Miniature optical scanning device and electromagnetically-driven optical scanning device

Abstract

The invention discloses a miniature optical scanning device and an electromagnetic driving optical scanning device, the optical scanning device comprises a reflecting mirror, an elastic sheet, a gasket and a permanent magnet, the reflecting mirror is a sheet-shaped element used for reflecting light or changing the light beam propagation direction; the gasket is fixed on the back surface of the reflecting mirror; the elastic sheet comprises a fixed part, an elastic working part and a connecting part, and the connecting part is fixed on the gasket; the fixing part of the elastic sheet is used for being fixedly connected with an external carrier; the elastic working part comprises an elastic structure which can be bent and deformed or bent and deformed, and the reflecting mirror can be driven to rotate back and forth or vibrate around a rotating shaft through bending deformation or bending deformation of the elastic working part; the permanent magnet is fixed on the back surface of the reflecting mirror and is nested in the connecting part of the elastic sheet and the gasket; the internal stress can be effectively reduced, the scanning angle is increased, the service life problem of a product is solved, and the product cost is reduced.

Description

Technical Field

[0001] The present invention relates generally to the field of micro-electromechanical systems (MEMs), and more particularly to a micro optical scanning device and an electromagnetically driven optical scanning device. More specifically, the present invention relates to a method and apparatus for providing a rotary resonant vibration of a reflector. Background Art

[0002] In related technologies, most MEMs micro-optical scanning devices are based on single-crystal silicon wafers. Using sophisticated semiconductor etching processes, the micromechanical structures of these precise optical scanning devices are fabricated on these wafers. Due to their compact size and extremely low power consumption, MEMs micro-optical scanning devices are currently widely used in various image display devices, image projection devices, and spatial scanning devices.

[0003] like Figure 1a As shown in Figure 2-b, the existing MEMs micro optical scanning device mainly adopts a torsion beam structure. Figure 1a As shown, components such as the mirror and permanent magnet are fixed to the torsion beam. In some MEMs devices, because electrostatics are used as the driving force, there is no permanent magnet. However, the torsion beam and mirror are always present. Figure 1b As shown in the figure, the reflector and the torsion beam are an integrated structure, that is, the reflector and the torsion beam are made of the same material. In traditional MEMs micro optical scanning devices, the reflector and the torsion beam are made of single crystal silicon. All micro optical scanning devices with this type of torsion beam structure ( Figure 1a -b) The operating principle is that the torsion of the torsion beam drives the mirror to rotate, changing the reflection direction of the mirror. This causes the reflected light to shift from its original reflection direction to the new, twisted direction, achieving a light scanning effect. If the torsional motion of the torsion beam is periodic, it causes the mirror to twist back and forth periodically (or vibrate), resulting in a back-and-forth scanning of the reflected light. However, when such a MEMs micro-optical scanner is in operation, the twisting of the torsion beam creates significant torsional stress on the beam. This is particularly true when scanning at large angles, where the material twists significantly. These devices are mostly manufactured using single-crystal silicon, a material that is fragile and prone to fracture under high stress, thus damaging the MEMs micro-optical scanner. Therefore, MEMs micro-optical scanners are suitable for applications with small scanning angles. Furthermore, the manufacture of these single-crystal silicon MEMs devices requires semiconductor processing, which results in high manufacturing costs. Summary of the Invention

[0004] In order to solve the problems pointed out in the above background technology, one purpose of the present invention is to provide a micro optical scanning device, which can effectively reduce internal stress, increase scanning angle, solve the problem of product life, and reduce product manufacturing cost.

[0005] The above purpose is achieved through the following technical solutions:

[0006] A micro optical scanning device includes a reflector, a spring, a gasket, and a permanent magnet, wherein:

[0007] The reflector is a sheet-like element used to reflect light or change the propagation direction of a light beam, and the curvature radius ROC of the reflective surface of the reflector is greater than 1 meter;

[0008] The gasket is fixed on the back of the reflector, and a through hole is formed in the center of the gasket to match the shape of the permanent magnet;

[0009] The spring piece is made of a metal sheet, and further comprises at least one fixing portion, two elastic working portions and at least one connecting portion, wherein at least one connecting portion of the spring piece is fixed on the gasket;

[0010] Wherein, at least one of the fixing portions of the spring is used for fixed connection with an external carrier;

[0011] The elastic working portion of the spring sheet includes an elastic structure that can be bent or curved, and the bending or curving deformation of the elastic working portion can drive the reflector to rotate back and forth or vibrate around a rotation axis;

[0012] The permanent magnet is fixed on the back of the reflector and nested in the connecting portion of the elastic sheet and the gasket, and the reflector, the gasket, the permanent magnet and at least one connecting portion of the elastic sheet form a core module.

[0013] In this embodiment, the reflector is a silicon wafer, or a silicon wafer coated with a reflective film to increase reflectivity. Alternatively, the reflector may be a metal sheet, glass sheet, ceramic sheet, plastic sheet, or any other sheet material having a reflective surface; and the reflective surface may be further coated with a reflective film to increase reflectivity or achieve a specific reflective effect.

[0014] In this embodiment, the spring piece is made of alloy steel or copper alloy.

[0015] In this embodiment, the spring piece may also be made of a silicon sheet, a glass sheet, a ceramic sheet, a plastic sheet, or any other sheet-like material with suitable elasticity.

[0016] In this embodiment, the mass center of the core module coincides with the rotation axis.

[0017] In this embodiment, the elastic working portion of the spring is an S-shaped structure and has a plurality of S-shaped inflection points.

[0018] In this embodiment, the positions of the gasket and the elastic sheet are interchangeable. The elastic sheet is fixed on the back of the reflector, while the gasket is fixed on the connecting portion of the elastic sheet.

[0019] In this embodiment, the gasket is in a concave shape, the center portion of which is not a through hole, and the permanent magnet is fixed on the inner surface of the concave groove of the gasket and nested in the connecting portion of the elastic sheet and the groove of the gasket.

[0020] In this embodiment, the elastic working portion of the spring has a plurality of S-shaped structures, and the distance between the inflection point of the S-shaped structure and the rotation axis is proportional to the distance between the inflection point of the S-shaped structure and the center.

[0021] One object of the present invention is to provide an electromagnetically driven optical scanning device that can effectively reduce internal stress, increase the scanning angle, and at the same time solve the problem of product life and reduce the manufacturing cost of the product.

[0022] The above purpose is achieved through the following technical solutions:

[0023] An electromagnetically driven optical scanning device includes a reflector, a spring, a gasket, a permanent magnet, a coil, a coil support, and two magnetic yokes, wherein the two magnetic yokes are respectively yoke A and yoke B, wherein:

[0024] The reflector is a sheet-like element used to reflect light or change the propagation direction of a light beam, and the curvature radius ROC of the reflective surface of the reflector is greater than 1 meter;

[0025] The gasket is fixed on the back of the reflector, and a through hole is formed in the center of the gasket to match the shape of the permanent magnet;

[0026] The spring piece is made of a metal sheet, and further comprises at least one fixing portion, two elastic working portions and at least one connecting portion, wherein at least one connecting portion of the spring piece is fixed on the gasket;

[0027] Wherein, the at least one fixing portion of the spring is used for fixed connection with an external carrier;

[0028] The elastic working portion of the spring sheet includes an elastic structure that can be bent or curved, and the bending or curving deformation of the elastic working portion can drive the reflector to rotate back and forth or vibrate around a rotation axis;

[0029] The permanent magnet is fixed on the back of the reflector and nested in the connecting portion of the elastic sheet and the gasket, and the reflector, the gasket, the permanent magnet and at least one connecting portion of the elastic sheet form a core module;

[0030] The coil is wrapped around and fixed on the coil bracket; the coil bracket has a through hole; one end of the yoke A is inserted into the through hole of the coil bracket, and the other end is arranged near the permanent magnet; one end of the yoke B is inserted into the through hole of the coil bracket from the other side, and the other end is arranged near the permanent magnet, and is symmetrical with the other end of the yoke A; when the coil is energized, an electromagnetic field is generated, which is transmitted to the permanent magnet through the yoke and interacts with the permanent magnet to generate a push-suction force, thereby driving the reflector to vibrate around the rotation axis.

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] 1. This embodiment provides a micro-optical scanning device primarily to address the problem of material fracturing during wide-angle scanning in MEMs micro-optical scanning devices. By utilizing a novel rotational principle to modify the structural design, this effectively reduces stress within the material during operation. Furthermore, the use of new materials significantly improves the device's ability to withstand stress, thereby resolving the issues of limited scanning angles and longevity associated with conventional MEMs micro-optical scanning devices. Furthermore, by replacing single-crystalline silicon with metal, the manufacturing process for metal materials is significantly easier than for single-crystalline silicon, thereby reducing manufacturing costs.

[0033] 2. The electromagnetically driven optical scanning device provided in this embodiment can effectively reduce internal stress, increase the scanning angle, and solve the problem of product life and reduce the manufacturing cost of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1a 1 is a three-dimensional schematic diagram of a MEMs micro optical scanning device in the background art;

[0035] Figure 1b This is a second three-dimensional schematic diagram of a MEMs micro optical scanning device in the background art;

[0036] Figure 2a is a schematic diagram of the appearance of a micro optical scanning device in an embodiment;

[0037] Figure 2b is an exploded schematic diagram of a micro optical scanning device in an embodiment;

[0038] Figure 2cis a schematic cross-sectional view of a micro optical scanning device in an embodiment;

[0039] Figure 2d is another structural schematic diagram of the micro optical scanning device in the embodiment;

[0040] Figure 3a 1 is a structural diagram of the core module in the embodiment;

[0041] Figure 3b This is a second structural diagram of the core module in the embodiment;

[0042] Figure 4a 1 is a structural diagram of the shrapnel in the embodiment;

[0043] Figure 4b 2 is a structural diagram of the shrapnel in the embodiment;

[0044] Figure 4c This is a structural diagram of the spring in the embodiment 3:

[0045] Figure 4d Schematic diagram 4 of the structure of the shrapnel in the embodiment;

[0046] Figure 5 is a schematic diagram of the vibration principle of the micro optical scanning device in the embodiment;

[0047] Figure 6a is a front view schematic diagram of an electromagnetically driven optical scanning device in an embodiment;

[0048] Figure 6b is an exploded schematic diagram of an electromagnetically driven optical scanning device in an embodiment;

[0049] Figure 7a is a three-dimensional schematic diagram of the electromagnetic drive device in the embodiment;

[0050] Figure 7b 2 is an exploded schematic diagram of the electromagnetic drive device in the embodiment. DETAILED DESCRIPTION

[0051] In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the claimed subject matter. However, those skilled in the art will appreciate that the claimed subject matter can be practiced without these specific details. In addition, methods, devices, or systems well known to those skilled in the art have not been described in detail to avoid obscuring the claimed subject matter.

[0052] Throughout this specification, references to "one embodiment" or "an embodiment" may mean that a particular feature, structure, or characteristic described in connection with a particular embodiment may be included in at least one embodiment of the embodiments comprising the claimed subject matter. Thus, the phrases "in one embodiment" or "an embodiment" appearing in various places throughout this specification are not intended to refer to the same embodiment or to any one particular embodiment being described. Furthermore, it should be understood that the particular features, structures, or characteristics described may be combined in various ways in one or more embodiments. In general, of course, these and other issues will vary with the specific context of application. Therefore, the description of these terms or the specific context of application may provide useful guidance regarding inferences from that context.

[0053] Similarly, the terms "and," "and / or," and "or" as used herein can include various meanings that depend, at least in part, on the context in which the terms are used. Typically, "or" and "and / or" are used in conjunction with a list, such as A, B, or C. When used in an inclusive sense, they mean A, B, and C, and when used in an exclusive sense, they mean A, B, or C. Furthermore, the terms "one or more" as used herein are used to describe any feature, structure, or characteristic alone, or to describe some combination of features, structures, or characteristics. However, it should be noted that this is merely an illustrative example, and the subject matter protected by the claims is not limited to this example.

[0054] As used to describe these embodiments, the terms "above", "below", "upper", "lower" and "side" describe positions relative to the optical axis of such a small imaging module. In particular, "above" and "below" refer to positions along the optical axis, where "above" refers to one side of the element and "below" refers to the other side of the element. With respect to such "above" and "below", "side" refers to the side of the element away from the optical axis, such as the periphery of a lens. It should also be understood that such terms are not used to refer to directions defined by gravity or any other particular orientation. Instead, such terms are merely used to identify one part from another. Therefore, "upper" and "lower" can be interchanged with "top" and "bottom", "first" and "second", "left" and "right", etc., which are equivalent.

[0055] It should be noted that throughout the specification and claims herein, when one component is "fixed" to another component, it means that one component is fixed to another component by any feasible method, including but not limited to adhesives, heat riveting, mortise and tenon joints, screws, welding (such as soldering, laser welding, ultrasonic welding, fusion welding), hole-column mechanism tight fitting, or concave-convex mechanism tight fitting, etc., any one of which is used independently or in combination of more than one method.

[0056] It will be understood that the present application is not limited to the preferred embodiments described herein and that, of course, various modifications or changes may be made without departing from the scope of protection defined herein.

[0057] As shown in Figures 2 to 7, first, Figure 2 is a schematic structural diagram of an embodiment of the present invention. A micro optical scanning device according to the present invention includes a reflector 1, a spring 2, a gasket 3, and a permanent magnet 4, wherein:

[0058] The reflector 1 is a sheet-like element used to reflect light or change the propagation direction of a light beam, and the curvature radius ROC of the reflective surface of the reflector 1 is greater than 1 meter;

[0059] The gasket 3 is fixed on the back of the reflector, and a through hole is formed in the center of the gasket 3 to match the shape of the permanent magnet 4;

[0060] The spring piece 2 is made of a metal sheet and includes at least one fixed portion 21, two elastic working portions 22, and at least one connecting portion 23. The at least one connecting portion 23 of the spring piece 2 is fixed to the gasket 3, and the at least one fixed portion 21 of the spring piece 2 is used to be fixedly connected to an external carrier.

[0061] The permanent magnet 4 is fixed on the back of the reflector 1 and is nested in the connecting portion of the elastic sheet 2 and the gasket 3;

[0062] The core module is defined as an assembly of the reflector 1, the gasket 3, the permanent magnet 4, and the connecting portion 23 of the spring 2. The core module does not include the elastic working portion 22 and the fixed portion 21 of the spring 2. Figure 3 is a schematic structural diagram of the core module. Figure 3a The elastic working part 22 and the fixed part 21 of the spring are not included. The directions of the XYZ coordinate axes of the core module are defined as shown in the figure. The origin O of the coordinate system is the mass center 5 ( Figure 3a ). The projection point of the rotation axis on the XZ plane is marked as 6. Figure 3b For top view, the Y axis points upward.

[0063] In the micro optical scanning device described in the present invention, the elastic working portion 22 of the spring 2 includes at least one elastic structure 220 that can be bent or curved. The bending or curving deformation of the elastic working portion 22 can drive the reflector 1 to rotate back and forth or vibrate around the rotation axis 6.

[0064] While the design of the present invention may appear simple and unremarkable on the surface, its mechanical principles are fundamentally different from those of conventional torsion beam structures. In conventional micro-optical scanning devices, the mirror's rotation or vibration about its axis is achieved by the torsion of the torsion beam structure. However, when a MEMs micro-optical scanner is operating, significant stress can easily accumulate within the torsion beam structure. Especially during high-angle scanning, the stress generated within the material can cause the torsion beam structure to fracture. In contrast, the micro-optical scanning device provided in this embodiment achieves the mirror's rotation or vibration about its axis through the bending or flexing of the elastic working portion 22. Therefore, the original torsion beam structure is eliminated, and thus, torsional deformation and torsional stress are eliminated. Figure 5 This diagram vividly illustrates the bending deformation of the elastic working portion 22 of the present invention and how this deformation drives the reflector to rotate or vibrate around the rotation axis. Compared to the torsion beam structure of Figure 1, it is clear that the material deformation is completely different. The magnitude of the stress generated within the material by bending deformation is completely different from the magnitude of the torsional stress generated by torsional deformation. Furthermore, the nature and mechanism of the stress generation are completely different. Furthermore, the stress generated by bending deformation is generally much less than the stress generated by torsion.

[0065] In the present invention, the reflector 1 is an optical element, which is an optical element used to reflect light or change the propagation direction of a light beam. In this embodiment, the reflector 1 is a silicon wafer, or a silicon wafer with a reflective film coated on its surface to increase the reflectivity. A silicon wafer refers to a piece of sheet material cut from a silicon wafer. In one embodiment, the reflector 1 is formed by injection molding to form an optical-grade reflective mirror surface, and a reflective film is coated on the reflective surface to increase the reflectivity. Generally, the reflector 1 can be made of any material with a reflective surface. The reflective surface can be further coated with a reflective film to increase the reflectivity or a special reflection effect.

[0066] Furthermore, the reflective surface of the reflector 1 is a flat surface with a radius of curvature greater than 1 meter. The larger the radius of curvature, the higher the flatness. This reflective surface, aside from altering the propagation direction of the light beam, has minimal or no effect on the divergence angle or parallelism of the light beam. This helps other optical components in the backend achieve certain optical functions, such as focusing to a diffraction-limited focal point or achieving an image point with an extremely small spot diameter.

[0067] In this embodiment, the spring fragment 2 is made of a thin sheet of alloy steel. In one embodiment, the spring fragment 2 is made of a thin sheet of copper alloy. Needless to say, various other metal sheet materials or other thin sheet materials with suitable elasticity, including but not limited to silicon wafers, glass sheets, ceramic sheets, or plastic sheets, can be used to manufacture the spring fragment 2 and are also within the scope of protection of the present invention. The definition of thin sheet refers to the material used to manufacture the spring fragment having a dimension in the Z direction that is much smaller than the dimensions in the X and Y directions (see Figure 3 for the XYZ axis).

[0068] The elastic working portion 22 of the spring 2 in the optical scanning device of the present invention is a bendable or flexurally deformable elastic structure. The flexural or flexural deformation of the elastic working portion 22 can cause the reflector 1 to rotate or vibrate about the rotation axis of the spring 2. In the present embodiment, Figures 2 and 4 show an S-shaped elastic working portion. However, elastic working portions that can bend or flexurally deform include, but are not limited to, S-shaped structures. Any elastic working portion structure that can cause the reflector to rotate or vibrate about the rotation axis through flexural or flexural deformation is within the scope of the present invention. Figure 4a As shown, the spring piece 2 is mirror-symmetrical. In some embodiments, the spring piece 2 is a rotationally symmetrical structure with the origin O as the rotational symmetry. Figure 4a The rotation axis defined by the spring 2 is also shown, passing through the origin O of the spring 2. In this embodiment, the connecting portion 23 is a circular ring structure. Figure 4b As shown, the connecting portion 23 is a non-circular structure with the rotation axis as the axis of symmetry. In another embodiment, the connecting portion 23 is not a whole, but two separate connecting portions ( Figure 4b ), that is, the spring piece 2 is separated into two independent spring pieces. In this case, the present invention still treats the two separated independent spring pieces as one spring piece. Because the two separated spring pieces are equivalent to one spring piece, a part of the middle connecting part thereof is cut away. In other embodiments, the two fixing parts of the spring piece 2 are connected together to form a common fixing part. Such a structure is better for subsequent manufacturing and assembly processes. Figure 4c As shown, the fixing portion 21 is in a closed ring shape, and a through hole portion 210 is defined in the fixing portion 21 . The elastic piece 2 is disposed in the through hole portion 210 of the fixing portion 21 . Figure 4d In another embodiment, the S-shaped elastic working portion comprises multiple S-shaped structures, and the distance between each S-shaped inflection point 1, 2, or 3 and the rotation axis increases as the inflection point moves farther from the center. This structure helps to more evenly distribute stress to every point on the working portion 22. As a result, the internal stress distribution is more even and less, thereby extending its service life.

[0069] In this implementation ( Figure 2c ), the gasket 3 is arranged below the reflector 1 and above the spring 2, and is tightly connected to the reflector 1 and the spring 2, forming a material sequence structure of reflector-gasket-spring (i.e. 1-3-2). In one embodiment, the gasket 3 is arranged below the spring 2, forming a material sequence structure of reflector-spring-gasket (i.e. 1-2-3). In this embodiment ( Figure 2c ), the center of the gasket 3 is a circular through hole, and the permanent magnet 4 is nested in the through hole. In some embodiments, the through hole in the gasket 3 is not circular in shape, but a shape that matches the shape of the permanent magnet 4, so that the permanent magnet 4 can be perfectly nested in the gasket 3. In some extreme cases, the through hole in the gasket 3 does not exist, and the gasket 3 is just a solid gasket. In this case, the permanent magnet is only fixed on the lower surface of the gasket 3. In one embodiment, the through hole of the gasket 3 is not completely through, but is recessed a little like the shape of the Chinese character "kou". Figure 2d At this time, the permanent magnet 4 is nested and fixed on the inner surface of the groove of the gasket 3.

[0070] In the present invention ( Figure 5 ), the gasket 3 is used to adapt or adjust the center of mass position of the core module of the optical scanning device. This adjustment is achieved by carefully designing the thickness and shape of the gasket 3 so that the center of mass of the core module, including the gasket 3, is located at a specific position. In one embodiment, the gasket 3 is carefully designed to adjust the core module so that the center of mass of the core module and the rotation axis approximately coincide. Therefore, the gasket 3 can be made of any material, such as the same material as the reflector, the same material as the spring, or any other material that facilitates adjustment of the center of mass position.

[0071] Example 2: An electromagnetically driven optical scanning device composed of a micro optical scanning device according to one or more embodiments will now be described, as shown in FIG. 6 and FIG. 7 .

[0072] 6 shows an example of an electromagnetically driven optical scanning device including an embodiment of the micro-optical scanning device described herein. Figure 6a is the front view, Figure 6b The figure is an exploded view. An electromagnetically driven optical scanning device includes:

[0073] A micro-optical scanning device 100 according to the present invention, a base 7, and an electromagnetic drive device 8;

[0074] The micro optical scanning device is the optical scanning device described in the first embodiment;

[0075] Wherein, the fixing portion 21 in the micro optical scanning device is fixed on the base 7;

[0076] Wherein, the electromagnetic driving device 8 is fixed on the base 7;

[0077] The electromagnetic drive device includes a coil 81, a coil support 82, and two magnetic yokes, namely, a magnetic yoke A and a magnetic yoke B; wherein the coil 81 is fixed around the coil support 82; wherein the magnetic yokes A and B are respectively inserted into the through holes of the coil support 82 ( Figure 7b ), so that the coil 81 indirectly surrounds the magnetic yokes A and B.

[0078] according to Figure 6a As shown, the ends of the magnetic yoke of the electromagnetically driven optical scanning device are respectively disposed near the permanent magnet 4, presenting a bilaterally symmetrical distribution. The magnetic yoke is inserted into the through-hole of the coil support 82, so that the magnetic field generated by the coil 81 is guided by the magnetic yoke and concentrated at both ends. The magnetic field interacts with the permanent magnet 4, driving the reflector 1 of the micro-optical scanning device to vibrate back and forth about the rotation axis 6 of the micro-optical scanning device of the first embodiment.

[0079] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all fall within the scope of protection of the present invention.

Claims

1. A micro optical scanning device, characterized in that: The invention comprises a reflector (1), a spring (2), a gasket (3) and a permanent magnet (4), wherein: The reflector (1) is a sheet-like element used to reflect light or change the propagation direction of a light beam, and the curvature radius ROC of the reflective surface of the reflector (1) is greater than 1 meter; The gasket (3) is fixed on the back of the reflector (1), and a through hole is provided in the center of the gasket (3) to match the shape of the permanent magnet (4); wherein the gasket 3 is used to adjust the position of the mass center of the adaptable core module; The spring piece (2) is made of a metal sheet, and the spring piece (2) further comprises at least one fixing portion (21), two elastic working portions (22) and at least one connecting portion (23), wherein at least one connecting portion (23) of the spring piece (2) is fixed on the gasket (3); wherein at least one fixing portion (21) of the spring piece (2) is used for fixed connection with an external carrier; The permanent magnet (4) is fixed on the back side of the reflector (1) and is nested in the connecting portion (23) of the elastic sheet (2) and the through hole of the gasket (3); The elastic working portion (22) of the spring (2) includes an elastic structure that can be bent or curved, and the bending or curving deformation of the elastic working portion (22) can drive the reflector (1) to rotate back and forth or vibrate around a rotation axis (6).

2. A micro optical scanning device according to claim 1, characterized in that: The reflector (1) is a silicon wafer, or a silicon wafer with a reflective film coated on its surface to improve reflectivity.

3. The micro optical scanning device according to claim 1, characterized in that: The spring piece (2) is made of alloy steel material or copper alloy material.

4. The micro optical scanning device according to claim 1, characterized in that: The spring piece (2) is selected from silicon wafers, glass wafers, ceramic wafers, or plastic wafers.

5. The micro optical scanning device according to claim 1, characterized in that: The mass center of the core module coincides with the rotation axis (6).

6. The micro optical scanning device according to claim 1, characterized in that: The elastic working portion (22) of the spring (2) is an S-shaped structure and has a plurality of S-shaped inflection points.

7. The micro optical scanning device according to claim 1, characterized in that: The positions of the gasket (3) and the spring (2) are interchanged; the spring (2) is fixed on the back of the reflector (1), while the gasket (3) is fixed on the connecting portion (23) of the spring (2).

8. The micro optical scanning device according to claim 1, characterized in that: The gasket (3) is in the shape of a "concave" character, the center portion of which is not a through hole, and the permanent magnet (4) is fixed on the inner surface of the "concave" groove of the gasket (3) and is nested in the connecting portion (23) of the elastic sheet (2) and the groove of the gasket (3).

9. The micro optical scanning device according to claim 6, characterized in that: The elastic working portion (22) of the spring (2) has a plurality of S-shaped structures, and the distance from the inflection point of the S-shaped structure to the rotation axis (6) is proportional to the distance from the inflection point of the S-shaped structure to the center.

10. An electromagnetically driven optical scanning device, characterized in that: The invention comprises a reflector (1), a spring (2), a gasket (3), a permanent magnet (4), a coil (81), a coil support (82) and two magnetic yokes (A, B), wherein: The reflector (1) is a sheet-like element used to reflect light or change the propagation direction of a light beam, and the curvature radius ROC of the reflective surface of the reflector (1) is greater than 1 meter; The gasket (3) is fixed on the back side of the reflector (1), and a through hole is provided in the center portion of the gasket (3) to match the shape of the permanent magnet (4); The spring piece (2) is made of a metal sheet, and the spring piece (2) further comprises at least one fixing portion (21), two elastic working portions (22) and at least one connecting portion (23), wherein at least one connecting portion (23) of the spring piece (2) is fixed on the gasket (3); wherein at least one fixing portion (21) of the spring piece (2) is used for fixed connection with an external carrier; The permanent magnet (4) is fixed on the back side of the reflector (1) and is nested in the connecting portion (23) of the elastic sheet (2) and the through hole of the gasket (3); The elastic working portion (22) of the spring piece (2) includes an elastic structure that can be bent or curved, and the bending or curving deformation of the elastic working portion (22) can drive the reflector (1) to rotate back and forth or vibrate around a rotation axis (6); The coil (81) is wrapped around and fixed on the coil support (82); the coil support (82) has a through hole; one end of the yoke (A) is inserted into the through hole of the coil support (82), and the other end is arranged near the permanent magnet (4); one end of the yoke (B) is inserted into the through hole of the coil support (82) from the other side, and the other end is arranged near the permanent magnet (4) and is symmetrical with the other end of the yoke (A); When the coil (81) is energized, an electromagnetic field is generated. The electromagnetic field is transmitted to the permanent magnet (4) through the magnetic yoke, and interacts with the permanent magnet (4) to generate a pushing or suction force, thereby pushing the reflector (1) to vibrate around the rotation axis.

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