring 213, and the shape of the fixing ring 213 is set to match the groove, that is, the fixing ring 213 can be wrapped in the groove by the fixing member 212.

[0072] Furthermore, the fixing member 212 is movably connected to the positioning sleeve 24. When the structure of the fixing member 212 is a groove type, the upper surface of the positioning sleeve 24 is a convex shape matching the groove to ensure the matching effect and sealing effect of the two.

[0073] Optionally, when the fixing member 212 is a locking nut, the outer surface of the positioning sleeve 24 is provided with a threaded structure that cooperates with the locking nut.

[0074] Optionally, the sealing sheet pull rod 211 is L-shaped, and the right-angled portion of the L-shape is arranged in the sealing transfer chamber 1 .

[0075] The embodiment of the present application fixes the sealing sheet pull rod 211 through the fixing part 212, which can prevent sealing failure caused by transfer or misoperation, and further ensures the sealing structure of the sample sealing transfer device through the structural coordination of the first guide sleeve 21 and the window, the structural coordination of the first guide sleeve 21 and the positioning sleeve 24, and the structural coordination of the positioning sleeve 24 and the fixing part 212.

[0076] As an optional embodiment, it is characterized in that a first slot 241 and a second slot 242 are provided on the positioning sleeve 24, the depth of the second slot 242 is greater than the depth of the first slot 241, and the second slot 242 and the first slot 241 are located in different areas on the positioning sleeve 24; a positioning pin 215 is also fixedly installed on the sealing plate pull rod 211, and the first slot 241 and the second slot 242 are used to limit the positioning pin 215.

[0077] like Figure 3 As shown, the positioning sleeve 24 is provided with a first notch 241 and a second notch 242 . The depth of the second notch 242 is greater than that of the first notch 241 , and the first notch 241 and the second notch 242 do not overlap. The first notch 241 can also be called a shallow notch, and the second notch 242 can be called a deep notch.

[0078] like Figures 1 to 3 As shown, a positioning pin 215 is fixedly mounted on the sealing plate pull rod 211 , and the first notch 241 and the second notch 242 are used to limit the positioning pin 215 so as to achieve movement of the sealing plate pull rod 211 .

[0079] like Figure 1 As shown, when the positioning pin 215 is at the deep notch, the sealing piece 22 and the material opening 13 are concentric. Here, concentric means that the center of the sealing piece 22 is at the center of the material opening 13. Manual operation of the first handle 214 can move the sealing piece 22 through the material piece pull rod, so that the sealing piece 22 can seal the material opening 13; Figure 6 As shown, when the sealing plate pull rod 211 is rotated so that the positioning pin 215 is at the shallow groove, the sealing plate 22 is driven to rotate to a position close to the cavity body of the sealed transfer chamber 1, and the material port 13 is opened, so that the sample to be tested can enter and exit the sealed transfer chamber 1 through the material port 13.

[0080] In the embodiment of the present application, a positioning pin 215 is provided on the sealing sheet pull rod 211, and a first notch 241 and a second notch 242 are provided on the positioning sleeve 24, so that the first lifting structure has a positioning function, which not only ensures the centering of the sealing sheet 22 and the material port 13, but also makes the sample sealing transfer device easy to operate.

[0081] As an optional embodiment, a second sealing ring 221 is installed on the sealing plate 22 to form an embedded transverse seal between the sealing plate 22 and the material port 13; the second sealing ring 221 includes an O-ring.

[0082] like Figure 2 As shown, second sealing rings 221 are provided at both ends of the sealing sheet 22 to form an embedded transverse seal with the material port 13, and the sealing effect is reliable.

[0083] The second sealing ring 221 can be an O-ring, which is compressed and deformed during the sealing process of the material port 13, and achieves a sealing effect by relying on its resilience to fit the sealing surface. When there is a pressure difference between the two sealed components, the medium pressure will further enhance the sealing effect.

[0084] As an optional embodiment, the sample transfer component 3 includes a second lifting component 31 and a sample material table 32; the second lifting component 31 is movably connected to the sealed transfer chamber 1 through the second window 12, and the sample material table 32 is arranged at one end of the second lifting component 31 entering the sealed transfer chamber 1; the second lifting component 31 is used to drive the sample material table 32 to enter and exit the sealed transfer chamber 1 through the material port 13.

[0085] As an optional embodiment, the second lifting assembly 31 includes a material table pull rod 311, and a second handle 312 provided at one end of the material port 13 pull rod away from the sealed transfer chamber 1, and the other end of the material table pull rod 311 is provided with the sample material table 32; the second window 12 is fixedly provided with a second guide sleeve 25, and the second guide sleeve 25 is provided with a third opening, and the material table pull rod 311 is movably connected to the sealed transfer chamber 1 through the third opening.

[0086] As an optional implementation, a third sealing ring 251 is provided on the side of the third opening.

[0087] like Figure 1 and Figure 4As shown, the sample transfer assembly 3 includes a second lifting assembly 31 and a sample material table 32. The sample material table 32 is fixed at one end of the second lifting assembly 31. The second lifting assembly 31 is movably connected to the sealed transfer chamber 1 through the second window 12. The function of the second lifting assembly 31 is to drive the sample material table 32 through the material port 13 in and out of the sealed transfer chamber 1 to realize the loading or transfer of the sample to be tested.

[0088] Specifically, the second lifting assembly 31 includes a material platform lever 311, a second handle 312 located at one end of the material platform lever 311 away from the sealed chamber, and a sample platform 32 located at the other end of the material platform lever 311. The sample platform 32 is used to place samples to be tested. The sample platform 32 is detachably mounted at one end of the material platform lever 311 to facilitate sample transfer.

[0089] To achieve excellent sealing and guiding effects, a second guide sleeve 25 is provided on the second window 12. The second guide sleeve 25 is embedded in the second window 12 and guides and restricts the movement of the material platform rod 311. The second guide sleeve 25 has a third opening for the material platform rod 311 to pass through. The side surfaces of the third opening are provided with third sealing sheets 22 to ensure a good seal between the material platform rod 311 and the second guide sleeve 25. Specifically, the third sealing sheets 22 are provided on the top and bottom side surfaces of the third opening.

[0090] Optionally, in order to ensure the sealing effect between the second guide sleeve 25 and the second window 12, a protruding structure is provided on both sides of the outer surface of the second guide sleeve 25, and the direction of the protruding structure is parallel to the upper surface of the first side of the sealed transfer chamber 1, and the bottom of the protruding structure is in contact with the upper surface of the first side of the sealed transfer chamber 1.

[0091] Optionally, the height of the second guide sleeve 25 is greater than the depth of the second window 12 .

[0092] The sample material table 32 of the embodiment of the present application can be directly driven by the material table pull rod 311 to enter and exit the sealed transfer chamber 1 from the material port 13, and has the advantages of simple structure and simple operation. The second guide sleeve 25 and the sealing plate 22 seal and guide the material table pull rod 311 and the second window 12, further ensuring the sealing effect and ease of operation of the sample sealing transfer device.

[0093] On the other hand, Figure 5 As shown, the embodiment of the present application further provides a sample sealing transfer method, which is applied to the sample sealing transfer device provided in the embodiment of the present application, and the method includes:

[0094] S10: Control the first lifting assembly 21 to drive the sealing plate 22 to move, so as to open the material port 13, and transfer the sample sealing transfer device into the glove box.

[0095] In an embodiment of the present application, the sample sealing transfer device is suitable for scanning electron microscope testing. When testing air-sensitive samples, the first lifting device is first controlled to drive the sealing plate 22 to move so that the material port 13 is in an open state, and then the sample sealing transfer device is transferred to the glove box, and then the sample to be tested is loaded.

[0096] Specifically, the material port 13 is opened by manually controlling the first handle 214 to drive the sealing plate pull rod 211 and the sealing plate 22 at one end of the sealing plate pull rod 211 to move upward and rotate, so that the positioning pin 215 is located at the position of the first slot 241, and the material port 13 is opened.

[0097] A glove box is a sealed device used for conducting operations under specific conditions and is widely used in scientific research and industrial production. Its sealed enclosure, glove ports, and gas circulation and purification system maintain a low-oxygen, low-water, or specific gas environment within the box while isolating it from external interference. Operators can wear specially designed gloves while conducting various experiments and production operations within the box, such as chemical synthesis, material preparation, and battery assembly. Glove boxes not only provide stable conditions for handling environmentally sensitive substances but also effectively prevent the leakage of hazardous substances, ensuring safe and reliable operations.

[0098] It should be noted that placing the sample transfer device with material port 13 open in the glove box ensures that the sample remains in an inert or oxygen-free environment throughout the transfer process, preventing oxidation, hydrolysis, or other chemical reactions that could occur with air. The sealed environment and inert gas atmosphere (e.g., nitrogen or argon) within the glove box effectively isolate the sample from the outside air, thereby protecting the chemical properties and structural integrity of air-sensitive samples and ensuring the accuracy and reliability of subsequent test results.

[0099] S30 : Control the sample transfer component 3 to be transferred to the outside of the sealed transfer chamber 1 through the material port 13 , and load the sample to be tested into the sample transfer component 3 .

[0100] In the embodiment of the present application, the method of using the sample transfer component 3 is: manually controlling the second handle 312 to drive the material table pull rod 311 and the sample material table 32 located at one end of the material table pull rod 311 to move up and down, so that the sample material table 32 can be transferred from the material port 13 to the outside of the sealed transfer chamber 1, and then the sample to be tested is loaded onto the sample material table 32 of the sample transfer component 3.

[0101] S50 : Control the sample transfer assembly 3 to be transferred back into the sealed transfer chamber 1 , and control the first lifting assembly 21 to drive the sealing plate 22 to move, so as to seal the material port 13 .

[0102] In this embodiment, the second handle 312 is manually controlled to move the sample material platform 32 back into the sealed transfer chamber 1. The first handle 214 is then manually controlled to move the sealing plate pull rod 211, causing the positioning pin 215 to reach the bottom of the second notch 242. The sealing plate 22 then seals the material port 13. Furthermore, the fixing member 212 applies force to the fixing ring 213, pressing the sealing plate 22 against the material port 13, further improving the sealing effect.

[0103] S70: moving the sample sealing transfer device to a target position, and controlling the first lifting assembly 21 to move the sealing plate 22 to open the material port 13;

[0104] S90: Control the sample transfer component 3 to transfer to the target position through the material port 13, retract the sample transfer component 3, and complete the sealed transfer of the sample to be tested.

[0105] In an embodiment of the present application, after the sample is loaded and the material port 13 is sealed in the glove box, the sample sealing transfer device is transferred to the target position, and then the fixing part 212 is loosened first, and the first handle 214 is manually operated to drive the positioning pin 215 on the material sheet pull rod back to the first slot 241. At this time, the sealing sheet 22 avoids the material port 13, so that the material port 13 is opened.

[0106] The second handle 312 is manually controlled to drive the material table pull rod 311 and the material table located at one end of the material table pull rod 311 to move up and down, so that the sample material table 32 can be transferred from the material port 13 to the outside of the sealed transfer chamber 1, and the sample to be tested is transferred to the target position. The second handle 312 is manually operated again to transfer the sample material table 32 back to the sealed transfer chamber 1 and seal the material port 13, thereby completing the sealed transfer of the sample to be tested.

[0107] Optionally, when testing samples that have environmental requirements, it is generally chosen to seal the material port 13 immediately after completing the sample transfer, because the sample transfer is carried out in a vacuum environment or an inert gas environment, so as to ensure that no air enters the sealed cavity.

[0108] The target position refers to the test position of the sample to be tested. When a scanning electron microscope is used to test the sample to be tested, the structural diagram is as follows: Figure 6The scanning electron microscope includes a SEM vacuum chamber 41, a feeding mechanism 42 and a scanning electron microscope loading platform 43. Specifically, after the sample is sealed in the glove box, that is, after the above steps S10-S30 are completed, the sample detection process is as follows:

[0109] 1. Remove the sample sealing transfer device from the glove box and place it in the corresponding sealing port of the SEM vacuum chamber 41. Turn on the vacuum pump to make the vacuum degree in the SEM vacuum chamber 41 reach the set value;

[0110] 2. Rotate the fixing member 212 and operate the sealing plate pull rod 211 through the first handle 214 so that the positioning pin 215 is located in the first notch 241 of the positioning sleeve 24. At this time, the sealing plate 22 avoids the material opening 13.

[0111] 3. Use the second handle 312 to operate the material table pull rod 311 to place the sample material table 32 into the feeding rod of the scanning electron microscope, retract the material table pull rod 311, and seal the material port 13 according to the above step S50;

[0112] 4. Operate the material stage feeding mechanism 42 of the scanning electron microscope to place the sample material stage 32 on the scanning electron microscope loading platform 43, and retract the material stage feeding mechanism 42;

[0113] 5. Use SEM to examine the samples.

[0114] In the embodiment of the present application, the first lifting component 21 drives the sealing plate 22 to seal the material port 13, so that the sealing plate 22 and the material port 13 form an embedded transverse seal with a reliable sealing effect. The first lifting component 21 is a direct-connected pull rod mechanism structure with a simple structure, convenient operation, and high mechanical stability. It will not deform or rotate out of place to affect the sealing effect. It can complete the transfer of air-sensitive samples between the glove box and the scanning electron microscope at a low cost, and a fixing part 212 is configured to lock the first lifting component 21 to prevent sealing failure caused by misoperation.

[0115] The above description is merely an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A sample sealing transfer device, characterized in that: It comprises a sealed transfer chamber (1), a sealing component (2) and a sample transfer component (3); A first window (11) and a second window (12) are provided on the surface of the first side of the sealed transfer chamber (1), and a material port (13) is provided on the surface of the second side; the first side and the second side are arranged opposite to each other; The sealing assembly (2) comprises a first lifting assembly (21) and a sealing sheet (22); the sealing sheet (22) is arranged at one end of the first lifting assembly (21) and is arranged in the sealing transfer chamber (1); the first lifting assembly (21) is movably connected to the sealing transfer chamber (1) through the first window (11) and is used to drive the sealing sheet (22) to move in the sealing transfer chamber (1) to seal or open the material port (13); The sample transfer assembly (3) is movably connected to the sealed transfer chamber (1) through the second window (12), and is used to drive the sample to be tested into and out of the sealed transfer chamber (1) through the material port (13).

2. The sample sealing and transferring device according to claim 1, characterized in that: The sealing assembly (2) further includes a first guide sleeve (23), a first sealing ring (231) and a positioning sleeve (24); The first guide sleeve (23) is fixed on the first window (11), and the positioning sleeve (24) is detachably arranged on the first guide sleeve (23); The first guide sleeve (23) is provided with a first opening, and the positioning sleeve (24) is provided with a second opening concentric with the first opening, so that the first lifting assembly (21) is sequentially passed through the positioning sleeve (24) and the first guide sleeve (23) and movably connected to the sealed transfer chamber (1); The first sealing ring (231) is arranged on the side surface of the first opening.

3. The sample sealing and transferring device according to claim 2, characterized in that: The first lifting assembly (21) comprises a sealing sheet pull rod (211), a fixing member (212), a fixing ring (213) and a first handle (214); The sealing sheet pull rod (211) passes through the fixing member (212), the fixing ring (213), the positioning sleeve (24) and the first guide sleeve (23) in sequence and is connected to the sealing sheet (22); the fixing member (212) is movably connected to the sealing sheet pull rod (211), and the fixing ring (213) is fixedly arranged on the surface of the sealing sheet pull rod (211); The first handle (214) is provided on an end of the sealing sheet pull rod (211) away from the sealing transfer chamber (1).

4. The sample sealing and transferring device according to claim 3, characterized in that: The positioning sleeve (24) is provided with a first notch (241) and a second notch (242), the depth of the second notch (242) is greater than the depth of the first notch (241), and the second notch (242) and the first notch (241) are located in different areas on the positioning sleeve (24); A positioning pin (215) is also fixedly mounted on the sealing sheet pull rod (211), and the first notch (241) and the second notch (242) are used to limit the positioning pin (215).

5. The sample sealing and transferring device according to claim 1, characterized in that: A second sealing ring (221) is installed on the sealing sheet (22) so that the sealing sheet (22) and the material port (13) form an embedded transverse seal; The second sealing ring (221) comprises an O-ring.

6. The sample sealing and transferring device according to claim 1, characterized in that: The sample transfer assembly (3) includes a second lifting assembly (31) and a sample material table (32); The second lifting assembly (31) is movably connected to the sealed transfer chamber (1) through the second window (12), and the sample material table (32) is arranged at one end of the second lifting assembly (31) entering the sealed transfer chamber (1); the second lifting assembly (31) is used to drive the sample material table (32) to enter and exit the sealed transfer chamber (1) through the material port (13).

7. The sample sealing and transferring device according to claim 6, characterized in that: The second lifting assembly (31) includes a material platform pull rod (311) and a second handle (312) provided at one end of the material port (13) pull rod away from the sealed transfer chamber (1), and the other end of the material platform pull rod (311) is provided with the sample material platform (32); The second window (12) is fixedly provided with a second guide sleeve (25), and the second guide sleeve (25) is provided with a third opening, and the material platform pull rod (311) is movably connected to the sealed transfer chamber (1) through the third opening.

8. The sample sealing and transferring device according to claim 7, characterized in that: A third sealing ring (251) is provided on the side of the third opening.

9. The sample sealing and transferring device according to claim 1, characterized in that: The sealed transfer chamber (1) is composed of a conical sealing seat (14) and a sealing cover (15), wherein the sealing cover (15) is fixedly connected to the conical sealing seat (14) and seals one side surface of the conical sealing seat (14); The first window (11) and the second window (12) are provided on the sealing cover (15), and the material port (13) is provided on a side surface of the conical sealing seat (14) opposite to the sealing cover (15).

10. A sample sealing and transferring method, applied to the sample sealing and transferring device according to any one of claims 1 to 9, characterized in that: The method comprises: Controlling the first lifting assembly (21) to drive the sealing plate (22) to move so as to open the material port (13), and transferring the sample sealing transfer device into the glove box; Controlling the sample transfer component (3) to transfer to the outside of the sealed transfer chamber (1) through the material port (13), and loading the sample to be tested into the sample transfer component (3); Controlling the sample transfer assembly (3) to be transferred back into the sealed transfer chamber (1), and controlling the first lifting assembly (21) to drive the sealing plate (22) to move, so as to seal the material port (13); The sample sealing transfer device is transferred to a target position, and the first lifting component (21) is controlled to drive the sealing plate (22) to move so that the material port (13) is opened; The sample transfer component (3) is controlled to be transferred to the target position through the material port (13), and the sample transfer component (3) is retracted to complete the sealed transfer of the sample to be tested.

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