Wafer cassette storage system and method and automatic material handling system

Abstract

The invention provides a wafer cassette storage system and method and an automatic material handling system.The wafer cassette storage system comprises a transfer disc, a first detection piece and an analysis module, the transfer disc is used for transferring wafer cassettes, clamping control holes are formed in the wafer cassettes, the first detection piece is used for detecting blocking state information of the clamping control holes, and the analysis module is used for analyzing the blocking state information of the clamping control holes; the analysis module is in signal connection with the first detection piece, is used for acquiring the blocking state information of the clamping control hole detected by the detection piece, and is also used for judging whether the pre-stored blocking state information of the wafer box is consistent with the blocking state information detected by the first detection piece; and when the pre-stored plugging state information is inconsistent with the plugging state information detected by the first detection piece, warning information is sent out. According to the wafer box storage system, the problem that a production machine gives an alarm due to the fact that an automatic material carrying system fails to place goods in the later period is reduced or avoided, the working efficiency of the production machine is improved, and manpower consumption is reduced.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor manufacturing technology, and more particularly, relates to a wafer box storage system, method and automatic material handling system. Background Art

[0002] The Automatic Material Handling System (AMHS) uses a three-dimensional warehouse (stocker) and an overhead buffer (OHB) to store front-opening unified pods (FOUPs). The Material Control System (MCS) manages all FOUP information within the AMHS and receives instructions from the Manufacturing Execution System (MES). The overhead hoist transfer (OHT) system then moves the FOUPs to designated locations.

[0003] The wafer loading port at the bottom of the FOUP has four control holes (A, B, C, and D, as shown in the right image) for control positioning. During operations such as FOUP batching and separation, the front, middle, and back FOUPs need to be transferred to the corresponding production machines for production. By setting different control hole combinations on the FOUP's wafer loading port, we can prevent FOUP mis-transfers and avoid misoperation.

[0004] Currently, the AMHS system cannot identify the type of FOUP. The FOUP card control relies solely on the production machine's own card control matching mechanism. Production machines often experience OHT release failures and errors due to mismatched FOUP card control holes. At this time, manual processing is required to fix the blocking status of the FOUP card control holes, affecting machine production efficiency and increasing manpower consumption. Summary of the Invention

[0005] The problem solved by the present invention is to provide a wafer box storage system, method and automatic material handling system. The wafer box storage system, method and automatic material handling system can identify the blocking status information of the card control hole of the wafer box when storing wafers, thereby preventing the overhead crane handling system from reporting errors when releasing goods and affecting the production efficiency of the machine.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows: In a first aspect, the present invention provides a wafer box storage system, comprising: A transfer tray, the transfer tray is used to transfer wafer boxes, the wafer boxes are provided with a card control hole, and the card control hole has a blocked state and an unblocked state; a first detection member, configured to detect blocking status information of the control hole when the wafer cassette is on the transfer plate; An analysis module is connected to the signal of the first detection component and is used to obtain the blocking status information of the card control hole detected by the detection component. The analysis module is also used to determine whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection component, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection component.

[0007] In one embodiment, the first detection member is a pressure-triggered sensor.

[0008] In one embodiment, the transfer tray includes a mounting seat, and the pressure-triggered sensor is disposed on the mounting seat.

[0009] In one embodiment, the mounting base includes a first mounting base and a second mounting base, the first mounting base and the second mounting base are symmetrically arranged, and two press-triggered sensors are arranged on the first mounting base and the second mounting base.

[0010] In one embodiment, a second detection member is provided on the transfer plate, and the second detection member is used to detect the weight of the wafer box.

[0011] In one embodiment, a robotic arm is further included, and the robotic arm is used to transfer the wafer box on the transfer plate to a storage area. The robotic arm is provided with a third detection component, and the third detection component is used to detect the weight of the wafer box.

[0012] A second aspect of the present invention provides a wafer box storage method, using the wafer box storage system as described above, the wafer box storage method comprising: Obtaining blocking status information of the card control hole of the pre-storage wafer box; Obtaining blocking status information of the control hole of the wafer box detected by the first detection component on the transfer plate; A warning message is issued when the blocking state information of the card control hole of the pre-stored wafer box is inconsistent with the blocking state information of the card control hole of the wafer box detected by the first detection component.

[0013] In one embodiment, the wafer box storage method further includes: obtaining an association relationship between a storage area and a corresponding storage weight; The weight of the wafer box on the transfer plate is obtained when the pre-stored blocking state information of the wafer box's control hole is consistent with the blocking state information of the wafer box's control hole detected by the first detection component: The transfer tray is controlled to move to the corresponding storage area according to the association relationship between the storage area and the corresponding storage weight and the weight of the wafer box on the transfer tray.

[0014] In one embodiment, obtaining the association relationship between the storage area and the corresponding storage weight includes: Obtain the weight of the full wafer cassette, the weight of the empty wafer cassette, and the number of storage areas; The association relationship between the storage area and the corresponding storage weight is obtained according to the weight of the full wafer box, the weight of the empty wafer box and the number of storage areas.

[0015] A third aspect of the present invention provides an automatic material handling system, comprising the wafer box storage system described above.

[0016] The wafer box storage system provided by the present invention includes a transfer plate, a first detection part and an analysis module. The transfer plate is used to transfer the wafer box. The wafer box is provided with a card control hole. The first detection part is used to detect the blocking status information of the card control hole. The analysis module is connected to the first detection part signal and is used to obtain the blocking status information of the card control hole detected by the detection part. The analysis module is also used to determine whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection part, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection part. During the wafer box storage process, the analysis module of the wafer box storage system determines whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection part, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection part. This reduces or avoids the problem of the production machine alarming due to the failure of the automatic material handling system to release goods in the later stage, thereby improving the working efficiency of the production machine and reducing manpower consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of a partial structure of a wafer box provided in an embodiment of the present invention; Figure 2A schematic diagram of a partial structure of a wafer box storage system provided by an embodiment of the present invention; Figure 3 A schematic diagram of the installation structure of the first detection component of the wafer box storage system provided by an embodiment of the present invention; Figure 4 A schematic diagram of the installation structure of the second detection component of the wafer box storage system provided by an embodiment of the present invention; Figure 5 A schematic diagram of the structure of a robotic arm of a wafer box storage system provided by an embodiment of the present invention; Figure 6 A schematic flow chart of a wafer box storage method provided by an embodiment of the present invention; Figure 7 A schematic flow chart of a wafer box storage method provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0020] In the description of the present invention, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0021] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. It should be understood that the term "and / or" used in this article is merely a way to describe the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0023] There are 4 card control holes on the wafer loading port at the bottom of the FOUP (such as Figure 1 As shown in the figure, the positions are A, B, C, and D respectively). The different blocking status combinations of the four card control holes in the AMHS system represent that different types of wafers are placed in the wafer box. During the wafer processing process, the FOUPs in the front, middle, and back sections need to be transferred to the corresponding machines for production respectively. Therefore, by setting different card control hole combinations on the wafer loading port, the FOUPs can be prevented from being mistransmitted and misoperation can be avoided. The current card control of the FOUP is only achieved through the card control of the production machine itself. The AMHS system cannot confirm the type of FOUP, and abnormal blocking of the card control holes often occurs, resulting in abnormal crane release and error reporting. This results in low processing efficiency of the production machine and high manpower consumption. At present, there is no production machine that can correct the blocking status of the card control holes of the FOUP, and the card control holes of the FOUP still need to be manually blocked. For example, when the blocking status of a FOUP's control holes doesn't match the machine's requirements, manual adjustment is required. For example, if control holes ABC are initially blocked, but the machine requires control holes ABD to be blocked, manual adjustment is required to block control hole D and open control hole C. This application addresses the above issues and provides a wafer cassette storage system, method, and automated material handling system.

[0024] The wafer box storage system, method and automatic material handling system provided by the present invention are described in detail below with reference to specific embodiments.

[0025] Figure 1 A schematic diagram of a partial structure of a wafer box provided in an embodiment of the present invention, Figure 2 A schematic diagram of a partial structure of a wafer box storage system provided by an embodiment of the present invention. Figure 3 For a schematic diagram of the first detection component installation structure of the wafer box storage system provided in an embodiment of the present invention, please refer to Figure 1-Figure 3, a first aspect of the present embodiment provides a wafer box storage system, including a transfer plate 1, a first detection component 2 and an analysis module, the transfer plate 1 is used to transfer the wafer box 3, the wafer box 3 is provided with card control holes (A, B, C, D), and the card control holes have a blocked state and an unblocked state; the first detection component 2 is used to detect the blocking state information of the card control holes when the wafer box 3 is located on the transfer plate 1; the analysis module is connected to the first detection component 2 by signal, and is used to obtain the blocking state information of the card control holes detected by the first detection component 2, and the analysis module is further used to determine whether the pre-stored blocking state information of the wafer box 3 is consistent with the blocking state information detected by the first detection component 2, and to issue a warning message when the pre-stored blocking state information is inconsistent with the blocking state information detected by the first detection component 2.

[0026] The wafer box storage system of this embodiment is a device used by the wafer automatic material handling system to store wafers. The input methods of wafer boxes in the automatic material handling system of the semiconductor industry include manual input and automatic input. Among them, the three-dimensional warehouse is a material storage system designed specifically for semiconductor wafer factories. Its main function is to store and manage wafer boxes to ensure the timely supply and efficient management of wafer boxes during the production process. The three-dimensional warehouse is usually integrated with the automatic material handling system, and is controlled and scheduled by the manufacturing control system to ensure the rapid access and handling of wafer boxes. The transfer tray 1 of this embodiment is used to transfer the wafer box 3 to the three-dimensional warehouse.

[0027] The wafer box 3 mainly plays the role of placing and transporting wafers in semiconductor production. During the process of handling and storing wafers, the wafer box 3 can simplify transportation and reduce the risk of wafer contamination. The wafer box 3 of this embodiment is generally a front-opening wafer transfer box. The front-opening wafer transfer box is a container used in the semiconductor process to protect, transport, and store wafers. It can accommodate 25 300mm wafers inside. Its main component is a front-opening container that can accommodate 25 wafers and has a front-opening door frame dedicated to the opening and closing of the container. It is an important carrier container exclusively for the automated conveying system in a 12-inch (300mm) wafer factory. ‌‌

[0028] For example, there are four card control holes (such as Figure 1As shown, the positions are A, B, C, and D respectively), the different blocking state combinations of the four card control holes in the AMHS system represent that different types of wafers are placed in the wafer box. During the wafer processing process, the front-end, middle-end, and back-end wafer boxes need to be transferred to the corresponding machines for production respectively. Therefore, by setting different card control hole blocking state combinations on the wafer loading port, the wafer box 3 can be prevented from being mistransmitted and misoperation can be avoided. In this embodiment, the first detection part 2 is installed on the transfer plate 1 to detect the blocking state of the card control hole. The first detection part 2 can adopt a press-trigger sensor. When the wafer box 3 is placed on the transfer plate 1, if the card control hole is in an unblocked state, the probe of the press-trigger sensor can be extended into the interior of the card control hole; if the card control hole is in a blocked state, the press-trigger sensor cannot be extended, and the press-trigger sensor is triggered, thereby generating different electrical signal outputs.

[0029] The analysis module is signal-connected to the first detection element 2 and is used to obtain information about the blockage status of the control hole detected by the first detection element 2. The analysis module can be a standalone circuit board or a functional module integrated into the system controller, connected to the first detection element 2 via a data cable. The analysis module contains a built-in microprocessor that receives and processes electrical signals from the first detection element 2 and converts them into digital information.

[0030] The analysis module is also configured to determine whether pre-stored information about the blocking state of the wafer cassette 3 is consistent with the blocking state information detected by the first detection element 2. This pre-stored blocking state information for the wafer cassette 3 represents a standard state pre-set in the system and is typically stored in the memory of the analysis module. Using a comparison algorithm, the analysis module compares the real-time detected blocking state information for the wafer cassette 3 with the pre-stored standard state to determine whether the two are consistent.

[0031] If the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection component, the analysis module will issue a warning message. The warning message can be an audible or visual alarm, a text prompt displayed on the system display, or a message notification sent to the operator via the network. This warning mechanism can promptly remind the operator to deal with abnormal situations, preventing non-compliant wafer cassettes 3 from entering the system due to abnormal blocking of the control holes of the wafer cassette 3. By automatically verifying the consistency of the wafer cassette 3 information, it reduces the number of alarms caused by operator errors during the overhead crane transportation of wafer cassettes 3 and during production operations on the machine.

[0032] The wafer box storage system provided by the present invention includes a transfer plate, a first detection part and an analysis module. The transfer plate is used to transfer the wafer box. The wafer box is provided with a card control hole. The first detection part is used to detect the blocking status information of the card control hole. The analysis module is connected to the first detection part signal and is used to obtain the blocking status information of the card control hole detected by the detection part. The analysis module is also used to determine whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection part, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection part. During the wafer box storage process, the analysis module of the wafer box storage system determines whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection part, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection part. This reduces or avoids the problem of the production machine alarming due to the failure of the automatic material handling system to release goods in the later stage, thereby improving the working efficiency of the production machine and reducing manpower consumption.

[0033] In a specific embodiment, the first detection member 2 is a press-trigger sensor. A press-trigger sensor is a mechanical sensor that generates an electrical signal change when its probe encounters resistance. In this embodiment, the probe of the press-trigger sensor is designed to be of a size and shape that can be inserted into the card control hole of the wafer box. When the wafer box 3 is placed on the transfer plate, if the card control hole is not blocked, the sensor probe can smoothly extend into the card control hole; if the card control hole is blocked, the probe will encounter resistance, triggering the sensor to generate a different electrical signal. The press-trigger sensor has the advantages of simple structure, sensitive response, and low cost, and is suitable for detecting the blocking state of the card control hole.

[0034] In this embodiment, the transfer tray 1 is provided with a mounting base 11, upon which the pressure-trigger sensor is mounted. Mounting base 11 is a support structure fixed to the transfer tray 11, used to mount and secure the pressure-trigger sensor. The design of mounting base 11 takes into account the sensor's installation position, angle, and height, ensuring that the sensor probe can accurately align with the control hole of the wafer cassette 3. Mounting base 11 is typically made of metal or engineering plastic, providing sufficient strength and stability to maintain the sensor's positional accuracy during long-term use.

[0035] Specifically, the mounting base 11 includes a first mounting base 111 and a second mounting base 112, which are symmetrically arranged. Two push-trigger sensors are provided on each of the first mounting base 111 and the second mounting base 112. The first mounting base 111 and the second mounting base 112 are respectively located on either side of the transfer plate 1 and are symmetrically distributed. This design can simultaneously detect the status of the control holes on both sides of the wafer box 3. Two push-trigger sensors are provided on each mounting base to detect the control holes at different positions on the front-opening wafer transfer box of this embodiment. The four push-trigger sensors detect the blocking status of the four control holes (A, B, C, and D). The sensor signals are simultaneously transmitted to the analysis module to comprehensively determine the blocking status of the control holes of the wafer box 3.

[0036] Figure 4 For a schematic diagram of the second detection component installation structure of the wafer box storage system provided by the embodiment of the present invention, please refer to Figure 4 In a specific embodiment, a second detection member 4 is provided on the transfer tray 1, and the second detection member 4 is used to detect the weight of the wafer box 3. The second detection member 4 can be a pressure sensor or a weight sensor, which is installed on the top surface of the transfer tray 1. When the wafer box 3 is placed on the transfer tray 1, the second detection member 4 can measure the actual weight of the wafer box 3. The weight information of the wafer box 3 is of great significance for judging the quantity and status of the wafers in the wafer box 3, and can serve as an important basis for system decision-making. The significance of storing wafer boxes according to weight in a high-bay warehouse is to optimize storage efficiency and reduce risks during transportation.‌

[0037] The wafer box storage system of this embodiment can realize the storage of wafer boxes 3 by weight, and storing wafer boxes 3 by weight can optimize storage efficiency. By storing wafer boxes 3 of the same weight on the same or similar floors, the space of the three-dimensional warehouse can be maximized, space waste can be reduced, and storage density can be increased. This can ensure that the utilization rate of the warehouse is maximized, thereby reducing storage costs. Secondly, storing wafer boxes 3 by weight can reduce the risks during transportation. The weight of the wafer box 3 requires special attention during transportation. Wafer boxes 3 that are too heavy or too light may increase the difficulty and risk of transportation. By storing by weight, it can be ensured that the handling equipment can bear the load evenly, avoiding equipment damage or safety accidents caused by uneven weight.

[0038] This embodiment provides a press-trigger sensor on the transfer tray 1 to determine whether to allow entry into the three-dimensional warehouse based on the locking status of the locking hole on the wafer loading port at the bottom of the wafer cassette 3. This solves the problem of manual modification of the blocking position of the locking hole, reduces the probability of abnormal error reporting during overhead crane delivery, improves the working efficiency of production machines, and reduces manpower consumption. A weight sensor is installed at the center of the transfer tray 1 to measure the weight of the wafer cassette 3. The weight of the wafer cassette 3 is used to determine which layer of the three-dimensional warehouse to place the wafer cassette 3, which facilitates manual removal. When the three-dimensional warehouse is down, it is convenient for manual retrieval, reducing operational risks. By pre-entering and storing the information of the wafer cassette 3 on the host computer, the material control system can read the wafer cassette 3 information accessed by the host computer in real time, realizing automatic locking of the locking hole when the wafer cassette 3 enters the AMHS system, preventing wafer cassettes 3 that do not meet the requirements from entering the system. By storing the wafer cassette 3 according to its weight, for example, setting different weight ranges to different storage levels, and prioritizing storage from low to high levels, the intelligence and efficiency of the system are further improved.

[0039] Figure 5 For a schematic diagram of the mechanical arm structure of the wafer box storage system provided by the embodiment of the present invention, please refer to Figure 5 In one embodiment, the wafer cassette storage system further includes a robotic arm 5, which is used to transfer the wafer cassettes 3 from the transfer tray 1 to a storage area. The robotic arm 5 is a multi-degree-of-freedom mechanical device that simulates the grasping and movement functions of a human hand. The end of the robotic arm 5 is equipped with a dedicated gripping device that can safely and stably grasp the wafer cassettes 3. Driven by a servo motor, the robotic arm 5 can achieve precise position control, accurately transferring the wafer cassettes 3 from the transfer tray 1 to a designated storage area.

[0040] The robotic arm 5 of this embodiment is provided with a third detection member 6 for detecting the weight of the wafer cassette 3. The third detection member 6 may be a force sensor or torque sensor integrated into the gripping device of the robotic arm 5, capable of monitoring the weight of the wafer cassette 3 in real time during handling. By providing the third detection member 6 on the robotic arm 5, the weight of the wafer cassette 3 is detected during handling. This design eliminates the need for a second detection member 4 on the transfer plate 1 for detecting the weight of the wafer cassette 3.

[0041] Figure 6 For a flow chart of the wafer box storage method provided by an embodiment of the present invention, please refer to Figure 6 A second aspect of this embodiment provides a wafer box storage method. The wafer box storage method of this embodiment adopts the wafer box storage system described in the first embodiment. The wafer box storage method includes the following steps: S101 : Obtaining blocking status information of a card control hole of a pre-storage wafer box.

[0042] Specifically, the host computer records wafer cassette information, such as the combination of the wafer cassette ID and the blocking status of the control holes. This pre-stored blocking status information serves as a reference for subsequent judgments, ensuring the system can accurately identify abnormal situations. The wafer cassette information here includes the combination of the wafer cassette ID and the blocking status of the control holes (for example, MF001234#1011), where # is a flag that separates the wafer cassette ID from the blocking status of the control holes (the four control holes of the wafer cassette are arranged in an ABCD pattern, with 1 in 1011 representing blocked and 0 representing unblocked, meaning that in the example above, control holes ACD are blocked).

[0043] S102, obtaining blocking status information of the control hole of the wafer cassette detected by the first detection component on the transfer plate; Specifically, once a wafer cassette is placed on the transfer tray, the first detection element (a pressure-triggered sensor) immediately begins operating to detect the actual status of the wafer cassette's control aperture. The sensor converts the detection results into electrical signals and transmits them to the analysis module. The analysis module receives these signals and processes them into digital information on the blocking status. In this embodiment, the analysis module also obtains the ID of the wafer cassette to be stored on the transfer tray.

[0044] S103 : issuing a warning message when the blocking state information of the card control hole of the pre-stored wafer box is inconsistent with the blocking state information of the card control hole of the wafer box detected by the first detection component.

[0045] Specifically, the analysis module uses a comparison algorithm to compare the blocking status information obtained in real time with the pre-stored standard status. If inconsistency is found, it means that the card control hole of the wafer box is abnormally blocked, and the system will immediately trigger the warning mechanism. For example, taking the wafer box ID MF001245 obtained by the analysis module and the wafer box card control hole ABD as a blocked state as an example: the analysis module reads the data of the host computer, queries and compares whether there is pre-stored information in the entire database with the wafer box ID MF001245 and the card control hole blocking status information 1101. If so, the logical judgment is yes, if not, the logical judgment is no, that is, the pre-stored wafer box ID and / or blocking status information is inconsistent with the blocking status information detected by the first detection component, and the wafer box storage system issues a warning message.

[0046] Warning information can be presented in a variety of ways, including a flashing red warning light on the system control panel, an audible buzzer, a text prompt on the system display, or a warning message sent to management via the network. This timely warning mechanism helps operators quickly identify and address problems, preventing equipment failures or production accidents caused by blocked control holes.

[0047] Figure 7For a flow chart of the wafer box storage method provided by an embodiment of the present invention, please refer to Figure 7 Furthermore, the wafer box storage method further includes: S201. Obtain an association between storage areas and corresponding storage weights. The weight of a wafer cassette directly reflects the number of wafers within it. Based on the cassette weight, the system pre-establishes a mapping between cassette weight and appropriate storage areas. For example, a fully loaded cassette may be stored in a more stable lower-level storage area, while an empty or lightly loaded cassette can be stored in a higher-level storage area. This association is stored in the system's database and serves as the basis for automatically allocating storage locations.

[0048] S202: When the blocking status information of the control holes of the pre-stored wafer cassette matches the blocking status information of the control holes of the wafer cassette detected by the first detection component, the weight of the wafer cassette on the transfer plate is obtained. Once the system confirms that the control holes of the wafer cassette are in normal condition, the second or third detection component is used to measure the actual weight of the wafer cassette. The weight information is converted into a digital signal and transmitted to the analysis module for processing. The analysis module compares the measured weight of the wafer cassette with a preset weight range to determine the loading status of the wafer cassette and the storage area to be stored.

[0049] S203: Based on the relationship between the storage weight and the storage area, as well as the weight of the wafer cassette on the transfer tray, the transfer tray is controlled to move to the corresponding storage area. The analysis module, based on the acquired wafer cassette weight, queries the relationship between the storage weight and the storage area to determine the storage area for the wafer cassette. The system then controls the transfer tray or robotic arm to accurately transfer the wafer cassette to the designated storage location. This weight-based intelligent allocation mechanism optimizes storage resource utilization and improves the security and efficiency of the storage system.

[0050] Obtaining the association relationship between the pre-stored cassette weight and the storage area includes: obtaining the weight of a fully loaded cassette, the weight of an empty cassette, and the number of storage areas; obtaining the association relationship between the storage area and the corresponding storage weight based on the weight of the fully loaded cassette, the weight of the empty cassette, and the number of storage areas. Exemplarily: obtain the weight of a fully loaded cassette and the weight of an empty cassette in advance. Assume the weight of the empty cassette is x, the weight of the fully loaded cassette is y, let k be the number of the storage area on the k-th layer, and the three-dimensional warehouse is divided into n layers. The weight G = x + y - (x / n) * (k - 1) (taking three layers as an example). If the measured weight is Gm, then compare the magnitude relationship between Gm and G1, G2, G3. When G1 ≤ Gm < G2, it is preferentially stored in the first-layer storage area of the three-dimensional warehouse. When G3 > Gm ≥ G2, it is preferentially stored in the second-layer storage area of the three-dimensional warehouse. When Gm ≥ G3, it is preferentially stored in the third-layer storage area of the three-dimensional warehouse or on the overhead buffer area of the AMHS system. The storage method is sequential storage from bottom to top. When a layer is full, it is preferentially stored in a storage area of a higher level.

[0051] The cassette storage method in this embodiment uses the cassette storage system described above. The cassette storage method includes: obtaining the plugging state information of the card control holes of the pre-stored cassette; obtaining the plugging state information of the card control holes of the cassette detected by the first detection component on the transfer tray; and sending a warning message when the plugging state information of the card control holes of the pre-stored cassette is inconsistent with the plugging state information of the card control holes of the cassette detected by the first detection component. This cassette storage method can determine whether to allow entry into the interior of the three-dimensional warehouse based on the plugging state information of the card control holes of the cassette, reducing the problem of abnormal error reporting of the crane's cargo release in the automatic material handling system when the plugging state information of the card control holes of the cassette during the wafer storage process is inconsistent with the plugging state information of the pre-stored cassette, improving the production efficiency of the machine tool, and reducing the manpower consumption caused by abnormal crane cargo release.

[0052] The third aspect of this embodiment provides an automatic material handling system, including the cassette storage system described in the above embodiment. For example: The cassette storage system includes: A transfer tray for transferring cassettes. The cassette has card control holes, and the card control holes have a plugged state and an unplugged state; A first detection component for detecting the plugging state information of the card control holes when the cassette is on the transfer tray; An analysis module is connected to the signal of the first detection component and is used to obtain the blocking status information of the card control hole detected by the detection component. The analysis module is also used to determine whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection component, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection component.

[0053] The automatic material handling system provided in this embodiment includes a wafer box storage system, which includes a transfer tray, a first detection component, and an analysis module. The transfer tray is used to transfer wafer boxes, and the wafer boxes are provided with a card control hole. The first detection component is used to detect the blocking state of the card control hole. The analysis module is connected to the first detection component by signal and is used to obtain the blocking state information of the card control hole detected by the detection component. The analysis module is also used to determine whether the pre-stored blocking state information of the wafer box is consistent with the blocking state information detected by the first detection component, and to issue a warning message when the pre-stored blocking state information is inconsistent with the blocking state information detected by the first detection component. During the wafer box storage process, the wafer box storage system of this embodiment uses the analysis module to determine whether the pre-stored blocking state information of the wafer box is consistent with the blocking state information detected by the first detection component, and to issue a warning message when the pre-stored blocking state information is inconsistent with the blocking state information detected by the first detection component. This reduces or avoids the problem of production machine alarms caused by the failure of the automatic material handling system to release goods in the later stage, thereby improving the working efficiency of the production machine and reducing manpower consumption.

[0054] In the above description, the reference terms "one embodiment", "some embodiments", "example", "specific example", etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0055] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A wafer box storage system, characterized in that: include: A transfer tray, the transfer tray is used to transfer wafer boxes, the wafer boxes are provided with a card control hole, and the card control hole has a blocked state and an unblocked state; a first detection member, configured to detect blocking status information of the control hole when the wafer cassette is on the transfer plate; An analysis module is connected to the signal of the first detection component and is used to obtain the blocking status information of the card control hole detected by the detection component. The analysis module is also used to determine whether the blocking status information of the pre-stored wafer box is consistent with the blocking status information detected by the first detection component, and to issue a warning message when the pre-stored blocking status information is inconsistent with the blocking status information detected by the first detection component.

2. The wafer box storage system according to claim 1, characterized in that: The first detection element is a pressure-triggered sensor.

3. The wafer box storage system according to claim 2, characterized in that: The transfer tray includes a mounting seat, and the pressure-triggered sensor is arranged on the mounting seat.

4. The wafer box storage system according to claim 3, characterized in that: The mounting base includes a first mounting base and a second mounting base, the first mounting base and the second mounting base are symmetrically arranged, and two press-triggered sensors are arranged on the first mounting base and the second mounting base.

5. The wafer box storage system according to claim 4, characterized in that: The transfer tray is provided with a second detection member, and the second detection member is used to detect the weight of the wafer box.

6. The wafer box storage system according to claim 4, characterized in that: It also includes a robotic arm, which is used to transfer the wafer box on the transfer plate to a storage area. The robotic arm is provided with a third detection component, which is used to detect the weight of the wafer box.

7. A wafer box storage method, using the wafer box storage system according to claim 1, characterized in that: The wafer box storage method includes: Obtaining pre-stored blocking status information of the card control hole of the wafer box; Acquiring blocking status information of the control hole of the wafer box detected by the first detection component on the transfer plate; A warning message is issued when the pre-stored blocking state information of the card control hole of the wafer box is inconsistent with the blocking state information of the card control hole of the wafer box detected by the first detection component.

8. The wafer box storage method according to claim 7, characterized in that: The wafer box storage method further includes: obtaining an association relationship between a storage area and a corresponding storage weight; The weight of the wafer box on the transfer plate is obtained when the pre-stored blocking state information of the wafer box's control hole is consistent with the blocking state information of the wafer box's control hole detected by the first detection component: The transfer tray is controlled to move to the corresponding storage area according to the association relationship between the storage area and the corresponding storage weight and the weight of the wafer box on the transfer tray.

9. The wafer box storage method according to claim 8, characterized in that: The obtaining of the association relationship between the storage area and the corresponding storage weight includes: Obtain the weight of the full wafer cassette, the weight of the empty wafer cassette, and the number of storage areas; The association relationship between the storage area and the corresponding storage weight is obtained according to the weight of the full wafer box, the weight of the empty wafer box and the number of storage areas.

10. An automatic material handling system, characterized in that: A wafer box storage system comprising the wafer box storage system according to any one of claims 1 to 6.

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