An industrial focusing method, device, equipment and storage medium

Abstract

The application provides an industrial focusing method, device, equipment and storage medium, which are applied to the technical field of industrial focusing. The method comprises the following steps: after obtaining a light spot image, projecting the light spot image from multiple preset angles to obtain a brightness distribution curve of the light spot image at each preset angle; screening a first brightness peak point and a second brightness peak point from the brightness distribution curves of all the preset angles; determining a light spot center of the light spot image according to the first brightness peak point and the second brightness peak point; and adjusting the distance between a microscopic imaging component and a target object based on the light spot center and a preset light spot center of the target object, so that the focus point of the microscopic imaging component is located on the surface of the target object. The application solves the problem that the surface of the target object affects the laser light spot in the traditional industrial focusing method and interferes with the focusing accuracy and accuracy.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of industrial focusing, and in particular to an industrial focusing method, device, equipment and storage medium. BACKGROUND

[0002] In the industrial field, especially in scenarios such as precision manufacturing, material detection and biomedical imaging, industrial focusing systems play a crucial role. One of the core purposes is to quickly and accurately focus on the target object, so as to obtain clear and accurate images, so that subsequent analysis and measurement work can be smoothly carried out. As a common active focusing technology, the triangulation method is widely used in many industrial focusing systems because of its simple principle, relatively easy implementation, and high focusing accuracy.

[0003] However, in actual application, the surface of the target object is often not an ideal flat plane, but has different degrees of concave-convex shape. These concave-convex shapes will have a significant impact on the interaction between the laser spot and the surface of the target object during the focusing process of the triangulation method, thereby interfering with the focusing accuracy and accuracy. SUMMARY

[0004] The purpose of the present application is to provide an industrial focusing method, device, equipment and storage medium, which solves the problem of the influence of the surface of the target object on the laser spot in the traditional industrial focusing method, and interferes with the focusing accuracy and accuracy.

[0005] In a first aspect, an industrial focusing method is provided, which is applied to an industrial focusing system. The industrial focusing system includes a laser emitting component, a receiving imaging component, a microscopic imaging component and a driving component. The laser emitting component is used to emit a laser beam to a target object, and the laser beam is focused on the surface of the target object and reflected to form a laser spot. The laser beam is a diagonal cross-shaped laser beam. The receiving imaging component is used to obtain the laser spot to obtain a spot image. The industrial focusing method includes: after obtaining the spot image, projecting the spot image from a plurality of preset angles to obtain the brightness distribution curve of the spot image at each preset angle. From the brightness distribution curves of all preset angles, a first brightness peak point and a second brightness peak point are selected. The first brightness peak point and the second brightness peak point are two brightness value maximum points in the brightness distribution curves of all preset angles. The first brightness peak point corresponds to a first spot image formed by the first arm of the diagonal cross-shaped laser beam. The second brightness peak point corresponds to a second spot image formed by the second arm of the diagonal cross-shaped laser beam. According to the first brightness peak point and the second brightness peak point, the spot center of the spot image is determined. Based on the spot center and the preset spot center of the target object, the distance between the microscopic imaging component and the target object is adjusted, so that the focal point of the microscopic imaging component is located on the surface of the target object.

[0006] The industrial focusing method provided by the embodiments of the present application can more comprehensively analyze the characteristics of the light spot image, effectively avoid the center extraction error caused by light spot deformation, uneven intensity and the like, more accurately determine the light spot center position compared with the traditional single angle or simple processing method, thereby improving the accuracy of industrial focusing and making the focus of the microscopic imaging assembly more accurately fall on the target object surface. Meanwhile, the present application adopts the laser light spot in the shape of a slanted cross. In actual application, even if the target object surface becomes irregular due to the complex conditions of the target object surface, the center of the light spot can be accurately determined by the industrial focusing method provided by the embodiments of the present application through the difference in direction, thereby enhancing the adaptability of different types of light spots and expanding the applicable range of the present application under different industrial scenarios and different target object conditions.

[0007] In a possible implementation, the light spot center of the light spot image is determined according to the first brightness peak point and the second brightness peak point, including: determining a first image coordinate of the first brightness peak point in an image coordinate system of the receiving imaging assembly and a second image coordinate of the second brightness peak point in the image coordinate system according to a first preset angle corresponding to the first brightness peak point, first position information of the first brightness peak point in a brightness distribution curve of the first preset angle, a second preset angle corresponding to the second brightness peak point, and second position information of the second brightness peak in a brightness distribution curve of the second preset angle. A first straight line of the first light spot image and a second straight line of the second light spot image are determined according to the first image coordinate and the second image coordinate. The intersection of the first straight line and the second straight line is calculated to obtain the light spot center.

[0008] In a possible implementation, any one of the first image coordinate and the second image coordinate is taken as a target image coordinate, the first light spot image and the second light spot image are taken as target light spot images, and the first straight line and the second straight line are taken as target straight lines. The target straight line of the target light spot image is determined according to the target image coordinate, including: constructing a parameter space corresponding to the target light spot image. The horizontal axis of the parameter space represents the angle of a candidate straight line. The vertical axis of the parameter space represents the polar radius parameter of the candidate straight line. Based on the target image coordinate, all target angles in the parameter space are traversed to determine the target polar radius parameter corresponding to each target angle in all target angles. The target straight line is determined according to all target angles and the target polar radius parameter corresponding to each target angle.

[0009] In a possible implementation, the target straight line is determined according to all target angles and target polar radius parameters corresponding to each target angle, and includes: constructing candidate straight line parameter combinations by using the target angles and the target polar radius parameters. The candidate straight line parameter combinations in the parameter space are voted based on the target image coordinates to obtain the target straight line.

[0010] In a possible implementation, the first image coordinate of the first luminance peak point in the image coordinate system of the receiving imaging assembly and the second image coordinate of the second luminance peak point in the image coordinate system are determined according to the first preset angle corresponding to the first luminance peak point, the first position information of the luminance distribution curve of the first luminance peak point at the first preset angle, the second preset angle corresponding to the second luminance peak point, and the second position information of the luminance distribution curve of the second luminance peak at the second preset angle, and include: performing inverse rotation on the first preset angle and the first position information to obtain the first image coordinate. The second image coordinate is obtained by performing inverse rotation on the second preset angle and the second position information.

[0011] In a possible implementation, the first luminance peak point and the second luminance peak point are selected from the luminance distribution curves of all preset angles, and include: for a target luminance distribution curve of any preset angle in the luminance distribution curves of all preset angles, a point with the maximum luminance value is extracted from the target luminance distribution curve to obtain a luminance peak point. The luminance peak point includes a luminance value and position information. The first luminance peak point and the second luminance peak point are selected from the luminance peak points of the luminance distribution curves of all preset angles.

[0012] In a possible implementation, the distance between the microscopic imaging assembly and the target object is adjusted based on the spot center and the preset spot center of the target object, and includes: determining the offset amount of the spot center according to the spot center and the preset spot center. The defocus amount of the target object is determined according to the offset amount and system parameters of the industrial focusing system. The system parameters include the angle of the laser emitting assembly and the plane where the target object is located. The distance between the microscopic imaging assembly and the target object is adjusted based on the defocus amount, so that the focus of the microscopic imaging assembly is located on the surface of the target object.

[0013] In a second aspect, the embodiments of the present application provide an industrial focusing device applied to an industrial focusing system. The industrial focusing system includes a laser emitting assembly, a receiving imaging assembly, a microscopic imaging assembly, and a driving assembly. The laser emitting assembly is configured to emit a laser beam to a target object, and the laser beam is focused on the surface of the target object and reflected to form a laser spot. The laser beam is a diagonal cross-shaped laser beam. The receiving imaging assembly is configured to acquire the laser spot to obtain a spot image. The industrial focusing device includes a projection module, a screening module, a determination module, and an adjustment module.

[0014] The projection module is configured to project the light spot image from a plurality of preset angles to obtain a luminance distribution curve of the light spot image at each preset angle after obtaining the light spot image.

[0015] The screening module is configured to screen a first luminance peak point and a second luminance peak point from the luminance distribution curves at all the preset angles. The first luminance peak point and the second luminance peak point are two luminance value maximum points in the luminance distribution curves at all the preset angles. The first luminance peak point corresponds to a first light spot image formed by a first arm of the laser beam in the shape of a cross. The second luminance peak point corresponds to a second light spot image formed by a second arm of the laser beam in the shape of a cross.

[0016] The determining module is configured to determine a light spot center of the light spot image according to the first luminance peak point and the second luminance peak point.

[0017] The adjusting module is configured to adjust a distance between the microscopic imaging assembly and the target object based on the light spot center and a preset light spot center of the target object, so that a focal point of the microscopic imaging assembly is located on a surface of the target object.

[0018] In a third aspect, an industrial focusing device is provided, which has a function of implementing the industrial focusing method of the first aspect or any possible implementation manner. The function can be implemented by hardware, or by hardware executing corresponding software. The hardware or software includes one or more modules corresponding to the above functions.

[0019] In a fourth aspect, a computer readable storage medium is provided, which stores instructions, when running on a computer, enabling the computer to perform the industrial focusing method of the first aspect or any possible implementation manner.

[0020] In a fifth aspect, a computer program product containing instructions is provided, when running on a computer, enabling the computer to perform the industrial focusing method of the first aspect or any possible implementation manner.

[0021] The technical effects brought by any one of the second aspect to the fifth aspect can refer to the technical effects brought by different possible implementation manners of the first aspect, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Figure 1 A system architecture diagram of an industrial focusing system provided by an embodiment of the present application is shown in FIG. 1.

[0024] Figure 2 A flowchart of an industrial focusing method provided by an embodiment of the present application is shown in FIG. 2.

[0025] Figure 3 A structural diagram of an industrial focusing device provided by an embodiment of the present application is shown in FIG. 3.

[0026] Figure 4 Another system architecture diagram of an industrial focusing system provided by an embodiment of the present application is shown in FIG. 4. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, not all embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those skilled in the art without creative labor based on the embodiments in the present application are within the scope of protection of the present application.

[0029] At present, when observing a target object by using an industrial focusing system, there are different degrees of concave-convex shapes on the surface of the target object. These concave-convex shapes will have a significant influence on the interaction between the laser spot and the surface of the target object in the industrial focusing system, and then interfere with the precision and accuracy of the focusing system.

[0030] For example, when the concave-convex shape of the target object surface is completely overlapped with the laser spot, the shape and energy distribution of the laser spot are severely damaged. In this case, the reflection characteristics of the laser change, causing the industrial focusing system to fail to accurately identify the real plane position of the target object. Further, the system may misjudge, or even cause system jitter, seriously affecting the stability and effectiveness of the focusing process, increasing the risk of focusing failure, and reducing work efficiency.

[0031] If the boundary of the concave or convex of the target object surface falls within the coverage of the laser spot, the shape and intensity distribution of the laser spot will become complex and irregular. The asymmetry, multi-peak characteristics or stretching deformation of such a spot make the reflected light of different heights enter the lens at the same time. The result is that one spot position corresponds to multiple different physical height information, resulting in inaccurate extraction of the spot center and easy jumping. This not only increases the complexity of the focusing algorithm, but also may cause the focusing accuracy to decrease, or even make the focusing algorithm invalid, failing to achieve the expected high-precision focusing target.

[0032] Based on this, the embodiments of the present application provide an industrial focusing method, device, equipment and storage medium, the method comprising: after obtaining the spot image, projecting the spot image from multiple preset angles to obtain the brightness distribution curve of the spot image at each preset angle. From the brightness distribution curves of all preset angles, the first and second brightness peak points are selected. The first and second brightness peak points are two brightness value maximum points in the brightness distribution curves of all preset angles. The first brightness peak point corresponds to the first spot image formed by the first arm of the laser beam in the shape of a diagonal cross. The second brightness peak point corresponds to the second spot image formed by the second arm of the laser beam in the shape of a diagonal cross. According to the first and second brightness peak points, the spot center of the spot image is determined. Based on the spot center and the preset spot center of the target object, the distance between the microscopic imaging assembly and the target object is adjusted to make the focal point of the microscopic imaging assembly on the surface of the target object.

[0033] The industrial focusing method provided in this application projection method projects a spot image from multiple preset angles and selects two brightness peak points to determine the spot center. This method can more comprehensively analyze the characteristics of the spot image and effectively avoid center extraction errors caused by spot deformation, uneven intensity, and other problems. Compared with traditional single-angle or simple processing methods, it can more accurately determine the spot center position, thereby improving the accuracy of industrial focusing and enabling the focus of the microscopic imaging component to fall more precisely on the surface of the target object. Furthermore, this application uses a diagonal cross-shaped laser spot. In practical applications, even if the diagonal cross-shaped laser spot becomes irregular due to the complex conditions of the target object surface, the center of the spot can still be accurately determined by the industrial focusing method provided in this application through directional differences. This enhances the adaptability of different types of spots and expands the applicability of this application in different industrial scenarios and under different target object conditions.

[0034] The methods provided in the embodiments of this application will now be described in conjunction with the specific accompanying drawings.

[0035] Firstly, embodiments of this application provide an industrial focusing system. For example... Figure 1 As shown, the industrial focusing system 100 may include a laser emitting component 101, a receiving imaging component 102, a microscopic imaging component 103, and a driving component 104.

[0036] The laser emitting component 101 is used to generate a laser beam of a preset shape and emit the laser beam of the preset shape toward the target object. The laser beam is focused onto the surface of the target object and reflected by the target object to form a laser spot.

[0037] For example, the shape of the laser beam can be a diagonal cross shape.

[0038] The receiving imaging component 102 is used to receive the laser spot formed by the reflection of the laser beam from the surface of the target object. For example, the receiving imaging component 102 can be a charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS) sensor.

[0039] The microscopic imaging assembly 103 provides high-magnification magnification, enabling operators or industrial focusing systems to observe the microstructure of a target object in detail. The microscopic imaging assembly 103 may include multiple precision optical lenses, such as objectives, eyepieces, and intermediate lenses.

[0040] The drive assembly 104 is used to move the microscope imaging assembly 103 or the stage according to a control signal. This movement is typically performed along the optical axis (i.e., the Z-axis direction) to adjust the distance between the microscope imaging assembly 103 and the target object, thereby achieving precise focusing.

[0041] It should be noted that the above Figure 1 The industrial focusing system 100 shown is only an example of the application scenario of the scheme of the present application, and is not a limitation on the application scenario of the scheme of the present application.

[0042] In one aspect, the present application provides an industrial focusing method, which can be executed by Figure 1 As shown in the industrial focusing system 100 shown in the figure, the method can include the following steps. Figure 2

[0043] S201, after obtaining the light spot image, projecting the light spot image from multiple preset angles to obtain the luminance distribution curve of the light spot image at each preset angle.

[0044] Specifically, the laser emitting assembly emits a laser beam in the shape of an oblique cross to the target object, and the laser beam in the preset shape is reflected by the surface of the target object to form a laser light spot. The receiving imaging assembly obtains the laser light spot reflected by the surface of the target object to obtain a light spot image.

[0045] After receiving the light spot image, the light spot image is projected from multiple preset angles to convert the light spot image into a one-dimensional luminance distribution curve. The one-dimensional luminance distribution curve can be used to represent the change of the pixel luminance of the light spot image at the preset angle.

[0046] For example, from 0° to 360°, the light spot image is projected with a center point rotation every 1° to obtain a one-dimensional projection luminance distribution curve of the light spot image at each angle.

[0047] By using the laser beam in the shape of an oblique cross to irradiate the target object, the laser light spot in the shape of an oblique cross can be obtained. Through its unique "X" shape, position information can be provided in the horizontal and vertical directions respectively, significantly enhancing the robustness of the industrial focusing system of the present application. Even in a complex or disturbed environment, the system can rely on the position information in the unaffected direction to maintain accurate focusing and ensure stable operation.

[0048] At the same time, the light spot in the shape of an oblique cross in the present application can make the intersection position in the light spot image not easily covered by other light spots. This design ensures the stability and recognizability of the intersection position, thereby improving the accuracy of the light spot center positioning. Compared with point light spots or linear light spots, the oblique cross light spot can still provide sufficient information to determine the light spot center when facing shielding or blurring, and can avoid focusing failure caused by insufficient information.

[0049] S202, filtering out the first luminance peak point and the second luminance peak point from the luminance distribution curves of all preset angles.

[0050] ​The first luminance peak point and the second luminance peak point are two luminance value maximum points in the luminance distribution curves of all preset angles. The first luminance peak point corresponds to a first light spot image formed by a first arm of the laser beam in the shape of a cross. The second luminance peak point corresponds to a second light spot image formed by a second arm of the laser beam in the shape of a cross.

[0051] In one possible implementation, for a target luminance distribution curve of any preset angle among the luminance distribution curves of all preset angles, a point with the maximum luminance value is extracted from the target luminance distribution curve to obtain a luminance peak point. The luminance peak point includes a luminance value and position information. The first luminance peak point and the second luminance peak point are selected from the luminance peak points of the luminance distribution curves of all preset angles.

[0052] For example, for a one-dimensional luminance distribution curve of each angle among all preset angles, a maximum value of luminance is extracted from the one-dimensional luminance distribution curve of the angle and the corresponding position of the maximum value. These maximum values and positions jointly constitute a so-called light distribution, denoted as Each light element in the light distribution includes two parts: and , that is, light={ , }.

[0053] For each light element in the light distribution, a first derivative and a second derivative are first calculated. The point with the zero first derivative can be a maximum value point or a minimum value point. Whether it is a maximum value point or a minimum value point is determined by checking the sign of the second derivative at the point. If the second derivative is less than zero, it is a maximum value point.

[0054] By applying the above second derivative discrimination method to all light elements in the light distribution, two luminance peak points can be found. The two luminance peak points correspond to the brightest positions of the two arms of the cross-shaped light spot at different projection angles. Further, the projection angles of the two luminance peak points and , and the positions of the two luminance peak points on the one-dimensional projection luminance distribution curve and are obtained.

[0055] In S203, a light spot center of the light spot image is determined according to the first luminance peak point and the second luminance peak point.

[0056] Specifically, first, the positions of the first and second luminance peak points in the rotated coordinate system are converted into the positions in the original coordinate system to obtain first and second image coordinates. A parameter space corresponding to the spot image is constructed, the horizontal axis of the parameter space represents the angle of the candidate straight line, and the vertical axis represents the polar parameter of the candidate straight line. Based on the first and second image coordinates, all possible straight line parameters in the parameter space are voted, and by counting the voting results in the parameter space, the two straight lines that are most likely to exist can be obtained. Based on the voting results, the two points with the highest accumulators in the parameter space are obtained, and the corresponding two target straight lines can be obtained. The two target straight lines correspond to the first and second luminance peak points, respectively. Finally, based on the two target straight lines, the intersection point is calculated to obtain the spot center of the spot image.

[0057] In a possible implementation, the first image coordinate of the first luminance peak point in the image coordinate system of the receiving imaging assembly and the second image coordinate of the second luminance peak point in the image coordinate system are determined according to the first preset angle corresponding to the first luminance peak point, the first position information of the first luminance peak point in the luminance distribution curve at the first preset angle, the second preset angle corresponding to the second luminance peak point, and the second position information of the second luminance peak in the luminance distribution curve at the second preset angle.

[0058] Specifically, the first image coordinate is obtained by performing inverse rotation operation on the first preset angle and the first position information. The second image coordinate is obtained by performing inverse rotation operation on the second preset angle and the second position information.

[0059] For example, the first preset angle and the first position information of the first luminance peak point in the rotated coordinate system are converted into the position of the first luminance peak point in the original coordinate system, i.e., the first image coordinate, by using the inverse rotation formula. The second preset angle and the second position information of the second luminance peak point in the rotated coordinate system are converted into the position of the second luminance peak point in the original coordinate system, i.e., the second image coordinate, by using the inverse rotation formula.

[0060] The inverse rotation formula can be as follows:

[0061]

[0062] wherein, , is the rotated coordinate, is the preset angle, , is the original position coordinate of the position information corresponding to the preset angle.

[0063] The inverse rotation formula is obtained by performing inverse rotation operation on the following rotation formula. The rotation formula is as follows:

[0064]

[0065] Further, since the straight line corresponding to the first image coordinate and the second image coordinate intersects with the center coordinate system, the position of the first image coordinate A can be determined by the following formula and the position of the second image coordinate B .

[0066]

[0067] Further, according to the first image coordinate and the second image coordinate, the first straight line of the first light spot image and the second straight line of the second light spot image are determined.

[0068] Specifically, a parameter space corresponding to the target light spot image is constructed. Wherein, the horizontal axis of the parameter space represents the angle of the candidate straight line. The vertical axis of the parameter space represents the polar radius parameter of the candidate straight line. Based on the target image coordinate, all target angles in the parameter space are traversed to determine the target polar radius parameter corresponding to each target angle. According to all target angles and the target polar radius parameter corresponding to each target angle, the target straight line is determined. For all target angles and the target polar radius parameter corresponding to each target angle, the target angle and the target polar radius parameter are used to construct a candidate straight line parameter combination, and the candidate straight line parameter combination in the parameter space is voted based on the target image coordinate to obtain the target straight line.

[0069] Exemplarily, two two-dimensional parameter space accumulators are defined, and for any known point in A and B , a set of all straight lines that can fall on the known point is constructed . Wherein, is the horizontal axis of the parameter space, is the vertical axis of the parameter space. This process constructs a set of straight lines based on the known point, rather than starting from the edge points of the entire light spot image, which can simplify the search range of the candidate straight line. Further, based on the center point (xi, yi) of all edge points in the light spot image, the angle of the candidate straight line is calculated respectively combined with the known point A and the known point B:

[0070] A ;

[0071] B ;

[0072] Further, the positions of the points in the accumulators that are more likely to be straight lines , are obtained, which are the points with the highest values determined by voting in the accumulators. The two points with higher possibility are respectively , ) and ( , ). Based on the ( , ), the slope of the first straight line can be determined as and the intercept as . Based on the ( , ), the slope of the second straight line can be determined as and the intercept as .

[0073] Finally, the intersection of the first straight line and the second straight line is calculated to obtain the center of the light spot.

[0074] Exemplarily, based on the slope and the intercept of the first straight line and the second straight line obtained according to the above steps, the position of the center of the light spot can be obtained as (x, y) by solving the equation group: .

[0075] S204, based on the center of the light spot and the preset center of the light spot of the target object, the distance between the microscopic imaging assembly and the target object is adjusted so that the focal point of the microscopic imaging assembly is located on the surface of the target object.

[0076] In a possible implementation, according to the center of the light spot and the preset center of the light spot, the offset of the center of the light spot is determined. According to the offset and the system parameters of the industrial focusing system, the defocus amount of the target object is determined. The system parameters include the angle between the laser emitting assembly and the plane where the target object is located. Based on the defocus amount, the distance between the microscopic imaging assembly and the target object is adjusted so that the focal point of the microscopic imaging assembly is located on the surface of the target object.

[0077] Specifically, the deviation between the actual center of the light spot and the preset center of the light spot (the position where the center of the light spot should be located in the ideal case) is compared to obtain the offset of the center of the light spot. According to the offset and the parameters of the system (such as the laser emitting angle), the defocus amount of the target object, that is, the distance deviation between the plane where the target object is located and the best imaging plane of the microscopic imaging assembly, is calculated. Then, according to the calculated defocus amount, the driving assembly adjusts the distance between the microscopic imaging assembly (such as the objective lens or the objective table) and the target object. For example, if the defocus amount is positive, it indicates that the target object is above the focal plane of the microscopic imaging assembly, and the driving assembly will drive the objective lens to move downward or drive the objective table carrying the target object to move upward until the focal point of the microscopic imaging assembly accurately falls on the surface of the target object, achieving accurate focusing.

[0078] The application determines the light spot center by projecting the light spot image from multiple preset angles and screening two brightness peak points. This method can more comprehensively analyze the characteristics of the light spot image, effectively avoid the center extraction error caused by light spot deformation, uneven intensity and the like, more accurately determine the light spot center position compared with the traditional single angle or simple processing method, thereby improving the accuracy of industrial focusing and making the focus of the microscopic imaging assembly more accurately fall on the target object surface.

[0079] The above describes the scheme provided by the embodiments of the application from the perspective of the working principle of the equipment. It can be understood that, in order to realize the above functions, the industrial focusing equipment comprises a hardware structure and / or a software module for executing each function. Those skilled in the art should easily realize that, in combination with the algorithm steps of each example described in the embodiments disclosed herein, the application can be realized in the form of hardware or a combination of hardware and computer software. Whether a certain function is executed in the form of hardware or computer software driving hardware depends on the specific application and design constraints of the technical solution. The skilled person can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the application.

[0080] The embodiments of the application can divide the functional modules of the industrial focusing equipment according to the above method examples. For example, each functional module can be divided according to each function, or two or more functions can be integrated in one processing module. The above integrated module can be realized in the form of hardware or software functional module.

[0081] It should be noted that the division of the modules in the embodiments of the application is illustrative, and is only a logical functional division. In actual implementation, there can be another division method. In the case of dividing each functional module according to each function, Figure 3 A possible composition schematic diagram of the industrial focusing device involved in the above and embodiments is shown. As shown in the figure, Figure 3 The industrial focusing device 300 can include a projection module 301, a screening module 302, a determination module 303 and an adjustment module 304.

[0082] The projection module 301 is configured to support the industrial focusing device 300 to perform the step S101 in the schematic industrial focusing method. Figure 2 The step S201 in the schematic industrial focusing method.

[0083] The screening module 302 is configured to support the industrial focusing device 300 to perform the step S202 in the schematic industrial focusing method. Figure 2 The step S202 in the schematic industrial focusing method.

[0084] The determination module 303 is configured to support the industrial focusing device 300 to perform the step S203 in the schematic industrial focusing method. Figure 2S203 in the schematic industrial focusing method.

[0085] The adjusting module 304 is configured to support the industrial focusing device 300 to perform Figure 2 S204 in the schematic industrial focusing method.

[0086] In a possible implementation, the apparatus can further be configured to determine a first image coordinate of the first luminance peak point and a second image coordinate of the second luminance peak point in an image coordinate system of the receiving imaging assembly according to a first preset angle corresponding to the first luminance peak point, first position information of the first luminance peak point in a luminance distribution curve of the first preset angle, a second preset angle corresponding to the second luminance peak point, and second position information of the second luminance peak in a luminance distribution curve of the second preset angle. The first image coordinate and the second image coordinate are used to determine a first straight line of the first light spot image and a second straight line of the second light spot image. An intersection of the first straight line and the second straight line is calculated to obtain the light spot center.

[0087] In a possible implementation, any one of the first image coordinate and the second image coordinate is taken as a target image coordinate, the first light spot image and the second light spot image are taken as target light spot images, and the first straight line and the second straight line are taken as target straight lines. The apparatus can further be configured to construct a parameter space corresponding to the target light spot images. A horizontal axis of the parameter space represents an angle of a candidate straight line. A vertical axis of the parameter space represents a polar radius parameter of the candidate straight line. Based on the target image coordinate, all target angles in the parameter space are traversed to determine a target polar radius parameter corresponding to each target angle in all target angles. The target straight lines are determined according to all target angles and the target polar radius parameter corresponding to each target angle.

[0088] In a possible implementation, the apparatus can further be configured to construct a candidate straight line parameter combination by using the target angle and the target polar radius parameter. Based on the target image coordinate, the candidate straight line parameter combination in the parameter space is voted to obtain the target straight line.

[0089] In a possible implementation, the apparatus can further be configured to perform inverse rotation on the first preset angle and the first position information to obtain the first image coordinate. The inverse rotation is performed on the second preset angle and the second position information to obtain the second image coordinate.

[0090] In a possible implementation, the apparatus can further be configured to extract, from a target luminance distribution curve of any one of the luminance distribution curves of all preset angles, a point with a maximum luminance value to obtain a luminance peak point. The luminance peak point includes a luminance value and position information. The first luminance peak point and the second luminance peak point are selected from the luminance peak points of the luminance distribution curves of all preset angles.

[0091] In a possible implementation, the apparatus can also be configured to determine an offset of the spot center according to the spot center and a preset spot center. An out-of-focus amount of the target object is determined according to the offset and system parameters of the industrial focusing system. The system parameters include an angle between the laser emitting assembly and a plane where the target object is located. A distance between the microscopic imaging assembly and the target object is adjusted based on the out-of-focus amount, so that a focal point of the microscopic imaging assembly is located on a surface of the target object.

[0092] It should be noted that all related contents of each step involved in the above method embodiments can be cited to the function description of the corresponding function module, which will not be repeated here.

[0093] The industrial focusing device 300 provided by the embodiments of the present application is configured to execute the industrial focusing method shown in the above Figure 2 , and thus can achieve the same effects as the industrial focusing method described above.

[0094] The embodiments of the present application also provide an industrial focusing device, which can execute the industrial focusing method and related steps in the method embodiments described above.

[0095] The embodiments of the present application also provide a computer readable storage medium, which stores instructions, and the instructions are executed to execute the industrial focusing method and related steps in the method embodiments described above.

[0096] The embodiments of the present application also provide a computer program product, which, when running on a computer, causes the computer to execute the industrial focusing method and related steps in the method embodiments described above.

[0097] In some embodiments, the method shown in the present application can be implemented as computer program instructions encoded in a computer readable storage medium in a machine readable format or encoded in other non-transitory medium or article.

[0098] The embodiments of the present application also provide an industrial focusing system 100, as shown in Figure 4 , which includes at least one processor 401 and at least one interface circuit 402.

[0099] For example, when the industrial focusing system 100 includes one processor and one interface circuit, the one processor can be the processor 401 (or the processor 401) shown in the solid line box in Figure 4 , and the one interface circuit can be the interface circuit 402 (or the interface circuit 402) shown in the solid line box in Figure 4 . When the industrial focusing system 100 includes two processors and two interface circuits, the two processors include the processor 401 (or the processor 401) shown in the solid line box in Figure 4The processor 401 shown in the solid line box and the processor 401 shown in the dashed line box, the two interface circuits include Figure 4 The interface circuit 402 shown in the solid line box and the interface circuit 402 shown in the dashed line box. This is not limited.

[0100] The processor 401 and the interface circuit 402 can be interconnected by a line. For example, the interface circuit 402 can be used to receive a signal. For another example, the interface circuit 402 can be used to send a signal to other devices (such as the processor 401). For example, the interface circuit 402 can read the computer instructions stored in the memory and send the computer instructions to the processor 401. The processor 401 executes the instructions and, in combination with the input and output devices, implements various steps in the above embodiments, such as implementing various steps performed in the method embodiments shown in any of the above. Figure 2 The industrial focusing system can also include other discrete devices, and the embodiments of the present application are not limited in this regard.

[0101] Through the description of the above embodiments, those skilled in the art can clearly understand that, for the convenience and brevity of description, only the above division of functional modules is exemplified, and in actual application, the above functions can be completed by different functional modules according to needs, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above.

[0102] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of the modules or units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point, the coupling or direct coupling or communication connection between the displayed or discussed each other can be through some interface, indirect coupling or communication connection between devices or units, which can be electrical, mechanical or other forms.

[0103] The units described as separate components can or can not be physically separated, and the components shown as units can be one physical unit or multiple physical units, that is, can be located in one place, or can be distributed to multiple different places. Part or all of the units can be selected according to actual needs to achieve the purpose of the embodiment scheme.

[0104] In addition, each function unit in each embodiment of the present application can be integrated in one processing unit, or each unit can be physically present separately, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software function unit.

[0105] When the integrated unit is realized in the form of a software function unit and sold or used as an independent product, it can be stored in a readable storage medium. Based on such understanding, the technical solutions of the embodiments of the present application essentially or the parts that make contributions or the whole or part of the technical solutions can be embodied in the form of a software product. The software product is stored in a storage medium, includes a plurality of instructions for making a device (which can be a single-chip microcomputer, a chip, etc.) or a processor execute all or part of the steps of the method described in each embodiment of the present application. The foregoing storage medium includes a U disk, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, and various media that can store program codes.

[0106] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any change or replacement within the technical scope disclosed in the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An industrial focusing method, characterized in that, An industrial focusing system is applied, comprising a laser emitting component, a receiving imaging component, a microscopic imaging component, and a driving component. The laser emitting component emits a laser beam towards a target object, which is focused onto the surface of the target object and reflected to form a laser spot. The laser beam is a cross-shaped laser beam. The receiving imaging component acquires the laser spot to obtain a spot image. The industrial focusing method includes: After acquiring the light spot image, the light spot image is projected from multiple preset angles to obtain the brightness distribution curve of the light spot image at each preset angle; The first brightness peak point and the second brightness peak point are selected from the brightness distribution curves of all preset angles; the first brightness peak point and the second brightness peak point are two maximum brightness values ​​in the brightness distribution curves of all preset angles; the first brightness peak point corresponds to the first spot image formed by the first arm of the diagonal cross-shaped laser beam; the second brightness peak point corresponds to the second spot image formed by the second arm of the diagonal cross-shaped laser beam. Based on the first preset angle corresponding to the first brightness peak point, the first position information of the brightness distribution curve of the first brightness peak point at the first preset angle, the second preset angle corresponding to the second brightness peak point, and the second position information of the brightness distribution curve of the second brightness peak point at the second preset angle, the first image coordinates of the first brightness peak point in the image coordinate system of the receiving imaging component and the second image coordinates of the second brightness peak point in the image coordinate system are determined; based on the first image coordinates and the second image coordinates, the first straight line of the first light spot image and the second straight line of the second light spot image are determined; the intersection point of the first straight line and the second straight line is calculated to obtain the center of the light spot; Based on the center of the light spot and the preset center of the light spot of the target object, the distance between the microscopic imaging component and the target object is adjusted so that the focal point of the microscopic imaging component is located on the surface of the target object.

2. The method according to claim 1, characterized in that, Take either the first image coordinates or the second image coordinates as the target image coordinates, take the first spot image and the second spot image as the target spot image, and take the first straight line and the second straight line as the target straight line; Determining the target straight line of the target spot image based on the target image coordinates includes: Construct a parameter space corresponding to the target spot image; the horizontal axis of the parameter space represents the angle of the candidate line; the vertical axis of the parameter space represents the polar radius parameter of the candidate line. Based on the target image coordinates, traverse all target angles in the parameter space and determine the target polar radius parameter corresponding to each target angle; The target straight line is determined based on all target angles and the target polar radius parameter corresponding to each target angle.

3. The method according to claim 2, characterized in that, The step of determining the target straight line based on all target angles and the target polar radius parameter corresponding to each target angle includes: Using the target angle and the target polar radius parameter, a candidate line parameter combination is constructed; Based on the target image coordinates, the candidate line parameter combinations in the parameter space are voted on to obtain the target line.

4. The method according to claim 1, characterized in that, The step of determining the first image coordinates of the first brightness peak point and the second image coordinates of the second brightness peak point in the image coordinate system of the receiving imaging component based on the first preset angle corresponding to the first brightness peak point, the first position information of the brightness distribution curve of the first brightness peak point at the first preset angle, the second preset angle corresponding to the second brightness peak point, and the second position information of the brightness distribution curve of the second brightness peak point at the second preset angle includes: Perform an inverse rotation operation on the first preset angle and the first position information to obtain the first image coordinates; The second image coordinates are obtained by performing an inverse rotation operation on the second preset angle and the second position information.

5. The method according to claim 1, characterized in that, The step of selecting the first brightness peak point and the second brightness peak point from the brightness distribution curves of all preset angles includes: For any target brightness distribution curve at any preset angle among all preset angle brightness distribution curves, the point with the largest brightness value is extracted from the target brightness distribution curve to obtain the brightness peak point; the brightness peak point includes brightness value and location information; The first brightness peak point and the second brightness peak point are selected from the brightness peak points of the brightness distribution curves at all preset angles.

6. The method according to claim 1, characterized in that, Adjusting the distance between the microscopic imaging component and the target object based on the center of the light spot and the preset center of the light spot on the target object includes: The offset of the light spot center is determined based on the light spot center and the preset light spot center; The defocusing amount of the target object is determined based on the offset and the system parameters of the industrial focusing system; the system parameters include the angle between the laser emitting component and the plane where the target object is located. Based on the defocusing amount, the distance between the microscopic imaging component and the target object is adjusted so that the focal point of the microscopic imaging component is located on the surface of the target object.

7. An industrial focusing device, characterized in that, An industrial focusing system is applied, comprising a laser emitting component, a receiving imaging component, a microscopic imaging component, and a driving component. The laser emitting component emits a laser beam towards a target object, which is focused onto the surface of the target object and reflected to form a laser spot. The laser beam is a cross-shaped laser beam. The receiving imaging component acquires the laser spot to obtain a spot image. The industrial focusing device includes: The projection module is used to project the light spot image from multiple preset angles after acquiring the light spot image, so as to obtain the brightness distribution curve of the light spot image at each preset angle; The filtering module is used to filter out a first brightness peak point and a second brightness peak point from the brightness distribution curves of all preset angles; the first brightness peak point and the second brightness peak point are two maximum brightness values ​​in the brightness distribution curves of all preset angles; the first brightness peak point corresponds to the first spot image formed by the first arm of the oblique cross-shaped laser beam; the second brightness peak point corresponds to the second spot image formed by the second arm of the oblique cross-shaped laser beam. The determining module is configured to determine, based on a first preset angle corresponding to the first brightness peak point, first position information of the brightness distribution curve of the first brightness peak point at the first preset angle, a second preset angle corresponding to the second brightness peak point, and second position information of the brightness distribution curve of the second brightness peak point at the second preset angle, determine a first image coordinate of the first brightness peak point and a second image coordinate of the second brightness peak point in the image coordinate system of the receiving imaging component; determine a first straight line of the first light spot image and a second straight line of the second light spot image based on the first image coordinate and the second image coordinate; and calculate the intersection point of the first straight line and the second straight line to obtain the center of the light spot. An adjustment module is used to adjust the distance between the microscopic imaging component and the target object based on the center of the light spot and the preset center of the light spot of the target object, so that the focal point of the microscopic imaging component is located on the surface of the target object.

8. An industrial focusing device, characterized in that, The industrial focusing device includes a processor and a memory, the memory storing machine-executable instructions that can be executed by the processor, the processor executing the machine-executable instructions to implement the industrial focusing method according to any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer-executable instructions that, when invoked and executed by a processor, cause the processor to implement the industrial focusing method according to any one of claims 1 to 6.

Images