Double-shaft valve with adjustable valve plate

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a double-shaft valve with an adjustable valve plate, comprising a fixing system for providing a valve mounting base body; the double-shaft lifting system comprises a left transmission shaft and a right transmission shaft which are symmetrically arranged and synchronously drive the valve plate to ascend and descend; the valve plate angle adjusting mechanism is arranged among the valve plate, the left transmission shaft and the right transmission shaft; the double-guiding system comprises a vertical guiding assembly used for limiting vertical movement of the transmission shaft seat and a horizontal limiting assembly used for restraining horizontal swing of the double-shaft lifting system; and the output end of the pneumatic driving system is linked with the double-shaft lifting system through a cam groove block. According to the valve, through the design of the single-drive upright double-shaft structure, the double-guide system, the double-buffering vibration reduction system, the self-locking air cylinder and the adjustable valve plate, the stability and reliability of the whole structure of the valve are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a double-axis valve with an adjustable valve plate. Background Art

[0002] In semiconductor manufacturing, valves between chambers play a crucial role, serving as critical pathways for wafer transport. Valve performance indicators, such as sealing, stability, and low vibration, significantly impact the efficiency and yield of the entire process.

[0003] Existing valves currently suffer from numerous issues. The single valve plate angle design presents significant flaws, leading to poor sealing in vacuum environments and consequently affecting product yield. During operation, the valves experience significant vibration, which can negatively impact chamber cleanliness and interfere with the precision and stability of the semiconductor manufacturing process.

[0004] At the same time, the single-shaft drive system faces significant challenges when closing the valve. Due to the high force applied, the drive shaft is prone to deformation. Furthermore, since the drive shaft is located in the center of the rectangular valve plate, the uneven force on both sides of the plate also causes varying degrees of deformation. This deformation not only affects the normal opening and closing of the valve, but also reduces the valve's sealing performance, increases the risk of particle generation, pollutes the semiconductor manufacturing environment, and further affects product quality.

[0005] In view of the many problems existing in the above-mentioned existing valves, the dual-axis gate valve involved in the present invention came into being, aiming to realize the function of cutting off and connecting the reaction chamber and transmission chamber pipelines, and effectively improve the vacuum valve in terms of deformation, vibration, noise, particles, stability and sealing performance, so as to meet the strict requirements of the semiconductor manufacturing field on valve performance. Summary of the Invention

[0006] In order to solve the above problems, the present invention provides a biaxial valve with an adjustable valve plate. The valve is designed with a single-drive upright biaxial structure to meet the rapid response capability of the valve in a biaxial scenario and improve the problem of stress and deformation of the single-drive shaft gate valve; a dual-guide system and a dual-buffer vibration reduction system are designed to improve the problems of excessive stress, excessive vibration amplitude, and excessive noise in some components of the fixed system during the use of the valve, thereby improving the stability of the valve; by selecting pneumatic components, planning the structure, and designing non-standard self-locking cylinders, the air-cutting self-locking function of the valve cylinder is realized, thereby ensuring the safety of the valve; by designing an adjustable valve plate, the inconsistent compression of the rubber strip and poor sealing performance when closing the door are avoided.

[0007] The technical solutions of the present invention are as follows: A biaxial valve with adjustable valve plate, comprising: The fixing system is composed of a cavity connecting plate, a side plate, a right bottom plate and a left bottom plate rigidly connected to provide a valve mounting base; The dual-axis lifting system includes a symmetrically arranged left and right transmission shafts, which synchronously drive the valve plate up and down; A valve plate angle adjustment mechanism is provided between the valve plate and the left and right transmission shafts; A dual-guide system, comprising a vertical guide assembly for limiting the vertical movement of the drive shaft seat and a horizontal limit assembly for restraining the horizontal swing of the dual-axis lifting system; The pneumatic drive system includes a cylinder piston and a cylinder body. The output end of the pneumatic drive system is linked to the double-axis lifting system through a cam slot block.

[0008] The dual-axis lifting system further comprises a bellows, which is airtightly sleeved on the outer sides of the left transmission shaft and the right transmission shaft.

[0009] The valve plate angle adjustment mechanism includes a pad and a gasket. The valve plate and the pad are fixedly connected by a vacuum screw. A gasket is arranged between the valve plate and the pad. By adjusting the number and thickness of the gasket, the fixed angle and relative position between the valve plate and the left transmission shaft and the right transmission shaft can be steplessly adjusted.

[0010] The vertical guide assembly includes a guide rail and a shaft ring. The guide rail is fixedly connected to the cavity connecting plate. The shaft ring is installed on the transmission shaft seat and moves along the guide rail.

[0011] The horizontal limit assembly includes a limit piece, which is fixedly mounted on the side plate, and a limit piece is respectively arranged on the front and rear sides of the transmission shaft seat.

[0012] The pneumatic drive system also includes a guide ring, which is installed inside the cylinder piston and the cylinder body.

[0013] The pneumatic drive system has a mechanical self-locking function, including a self-locking block, a pressure block, a self-locking spring and a self-locking sealing ring. The self-locking block, self-locking sealing ring and self-locking spring are installed on the cylinder body and fixed by a pressure block and screws. When the valve is in the closed position and the air port of the pneumatic drive system is stopped, the pre-compression force of the self-locking spring causes the self-locking block to pop out and embed into the cylinder piston slot, realizing air-off self-locking.

[0014] The dual-axis lifting system also includes a transmission shaft locking nut, a drive shaft, a pre-compression spring and a bearing. The left transmission shaft and the right transmission shaft are fixedly connected to the transmission shaft seat through the transmission shaft locking nut. The transmission shaft seat is fixedly connected to one end of the drive shaft through the drive shaft locking nut. The other end of the drive shaft passes through the pre-compression spring and is connected to the inner ring of the bearing through a hinge pin and a retaining spring. The outer ring of the bearing cooperates with the cam slot block. The pre-compression force provided by the spring can ensure that the relative position of the dual-axis lifting system and the cam slot block does not change.

[0015] The fixing system consists of a cavity connecting plate, side plates, buffer rods on both sides, a right bottom plate, a left bottom plate, a guide rail, an intermediate buffer and a cylinder body. The cavity connecting plate is fixedly connected to the side plates and guide rails by screws, the right bottom plate, the left bottom plate are fixedly connected to the side plates and guide rails by screws, the guide rails are fixedly connected to the cylinder body by screws, and the mounting keys provide positioning; the buffer rods on both sides are cylinders made of polyurethane material, which are respectively installed inside the right bottom plate and the left bottom plate and fixed by top screws; the intermediate buffer is a cylinder with a boss made of polyurethane material, which is installed between the guide rail and the cavity connecting plate and is pressed tightly by a pad.

[0016] The cam groove block is fixedly connected to the cylinder piston by screws. When the door closing air port below the pneumatic drive system is ventilated, the cylinder piston extends to drive the cam groove block to move upward, and the cam groove block drives the dual-axis lifting system to move upward. When the dual-axis lifting system moves to the upper limit of the guide system, the pneumatic drive system continues to move upward, and the bearing moves downward in the internal contour of the cam groove block, driving the dual-axis lifting system to swing around the fulcrum until the bearing moves completely to the bottom of the internal contour of the cam groove block, completing the valve closing action.

[0017] The beneficial effects of the present invention are: 1. The present invention discloses a biaxial valve with an adjustable valve plate. The biaxial valve with an adjustable valve plate is designed with a single-drive upright biaxial structure, which meets the demand for rapid valve response in biaxial scenarios, effectively improves the problem of easy deformation of single-drive shaft gate valves under stress, and improves the stability and reliability of the overall valve structure.

[0018] 2. The present invention discloses a biaxial valve with an adjustable valve plate. The biaxial valve with an adjustable valve plate improves valve stability. By setting a vertical guide component (guide rail and shaft ring) and a horizontal limit component (limiting member), precise guidance in the vertical and horizontal directions is provided for the biaxial lifting system. The double centrally arranged guide mechanism reduces the external force exerted on the fixing system when the biaxial valve is in the middle position, reduces vibration during movement, and ensures stable operation of the valve under various working conditions. The buffer rods on both sides and the middle buffer member are installed in the limit position of the guide mechanism. When the valve moves to the middle position, they can effectively absorb and disperse energy, reduce vibration and noise generated by the valve movement, further improve the stability of the valve, and at the same time reduce the impact force on some components of the fixing system, thereby extending the service life of the valve.

[0019] 3. The present invention discloses a biaxial valve with an adjustable valve plate, which ensures the safety of the valve. The pneumatic drive system has a mechanical self-locking function. When the valve is in the closed position and ventilation is stopped, the pre-compression force of the self-locking spring causes the self-locking block to pop out and embed into the cylinder piston slot to achieve self-locking when the gas is cut off. This design ensures that the valve can remain closed in the event of accidental gas cut-off, prevents safety accidents caused by accidental opening of the valve, and provides reliable safety protection for the semiconductor manufacturing process.

[0020] 4. The present invention discloses a dual-axis valve with an adjustable valve plate, which optimizes the sealing performance. By arranging pads and gaskets between the valve plate and the drive shaft and adjusting the number and thickness of the gaskets, the fixed angle and relative position between the valve plate and the drive shaft can be steplessly adjusted. This design flexibly adjusts the valve plate angle to ensure that the valve plate can be evenly pressed on the dynamic sealing surface when closing the door, ensuring the consistency of the compression amount of the rubber strip, effectively avoiding the inconsistent compression of the rubber strip and poor sealing performance when closing the door, reducing the risk of local particle generation, improving the sealing performance of the valve, and meeting the strict requirements of the semiconductor manufacturing field for high cleanliness and high sealing; the bellows in the dual-axis lifting system is airtightly sleeved on the outside of the drive shaft, which plays a good sealing role, prevents gas leakage, further ensures the sealing performance of the valve, and ensures that the channel between the pre-cooling chamber and the transmission chamber can be reliably connected and sealed.

[0021] 5. The present invention discloses a biaxial valve with an adjustable valve plate, which improves the consistency and assembly convenience of the valve plate. The valve plate adopts a vulcanized metal substrate, eliminating the O-ring installation step, reducing uncertainty factors in the assembly process, and improving the consistency of the valve plate, making the valve performance more stable and reliable during production and use. At the same time, it also simplifies the assembly process and improves production efficiency.

[0022] 6. The present invention discloses a biaxial valve with an adjustable valve plate, which enhances the performance of the pneumatic drive system. The guide ring in the pneumatic drive system is installed inside the cylinder piston and the cylinder body, providing precise guidance for the movement of the cylinder piston. At the same time, it can resist the reaction force generated by the drive shaft when closing the valve, protect the internal sealing of the pneumatic drive system, improve the working performance and reliability of the pneumatic drive system, and ensure that the valve can accurately and stably realize the switching action. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] By reading the detailed description of the preferred embodiment below, the solutions and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only for illustrating the preferred embodiment and are not to be considered as limiting the present invention.

[0024] In the attached figure: Figure 1 This is a schematic diagram of the exploded structure of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 2 This is a front view of a biaxial valve with an adjustable valve plate in an initial position according to an embodiment of the present invention; Figure 3 for Figure 2 Middle AA section view; Figure 4 for Figure 2 Middle BB cross-section; Figure 5 This is a front view of a biaxial valve with an adjustable valve plate in a middle position according to an embodiment of the present invention; Figure 6 for Figure 5 Middle CC section view; Figure 7 for Figure 5 Middle DD section view; Figure 8 This is a front view of a biaxial valve with an adjustable valve plate in a closed position according to an embodiment of the present invention; Figure 9 for Figure 8 Middle EE cross-sectional view; Figure 10 for Figure 8 Middle FF cross-sectional view; Figure 11a Schematic diagram of the locked state structure of a mechanical self-locking mechanism of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 11b This is a schematic structural diagram of a released state of a mechanical self-locking mechanism of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 12 This is a schematic diagram of the three-dimensional structure of buffer rods on both sides of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 13 This is a schematic diagram of the three-dimensional structure of an intermediate buffer member of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 14 Schematic diagram of the cam groove profile structure of a cam groove block of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; Figure 15 This is a schematic diagram of the three-dimensional structure of a guide rail of a dual-axis valve with an adjustable valve plate according to an embodiment of the present invention; The components represented by the reference numerals in the figure are: The present invention: 1. valve plate, 2. right transmission shaft, 3. cavity connecting plate, 4. side plate, 5. bellows, 6. buffer rods on both sides, 7. transmission shaft seat, 8. drive shaft, 9. guide rail, 10. shaft collar, 11. intermediate buffer, 12. transmission shaft locking nut, 13. right bottom plate, 14. left bottom plate, 15. pre-compression spring, 16. bearing, 17. cam groove block, 18. cylinder piston, 19. cylinder body, 20. guide ring, 21. pressure block, 22. self-locking block, 23. cylinder bottom plate, 24. cushion block, 25. self-locking spring, 26. left transmission shaft, 27. gasket, 28. limiter, 29. drive shaft locking nut, 30. O-type seal, 31. self-locking seal ring. DETAILED DESCRIPTION

[0025] like Figures 1 to 10 , Figure 11a , Figure 11b , Figures 12 to 15 As shown, the valve plate adjustable biaxial valve is mainly composed of a biaxial lifting system, a guide system, a fixing system and a pneumatic drive system, and specifically includes the following parts: valve plate 1, right drive shaft 2, cavity connecting plate 3, side plate 4, bellows 5, buffer rods on both sides 6, drive shaft seat 7, drive shaft 8, guide rail 9, shaft ring 10, intermediate buffer 11, drive shaft locking nut 12, right bottom plate 13, left bottom plate 14, pre-compression spring 15, bearing 16, cam groove block 17, cylinder piston 18, cylinder body 19, guide ring 20, pressure block 21, self-locking block 22, cylinder bottom plate 23, gasket 24, self-locking spring 25, left drive shaft 26, gasket 27, limiter 28, drive shaft locking nut 29, O-type seal 30, self-locking seal ring 31.

[0026] The specific structure and connection relationship of each system are as follows: 1. Dual-axis lifting system: The valve plate 1 and the gasket 24 are fixedly connected by vacuum screws. A gasket 27 is arranged between the valve plate 1 and the gasket 24. By adjusting the number and thickness of the gasket 27, the fixed angle and relative position between the valve plate 1 and the right transmission shaft 2 and the left transmission shaft 26 can be steplessly adjusted.

[0027] The right transmission shaft 2 and the left transmission shaft 26 are airtightly sleeved with a bellows 5 . The right transmission shaft 2 and the left transmission shaft 26 pass through the bellows 5 and are fixedly connected to the transmission shaft seat 7 through the transmission shaft locking nut 12 .

[0028] The transmission shaft seat 7 is fixedly connected to one end of the drive shaft 8 through the drive shaft locking nut 29. The other end of the drive shaft 8 passes through the pre-compression spring 15 and is connected to the inner ring of the bearing 16 through a hinge pin and a retaining spring. The outer ring of the bearing 16 cooperates with the cam groove block 17. The cam groove of the cam groove block 17 is as shown in FIG. Figure 14As shown, the pre-compression force provided by the pre-compression spring 15 can ensure that the relative position of the dual-axis lifting system and the cam slot block 17 does not change.

[0029] 2. Guidance system: Vertical guide assembly: The guide rail 9 is fixedly connected to the cavity connecting plate 3, and the collar 10 is installed on the transmission shaft seat 7. The collar 10 moves along the guide rail 9 to limit the vertical movement of the transmission shaft seat 7. The guide rail 9 is as shown in FIG. Figure 15 shown.

[0030] Horizontal limiter assembly: Limiters 28 are fixedly mounted on side panels 4 and located on the front and rear sides of drive shaft seat 7 to constrain the horizontal swing of the dual-axis lift system. Simultaneously, the outer ring of bearing 16 engages with cam block 17, which enables the dual-axis lift system to swing when the valve is closed.

[0031] 3. Fixing system: The cavity connecting plate 3 is fixedly connected to the side plate 4 and the guide rail 9 by screws, the right bottom plate 13 and the left bottom plate 14 are fixedly connected to the side plate 4 and the guide rail 9 by screws, the guide rail 9 is fixedly connected to the cylinder body 19 by screws, and the mounting key provides positioning.

[0032] The buffer rods 6 on both sides are cylindrical polyurethane materials, such as Figure 12 As shown, they are respectively installed inside the right bottom plate 13 and the left bottom plate 14 and fixed by top screws.

[0033] The middle buffer 11 is a cylindrical body with bosses made of polyurethane, such as Figure 13 As shown, it is installed between the guide rail 9 and the cavity connecting plate 3 and is pressed by a spacer.

[0034] 4. Pneumatic drive system: Guide rings 20 are installed inside the cylinder piston 18 and the cylinder body 19 to support, guide and resist the reaction force generated by the transmission shaft when the valve is closed, thereby protecting the internal sealing of the pneumatic drive system.

[0035] like Figure 11a and Figure 11b As shown, the self-locking block 22, the self-locking sealing ring 31 and the self-locking spring 25 are installed on the cylinder body 19 and fixed by the pressing block 21 and screws.

[0036] The cylinder base plate 23 is installed below the cylinder body 19, and an O-type seal 30 is installed at the bottom of the cam groove block 17 and fixed to the cylinder piston 18 to ensure the internal sealing of the pneumatic drive system.

[0037] The cam block 17 is fixedly connected to the cylinder piston 18 by screws.

[0038] The working process of the valve plate adjustable biaxial valve is as follows: Initial position: When the valve is in the initial position, the external air circuit is connected to the air inlet and outlet holes of the pneumatic components on both sides of the pneumatic drive system.

[0039] Closing process: When air is supplied to the closing port below the pneumatic drive system, cylinder piston 18 extends, driving upward movement of cam block 17, to which it is screwed. Cam block 17 then drives the dual-axis lift system upward. The pre-compression force provided by pre-compression spring 15 ensures that the relative position of the dual-axis lift system and cam block 17 remains unchanged, and bearing 16 is constrained within the internal contour of cam block 17. Bellows 5 is continuously compressed during the upward movement of the dual-axis lift system, and the dual-axis lift system is restrained vertically and horizontally within the guide system by collar 10 and stopper 28, respectively.

[0040] When the dual-axis lifting system reaches the upper limit of the guide system, that is, when the collar 10 reaches the upper end of the inner slideway of the side plate 4 and guide rail 9, the buffer rods 6 on both sides and the middle buffer 11 are continuously compressed, reducing valve vibration and noise. At this point, the dual-axis lifting system cannot move further upward, and the valve is in the middle position.

[0041] Continuous air flow is applied to the closing port below the pneumatic drive system, causing it to continue its upward movement. Bearing 16 moves downward within the internal contour of cam block 17, continuously compressing pre-compression spring 15. Using collar 10 as a fulcrum, bearing 16 and cam block 17 drive the dual-axis lifting system in a swinging motion around the fulcrum until bearing 16 reaches the bottom of the internal contour of cam block 17. At this point, based on the adjustable valve plate 1, the number and thickness of gaskets 27 are adjusted to ensure uniform contact between the vulcanized sealing strip and the dynamic sealing surface, while maintaining a certain degree of compression between the valve plate 1 and the dynamic sealing surface. This completes the valve closure, and the valve is now in the closed position.

[0042] Air shut-off self-locking: When the valve is in the closed position, air is stopped from flowing to the pneumatic drive system's air port. The pre-compression force of the self-locking spring 25 causes the self-locking block 22 to pop out and reengage in the slot of the cylinder piston 18. The self-locking cylinder prevents the dual-axis lifting system from freely falling to its initial position, thus achieving air shut-off self-locking. The air shut-off self-locking state can only be released by continuing to flow air to the closing air port and manually pulling out the self-locking block 22 using the auxiliary screw.

[0043] Door Opening Process: When the valve is in the closed position and air is supplied to the door opening port below the pneumatic drive system, the movement sequence is reversed from the closing process: the dual-axis drive system swings open and then descends linearly to its initial position. Specifically, the pneumatic drive system causes cylinder piston 18 to move downward, driving cam block 17 downward. Bearing 16 moves upward within the internal contour of cam block 17, driving the dual-axis lift system to swing around the fulcrum of collar 10. Then, under the action of gravity and the pneumatic drive system, the dual-axis lift system descends linearly to its initial position.

[0044] Through the above embodiments, the valve plate adjustable biaxial valve of the present invention can realize the connection and sealing of the pre-cooling chamber and the transmission chamber channel, meet the use requirements in the semiconductor manufacturing field, and solve the problems of poor sealing effect, large vibration, and easy deformation of the transmission shaft in the existing valve.

Claims

1. A valve plate adjustable biaxial valve, characterized in that: include: A fixing system, comprising a cavity connecting plate (3), a side plate (4), a right bottom plate (13) and a left bottom plate (14) rigidly connected to provide a valve mounting base; A dual-axis lifting system includes a symmetrically arranged left transmission shaft (26) and a right transmission shaft (2), wherein the left transmission shaft (26) and the right transmission shaft (2) synchronously drive the valve plate (1) to rise and fall; A valve plate angle adjustment mechanism is provided between the valve plate (1) and the left transmission shaft (26) and the right transmission shaft (2); A dual-guide system, comprising a vertical guide assembly for limiting the vertical movement of the transmission shaft seat (7) and a horizontal limit assembly for limiting the horizontal swing of the dual-axis lifting system; The pneumatic drive system comprises a cylinder piston (18) and a cylinder body (19), wherein the output end of the pneumatic drive system is linked to the dual-axis lifting system through a cam slot block (17).

2. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The dual-axis lifting system further comprises a bellows (5), which is airtightly sleeved on the outside of the left transmission shaft (26) and the right transmission shaft (2).

3. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The valve plate angle adjustment mechanism includes a pad (24) and a gasket (27). The valve plate (1) and the pad (24) are fixedly connected by a vacuum screw. A gasket (27) is provided between the valve plate (1) and the pad (24). By adjusting the number and thickness of the gasket (27), the fixed angle and relative position between the valve plate (1) and the left transmission shaft (26) and the right transmission shaft (2) can be steplessly adjusted.

4. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The vertical guide assembly comprises a guide rail (9) and a shaft collar (10), wherein the guide rail (9) is fixedly connected to the cavity connecting plate (3), and the shaft collar (10) is mounted on the transmission shaft seat (7), and the shaft collar (10) moves along the guide rail (9).

5. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The horizontal limiting assembly includes a limiting member (28), which is fixedly mounted on the side plate (4), and a limiting member (28) is provided on the front and rear sides of the transmission shaft seat (7).

6. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The pneumatic drive system further comprises a guide ring (20), which is mounted inside the cylinder piston (18) and the cylinder body (19).

7. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The pneumatic drive system has a mechanical self-locking function, including a self-locking block (22), a pressure block (21), a self-locking spring (25) and a self-locking sealing ring (31). The self-locking block (22), the self-locking sealing ring (31) and the self-locking spring (25) are installed on the cylinder body (19) and fixed by the pressure block (21) and screws. When the valve is in the closed position and the air port of the pneumatic drive system stops being ventilated, the pre-compression force of the self-locking spring (25) causes the self-locking block (22) to pop out and embed into the slot of the cylinder piston (18), thereby realizing air-off self-locking.

8. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The dual-axis lifting system further comprises a transmission shaft locking nut (12), a drive shaft (8), a pre-compression spring (15) and a bearing (16); the left transmission shaft (26) and the right transmission shaft (2) are fixedly connected to the transmission shaft seat (7) via the transmission shaft locking nut (12); the transmission shaft seat (7) is fixedly connected to one end of the drive shaft (8) via the drive shaft locking nut (29); the other end of the drive shaft (8) passes through the pre-compression spring (15) and is connected to the inner ring of the bearing (16) via a hinge pin and a retaining spring; the outer ring of the bearing (16) cooperates with the cam slot block (17); the pre-compression force provided by the pre-compression spring (15) can ensure that the relative position of the dual-axis lifting system and the cam slot block (17) does not change.

9. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The fixing system is composed of a cavity connecting plate (3), a side plate (4), two side buffer rods (6), a right bottom plate (13), a left bottom plate (14), a guide rail (9), an intermediate buffer member (11) and a cylinder body (19). The cavity connecting plate (3) is fixedly connected to the side plate (4) and the guide rail (9) by screws, the right bottom plate (13) and the left bottom plate (14) are fixedly connected to the side plate (4) and the guide rail (9) by screws, and the guide rail (9) is fixedly connected to the cylinder body (19) by screws, and the mounting key provides positioning. The two side buffer rods (6) are cylindrical bodies made of polyurethane material, which are respectively installed inside the right bottom plate (13) and the left bottom plate (14) and fixed by top screws. The intermediate buffer member (11) is a cylindrical body with a boss made of polyurethane material, which is installed between the guide rail (9) and the cavity connecting plate (3) and is pressed by a pad.

10. The valve plate adjustable biaxial valve according to claim 1, characterized in that: The cam groove block (17) is fixedly connected to the cylinder piston (18) by screws. When the air is ventilated to the door closing air port below the pneumatic drive system, the cylinder piston (18) extends to drive the cam groove block (17) to move upward, and the cam groove block (17) drives the dual-axis lifting system to move upward. When the dual-axis lifting system moves to the upper limit of the guide system, the pneumatic drive system continues to move upward, and the bearing (16) moves downward in the internal contour of the cam groove block (17), driving the dual-axis lifting system to swing around the fulcrum until the bearing (16) completely moves to the bottom of the internal contour of the cam groove block (17), completing the closing action of the valve.

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