Connecting piece

Abstract

The invention discloses a connecting piece which comprises an upper pressing piece, a lower pressing piece and a buffering piece. A cavity is defined by the upper pressing piece and the lower pressing piece. The upper pressing piece can move along with the surface of the second workpiece; the pressing piece is fixedly connected with the first workpiece; the buffer piece is located in the cavity, the size of the buffer piece enables the upper pressing piece not to make contact with the lower pressing piece, and when the second workpiece moves relative to the surface of the first workpiece, the space of the cavity is correspondingly changed.

Description

Technical Field

[0001] The present invention relates to a connecting piece, in particular to a connecting piece connecting two workpieces with different deformation amounts. Background Art

[0002] Connectors are key components used to connect components in fields like machinery and semiconductor equipment. They ensure the secure connection between components, transmit force and motion, and play a core role in device assembly and structural construction. Their performance directly impacts overall stability.

[0003] When connecting two workpieces with different expansion coefficients, such as connecting aluminum and ceramic parts, friction and stress concentration are easily caused due to the expansion of the parts during the heating process. In addition, the expansion amount of the aluminum and ceramic parts at the contact point is different, which can easily cause the ceramic parts to break. Summary of the Invention

[0004] In order to solve the problems of the prior art, the present invention provides a connecting piece for connecting a first workpiece and a second workpiece, wherein the thermal expansion coefficient of the second workpiece is greater than the thermal expansion coefficient of the first workpiece.

[0005] In one embodiment, the first workpiece is a fixing member and the second workpiece is an expansion member.

[0006] In one embodiment, the first workpiece is a ceramic workpiece, and the second workpiece is a metal workpiece, such as an aluminum workpiece.

[0007] In one application scenario, the connector of the present invention can be used in a heating plate of a semiconductor device.

[0008] The connecting piece of the present invention comprises an upper pressing piece, a lower pressing piece and a buffer piece.

[0009] The upper pressing piece and the lower pressing piece form a cavity.

[0010] The upper pressing member can move together with the second workpiece.

[0011] In one embodiment, when the second workpiece is heated and expands horizontally, the upper surface of the upper pressing member moves horizontally along with the expansion of the second workpiece.

[0012] The pressing member is fixedly connected to the first workpiece.

[0013] The buffer is located in the cavity. The size of the buffer ensures that the upper pressing member and the lower pressing member do not contact each other, and when the second workpiece moves relative to the surface of the first workpiece, the space of the cavity changes accordingly.

[0014] In one embodiment, the upper pressing member has a horizontal portion and a vertical portion, and the horizontal portion is fixedly connected to the vertical portion at 90 degrees; the lower pressing member has a horizontal portion and a vertical portion, and the horizontal portion is fixedly connected to the vertical portion at 90 degrees.

[0015] In one embodiment, the distance between the uppermost end and the lowermost end of the buffer member is such that a first gap is formed between the vertical portion of the upper pressing member and the horizontal portion of the lower pressing member.

[0016] In one embodiment, the distance between the leftmost end and the rightmost end of the buffer member is such that a second gap is formed between the horizontal portion of the upper pressing member and the vertical portion of the lower pressing member.

[0017] In one embodiment, when the second component expands due to heat so that the horizontal deformation of the second component is greater than that of the first component, the second gap changes accordingly.

[0018] In one embodiment, the buffer member is a steel ball.

[0019] In one embodiment, a through hole is provided in the middle of the vertical portion of the pressing member, and a side wall of the through hole is threaded. A bolt is threadedly connected to the connecting member through the through hole to connect the first workpiece and the second workpiece.

[0020] In one embodiment, the pressing member of the connecting member is a bolt, wherein the vertical portion of the pressing member is the screw rod of the bolt, and the horizontal portion of the pressing member is the screw head of the bolt.

[0021] In one embodiment, the connector is located within the first workpiece.

[0022] In one embodiment, the connecting member is located outside the second workpiece.

[0023] The connector of the present invention has the following beneficial technical effects:

[0024] First, the upper pressure block of the connector can move synchronously with the expansion member, so that there will be no significant friction and stress concentration between the upper pressure block and the expansion member. In particular, it can prevent the fixing member from breaking due to the different expansion amounts of the expansion member (such as aluminum) and the fixing member (such as ceramic) at the contact point.

[0025] Secondly, the connecting piece can be used to connect the fixing piece and the expansion piece on one side, and can also be used for the internal connection between the fixing piece and the expansion piece, which is easy to implement and prevents the occurrence of friction. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The above summary of the invention and the following detailed description of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the drawings are only examples of the invention claimed. In the drawings, the same reference numerals represent the same or similar elements.

[0027] Figure 1 A schematic diagram of a connecting member according to an embodiment of the present invention is shown;

[0028] Figure 2 A schematic diagram showing a connecting member according to an embodiment of the present invention before heating;

[0029] Figure 3 A schematic diagram showing a connecting member after heating according to an embodiment of the present invention;

[0030] Figure 4 A schematic diagram of a connecting member according to an embodiment of the present invention is shown;

[0031] Figure 5 A schematic diagram of a connecting member according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0032] The detailed features and advantages of the present invention are described in detail below in the specific embodiments. The content is sufficient for any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and based on the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide an in-depth understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0033] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0034] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood to refer to the orientations depicted in that section and the accompanying drawings. These relative terms are used solely for convenience of description and do not necessarily imply that the devices described herein must be manufactured or operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0035] It is understood that although the terms "first," "second," "third," etc. may be used herein to describe various components, channels, assemblies, regions, layers, and / or portions, these components, channels, assemblies, regions, layers, and / or portions should not be limited by these terms, and these terms are merely used to distinguish different components, channels, assemblies, regions, layers, and / or portions. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0036] As used in this application and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not intended to refer to the singular but may include the plural. Generally speaking, the terms "comprises" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0037] In some embodiments, numbers are used to describe the quantity of components and attributes. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise stated, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the description and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the settings of such numerical values ​​are as accurate as possible within the feasible range.

[0038] At the same time, this application uses specific terms to describe the embodiments of this application. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "one embodiment," "an embodiment," or "an alternative embodiment" mentioned twice or multiple times in different locations in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application may be appropriately combined.

[0039] The present invention provides a connecting piece for connecting a first workpiece and a second workpiece, wherein the deformation of the second workpiece is greater than that of the first workpiece, that is, the thermal expansion coefficient of the second workpiece is greater than that of the first workpiece.

[0040] In one embodiment, the first workpiece is a fixing member and the second workpiece is an expansion member.

[0041] In one embodiment, the first workpiece is a ceramic workpiece, and the second workpiece is a metal workpiece, such as an aluminum workpiece.

[0042] In one application scenario, the connector of the present invention can be used in a heating plate of a semiconductor device.

[0043] The connecting piece of the present invention comprises an upper pressing piece, a lower pressing piece and a buffer piece.

[0044] The upper pressing piece and the lower pressing piece form a cavity.

[0045] The upper pressing member can move together with the second workpiece.

[0046] In one embodiment, when the second workpiece is heated and expands horizontally, the upper surface of the upper pressing member moves horizontally along with the expansion of the second workpiece.

[0047] The pressing member is fixedly connected to the first workpiece.

[0048] The buffer is located in the cavity. The size of the buffer ensures that the upper pressing member and the lower pressing member do not contact each other, and when the second workpiece moves relative to the surface of the first workpiece, the space of the cavity changes accordingly.

[0049] In one embodiment, the upper pressing member has a horizontal portion and a vertical portion, and the horizontal portion is fixedly connected to the vertical portion at 90 degrees; the lower pressing member has a horizontal portion and a vertical portion, and the horizontal portion is fixedly connected to the vertical portion at 90 degrees.

[0050] In one embodiment, the distance between the uppermost end and the lowermost end of the buffer member is such that a first gap is formed between the vertical portion of the upper pressing member and the horizontal portion of the lower pressing member.

[0051] In one embodiment, the distance between the leftmost end and the rightmost end of the buffer member is such that a second gap is formed between the horizontal portion of the upper pressing member and the vertical portion of the lower pressing member.

[0052] In one embodiment, when the second component expands due to heat so that the horizontal deformation of the second component is greater than that of the first component, the second gap changes accordingly.

[0053] Figure 1FIG. 1 is a schematic diagram of a connector according to an embodiment of the present invention. The connector is used to connect a first workpiece 105 and a second workpiece 106. Figure 1 In the embodiment of FIG. 1 , the connecting member is located inside the first workpiece 105 .

[0054] In one embodiment, the first workpiece 105 and the second workpiece have different amounts of deformation or different expansion coefficients when heated.

[0055] In one embodiment, the first workpiece 105 is a fixed part, and the second workpiece 106 is an expansion part.

[0056] The connecting member includes an upper pressing member 101 , a lower pressing member 102 , and a buffer member 104 .

[0057] The upper pressing member 101 and the lower pressing member 102 form a cavity, and the cross section of the cavity is substantially rectangular.

[0058] The cross-section of the upper pressing member 101 is in an inverted L-shape.

[0059] The upper pressing member 101 has a horizontal portion and a vertical portion, which are fixedly connected at 90 degrees.

[0060] The upper surface of the horizontal portion of the upper hold-down member 101 is in contact with the lower surface of the second workpiece (expansion member) 106 .

[0061] The upper surface of the horizontal portion of the upper pressing member 101 can move along with the lower surface of the second workpiece (expansion member) 106 , so that no large friction or stress concentration occurs between the upper pressing member 101 and the second workpiece (expansion member) 106 .

[0062] The pressing member 102 has a horizontal portion and a vertical portion, which are fixedly connected at a 90-degree angle.

[0063] The center of the vertical portion of the pressing member 102 has a through hole 103. The wall of the through hole 103 has a thread. The connecting member is connected by the screw and the thread to achieve fixed connection between the pressing member 102 and the first workpiece (fixing member) 105.

[0064] The buffer 104 is located in the cavity. The size of the buffer ensures that the upper pressing member 101 and the lower pressing member 102 do not contact each other, and when the second workpiece 106 moves relative to the surface of the first workpiece 105 , the space of the cavity changes accordingly.

[0065] In one embodiment, the buffer member 104 is a buffer steel ball.

[0066] Figure 2 FIG. 1 is a schematic diagram showing a connecting member according to an embodiment of the present invention before heating.

[0067] like Figure 2As shown, the distance between the uppermost end and the lowermost end of the steel ball 104 is such that a first gap 107 is formed between the vertical portion of the upper pressing member 101 and the horizontal portion of the lower pressing member 102 .

[0068] The distance between the leftmost end and the rightmost end of the steel ball 104 is such that a second gap 108 is formed between the horizontal portion of the upper pressing member 101 and the vertical portion of the lower pressing member 102 .

[0069] Figure 3 A schematic diagram showing a connecting member after heating according to an embodiment of the present invention is shown.

[0070] like Figure 3 As shown, since the thermal expansion coefficient of the second component 106 is greater than that of the first component 105, when the second component 106 expands due to heat so that the horizontal deformation of the second component 106 is greater than that of the first component, the upper pressing member 10 moves horizontally with the second component, and the second gap 108' becomes larger accordingly.

[0071] Figure 4 FIG. 1 shows a schematic diagram of a connector according to an embodiment of the present invention. Figure 4 In the embodiment, the connecting member 10 is located outside the second workpiece 106.

[0072] In one embodiment, the first workpiece 105 is a fixed part, and the second workpiece 106 is an expansion part.

[0073] The connecting member includes an upper pressing member 101 , a lower pressing member 102 , and a buffer member 104 .

[0074] The upper pressing member 101 and the lower pressing member 102 form a cavity, and the cross section of the cavity is substantially rectangular.

[0075] The cross-section of the upper pressing member 101 is in an inverted L-shape.

[0076] The upper pressing member 101 has a horizontal portion and a vertical portion, which are fixedly connected at 90 degrees.

[0077] The upper surface of the horizontal portion of the upper hold-down member 101 is in contact with the lower surface of the second workpiece (expansion member) 106 .

[0078] The upper surface of the horizontal portion of the upper pressing member 101 can move along with the lower surface of the second workpiece (expansion member) 106 , so that no large friction or stress concentration occurs between the upper pressing member 101 and the second workpiece (expansion member) 106 .

[0079] The pressing member 102 has a horizontal portion and a vertical portion, which are fixedly connected at a 90-degree angle.

[0080] The center of the vertical portion of the pressing member 102 has a through hole 103. The wall of the through hole 103 has a thread. The connecting member is connected by the screw and the thread to achieve fixed connection between the pressing member 102 and the first workpiece (fixing member) 105.

[0081] The buffer 104 is located in the cavity. The size of the buffer ensures that the upper pressing member 101 and the lower pressing member 102 do not contact each other, and when the second workpiece 106 moves relative to the surface of the first workpiece 105 , the space of the cavity changes accordingly.

[0082] In one embodiment, the buffer member 104 is a buffer steel ball.

[0083] Figure 5 FIG. 2 shows a connector according to an embodiment of the present invention. Figure 5 As shown, the connecting member includes an upper pressing member 501 , a lower pressing member ( 502 , 503 ), and a buffer member 504 .

[0084] In this embodiment, the bolt itself can serve as the pressing member of the connecting member, wherein the vertical portion of the pressing member is the screw rod 503 of the bolt, and the horizontal portion of the pressing member is the screw head 502 of the bolt.

[0085] The terms and expressions used above are for descriptive purposes only, and the present invention is not limited to these terms and expressions. The use of these terms and expressions is not intended to exclude any equivalent features shown and described (or portions thereof), and it should be recognized that various modifications that may exist are also intended to be included within the scope of the claims. Other modifications, variations, and substitutions are also possible. Accordingly, the claims should be deemed to cover all such equivalents.

[0086] Similarly, it should be noted that in order to simplify the description of the present disclosure and thus facilitate understanding of one or more embodiments of the invention, the foregoing description of the embodiments of the present disclosure sometimes combines multiple features into a single embodiment, figure, or description thereof. However, this disclosure method does not mean that the subject matter of the present disclosure requires more features than those mentioned in the claims.

[0087] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions can be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A connector for connecting a first workpiece and a second workpiece, characterized in that: include: Upper pressing piece, lower pressing piece and buffer piece; The upper pressing member and the lower pressing member form a cavity; The upper pressing member is movable along the surface of the second workpiece; The pressing member is fixedly connected to the first workpiece; The buffer is located in the cavity. The size of the buffer ensures that the upper pressing member and the lower pressing member do not contact each other and that the space of the cavity changes accordingly when the second workpiece moves relative to the surface of the first workpiece.

2. The connector according to claim 1, wherein The second workpiece has a greater thermal expansion coefficient than the first workpiece.

3. The connector according to claim 1, wherein: The upper pressing piece has a horizontal part and a vertical part, and the horizontal part is fixedly connected to the vertical part at 90 degrees; the upper surface of the horizontal part contacts the lower surface of the second workpiece, and when the second workpiece deforms and moves, the horizontal part drives the upper pressing piece to move together with the second workpiece.

4. The connector according to claim 1, wherein: The pressing member has a horizontal portion and a vertical portion, and the horizontal portion is fixedly connected to the vertical portion at 90 degrees.

5. The connector according to claim 1, wherein: The distance between the uppermost end and the lowermost end of the buffer member is such that a first gap is formed between the vertical portion of the upper pressing member and the horizontal portion of the lower pressing member.

6. The connector according to claim 1, wherein: The distance between the leftmost end and the rightmost end of the buffer member is such that a second gap is formed between the horizontal portion of the upper pressing member and the vertical portion of the lower pressing member.

7. The connector according to claim 1, wherein: When the horizontal deformation of the second component is greater than that of the first component, the second gap is changed accordingly.

8. The connector according to claim 1, wherein: The buffer member is a steel ball.

9. The connector according to claim 1, wherein: A through hole is provided in the middle of the vertical portion of the pressing member, and a side wall of the through hole is threaded. A bolt is threadedly connected to the connecting member through the through hole to connect the first workpiece and the second workpiece.

10. The connector according to claim 1, wherein: The pressing member of the connecting member is a bolt, wherein the vertical portion of the pressing member is the screw rod of the bolt, and the horizontal portion of the pressing member is the screw head of the bolt.

11. The connector according to claim 1, wherein The connecting member is located in the first workpiece.

12. The connector according to claim 1, wherein The connecting member is located outside the second workpiece.

Images