Macro-micro positioning mechanism driven by pneumatic corrugated pipe and piezoelectricity in hybrid mode

Abstract

The invention discloses a pneumatic corrugated pipe and piezoelectric hybrid driven macro-micro positioning mechanism which comprises a shell, a left end cover, a corrugated pipe right side flange, a corrugated pipe left side flange, a corrugated pipe and a piezoelectric ceramic driver. The corrugated pipe is arranged in the shell, the right end of the corrugated pipe is connected to the left end face of the corrugated pipe right flange in a sealed mode, the corrugated pipe right flange is provided with a vent hole communicated with the interior of the corrugated pipe, and the left end of the corrugated pipe is connected with the corrugated pipe left flange in a sealed mode. The piezoelectric ceramic driver is installed on a flange on the left side of the corrugated pipe, an output shaft can penetrate out of the left end cover in a left-right sliding mode, and a through hole is formed in the left end cover. Through cooperative arrangement of the corrugated pipe and the piezoelectric ceramic driver, macro-motion displacement of the macro-micro positioning mechanism can be achieved through the corrugated pipe, micro-motion displacement can be achieved through the piezoelectric ceramic driver, positioning errors in the macro-motion stage are compensated, and the precision of the positioning mechanism is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of positioning mechanisms, and in particular to a macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid. Background Art

[0002] With the development of disciplines such as microelectronics, aerospace, and bioengineering, people have placed higher demands on precision motion platforms. These requirements require positioning accuracy up to the submicron or even nanometer level, positioning ranges ranging from a few microns to hundreds of millimeters, and good dynamic characteristics and anti-interference capabilities. For example, in industrial automation, the processing of semiconductors and flat-panel displays, and in the fields of optics and laser processing, the precise positioning of optical components and the accurate guidance of laser beams all require precision positioning devices with long travel and high accuracy. Therefore, long-travel precision positioning technology plays a crucial role in modern science and technology and has become a research hotspot in the field of precision engineering in recent years.

[0003] Macro-micro hybrid drive technology offers advantages such as long travel, high precision, redundant degrees of freedom, and low inertia. Its key concept is to use a macro drive to achieve long-range, fast coarse positioning of the system, while a micro drive compensates for the macro drive's output displacement to achieve high-precision fine positioning. However, structurally, common macro-micro hybrid drive devices require a corresponding drive source for each direction of motion. This increases the system's economic cost and structural complexity, making the commercialization and practical application of macro-micro hybrid drive technology difficult to promote.

[0004] Therefore, there is an urgent need for a macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid drive to solve the problem of the relatively complex structure of common macro-micro hybrid drive devices. Summary of the Invention

[0005] In view of the deficiencies in the prior art, the present invention provides a macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid drive, so as to solve the problem that the structure of a common macro-micro hybrid drive device is relatively complex.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid, comprising a shell, a left end cover, a bellows right flange, a bellows left flange, a bellows and a piezoelectric ceramic driver, wherein the two ends of the cylindrical shell are respectively sealed with the left end cover and the bellows right flange, the bellows is arranged inside the shell, and the right end is sealed with the left end surface of the bellows right flange, a vent hole communicating with the interior of the bellows is provided on the bellows right flange, the vent hole is used for external air supply equipment, the left end of the bellows is sealed with the bellows left flange, the bellows left flange can be slidably arranged inside the shell along the axial direction of the shell, the piezoelectric ceramic driver is installed on the bellows left flange, and the output shaft can slide leftward and rightward along the axial direction of the shell to pass through the left end cover, and a through hole is provided on the left end cover.

[0008] To optimize the above technical solutions, specific measures taken also include:

[0009] Furthermore, it also includes a piezoelectric ceramic connector, the right end of the piezoelectric ceramic driver is sealed through the left flange of the bellows to the interior of the bellows, the piezoelectric ceramic connector connects the right end of the piezoelectric ceramic driver to the right end face of the left flange of the bellows, and the right end of the piezoelectric ceramic connector corresponds to the vent.

[0010] Furthermore, an O-ring is provided at the connection between the piezoelectric ceramic driver and the left flange of the bellows.

[0011] Furthermore, a second limit switch is installed on the left end face of the right flange of the bellows and on the side of the vent hole. The second limit switch is electrically connected to the gas supply equipment, and the right end of the piezoelectric ceramic connector can move to the right to trigger the second limit switch.

[0012] Furthermore, it also includes a spherical retainer, and the outer circumferential surface of the left flange of the bellows is provided with several spherical grooves distributed in an annular array, and a rolling body is embedded in each of the spherical grooves. The outer diameter of the rolling body protrudes from the surface of the spherical groove, and the spherical retainer is fixedly connected to the left flange of the bellows through a spherical retainer mounting screw. The spherical retainer is provided with retaining holes corresponding to the rolling body, which are used to constrain the rolling body in a rolling manner in the spherical groove. The inner wall of the shell is axially provided with an annular spherical guide groove matching the rolling body, and the outer surface of the rolling body is in rolling contact with the guide groove.

[0013] Furthermore, it also includes a grating ruler and a first grating sensor reading head. A groove is axially opened on the inner wall of the shell and located between the left end cover and the left flange of the bellows. A grating ruler is arranged in the groove. The first grating sensor reading head is connected to the left side of the left flange of the bellows through a first reading head connector. The first grating sensor reading head is used to read the scale on the grating ruler.

[0014] Furthermore, it also includes a second grating sensor reading head, which is connected to the output shaft of the piezoelectric ceramic driver located inside the shell through a second reading head connector, and the second grating sensor reading head is used to read the scale on the grating ruler.

[0015] Furthermore, a nut is connected to the second reading head connector, and the second reading head connector is installed on the right side of the piezoelectric ceramic driver output shaft through the nut.

[0016] Furthermore, it also includes a first limit switch, which is fixed inside the shell and located between the left end cover and the left flange of the bellows. The first limit switch is electrically connected to the air supply equipment, and the left flange of the bellows can move to the left to trigger the first limit switch.

[0017] Furthermore, it also includes several springs. Spring grooves are respectively provided on the end faces of the left end cover opposite to the left flange of the bellows. Several of the springs are installed in the spring grooves between the left end cover and the left flange of the bellows in an equidistant array.

[0018] The beneficial effects of the present invention are:

[0019] The present invention is provided with a bellows and a piezoelectric ceramic driver. When in use, an air supply device is connected to an external device through the air vent on the right flange of the bellows which is in communication with the interior of the bellows. When the air supply device fills the bellows with compressed gas through the air vent, the air pressure inside the bellows increases, and the left flange of the bellows at the left end of the bellows slides axially to the left, thereby driving the output shaft of the piezoelectric ceramic driver on the left flange of the bellows to move left, thereby realizing a millimeter-level macro-displacement of the output shaft of the piezoelectric ceramic driver passing through the left end cover to the left. Conversely, through the air supply device By extracting the gas inside the bellows, the piezoelectric ceramic driver on the left side of the bellows can be driven to move to the right; at the same time, through the setting of the piezoelectric ceramic driver and the through hole, the through hole can be used for the piezoelectric ceramic driver to be connected to an external control unit. The piezoelectric ceramic driver can be controlled based on the inverse piezoelectric effect and output nanometer-level micro-displacement through voltage control to compensate for the positioning error in the macro-motion stage and increase the accuracy of displacement positioning. In this way, large-stroke and high-precision displacement positioning can be achieved, and the through hole can adjust the air pressure inside the shell when the volume of the bellows changes.

[0020] This invention utilizes a dual limit and elastic buffer mechanism. When the bellows extends to its maximum displacement, the left flange of the bellows strikes the first limit switch, shutting down the air supply system and preventing damage from overtravel. When the bellows contracts, the piezoelectric ceramic connector strikes the second limit switch, confirming the piezoelectric ceramic actuator's reset position and shutting down the air supply system. A spring is installed in a spring groove between the left end cap and the left flange of the bellows, with its axis parallel to the central axis of the bellows. This spring cushions impact and reduces vibration during bellows extension and assists in resetting during contraction, improving the platform's responsiveness and stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of a half-section structure of a macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid drive proposed in the present invention;

[0022] Figure 2 This is a schematic structural diagram of a macro-micro positioning mechanism with a pneumatic bellows and piezoelectric hybrid drive proposed in the present invention, with the outer shell removed;

[0023] Figure 3 A cross-sectional view of a macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid drive according to the present invention;

[0024] Figure 4 A schematic diagram of the cooperation between a pneumatic bellows and an O-ring of a macro-micro positioning mechanism driven by a piezoelectric hybrid drive according to the present invention;

[0025] Figure 5 This is a schematic diagram of the coordination of a pneumatic bellows and a spherical retainer of a macro-micro positioning mechanism driven by a piezoelectric hybrid drive according to the present invention.

[0026] Figure markings: 1-right side flange of bellows, 2-housing, 3-left end cover, 4-piezoelectric ceramic driver, 5-bellows, 6-spherical retainer, 7-left side flange of bellows, 8-first reading head connector, 9-first grating sensor reading head, 10 second reading head connector, 11-second grating sensor reading head, 12-grating scale, 13-O-ring, 14-piezoelectric ceramic connector, 15-rolling element, 16-first limit switch, 17-second limit switch, 18-spring, 19-right side flange mounting screw, 20-piezoelectric ceramic mounting screw, 21-piezoelectric ceramic connector mounting screw, 22-first reading head connector mounting screw, 23-nut, 24-spherical retainer mounting screw, 25-left end cover mounting screw, 26-limit switch mounting screw. DETAILED DESCRIPTION

[0027] The present invention will now be described in further detail with reference to the accompanying drawings.

[0028] As attached Figure 1 , Attachment Figure 2 and attached Figure 3 As shown, a macro-micro positioning mechanism of a pneumatic bellows and piezoelectric hybrid drive according to an embodiment of the present invention includes a rigid body shell 2, a left end cover 3, a bellows right flange 1, a bellows left flange 7, a bellows 5 and a piezoelectric ceramic driver 4. The two ends of the cylindrical shell 2 are sealed with the left end cover 3 and the bellows right flange 1 respectively. The bellows 5 is arranged inside the shell 2, and the right end is sealed to the left end surface of the bellows right flange 1. A vent hole communicating with the interior of the bellows 5 is provided on the bellows right flange 1, and the vent hole is used for external air supply equipment. The left end of the bellows 5 is sealed to the bellows left flange 7. The bellows left flange 7 can be slidably arranged inside the shell 2 along the axial direction of the shell 2. The piezoelectric ceramic driver 4 is installed on the bellows left flange 7, and the output shaft can slide left and right along the axial direction of the shell 2 to pass through the left end cover 3, and a through hole is provided on the left end cover 3.

[0029] The present invention is provided with a bellows 5 and a piezoelectric ceramic driver 4. When in use, an air supply device is connected to an external device through the air vent on the right side flange 1 of the bellows that is in communication with the inside of the bellows 5. When the air supply device fills the bellows 5 with compressed gas through the air vent, the air pressure inside the bellows 5 increases, and the left side flange 7 of the bellows at the left end of the bellows 5 slides axially to the left, thereby driving the output shaft of the piezoelectric ceramic driver 4 on the left side flange 7 of the bellows to move left, thereby realizing a millimeter-level macro-displacement of the output shaft of the piezoelectric ceramic driver 4 passing through the left end cover 3 to the left. Conversely, through the supply The gas device extracts the gas inside the bellows 5, which can drive the left flange 7 of the bellows and the piezoelectric ceramic driver 4 thereon to move to the right; at the same time, through the setting of the piezoelectric ceramic driver 4 and the through hole, the through hole can be used for the piezoelectric ceramic driver 4 to be connected to an external control unit. The piezoelectric ceramic driver 4 can be controlled based on the inverse piezoelectric effect and output nanometer-level micro-displacement through voltage control to compensate for the positioning error in the macro-motion stage and increase the accuracy of displacement positioning, thereby achieving large-stroke and high-precision displacement positioning, and the through hole can regulate the air pressure inside the shell 2 when the volume of the bellows 5 changes.

[0030] In the above solution, the bellows 5 can be sealed and fixed between the bellows right flange 1 and the bellows left flange 7 by laser welding, serving as a pneumatic drive core.

[0031] In another specific embodiment based on the above, a piezoelectric ceramic connector 14 is further included. The right end of the piezoelectric ceramic driver 4 is sealed and passes through the left flange 7 of the bellows to the interior of the bellows 5. The piezoelectric ceramic connector 14 connects the right end of the piezoelectric ceramic driver 4 to the right end face of the left flange 7 of the bellows. The right end of the piezoelectric ceramic connector 14 corresponds to the vent hole.

[0032] In this solution, the piezoelectric ceramic driver 4 and piezoelectric ceramic connector 14 disposed within the bellows 5 form an embedded micro-displacement compensation structure, limiting the travel of the bellows' left flange 7. When the bellows' left flange 7 moves rightward until the right end of the piezoelectric ceramic connector 14 abuts the vent, the movement of the bellows' left flange 7 is limited and the connection to the gas supply is cut off. Furthermore, by embedding the piezoelectric ceramic driver 4 within the bellows 5 cavity, the overall structure significantly reduces its footprint.

[0033] Specifically, the piezoelectric ceramic connector 14 is rigidly connected to the right end of the piezoelectric ceramic driver 4 via a piezoelectric ceramic mounting screw 20 , and is fixedly connected to the left flange 7 of the bellows via a piezoelectric ceramic connector mounting screw 21 .

[0034] As attached Figure 4 As shown, a circle of O-ring 13 is provided at the connection between the piezoelectric ceramic driver 4 and the left flange 7 of the bellows, thereby achieving an airtight seal.

[0035] A second limit switch 17 is mounted on the left end face of the right side flange 1 of the bellows, adjacent to the vent, via a limit switch mounting screw 26. The second limit switch 17 is electrically connected to the gas supply system, and the right end of the piezoelectric ceramic connector 14 can move rightward to trigger the second limit switch 17. Therefore, when the right end of the piezoelectric ceramic connector 14 moves to trigger the second limit switch 17, it not only limits the movement of the left side flange 7 of the bellows and disconnects the gas supply system, but also triggers the second limit switch 17 to shut down the gas supply system.

[0036] As attached Figure 5 As shown, in another specific embodiment based on the above, a spherical retainer 6 is further included. The outer circumferential surface of the left flange 7 of the bellows is provided with several spherical grooves distributed in an annular array, and a rolling body 15 is embedded in each spherical groove. The outer diameter of the rolling body 15 protrudes from the surface of the spherical groove. The spherical retainer 6 is fixedly connected to the left flange 7 of the bellows through the spherical retainer mounting screws 24. The spherical retainer 6 is provided with retaining holes corresponding to the rolling body 15, which are used to constrain the rolling body 15 in a rolling manner in the spherical groove. The inner wall of the shell 2 is axially provided with an annular spherical guide groove matching the rolling body 15. The outer surface of the rolling body 15 is in rolling contact with the guide groove to form a rolling friction pair. The rolling body 15 rolls along the groove, significantly reducing the friction resistance of the movement. The left end cover 3 can be fixedly connected to the shell 2 through four left end cover mounting screws 25, which can close the rolling friction pair and provide axial constraint.

[0037] In another specific embodiment based on the above, it also includes a grating scale 12 and a first grating sensor reading head 9. A groove is opened axially on the inner wall of the shell 2 and is located between the left end cover 3 and the left flange 7 of the bellows. The grating scale 12 is pasted in the groove as a global displacement reference. The first grating sensor reading head 9 is connected to the left side of the left flange 7 of the bellows through the first reading head connector 8. The first grating sensor reading head 9 is used to read the scale on the grating scale 12. Specifically, the first reading head connector 8 is fixed to the left flange 7 of the bellows through the first reading head connector mounting screw 22, and the first grating sensor reading head 9 is fixed to the first reading head connector 8 through the reading head mounting screw.

[0038] It also includes a second grating sensor reading head 11, which is connected to the output shaft of the piezoelectric ceramic driver 4 located inside the housing 2 through a second reading head connector 10. The second grating sensor reading head 11 is used to read the scale on the grating ruler 12. Specifically, the second grating sensor reading head 11 is fixed to the second reading head connector 10 through a reading head mounting screw.

[0039] The second reading head connector 10 is connected to a nut 23 and is mounted on the right side of the output shaft of the piezoelectric ceramic driver 4 via the nut 23. In this way, the overall output displacement can be measured by the second grating sensor reading head 11.

[0040] The first grating sensor reading head 9 and the second grating sensor reading head 11 are both located directly above the grating scale 12, and are used to detect macro displacement and micro displacement respectively, and realize dual feedback closed-loop control through data fusion to ensure positioning accuracy.

[0041] In another specific embodiment based on the above, a first limit switch 16 is further included. The first limit switch 16 is fixed to the interior of the housing 2 by a limit switch mounting screw 26 and is located between the left end cover 3 and the left flange 7 of the bellows. The first limit switch 16 is electrically connected to the gas supply device, and the left flange 7 of the bellows can move leftward to trigger the first limit switch 16. In this way, when the left end of the left flange 7 of the bellows moves to trigger the first limit switch 16, the gas supply device can be shut down.

[0042] In another specific embodiment based on the above, several springs 18 are further included. Spring grooves are respectively provided on the end faces of the left end cover 3 opposite to the left flange 7 of the bellows. Several springs 18 are installed in an equidistant array in the spring grooves between the left end cover 3 and the left flange 7 of the bellows. The two ends of the spring 18 are respectively in contact with the left end cover 3 and the left flange 7 of the bellows to buffer the limiting impact and assist in resetting the mechanism.

[0043] This solution utilizes a dual limit and elastic buffer mechanism. When the bellows 5 extends to its maximum displacement, the bellows' left flange 7 strikes and triggers the first limit switch 16, shutting down the air supply system and preventing overtravel damage. When the bellows 5 contracts, the piezoelectric ceramic connector 14 strikes and triggers the second limit switch 17, confirming the piezoelectric ceramic driver 4 has returned to its original position and shutting down the air supply system. A spring 18 is installed in a spring groove between the left end cap 3 and the bellows' left flange 7. Its axis is parallel to the central axis of the bellows 5. This cushions impact and reduces vibration during bellows 5 extension, and assists in resetting during contraction, improving the platform's responsiveness and stability.

[0044] A specific embodiment of the present invention is as follows:

[0045] Macro-dynamic positioning: The control system controls the air supply equipment to rush in compressed gas. The compressed gas enters the bellows 5 through the right flange 1 of the bellows. The air pressure drives the left flange 7 of the bellows to extend axially, driving the spherical retainer 6 to move along the spherical groove of the shell 2. The rolling body 15 reduces the resistance and realizes millimeter-level coarse positioning.

[0046] Micro-motion compensation: After macro-motion approaches the target, the first grating sensor readhead 9 monitors the macro-drive displacement, while the second grating sensor readhead 11 monitors the overall displacement. These two are compared with the grating scale 12 to determine the error. The control system applies voltage to the piezoelectric ceramic driver 4 accordingly, using the inverse piezoelectric effect to output nanometer-level micro-displacement. The piezoelectric ceramic driver 4 then compensates for the macro-motion error, achieving sub-micron positioning.

[0047] Closed-loop control and safeguards: Data from the dual grating readheads fuses to create a closed-loop control system, enabling real-time calibration of macro and micro movements. A first limit switch 16 prevents the bellows from extending beyond its travel, while a second limit switch 17 confirms the piezoelectric ceramic's retraction. A spring 18 between the left end cap 3 and the bellows' left flange 7 provides buffering and assists in resetting, ensuring stable and rapid movement.

[0048] The present invention integrates the piezoelectric ceramic driver 4 within the bellows 5, achieving modular connection via piezoelectric ceramic connectors 14. This creates an integrated pneumatic-piezoelectric synergistic drive system design, and dual readout heads provide feedback on macro- and micro-displacement data, ensuring displacement accuracy. The bellows 5 achieves millimeter-level coarse positioning, while the piezoelectric drive compensates for submicron accuracy. This system offers a wide range, high response, high precision, and low friction, making it suitable for applications requiring high-precision positioning in semiconductor packaging and optical precision adjustment.

[0049] Among them, pneumatic positioning technology, with its advantages of large stroke and low friction, can achieve rapid coarse positioning at the millimeter or even decimeter level; while the piezoelectric ceramic driver 4, with its fast response speed, wide operating frequency, and easy control, can output displacements of tens to hundreds of microns and achieve ultra-high positioning accuracy at the nanometer level.

[0050] The present invention deeply integrates the unique advantages of the two technologies, and innovatively develops a pneumatic precision positioning mechanism with piezoelectric micro-displacement compensation, effectively filling the technical gap in the balance between stroke and precision of a single drive mode. In addition, the present invention breaks through the traditional structural design and innovatively integrates the piezoelectric ceramic driver 4 and the bellows 5 into an integrated design. Through a clever layout, the piezoelectric ceramic driver 4 is built into the cavity of the bellows 5, which greatly reduces the space occupied by the overall structure. This compact design not only meets the needs of modern precision equipment for miniaturization and integration, but also significantly reduces assembly complexity and production costs. In practical applications, the mechanism can be widely adapted to scenarios with strict space and precision requirements, such as semiconductor packaging and optical precision adjustment; from a commercial perspective, its innovation and practicality can bring new technological growth points to related industries, and it has extremely high application value and broad market prospects.

[0051] The present invention realizes the organic fusion of large stroke and high precision. The platform is based on a macro-motion platform driven by a pneumatic bellows 5, which can achieve large-stroke feeding from millimeter level to decimeter level; supplemented by a micro-motion platform driven by piezoelectric ceramics, it uses its nanometer-level displacement resolution to dynamically compensate for the error of the macro-motion platform, and finally achieves submicron-level positioning accuracy. Compared with the traditional series structure, this platform adopts a unique integrated series design, and the piezoelectric ceramic driver 4 is built into the cavity of the pneumatic bellows 5 to form a compact and efficient hierarchical drive layout. At the same time, a double limit protection mechanism is set at the key nodes of the structure, and a limit switch is arranged between the left end cover 3 and the left flange 7 of the bellows to monitor the stroke boundary of the macro-motion platform; a high-precision limit sensor is installed on the right flange 1 of the bellows to detect the motion limit of the piezoelectric ceramic micro-motion platform in real time, effectively avoiding the risk of structural damage and positioning failure caused by overtravel, and significantly improving the reliability and practicality of the platform.

[0052] It should be noted that the terms such as "upper", "lower", "left", "right", "front", "back", etc. cited in the invention are only for the convenience of description and are not used to limit the scope of implementation of the present invention. Changes or adjustments to their relative relationships should be regarded as the scope of implementation of the present invention without substantially changing the technical content.

[0053] The above are only preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions that fall within the scope of protection of the present invention are within the scope of protection of the present invention. It should be pointed out that for those skilled in the art, it is understood that various changes, modifications, substitutions, embellishments and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and they should be regarded as the scope of protection of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A macro-micro positioning mechanism driven by a pneumatic bellows and piezoelectric hybrid, characterized by: The invention comprises a shell (2), a left end cover (3), a bellows right flange (1), a bellows left flange (7), a bellows (5) and a piezoelectric ceramic driver (4). The two ends of the columnar shell (2) are respectively sealed with the left end cover (3) and the bellows right flange (1). The bellows (5) is arranged inside the shell (2), and the right end is sealed with the left end face of the bellows right flange (1). The bellows right flange (1) is provided with a vent hole connected with the inside of the bellows (5), and the vent hole is used for external air supply equipment. The left end of the bellows (5) is sealed with the bellows left flange (7). The bellows left flange (7) can be slidably arranged inside the shell (2) along the axial direction of the shell (2). The piezoelectric ceramic driver (4) is installed on the bellows left flange (7), and the output shaft can slide leftward and rightward along the axial direction of the shell (2) to pass through the left end cover (3). The left end cover (3) is provided with a through hole.

2. A pneumatic bellows and piezoelectric hybrid driven macro-micro positioning mechanism according to claim 1, characterized in that: It also includes a piezoelectric ceramic connector (14), the right end of the piezoelectric ceramic driver (4) is sealed and passes through the left flange (7) of the bellows to the interior of the bellows (5), the piezoelectric ceramic connector (14) connects the right end of the piezoelectric ceramic driver (4) to the right end face of the left flange (7) of the bellows, and the right end of the piezoelectric ceramic connector (14) corresponds to the vent hole.

3. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 2, characterized in that: A circle of O-type sealing ring (13) is provided at the connection between the piezoelectric ceramic driver (4) and the left flange (7) of the bellows.

4. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 2, characterized in that: A second limit switch (17) is installed on the left end face of the right side flange (1) of the bellows and on the side of the vent hole. The second limit switch (17) is electrically connected to the gas supply device. The right end of the piezoelectric ceramic connector (14) can move rightward to trigger the second limit switch (17).

5. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 1, characterized in that: The invention also includes a spherical retainer (6), wherein the outer circumferential surface of the left flange (7) of the bellows is provided with a plurality of spherical grooves distributed in an annular array, wherein a rolling body (15) is embedded in each of the spherical grooves, and the outer diameter of the rolling body (15) protrudes from the surface of the spherical groove. The spherical retainer (6) is fixedly connected to the left flange (7) of the bellows via a spherical retainer mounting screw (24), and a retaining hole corresponding to the rolling body (15) is provided on the spherical retainer (6) for rotatably restraining the rolling body (15) in the spherical groove. The inner wall of the housing (2) is provided with an annular spherical guide groove matching the rolling body (15) along the axial direction, and the outer surface of the rolling body (15) is in rolling contact with the guide groove.

6. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 1, characterized in that: The invention also includes a grating ruler (12) and a first grating sensor reading head (9). A groove is provided in the axial direction on the inner wall of the housing (2) and between the left end cover (3) and the left flange (7) of the bellows. The grating ruler (12) is provided in the groove. The first grating sensor reading head (9) is connected to the left side of the left flange (7) of the bellows via a first reading head connector (8). The first grating sensor reading head (9) is used to read the scale on the grating ruler (12).

7. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 6, characterized in that: The invention also includes a second grating sensor reading head (11), which is connected to the output shaft of the piezoelectric ceramic driver (4) located inside the housing (2) through a second reading head connector (10), and the second grating sensor reading head (11) is used to read the scale on the grating ruler (12).

8. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 7, characterized in that: The second reading head connecting member (10) is connected to a nut (23) and is installed on the right side of the output shaft of the piezoelectric ceramic driver (4) through the nut (23).

9. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 1, characterized in that: The invention also includes a first limit switch (16), which is fixed inside the housing (2) and located between the left end cover (3) and the left flange (7) of the bellows. The first limit switch (16) is electrically connected to the gas supply device, and the left flange (7) of the bellows can be moved to the left to trigger the first limit switch (16).

10. The macro-micro positioning mechanism with pneumatic bellows and piezoelectric hybrid drive according to claim 1, characterized in that: The invention also includes a plurality of springs (18). The end surface of the left end cover (3) opposite to the left flange (7) of the bellows is respectively provided with a spring groove. The plurality of springs (18) are equidistantly arrayed and installed in the spring groove between the left end cover (3) and the left flange (7) of the bellows.

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