Cleaning equipment

Abstract

The embodiment of the invention provides cleaning equipment, and relates to the technical field of cleaning equipment.The cleaning equipment comprises a control component, a cleaning component and a fan unit which are sequentially arranged from one side to the opposite side, the control component is electrically connected with the cleaning component and the fan unit, and when the control component detects materials in the cleaning component, the fan unit is electrically connected with the cleaning component. A set cleaning environment corresponding to the material information is obtained, the fan unit is controlled to construct the set cleaning environment in a cleaning cavity, containing materials, of the cleaning component, and the set cleaning environment comprises a preset humidity range, a concentration preset value of particulate matter and a dew point preset value; the fan unit is used for filling a cleaning cavity of the cleaning component with first gas for protecting materials and second gas for adjusting humidity to construct a set cleaning environment, and in the cleaning process, the set cleaning environment is maintained based on the control component; and the cleaning part is used for cleaning the materials until the materials meet the cleaning standard of the materials. Therefore, on the premise of protecting the cleaning materials, the cleaning degree is improved.

Description

Technical Field

[0001] The present application relates to the technical field of cleaning equipment, and in particular to a cleaning equipment. Background Art

[0002] Dry ice blasting equipment is a cleaning machine whose cleaning system uses high-pressure air to spray dry ice pellets onto the surface of the device being cleaned. The system utilizes the physical reaction of temperature differences to cause different substances to separate at different shrinkage rates. Specifically, when the -78°C dry ice pellets come into contact with the surface of dirt, they cause a brittle explosion, shrinking and loosening the dirt. Subsequently, the dry ice pellets instantly vaporize and expand 800 times, generating a powerful peeling force that quickly and thoroughly removes dirt from the surface, achieving a fast, efficient, safe, and energy-saving cleaning effect. The carbon dioxide used in dry ice blasting comes from industrial waste gas, high-altitude air separation, and other sources; dry ice blasting itself does not produce carbon dioxide.

[0003] In related technologies, workers can use a handheld dry ice cleaning device's spray gun to directly spray materials, completing the cleaning process quickly and easily. However, in an open environment, ambient temperature, humidity, and particulate matter can directly or indirectly affect the cleanliness and even performance of the cleaning process. For example, when cleaning semiconductor devices in an open environment, exposure to a stream of dry ice pellets can cause the surface temperature of the device to drop. Subsequently, if the ambient humidity is high, moisture can condense on the device's surface, affecting not only the cleanliness of the device but also potentially rendering the electrical materials or components within it unreliable or even failing. Furthermore, varying temperatures can affect the size of the dry ice pellets in the dry ice pellet stream. If the temperature is high, the dry ice pellets may vaporize before reaching the semiconductor device. If the temperature is low, the dry ice pellets may not vaporize enough, causing damage to the semiconductor device due to the impact of the airflow. Furthermore, if the ambient particulate matter concentration is high, when using a dry ice pellet stream to clean semiconductor devices, the friction of the dry airflow can generate static electricity on the device's surface, which can instantly attract dust after cleaning, affecting the cleaning effect.

[0004] Therefore, there is an urgent need for a cleaning device that can improve the cleaning cleanliness while protecting the cleaning materials. Summary of the Invention

[0005] The embodiments of the present application provide a cleaning device that can provide a good cleaning environment and cleaning conditions, and improve the cleaning cleanliness while protecting the cleaning materials.

[0006] In a first aspect, an embodiment of the present application provides a cleaning device, comprising a control component, a cleaning component, and a fan unit arranged sequentially from a side close to the ground to a side away from the ground, wherein the control component is electrically connected to the cleaning component and the fan unit, respectively, and includes:

[0007] The control component is configured to, upon detecting that the cleaning component contains material, obtain material information of the material, obtain a corresponding set cleaning environment based on the material information, and control the fan unit to construct the set cleaning environment in a cleaning chamber of the cleaning component, wherein the cleaning chamber is configured to accommodate the material, and the set cleaning environment includes a preset humidity range, a preset concentration value of particulate matter, and a preset dew point value;

[0008] The fan unit is used to fill the cleaning chamber of the cleaning component with a first gas and a second gas to create the set cleaning environment, and to maintain the set cleaning environment under the control of the control component during the cleaning process, wherein the first gas is used to protect the material, and the second gas is used to adjust the humidity inside the cleaning chamber;

[0009] The cleaning component is used to clean the material until it meets the cleanliness standard of the material.

[0010] Optionally, a hole is provided on the bottom cavity wall of the cleaning chamber close to the ground side, the control component is provided with a gas collection device docked with the bottom cavity wall, the gas collection device is sealedly connected to the exhaust gas recovery pipe, the exhaust gas recovery pipe is connected to the pipe port of the air intake pipe in the fan unit away from the ground side, the pipe port of the air intake pipe close to the ground side is connected to the top cavity wall of the cleaning chamber away from the ground side, the exhaust gas recovery pipe is provided with an exhaust solenoid valve for adjusting the internal air pressure of the exhaust gas recovery pipe, and the fan unit is provided with a gas separation device;

[0011] Among them, the mixed gas formed by the first gas, the second gas and the particles of dirt falling off the material in the cleaning chamber enters the gas collection device from the hole, and enters the air intake pipe through the exhaust gas recovery pipe, so that the fan unit filters and dries the mixed gas, and uses the gas separation device to separate the first gas from the treated mixed gas.

[0012] Optionally, the first gas is nitrogen, and the gas separation device is a nitrogen separation device; the gas collection device includes a first pair of interfaces and a second pair of interfaces, the first pair of interfaces is connected to the bottom cavity wall, and the second pair of interfaces is connected to the exhaust gas recovery pipe, the gas collection device guides the mixed gas collected by the first pair of interfaces to the second pair of interfaces, and the diameter of the gas collection device gradually decreases along the airflow direction.

[0013] Optionally, the cleaning chamber is provided with a dew point meter, a particle meter, a humidity meter, a material conveying device, a cleaning fixture and a spray gun, the material conveying device and the cleaning fixture are arranged on the bottom cavity wall of the cleaning chamber close to the ground side, and the cleaning fixture is provided with a spray gun on the end away from the ground; the control component is provided with an electric control cabinet and a snowflake cleaning machine, the cleaning pipeline of the snowflake cleaning machine is connected to the spray gun, and the electric control cabinet is electrically connected to the dew point meter, the particle meter, the humidity meter and the fan unit respectively;

[0014] In which, the electric control cabinet obtains the dew point, particle concentration and humidity in the cleaning chamber through the dew point meter, the particle tester and the humidity tester, and controls the fan unit to adjust the gas filling rate of the first gas and the second gas based on the set cleaning environment and the dew point, the particle concentration and the humidity, so as to adjust one or more of the dew point, particle concentration and humidity in the cleaning chamber, construct or maintain the set cleaning environment in the cleaning chamber, and when the material conveying device conveys the material to a specific cleaning position, the dry ice particle airflow produced by the snowflake cleaning machine passes through the cleaning pipe to the spray gun, and the spray gun, clamped by the cleaning fixture, sprays the dry ice particle airflow to clean the material.

[0015] Optionally, the cleaning chamber further includes an ion blower, which is arranged on the bottom chamber wall. The air outlet range of the ion blower covers the specific cleaning position and is used to remove static electricity on the surface of the material.

[0016] Optionally, the cleaning component further includes a first transition chamber, the first transition chamber is connected to the cleaning chamber, and a first shut-off valve is provided at the connection position; a first photoelectric sensor is provided in the first transition chamber, and the control component is further provided with a vacuum pump, a pump pipeline of the vacuum pump is connected to the first transition chamber, and the first photoelectric sensor and the vacuum pump are electrically connected to the electric control cabinet respectively;

[0017] When the material is placed in the first transition chamber, the first photoelectric sensor detects and obtains the material information of the material, and transmits the material information to the electric control cabinet, so that the electric control cabinet controls the first stop valve to be closed, and controls the vacuum pump to vacuum the first transition chamber through the pump pipeline. After completion, the first stop valve is controlled to open, and the material is conveyed to the specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

[0018] Optionally, the cleaning component further includes a second transition chamber, a manual vacuum valve is provided in the second transition chamber, and the transition space of the second transition chamber is smaller than the transition space of the first transition chamber; the second transition chamber is connected to the cleaning chamber, and a second stop valve is provided at the connection position; a second photoelectric sensor is provided in the second transition chamber, a pump pipeline of the vacuum pump in the control component is connected to the second transition chamber, and the second photoelectric sensor and the vacuum pump are electrically connected to the electric control cabinet;

[0019] When the material is placed in the second transition chamber, the second photoelectric sensor detects and obtains the material information of the material, and transmits the material information to the electric control cabinet, so that the electric control cabinet controls the second shut-off valve to be closed, and manually operates the manual vacuum valve to control the vacuum pump to vacuum the second transition chamber through the pump pipeline. After completion, the second shut-off valve is controlled to open, and the material is conveyed to the specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

[0020] Optionally, the fan unit comprises an air intake duct, a filter and a dryer, and the filter and the dryer are sequentially arranged in the air intake duct along the air intake direction;

[0021] The first gas passes through the filter and the dryer in sequence and enters the cleaning chamber, and the second gas passes through the filter and enters the cleaning chamber, thereby constructing and maintaining the set cleaning environment.

[0022] Optionally, the fan unit is provided with an emergency exhaust valve and a fan differential pressure gauge;

[0023] The fan differential pressure gauge is used to detect the internal pressure of the fan unit; the emergency exhaust valve is used to perform exhaust processing when the equipment is urgently powered off, causing the pressure in the fan unit to exceed the set pressure of the fan unit.

[0024] Optionally, there is a transparent area on the side wall of the cleaning chamber, and the transparent area is provided with at least one opening, and the opening is sealedly connected to the opening of the glove; the opening and the corresponding gloves are used for staff to operate materials.

[0025] Beneficial effects of this application:

[0026] In the embodiment of the present application, the cleaning equipment is provided with a control component, a cleaning component and a fan unit from bottom to top, and the control component can be electrically connected and control the cleaning component and the fan unit respectively. Then, when the cleaning component contains materials, the control component can obtain the corresponding set cleaning environment based on the material information of the obtained material, and then control the fan unit to construct and maintain the set cleaning environment in the cleaning chamber of the cleaning component. In this way, the cleaning environment can be controlled, and a customized cleaning environment can be achieved for different materials, thereby improving the cleanliness of the material cleaning and ensuring the performance of the material after cleaning. Among them, the fan unit can adopt the method of filling the cleaning chamber with a first gas to protect the material and filling it with a second gas to adjust the humidity inside the cleaning chamber. Furthermore, it is ensured that the material is not damaged during the cleaning process and the cleanliness of the material is improved.

[0027] These implementations or other implementations of the present application will be more concise and understandable in the description of the following embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0029] Figure 1 A schematic diagram of the structure of a cleaning device provided in an embodiment of the present application;

[0030] Figure 2 A schematic diagram of an exhaust gas recovery device in a cleaning device provided in an embodiment of the present application;

[0031] Figure 3 A schematic diagram of a gas collection device in a cleaning device provided in an embodiment of the present application;

[0032] Figure 4 A schematic diagram of the structure of a cleaning device provided in an embodiment of the present application;

[0033] Figure 5 A schematic structural diagram of a cleaning device with a transition chamber provided in an embodiment of the present application;

[0034] Figure 6 A schematic structural diagram of another cleaning device with a transition chamber provided in an embodiment of the present application;

[0035] Figure 7 A schematic structural diagram of a fan unit provided in an embodiment of the present application;

[0036] Figure 8 A schematic structural diagram of a cleaning component in a cleaning device provided in an embodiment of the present application;

[0037] Figure 9 A schematic diagram of a device for obtaining a flow of dry ice particles provided in an embodiment of the present application;

[0038] Figure 10 A schematic diagram of a device for obtaining a flow of dry ice particles with a visible spray gun structure provided in an embodiment of the present application. DETAILED DESCRIPTION

[0039] To make the objectives, technical solutions, and advantages of this application more clear, this application will be further described in detail below with reference to the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.

[0040] Cleaning equipment is commonly used to clean devices, components, and equipment related to the petrochemical industry, printing industry, automotive industry, and electronics industry. However, due to the demand for precision and miniaturization of equipment and components, as well as the increasingly stringent cleaning requirements in fields such as precision manufacturing, optical devices, and semiconductors, different cleaning environments may have different effects on the cleanliness and even performance of materials. As a result, cleaning conditions need to be modified according to factors such as the nature, volume, and material of the material. Currently, there is no equipment that can effectively handle the control of complex cleaning conditions.

[0041] For example, semiconductor chips have reached nanometer size, and semiconductor devices vary in size, with varying requirements. Cleaning of semiconductor-related devices is a crucial process in semiconductor manufacturing, and its effectiveness has a significant impact on the manufacturing and use of semiconductor devices. To prevent the introduction of other environmental substances onto the surface of the device being cleaned during the cleaning process, which could lead to incomplete cleaning, contamination of the device, or damage to the cleaning effect, cleaning conditions can be customized for each chip or device, creating a corresponding cleaning environment to ensure optimal cleaning performance and performance.

[0042] In view of this, the embodiment of the present application provides a cleaning device, such as Figure 1 As shown, the cleaning device includes a control component 103, a cleaning component 102 and a fan unit 101 arranged in sequence from the side close to the ground to the side away from the ground. The control component 103 is electrically connected to the cleaning component 102 and the fan unit 101, respectively, and includes:

[0043] The control component 103 is used to, when detecting that the cleaning component 102 contains material, obtain material information of the material, obtain a corresponding set cleaning environment based on the material information, and control the fan unit 101 to establish the set cleaning environment in the cleaning chamber of the cleaning component 102, where the cleaning chamber is used to accommodate the material. The set cleaning environment includes a preset humidity range, a preset concentration value of particulate matter, and a preset dew point value.

[0044] The fan unit 101 is used to fill the cleaning chamber of the cleaning component 102 with a first gas and a second gas to create a set cleaning environment. During the cleaning process, the set cleaning environment is maintained under the control of the control component 103. The first gas is used to protect the material, and the second gas is used to adjust the humidity inside the cleaning chamber.

[0045] The cleaning component 102 is used to clean the material until it meets the cleanliness standard of the material.

[0046] In one embodiment, the materials can be printed circuit boards, chips, packaged devices, petrochemical related equipment (such as fans, air compressors, smoke exhaust fans, steam turbines, blowers), related equipment or components in the printing industry (such as ink-contaminated gears, guide rails, nozzles), etc. There is no specific restriction on the materials that can be cleaned by the cleaning equipment, and it can be set as needed.

[0047] In one embodiment, the material information of the material can be determined by referring to factors such as the device precision level and volume. For example, the type information can be first-class precision device, second-class precision device, 1-5cm 3 Devices, 5-10cm 3 The device can be determined by the material type of the material itself, such as chip materials, blower materials, gear materials, etc. There is no specific restriction on the material information here, and it can be set as needed. For example, the material information can also be marking information such as a QR code on the surface of the material.

[0048] In one embodiment, the cleaning equipment may also include an information input device, which may be a computer with a keyboard or a touch screen (which may also be used to display relevant data), or a data receiving interface (such as a USB interface), etc. The control component 103 may include an electrical control cabinet and a snowflake cleaning machine. Accordingly, the snowflake cleaning machine may be provided with relevant data about the cleaning components for cleaning, and a logic control chip may be provided in the electrical control cabinet. The logic control chip may include setting a cleaning environment, and relevant logic for constructing and maintaining the set cleaning environment. The cleaning-related data in the snowflake cleaning machine, as well as the set cleaning environment and its relevant logic may be input from the information input device.

[0049] In one embodiment, the cleaning component in the cleaning equipment may also include an outlet transition chamber. After the material cleaning is completed, cleaning treatment is performed in the outlet transition chamber. For example, the outlet transition chamber can be connected to a material conveying device, and the outlet transition chamber can be connected to the fan unit through a first gas pipeline. After the outlet transition chamber detects the material through a photoelectric sensor, the control component controls the fan unit to provide the first gas to the outlet transition chamber through the pipeline to purge the material, and then take the material out. In this way, even if there is some dust on the surface of the material during the cleaning process, it will be blown clean, thereby improving the cleaning degree.

[0050] In one embodiment, the preset humidity range is set based on the ability of the material to avoid static electricity within certain humidity conditions. In other words, to prevent static electricity from attracting dust and causing re-contamination of the cleaned material after it leaves the equipment, the humidity within the cleaning chamber can be maintained within the preset humidity range to ensure that static electricity is not generated on the material surface, thereby preventing re-contamination of the material after it leaves the equipment.

[0051] The above-mentioned equipment obtains material information and sets the cleaning environment through fully automated means. Based on the set cleaning environment, it maintains the cleaning chamber in accordance with the set cleaning environment during the cleaning process. This effectively controls the dew point, cleanliness level, and humidity within the cleaning chamber, ensuring that no other contaminants are introduced into the cleaning chamber during the cleaning process, that the material is not contaminated, and that no material is damaged. Furthermore, no residual moisture will remain on the surface of the material after the cleaning process, affecting its performance, and that excessively low humidity will not affect its performance. This solves the problem in related technologies of the difficulty of simultaneously maintaining a Class 100 clean environment and humidity control during the cleaning process, achieving rapid and efficient material cleaning in a Class 100 clean environment and with precise humidity control.

[0052] Based on the above Figure 1 The cleaning equipment in the present application provides an exhaust gas recovery device in the cleaning equipment, such as Figure 2 As shown, a hole 203 is provided on the bottom wall 202 of the cleaning chamber 201 close to the ground side, and a gas collection device 205 is provided in the control component 204, which is connected to the bottom wall 202. The gas collection device 205 is sealed with an exhaust gas recovery pipe 206, and the exhaust gas recovery pipe 206 is connected to the pipe port of the air intake pipe 208 in the fan unit 207 away from the ground side. The pipe port of the air intake pipe 208 close to the ground side is connected to the top wall 209 of the cleaning chamber 201 away from the ground side. The exhaust gas recovery pipe 206 is provided with an exhaust solenoid valve 210 for adjusting the internal air pressure of the exhaust gas recovery pipe 206, and the fan unit 207 is provided with a gas separation device 211 (not shown in the figure);

[0053] Among them, the mixed gas formed by the first gas, the second gas and the particles of dirt falling off the material in the cleaning chamber 201 enters the gas collection device 205 from the hole 203, and enters the air intake pipe through the exhaust gas recovery pipe 206, so that the fan unit 207 filters and dries the mixed gas, and uses the gas separation device 211 to separate the first gas from the treated mixed gas.

[0054] In one embodiment, a fan unit fills the cleaning chamber with a first gas and a second gas, and carries the particulate matter generated during the cleaning process out of the cleaning chamber through holes provided on the bottom wall of the cleaning chamber close to the ground. A gas collection device recovers the mixed gas - waste gas - carrying dirt particles of the material discharged from the exhaust port of the hole, and the waste gas flows through the waste gas recovery pipe into the air intake pipe.

[0055] In one embodiment, the hole may be controlled by a solenoid valve. When it is detected that the pressure in the hole is greater than a certain pressure value, the solenoid valve of the hole opens to allow gas to pass through for exhaust.

[0056] In one embodiment, after the first gas and the second gas are filled into the cleaning chamber, the air pressure in the cleaning chamber rises. After the air pressure rises to a certain value, the valve of the exhaust port of the hole opens to exhaust the waste gas carrying particulate matter generated by the cleaning material.

[0057] In one embodiment, the exhaust gas may be the first gas carrying more particulate matter, or may be the first gas and the second gas carrying more particulate matter.

[0058] In one embodiment, if the exhaust gas contains only the first gas, the filtered first gas may be dried and filtered to directly obtain the first gas that can be refilled into the cleaning chamber.

[0059] In one embodiment, if the exhaust gas contains the first gas and the second gas, the filtered mixed gas can be dried and filtered, and then separated from the obtained mixed gas through gas separation to obtain the first gas that can be refilled into the cleaning chamber, thereby saving costs.

[0060] In one embodiment, a dust collector and a filter can be installed at the exhaust gas recovery pipe. In this way, the dust collector can improve the dust collection efficiency and prevent the backflow of airflow from secondary pollution to the cleaning chamber. The filter can filter the larger particles of dirt that fall off, and the airflow then enters the air intake pipe, reducing the filtering pressure of the fan unit and improving the exhaust gas treatment efficiency.

[0061] In one embodiment, the first gas is nitrogen and the second gas is outside air. Using nitrogen and outside air is a low-cost solution because nitrogen is readily available and does not cause pollution, and outside air generally carries a moderate amount of moisture, eliminating the need for a high-precision humidifier.

[0062] In one embodiment, the host gas may also be carbon dioxide.

[0063] In one embodiment, during the process of cleaning the material, the fan unit can fill the cleaning chamber with a first gas, and correspondingly remove the first gas and particles detached from the material from the holes. As the concentration of particles in the cleaning chamber increases, water may adhere to the surface of the particles, causing the humidity to decrease. Therefore, a second gas can be simultaneously filled into the cleaning chamber to increase the humidity, and correspondingly remove the first gas, the second gas, and particles detached from the material from the holes. If the particle concentration continues to rise, the cleaning chamber environment can be maintained by adjusting the gas filling flow rates of the first gas and the second gas. A large gas filling flow rate increases the pressure in the equipment cavity, the amount of discharged gas increases, and more particles are carried out of the equipment cavity, which can reduce the particle concentration in the equipment cavity.

[0064] Based on the above Figure 2 The waste gas recovery device in the cleaning equipment, the embodiment of the present application provides a gas collection device in the cleaning equipment, such as Figure 3 As shown, the first gas is nitrogen, and the gas separation device is a nitrogen separation device; the gas collection device 300 includes a first docking port 301 and a second docking port 302, the first docking port 301 is docked with the bottom cavity wall, and the second docking port 302 is docked with the exhaust gas recovery pipe. The gas collection device 300 guides the mixed gas collected by the first docking port 301 to the second docking port 302, and the diameter of the gas collection device 300 along the airflow direction gradually decreases.

[0065] In one embodiment, the gas collection device may be funnel-shaped or hollow-conical, with the first abutment opening within the cone having a larger hollow diameter than the second abutment opening. The shape of the gas collection device is not particularly limited. The gas collection device's diameter gradually decreases along the direction of airflow, thereby preventing airflow from returning to the cleaning chamber and causing secondary contamination.

[0066] Based on the above Figure 1 The cleaning device in the embodiment of the present application provides a cleaning device, such as Figure 4As shown, a dew point meter 401 (not shown in the figure), a particle meter 402 (not shown in the figure), a humidity meter 403 (not shown in the figure), a material conveying device 404, a cleaning fixture 405 and a spray gun 406 are provided in the cleaning chamber. The material conveying device 404 and the cleaning fixture 405 are arranged on the bottom cavity wall 407 close to the ground side of the cleaning chamber 400, and the spray gun 406 is provided on the end of the cleaning fixture 405 away from the ground; an electric control cabinet 409 and a snowflake cleaning machine 410 are provided in the control component 408, and the cleaning pipeline of the snowflake cleaning machine 410 is connected to the spray gun 406, and the electric control cabinet 409 is electrically connected to the dew point meter 401, the particle meter 402, the humidity meter 403 and the fan unit 411 respectively;

[0067] Among them, the electric control cabinet 409 obtains the dew point, particle concentration and humidity in the cleaning chamber 400 through the dew point meter 401, the particle tester 402 and the humidity tester 403, and controls the fan unit 411 (not shown in the figure) to adjust the gas filling rate of the first gas and the second gas based on the set cleaning environment and dew point, particle concentration and humidity, so as to adjust one or more of the dew point, particle concentration and humidity in the cleaning chamber, and construct or maintain the set cleaning environment in the cleaning chamber. When the material conveying device 404 conveys the material to a specific cleaning position, the dry ice particle airflow produced by the snowflake cleaning machine 410 passes through the cleaning pipe to the spray gun 406, and the spray gun 406 sprays the dry ice particle airflow to clean the material under the clamping of the cleaning fixture 405.

[0068] In one embodiment, the material conveying device 404 can be a conveyor belt or a conveyor tray. The material conveying device is not specifically limited and can be configured based on the material type, shape, and cleaning requirements. For example, if the material has a certain curvature (spherical, hemispherical, elliptical, etc.), a conveyor tray can be used.

[0069] In one embodiment, the length and width of the conveyor belt are (90 cm, 120 cm) and (60 cm, 80 cm), respectively.

[0070] In one embodiment, the material conveying device 404 is a dust-free conveying device. If the material conveying device 404 is a conveyor belt, it can be a dust-free conveyor belt.

[0071] In one embodiment, the electric control cabinet is hung on the side wall of the lower equipment, and the lines of various electrical components in the equipment cavity connected to the electric control cabinet are run from the outside of the equipment to the inside of the equipment cavity.

[0072] In one embodiment, a snowflake cleaning machine is provided in the control unit in the lower layer of the cleaning unit, such as Figure 4 As shown, a filter 413 is provided on the snow cleaning machine 410, and the filter 413 obtains the propellant gas to generate a dry ice particle airflow.

[0073] In one embodiment, the snowflake cleaning machine 410 may be provided with a propulsion gas inlet, a propulsion gas outlet, a carbon dioxide inlet, a carbon dioxide outlet, a signal output interface, a manual control communication interface, a solenoid valve communication, an electric blanket communication, a pressure relief outlet and a main power interface, etc.

[0074] In one embodiment, the cleaning fixture may be a robotic arm, a three-axis module, a multi-axis module, etc., so that the cleaning fixture can be equipped with a spray gun to flexibly clean the material.

[0075] In one embodiment, multiple cleaning operation data can be set in the electrical control cabinet and the snowflake cleaning machine. The cleaning operation data include a cleaning operation trajectory and cleaning airflow parameters. The electrical control cabinet can control the three-axis module (robotic arm or multi-axis module, etc.) so that the spray gun connected to the three-axis module (robotic arm or multi-axis module, etc.) runs along the cleaning operation trajectory, so that the spray gun sprays dry ice particle airflow to the material based on the cleaning airflow parameters provided by the snowflake cleaning machine to clean the dirt on the surface of the material.

[0076] In one embodiment, the cleaning operation trajectory can be set based on factors such as the volume and shape of the material, as well as the spraying range of the spray gun, to ensure that the spray gun moves and sprays at a certain speed along the cleaning operation trajectory, which can comprehensively and thoroughly clean the material to be cleaned, so as to complete the cleaning efficiently and quickly.

[0077] In one embodiment, the cleaning air flow parameters include: the air flow mixing ratio of the dry ice particle air flow sprayed from the spray gun, the size of the solid particles in the air flow, the air flow temperature, and the air flow rate;

[0078] In one embodiment, Figure 4 In the cleaning equipment, the embodiment of the present application provides a method for obtaining a dry ice particle airflow, comprising:

[0079] Step a, control the air provided by the air supply source (the propulsion gas in the above-mentioned snowflake cleaning machine can enter the snowflake cleaning machine from the propulsion gas inlet and be discharged from the snowflake cleaning machine from the propulsion gas outlet) to enter the mixing zone in the spray gun at the set air pressure, air temperature, and air flow rate, and control the carbon dioxide provided by the carbon dioxide supply source (which can enter the snowflake cleaning machine from the carbon dioxide inlet and be discharged from the snowflake cleaning machine from the carbon dioxide outlet) to enter the mixing zone in the spray gun at the set carbon dioxide pressure, carbon dioxide temperature, and carbon dioxide flow rate. The mixing zone is a sealed cavity formed by the sequential connection between the first nozzle, the second nozzle and the nozzle in the spray gun, which is used to form a dry ice particle airflow.

[0080] Step b: spraying the obtained dry ice particle airflow to the material through the mixing zone, which meets the airflow mixing ratio, airflow solid particle size, airflow temperature and airflow flow rate.

[0081] In one embodiment, the above-mentioned method for obtaining dry ice particle airflow adopts the technical solution of the patent application with application number: 202211081519.8; Invention Name: A Carbon Dioxide State Control System and Method. Accordingly, the cleaning equipment of this application can also adopt the spray gun structure therein.

[0082] In one embodiment, Figure 9 As shown, a schematic diagram of a device for obtaining a dry ice particle airflow provided by an embodiment of the present application is provided. The device (which can also be regarded as a snowflake cleaning machine-pipeline-spray gun) includes a carbon dioxide phase control module 10, a mixing control module 20, a nozzle 30, a carbon dioxide supply source 40, and an air supply source 50. Accordingly, the air provided by the air supply source 50 is controlled to enter the mixing zone in the spray gun-mixing control module 20 at a set air pressure, air temperature, and air flow, and the carbon dioxide provided by the carbon dioxide supply source 40 is controlled to enter the mixing zone in the spray gun-mixing control module 20 at a set carbon dioxide pressure, carbon dioxide temperature, and carbon dioxide flow. Then, a dry ice particle airflow that meets the airflow mixing ratio, airflow solid particle size, airflow temperature, and airflow flow is sprayed toward the material to be cleaned through the nozzle 30. Among them, the carbon dioxide phase control module 10 can be used to accurately control the carbon dioxide pressure, carbon dioxide temperature, and carbon dioxide flow of the carbon dioxide provided by the carbon dioxide supply source 40.

[0083] Based on the above-mentioned method for obtaining a dry ice particle airflow, an embodiment of the present application provides a method for controlling the size of a mixing zone, wherein a movable structure is provided on the side wall where the first nozzle and the second nozzle are in contact with each other; in step b, before the dry ice particle airflow that meets the airflow mixing ratio, airflow solid particle size, airflow temperature and airflow flow rate is sprayed toward the material through the mixing zone, it also includes: by moving the second nozzle, controlling the socket width between the second nozzle and the first nozzle to control the size of the mixing zone.

[0084] In one embodiment, Figure 10 As shown, it is a schematic diagram of a device for obtaining a dry ice particle airflow with a visible spray gun structure in the invention patent with application number: 202211081519.8, including a first nozzle 11 and a second nozzle 21. The first nozzle 11 and the second nozzle 21 are both in the shape of a circular tube. The first nozzle 11 can be moved back and forth and inserted into the tube of the second nozzle 21 to adjust the distance between the outlet of the first nozzle 11 and the nozzle 30, thereby adjusting the distance of the gas-solid mixture flowing in the tube of the second nozzle 21.

[0085] The carbon dioxide phase control module 10 includes a first nozzle 11, a carbon dioxide conduit 12, and a first booster pump 13. The carbon dioxide conduit 12 is connected to a carbon dioxide supply source 40 at one end and to the first nozzle 11 at the other. The first booster pump 13 is mounted on the carbon dioxide conduit 12 and controls the pressure of carbon dioxide ejected from the first nozzle 11. The mixing control module 20 includes a second nozzle 21, one end of which is connected to the first nozzle 11 and the other end to the nozzle 30. A side hole 22 is provided on the side of the second nozzle 21, which connects to the air supply source 50. The distance from the side hole 22 to the nozzle 30 is greater than the distance from the first nozzle 11 to the nozzle 30. The mixing control module 20 also includes an air conduit 24 and a second booster pump 25. The air conduit 24 is connected to the air supply source 50 at one end and to the side hole 22 at the other end. The second booster pump 25 is mounted on the air conduit 24 and controls the pressure of air ejected from the side hole 22. A temperature control device 26 is installed on the air duct 24 between the second booster pump 25 and the side hole 22. This device controls the temperature of the air ejected from the side hole 22. A temperature display 261 is provided on the temperature control device 26, and a temperature adjustment button 262 is located below the display 261. A flow control valve 27 is installed on the air duct 24 between the temperature control device 26 and the side hole 22. This valve controls the flow rate of air ejected from the side hole 22.

[0086] In one embodiment, a first external thread 15 is provided on the side of the first nozzle 11, and a first internal thread 23 is provided on the inner wall of the second nozzle 21. When the first nozzle 11 is inserted into the tube of the second nozzle 21, the first external thread 15 and the first internal thread 23 cooperate to adjust the distance between the outlet of the first nozzle 11 and the nozzle 30. Alternatively, a sealed movable slide structure is provided on the side walls of the first nozzle 11 and the second nozzle 21. The method of sleeve contact between the first nozzle 11 and the second nozzle 21 is not limited and can be configured as needed.

[0087] In one embodiment, the nozzle and the second nozzle are detachably connected;

[0088] In step b, before spraying the obtained dry ice particle airflow that meets the airflow mixing ratio, airflow solid particle size, airflow temperature, and airflow flow rate toward the material through the mixing zone, the method further includes: installing a nozzle on the second nozzle, where the nozzle is selected from a plurality of different types of nozzles based on the cleaning airflow parameters, and the dry ice particle airflow obtained by the different types of nozzles has different residence time and dry ice particle size in the corresponding nozzle.

[0089] In one embodiment, based on the above Figure 10 In the structure, the second nozzle 21 and the nozzle 30 are detachably connected.

[0090] In one embodiment, based on the above Figure 10 In the structure, a second external thread 28 is provided on the side of the second nozzle 21 away from the first nozzle 11, and a second internal thread 31 is provided on the inner wall of the nozzle 30. When the second nozzle 21 and the nozzle 30 are detachably connected, the second external thread 28 and the second internal thread 31 engage. The second nozzle 21 and the nozzle 30 can also be connected using a sealed snap-fit ​​structure. The connection method of the second nozzle 21 and the nozzle 30 is not limited here and can be configured as needed.

[0091] In one embodiment, a dew point meter 401 (not shown in the figure), a particle tester 402 (not shown in the figure), a humidity tester 403 (not shown in the figure), a material conveying device 404, a cleaning fixture 405 and a spray gun 406 are provided in the cleaning chamber, and an electrical control cabinet 409 and a snowflake cleaning machine 410 are provided in the control component 408. The cleaning pipeline of the snowflake cleaning machine 410 is connected to the spray gun 406, and the electrical control cabinet 409 is electrically connected to the dew point meter 401, the particle tester 402, the humidity tester 403 and the fan unit 411 respectively. In this way, the snowflake cleaning machine 410 pushes the dry ice particle airflow into the cleaning pipe to the spray gun 406 for material cleaning. During the cleaning process, the electrical control cabinet 409 uses the dew point meter 401, the particle meter 402, and the humidity meter 403 to obtain the dew point, particle concentration, and humidity in the cleaning chamber 400. Based on the set cleaning environment and the detected dew point, particle concentration, and humidity, the electric control cabinet 409 controls the fan unit 411 (not shown in the figure) to fill the cleaning chamber with a first gas to maintain the particle concentration in the cleaning chamber environment below the preset concentration value and the dew point below the preset dew point value, thereby protecting the material. When the humidity in the cleaning chamber is below the preset humidity range, the second gas is filled into the cleaning chamber to maintain the humidity in the cleaning chamber within the preset humidity range.

[0092] In one embodiment, the electrical control cabinet adjusts the gas flow rates of the first gas and the second gas based on the detected humidity, particulate matter concentration, and dew point. Specifically, based on the detected humidity, particulate matter concentration, and dew point in the cleaning chamber, it is determined whether the humidity does not meet a preset humidity range, the particulate matter concentration is not lower than a preset concentration value, and the dew point is not lower than a preset dew point value. Based on these determinations, the gas flow rates of the first gas and the second gas are adjusted. This specifically involves three situations, of which the first situation is:

[0093] When the detected particle concentration in the cleaning chamber is not lower than the preset concentration value;

[0094] The charging gas flow rate of the second gas is adjusted from V1 to V2, and the charging gas flow rate of the first gas is adjusted from V3 to V4; V2 is greater than V1, V4 is greater than V3, and the ratio between V1 and V3, as well as the ratio between V2 and V4, conform to the set flow ratio, which is set based on the dew point preset value; until the particle concentration in the cleaning chamber is lower than the preset concentration value.

[0095] The dew point of the first gas must be lower than a preset dew point value, which must be less than or equal to the lowest temperature in the cleaning chamber to prevent condensation on the surface of the material. If the dew point of the second gas can be higher than the preset dew point value, when the second gas is added to the cleaning chamber, it is necessary to ensure that the amount of the first and second gases added does not cause the dew point of the cleaning chamber to be greater than or equal to the preset dew point value to prevent condensation on the surface of the material.

[0096] Second case:

[0097] When the humidity detected in the cleaning chamber is lower than the preset humidity range;

[0098] The second gas is adjusted from V2 to V5; V5 is less than or equal to a preset flow threshold of the second gas, which is determined according to a preset dew point value; until the humidity in the cleaning chamber is within a preset humidity range.

[0099] Among them, the second gas can be used to provide moisture to the cleaning chamber, but if the dew point of the second gas is higher than the dew point preset value, it is necessary to set the maximum flow rate - preset flow rate threshold for the second gas according to the dew point preset value to prevent the gas filling flow of the second gas from being too large, resulting in the dew point value in the cleaning chamber being greater than or equal to the lowest temperature in the cleaning chamber, causing condensation on the surface of the material.

[0100] The third case:

[0101] If V5 is equal to the preset flow threshold and the humidity in the cleaning chamber is still lower than the preset humidity range when it lasts for the set time, the second gas is adjusted to V6 and the first gas is adjusted to V7, V6 is greater than the preset flow threshold, V7 is greater than V4, and the ratio between V6 and V7 meets the set flow ratio; until the humidity in the cleaning chamber is within the preset humidity range.

[0102] If the dew point is not lower than the dew point preset value:

[0103] Based on the current gas charging flow rate of the first gas, the flow rate of the first gas is increased to reduce the dew point until the dew point in the cleaning chamber environment is lower than the preset dew point value.

[0104] The above three situations are the changes in particle concentration, humidity and dew point in the cleaning chamber that are generally encountered during the cleaning process. That is, the fall of dirt on the surface of the material leads to an increase in the number of particles in the cleaning chamber, and then it is necessary to increase the gas filling flow rate of the first gas to take away more particle concentration to maintain the particle concentration in the cleaning chamber environment below the preset concentration value. In the process of using the first gas to carry away the particulate matter, the moisture in the equipment cavity may be attached to the particulate matter and be carried away. Therefore, the second gas is started to be filled, or the second gas filling flow rate is increased based on the current gas filling flow rate of the second gas to replenish moisture into the equipment cavity. However, the dew point of the second gas is higher than the dew point preset value. Unlimited increase in the gas filling flow rate of the second gas may cause the dew point to rise above the dew point preset value, resulting in water condensation on the surface of the material to be cleaned. Therefore, it is necessary to set a preset flow threshold and a set time for the second gas. If the second gas is continuously filled into the equipment cavity at a gas filling flow rate of the preset flow threshold for the set time, and the humidity that meets the preset humidity range still cannot be obtained, the first gas and the second gas can be increased proportionally at the same time to fully replace the equipment cavity to obtain a cleaning cavity environment that meets the set cavity environmental conditions.

[0105] It should be noted that a first warning threshold and a second warning threshold may be set. If the first gas exceeds the first warning threshold, or the second gas exceeds the second warning threshold, the integrated cleaning device generates an alarm.

[0106] In one embodiment, Figure 4 As shown, a plurality of reserved wiring ports are provided on the side to lead the cleaning pipe and spray gun wiring of the snowflake cleaning machine of the control component into the cleaning chamber to transmit the dry ice particle airflow; and / or the control spray gun and the wiring of the three-axis module (or the wiring of the robotic arm, multi-axis module, etc.) are led into the cleaning chamber to control the three-axis module (or the robotic arm, multi-axis module, etc.); and / or the wiring of the material conveying device is also led to the cleaning chamber; and / or the exhaust gas recovered by the exhaust gas recovery pipe in the lower control component of the cleaning chamber is transmitted to the air intake pipe of the fan unit through the coiled pipe for filtration and drying for recycling, wherein the exhaust gas recovery pipe can be connected to the exhaust solenoid valve through the reserved wiring port. After the pressure in the pipe exceeds the set pressure threshold, the exhaust solenoid valve opens to release air to ensure constant pressure.

[0107] Based on the above Figure 4 The cleaning equipment in the embodiment of the present application provides a cleaning equipment, and the cleaning chamber also includes an ion fan. The ion fan 412 is arranged on the bottom cavity wall 407. The air outlet range of the ion fan 412 covers a specific cleaning position and is used to remove static electricity on the surface of the material.

[0108] In one embodiment, a power supply may be further provided in the cleaning chamber, and the power supply is connected to the ion blower to supply power to the ion blower.

[0109] In one embodiment, the cleaning environment may also include a preset ion density formed by ion wind. The cleaning equipment includes an ion blower, which is used to blow ion wind toward the material based on the ion wind parameters corresponding to the material information to form a space on the surface of the material that meets the preset ion density. The preset ion density is set based on the material being able to generate no static electricity under certain ion density conditions. By blowing ion wind toward the material, static electricity on the surface of the material is eliminated to prevent the material from being contaminated again after leaving the equipment. In this way, even if some materials are not adapted to a higher humidity environment that can eliminate static electricity, low-humidity ion wind blowing can be used to eliminate static electricity on the surface of the material.

[0110] In one embodiment, Figure 4 The reserved wiring port shown in can also be used to connect the electric control cabinet to the ion blower to provide power for the ion blower.

[0111] Based on the above Figure 4 The cleaning equipment in the embodiment of the present application provides a cleaning equipment with a transition cabin, such as Figure 5 As shown, the cleaning component further includes a first transition chamber 501, which is connected to the cleaning chamber and has a first stop valve 502 provided at the connection position; a first photoelectric sensor 503 (not shown in the figure) is provided in the first transition chamber 501, and a vacuum pump 505 is further provided in the control component 504, a pump pipe 506 of the vacuum pump 505 is connected to the first transition chamber 501, and the first photoelectric sensor 503 and the vacuum pump 505 are electrically connected to the electric control cabinet 507 respectively;

[0112] Among them, when materials are placed in the first transition chamber 501, the first photoelectric sensor 503 detects and obtains material information of the materials, and transmits the material information to the electric control cabinet 507, so that the electric control cabinet 507 controls the first stop valve 502 to close, and controls the vacuum pump 505 to vacuum the first transition chamber 501 through the pump pipe 506. After completion, the first stop valve 502 is controlled to open, and the materials are conveyed to a specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

[0113] In one embodiment, the cleaning chamber may be connected to at least one first transition chamber of different specifications, and first transition chambers of different specifications may receive materials of different specifications.

[0114] In one embodiment, the first stop valve may be a manual stop valve or an electric stop valve. When vacuuming, the first stop valve is closed to keep the first transition chamber in a sealed state.

[0115] In one embodiment, when the first transition chamber is vacuumed, the first gas can also be filled into the first transition chamber to perform gas replacement until the cabin environment of the first transition chamber meets the set transition chamber conditions, and the particulate matter in the set transition chamber conditions meets the preset concentration value and / or the humidity meets the preset humidity range.

[0116] In one embodiment, a pressure gauge in the first transition chamber can be used to detect the pressure within the first transition chamber to determine the gas flow rate during extraction and inflation, and further determine whether the internal chamber environment meets the set transition chamber conditions. Alternatively, a particle counter, humidity meter, etc. can be installed in the first transition chamber to determine whether the internal chamber environment meets the set transition chamber conditions. This ensures that no external gas is introduced into the cleaning chamber, and accordingly, no external contaminants, including dust particles and water vapor, are introduced. The cleaning chamber remains sealed and clean, ensuring cleaning efficiency and effectiveness.

[0117] Based on the above Figure 4 The cleaning equipment in the embodiment of the present application provides another cleaning equipment with a transition cabin, such as Figure 6 As shown, the cleaning component further includes a second transition cabin 601, a manual vacuum valve 602 is provided in the second transition cabin 601, and the transition space of the second transition cabin 601 is smaller than the transition space of the first transition cabin 603; the second transition cabin 601 is connected to the cleaning chamber, and a second stop valve 604 is provided at the connection position; a second photoelectric sensor 605 (not shown in the figure) is provided in the second transition cabin 601, a pump pipe 608 of the vacuum pump 607 in the control component 606 is connected to the second transition cabin 601, and the second photoelectric sensor 605 and the vacuum pump 606 are electrically connected to the electric control cabinet 609;

[0118] When materials are placed in the second transition chamber 601, the second photoelectric sensor 605 detects and obtains material information of the materials, and transmits the material information to the electric control cabinet 609, so that the electric control cabinet 609 controls the second stop valve 604 to close, and manually operates the manual vacuum valve 602 to control the vacuum pump 607 to vacuum the second transition chamber 601 through the pump pipe 608. After completion, the second stop valve 604 is controlled to open, and the materials are conveyed to the specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

[0119] In one embodiment, the second shutoff valve can be a manual shutoff valve. The second transition chamber can be used to place smaller materials, such as small-sized semiconductor devices or even chips. Manual control of the second shutoff valve is more precise, and the airflow stability is better in a smaller space, making manual operation convenient. When vacuuming, the second shutoff valve is closed to seal the second transition chamber.

[0120] In one embodiment, the second stop valve can also be an electric stop valve. Accordingly, the electric stop valve can adopt a small-sized high-precision electric stop valve. Correspondingly, high-precision control logic is set in the electrical control cabinet to ensure that the electric stop valve can be accurately controlled. When vacuuming, the second stop valve is closed to keep the second transition chamber in a sealed state.

[0121] In one embodiment, when the second transition chamber is vacuumed, the first gas can also be filled into the second transition chamber to perform gas replacement until the environment inside the second transition chamber meets the set transition chamber conditions, and the particulate matter in the set transition chamber conditions meets the preset concentration value and / or the humidity meets the preset humidity range.

[0122] In one embodiment, a pressure gauge in the second transition chamber can be used to detect the pressure within the second transition chamber to determine the gas flow rate during extraction and inflation, and further determine whether the internal chamber environment meets the set transition chamber conditions. Alternatively, a particle counter, humidity meter, etc. can be installed in the second transition chamber to determine whether the internal chamber environment meets the set transition chamber conditions. This ensures that no external gas is introduced into the cleaning chamber, and accordingly, no external contaminants, including dust particles and water vapor, are introduced. The cleaning chamber remains sealed and clean, ensuring cleaning efficiency and effectiveness.

[0123] Based on the above Figure 1-6 The embodiment of the present application provides a fan unit, which includes an air intake duct, a filter and a dryer, and the filter and the dryer are sequentially arranged in the air intake duct along the air intake direction;

[0124] The first gas passes through the filter and the dryer in sequence and enters the cleaning chamber, and the second gas passes through the filter and enters the cleaning chamber, thereby constructing and maintaining a set cleaning environment.

[0125] In one embodiment, the filter and the dryer are sequentially arranged in the air intake duct along the air intake direction. The filter can filter particles with a certain humidity and prevent particles with moisture from entering the dryer, consuming more dryer power, thereby reducing the energy consumption of the fan unit.

[0126] Based on the above Figure 1-6 The embodiment of the present application provides a fan unit, such as Figure 7 As shown, the fan unit is provided with an emergency exhaust valve 701 and a fan differential pressure gauge 702;

[0127] The fan differential pressure gauge 702 is used to detect the internal pressure of the fan unit; the emergency exhaust valve 701 is used to perform exhaust processing when the equipment is powered off urgently, causing the pressure in the fan unit to exceed the set pressure of the fan unit.

[0128] In one embodiment, if the fan unit is powered off in an emergency and the pressure solenoid valve of the hole on the bottom cavity wall has not yet completed the exhaust in this cycle, the pressure inside the cleaning chamber will exceed the preset pressure. At this time, it is necessary to manually determine whether to use the emergency exhaust valve 701 to exhaust based on the pressure detected by the fan differential pressure gauge 702. If necessary, exhaust is achieved by twisting the emergency exhaust valve 701 to achieve a pressure balance state.

[0129] In one embodiment, Figure 7 As shown, the fan unit may also be provided with a humidity tester 703 for detecting the humidity of the air flow in the fan unit.

[0130] In one embodiment, Figure 7 As shown, a reserved wiring port 704 may be further provided in the fan unit, and the reserved wiring port may be used to connect functional modules when the fan unit needs to be provided with modules with more functions.

[0131] Based on the above Figure 1-6 The present application embodiment provides a structural diagram of a cleaning component of a cleaning device, such as Figure 8 As shown, there is a transparent area 801 on the side wall of the cleaning chamber, and the transparent area 801 is provided with at least one opening 802, which is sealed and connected to the opening of the glove 803; the opening 802 and the corresponding glove 803 are used by the staff to operate the material.

[0132] It should be noted that the cleaning equipment and related embodiments illustrated in this application are only used to illustrate this cleaning solution. Changes in the shape of each component, the number of components, the addition or removal of components related to conventional functions, etc. should all be within the scope of the claims of this application and their equivalents. Obviously, those skilled in the art can make various changes and modifications to this application without departing from the spirit and scope of this application. Therefore, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application also intends to include these modifications and variations.

Claims

1. A cleaning device, characterized in that: The cleaning device includes a control component, a cleaning component, and a fan unit arranged in sequence from the side close to the ground to the side far from the ground, and the control component is electrically connected to the cleaning component and the fan unit respectively, including: The control component is configured to, upon detecting that the cleaning component contains material, obtain material information of the material, obtain a corresponding set cleaning environment based on the material information, and control the fan unit to construct the set cleaning environment in a cleaning chamber of the cleaning component, wherein the cleaning chamber is configured to accommodate the material, and the set cleaning environment includes a preset humidity range, a preset concentration value of particulate matter, and a preset dew point value; The fan unit is used to fill the cleaning chamber of the cleaning component with a first gas and a second gas to create the set cleaning environment, and to maintain the set cleaning environment under the control of the control component during the cleaning process, wherein the first gas is used to protect the material, and the second gas is used to adjust the humidity inside the cleaning chamber; The cleaning component is used to clean the material until it meets the cleanliness standard of the material.

2. The device as claimed in claim 1, characterized in that The bottom wall of the cleaning chamber close to the ground is provided with holes, the control component is provided with a gas collection device docking with the bottom wall, the gas collection device is sealed with an exhaust gas recovery pipe, the exhaust gas recovery pipe is connected to the pipe port of the air intake pipe in the fan unit away from the ground side, the pipe port of the air intake pipe close to the ground side is connected to the top wall of the cleaning chamber away from the ground side, the exhaust gas recovery pipe is provided with an exhaust solenoid valve for adjusting the internal air pressure of the exhaust gas recovery pipe, and the fan unit is provided with a gas separation device; Among them, the mixed gas formed by the first gas, the second gas and the particles of dirt falling off the material in the cleaning chamber enters the gas collection device from the hole, and enters the air intake pipe through the exhaust gas recovery pipe, so that the fan unit filters and dries the mixed gas, and uses the gas separation device to separate the first gas from the treated mixed gas.

3. The device as claimed in claim 2, characterized in that The first gas is nitrogen, and the gas separation device is a nitrogen separation device; the gas collection device includes a first pair of interfaces and a second pair of interfaces, the first pair of interfaces is connected to the bottom cavity wall, and the second pair of interfaces is connected to the exhaust gas recovery pipe, the gas collection device guides the mixed gas collected by the first pair of interfaces to the second pair of interfaces, and the diameter of the gas collection device gradually decreases along the airflow direction.

4. The device as claimed in claim 1, characterized in that The cleaning chamber is provided with a dew point meter, a particle meter, a humidity meter, a material conveying device, a cleaning fixture and a spray gun. The material conveying device and the cleaning fixture are arranged on the bottom cavity wall of the cleaning chamber close to the ground side, and the cleaning fixture is provided with a spray gun on the end away from the ground; the control component is provided with an electric control cabinet and a snowflake cleaning machine, the cleaning pipeline of the snowflake cleaning machine is connected to the spray gun, and the electric control cabinet is electrically connected to the dew point meter, the particle meter, the humidity meter and the fan unit respectively; In which, the electric control cabinet obtains the dew point, particle concentration and humidity in the cleaning chamber through the dew point meter, the particle tester and the humidity tester, and controls the fan unit to adjust the gas filling rate of the first gas and the second gas based on the set cleaning environment and the dew point, the particle concentration and the humidity, so as to adjust one or more of the dew point, particle concentration and humidity in the cleaning chamber, construct or maintain the set cleaning environment in the cleaning chamber, and when the material conveying device conveys the material to a specific cleaning position, the dry ice particle airflow produced by the snowflake cleaning machine passes through the cleaning pipe to the spray gun, and the spray gun, clamped by the cleaning fixture, sprays the dry ice particle airflow to clean the material.

5. The device as claimed in claim 4, characterized in that The cleaning chamber further includes an ion blower, which is arranged on the bottom chamber wall. The air outlet range of the ion blower covers the specific cleaning position and is used to remove static electricity on the surface of the material.

6. The device as claimed in claim 4, characterized in that The cleaning component further includes a first transition chamber, which is connected to the cleaning chamber and has a first shut-off valve provided at the connection position; a first photoelectric sensor is provided in the first transition chamber, and the control component is further provided with a vacuum pump, a pump pipeline of the vacuum pump is connected to the first transition chamber, and the first photoelectric sensor and the vacuum pump are electrically connected to the electric control cabinet respectively; When the material is placed in the first transition chamber, the first photoelectric sensor detects and obtains the material information of the material, and transmits the material information to the electric control cabinet, so that the electric control cabinet controls the first stop valve to be closed, and controls the vacuum pump to vacuum the first transition chamber through the pump pipeline. After completion, the first stop valve is controlled to open, and the material is conveyed to the specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

7. The device as claimed in claim 4, characterized in that The cleaning component further includes a second transition chamber, in which a manual vacuum valve is provided, and the transition space of the second transition chamber is smaller than the transition space of the first transition chamber; the second transition chamber is connected to the cleaning chamber, and a second stop valve is provided at the connection position; a second photoelectric sensor is provided in the second transition chamber, and a pump pipeline of the vacuum pump in the control component is connected to the second transition chamber, and the second photoelectric sensor and the vacuum pump are electrically connected to the electric control cabinet; When the material is placed in the second transition chamber, the second photoelectric sensor detects and obtains the material information of the material, and transmits the material information to the electric control cabinet, so that the electric control cabinet controls the second shut-off valve to be closed, and manually operates the manual vacuum valve to control the vacuum pump to vacuum the second transition chamber through the pump pipeline. After completion, the second shut-off valve is controlled to open, and the material is conveyed to the specific cleaning position in the cleaning chamber for cleaning through the material conveying device.

8. The device according to any one of claims 1 to 7, characterized in that The fan unit comprises an air intake duct, a filter and a dryer, wherein the filter and the dryer are sequentially arranged in the air intake duct along the air intake direction; The first gas passes through the filter and the dryer in sequence and enters the cleaning chamber, and the second gas passes through the filter and enters the cleaning chamber, thereby constructing and maintaining the set cleaning environment.

9. The device according to any one of claims 1 to 7, characterized in that The fan unit is provided with an emergency exhaust valve and a fan differential pressure gauge; The fan differential pressure gauge is used to detect the internal pressure of the fan unit; the emergency exhaust valve is used to perform exhaust processing when the equipment is urgently powered off, causing the pressure in the fan unit to exceed the set pressure of the fan unit.

10. The device according to any one of claims 1 to 7, characterized in that There is a transparent area on the side wall of the cleaning chamber, and the transparent area is provided with at least one opening, and the opening is sealedly connected to the opening of the glove; the opening and the corresponding gloves are used for workers to operate materials.

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