Drive device and position adjustment device

Abstract

The invention provides a driving device and a position adjusting device. A drive device (1) according to an embodiment is provided with: a reduction gear (10) having an internal gear (11) to which power from an electric motor (8) is input and which outputs rotational force; an arm (4) which is attached to the internal gear (11) and which moves the workpiece; and a position adjustment device (5) that is provided between the arm (4) and the workpiece and adjusts the position of the workpiece with respect to the arm (4). In a state in which the reduction gear (10) and the workpiece are arranged in the horizontal direction, a portion of the reduction gear (10) overlaps a portion of the position adjustment device (5) when viewed from the vertical direction.

Description

Technical Field

[0001] The invention relates to a driving device and a position adjusting device. Background Art

[0002] Conventionally, inspection devices that use a rotating test head for conducting continuity tests on electronic components are known. The test head is rotated using a drive device (test head rotation mechanism) having a drive source such as an electric motor. This allows the test head to be moved closer to or further away from a semiconductor wafer being inspected, for example.

[0003] The drive device comprises a reduction gear having an output portion that reduces the speed of the electric motor's rotation and outputs the resultant rotation; and an arm (support arm) mounted on the output portion. The output portion has an internal threaded portion. The arm has a through-hole that communicates with the internal threaded portion. The arm is secured to the output portion by tightening a bolt inserted into the through-hole and into the internal threaded portion. Furthermore, a test head is mounted on the arm using bolts.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent No. 6650807 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] However, to perform inspections with high precision, the test head must be positioned with high accuracy relative to the inspection object. In the aforementioned prior art, the arm is simply attached to the output unit using bolts, and the test head is mounted on the arm. Therefore, adjusting the position of the test head relative to the inspection object requires adjusting the position of the drive device itself and directly adjusting the position of the test head relative to the arm. This results in a complex and cumbersome test head position adjustment.

[0009] In particular, the position adjustment of a heavy test head deteriorates operability due to its weight, and the load applied to the drive device also increases, which may increase the size of the drive device.

[0010] The present invention provides a driving device and a position adjusting device which can easily adjust the position of a workpiece such as a test head and can be miniaturized.

[0011] Solutions for solving problems

[0012] A drive device according to one embodiment of the present invention includes: a reduction gear having an output portion that receives power from a drive source and outputs a rotational force; an arm mounted on the output portion for moving a workpiece; and a position adjustment device disposed between the arm and the workpiece for adjusting the position of the workpiece relative to the arm. When the reduction gear and the workpiece are aligned horizontally, a portion of the reduction gear overlaps a portion of the position adjustment device when viewed from above and below.

[0013] The drive device of the present invention includes a position adjustment device between the arm and the workpiece. This eliminates the need to adjust the position of the drive device itself or to adjust the workpiece's position directly relative to the arm. This makes it easy to adjust the workpiece's position.

[0014] When the reduction gear and workpiece are aligned horizontally, parts of the reduction gear and the position adjustment device overlap when viewed from above and below. This minimizes the distance between the reduction gear and the workpiece. This reduces the torque acting on the reduction gear, allowing for a more compact drive unit.

[0015] In the above configuration, when the reduction gear and the workpiece are aligned in a horizontal direction, the position adjustment device may include an X adjustment unit for adjusting the position of the workpiece in the X direction, a Y adjustment unit for adjusting the position of the workpiece in the Y direction, and a Z adjustment unit for adjusting the position of the workpiece in the Z direction. The X adjustment unit, the Y adjustment unit, and the Z adjustment unit may be located at different locations.

[0016] In the above configuration, the position adjustment device may be arranged in the order of the X adjustment portion, the Z adjustment portion, and the Y adjustment portion as it moves from the speed reduction device toward the workpiece.

[0017] In the above structure, the X adjustment unit and the Z adjustment unit may be arranged on the same plane. The X adjustment unit and the Z adjustment unit may each have an operating unit for position adjustment. The operating units may also be provided on the same surface.

[0018] Another aspect of the present invention provides a position adjustment device comprising: a first member; a second member; and a connecting member that connects the first and second members and adjusts the position of the second member relative to the first member. The first member, the second member, and the connecting member each have two guide portions that enable the first and second members to slide independently in two intersecting directions.

[0019] The position adjustment device of the present invention makes it possible to easily adjust the position of the second component relative to the first component using a connecting member. Each component has two guides that allow the first and second components to slide independently in two intersecting directions. Therefore, adjusting one of the two directions does not affect the position of the other. Consequently, the position of the second component relative to the first component can be adjusted with high precision and ease.

[0020] In the above structure, the guide portion may also include: a plurality of oblong guide holes formed in the first component and the second component, respectively along the moving direction; a plurality of fixed internal threaded portions formed in the connecting member, connected to each of the guide holes; and a plurality of fixing bolts, which are fastened to the fixed internal threaded portions through the guide holes.

[0021] In the above structure, the guide portion may also include: a first guide protrusion, which is provided on either one of the connecting member and the first member along the moving direction; a first guide recess, which is provided on the other of the connecting member and the first member and is slidably engaged with the first guide protrusion; a second guide protrusion, which is provided on either one of the connecting member and the second member along the moving direction; a second guide recess, which is provided on the other of the connecting member and the second member and is slidably engaged with the second guide protrusion; and an adjustment portion, which enables the first member and the second member to slide.

[0022] In the above structure, the position adjustment device may also include an auxiliary fixing portion, which holds the connecting member and the first member in a manner that a certain gap is separated between the connecting member and the first member, and holds the connecting member and the second member in a manner that a certain gap is separated between the connecting member and the second member.

[0023] In the above structure, the auxiliary fixing portion may include: a rod; an external thread portion, which is provided at one axial end of the rod and is formed with a diameter smaller than the diameter of the rod by means of a step portion; and a head portion, which is provided at the other axial end of the rod. The connecting member may include a through hole for inserting the rod. The first component and the second component may include an auxiliary fixing internal thread portion for fastening the external thread portion. The position adjustment device may include a gasket arranged between the connecting member and the head. The length of the rod may be longer than the thickness obtained by adding the thickness of the connecting member and the thickness of the gasket.

[0024] In the above structure, the first member and the second member may each have a plurality of guide holes arranged in parallel. Alternatively, the gasket may include a first gasket having a plurality of first insertion holes formed therein, and a second gasket having a plurality of second insertion holes formed therein. Alternatively, the plurality of first insertion holes may communicate with the plurality of guide holes formed in the first member and may be inserted through the fixing bolts. Alternatively, the plurality of second insertion holes may communicate with the plurality of guide holes formed in the second member and may be inserted through the fixing bolts.

[0025] In the above structure, the first member and the second member may be arranged in a planar direction relative to each other. The connecting member may be a block. The connecting member may be arranged in a direction parallel to the arrangement direction of the first member and the second member.

[0026] Effects of the Invention

[0027] According to the driving device and the position adjusting device described above, the position adjustment of the workpiece can be easily performed, and the device can be miniaturized. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a perspective view of a driving device in an embodiment of the present invention.

[0029] Figure 2 This is an enlarged perspective view of the arm and the position adjustment device in the embodiment of the present invention.

[0030] Figure 3 It is an exploded perspective view of the position adjustment device in the embodiment of the present invention.

[0031] Figure 4 It is an exploded perspective view of the position adjustment device in the embodiment of the present invention.

[0032] Figure 5 It is an enlarged perspective view of an arm and a mounting member in the embodiment of the present invention.

[0033] Figure 6 It is a perspective view of a connecting member in an embodiment of the present invention.

[0034] Figure 7 This is a perspective view showing a portion of the position adjustment device according to the embodiment of the present invention.

[0035] Figure 8 It is along Figure 2 A cross-sectional view taken along line VIII-VIII.

[0036] Figure 9 It is a cross-sectional view of the X-direction adjustment bolt unit in the embodiment of the present invention.

[0037] Figure 10 This is an enlarged plan view of the position adjustment device and its surroundings according to the embodiment of the present invention, as viewed from the Z direction.

[0038] Figure 11 yes Figure 10 XI-direction view.

[0039] Description of Reference Numerals

[0040] 1. Drive device; 4. Arm (1st member, 2nd member); 5. Position adjustment device; 8. Electric motor (drive source); 10. Speed ​​reduction device; 11. Internal gear (output unit); 12. Gear rack (output unit); 21. Mounting member (1st member, 2nd member); 22. Connecting member; 23. Fixing bolt (operating unit); 24. Auxiliary fixing bolt (auxiliary fixing unit); 24a. Rod; 24b. External threaded portion; 24c. Head; 2 5. X-direction guide recess (guide portion, first guide recess, second guide recess); 26. Arm side X-direction guide hole (guide portion, first guide recess, second guide recess); 27. Arm auxiliary fixing internal thread portion (auxiliary fixing internal thread portion); 31. First mounting plate (first component, second component); 33. Z-direction guide recess (guide portion, first guide recess, second guide recess); 34. Mounting side Z-direction guide hole (guide portion, guide hole); 3 5. Installation auxiliary fixing internal thread portion (auxiliary fixing internal thread portion); 42. X-direction guide protrusion (guide portion, first guide protrusion, second guide protrusion); 43. Z-direction guide protrusion (guide portion, first guide protrusion, second guide protrusion); 44. Arm fixing internal thread portion (fixed internal thread portion); 45. Connection side X-direction guide hole (through hole); 46. Installation fixing internal thread portion (fixed internal thread portion); 47. Connection side Z-direction guide hole (through hole) ); 51. Arm-side X-shim (shim, 1st shim, 2nd shim); 51a. Insertion hole; 52. Mounting-side Z-shim (shim, 1st shim, 2nd shim); 52a. Insertion hole; 61. X-direction adjustment bolt unit (adjustment part); 69. Adjustment bolt (adjustment part); 71. Z-direction adjustment bolt unit (adjustment part); 74. Adjustment bolt (adjustment part); 100X, X adjustment part; 100Y, Y adjustment part; 100Z, Z adjustment part. DETAILED DESCRIPTION

[0041] Next, embodiments of the present invention will be described with reference to the drawings.

[0042] Drive unit

[0043] Figure 1 It is a perspective view of the driving device 1 .

[0044] like Figure 1 As shown, the driving device 1 is used in, for example, a probe device as an inspection device. The driving device 1 rotates a test head (an example of a workpiece in the claims) W.

[0045] The driving device 1 includes: a stage 2; a motor 3 with a reducer, which is supported by the stage 2; an arm (an example of the arm or the first component in the claims) 4, which is attached to the motor 3 with a reducer; and a position adjustment device 5, which is provided on the arm 4.

[0046] In the following description, it is assumed that the driving device 1 is installed on the ground F and the vertical direction and the horizontal direction are referred to.

[0047] The gantry 2 includes a gantry body 6 placed on a floor F and a plate-shaped support plate 7 protruding upward from the upper end of the gantry body 6. The support plate 7 has an opening 7a formed therein. The motor 3 with a speed reducer is supported by being inserted into the opening 7a.

[0048] The motor with a speed reducer 3 includes an electric motor (an example of a driving source in the claims) 8 , a drive transmission unit 9 connected to the electric motor 8 , and a speed reduction device 10 connected to the drive transmission unit 9 .

[0049] The electric motor 8 and the drive transmission unit 9 are arranged on one side of the support plate 7. The reduction gear 10 is arranged on the other side of the support plate 7. Thus, the electric motor 8, the drive transmission unit 9, and the reduction gear 10 are arranged on opposite sides of each other with the support plate 7 interposed therebetween.

[0050] The drive transmission unit 9 transmits the power of the electric motor 8 to the reduction gear 10. The drive transmission unit 9 is composed of, for example, a worm gear (not shown).

[0051] The reduction gear 10 is, for example, an eccentric oscillating type reduction gear. Specifically, the reduction gear 10 includes a cylindrical internal gear 11 and a cylindrical gear carrier 12 coaxially arranged. The gear carrier 12 is configured to be rotatable relative to the internal gear 11. Furthermore, the outer diameter of the internal gear 11 is larger than the outer diameter of the gear carrier 12.

[0052] The reduction gear 10 includes a crankshaft (not shown) rotatably supported by the carrier 12 and an oscillating external gear (not shown) rotatably supported by the crankshaft and meshing with the internal gear 11 .

[0053] The reduction gear 10 is arranged so that the direction of the rotation axis A thereof coincides with the thickness direction of the support plate 7. The gear carrier 12 of the reduction gear 10 and the drive transmission unit 9 are fixed to the support plate 7. Thus, the motor 3 with a reduction gear is supported by the support plate 7.

[0054] When power from the electric motor 8 is input to the reduction gear 10 via the drive transmission unit 9, the internal gear 11 rotates relative to the gear carrier 12. The rotation of the internal gear 11 is reduced in speed relative to the rotation of the electric motor 8 and then output. In other words, the internal gear 11 functions as the output unit of the reduction gear 10. The arm 4 is attached to this output unit.

[0055] Figure 2 It is a perspective view of the magnified arm 4 and the position adjustment device 5 .

[0056] like Figure 1、 Figure 2 As shown, the arm 4 is in a direction (in Figure 2 The arm 4 is a plate-shaped component that is longer in the vertical direction. An opening portion 4a for inserting the gear rack 12 of the reduction gear 10 is formed at the first end portion 4d in the longitudinal direction of the arm 4. When the gear rack 12 is partially inserted into the opening portion 4a, the arm 4 overlaps with the axial end face of the internal gear 11. Therefore, the arm 4 is arranged parallel to the support plate 7. In other words, the thickness direction of the arm 4 is consistent with the direction of the rotation axis A of the reduction gear 10.

[0057] Bolt insertion holes (not shown) are formed around the opening portion 4a of the arm 4 and extend through the thickness direction of the arm 4. These bolt insertion holes are arranged at equal intervals in the circumferential direction. On the end surface of the internal gear 11 that overlaps with the arm 4, internal threaded portions (not shown) are formed coaxially with the bolt insertion holes. The arm bolts 13 are passed through the bolt insertion holes and tightened to these internal threaded portions respectively. In this way, the arm 4 is mounted on the internal gear 11. The arm 4 rotates around the rotation axis A integrally with the internal gear 11.

[0058] In the following description, the posture in which the longitudinal direction of the arm 4 coincides with the vertical direction, that is, the posture in which the second end 4e of the arm 4 located on the opposite side to the first end 4d in the vertical direction faces upward is defined as the reference posture of the arm 4.

[0059] The arm 4 is formed so that its first side 4b in the width direction extends in the vertical direction in the reference posture. The second side 4c of the arm 4, which is located on the opposite side of the first side 4b in the width direction in the reference posture, is inclined so as to gradually be inclined toward the first side 4b as it moves upward. In other words, the arm 4 is formed so as to become tapered as it moves from the first end 4d toward the second end 4e. A position adjustment device 5 is provided in the portion of the arm 4 that is located on the second end 4e side and on the first side 4b side. The portion of the arm 4 that is located on the second end 4e side where the position adjustment device 5 is provided constitutes a portion of the position adjustment device 5.

[0060] In the following, in the reference posture of arm 4, the horizontal direction, which is the width direction of arm 4 (the direction of the surface of arm 4), is defined as the X direction. In the reference posture of arm 4, the horizontal direction, which is perpendicular to the X direction, is defined as the Y direction. In the reference posture of arm 4, the vertical direction is defined as the Z direction. The X direction is the horizontal direction and is the direction toward and away from the reduction gear 10.

[0061] Position adjustment device

[0062] Figure 3 This is an exploded perspective view of the position adjusting device 5 as viewed from the side opposite to the support plate 7 (the side opposite to the electric motor 8 and the drive transmission unit 9 ). Figure 4 This is an exploded perspective view of the position adjusting device 5 as viewed from the support plate 7 side.

[0063] like Figures 2 to 4 As shown, the position adjustment device 5 is provided at a position slightly offset from directly above the reduction gear 10 in the X direction. The position adjustment device 5 is configured to mainly include a mounting member 21, a connecting member 22, a fixing bolt (an example of an operating portion in the claims) 23, and an auxiliary fixing bolt 24, excluding a portion of the arm 4 on the second end 4e side.

[0064] The mounting member 21 is arranged in parallel with the arm 4 in the X direction. The connecting member 22 connects the arm 4 and the mounting member 21. The fixing bolt 23 and the auxiliary fixing bolt 24 maintain the connection between the arm 4 and the connecting member 22 and the connection between the mounting member 21 and the connecting member 22.

[0065] Figure 5 This is an enlarged perspective view of the arm 4 and the mounting member 21 as viewed from the support plate 7 side.

[0066] like Figures 3 to 5 As shown, an X-direction guide recess 25 is formed on the first surface 4f of the support plate 7, on the second end 4e side of the arm 4. The X-direction guide recess 25 is formed into a rectangular shape that is long in the Z direction when viewed from the first surface 4f. The X-direction guide recess 25 opens on the first side 4b of the arm 4. A plurality of arm-side X-direction guide holes 26 are formed in the X-direction guide recess 25, extending through the arm in the thickness direction.

[0067] For example, in this embodiment, the number of arm-side X-direction guide holes 26 is 8. The arm-side X-direction guide holes 26 are arranged in two rows in the X direction and in four rows in the Z direction. The arm-side X-direction guide holes 26 are formed into an oblong shape that is long in the X direction.

[0068] Two arm auxiliary fixing female screw portions 27 are formed on both sides of the arm side X direction guide hole 26 in the Z direction in the X direction guide recess 25. Each arm auxiliary fixing female screw portion 27 is arranged so as to be aligned with the arm side X direction guide hole 26 in the Z direction.

[0069] The mounting member 21 is formed into an L-shape when viewed from the Z direction. More specifically, the mounting member 21 includes: a first mounting plate (an example of a second member in the claims) 31 arranged to face the first side 4b of the arm 4 in the X direction; and a second mounting plate 32 extending in the Y direction from the end of the first mounting plate 31 on the side opposite to the arm 4.

[0070] The first mounting plate 31 is arranged on the same plane as the arm 4. In other words, the thickness direction of the first mounting plate 31 is parallel to the thickness direction of the arm 4. The first mounting plate 31 is formed into a rectangular shape that is long in the Z direction when viewed from the Y direction.

[0071] A Z-direction guide recess 33 is formed on the first surface 31a of the first mounting plate 31, located on the support plate 7 side. The Z-direction guide recess 33 extends over the entire Z-direction area of ​​the first mounting plate 31 as viewed from the first surface 31a. Specifically, the Z-direction guide recess 33 opens at both ends of the first mounting plate 31 in the Z-direction. Multiple mounting-side Z-direction guide holes 34 are formed in the Z-direction guide recess 33, extending through the first mounting plate 31 in the thickness direction.

[0072] For example, in this embodiment, the number of mounting-side Z-direction guide holes 34 is 8. The mounting-side Z-direction guide holes 34 are arranged in two rows in the X direction and in four rows in the Z direction. The mounting-side Z-direction guide holes 34 are formed into an oblong shape that is long in the Z direction.

[0073] The Z-direction guide recess 33 has two auxiliary mounting fixing female screw portions 35 formed on both sides of the mounting side Z-direction guide hole 34 in the Z-direction. The auxiliary mounting fixing female screw portions 35 are arranged so as to align with the mounting side Z-direction guide hole 34 in the Z-direction.

[0074] The second mounting plate 32 extends from the first mounting plate 31 toward the side opposite the support plate 7. The thickness of the second mounting plate 32 coincides with the X-direction. A plurality of Y-direction guide holes 36 are formed in the second mounting plate 32, extending through the second mounting plate 32 in the thickness direction. The Y-direction guide holes 36 are formed into an oblong shape that is elongated in the Y-direction. The Y-direction guide holes 36 are used to attach the test head W to the second mounting plate 32.

[0075] Specifically, the test head W overlaps with the first surface 32a of the second mounting plate 32, which is located on the side opposite to the first mounting plate 31 (speed reduction gear 10). Furthermore, bolts (not shown) are inserted into the Y-direction guide holes 36 from the second surface 32b of the second mounting plate 32, which is located on the first mounting plate 31 side (speed reduction gear 10 side). By tightening the bolts against the test head W, the test head W can be mounted on the second mounting plate 32.

[0076] At this time, with the bolts temporarily tightened, the position of the test head W in the Y direction can be adjusted while the arm 4 is in its base position. Y-direction guide hole 36 is formed into an oblong shape that is elongated in the Y direction, thus serving as a guide for moving the test head W in the Y direction. In this way, the second mounting plate 32 functions as a Y adjustment unit 100Y for adjusting the Y-direction position of the test head W.

[0077] Figure 6It is a perspective view of the connecting member 22 .

[0078] like Figure 3 、 Figure 4 、 Figure 6 As shown, the connecting member 22 is a block having a square shape when viewed from the Y direction. More specifically, the connecting member 22 includes a base plate 41 having a square, plate-like shape when viewed from the Y direction. The thickness direction of the base plate 41 is aligned with the Y direction. The base plate 41 is arranged so as to overlap with the first surface 4f of the arm 4 and the first surface 31a of the first mounting plate 31. Thus, the base plate 41 is arranged parallel to the arm 4 and the first mounting plate 31. In other words, the base plate 41 is arranged so as to face a direction parallel to the arrangement direction of the arm 4 and the first mounting plate 31.

[0079] The base plate 41 has: a first surface 41b overlapping the first surface 4f of the arm 4 and the first surface 31a of the first mounting plate 31; a second surface 41c located on the opposite side of the first surface 41b; and a side surface 41d orthogonal to the first surface 41b and the second surface 41c.

[0080] The bottom plate 41 has four side surfaces 41d with chamfered portions 41a formed at corners closest to the reduction gear 10. The chamfered portions 41a prevent contact between the bottom plate 41 and the reduction gear 10 when the bottom plate 41 is in place.

[0081] An X-direction guide protrusion 42 and a Z-direction guide protrusion 43 are integrally formed on the first surface 41b of the base plate 41. The X-direction guide protrusion 42 is positioned closer to the arm 4 than the center of the base plate 41 in the X direction. The X-direction guide protrusion 42 is formed into a rectangular parallelepiped shape to correspond to the X-direction guide recess 25. The X-direction guide protrusion 42 fits into the X-direction guide recess 25. The X-direction guide protrusion 42 is slidable in the X direction along the X-direction guide recess 25.

[0082] A plurality of arm-fixing internal threads 44 are formed on the X-direction guide protrusion 42. The number of arm-fixing internal threads 44 is the same as the number of the arm-side X-direction guide holes 26. The arm-fixing internal threads 44 are arranged so as to correspond to the positions of the arm-side X-direction guide holes 26. Each arm-fixing internal thread 44 communicates with the corresponding arm-side X-direction guide hole 26.

[0083] Two connecting-side X-direction guide holes (an example of through-holes in the claims) 45 are formed on the X-direction guide protrusion 42, on either side of the arm-fixing internal thread portion 44 in the Z direction. Each connecting-side X-direction guide hole 45 is formed into an oblong shape that is elongated in the X direction and penetrates the arm in the thickness direction. The connecting-side X-direction guide holes 45 are arranged to correspond to the position of the arm auxiliary fixing internal thread portion 27. Each connecting-side X-direction guide hole 45 communicates with the arm auxiliary fixing internal thread portion 27.

[0084] The Z-direction guide protrusion 43 is positioned closer to the first mounting plate 31 than the center of the base plate 41 in the X-direction. The top surface 43a of the Z-direction guide protrusion 43 (the end surface facing the first mounting plate 31) and the top surface 42a of the X-direction guide protrusion 42 (the end surface facing the arm 4) are coplanar. The Z-direction guide protrusion 43 is formed into a rectangular parallelepiped shape to correspond to the Z-direction guide recess 33. The Z-direction guide protrusion 43 fits into the Z-direction guide recess 33. The Z-direction guide protrusion 43 is slidable in the Z-direction along the Z-direction guide recess 33.

[0085] A plurality of mounting and fixing internal thread portions 46 are formed on the Z-direction guide protrusion 43. The number of mounting and fixing internal thread portions 46 is the same as the number of the mounting-side Z-direction guide holes 34. The mounting and fixing internal thread portions 46 are arranged so as to correspond to the positions of the mounting-side Z-direction guide holes 34. Each mounting and fixing internal thread portion 46 communicates with the corresponding mounting-side Z-direction guide hole 34.

[0086] Two connecting-side Z-direction guide holes (an example of through-holes in the claims) 47 are formed on the X-direction guide protrusion 42, on either side of the mounting and fixing internal thread portion 46 in the Z-direction. These connecting-side Z-direction guide holes 47 are formed into an oblong shape that is elongated in the Z-direction and penetrates the body in the thickness direction. These connecting-side Z-direction guide holes 47 are positioned to correspond to the positions of the auxiliary mounting and fixing internal thread portion 35. Each connecting-side Z-direction guide hole 47 communicates with the auxiliary mounting and fixing internal thread portion 35.

[0087] Figure 7 It is a partial perspective view of the perspective position adjusting device 5 . Figure 7 The orientation of the stereogram is Figure 2 Same orientation. Figure 8 It is along Figure 2 A cross-sectional view taken along line VIII-VIII.

[0088] like Figures 2 to 4 、 Figure 7 、 Figure 8 As shown, each fixing bolt 23 is inserted into the arm-side X-direction guide hole 26 and the mounting-side Z-direction guide hole 34 , respectively.

[0089] Each fixing bolt 23 is inserted into the corresponding guide holes 26 and 34 from the second surface 4g of the arm 4 and the second surface 31b of the first mounting plate 31, located opposite the first surface 31a, via washers 51 and 52 (arm-side X-washer 51 and mounting-side Z-washer 52). Furthermore, each fixing bolt 23 is tightened to the arm-fixing internal thread portion 44 and the mounting-fixing internal thread portion 46 of the connecting member 22, respectively. Thus, the connecting member 22 is fixed to the arm 4 and the first mounting plate 31.

[0090] Each spacer 51, 52 is positioned between the arm 4, the first mounting plate 31, and the head 23a of each fixing bolt 23. The arm-side X-spacer 51 is formed into a rectangular shape that is elongated in the Z direction when viewed from the Y direction, so as to completely cover each arm-side X-direction guide hole 26 from the second surface 4g. The arm-side X-spacer 51 has a plurality of (e.g., eight in this embodiment) insertion holes 51a formed therein. Each insertion hole 51a communicates with each arm-side X-direction guide hole 26 and allows the fixing bolt 23 to be inserted therethrough.

[0091] The mounting-side Z-direction gasket 52 is formed into a rectangular shape that is long in the Z direction when viewed from the Y direction, so as to completely cover each mounting-side Z-direction guide hole 34 from the second surface 31b. The mounting-side Z-direction gasket 52 has a plurality of (e.g., eight in this embodiment) insertion holes 52a formed therein. Each insertion hole 52a communicates with a respective mounting-side Z-direction guide hole 34 and allows the fixing bolt 23 to be inserted therein.

[0092] The auxiliary fixing bolts 24 are inserted into the connecting side X-direction guide hole 45 and the connecting side Z-direction guide hole 47. The auxiliary fixing bolts 24 are so-called shoulder bolts.

[0093] The auxiliary fixing bolt 24 is formed integrally of a shank 24a, an externally threaded portion 24b formed at one axial end of the shank 24a, and a head 24c formed at the other axial end of the shank 24a. The externally threaded portion 24b is formed to have a diameter smaller than that of the shank 24a via a step 24d.

[0094] Each auxiliary fixing bolt 24 is inserted into the corresponding guide holes 45 and 47 from the second surface 41c of the base plate 41 via washers 53 and 54 (connection-side X-washer 53 and connection-side Z-washer 54). Furthermore, the external threaded portion 24b of each auxiliary fixing bolt 24 is fastened to the arm auxiliary fixing internal threaded portion 27 and the mounting auxiliary fixing internal threaded portion 35 of the arm 4, respectively.

[0095] Each washer 53, 54 is positioned between the connecting member 22 and the head 24c of each auxiliary fixing bolt 24. The connecting-side X-wafer 53 is formed into a rectangular shape that is elongated in the X direction when viewed from the Y direction, covering the two connecting-side X-direction guide holes 45 arranged along the X direction. Specifically, one connecting-side X-wafer 53 is provided, one above and one below. Two through-holes 53a are formed in each connecting-side X-direction washer 53. These two through-holes 53a communicate with the corresponding connecting-side X-direction guide holes 45 and allow the shaft 24a of the auxiliary fixing bolt 24 to be inserted through them.

[0096] The connecting-side Z-shim 54 is formed into a rectangular shape that is elongated in the X direction when viewed from the Y direction, so as to cover the two connecting-side Z-direction guide holes 47 arranged along the X direction. One connecting-side Z-shim 54 is provided, one above and one below. Two through-holes 54a are formed in the connecting-side Z-direction gasket 54. The two through-holes 54a communicate with the corresponding connecting-side Z-direction guide holes 47 and allow the shaft 24a of the auxiliary fixing bolt 24 to be inserted through them.

[0097] like Figure 8 As shown, the length L1 of the shank 24a of the auxiliary fixing bolt 24 is slightly longer than the thickness T1 of the connecting member 22 plus the thickness T2 of each washer 53, 54. The thickness T1 of the connecting member 22 is the thickness T1 of the base plate 41 plus the thickness of the X-direction guide protrusion 42 or the Z-direction guide protrusion 43. Therefore, when the auxiliary fixing bolt 24 is fully tightened with the auxiliary fixing internal threaded portions 27, 35, a slight gap remains between the X-direction guide recess 25, the Z-direction guide recess 33, and the head 24c of the auxiliary fixing bolt 24.

[0098] In other words, even when the auxiliary fixing bolt 24 is completely tightened against the arm 4 and the first mounting plate 31, the connecting member 22 still wobbles slightly relative to the arm 4 and the first mounting plate 31. The auxiliary fixing bolt 24 is completely tightened until the step 24d of the auxiliary fixing bolt 24 abuts against the X-direction guide recess 25 and the Z-direction guide recess 33. The size of this gap is, for example, approximately 40 μm.

[0099] like Figure 3 、 Figure 4 as well as Figure 8 As shown, an auxiliary plate 55 is fixed to the second surface 41c of the base plate 41 at a position away from the center of each gasket 53 and 54 using multiple (for example, four in this embodiment) bolts 56. The auxiliary plate 55 is formed in a square shape when viewed in the Y direction. The four corners of the auxiliary plate 55 are fixed by bolts 56. The thickness of the auxiliary plate 55 is thicker than the thickness of each gasket 53 and 54.

[0100] like Figures 2 to 4 、 Figure 7 as well as Figure 8 As shown, the second surface 41c of the base plate 41 is covered by a cover 57 from above the auxiliary plate 55, the washers 53 and 54, and the head 24c of the auxiliary fixing bolt 24. The cover 57 has an opening 57a on the base plate 41 side and is formed into a square box shape corresponding to the shape of the base plate 41. Specifically, the cover 57 includes a square top plate 57b and four side plates 57c extending from the four edges of the top plate 57b.

[0101] The side plate 57c covers the side surface 41d of the base plate 41. The side plate 57c is fixed to the side surface 41d of the base plate 41 using bolts (not shown). A recessed portion 57d is formed in the center of the side wall 57c located on the reduction gear 10 side of the pair of side walls 57c that face each other in the X direction. The recessed portion 57d is formed in a semicircular shape to prevent interference with the X-direction adjustment bolt unit 61, which will be discussed later.

[0102] Figure 9 It is a cross-sectional view of the X-direction adjustment bolt unit 61 .

[0103] like Figures 2 to 4 、 Figure 6 、 Figure 7 、 Figure 9 As shown, an internal thread portion 41e is formed at the center in the Z direction on the side 41d of the bottom plate 41 located on the reduction gear 10 side (see FIG. Figure 6 、 Figure 9 ) An X-direction adjustment bolt unit 61 is attached to the internal thread portion 41e.

[0104] The X-direction adjustment bolt unit 61 mainly includes a rectangular parallelepiped support block 62 and an adjustment bolt 69 rotatably supported by the support block 62 .

[0105] The support block 62 is mounted on the first surface 4f of the arm 4 by means of bolts 60. The support block 62 is formed with two bolt insertion holes 62a for inserting the bolts 60. The first surface 4f of the arm 4 is formed with an internal thread portion 14 (see FIG. Figure 5 The support block 62 is attached to the first surface 4 f of the arm 4 by fastening the bolt 60 inserted into the bolt insertion hole 62 a to the internal thread portion 14 .

[0106] like Figure 9 As shown, a through-hole 62b is formed in the support block 62 between the two bolt insertion holes 62a. The axial direction of the through-hole 62b is perpendicular to the axial direction of each bolt insertion hole 62a. When the support block 62 is attached to the arm 4, the through-hole 62b and the internal threaded portion 41e of the base plate 41 are coaxially located. Flanged washers 63 are inserted into the through-hole 62b from both axial sides.

[0107] The flanged washer 63 is formed integrally with a cylindrical portion 64 inserted into the through hole 62 b and an outer flange portion 65 extending radially outward from an axial end of the cylindrical portion 64 . An adjustment bolt 69 is inserted into the cylindrical portion 64 .

[0108] When the two cylindrical portions 64 are inserted into the through-holes 62b, the tips of the opposite sides of the outer flange portions 65 abut against each other. In this abutting state, a small gap is formed between the surface of the support block 62 and the outer flange portions 65.

[0109] The adjusting bolt 69 includes an external thread portion 66 inserted into the cylindrical portion 64 and a head portion 67 integrally formed with one axial end portion of the external thread portion 66. The adjusting bolt 69 is inserted into the through hole 62b of the support block 62 and is then fastened to the internal thread portion 41e of the base plate 41. In order to avoid interference with the external thread portion 66 fastened to the internal thread portion 41e, a recess 57d is formed in the cover 57 (see FIG. Figure 7 ).

[0110] Two nuts 68 a and 68 b (a first nut 68 a and a second nut 68 b ) are attached to a portion of the external thread portion 66 located between the support block 62 and the bottom plate 41 .

[0111] Of the two nuts 68a and 68b, the first nut 68a on the support block 62 side is tightened so as to abut against the outer flange portion 65 of the flanged washer 63. Thus, the two flanged washers 63 are clamped between the first nut 68a and the head 67 of the adjustment bolt 69.

[0112] When the tips of the cylindrical portions 64 of the two flanged washers 63 abut against each other, a small gap is formed between the surface of the support block 62 and the outer flange portion 65. Therefore, the adjustment bolt 69 is rotatably supported by the support block 62.

[0113] Of the two nuts 68 a and 68 b , the second nut 68 b on the bottom plate 41 side is used to maintain the fastened state of the external thread portion 66 relative to the bottom plate 41 (details will be described later).

[0114] like Figure 2 、 Figure 3 、 Figure 7 as well as Figure 8 As shown, a Z-direction adjustment bolt unit 71 is attached to the lower end of the connecting member 22 and the lower end of the first mounting plate 31 so as to straddle these connecting member 22 and the first mounting plate 31 .

[0115] The basic structure of the Z-direction adjustment bolt unit 71 is the same as that of the aforementioned X-direction adjustment bolt unit 61. Specifically, the Z-direction adjustment bolt unit 71 includes a support block 72, an adjustment bolt 74 rotatably supported on the support block 72 via two flanged washers 73, and two nuts 76a and 76b (a first nut 76a and a second nut 76b) mounted on the externally threaded portion 75 of the adjustment bolt 74.

[0116] The support block 72 is attached to the lower end of the Z-direction guide protrusion 43 of the connecting member 22. The support block 72 is formed into an L-shape when viewed from the X-direction. This allows the external thread portion 75 of the adjustment bolt 74 to be fastened to the internal thread portion (not shown) formed at the lower end of the first mounting plate 31. Two nuts 76a and 76b attached to the external thread portion 75 are positioned between the support block 72 and the first mounting plate 31.

[0117] The two flanged washers 73 are sandwiched between the first nut 76a on the support block 72 side and the head 76 of the adjustment bolt 74. Therefore, the adjustment bolt 74 is rotatably supported by the support block 72.

[0118] Of the two nuts 76 a and 76 b , the second nut 76 b on the first mounting plate 31 side is used to maintain the fastened state of the external thread portion 75 relative to the first mounting plate 31 (details will be described later).

[0119] <Positional Relationship between Positioning Device and Speed ​​Reducer>

[0120] Then, based on Figure 2 、 Figure 10 The positional relationship between the position adjusting device 5 and the reduction gear 10 will be described.

[0121] Figure 10 It is a plan view of the driving device 1 , showing an enlarged view of the position adjusting device 5 and its surroundings, as viewed from the Z direction.

[0122] like Figure 2 、 Figure 10 As shown, in the reference posture of the arm 4, the reduction gear 10 and the second mounting plate 32 are opposed to each other in the X direction. The test head W is mounted on the second mounting plate 32. Therefore, in the reference posture of the arm 4, the reduction gear 10 and the test head W are aligned in the X direction (horizontal direction).

[0123] In this reference posture of the arm 4, when viewed from the Z direction, a portion of the reduction gear 10 overlaps a portion of the position adjustment device 5. Specifically, when viewed from the Z direction, the X-direction guide protrusion 42 of the connecting member 22 of the position adjustment device 5, the X-direction adjustment bolt unit 61, and their surroundings overlap a portion of the reduction gear 10.

[0124] <Function of the Position Adjustment Device>

[0125] Next, the operation of the position adjusting device 5 will be described.

[0126] The position adjustment device 5 adjusts the position of the test head W in the X direction and the Z direction (hereinafter referred to as X direction position adjustment and Y direction position adjustment) in addition to adjusting the position of the test head W by the second mounting plate 32 in the Y direction.

[0127] First, the position adjustment in the X direction performed by the position adjusting device 5 will be described.

[0128] During X-direction position adjustment, the fixing bolt 23, which is secured to the X-direction guide protrusion 42 of the connecting member 22 via the arm 4, is loosened. At this point, the arm 4 and connecting member 22 are secured by the auxiliary fixing bolt 24 to a degree that allows for slight play. Therefore, even if the fixing bolt 23 is loosened, the posture of the arm 4 and connecting member 22 does not change significantly compared to when the fixing bolt 23 is fully tightened. The postures of the arm 4 and connecting member 22 are maintained within a certain range. Furthermore, the connecting-side X-direction guide hole 45, into which the auxiliary fixing bolt 24 is inserted, is formed into an oblong shape that is elongated in the X-direction. Consequently, the arm 4 and connecting member 22 are able to slide relative to the arm 4 in the X-direction, with the connecting member 22 being able to slide relative to the arm 4 while maintaining their posture within a certain range. Specifically, the connecting-side X-direction guide hole 45, the X-direction guide protrusion 42, and the X-direction guide recess 25 into which the X-direction guide protrusion 42 engages guide the sliding movement of the connecting member 22 relative to the arm 4 in the X-direction.

[0129] In this state, tighten the adjustment bolt 69 of the X-direction adjustment bolt unit 61. This causes the external thread portion 66 of the adjustment bolt 69 to be pushed in or pulled out of the internal thread portion 41e formed on the bottom plate 41 of the connecting member 22. At this point, the adjustment bolt 69 is rotatably supported by the support block 62. Therefore, tightening the adjustment bolt 69 causes the connecting member 22 to slide relative to the arm 4 in the X-direction.

[0130] The mounting member 21 is fixed to the connecting member 22 , and thus the position adjustment in the X direction is performed. Thereafter, the position adjustment in the X direction is completed by tightening the fixing bolts 23 to the X-direction guide protrusions 42 of the connecting member 22 .

[0131] Thus, the X-direction guide protrusion 42 of the connecting member 22, a portion of the arm 4 (such as the X-direction guide recess 25), the fixing bolt 23, the auxiliary fixing bolt 24, and the X-direction adjustment bolt unit 61 function as an X-adjustment unit 100X for adjusting the X-direction position of the test head W. The fixing bolt 23, which is fastened to the X-direction guide protrusion 42, functions as an operating unit for adjusting the position of the X-adjustment unit 100X.

[0132] The auxiliary fixing bolts 24 maintain the posture of the arm 4 and the connecting member 22 within a certain range. This prevents any change in posture (misalignment) of the connecting member 22 when tightening the fixing bolts 23 from a loosened state. The phrase "the posture of the first mounting plate 31 and the connecting member 22 is within a certain range" means that any change in posture of the connecting member 22 when tightening the fixing bolts 23 from a loosened state is within a certain value.

[0133] The fixing bolt 23 is fastened to the X-direction guide protrusion 42 via the arm-side X-shim 51. The arm-side X-shim 51 is formed into a rectangular shape that is long in the Z-direction when viewed from the Y-direction, so as to completely cover each arm-side X-direction guide hole 26 from the second surface 4g. Therefore, the head 23a of the fixing bolt 23 does not locally press against the second surface 4g of the arm 4. Consequently, the surface pressure of the fixing bolt 23 on the arm 4 can be reduced.

[0134] Next, the position adjustment in the Z direction performed by the position adjusting device 5 will be described.

[0135] During Z-direction position adjustment, the fixing bolts 23, which are fastened to the Z-direction guide protrusions 43 of the connecting member 22 via the first mounting plate 31, are loosened. At this point, the first mounting plate 31 and the connecting member 22 are secured by the auxiliary fixing bolts 24 to a degree that allows for slight play. Furthermore, the connecting-side Z-direction guide holes 47, into which the auxiliary fixing bolts 24 are inserted, are formed into an oblong shape that is elongated in the Z-direction. Consequently, even when the fixing bolts 23 are loosened, the first mounting plate 31 can slide relative to the connecting member 22 in the Z-direction while maintaining the position of the first mounting plate 31 and the connecting member 22 within a certain range. Specifically, the connecting-side Z-direction guide holes 47, the Z-direction guide protrusions 43, and the Z-direction guide recesses 33 into which the Z-direction guide protrusions 43 engage, guide the sliding movement of the first mounting plate 31 relative to the connecting member 22 in the Z-direction.

[0136] In this state, tighten the adjustment bolt 74 of the Z-direction adjustment bolt unit 71. The function of the Z-direction adjustment bolt unit 71 is similar to that of the X-direction adjustment bolt unit 61 described above. Specifically, tightening the adjustment bolt 74 causes the first mounting plate 31 to slide in the Z-direction relative to the connecting member 22, thereby adjusting its position in the Z-direction. Subsequently, tightening the fixing bolt 23 with the Z-direction guide protrusion 43 of the connecting member 22 completes the Z-direction position adjustment.

[0137] Thus, the Z-direction guide protrusion 43 of the connecting member 22 , the first mounting plate 31 , the fixing bolts 23 , the auxiliary fixing bolts 24 , and the Z-direction adjustment bolt unit 71 function as a Z adjustment unit 100Z for adjusting the position of the test head W in the Z direction.

[0138] The fixing bolt 23 fastened to the Z-direction guide protrusion 43 functions as an operation portion for adjusting the position of the Z adjustment portion 100Z.

[0139] The postures of the first mounting plate 31 and the connecting member 22 are maintained within a certain range by the auxiliary fixing bolts 24. Therefore, it is possible to suppress a change in the posture (displacement) of the connecting member 22 when tightening the fixing bolts 23 from a loosened state.

[0140] The fixing bolt 23 is fastened to the Z-direction guide protrusion 43 via the mounting-side Z-shim 52. The mounting-side Z-shim 52 is formed into a rectangular shape that is long in the Z-direction when viewed from the Y-direction, so as to completely cover each mounting-side Z-direction guide hole 34 from the second surface 31b. Therefore, the head 23a of the fixing bolt 23 does not locally press against the second surface 31b of the first mounting plate 31. Consequently, the surface pressure of the fixing bolt 23 on the first mounting plate 31 can be reduced.

[0141] Furthermore, the fixing bolts 23 are inserted into the corresponding guide holes 26 and 34 from the second surface 4g of the arm 4 and the second surface 31b of the first mounting plate 31, which face the same direction.

[0142] <Driver Operation>

[0143] Then, based on Figure 11 The operation of the driving device 1 will be described.

[0144] Figure 11 yes Figure 10 XI-direction view.

[0145] like Figure 11 As shown, if the motor 3 with a speed reducer is driven and the electric motor 8 is driven, the rotational force is transmitted to the arm 4 via the speed reducer 10. As a result, the arm 4 rotates around the rotation axis A (see Figure 11 As the arm 4 rotates, the mounting member 21 on which the test head W is mounted moves up and down in a rotating manner (see arrow M1). Figure 11 As a result, for example, the test head W can be brought close to the inspection object or can be moved away from the inspection object.

[0146] In the reference position of arm 4, reduction gear 10 and test head W (second mounting plate 32) are aligned in the X-direction (horizontally), and when viewed from the Z-direction, a portion of reduction gear 10 overlaps a portion of position adjustment device 5. This configuration allows reduction gear 10 and test head W (second mounting plate 32) to be aligned in the X-direction (horizontally) while minimizing the distance L2 between reduction gear 10 (rotation axis A) and test head W (second mounting plate 32).

[0147] That is, for example, Figure 11 As indicated by the two-dot chain line in FIG, a case is assumed where the reduction gear 10 and the test head W (second mounting plate 32) are aligned in the X direction (horizontal direction), and the position adjustment device 5 is disposed between the reduction gear 10 and the test head W. In this case, the distance L3 between the reduction gear 10 (rotation axis A) and the test head W (second mounting plate 32) is longer than the distance L2.

[0148] <Function and Effect>

[0149] Therefore, according to the aforementioned drive device 1, even if the position adjustment device 5 is provided between the arm 4 and the second mounting plate 32, the distance L2 between the reduction gear 10 (rotation axis A) and the test head W (second mounting plate 32) can be minimized. Consequently, the torque acting on the reduction gear 10 can be reduced accordingly, allowing the drive device 1 to be miniaturized.

[0150] The drive device 1 is provided with a position adjustment device 5 between the arm 4 and the second mounting plate 32. Therefore, there is no need to adjust the mounting position of the drive device 1 itself to adjust the position of the test head W. Instead, the position of the test head W can be adjusted directly relative to the arm 4. Therefore, the position of the test head W can be easily adjusted.

[0151] Position adjustment device 5 includes an X adjustment unit 100X, a Y adjustment unit 100Y, and a Z adjustment unit 100Z. These adjustment units 100X, 100Y, and 100Z are located at different locations. Therefore, the X, Y, and Z directions of the test head W can be adjusted independently. In other words, adjusting any one of the X, Y, and Z directions of the test head W does not affect the position in the other directions. Consequently, the position of the test head W can be adjusted easily and with high precision.

[0152] The position adjustment device 5 is arranged in the order of the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y from the speed reducer 10 toward the test head W. Therefore, the arrangement space of the adjustment units 100X, 100Y, and 100Z can be minimized.

[0153] For example, consider the case where the Z adjustment unit 100Z is positioned closest to the reduction gear 10. In this case, if, for example, a portion of the reduction gear 10 is positioned so that it overlaps a portion of the position adjustment device 5 when viewed from the Z direction, there is a possibility that the position adjustment device 5 may come into contact with the reduction gear 10 as it moves up and down. Therefore, it is necessary to position the position adjustment device 5 above the reduction gear 10 with sufficient distance, or to arrange the reduction gear 10 and the position adjustment device 5 side by side in the X direction. This would cause the X adjustment unit 100X to be positioned further away from the reduction gear 10, increasing the size of the position adjustment device 5.

[0154] Thus, by arranging the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y in this order from the reduction gear 10 toward the test head W, the position adjustment device 5 can be miniaturized, and consequently, the drive device 1 can be miniaturized.

[0155] In the position adjustment device 5, the X adjustment unit 100X and the Z adjustment unit 100Z are arranged on the same plane (the XZ plane). The fixing bolts 23 used to adjust these adjustment units 100X and 100Z are arranged on the same surface (the second surface 4g of the arm 4 and the second surface 31b of the first mounting plate 31). By arranging the fixing bolts 23 on the same surface, the operability of the X adjustment unit 100X and the Z adjustment unit 100Z can be improved.

[0156] The position adjustment device 5 includes: a portion of the arm 4; a first mounting plate 31; and a connecting member 22 connecting the arm 4 and the first mounting plate 31. The guide protrusions 42 and 43 and the guide recesses 25 and 33 are provided on the arm 4, the first mounting plate 31, and the connecting member 22 so as to be slidable in intersecting X and Z directions. Therefore, the connecting member 22 allows for easy position adjustment of the first mounting plate 31 relative to the arm 4. Adjustment in either the X or Z direction does not affect the position of the other. Consequently, the position of the first mounting plate 31 relative to the arm 4 can be easily and precisely adjusted.

[0157] The arm 4 is formed with multiple arm-side X-direction guide holes 26 extending along the X direction. The first mounting plate 31 is formed with multiple mounting-side Z-direction guide holes 34 extending along the Z direction. The fixing bolts 23 are fastened to the connecting member 22 via these guide holes 26 and 34, respectively. Therefore, the guide holes 26 and 34 can restrict the movement of the arm 4 and the first mounting plate 31. This allows for easy movement of the arm 4 and the first mounting plate 31 in the X and Z directions relative to the connecting member 22, making it easy to adjust the position of the test head W.

[0158] The X adjustment unit 100X includes an X-direction guide protrusion 42 and an X-direction guide recess 25 to restrict movement in the X direction. The X adjustment unit 100X includes an X-direction adjustment screw unit 61 (adjustment screw 69) as an adjustment unit for adjusting the position in the X direction. The Z adjustment unit 100Z includes a Z-direction guide protrusion 43 and a Z-direction guide recess 33 to restrict movement in the Z direction. The Z adjustment unit 100Z includes a Z-direction adjustment screw unit 71 (adjustment screw 74) as an adjustment unit for adjusting the position in the Z direction.

[0159] Therefore, the movement direction of the arm 4 and the first mounting plate 31 relative to the connecting member 22 can be precisely controlled. Consequently, the position of the test head W can be adjusted with high precision. By simply tightening the adjustment bolts 69 and 74 using the adjustment bolt units 61 and 71, the relative positions can be finely adjusted.

[0160] The position adjustment device 5 includes auxiliary fixing bolts 24 as auxiliary fixing portions. These auxiliary fixing portions maintain the connecting member 22 in a state where it can slightly wobble relative to the arm 4 and the first mounting plate 31. Consequently, even if the fixing bolts 23 are loosened, the position of the arm 4 and the connecting member 22 is maintained within a certain range, allowing the connecting member 22 to slide in the X direction relative to the arm 4. Furthermore, even if the fixing bolts 23 are loosened, the position of the first mounting plate 31 and the connecting member 22 is maintained within a certain range, allowing the first mounting plate 31 to slide in the Z direction relative to the connecting member 22.

[0161] As a result, it is possible to suppress a change in the posture (dislocation) of the connecting member 22 when tightening the fixing bolts 23 from a loosened state. Therefore, the position adjustment of the test head W can be performed more easily and accurately.

[0162] As described above, to maintain the connection member 22 with some play, the auxiliary fixing bolt 24 consists of a shank 24a, externally threaded portions 24b formed at both axial ends of the shank 24a, and a head 24c. The length L1 of the shank 24a is slightly longer than the thickness T2 of each washer 53, 54 plus the thickness T1 of the connection member 22. Therefore, when the auxiliary fixing bolt 24 and the auxiliary fixing internally threaded portions 27, 35 are tightened until the stepped portion 24d of the auxiliary fixing bolt 24 abuts the X-direction guide recess 25 and the Z-direction guide recess 33, a slight gap is created between the X-direction guide recess 25, the Z-direction guide recess 33, and the head 24c of the auxiliary fixing bolt 24. Consequently, even if the fixing bolt 23 becomes loose, the position of the arm 4 and the first mounting plate 31 relative to the connection member 22 can be reliably maintained within a predetermined range.

[0163] The fixing bolt 23 is fastened to the connecting member 22 via the arm-side X-shim 51 and the mounting-side Z-shim 52. The arm-side X-shim 51 is formed into a rectangular shape that is long in the Z direction when viewed from the Y direction, so that it completely covers each arm-side X-direction guide hole 26 from the second surface 4g side. The mounting-side Z-shim 52 is formed into a rectangular shape that is long in the Z direction when viewed from the Y direction, so that it completely covers each mounting-side Z-direction guide hole 34 from the second surface 31b side. This prevents the head 23a of the fixing bolt 23 from partially pressing against the second surface 4g of the arm 4 and the second surface 31b of the first mounting plate 31. Consequently, the surface pressure of the fixing bolt 23 on the arm 4 and the first mounting plate 31 can be reduced, preventing damage to the arm 4 and the first mounting plate 31.

[0164] The arm 4 and the first mounting plate 31 are arranged in parallel on the same plane. The connecting member 22 (base plate 41) is arranged so as to face a direction parallel to the arrangement direction of the arm 4 and the first mounting plate 31. Therefore, compared to a case where the arm 4 and the first mounting plate 31 are arranged so as to overlap in the thickness direction, the position adjusting device 5 can be made thinner.

[0165] The present invention is not limited to the above-described embodiment, and includes embodiments in which various modifications are added to the above-described embodiment without departing from the spirit of the present invention.

[0166] For example, in the above-described embodiment, the driving device 1 is described as being used in a probe device as an inspection device. The driving device 1 is described as rotating a test head W as a workpiece. However, the present invention is not limited to this embodiment, and the driving device 1 is applicable to devices that drive various workpieces.

[0167] In the above embodiment, the drive device 1 is described as including the position adjustment device 5. The position adjustment device 5 is described as including an X adjustment unit 100X, a Z adjustment unit 100Z, and a Y adjustment unit 100Y. However, this is not limiting; the position adjustment device 5 only needs to be able to adjust the position of the workpiece. The position adjustment device 5 only needs to have a portion of the reduction gear 10 overlap with a portion of the position adjustment device 5 when viewed in the Z direction in the reference posture of the arm 4.

[0168] The position adjusting device 5 preferably includes a guide portion that is slidable in at least two directions intersecting each other.

[0169] In the above embodiment, the guide portion is described as follows: the X-direction guide protrusion 42, the X-direction guide recess 25, the arm-side X-direction guide hole 26, the Z-direction guide protrusion 43, the Z-direction guide recess 33, and the mounting-side Z-direction guide hole 34 are formed. However, this is not limiting; the guide portion may be a structure that restricts the movement of the connecting member 22 to two directions relative to the arm 4 and the first mounting plate 31.

[0170] In the above embodiment, the arm 4 is provided with the X-direction guide recess 25, and the first mounting plate 31 is provided with the Z-direction guide recess 33. Furthermore, the connecting member 22 is provided with the X-direction guide protrusion 42 and the Z-direction guide protrusion 43, which engage with the corresponding guide recesses 25 and 33. However, this is not limiting; either the arm 4 or the connecting member 22 may have the X-direction guide recess 25, and the other may have the X-direction guide protrusion 42. Alternatively, either the arm 4 or the connecting member 22 may have the Z-direction guide recess 33, and the other may have the Z-direction guide protrusion 43.

[0171] In the above embodiment, the position adjustment device 5 is described as being arranged in the order of the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y as it moves from the vicinity of the speed reducer 10 toward the vicinity of the test head W. However, this is not limiting, and the order of arrangement of the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y may be arbitrarily determined.

[0172] In the above embodiment, the fixing bolts 23 are used as the operating parts of the X adjustment unit 100X and the Z adjustment unit 100Z. However, this is not limiting. The operating part of the X adjustment unit 100X only needs to be able to fix or release the arm 4 and the connecting member 22. The operating part of the Z adjustment unit 100Z only needs to be able to fix or release the first mounting plate 31 and the connecting member 22. For example, a so-called lock lever or the like may be used in place of the fixing bolts 23.

[0173] In the above embodiment, the position adjustment device 5 is described as including an auxiliary fixing bolt 24 as an auxiliary fixing portion to secure the connecting member 22 with some play. The auxiliary fixing bolt 24 is described as comprising a rod 24a, an externally threaded portion 24b formed at one axial end of the rod 24a, and a head 24c formed at the other axial end of the rod 24a. However, this is not limiting; the auxiliary fixing portion may simply secure the connecting member 22 with some play. For example, a pin may be used as the auxiliary fixing portion in place of the auxiliary fixing bolt 24. Alternatively, a bolt consisting solely of an externally threaded portion and a head may be used in place of the auxiliary fixing bolt 24.

[0174] In the above embodiment, the following description is made: when the auxiliary fixing bolt 24 is completely tightened with the auxiliary fixing internal thread portions 27 and 35, the gap between the X-direction guide recess 25, the Z-direction guide recess 33, and the head portion 24c of the auxiliary fixing bolt 24 is approximately 40 μm, for example. However, this is not limiting; the gap size may be such that the auxiliary fixing bolt (auxiliary fixing portion) 24 maintains the position of the arm 4 and first mounting plate 31 relative to the connecting member 22 within a predetermined range.

[0175] In the above embodiment, the electric motor 8 is used as the driving source of the drive device 1. However, the present invention is not limited to this, and various driving sources that output power to the reduction gear 10 can be used instead of the electric motor 8. For example, a hydraulic motor can be used instead of the electric motor 8.

[0176] In the above embodiment, the reduction gear 10 is described as, for example, an eccentric oscillating type reduction gear. The internal gear 11 is described as functioning as the output portion of the reduction gear 10. However, this is not limiting, and the internal gear 11 may be fixed to the support plate 7 so that the gear rack 12 functions as the output portion. The reduction gear 10 may use various reduction gears instead of the eccentric oscillating type reduction gear. The arm 4 may be mounted on the output portion of the reduction gear.

[0177] In the above embodiment, the position adjustment device 5 is described as including an X-direction adjustment bolt unit 61 as an adjustment unit for performing position adjustment in the X direction. The position adjustment device 5 is described as including a Z-direction adjustment bolt unit 71 as an adjustment unit for performing position adjustment in the Z direction. However, this is not limiting; any adjustment unit capable of sliding the connecting member 22 relative to the arm 4 or sliding the first mounting plate 31 relative to the connecting member 22 may be used. For example, a pinion, rack, or the like may be used in place of the adjustment bolt units 61 and 71. Rotating the pinion causes the rack to slide, thereby causing the connecting member 22 and the first mounting plate 31 to slide.

[0178] In the above embodiment, the Y adjustment unit 100Y is described as having a Y-direction guide hole 36 formed in the second mounting plate 32. However, this is not limiting; the Y adjustment unit 100Y may also have a structure similar to that of the X adjustment unit 100X and the Z adjustment unit 100Z. The Y adjustment unit 100Y structure may also be provided in the connecting member 22.

[0179] In the above embodiment, the mounting member 21 is described as being formed into an L-shape when viewed in the Z direction by the first mounting plate 31 and the second mounting plate 32. However, this is not limiting; the second mounting plate 32 may extend in any direction. For example, it may not extend in a direction perpendicular to the X and Z directions. Even when the mounting member 21 extends in the Y direction, it may be formed into a T-shape when viewed in the Z direction.

[0180] In the embodiments disclosed in this specification, a component composed of multiple objects may be integrated into one piece, or a component composed of one object may be divided into multiple pieces. Regardless of whether or not the components are integrated, they may be configured in a manner that achieves the purpose of the invention.

Claims

1. A driving device comprising: a reduction gear having an output portion that receives power from a driving source and outputs a rotational force; an arm mounted on the output portion for moving the workpiece; and a position adjustment device, which is disposed between the arm and the workpiece and adjusts the position of the workpiece relative to the arm; When the reduction gear and the workpiece are aligned in the horizontal direction, a portion of the reduction gear overlaps a portion of the position adjusting device when viewed from the top and bottom.

2. The driving device according to claim 1, wherein: When the reduction gear and the workpiece are arranged in a horizontal direction, the horizontal direction approaching and away from the reduction gear is defined as the X direction, the up and down direction is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction is defined as the Y direction. The position adjustment device comprises: An X adjustment unit, which adjusts the position of the workpiece in the X direction; A Y adjustment unit that adjusts the position of the workpiece in the Y direction; and A Z adjustment unit that adjusts the position of the workpiece in the Z direction. The X adjustment unit, the Y adjustment unit, and the Z adjustment unit are respectively arranged at different locations.

3. The driving device according to claim 2, wherein: The position adjustment device is arranged in the order of the X adjustment portion, the Z adjustment portion, and the Y adjustment portion as it moves from the speed reduction device toward the workpiece.

4. The driving device according to claim 3, wherein: The X adjustment part and the Z adjustment part are arranged on the same plane, The X adjustment unit and the Z adjustment unit each have an operation unit for position adjustment. The operating parts are arranged on the same surface.

5. A position adjustment device comprising: Component 1; a second component; and a connecting member connecting the first member and the second member and adjusting the position of the second member relative to the first member; The first member, the second member, and the connecting member include two guide portions that enable the first member and the second member to slide independently in two directions intersecting each other.

6. The position adjustment device according to claim 5, wherein: The guide portion includes: a plurality of oval guide holes formed in the first member and the second member, respectively along the moving direction; a plurality of fixed internal thread portions formed on the connecting member and communicating with the guide holes; and A plurality of fixing bolts are fastened to the fixing internal thread portion through the guide holes.

7. The position adjustment device according to claim 6, wherein: The guide portion includes: a first guide protrusion provided on either the connecting member or the first member along the moving direction; a first guide recess provided on the other of the connecting member and the first member and slidably engaged with the first guide protrusion; a second guide protrusion provided on either the connecting member or the second member along the moving direction; a second guide recess provided on the other of the connecting member and the second member and slidably engaged with the second guide protrusion; and An adjustment portion causes the first member and the second member to slide.

8. The position adjustment device according to claim 7, wherein: The position adjustment device includes an auxiliary fixing portion that holds the connecting member and the first member with a certain gap therebetween, and also holds the connecting member and the second member with a certain gap therebetween.

9. The position adjustment device according to claim 8, wherein: The auxiliary fixing portion has: Rod; an external thread portion provided at one axial end of the rod portion and formed with a diameter smaller than that of the rod portion via a step portion; and A head portion is provided at the other axial end of the rod portion. The connecting member has a through hole for the rod to be inserted into. The first member and the second member have auxiliary fixing internal thread portions for tightening the external thread portions. The position adjustment device includes a spacer disposed between the connecting member and the head. The length of the rod portion is longer than a thickness obtained by adding a thickness of the connecting member and a thickness of the gasket.

10. The position adjustment device according to claim 9, wherein: A plurality of the guide holes are arranged in the first member and the second member, respectively. The gasket has: a first gasket having a plurality of first insertion holes formed therein; and The second gasket is formed with a plurality of second insertion holes, The plurality of first insertion holes communicate with the plurality of guide holes formed in the first member and are used for inserting the fixing bolts. The plurality of second insertion holes communicate with the plurality of guide holes formed in the second member, and are used to insert the fixing bolts.

11. The position adjusting device according to any one of claims 5 to 10, wherein: The first member and the second member are arranged in parallel along the plane direction of each other. The connecting member is a block, The connecting member is arranged to face a direction parallel to the arrangement direction of the first member and the second member.

Images