Inverted air floating motion platform

Abstract

The invention relates to an upside-down air floating motion platform which comprises a base, a first moving mechanism capable of moving in the front-back direction is movably connected to the base, and a second moving mechanism capable of moving in the left-right direction is movably connected to the first moving mechanism. The product can be hung upside down through the first moving mechanism moving front and back and the second moving mechanism moving left and right, so that the moving accuracy is improved. Accurate movement is achieved, and working efficiency is remarkably improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to an inverted air-floating motion platform. Background Art

[0002] An air flotation platform is a gas-based suspension system whose core operating principle is based on the dynamic and static pressure effects of gas. By injecting compressed air onto a flat surface, the flow of gas and the formation of bubbles generate buoyancy, which supports the suspended object and forms a gas suspension layer. This technical feature gives the air flotation platform significant advantages, including high precision, high stability, and zero friction and vibration.

[0003] Air flotation platform technology has a wide range of applications, including but not limited to semiconductor manufacturing, optical processing, robotics research and development, flight simulation, and liquid levitation. As these fields continue to develop, the demand for air flotation platforms is also increasing. In semiconductor manufacturing, in particular, air flotation platforms have become an indispensable component of chip production lines, ensuring that wafer surfaces maintain extremely high flatness and precision during micron and even nanometer-level processing.

[0004] In the field of MicroLED display, mass transfer equipment needs to use laser to transfer the chip on the upper platform to the substrate on the lower platform. This requires the upper platform to be inverted, but the existing inverted platforms are all mechanical guide rail platforms, which have lower precision than the lower air-floating motion platform. There is a problem that the chip on the upper platform cannot be accurately transferred to the substrate on the lower motion platform, and there is no inverted air-floating platform on the market.

[0005] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a new type of inverted air floating sports platform with greater industrial utilization value. Summary of the Invention

[0006] In order to solve the above technical problems, the purpose of the present invention is to provide an inverted air-floating motion platform.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] An inverted air-floating motion platform comprises a base, a first moving mechanism for providing forward and backward movement being movably connected to the base, and a second moving mechanism for providing leftward and rightward movement being movably connected to the first moving mechanism;

[0009] The first moving mechanism includes a first guide block and a second guide block respectively connected to the left and right sides of the base, a first groove and a second groove are respectively opened on the first guide block and the second guide block, a first drive motor and a second drive motor are respectively connected in the first groove and the second groove, a first air-floating support assembly and a second air-floating support assembly of the same structure are respectively slidably connected to the first guide block and the second guide block, the first air-floating support assembly and the second air-floating support assembly are respectively connected to the first drive motor and the second drive motor, a moving beam that moves synchronously with the first air-floating support assembly and the second air-floating support assembly is connected between the first air-floating support assembly and the second air-floating support assembly, and the second moving mechanism is movably connected to the moving beam;

[0010] The second moving mechanism includes a third air-floating support assembly and a fourth air-floating support assembly of the same structure, a third groove and a fourth groove are respectively provided at the front end and the rear end of the moving beam, a third drive motor and a fourth drive motor are respectively connected to the third groove and the fourth groove, the third drive motor and the fourth drive motor are respectively connected to the third air-floating support assembly and the fourth air-floating support assembly, and the third air-floating support assembly and the fourth air-floating support assembly slide at the front end and the rear end of the moving beam, respectively, and a load connecting plate is connected between the third air-floating support assembly and the fourth air-floating support assembly.

[0011] Preferably, in the inverted air-floating motion platform, the first air-floating support assembly includes a first air-floating slider, a second air-floating slider and a first air-floating bearing block, the first air-floating slider and the second air-floating slider are connected through the first air-floating bearing block, and the three of them constitute a concave structure, wherein the first air-floating slider and the second air-floating slider are symmetrically arranged on the left and right sides of the first guide block, and the first air-floating bearing block is connected to the mover of the first drive motor.

[0012] Preferably, in the inverted air-floating motion platform, the motion beam is connected to the first air-floating bearing block via a platform connecting block.

[0013] Preferably, in the inverted air-floating motion platform, the first air-floating slider and the second air-floating slider are positive-pressure air-floating sliders.

[0014] Preferably, in the inverted air-floating motion platform, the first air-floating bearing block is a vacuum pre-loaded air-floating bearing slider.

[0015] Preferably, in the inverted air-floating motion platform, the first guide block and the second guide block are both connected with a first grating ruler for cooperating with the respective air-floating support components.

[0016] Preferably, in the inverted air-floating motion platform, the third air-floating support assembly includes a third air-floating slider, a fourth air-floating slider and a second air-floating bearing block, the third air-floating slider and the fourth air-floating slider are connected through the second air-floating bearing block and the three of them form a concave structure, wherein the third air-floating slider and the fourth air-floating slider are symmetrically arranged on the left and right sides of the front guide block of the moving beam, and the third air-floating slider is connected to the mover of the second drive motor.

[0017] Preferably, in the inverted air-floating motion platform, the third air-floating slider and the fourth air-floating slider are positive-pressure air-floating sliders, and the second air-floating bearing block is a vacuum preloaded air-floating bearing slider.

[0018] Preferably, in the inverted air-floating motion platform, the motion crossbeam is connected to a second grating ruler for cooperating with the air-floating support assembly.

[0019] Preferably, in the inverted air-floating motion platform, the motion beam is a hollow structure.

[0020] By means of the above solution, the present invention has at least the following advantages:

[0021] The present invention can achieve product inversion through the first moving mechanism that moves forward and backward and the second moving mechanism that moves left and right, thereby improving the accuracy of movement, achieving accurate movement, and significantly improving work efficiency.

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is a structural schematic diagram of the present invention;

[0025] Figure 2 yes Figure 1 Schematic diagram of the structure from the other side perspective. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0028] like Figure 1 and Figure 2 As shown, an inverted air-floating motion platform includes a base 10, a first moving mechanism 20 for providing forward and backward movement is movably connected to the base 10, and a second moving mechanism 30 for providing left and right movement is movably connected to the first moving mechanism 20;

[0029] Wherein, the first moving mechanism 20 includes a first guide block 201 and a second guide block 202 respectively connected to the left and right sides of the base 10, and a first groove and a second groove are respectively provided on the first guide block 201 and the second guide block 202, and a first drive motor 203 and a second drive motor 204 are respectively connected in the first groove and the second groove, and a first air-floating support assembly and a second air-floating support assembly of the same structure are respectively slidably connected to the first guide block 201 and the second guide block 202, and the first air-floating support assembly and the second air-floating support assembly are respectively connected to the first drive motor 203 and the second drive motor 204, and a moving beam 205 that moves synchronously with the first air-floating support assembly and the second air-floating support assembly is connected between the first air-floating support assembly and the second air-floating support assembly, and the second moving mechanism 30 is movably connected to the moving beam 205;

[0030] In the present invention, the first air-floating support assembly includes a first air-floating slider 206, a second air-floating slider 207 and a first air-floating bearing block 208. The first air-floating slider 206 and the second air-floating slider 207 are connected through the first air-floating bearing block 208, and the three of them constitute a concave structure, wherein the first air-floating slider 206 and the second air-floating slider 207 are symmetrically arranged on the left and right sides of the first guide block 201, and the first air-floating bearing block 208 is connected to the mover of the first drive motor.

[0031] The first air-floating slider 206 and the second air-floating slider 207 are both positive-pressure air-floating sliders. The principle is that positive-pressure compressed air is connected and supplied through a throttle hole, and the air-floating blocks generate a static pressure flotation effect to float.

[0032] The first air-floating bearing block 208 is a vacuum-preloaded air-floating bearing block. Its principle is to simultaneously feed positive compressed air and negative pressure. The positive pressure is supplied through a throttle, while the negative pressure passes through the vacuum chamber, generating a negative preload force. This static pressure effect causes the air-floating block to levitate. The negative preload force, acting in opposition to the positive pressure, creates an air film with a thickness of h (several microns to over ten microns) that lifts the bearing block.

[0033] The first guide block and the second guide block are arranged at the left and right ends of the base and are installed in parallel at the same height. The stator of the first drive motor is embedded in the first groove of the first guide block. The rotor of the first drive motor is connected to the first air-floating bearing block. The first air-floating bearing block is placed on the upper surface of the first guide block and can slide on its surface. The first air-floating slider and the second air-floating slider are connected through the first air-floating bearing block. The first air-floating slider and the second air-floating slider are symmetrically arranged on the left and right sides of the first guide block. Due to the top-to-top arrangement of the positive pressure air film, a high-rigidity static pressure air film can be formed. Similarly, the second drive motor and the second air-floating support assembly are installed and placed in the same way as described above and will not be repeated.

[0034] The moving beam 205 is connected to the first air bearing block 208 via a platform connecting block 209. The moving beam is positioned above the platform connecting block. A first grating scale 210 is mounted to the side of the first guide block, aligned with the direction of motion. The moving beam is arranged horizontally and orthogonally to the first and second guide blocks. Adjusting the moving beam allows for adjusting the orthogonality of the first and second moving mechanisms.

[0035] The second moving mechanism 30 includes a third air-floating support assembly and a fourth air-floating support assembly of the same structure. The front end and the rear end of the moving beam 205 are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected to a third drive motor 301 and a fourth drive motor 302. The third drive motor 301 and the fourth drive motor 302 are respectively connected to the third air-floating support assembly and the fourth air-floating support assembly. At the same time, the third air-floating support assembly and the fourth air-floating support assembly slide on the front end and the rear end of the moving beam 205 respectively. A load connecting plate 303 is connected between the third air-floating support assembly and the fourth air-floating support assembly.

[0036] Among them, the third air-floating support assembly includes a third air-floating slider 304, a fourth air-floating slider 305 and a second air-floating bearing block 306. The third air-floating slider 304 and the fourth air-floating slider 305 are connected through the second air-floating bearing block 306 and the three of them form a concave structure. The third air-floating slider 304 and the fourth air-floating slider 305 are symmetrically arranged on the left and right sides of the front guide block of the moving beam, and the third air-floating slider 304 is connected to the mover of the second drive motor.

[0037] The third air-floating slider 304 and the fourth air-floating slider 305 are both positive-pressure air-floating sliders. The principle is that positive-pressure air is connected and air is supplied through a throttle hole, and the air-floating blocks generate a static pressure flotation effect to float.

[0038] The second air-floating bearing block 306 is a vacuum-preloaded air-floating bearing block. It operates by simultaneously supplying positive compressed air and negative pressure. The positive pressure is supplied through a throttle, while the negative pressure creates a negative preload force in the vacuum chamber. This static pressure effect causes the bearing block to float. The negative preload force, acting in opposition to the positive pressure, creates an air film of thickness h, which lifts the bearing block.

[0039] The moving crossbeam has a hollow structure. The stator of the third drive motor is embedded in the third groove of the front guide block of the moving crossbeam. The mover of the third drive motor is connected to the third air-bearing slider 304. The second air-bearing bearing block is placed on the upper surface of the rear end guide block of the moving crossbeam and can slide on this surface. The third air-bearing slider and the fourth air-bearing slider are connected via the second air-bearing bearing block. The third and fourth air-bearing sliders are symmetrically arranged on either side of the front end guide block of the moving crossbeam. Due to the top-to-top arrangement of the positive pressure air films, a high-rigidity static pressure air film is formed. Similarly, the connection structure between the rear end guide block of the moving crossbeam, the fourth drive motor, and the fourth air-bearing support assembly is the same as that of the third drive motor and the third air-bearing support assembly described above and will not be repeated here.

[0040] The second grating ruler is installed under the guide block at the rear end of the moving beam and is flush with the moving direction. The fourth grating ruler is installed under the guide block at the front end of the moving beam and is flush with the moving direction.

[0041] The load connecting plate 303 is placed below the moving beam, with a gap between the load connecting plate 303 and the guide block of the moving beam. The load is fixed upside down to the load connecting plate 303.

[0042] The driving motor used in the present invention is a motor known in the art, and its model is Parker: 410-4M-LC-WD3S-8.

[0043] The working principle of the present invention is as follows:

[0044] During specific operation, the load is hung upside down on the load connecting plate, and the load is moved by the first moving mechanism and the second moving mechanism. The first moving mechanism and the second moving mechanism control the drive motor through the control device (PLC), thereby achieving accurate movement.

[0045] The present invention can achieve product inversion through the first moving mechanism that moves forward and backward and the second moving mechanism that moves left and right, thereby improving the accuracy of movement, achieving accurate movement, and significantly improving work efficiency.

[0046] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0047] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended solely to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0048] In addition, the terms "horizontal" and "vertical" do not mean that the components must be absolutely horizontal or vertical, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0049] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0050] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. Inverted air-floating motion platform, characterized by: The invention comprises a base (10), wherein a first moving mechanism (20) for providing front-back movement is movably connected to the base (10), and a second moving mechanism (30) for providing left-right movement is movably connected to the first moving mechanism (20); The first moving mechanism (20) comprises a first guide block (201) and a second guide block (202) respectively connected to the left and right sides of the base (10); a first groove and a second groove are respectively provided on the first guide block (201) and the second guide block (202); a first drive motor (203) and a second drive motor (204) are respectively connected in the first groove and the second groove; a first air-floating support assembly and a second air-floating support assembly of the same structure are respectively slidably connected on the first guide block (201) and the second guide block (202); the first air-floating support assembly and the second air-floating support assembly are respectively connected to the first drive motor (203) and the second drive motor (204); a moving crossbeam (205) that moves synchronously with the first and second air-floating support assemblies is connected between the first and second air-floating support assemblies; and the second moving mechanism (30) is movably connected to the moving crossbeam (205); The second moving mechanism (30) includes a third air-floating support assembly and a fourth air-floating support assembly of the same structure. The front end and the rear end of the moving beam (205) are respectively provided with a third groove and a fourth groove. The third groove and the fourth groove are respectively connected with a third drive motor (301) and a fourth drive motor (302). The third drive motor (301) and the fourth drive motor (302) are respectively connected to the third air-floating support assembly and the fourth air-floating support assembly. At the same time, the third air-floating support assembly and the fourth air-floating support assembly slide on the front end and the rear end of the moving beam (205). A load connecting plate (303) is connected between the third air-floating support assembly and the fourth air-floating support assembly.

2. The inverted air-floating sports platform according to claim 1, characterized in that: The first air-floating support assembly comprises a first air-floating slider (206), a second air-floating slider (207) and a first air-floating bearing block (208); the first air-floating slider (206) and the second air-floating slider (207) are connected via the first air-floating bearing block (208); the three of them form a concave structure; the first air-floating slider (206) and the second air-floating slider (207) are symmetrically arranged on the left and right sides of the first guide block (201); and the first air-floating bearing block (208) is connected to the mover of the first drive motor.

3. The inverted air-floating motion platform according to claim 1, characterized in that: The moving crossbeam (205) is connected to the first air-floating bearing block (208) via a platform connecting block (209).

4. The inverted air-floating motion platform according to claim 2, characterized in that: The first air-floating slider (206) and the second air-floating slider (207) are positive-pressure air-floating sliders.

5. The inverted air-floating motion platform according to claim 2, characterized in that: The first air-floating bearing block (208) is a vacuum pre-pressed air-floating bearing slider.

6. The inverted air-floating sports platform according to claim 1, characterized in that: The first guide block (201) and the second guide block (202) are both connected to a first grating scale (210) for cooperating with their respective air-floating support assemblies.

7. The inverted air-floating sports platform according to claim 1, characterized in that: The third air-floating support assembly comprises a third air-floating slider (304), a fourth air-floating slider (305) and a second air-floating bearing block (306); the third air-floating slider (304) and the fourth air-floating slider (305) are connected via the second air-floating bearing block (306) and the three of them form a concave structure; wherein the third air-floating slider (304) and the fourth air-floating slider (305) are symmetrically arranged on the left and right sides of the front guide block of the moving crossbeam; and the third air-floating slider (304) is connected to the mover of the second drive motor.

8. The inverted air-floating sports platform according to claim 1, characterized in that: The third air-floating slider (304) and the fourth air-floating slider (305) are positive-pressure air-floating sliders, and the second air-floating bearing block (306) is a vacuum pre-loaded air-floating bearing slider.

9. The inverted air-floating sports platform according to claim 1, characterized in that: The moving crossbeam (205) is connected to a second grating ruler (307) for cooperating with the air-floating support assembly.

10. The inverted air-floating sports platform according to claim 1, characterized in that: The moving crossbeam is a hollow structure.

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