A cutting method for a slicer and the slicer itself.

Abstract

This application relates to the field of silicon rod processing technology, and in particular to a slicing method and a slicing machine. The slicing machine includes: a frame, a main roller, a bearing housing, a drive mechanism, and diamond wire. The main roller includes: a roller body, which is rotatably connected to the frame via the bearing housing; a cylinder for winding the diamond wire, which is sleeved on the roller body and concentrically arranged with it. The cylinder is slidably connected to the roller body along its axial direction, allowing it to rotate with the roller body and slide along its axial direction; and a limiting assembly, which is disposed at both ends of the cylinder along its axial direction. The limiting assembly acts on both ends of the cylinder through contact or non-contact to limit and fix or substantially fix the position of the cylinder. This application, by setting the main shaft as a relatively movable roller and cylinder, fixes the position of the cylinder, avoiding cutting errors caused by the overall axial displacement of the main roller, and improving the silicon wafer cutting quality.

Description

Technical Field

[0001] This application relates to the field of silicon rod processing technology, and in particular to a cutting method for a slicing machine and a slicing machine. Background Technology

[0002] In the silicon rod processing of industries such as photovoltaics and semiconductors, diamond wire slicing machines are key equipment for cutting silicon rods into silicon wafers. The core principle is to cut the silicon rod by cutting the silicon rod with a diamond wire mesh wound on the main roller. The cutting accuracy directly affects the processing quality and performance of subsequent cells or chips.

[0003] In existing technologies, the silicon rod is pressed down to make the diamond wire contact the silicon rod, thereby enabling the diamond wire to cut the silicon rod to form multiple silicon wafers. In this process, it is necessary to strictly control factors such as wire tension, main roller speed, silicon rod pressing rate and pressure to control data such as silicon wafer warp and bow. However, during the cutting process, the cutting surface of the silicon rod will still form an arc or non-directional curved surface, resulting in low silicon wafer cutting quality.

[0004] Therefore, the technical problem with existing technologies is that the quality of silicon wafer cutting urgently needs to be improved. Summary of the Invention

[0005] This application provides a slicing method and a slicing machine, achieving the technical effect of improving the quality of silicon wafer slicing.

[0006] On the one hand, the slicer provided in this application adopts the following technical solution:

[0007] A slicing machine includes: a frame; main rollers, at least two sets of which have rotational degrees of freedom about an axis; bearing housings, the number of which is the same as the number of main rollers and corresponds one-to-one with each main roller, the bearing housings being connected between the frame and the main rollers; a drive mechanism connected to the bearing housings, the drive mechanism being used to drive the main rollers to rotate via the bearing housings; and diamond wire wound between the main rollers to form a wire mesh for cutting silicon rods; wherein, the main rollers include: The machine includes: a roller body rotatably connected to the frame via the bearing housing; a cylinder body for winding diamond wire, the cylinder body being sleeved on the roller body and concentrically arranged with the roller body, the cylinder body slidingly connected to the roller body along the axial direction of the roller body so that the cylinder body can rotate with the roller body and slide along the axial direction of the roller body; and a limiting assembly, the limiting assembly being disposed at both ends of the cylinder body along the axial direction, the limiting assembly acting on both ends of the cylinder body through contact or non-contact to limit the position of the cylinder body to be fixed or substantially fixed.

[0008] Preferably, the cylinder is an integral annular structure; the inner wall of the cylinder is provided with a sliding key, and the outer wall of the roller is provided with a keyway arranged along the axial direction of the roller, the sliding key and the keyway slidingly engage to allow the cylinder and the roller to slidely connect; or, the inner wall of the cylinder is provided with a first slider, and the outer wall of the roller is provided with a slide rail arranged along the axial direction of the roller, the first slider and the slide rail slidingly engage to allow the cylinder and the roller to slidely connect.

[0009] Preferably, the cylinder includes an arc-shaped plate, which has multiple sets and is independent of each other, and the curvature of the arc-shaped plate matches the curvature of the roller body; a second slider is provided on the side of the arc-shaped plate near the roller body; an oblong hole is provided on the roller body along the roller body axis, and the second slider slides into the oblong hole to make the cylinder body and the roller body slide in connection.

[0010] Preferably, the roller body is hollow inside, and the roller body further includes: a central shaft located inside the roller body and at the rotation center of the roller body, the central shaft being fixed relative to the roller body; a central block located inside the roller body and slidably connected to the central shaft; and a spring connected between the second slider and the central block, the spring being in a stretched state.

[0011] Preferably, the roller body further includes: a synchronizing element located inside the roller body, the synchronizing element being fixedly connected to the central block, and the synchronizing element being hollow; wherein, the second slider and the spring are located inside the synchronizing element, so that the second slider can move radially along the roller body within the synchronizing element, and the synchronizing element enables the arc-shaped plate to slide synchronously along the axial direction of the roller body.

[0012] Preferably, the roller body is hollow inside, and the second sliders of each of the arc-shaped plates are connected by springs so that each of the arc-shaped plates is radially positioned and can slide synchronously along the axial direction of the roller body.

[0013] Preferably, the limiting component includes: a limiting member, wherein the limiting member has two sets, the two sets of the limiting member are fixed in position and are respectively located at both ends of the cylinder along the axial direction; the limiting member is rotatably connected to the end of the cylinder to restrict the axial movement of the cylinder and allow the cylinder to rotate with the roller.

[0014] Preferably, the limiting component includes: a limiting member, which has two sets, the two sets of the limiting members being fixed in position and located at both ends of the cylinder along the axial direction; magnets of the same polarity are provided on the ends of the cylinder and the limiting members, which restrict the axial movement of the cylinder by magnetic repulsion and allow the cylinder to rotate with the roller.

[0015] Preferably, the limiting component includes: a limiting member, which has two sets, the two sets of the limiting members being fixed in position and located at both ends of the arc-shaped plate along the axial direction; magnets of the same polarity are provided on the ends of the arc-shaped plate and the limiting members, which restrict the axial movement of the arc-shaped plate by magnetic repulsion and allow the arc-shaped plate to rotate with the roller.

[0016] On the other hand, the cutting method provided in this application adopts the following technical solution:

[0017] A cutting method, applicable to the slicer, the cutting method comprising:

[0018] The main roller is driven to rotate, which in turn drives the diamond wire transmission to form a wire mesh;

[0019] The silicon rod is pressed down to contact the wire mesh, and the silicon rod is cut into a silicon wafer by diamond wire cutting.

[0020] During the cutting process, the limiting component acts on both ends of the cylinder in a contact or non-contact manner to restrict its axial movement and keep the cylinder in a fixed or substantially fixed position.

[0021] In summary, this application includes at least one of the following beneficial technical effects:

[0022] This application improves silicon wafer cutting quality by setting the main shaft as a relatively movable roller and cylinder and fixing the position of the cylinder. This avoids cutting errors caused by the overall axial displacement of the main roller. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the slicer described in this application;

[0024] Figure 2 This is a schematic diagram of the main roller of the slicer described in this application;

[0025] Figure 3 This is a first schematic diagram of the rollers and cylinder of the slicer described in this application;

[0026] Figure 4 yes Figure 3 Enlarged view of A in the middle;

[0027] Figure 5 This is a second schematic diagram of the rollers and cylinder of the slicer described in this application;

[0028] Figure 6 This is a third schematic diagram of the rollers and cylinder of the slicer described in this application;

[0029] Figure 7 yes Figure 6 Enlarged view of B in the middle;

[0030] Figure 8 This is a first schematic diagram of the arc plate of the slicer described in this application;

[0031] Figure 9 This is a second schematic diagram of the arc plate of the slicer described in this application;

[0032] Figure 10 This is a schematic diagram of the first type of limiting component of the slicer described in this application;

[0033] Figure 11 This is a second schematic diagram of the limiting component of the slicer described in this application;

[0034] Figure 12 This is a schematic diagram of the cutting method of the slicer described in this application.

[0035] Explanation of reference numerals in the attached drawings: 100, frame; 200, bearing housing; 300, diamond wire; 400, main roller; 410, roller body; 411, keyway; 412, slide rail; 413, oblong hole; 414, spring; 415, central shaft; 416, central block; 417, synchronizing element; 420, cylinder; 4201, arc plate; 421, sliding key; 422, first slider; 423, second slider; 430, limiting assembly; 431, limiting element; 432, bearing groove; 433, connecting part; 434, magnet. Detailed Implementation

[0036] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0037] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] To better understand the above technical solutions, a detailed description of the technical solutions will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this application.

[0039] In the field of silicon ingot slicing, the core working principle of a slicing machine is to form a wire mesh by winding diamond wire 300 around the main roller 400. The cutting is achieved by the downward feeding of the silicon ingot and the high-speed relative motion of the wire mesh, ultimately processing the silicon ingot into silicon wafers of a preset thickness. In this process, the cutting quality of the silicon wafer (especially its flatness) directly determines the processing accuracy, electrical performance, and yield of subsequent solar cells or chips. If the cut surface has curved surfaces, arc surfaces, or non-directional deformation (i.e., warp, bow, etc. exceed the standard), it will lead to increased material loss in subsequent grinding and polishing processes, and may even cause the silicon wafer to be scrapped due to excessive local thickness deviation. Therefore, controlling the flatness of the cut surface is a key technical challenge in the industry.

[0040] Through long-term process research and development and production practice, the applicant discovered that the problem of curved or curved surfaces on the cut surface of silicon rods is common and has complex causes. To solve this problem, the team first started with optimizing process parameters, systematically adjusting key parameters such as the tension of the diamond wire 300 mesh, the rotation speed of the main roller 400, the silicon rod pressing rate, and the pressing pressure. For example, they tried to increase the mesh tension to enhance cutting stability, or adjust the rotation speed of the main roller 400 to match the hardness of the silicon rod material. However, practice showed that these parameter adjustments could only improve the flatness of the cut surface within a small range and could not fundamentally eliminate the curved surface deformation. Moreover, excessive adjustment may lead to new problems such as diamond wire 300 breakage and silicon wafer edge chipping.

[0041] Further research revealed that the core cause of the curved surface problem is closely related to the axial displacement of the main roller 400. Specifically, during the operation of the slicer, the bearing housings 200 at both ends of the main roller 400 generate a large amount of heat due to the high-speed rotation and friction of the internal bearings. This heat is conducted to cause thermal deformation of the bearing housings 200 and the connected frame 100. Due to the large weight of the main roller 400, the thermal expansion of the bearing housings 200 and the frame 100 is insufficient to radially lift the main roller 400. Instead, the release of structural stress causes a slight axial displacement of the main roller 400. The axial gap reserved between the main roller 400 and the bearing housings 200 provides space for this displacement, ultimately causing the cutting trajectory of the wire mesh to shift with the axial displacement of the main roller 400, forming a curved cutting surface.

[0042] To address the displacement problem caused by thermal deformation, the applicant attempted to improve it through active cooling methods, such as adding a water-cooling jacket to the bearing housing 200 and forcibly cooling the main roller 400, trying to suppress thermal deformation by controlling the temperature. However, practice has shown that the heat generation during the cutting process is continuous and uneven (e.g., the frictional heat in the cutting area is superimposed on the internal bearing frictional heat of the bearing housing). Cooling measures can only reduce the increase in displacement and cannot completely eliminate axial displacement. The problem of the curved surface of the cutting surface has not been fundamentally solved.

[0043] To further compensate for the impact of displacement, the applicant explored a compensation scheme based on cutting surface feedback: by detecting the arc displacement value of the previous silicon rod cutting surface, fitting the displacement change law over time, and driving the main roller 400 to reverse displacement during the cutting of the next silicon rod to offset the error. However, this scheme has extremely high requirements for the stability of process parameters. When any parameter such as wire tension, main roller 400 speed, silicon rod pressing rate or pressure changes, for example, the hardness difference between different batches of silicon rods leading to adjustment of pressing pressure, or the wear of diamond wire 300 leading to changes in wire tension, the correlation between displacement and time will change significantly, the original compensation model will fail, and a new calibration piece needs to be cut to fit the new law. This not only increases production auxiliary time but also reduces process flexibility, making it difficult to adapt to the high-efficiency processing requirements of large-scale, multi-specification silicon rods.

[0044] Based on the above research, the applicant recognizes that existing solutions either fail to address the fundamental cause of the 400-degree axial displacement of the main roller or are overly sensitive to changes in process parameters, thus failing to efficiently and stably solve the problem of curved surfaces on the cut surface. Therefore, a new solution is urgently needed that can suppress the impact of the 400-degree axial displacement of the main roller on the cut surface at the structural level, and is unaffected by fluctuations in process parameters, in order to thoroughly improve the flatness and stability of silicon wafer cutting.

[0045] This application proposes a slicing machine, which aims to solve the problem of curved silicon wafer cutting surface caused by the 400-degree axial movement of the main roller during silicon rod cutting by optimizing the structural design, thereby improving the silicon wafer cutting accuracy. Figure 1 , 2 As shown, the slicing machine includes a frame 100, main rollers 400, bearing housings 200, a drive mechanism (not shown), and diamond wire 300. The main rollers 400 have at least two sets and each has a rotational degree of freedom to rotate around its axis. The number of bearing housings 200 is the same as the number of main rollers 400, and they correspond one-to-one. The bearing housings 200 are connected between the frame 100 and the main rollers 400. The drive mechanism is connected to the bearing housings 200 and is used to drive the main rollers 400 to rotate via the bearing housings 200. Diamond wire 300 is wound between the main rollers 400 to form a wire mesh for cutting silicon rods. The system includes a roller 410, a cylinder 420, and a limiting assembly 430. The roller 410 is rotatably connected to the frame 100 via a bearing housing 200. The cylinder 420 is used to wind diamond wire 300 and is sleeved on the roller 410. The cylinder 420 and the roller 410 are concentrically arranged, and the cylinder 420 is slidably connected to the roller 410 along the axial direction of the roller 410 so that the cylinder 420 can rotate with the roller 410 and slide along the axial direction of the roller 410. The limiting assembly 430 is disposed at both ends of the cylinder 420 along the axial direction. The limiting assembly 430 acts on both ends of the cylinder 420 with contact or non-contact to limit the position of the cylinder 420 and fix it or substantially fix it.

[0046] Specifically, the frame 100 serves as the foundational support component of the entire equipment, providing a platform for the installation and fixation of all other components, ensuring the stability of the equipment during operation. There are at least two sets of main rollers 400, each possessing rotational freedom around its axis, and are the core component driving the movement of the diamond wire 300. Two or more sets of main rollers 400 cooperate to form a stable wire mesh between them, thereby achieving the cutting of silicon rods. The main rollers 400 are equipped with V-grooves for embedding the diamond wire 300. The number of bearing housings 200 is the same as the number of main rollers 400, and they correspond one-to-one, connecting the frame 100 and the main rollers 400. The main function of the bearing housings 200 is to provide support for the shaft, reduce frictional resistance during the rotation of the main rollers 400, ensure the main rollers 400 can rotate flexibly and stably, and simultaneously transmit the weight of the main rollers 400 and the forces generated during operation to the frame 100, improving the overall rigidity of the equipment. The drive mechanism is connected to the bearing housing 200, and its function is to provide rotational power to the roller body 410, driving the main roller 400 to rotate via the bearing housing 200. The stability of the power output of the drive mechanism directly affects the rotational speed and stability of the main roller 400, and thus affects the transmission state and cutting effect of the diamond wire 300. The diamond wire 300 is wound between the main rollers 400. When the main rollers 400 rotate, the diamond wire 300 moves accordingly, forming a wire mesh between the main rollers 400 for cutting silicon rods. The diamond wire 300 has high hardness and can achieve the cutting operation through friction with the silicon rod.

[0047] Furthermore, such as Figure 3-9 As shown, the main roller 400 is the core component of this slicing machine. The main roller 400 includes a roller body 410, a cylinder 420, and a limiting assembly 430. The roller body 410 is rotatably connected to the frame 100 via a bearing housing 200, serving as the transmission and support structure for the main body of the main roller 400. The cylinder 420 is used to wind diamond wire 300, and is sleeved on the roller body 410 and concentrically arranged with the roller body 410. The concentric arrangement ensures the balance of the cylinder 420 during rotation, avoiding vibration caused by eccentricity and affecting cutting accuracy. The cylinder 420 is slidably connected to the roller body 410 along the axial direction, allowing the cylinder 420 to rotate with the roller body 410 and slide along the axial direction of the roller body 410. A V-groove for embedding the diamond wire 300 is provided on the outer side of the cylinder 420.

[0048] like Figure 2 As shown, the limiting component 430 is disposed at both ends of the cylinder 420 along the axial direction, acting on both ends of the cylinder 420 in a contact or non-contact manner, for limiting and fixing or substantially fixing the position of the cylinder 420. During the cutting process, due to frictional heat generation and other reasons, the roller 410 may undergo axial displacement. If the cylinder 420 and the roller 410 are fixedly connected, the cylinder 420 will move axially with the roller 410, causing the position of the diamond wire 300 to change, thereby forming an arc surface on the silicon rod cutting surface. However, by designing the cylinder 420 and the roller 410 to be axially slidingly connected, and using the limiting component 430 to fix the position of the cylinder 420, the cylinder 420 can be prevented from moving with the axial movement of the roller 410, ensuring the stability of the cutting position of the diamond wire 300, thereby avoiding the formation of an arc surface on the cutting surface and improving the cutting quality of the silicon wafer.

[0049] In one embodiment, such as Figure 3 , 4 As shown, the cylinder 420 has an integral annular structure; the inner wall of the cylinder 420 is provided with a sliding key 421, and the outer wall of the roller 410 is provided with a keyway 411 arranged along the axial direction of the roller 410. The sliding key 421 and the keyway 411 slide and cooperate to make the cylinder 420 and the roller 410 slide and connect; or, the inner wall of the cylinder 420 is provided with a first slider 422, and the outer wall of the roller 410 is provided with a slide rail 412 arranged along the axial direction of the roller 410. The first slider 422 and the slide rail 412 slide and cooperate to make the cylinder 420 and the roller 410 slide and connect.

[0050] Specifically, such as Figure 3 , 4As shown, when the cylinder 420 is an integral annular structure, the sliding connection between the cylinder 420 and the roller 410 can be achieved by: providing a sliding key 421 on the inner wall of the cylinder 420 and a keyway 411 arranged axially along the outer wall of the roller 410; the connection between the two is achieved through the sliding engagement of the sliding key 421 and the keyway 411. The sliding key 421 is a block structure, fixedly installed on the inner wall of the cylinder 420, and its shape matches the keyway 411; the keyway 411 is a groove opened axially on the outer wall of the roller 410, and the sliding key 421 is embedded in the keyway 411 with a certain gap between them to ensure that the sliding key 421 can slide smoothly within the keyway 411. During operation, when the roller 410 rotates, due to the cooperation between the sliding key 421 and the keyway 411, the rotational force of the roller 410 is transmitted to the sliding key 421 through the keyway 411, thereby driving the cylinder 420 to rotate together with the roller 410, ensuring the synchronous rotation of the cylinder 420 and the roller 410, so that the diamond wire 300 wound on the cylinder 420 can move stably and form a uniform wire mesh.

[0051] When the roller 410 moves axially, the sliding key 421 can slide freely axially within the keyway 411. At this time, the cylinder 420 will not move with the axial movement of the roller 410, but will remain fixed in position under the action of the limiting component 430. In this way, it is ensured that the cylinder 420 can rotate with the roller 410 to drive the diamond wire 300 to work, and the position of the cylinder 420 is stable when the roller 410 moves axially. This effectively avoids the problem of curved surface of silicon wafer cutting caused by the axial movement of the cylinder 420, and ensures the cutting accuracy of silicon wafer.

[0052] When the cylinder 420 is an integral annular structure, such as Figure 5 As shown, another way to achieve the sliding connection between the cylinder 420 and the roller 410 is as follows: a first slider 422 is provided on the inner wall of the cylinder 420, and a slide rail 412 is provided on the outer wall of the roller 410 along the axial direction of the roller 410. The connection between the two is achieved through the sliding cooperation between the first slider 422 and the slide rail 412. In one embodiment, the first slider 422 is set to be T-shaped or rectangular.

[0053] The first slider 422 is installed on the inner wall of the cylinder 420. The first slider 422 has a groove or protrusion that matches the slide rail 412. The slide rail 412 is a long strip structure fixed along the axial direction of the roller 410 to the outer wall of the roller 410. The first slider 422 and the slide rail 412 are in clearance fit to ensure that the first slider 422 can slide smoothly on the slide rail 412. When the equipment is running, the rotation of the roller 410 will drive the slide rail 412 to rotate together. Due to the cooperation between the first slider 422 and the slide rail 412, the first slider 422 will move with the rotation of the slide rail 412, thereby driving the cylinder 420 to rotate with the roller 410, ensuring that the diamond wire 300 can be normally transmitted to form a wire mesh for cutting operations.

[0054] When the roller 410 moves axially, the first slider 422 can slide axially along the slide rail 412, while the cylinder 420 remains in a fixed position under the constraint of the limiting component 430. This sliding connection method also achieves synchronous rotation of the cylinder 420 and the roller 410 and positional stability of the cylinder 420 when the roller 410 moves axially, thus avoiding the appearance of arc surfaces on the silicon wafer cutting surface. Compared with the sliding connection method of the sliding key 421 and the keyway 411, the cooperation between the first slider 422 and the slide rail 412 has better guidance during the sliding process, which can further ensure the stability of the cylinder 420 during axial sliding.

[0055] It should be noted that when the cylinder 420 is an integral annular structure, the cylinder 420 can be assembled onto the roller 410 by sleeve on the end of the roller 410; or the cylinder 420 can be sleeved onto the roller 410 by splicing the parts separately.

[0056] In another embodiment, such as Figure 6-9 As shown, the cylinder 420 includes an arc-shaped plate 4201, which has multiple sets and is independent of each other. The curvature of the arc-shaped plate 4201 matches the curvature of the roller 410. A second slider 423 is provided on the side of the arc-shaped plate 4201 near the roller 410. An oblong hole 413 is provided on the roller 410 along the axial direction of the roller 410. The second slider 423 slides and engages with the oblong hole 413 to make the cylinder 420 and the roller 410 slide and connect.

[0057] Specifically, such as Figure 6 , 7As shown, the cylinder 420 can also be composed of multiple sets of arc-shaped plates 4201, each independent of the others. The curvature of the arc-shaped plates 4201 matches the curvature of the roller 410, thus ensuring a good fit between the arc-shaped plates 4201 and the roller 410. A second slider 423 is provided on the side of the arc-shaped plate 4201 near the roller 410. The roller 410 has a waist-shaped hole 413 arranged along the axial direction of the roller 410. The second slider 423 slides into the waist-shaped hole 413, thereby realizing the sliding connection between the cylinder 420 and the roller 410. When the roller 410 rotates, the inner wall of the waist-shaped hole 413 exerts a force on the second slider 423, causing the arc-shaped plate 4201 to rotate with the roller 410, so that the diamond wire 300 wound on the arc-shaped plate 4201 can form a wire mesh for cutting. In one embodiment, the second slider 423 is configured as a T-shape; further, regarding the assembly of the second slider 423 and the arc plate 4201: the second slider 423 and the arc plate 4201 are detachably connected, for example, the second slider 423 and the arc plate 4201 are connected by screws, so that when the arc plate 4201 is attached to the roller body 410, the second slider 423 is fixed to the arc plate 4201 to achieve the cooperation between the second slider 423 and the waist-shaped hole 413.

[0058] When the roller 410 moves axially, the second slider 423 can slide axially within the waist-shaped hole 413, while the arc plate 4201 remains fixed in position under the action of the limiting component 430. Dividing the cylinder 420 into multiple independent arc plates 4201 can reduce the stress concentration problem caused by the overall structure of the cylinder 420, and also facilitate the replacement and maintenance of individual arc plates 4201.

[0059] Furthermore, such as Figure 8 As shown, the cylinder 420 includes an arc-shaped plate 4201. When there are multiple sets of arc-shaped plates 4201 that are independent of each other, the roller 410 also includes a central shaft 415, a central block 416, and a spring 414. The central shaft 415 is located inside the roller 410 and is located at the rotation center of the roller 410. The central shaft 415 is fixed relative to the roller 410. The central block 416 is located inside the roller 410 and is slidably connected to the central shaft 415. The spring 414 is connected between the second slider 423 and the central block 416 and is in a stretched state.

[0060] Specifically, such as Figure 9As shown, when the roller body 410 is hollow inside, the roller body 410 may further include a central shaft 415, a central block 416, and a spring 414. The central shaft 415 is located inside the roller body 410 and at the rotation center of the roller body 410, and the central shaft 415 is fixed relative to the roller body 410. The configuration of the central shaft 415 provides guidance and support for the sliding of the central block 416. The central block 416 is located inside the roller body 410, slidably connected to the central shaft 415, and can slide along the axial direction of the central shaft 415. The spring 414 is connected between the second slider 423 and the central block 416, and the spring 414 is in a stretched state.

[0061] Since the spring 414 is in a stretched state, it will exert a pulling force on the second slider 423. This pulling force will cause the arc plate 4201 to tend to move towards the center of the roller 410, thereby achieving radial positioning of the arc plate 4201, ensuring the fit between the arc plate 4201 and the roller 410, and avoiding the impact on cutting accuracy due to radial wobbling of the arc plate 4201 during rotation. When the roller 410 moves axially, the central shaft 415 moves with the roller 410, while the axial movement of the central block 416 is restricted under the action of the spring 414. This, in turn, drives the second slider 423 through the spring 414, so that the arc plate 4201 will not move with the axial movement of the roller 410, ensuring the stability of the position of the arc plate 4201.

[0062] Furthermore, the roller body 410 also includes a synchronizing element 417, which is located inside the roller body 410 and fixedly connected to the central block 416. The synchronizing element 417 is hollow. The second slider 423 and the spring 414 are located within the synchronizing element 417, allowing the second slider 423 to move radially within the synchronizing element 417. The synchronizing element 417 also enables the arcuate plate 4201 to slide synchronously with the central block 416 along the axial direction of the roller body 410.

[0063] Specifically, such as Figure 9As shown, based on the above structure with central shaft 415, central block 416 and spring 414, roller body 410 may also include a synchronizing element 417; the synchronizing element 417 is located inside roller body 410, the synchronizing element 417 is fixedly connected to central block 416, and the synchronizing element 417 is hollow. The second slider 423 and the spring 414 are located within the synchronizing member 417, allowing the arc plate 4201, the second slider 423, or the spring 414 to move radially due to thermal expansion. The arc plate 4201 can also be stably attached to the roller body 410 by the tension of the spring 414. Furthermore, there are multiple synchronizing members 417, each corresponding to one of the arc plates 4201. In one embodiment, all of the multiple synchronizing members 417 are fixedly connected to the center block 416. In other embodiments, the multiple synchronizing members 417 can be fixed to each other or integrally formed, so that when the roller body 410 undergoes axial displacement under the action of the synchronizing member 417, the multiple arc plates 4201 and the center block 416 can move synchronously relative to the roller body 410, so that the multiple arc plates 4201 maintain their initial positions. In other words, the synchronizing element 417 is hollow and fixed to the central block 416, accommodating the second slider 423 and the spring 414: Under normal conditions, the spring 414 pulls the second slider 423 tight, so that the arc plate 4201 stably fits against the roller body 410; when heated, the arc plate 4201, the slider, or the spring 414 can move slightly radially along the synchronizing element 417 (with a range of movement), avoiding rigid jamming; at the same time, the synchronizing element 417 corresponds one-to-one with the arc plate 4201, and multiple synchronizing elements 417 are fixed to each other or integrally formed; when the roller body 410 moves axially, under the action of the limiting component 430, at least one arc plate 4201 is limited by the limiting component 430, because The presence of multiple synchronizing elements 417 allows the multiple synchronizing elements 417, multiple arc plates 4201, and the center block 416 to slide synchronously on the central axis 415 relative to the roller body 410. The synchronizing elements 417 synchronously drive all the arc plates 4201, ensuring that the relative positions of each arc plate 4201 remain unchanged. That is, the overall structure of the synchronizing elements 417 links the movement of each arc plate 4201. When the roller body 410 moves axially, the center block 416 slides along the central axis 415, and the synchronizing elements 417 synchronously transmit this movement to the second slider 423 of all the arc plates 4201, ensuring that the axial movement of all the arc plates 4201 is completely consistent.

[0064] In other embodiments, such as Figure 8 As shown, the roller body 410 is hollow inside, and the second sliders 423 of each arc plate 4201 are connected by springs 414 so that each arc plate 4201 is radially positioned and can slide synchronously along the axial direction of the roller body 410.

[0065] When the roller body 410 is hollow, the second sliders 423 of each arc plate 4201 are connected by springs 414, enabling radial positioning and synchronous sliding of each arc plate 4201. The elastic force of the springs 414 acts on each second slider 423, causing the arc plates 4201 to tighten towards the center of the roller body 410, achieving radial positioning of the arc plates 4201 and ensuring good fit between the arc plates 4201 and the roller body 410. When the roller body 410 rotates, under the connection of the springs 414, each arc plate 4201 can maintain synchronous rotation, avoiding uneven tension of the diamond wire 300 caused by asynchronous rotation of individual arc plates 4201.

[0066] When the roller 410 moves axially, the second sliders 423 are connected by springs 414, allowing each slider 423 to slide synchronously within the oblong hole 413. Meanwhile, the arc-shaped plate 4201 remains fixed in position under the coordinated action of the springs 414, thus ensuring the accuracy of the cutting surface. In this embodiment, there is no need to set up a central shaft 415 and a central block 416, resulting in a relatively simple structure and reducing the manufacturing and maintenance costs of the equipment.

[0067] like Figure 10 , 11 As shown, the limiting components 430 are disposed at both ends of the cylinder 420 along the axial direction. The limiting components 430 act on both ends of the cylinder 420 through contact or non-contact to limit the position of the cylinder 420 to be fixed or substantially fixed. The limiting components 430 include limiting members 431, and there are two sets of limiting members 431. The two sets of limiting members 431 are fixed in position and are respectively located at both ends of the cylinder 420 along the axial direction. The limiting members 431 are rotatably connected to the ends of the cylinder 420 to restrict the axial movement of the cylinder 420 and allow the cylinder 420 to rotate with the roller 410.

[0068] For the annular integral structure of the cylinder 420, the limiting assembly 430 may include two sets of limiting members 431. The two sets of limiting members 431 are fixed in position and located at both ends of the cylinder 420 along the axial direction. The limiting members 431 are rotatably connected to the ends of the cylinder 420. This rotatable connection restricts the axial movement of the cylinder 420 and allows the cylinder 420 to rotate with the roller 410. The fixed position of the limiting members 431 ensures that when the cylinder 420 tends to move axially, the limiting members 431 exert a blocking force on the ends of the cylinder 420, preventing axial movement. The rotatable connection also ensures that when the roller 410 rotates, the cylinder 420 can rotate freely relative to the limiting members 431, and the fixed position of the limiting members 431 will not affect the rotational movement of the cylinder 420. The contact-type limiting assembly 430 achieves the limiting of the cylinder 420 through mechanical contact, providing a stable and reliable limiting effect. Figure 10As shown, in one embodiment, the end of the cylinder 420 is connected to a bearing groove 432, and the connecting part 433 of the limiting member 431 is embedded in the bearing groove 432 to achieve a movable connection with the end of the cylinder 420.

[0069] The limiting assembly 430 can also be a non-contact design. The limiting assembly 430 includes two sets of fixed-position limiting members 431, located at both ends of the cylinder 420 along the axial direction; for example... Figure 11 As shown, magnets 434 of the same polarity are provided at the end of the cylinder 420 and on the limiting member 431. Magnetic repulsion restricts the axial movement of the cylinder 420 while allowing the cylinder 420 to rotate with the roller 410. Based on the principle of like poles repulsion, the magnets 434 of the same polarity generate a repulsive force. When the cylinder 420 tends to move axially, this repulsive force prevents it from moving, thus achieving axial limiting of the cylinder 420. Because it is a non-contact connection, the cylinder 420 can maintain its relative position with the limiting member 431 under the action of the repulsive force, while freely rotating with the roller 410. The non-contact limiting component 430 avoids the wear problems caused by mechanical contact, extends the service life of the equipment, and reduces the impact of heat generated by contact friction on equipment performance. In one embodiment, magnets 434 of the same polarity are connected to both the end of the cylinder 420 and the limiting member 431, for example, both are N-pole or both are S-pole.

[0070] For the cylindrical body 420 composed of curved plates 4201, the limiting assembly 430 includes two sets of fixed limiting members 431, located at both ends of the curved plates 4201 along the axial direction. Magnets 434 of the same polarity are provided at the ends of the curved plates 4201 and on the limiting members 431. Magnetic repulsion restricts the axial movement of the curved plates 4201 while allowing them to rotate with the roller 410. Also based on the principle of like poles repulsion, the repulsive force generated by the magnets 434 prevents the axial movement of the curved plates 4201, ensuring the stability of the position of the curved plates 4201 during the cutting process. Simultaneously, the non-contact design does not affect the rotational movement of the curved plates 4201 with the roller 410. The limiting assembly 430 effectively limits each curved plate 4201 within the cylindrical body 4200, ensuring the relative positional stability between multiple curved plates 4201, thereby ensuring the stability of the wire mesh formed by the diamond wire 300 and improving cutting accuracy. In one embodiment, magnets 434 with the same polarity are connected to the end of the arc plate 4201 and the limiting member 431, for example, both are N poles or both are S poles.

[0071] This application also provides a cutting method applicable to the aforementioned slicer, such as... Figure 12 As shown, the cutting methods include:

[0072] S1: Drive the main roller 400 to rotate, which drives the diamond wire 300 to form a wire mesh;

[0073] S2: Press the silicon rod down to contact the wire mesh, and cut the silicon rod into a silicon wafer using diamond wire 300;

[0074] S3: During the cutting process, the limiting component 430 acts on both ends of the cylinder 420 through contact or non-contact means to restrict its axial movement and keep the position of the cylinder 420 fixed or basically fixed.

[0075] Specifically, the main roller 400 is driven to rotate, which in turn drives the diamond wire 300 to form a wire mesh. The drive mechanism provides power, which drives the roller body 410 of the main roller 400 to rotate through the bearing housing 200. The rotation of the roller body 410 drives the cylinder 420 (whether it is an integral ring structure or a structure composed of arc plates 4201) to rotate through the corresponding sliding connection structure, thereby causing the diamond wire 300 wound on the cylinder 420 to move accordingly, forming a stable wire mesh between the main rollers 400.

[0076] The silicon rod is pressed down to contact the wire mesh, and then cut into silicon wafers by the diamond wire 300. The silicon rod moves downward under the action of the corresponding feeding mechanism and comes into contact with the high-speed moving diamond wire 300. Intense friction is generated between the diamond wire 300 and the silicon rod, gradually cutting the silicon rod into silicon wafers.

[0077] During the cutting process, the limiting components 430 act on both ends of the cylinder 420 through contact or non-contact methods, restricting its axial movement and keeping the cylinder 420 in a fixed or substantially fixed position. As described above, the limiting components 430 are located at both ends of the cylinder 420 (or the arc plate 4201), generating a corresponding force to prevent the cylinder 420 from moving axially, thus ensuring the stability of the cylinder 420's position during the cutting process. "Fixed or substantially fixed" means that the position of the cylinder 420 is stable during the cutting process, including complete fixation or unavoidable positional fluctuations within the allowable range due to vibration or other reasons. It is understood that to improve the mobility between the cylinder 420 and the roller 410, lubricant can be applied to the connection between the cylinder 420 and the roller 410. During cutting, the sprayed cutting fluid helps to cool the cylinder 420, resulting in less heat generation from the cylinder 420.

[0078] This effectively avoids the arcing problem of the silicon wafer cutting surface caused by the axial movement of the cylinder 420, improving the cutting quality and precision of the silicon wafer. Throughout the cutting process, all components cooperate with each other, from the rotation of the main roller 400 and the transmission of the diamond wire 300, to the feeding of the silicon rod and the limiting component 430, ensuring the smooth progress and high-quality completion of the cutting operation.

[0079] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0080] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A slicer, characterized in that, include: Rack (100); The main roller (400) has at least two sets and has a rotational degree of freedom to rotate about an axis; Bearing housings (200), the number of bearing housings (200) is the same as the number of main rollers (400) and they correspond one-to-one with the main rollers (400). The bearing housings (200) are connected between the frame (100) and the main rollers (400). A drive mechanism connected to a bearing housing (200) is used to drive the main roller (400) to rotate via the bearing housing (200); as well as Diamond wire (300) is wound between the main rollers (400) to form a wire mesh for cutting silicon rods between the main rollers (400); The main roller (400) includes: Roller body (410), the roller body (410) is rotatably connected to the frame (100) via the bearing housing (200); A cylindrical body (420) is used to wind diamond wire (300). The cylindrical body (420) is sleeved on the roller body (410). The cylindrical body (420) and the roller body (410) are arranged concentrically. The cylindrical body (420) is slidably connected to the roller body (410) along the axial direction of the roller body (410) so that the cylindrical body (420) can rotate with the roller body (410) and can slide along the axial direction of the roller body (410). The cylinder (420) includes an arc plate (4201), which has multiple sets and is independent of each other. The arc of the arc plate (4201) matches the arc of the roller (410). A second slider (423) is provided on the side of the arc plate (4201) near the roller body (410); an oblong hole (413) is provided on the roller body (410) along the axial direction of the roller body (410), and the second slider (423) slides and engages with the oblong hole (413) to make the cylinder (420) slide and connect with the roller body (410); The roller body (410) is hollow inside, and the roller body (410) further includes: A central shaft (415) is located inside the roller body (410), and the central shaft (415) is located at the rotation center of the roller body (410). The central shaft (415) is fixed relative to the roller body (410). A center block (416), located inside the roller body (410), is slidably connected to the central shaft (415); and A spring (414) is connected between the second slider (423) and the center block (416), and the spring (414) is in a stretched state; The roller body (410) further includes: Synchronizing element (417), the synchronizing element (417) is located inside the roller body (410), the synchronizing element (417) is fixedly connected to the center block (416), and the synchronizing element (417) is hollow; The second slider (423) and the spring (414) are located within the synchronizing member (417) so that the second slider (423) can move radially along the roller (410) within the synchronizing member (417), and the synchronizing member (417) allows the arc plate (4201) to slide synchronously with the center block (416) along the axial direction of the roller (410).

2. A slicer according to any one of claims 1, characterized in that, Also includes: Limiting component, the limiting component (430) includes: The limiting member (431) has two sets, and the two sets of the limiting members (431) are fixed in position and are respectively located at both ends of the arc plate (4201) along the axial direction; the ends of the arc plate (4201) and the limiting member (431) are provided with magnets (434) of the same polarity, which restrict the axial movement of the arc plate (4201) by magnetic repulsion and allow the arc plate (4201) to rotate with the roller (410).

3. A cutting method, characterized in that, Applicable to the slicer as described in any one of claims 1-2, the cutting method includes: The main roller (400) is driven to rotate, which in turn drives the diamond wire (300) to form a wire mesh; The silicon rod is pressed down to contact the wire mesh, and the silicon rod is cut into a silicon wafer by diamond wire (300).

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