Different-surface groove type photoconductive switch

Abstract

The invention provides a non-coplanar groove-type photoconductive switch, which comprises a light-in topological structure and a photoconductive switch device structure, the light-in topological structure comprises at least one groove to form a groove-type light-in surface, and the photoconductive switch device structure comprises a substrate; the incident light topological structure wraps the substrate, and the grooves are formed in the first side face of the incident light topological structure; the groove type light incident surface formed by the at least one groove is used for receiving incident light, the incident light is refracted when passing through the groove type light incident surface to form refracted light, and the refracted light enters the substrate through the groove type light incident surface. Compared with the prior art in which the incident light directly enters the substrate through the plane incident surface, the groove structure can regulate and control the transmission path of the incident light, so that the incident light is more uniformly distributed and propagated, the distribution range and the transmission optical path of the incident light in the substrate are improved, and the utilization efficiency of the incident light is improved.

Description

Technical Field

[0001] The present application relates to the technical field of optical switches, and in particular to an optical switch with unequal grooves. Background Art

[0002] Photoconductive switches are a new type of switching device formed by combining a semi-insulating semiconductor with an ultrashort laser pulse. Due to their high reliability, good stability, and compact size, they are widely used in ultrafast optoelectronics, high-speed detection, and other fields. Their role is also becoming increasingly prominent in the pulsed high-power and terahertz fields. The heterogeneous photoconductive switch structure exhibits unique advantages in voltage resistance due to its more uniform electric field distribution.

[0003] Current out-of-plane photoconductive switch structures inject light from the side plane of the planar light-input topology. This light-injection method limits the substrate material's ability to absorb and utilize light, resulting in insufficient light utilization. Furthermore, photons incident on the substrate are constrained by the incident light path of the existing structure, resulting in a limited absorption path and other issues, leading to generally low overall light absorption efficiency. This dual loss mechanism severely restricts the photoconductive switch's effective use of light, thereby limiting carrier excitation efficiency and the device's overall photoelectric conversion performance. Summary of the Invention

[0004] The purpose of this application is to address the deficiencies in the above-mentioned prior art and provide a non-planar groove type photoconductive switch to improve the efficiency of the photoconductive switch device in utilizing incident light.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of the present application are as follows:

[0006] In a first aspect, an embodiment of the present application provides a skew-grooved photoconductive switch, comprising a light-entering topological structure and a photoconductive switch device structure, wherein the light-entering topological structure comprises at least one groove to form a groove-type light-entering surface, and the photoconductive switch device structure comprises: a substrate;

[0007] The light incident topological structure covers the substrate, and each of the grooves is arranged on a first side surface of the light incident topological structure;

[0008] The groove-shaped light incident surface formed by the at least one groove is used to receive incident light. The incident light is refracted when passing through the groove-shaped light incident surface to form refracted light. The refracted light enters the substrate through the groove-shaped light incident surface.

[0009] Optionally, the orientation direction of each groove is perpendicular to the thickness direction of the substrate.

[0010] Optionally, the depth of the groove is calculated by the formula h = [D-(n+1)*d] / (2n), where h is the depth of the groove-type light incident surface, D is the substrate thickness, n is the number of groove-type light incident surfaces, and d is the groove spacing of the groove-type light incident surface.

[0011] Optionally, the orientation direction of each groove is parallel to the thickness direction of the substrate.

[0012] Optionally, the depth of the groove is calculated by the formula h = [L-(n+1)*d] / (2n), where h is the depth of the groove-type light incident surface, n is the number of groove-type light incident surfaces, d is the groove spacing of the groove-type light incident surface, and L is the length of the groove side.

[0013] Optionally, the groove is semi-cylindrical in shape.

[0014] Optionally, the light incident topology structure further includes: a plurality of light reflection structures;

[0015] Each of the light reflecting structures is respectively arranged on other surfaces of the light incident topological structure except the first side surface;

[0016] The refracted light is reflected by the light reflecting structure.

[0017] Optionally, the photoconductive switch device structure further includes: a front electrode and a back electrode;

[0018] The front electrode is arranged at the top of the light-incident topological structure, and the back electrode is arranged at the bottom of the light-incident topological structure.

[0019] Optionally, the widths of the front electrode and the back electrode are calculated using the formula We=Wg-2h;

[0020] Wherein, We is the electrode width, Wg is the substrate width, and h is the depth of the groove-shaped light incident surface.

[0021] Optionally, the material of the substrate is any one of high-purity gallium arsenide, high-purity silicon carbide, high-purity gallium nitride, high-purity diamond, high-purity aluminum nitride, element-doped gallium arsenide, element-doped silicon carbide, element-doped gallium nitride, element-doped diamond, and element-doped aluminum nitride, and the light reflection structure is any one of a metal film, an all-dielectric film, or a metal-dielectric composite film.

[0022] The beneficial effects of this application are:

[0023] The present application provides a heterogeneous groove-type photoconductive switch. The heterogeneous photoconductive switch comprises a light-entry topology structure and a photoconductive switch device structure. The light-entry topology structure encapsulates the substrate within the photoconductive switch device structure. Furthermore, the light-entry surface within the light-entry topology structure is configured as a groove-type light-entry surface. Incident light is received via the groove-type light-entry surface, causing the incident light to refract upon passing through the groove-type light-entry surface, forming refracted light rays. The light entering the substrate is refracted light rays, which are then transmitted and absorbed by the substrate. Compared to prior art methods in which incident light directly enters the substrate through a planar light-entry surface, the groove structure regulates the transmission path of the incident light, distributing and propagating the incident light more evenly. This increases the distribution range and transmission optical path of the incident light within the substrate, improves the utilization efficiency of the incident light, and thereby enhances the photoelectric conversion efficiency of the heterogeneous photoconductive switch. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 An example diagram of a three-dimensional model diagram of the structure of an existing out-of-plane planar optical switch;

[0026] Figure 2 An exemplary diagram of a top view of a conventional out-of-plane planar optical switch structure;

[0027] Figure 3 A schematic structural diagram of a skew-groove optical switch provided in an embodiment of the present application;

[0028] Figure 4 An example diagram of a three-dimensional model of a skew-groove optical switch provided in an embodiment of the present application, wherein the grooves are oriented perpendicular to the thickness direction of the substrate;

[0029] Figure 5 An example of a front view of an out-of-plane groove type optical switch provided in an embodiment of the present application, wherein the groove orientation is perpendicular to the thickness direction of the substrate;

[0030] Figure 6 An example diagram of a three-dimensional model of a skew groove-type optical switch provided by an embodiment of the present application, wherein the plurality of grooves are oriented perpendicular to the thickness direction of the substrate;

[0031] Figure 7 An example of a front view of a skew groove-type optical switch provided by an embodiment of the present application, wherein the plurality of grooves are oriented perpendicular to the thickness direction of the substrate;

[0032] Figure 8 An example diagram of a three-dimensional model of a skew groove-type optical switch provided by an embodiment of the present application, wherein multiple grooves are oriented parallel to the thickness direction of the substrate;

[0033] Figure 9 An example of a top view of a skew groove type optical switch provided by an embodiment of the present application, wherein the plurality of grooves are oriented parallel to the thickness direction of the substrate;

[0034] Figure 10 The light intensity distribution of a laser after vertically entering an existing out-of-plane planar light guide switch;

[0035] Figure 11 This is the light intensity distribution of another laser after vertically entering the existing out-of-plane planar light guide switch;

[0036] Figure 12 The light intensity distribution of the laser provided in the embodiment of the present application after entering the eccentric groove-type light guide switch through a groove-type light incident surface with a groove orientation perpendicular to the thickness direction of the substrate;

[0037] Figure 13 The light intensity distribution of the laser provided in the embodiment of the present application after entering the skew groove-type light guide switch through a groove-type light incident surface with multiple grooves oriented perpendicular to the thickness direction of the substrate;

[0038] Figure 14 The light intensity distribution of the laser provided in the embodiment of the present application after entering the out-of-plane groove-type light guide switch through a groove-type light incident surface with multiple grooves oriented parallel to the thickness direction of the substrate;

[0039] Figure 15 The intensity distribution of light incident from a first fixed position to the out-of-plane groove type light guide switch provided by the embodiment of the present application at different incident angles is shown;

[0040] Figure 16 The intensity distribution of light incident on the eccentric groove type light guide switch with a single vertical groove type light incident surface provided by the embodiment of the present application at different incident angles from the second fixed position;

[0041] Figure 17 This is the intensity distribution of light incident on the out-of-plane groove type light guide switch with a single vertical groove type light incident surface provided by the embodiment of the present application at different incident angles and different incident positions.

[0042] Icons: (1) - front electrode; (2) - light reflection structure; (3) - substrate; (4) - back electrode; (5) - groove. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of illustration and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowcharts can be implemented out of sequence, and steps without logical context can be reversed or implemented simultaneously. In addition, those skilled in the art, under the guidance of the contents of this application, can add one or more other operations to the flowchart, or remove one or more operations from the flowchart.

[0044] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present application.

[0045] It should be noted that the term "comprising" will be used in the embodiments of the present application to indicate the existence of the features declared thereafter, but does not exclude the addition of other features.

[0046] Figure 1 This is an example diagram of a three-dimensional model diagram of the structure of an existing planar optical switch. Figure 2 The top view of the structure of the existing non-planar optical switch. Figure 1 and Figure 2 It can be seen that the side surfaces of the existing unequal-planar light guide switch are all planes, and the light incident surface of the existing unequal-planar light guide switch is a planar light incident surface, so the incident light enters the substrate through the planar light incident surface. Figure 10 and Figure 11 Both are schematic diagrams of the transmission results of incident light inside the existing out-of-plane planar light guide switch. Figure 10 and Figure 11 It can be seen that after the incident light enters the substrate through the plane light incident surface, the optical path is short and the distribution range is small, which is not conducive to the absorption of light by the substrate in the heterogeneous light guide switch.

[0047] Figure 3 This is a schematic diagram of the structure of a skew groove type optical switch provided in an embodiment of the present application, referring to Figure 3The out-of-plane photoconductive switch may include: a light-incident topological structure and a photoconductive switch device structure, wherein the light-incident topological structure may include at least one groove (5), and the groove (5) may form a groove-type light-incident surface, and the photoconductive switch device structure may include: a substrate (3). It is worth noting that Figure 3 The groove (5) is used as an example, but this is not a limitation of the present application.

[0048] Optionally, the light-incident topological structure covers the substrate, and each groove is provided on a first side surface of the light-incident topological structure, wherein the light-incident topological structure may include six surfaces, specifically four side surfaces, a top surface, and a bottom surface. The first side surface may be any one of the four side surfaces, and the first side surface may be as follows: Figure 3 The side where the groove (5) is located.

[0049] Optionally, the groove-shaped light incident surface formed by each groove can receive incident light, and the incident light is refracted when passing through the groove-shaped light incident surface to form refracted light, and the refracted light enters the substrate (3) through the groove-shaped light incident surface, and the substrate (3) can absorb and transmit the refracted light.

[0050] In this embodiment, a light-entry topology and a light-conducting switch device structure are provided within the heterogeneous light-conducting switch. The light-entry topology encapsulates the substrate within the light-conducting switch device structure. Furthermore, the light-entry surface within the light-entry topology is configured as a grooved light-entry surface. Incident light is received via the grooved light-entry surface, causing the incident light to refract upon passing through the grooved light-entry surface, forming refracted light rays. The light entering the substrate is refracted light rays, which are then transmitted and absorbed by the substrate. Compared to prior art methods in which incident light enters the substrate directly through a planar light-entry surface, the grooved structure regulates the transmission path of the incident light, resulting in a more uniform distribution and propagation of the incident light. This increases the distribution range and transmission optical path of the incident light within the substrate, improves the utilization efficiency of the incident light, and thereby enhances the photoelectric conversion efficiency of the heterogeneous light-conducting switch.

[0051] Optionally, the orientation direction of each groove is perpendicular to the thickness direction of the substrate. Figure 3 、 Figure 4 and Figure 5 Schematic diagram of the out-of-plane photoconductive switch in FIG. 1 . When the thickness direction of the substrate is the z direction, the orientation of the groove is the x direction perpendicular to the z direction. Figure 3 This is an example diagram of a three-dimensional model of a skew groove-type optical switch provided in an embodiment of the present application, in which the groove orientation is perpendicular to the thickness direction of the substrate. Figure 5 This is an example of a front view of a skew groove type optical switch provided in an embodiment of the present application, wherein the groove orientation is perpendicular to the thickness direction of the substrate. Figure 3 、 Figure 4 and Figure 5 In the example of the skew groove type optical switch, there is only one groove, and the orientation of the groove is perpendicular to the thickness direction of the substrate.

[0052] Figure 6 This is an example diagram of a three-dimensional model of a skew groove-type optical switch provided in an embodiment of the present application, in which multiple grooves are oriented perpendicular to the thickness direction of the substrate. Figure 7 This is an example of a front view of a skew groove type optical switch provided in an embodiment of the present application, wherein the grooves are oriented perpendicular to the thickness direction of the substrate. Figure 6 and Figure 7 In an example, there are multiple grooves at the first side, and the orientation of each groove is perpendicular to the thickness direction of the substrate.

[0053] Optionally, when the orientation direction of each groove is perpendicular to the thickness direction of the substrate (3), the depth of each groove is obtained by the following formula (1).

[0054] h=[D-(n+1)*d] / (2n) Formula (1)

[0055] Wherein, h is the depth of the groove-type light incident surface, that is, the radius of the groove-type light incident surface; D is the thickness of the substrate (3); n is the number of the groove-type light incident surface, that is, the number of grooves; d is the groove spacing of the groove-type light incident surface.

[0056] Wherein, if there are two or more grooves, d is the distance between the two grooves. Specifically, for the adjacent first groove and the second groove, the next groove of the first groove is the second groove, then d is the distance between the lower cross section of the first groove and the upper cross section of the second groove, referring to Figure 7 The d in.

[0057] If there is only one groove, d is the distance between the cross section of the groove and the substrate (3), for example, the distance between the upper cross section of the groove and the top surface of the substrate (3). Figure 5 The d in.

[0058] Figure 8 This is an example diagram of a three-dimensional model of a skew groove-type optical switch provided in an embodiment of the present application, in which multiple grooves are oriented parallel to the thickness direction of the substrate. Figure 9 This is an example of a top view of an out-of-plane groove type optical switch provided in an embodiment of the present application, in which multiple grooves are oriented parallel to the thickness direction of the substrate.

[0059] Optionally, refer to Figure 8 and Figure 9 In the example of , the orientation direction of each groove can also be parallel to the thickness direction of the substrate (3). Figure 8 For example, when the thickness direction of the substrate (3) is the z direction, the orientation of the groove is the z direction parallel to the z direction. Figure 8 and Figure 9 In the example of the unequal-surface groove type optical switch, there are multiple grooves, and the orientation of the grooves is parallel to the thickness direction of the substrate (3). Figure 8 In an example, there are multiple grooves on the first side, and the orientation of each groove is parallel to the thickness direction of the substrate (3).

[0060] Optionally, when the orientation direction of each groove is parallel to the thickness direction of the substrate (3), the depth of each groove is calculated by the following formula (II).

[0061] h=[L-(n+1)*d] / (2n) Formula (2)

[0062] Wherein, h is the depth of the groove-type light incident surface, n is the number of the groove-type light incident surface, d is the groove spacing of the groove-type light incident surface, and L is the length of the groove side. Specifically, L is the total length of all grooves, such as Figure 5 The L in.

[0063] Wherein, if there are two or more grooves, d is the distance between the two grooves. Specifically, for the adjacent first groove and the second groove, the second groove is located on the right side of the first groove, then d is the distance between the right cross section of the first groove and the left cross section of the second groove, such as Figure 5 The d in.

[0064] If there is only one groove, d is the distance between the cross section of the groove and the substrate (3), for example, the distance between the cross section of the groove seat and the left side of the substrate (3).

[0065] In this embodiment, the depth of the groove is obtained by using the above formula (1) or formula (2), which can make the incident light more evenly distributed and propagated.

[0066] Optionally, the groove is semi-cylindrical in shape.

[0067] Optionally, continue with reference to Figure 3 The incident light topology structure may further include: a plurality of light reflecting structures (2). Each light reflecting structure is respectively arranged on other surfaces of the incident light topology structure except the first side surface. The refracted light may be reflected by each light reflecting structure.

[0068] Specifically, the light-incident topological structure includes six surfaces, wherein the first side surface is the aforementioned groove (5), and the other surfaces except the first side surface are all light-reflecting structures (2).

[0069] As an example, continue to refer to Figure 3 The plurality of light reflecting structures (2) may include: a first light reflecting structure, a second light reflecting structure, a third light reflecting structure, a fourth light reflecting structure and a fifth light reflecting structure.

[0070] The first light reflecting structure is arranged on the second side of the substrate (3), the second light reflecting structure is arranged on the third side of the substrate (3), the third light reflecting structure is arranged on the third side of the substrate (3), the fourth light reflecting structure is arranged on the top of the substrate (3), and the fifth light reflecting structure is arranged on the bottom of the substrate (3). The refracted light is reflected by the first light reflecting structure, the second light reflecting structure, the third light reflecting structure, the fourth light reflecting structure, and the fifth light reflecting structure.

[0071] In this embodiment, by further providing a light reflection structure in the light incident topology structure, the groove-shaped light incident surface and the light reflection structure can improve the transmission optical path and distribution range of light in the substrate (3). When the incident light enters the substrate (3) from the groove-shaped light incident surface, the groove-shaped light incident surface can realize the regulation of the light transmission path, so that the light is more evenly distributed and propagated. At the same time, the light reflection structures located on the sides, top and bottom of the substrate (3) can reflect the light that attempts to escape the substrate (3) back into the interior of the substrate (3), further increasing the contact time and area between the light and the substrate (3). The groove-shaped light incident surface and the light reflection structure together realize the improvement of the utilization efficiency of the incident light, thereby improving the photoelectric conversion efficiency of the device.

[0072] Optionally, continue with reference to Figure 3 As an example, the photoconductive switch structure may further include: a front electrode (1) and a back electrode (4).

[0073] The front electrode (1) is arranged at the top of the light-entering topological structure, and the back electrode (4) is arranged at the bottom of the light-entering topological structure. Figure 3 In the example of the present invention, the front electrode (1) is arranged on the top surface of the light reflecting structure (2) on the top of the substrate (3), and the back electrode (4) is arranged on the bottom surface of the light reflecting structure (2) on the bottom of the substrate (3).

[0074] The widths of the front electrode (1) and the back electrode (4) are both calculated using the following formula (3).

[0075] We=Wg-2h Formula (III)

[0076] Wherein, We is the electrode width, Wg is the substrate (3) width, and h is the depth of the groove-shaped light-entering surface. The above formula (III) can make the electrode size edge and the depth of the light-entering topological structure in the same cross section, that is, the size edge of the front electrode (1) and the back electrode (4) and the depth of the groove in the light-entering topological structure in the same cross section, refer to Figure 5 、 Figure 7 as well as Figure 9In the example of the front electrode (1) and the back electrode (4), the size edges and the depth of the groove in the light-incident topology structure are in the same cross-section.

[0077] In this embodiment, by setting the size edges of the front electrode and the back electrode to be in the same cross-section as the depth of the groove in the light-entering topological structure, it can be ensured that after the incident light irradiates the substrate (3), the photogenerated carriers generated at the groove-shaped light-entering surface have a shorter free path when migrating to the front electrode and the back electrode.

[0078] Optionally, the shapes of the front electrode (1) and the back electrode (4) include any one of the following shapes: rectangular, elliptical, and rectangular.

[0079] Optionally, the material of the substrate (3) is any one of high-purity gallium arsenide, high-purity silicon carbide, high-purity gallium nitride, high-purity diamond, high-purity aluminum nitride, element-doped gallium arsenide, element-doped silicon carbide, element-doped gallium nitride, element-doped diamond, and element-doped aluminum nitride, and the light reflection structure can be any one of a metal film, a full dielectric film, or a metal-dielectric composite film.

[0080] Figure 10 This is the light intensity distribution of a laser after vertically entering an existing planar optical switch. Figure 11 This is the light intensity distribution of another laser after vertically entering the existing out-of-plane planar light guide switch. Figure 10 It is a two-dimensional front view of the existing non-planar optical switch. Figure 11 This is a two-dimensional top view of the existing non-planar optical switch. Figure 10 and Figure 11 It can be seen that after the laser enters the interior of the existing planar optical switch, its optical path is short and its distribution range is small, which is not conducive to the substrate (3) absorbing light.

[0081] Figure 12 The light intensity distribution of the laser provided in the embodiment of the present application after entering the eccentric groove type light guide switch through a groove type light incident surface with a groove orientation perpendicular to the thickness direction of the substrate (3). The incident light is a 532nm laser with a light intensity of 1000W / cm 2 , the incident light direction is (1,0).

[0082] Depend on Figure 12 It can be seen that when the incident light enters a groove-shaped light-entering surface with a groove orientation perpendicular to the thickness direction of the substrate (3), light refraction occurs, and the refraction range is fan-shaped. The refracted light is reflected after passing through the light reflection structures above and below the substrate (3) and is transmitted inside the contrast. Figure 12 It can be seen that compared with the existing non-planar light-input switch, Figure 10The light incident on the interior of the substrate (3) through a groove-shaped light incident surface in which the groove orientation is perpendicular to the thickness direction of the substrate (3) in the present application has a wide distribution range and a long optical path, which is conducive to the transmission and absorption of light inside, thereby promoting the generation of efficient carriers.

[0083] Figure 13 The light intensity distribution of the laser provided in the embodiment of the present application after entering the unequal-surface groove-type light guide switch through the groove-type light incident surface with multiple grooves oriented perpendicular to the thickness direction of the substrate (3). The incident light is a 532nm laser with a light intensity of 1000W / cm 2 , the incident light direction is (1,0).

[0084] Depend on Figure 13 It can be seen that when the incident light is incident on the multiple groove-shaped light-entering surfaces whose grooves are oriented perpendicular to the thickness direction of the substrate (3), light refraction occurs, and the refracted light is reflected after passing through the light reflection structures above and below the substrate (3) and is transmitted inside the substrate (3). Figure 12 The single groove light incident surface in Figure 13 The refraction angle of the incident light is larger, the distribution of the refracted light inside the substrate (3) is wider, and the optical path is longer, which is beneficial to the transmission and absorption of light inside, thereby promoting the generation of efficient carriers.

[0085] Figure 14 The light intensity distribution of the laser provided in the embodiment of the present application after entering the unequal-surface groove-type light guide switch through the groove-type light incident surface with multiple grooves oriented parallel to the thickness direction of the substrate (3). The incident light is a 532nm laser with a light intensity of 1000W / cm 2 , the incident light direction is (1,0).

[0086] Depend on Figure 14 It can be seen that when the incident light enters the multiple groove-shaped light-entering surfaces whose grooves are oriented parallel to the thickness direction of the substrate (3), light refraction occurs, and the refracted light is reflected after passing through the light reflection structure on the side of the substrate (3) and is transmitted inside the substrate (3). Compared with the existing non-planar light-entering switch, Figure 11 The refracted light is widely distributed inside the substrate (3) and has a long optical path, which is beneficial to the transmission and absorption of light inside, thereby promoting the generation of efficient carriers.

[0087] Figure 15 The light intensity distribution of the eccentric groove type light guide switch with a single vertical groove type light incident surface provided by the embodiment of the present application after the light is incident from the first fixed position to the eccentric groove type light guide switch at different incident angles. Figures 3 to 5 and Figure 12 The groove in the light-entering surface.

[0088] When the incident point of the incident light on the heterogeneous optical switch is fixed at (-5, 0), that is, the first fixed position is (-5, 0), Figure 12 When the single vertical groove type light-entering surface of the optical switch is irradiated at different incident angles, the transmission of light inside the substrate (3) is as follows: Figure 15 As shown, Figure 15 The result in FIG. 1 is a two-dimensional top view of the out-of-plane optical switch of this application.

[0089] from Figure 15 It can be obtained that when light enters the interior of the substrate (3) from a fixed position (-5, 0) through a groove-shaped light incident surface with a groove orientation perpendicular to the thickness direction of the substrate (3) at different incident angles, under the action of the light reflection structure, the light has different transmission optical paths inside the substrate (3), and compared with the case of the existing out-of-plane light guide switch with vertical incidence of light, that is, Figure 11 , the optical path is longer, which is more conducive to the absorption of light. Figure 15 The results in FIG2 also show that after the light undergoes multiple optical path transmission inside, its light intensity is significantly attenuated, which reflects that the absorption of light by the out-of-plane light guide switch in this application is enhanced.

[0090] Figure 16 This is the intensity distribution of light incident from a second fixed position to the out-of-plane light guide switch with a single vertical groove-type light incident surface provided by an embodiment of the present application at different incident angles.

[0091] When light with different incident angles enters from the second fixed position (-5, 2.5) Figure 12 In the case of an eccentric light guide switch with a vertical groove-type light incident surface, different incident angles such as Figure 16 In [(-7,4.5), (-7,3.5), (-7,2.5), (-7,1.5), (-7,0.5), (-7,-0.5)], the transmission of the incident light inside the substrate (3) is as follows: Figure 16 As shown, Figure 16 The result in FIG. 1 is a two-dimensional top view of the out-of-plane optical switch of this application.

[0092] Figure 16 The results in Figure 15 Similar to the results in , when light enters the inside of the heterogeneous plane optical switch from a fixed incident position (-5, 2.5) through a groove-type light incident surface with a groove orientation perpendicular to the thickness direction of the substrate (3) with different incident directions, the incident angle of the light is also different. With the assistance of the light reflection structure, the light has different transmission optical paths inside the substrate (3), and compared with the case where the light is perpendicularly incident on the existing heterogeneous plane optical switch, that is, Figure 11 , the optical path is longer, which is more conducive to the absorption of light. Figure 16It can also be seen from the results that after the light is transmitted through multiple optical paths inside the manager, its light intensity is significantly attenuated, which reflects the enhanced absorption of light by the out-of-plane light guide switch in this application.

[0093] Figure 17 This is the intensity distribution of light incident on the out-of-plane light guide switch with a single vertical groove-type light incident surface provided by the embodiment of the present application at different incident angles and different incident positions.

[0094] Specifically, the laser can be controlled to have different incident points and different incident angles. Figure 12 When the single vertical groove type light incident surface of the optical switch is illuminated, the light transmission inside the substrate (3) is as follows Figure 17 As shown, Figure 17 The result in FIG. 1 is a two-dimensional top view of the out-of-plane optical switch of this application.

[0095] from Figure 17 It can be obtained that when the incident light enters the inside of the heterogeneous optical switch through a groove-shaped light-entering surface with a groove orientation perpendicular to the thickness direction of the substrate (3) at different incident angles and incident points, the distance and position of the light reaching the first reflection surface after entering are different, so different transmission optical paths are exhibited inside, and compared with the case where the light is perpendicularly incident on the existing heterogeneous planar optical switch, that is, Figure 11 , the optical path is longer, which is more conducive to light absorption.

[0096] The above is only a specific implementation method of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with this technical field can easily think of changes or replacements within the technical scope disclosed in this application, which should be covered by the protection scope of the present application.

Claims

1. A skew groove type optical switch, characterized in that: include: A light-incident topological structure and a photoconductive switch device structure, wherein the light-incident topological structure includes at least one groove to form a groove-type light-incident surface, and the photoconductive switch device structure includes: a substrate; The light incident topological structure covers the substrate, and each of the grooves is provided on a first side surface of the light incident topological structure; The groove-shaped light incident surface formed by the at least one groove is used to receive incident light. The incident light is refracted when passing through the groove-shaped light incident surface to form refracted light. The refracted light enters the substrate through the groove-shaped light incident surface.

2. The optical switch of the unequal-surface groove type according to claim 1, characterized in that: The orientation direction of each groove is perpendicular to the thickness direction of the substrate.

3. The optical switch of the unequal-surface groove type according to claim 2, characterized in that: The depth of the groove is calculated by the formula h=[D-(n+1)*d] / (2n), where h is the depth of the groove-type light incident surface, D is the substrate thickness, n is the number of groove-type light incident surfaces, and d is the groove spacing of the groove-type light incident surface.

4. The optical switch of the unequal-surface groove type according to claim 1, characterized in that: An orientation direction of each of the grooves is parallel to a thickness direction of the substrate.

5. The optical switch of the unequal-surface groove type according to claim 4, characterized in that: The depth of the groove is calculated by the formula h=[L-(n+1)*d] / (2n), where h is the depth of the groove-type light incident surface, n is the number of groove-type light incident surfaces, d is the groove spacing of the groove-type light incident surface, and L is the length of the groove side.

6. The optical switch of the unequal-surface groove type according to claim 1, characterized in that: The groove is in a semi-cylindrical shape.

7. The optical switch of the unequal-surface groove type according to claim 1, characterized in that: The light incident topology structure further includes: a plurality of light reflection structures; Each of the light reflecting structures is respectively arranged on other surfaces of the light incident topological structure except the first side surface; The refracted light is reflected by the light reflecting structure.

8. The optical switch of the unequal-surface groove type according to claim 1, characterized in that: The photoconductive switch device structure further includes: a front electrode and a back electrode; The front electrode is arranged at the top of the light-incident topological structure, and the back electrode is arranged at the bottom of the light-incident topological structure.

9. The optical switch of the unequal-surface groove type according to claim 8, characterized in that: The widths of the front electrode and the back electrode are calculated using the formula We=Wg-2h; Wherein, We is the electrode width, Wg is the substrate width, and h is the depth of the groove-shaped light incident surface.

10. The optical switch of the unequal-surface groove type according to claim 7, characterized in that: The material of the substrate is any one of high-purity gallium arsenide, high-purity silicon carbide, high-purity gallium nitride, high-purity diamond, high-purity aluminum nitride, element-doped gallium arsenide, element-doped silicon carbide, element-doped gallium nitride, element-doped diamond, and element-doped aluminum nitride, and the light reflection structure is any one of a metal film, an all-dielectric film, or a metal-dielectric composite film.

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