Vacuum ultraviolet deuterium lamp spectral radiance traceability method, device and equipment

Abstract

The invention provides a vacuum ultraviolet deuterium lamp spectral radiance traceability method, device and equipment, and relates to the technical field of optical metrology. The method comprises the following steps: determining relative spectral distribution of a deuterium lamp in a vacuum ultraviolet band; acquiring the spectral radiation brightness of the deuterium lamp at 200nm under the condition that the black body is used as a standard radiation source; and determining the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200nm. The method provided by the embodiment of the invention efficiently and accurately realizes the spectral radiance traceability of the vacuum ultraviolet deuterium lamp.

Description

Technical Field

[0001] The present invention relates to the field of optical metrology technology, and in particular to a method, device and equipment for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp. Background Art

[0002] In the fields of optical metrology and radiometry, measuring the spectral radiance of deuterium lamps in the vacuum ultraviolet (VUV) band (wavelength range 115–200 nm) is of great scientific and engineering significance. As a commonly used VUV light source, deuterium lamps are widely used in photochemistry, materials characterization, space science, and semiconductor testing.

[0003] In related technologies, using a synchrotron radiation source as a reference radiation source requires establishing a separate beam line at the synchrotron radiation source to complete the tracing of the vacuum ultraviolet deuterium lamp spectral radiation brightness, but the construction and maintenance costs of the synchrotron radiation source beam line are very high. Summary of the Invention

[0004] The present invention provides a method, device and equipment for tracing the brightness of the spectrum radiation of a vacuum ultraviolet deuterium lamp, which can efficiently and accurately achieve the tracing of the brightness of the spectrum radiation of a vacuum ultraviolet deuterium lamp.

[0005] The present invention provides a method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp, comprising the following steps.

[0006] Determining the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; The spectral radiation brightness of the deuterium lamp at 200 nm is obtained when a black body is used as a standard radiation source; The spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band is determined according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200 nm.

[0007] According to a vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the present invention, the determination of the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band includes: Obtain the spectral responsivity of the detector and the transmittance of the monochromator in the vacuum ultraviolet band; Obtain the signal intensity of the deuterium lamp in the vacuum ultraviolet band; The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined according to the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator and the signal intensity of the deuterium lamp.

[0008] According to a vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the present invention, the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined based on the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator and the signal intensity of the deuterium lamp, including: The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined based on the following method: W(λ) R -1 (λ) T -1 (λ) Where W(λ) represents the signal intensity of the deuterium lamp in the vacuum ultraviolet band; R -1 (λ) represents the spectral responsivity of the detector in the vacuum ultraviolet band; T -1 (λ) represents the transmittance of the monochromator in the ultraviolet band.

[0009] According to a vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the present invention, the spectral radiation brightness of the deuterium lamp at 200nm when a black body is used as a standard radiation source includes: According to Planck's radiation law, determine the spectral radiation brightness of a black body; The spectral radiance of the deuterium lamp at 200 nm is determined based on the spectral radiance of the black body.

[0010] According to a vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the present invention, the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band is determined based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200nm, comprising: The spectral radiance of a deuterium lamp in the vacuum ultraviolet band is determined as follows: L(λ) = L 200 / H N (200) H N (λ) Where L(λ) represents the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band; L 200 Indicates the spectral radiation brightness of the deuterium lamp at 200nm; H N (200) and H N (λ) represents the value at different wavelengths in the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band.

[0011] According to a method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp provided by the present invention, the method further comprises: obtaining an input light radiation signal of the monochromator and an output light radiation signal of the monochromator; The ratio of the outgoing light radiation signal of the monochromator to the input light radiation signal of the monochromator is used as the transmittance of the monochromator.

[0012] The present invention also provides a vacuum ultraviolet deuterium lamp spectral radiation brightness tracing device, comprising the following modules: A determination module, configured to determine a relative spectral distribution of a deuterium lamp in a vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; an acquisition module, for acquiring the spectral radiation brightness of the deuterium lamp at 200 nm when a black body is used as a standard radiation source; The tracing module is used to determine the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200nm.

[0013] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and runnable on the processor. When the processor executes the program, the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method as described in any one of the above is implemented.

[0014] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the vacuum ultraviolet deuterium lamp spectrum radiation brightness tracing method as described in any one of the above is implemented.

[0015] The present invention also provides a computer program product, comprising a computer program, which, when executed by a processor, implements any of the above-described vacuum ultraviolet deuterium lamp spectral radiation brightness tracing methods.

[0016] The vacuum ultraviolet deuterium lamp spectral radiation brightness traceability method, device and equipment provided by the present invention, on the one hand, uses a black body as a standard radiation source, which can greatly save the cost of building a new synchrotron radiation source beam line and effectively reduce the waste of laboratory space. On the other hand, in the related art, the spectral radiation brightness of the synchrotron radiation source is measured by a spectral radiation brightness measurement system, and the measurement results are limited by the various optical devices in the spectral radiation brightness measurement system, resulting in low accuracy of the measurement results. However, the spectral radiation brightness of the black body in the present application satisfies Planck's radiation law, so the spectral radiation brightness of the black body can be determined efficiently and accurately, effectively improving the accuracy of the vacuum ultraviolet deuterium lamp spectral radiation brightness traceability. Thirdly, in the embodiment of the present application, the special wavelength of 200nm is used to effectively combine the vacuum band and the non-vacuum band, and the black body is used as a standard radiation source to achieve the accurate determination of the spectral radiation brightness of the deuterium lamp at 200nm, and then based on the spectral distribution, the spectral radiation brightness of the deuterium lamp of 115nm-200nm can be derived, and the vacuum ultraviolet deuterium lamp spectral radiation brightness traceability can be achieved efficiently and accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 The present invention provides a flow chart of the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method.

[0019] Figure 2 It is a structural schematic diagram of the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing device provided by the present invention.

[0020] Figure 3 It is a structural schematic diagram of the electronic device provided by the present invention. DETAILED DESCRIPTION

[0021] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0022] The following combination Figure 1-Figure 3 The invention describes a method, device and apparatus for tracing the brightness of the spectrum radiation of a vacuum ultraviolet deuterium lamp.

[0023] In order to facilitate a clearer understanding of the technical solutions of the various embodiments of the present application, some technical contents related to the various embodiments of the present application are first introduced.

[0024] In the fields of optical metrology and radiometry, the measurement of the spectral radiance of deuterium lamps in the vacuum ultraviolet (VUV) band (wavelength range 115–200 nm) is of great scientific and engineering significance. As a commonly used VUV light source, deuterium lamps are widely used in photochemistry, materials characterization, space science, and semiconductor testing. However, accurate calibration of their spectral radiance relies on a high-precision standard light source. Synchrotron radiation sources, with their wide spectral coverage, high brightness, and calculability, have become standard radiation sources for tracing radiance in the vacuum band. Classical traceability methods leverage the high brightness, wide spectral continuity, and calculability of synchrotron radiation sources to compare and calibrate the radiation characteristics of deuterium lamps with the absolute spectral radiance of synchrotron radiation through a combination of experimental measurements and theoretical modeling. As a primary standard light source, the spectral radiance of a synchrotron radiation source can be accurately calculated using basic physical parameters (such as electron energy, beam intensity, and magnet parameters) and radiation theoretical models. However, as a secondary light source, the radiation characteristics of a deuterium lamp must be correlated with those of a synchrotron radiation source through experimental measurements.

[0025] The specific implementation process first requires establishing a high-precision spectral radiance measurement system at a synchrotron radiation facility. This system typically consists of a vacuum ultraviolet (UV) monochromator, a detector, an optical collimator, and a vacuum environment control system. The monochromator decomposes the continuous spectrum of synchrotron radiation into narrowband spectra, enabling spectral scanning through a precise wavelength drive mechanism. The detector detects the optical signal, and the optical collimator ensures precise alignment of the optical path and effective suppression of stray light. After completing the absolute measurement of the spectral radiance of the synchrotron radiation source, a comparative measurement of a deuterium lamp is performed on the same experimental platform. The mathematical basis for data processing is the radiation transfer equation. The detector response signal is compared with the theoretically calculated value of synchrotron radiation on a wavelength-by-wavelength basis to establish a system spectral response function. This response function is then applied to the inversion calculation of the deuterium lamp measurement data. In practical applications, deuterium lamps traced to synchrotron radiation can be used as working standard light sources for calibrating vacuum ultraviolet spectrometers, space remote sensors, and other photochemical analysis equipment. They have important applications in semiconductor lithography process monitoring, upper atmospheric ozone detection, and UV photoresist performance testing.

[0026] In related technologies, the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method adopted uses the synchrotron radiation source as the reference radiation source. It is necessary to establish a separate beam line at the synchrotron radiation source to complete the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing, but the construction and maintenance costs of the synchrotron radiation source beam line are very high.

[0027] Figure 1 This is one of the flow charts of the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the present invention, such as Figure 1 As shown, the method includes the following: Step 101: Determine the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength.

[0028] Specifically, in the embodiments of the present application, the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band is first determined. Optionally, the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength, that is, the relative spectral distribution can accurately represent the magnitude and proportional relationship between spectral radiation corresponding to different wavelengths.

[0029] Step 102: Obtain the spectral radiation brightness of the deuterium lamp at 200 nm when a black body is used as a standard radiation source.

[0030] Specifically, after determining the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band, the embodiments of the present application further obtain the spectral radiation brightness of the deuterium lamp at 200nm when a black body is used as a standard radiation source. Optionally, 200nm is the dividing line between the vacuum band and the non-vacuum band. After measuring the ratio of the optical radiation signal of the black body after passing through the monochromator to the optical radiation signal of the deuterium lamp after passing through the monochromator at 200nm, the spectral radiation brightness of the deuterium lamp at 200nm can be deduced based on the spectral radiation brightness of the black body.

[0031] It should be noted that in the related art, the synchrotron radiation source is used as a reference radiation source, and a separate beam line needs to be established at the synchrotron radiation source to complete the traceability of the spectral radiation brightness of the vacuum ultraviolet deuterium lamp, but the construction and maintenance costs of the beam line of the synchrotron radiation source are very high. On the one hand, the black body is used as the standard radiation source in the embodiment of the present application, which can greatly save the cost of building a new synchrotron radiation source beam line and effectively reduce the waste of laboratory space. On the other hand, based on Planck's radiation law, the present application can accurately determine the spectral radiation brightness of the black body. In the related art, the spectral radiation brightness of the synchrotron radiation source needs to be measured by a spectral radiation brightness measurement system, and the spectral radiation brightness measurement system usually includes a vacuum ultraviolet monochromator, a detector, an optical collimation component and a vacuum environment control system, resulting in the final measured spectral radiation brightness of the synchrotron radiation source being affected by a variety of optical devices, thereby making the accuracy of the measured spectral radiation brightness of the synchrotron radiation source low, reducing the accuracy of the traceability of the spectral radiation brightness of the vacuum ultraviolet deuterium lamp. Thirdly, in the embodiments of the present application, the special wavelength of 200 nm is utilized to effectively combine the vacuum band and the non-vacuum band, and the black body is used as a standard radiation source to achieve accurate determination of the spectral radiation brightness of the deuterium lamp at 200 nm.

[0032] Step 103: Determine the spectral radiance of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiance of the deuterium lamp at 200 nm.

[0033] Specifically, after obtaining the spectral radiance of the deuterium lamp at 200nm, the spectral radiance of the deuterium lamp in the 115nm-200nm band can be determined based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band. Optionally, the relative spectral distribution characterizes the relationship between spectral radiation and wavelength. If the spectral radiance of the deuterium lamp at 200nm is known, the spectral radiance of the deuterium lamp in the 115nm-200nm band can be derived based on the relative spectral distribution. This can effectively and accurately trace the spectral radiance of the vacuum ultraviolet deuterium lamp while saving the cost of building a new synchrotron radiation source beamline and reducing the waste of laboratory space.

[0034] The method of the above embodiment, on the one hand, uses a black body as a standard radiation source, which can greatly save the cost of building a new synchrotron radiation source beam line and effectively reduce the waste of laboratory space. On the other hand, in the related art, the spectral radiation brightness of the synchrotron radiation source is measured by a spectral radiation brightness measurement system, and the measurement results are limited by the various optical devices in the spectral radiation brightness measurement system, resulting in low accuracy of the measurement results. However, the spectral radiation brightness of the black body in the present application satisfies Planck's radiation law, so the spectral radiation brightness of the black body can be determined efficiently and accurately, effectively improving the accuracy of the traceability of the spectral radiation brightness of the vacuum ultraviolet deuterium lamp. Thirdly, in the embodiment of the present application, the special wavelength of 200nm is used to effectively combine the vacuum band and the non-vacuum band, and the black body is used as a standard radiation source to achieve the accurate determination of the spectral radiation brightness of the deuterium lamp at 200nm. Based on the spectral distribution, the spectral radiation brightness of the deuterium lamp of 115nm-200nm can be derived, and the spectral radiation brightness of the vacuum ultraviolet deuterium lamp can be traced efficiently and accurately.

[0035] In some embodiments, determining the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band includes: Obtain the spectral responsivity of the detector and the transmittance of the monochromator in the vacuum ultraviolet band; Obtain the signal intensity of the deuterium lamp in the vacuum ultraviolet band; The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined according to the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator and the signal intensity of the deuterium lamp.

[0036] Specifically, in the embodiments of the present application, the detector's spectral responsivity in the 115nm-200nm band is calibrated, denoted as R(λ). Alternatively, calibration can be performed using a device for calibrating detector responsivity at a synchrotron radiation source, which is not specifically limited in the embodiments of the present application. Optionally, after the synchrotron radiation source's beamline passes through the first monochromator, the incident light radiation signal Si(λ) is measured at wavelength λ. After passing through the monochromator under test, the outgoing light radiation signal So(λ) is measured, and the transmittance of the monochromator under test at wavelength λ is calculated as T(λ) = So(λ) / Si(λ). Optionally, the signal intensity of a vacuum ultraviolet deuterium lamp in the 115nm-200nm band is measured, denoted as W(λ). Finally, based on the detector's spectral responsivity in the vacuum ultraviolet band, the monochromator's transmittance, and the deuterium lamp's signal intensity, the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band can be accurately determined, thereby accurately characterizing the relationship between spectral radiation and wavelength.

[0037] In one embodiment, determining the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band based on the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator, and the signal intensity of the deuterium lamp includes: The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined based on the following method: W(λ) R -1 (λ) T -1 (λ) Where W(λ) represents the signal intensity of the deuterium lamp in the vacuum ultraviolet band; R -1 (λ) represents the spectral responsivity of the detector in the vacuum ultraviolet band; T -1 (λ) represents the transmittance of the monochromator in the ultraviolet band.

[0038] Specifically, in the embodiment of the present application, W(λ) R -1 (λ) T -1 (λ) is normalized to obtain the relative spectral distribution of the vacuum ultraviolet deuterium lamp, which is recorded as H N (λ).

[0039] In some embodiments, the spectral radiation brightness of a deuterium lamp at 200 nm, when a fixed-point black body is used as a standard radiation source, includes: According to Planck's radiation law, determine the spectral radiation brightness of a black body; According to the spectral radiation brightness of the black body, the spectral radiation brightness of the deuterium lamp at 200nm is determined.

[0040] Specifically, in the embodiments of the present application, a high-temperature blackbody is used as a standard radiation source, and the Planck equation can be used to directly calculate the blackbody's spectral radiation brightness. Optionally, 200 nm is the dividing line between the vacuum band and the non-vacuum band. After measuring the ratio of the blackbody's optical radiation signal after passing through a monochromator to the optical radiation signal of the deuterium lamp after passing through the monochromator at 200 nm, the spectral radiation brightness of the deuterium lamp at 200 nm can be derived based on the blackbody's spectral radiation brightness.

[0041] The method of the above embodiment utilizes the special wavelength of 200 nm to effectively combine the vacuum band and the non-vacuum band, and uses the black body as a standard radiation source to achieve accurate determination of the spectral radiation brightness of the deuterium lamp at 200 nm.

[0042] In some embodiments, determining the spectral radiance of the deuterium lamp in the vacuum ultraviolet band based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiance of the deuterium lamp at 200 nm includes: The spectral radiance of a deuterium lamp in the vacuum ultraviolet band is determined as follows: L(λ) = L 200 / H N (200) H N (λ) Where L(λ) represents the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band; L 200 Indicates the spectral radiation brightness of the deuterium lamp at 200nm; H N (200) and H N (λ) represents the value at different wavelengths in the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band.

[0043] Specifically, in the embodiment of the present application, the spectral radiation brightness of the vacuum ultraviolet deuterium lamp in the range of 115nm-200nm is determined based on the following method: L(λ) = L 200 / H N (200) H N (λ). Where L(λ) represents the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band; L200 represents the spectral radiation brightness of the deuterium lamp at 200nm; H N (200) and H N(λ) represents the value at different wavelengths in the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band. That is, after obtaining the spectral radiation brightness of the deuterium lamp at 200nm, the present application can determine the spectral radiation brightness of the deuterium lamp in the range of 115nm-200nm based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band. Optionally, the relative spectral distribution characterizes the relationship between the spectral radiation amount and the wavelength. When the spectral radiation brightness of the deuterium lamp at 200nm is known, the spectral radiation brightness of the deuterium lamp in the range of 115nm-200nm can be derived based on the relative spectral distribution. This saves the cost of building a new synchrotron radiation source beamline and reduces the waste of laboratory space, and efficiently and accurately realizes the traceability of the spectral radiation brightness of the vacuum ultraviolet deuterium lamp.

[0044] It should be noted that in related technologies, calibration of the spectral radiation brightness of a deuterium lamp in the 115nm-200nm band requires the construction of a separate beamline at a synchrotron radiation source. This application calibrates the spectral responsivity of the detector and the pass rate of the monochromator to obtain the relative spectral distribution curve of the deuterium lamp. This is then combined with a large-aperture, high-temperature, fixed-point blackbody to calibrate the spectral radiation brightness of the deuterium lamp at 200nm. Combining the two, the spectral radiation brightness of the deuterium lamp in the 115nm-200nm band can be obtained, thereby greatly saving the cost of building a new synchrotron radiation source beamline and effectively saving laboratory space.

[0045] The method of the above embodiment uses a black body as a standard radiation source to accurately determine the spectral radiation brightness of the deuterium lamp at 200nm. Based on the spectral distribution, the spectral radiation brightness of the deuterium lamp from 115nm to 200nm can be deduced, thereby efficiently and accurately tracing the spectral radiation brightness of the vacuum ultraviolet deuterium lamp.

[0046] The vacuum ultraviolet deuterium lamp spectrum radiation brightness tracing device provided by the present invention is described below. The vacuum ultraviolet deuterium lamp spectrum radiation brightness tracing device described below and the vacuum ultraviolet deuterium lamp spectrum radiation brightness tracing method described above can be used for reference. The vacuum ultraviolet deuterium lamp spectrum radiation brightness tracing device of the embodiment of the present application is as follows. Figure 2 As shown, including: Determination module 210, for determining the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; An acquisition module 220 is used to obtain the spectral radiation brightness of the deuterium lamp at 200 nm when a black body is used as a standard radiation source; The tracing module 230 is used to determine the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200 nm.

[0047] Optionally, the determining module 210 is specifically configured to: Obtain the spectral responsivity of the detector and the transmittance of the monochromator in the vacuum ultraviolet band; Obtain the signal intensity of the deuterium lamp in the vacuum ultraviolet band; The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined according to the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator and the signal intensity of the deuterium lamp.

[0048] Optionally, the determining module 210 is specifically configured to: The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined based on the following method: W(λ) R -1 (λ) T -1 (λ) Where W(λ) represents the signal intensity of the deuterium lamp in the vacuum ultraviolet band; R -1 (λ) represents the spectral responsivity of the detector in the vacuum ultraviolet band; T -1 (λ) represents the transmittance of the monochromator in the ultraviolet band.

[0049] Optionally, the acquisition module 220 is specifically configured to: According to Planck's radiation law, determine the spectral radiation brightness of a black body; According to the spectral radiation brightness of the black body, the spectral radiation brightness of the deuterium lamp at 200nm is determined.

[0050] Optionally, the tracing module 230 is specifically configured to: The spectral radiance of a deuterium lamp in the vacuum ultraviolet band is determined as follows: L(λ) = L 200 / H N (200) H N (λ) Where L(λ) represents the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band; L 200 Indicates the spectral radiation brightness of the deuterium lamp at 200nm; H N (200) and H N (λ) represents the value at different wavelengths in the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band.

[0051] Optionally, the acquisition module 220 is further configured to: obtaining an input light radiation signal of the monochromator and an output light radiation signal of the monochromator; The ratio of the outgoing light radiation signal of the monochromator to the input light radiation signal of the monochromator is taken as the transmittance of the monochromator.

[0052] Figure 3The present invention provides a schematic diagram of the physical structure of an electronic device, which may include a processor 310, a communications interface 320, a memory 330, and a communications bus 340. The processor 310, the communications interface 320, and the memory 330 communicate with each other via the communications bus 340. The processor 310 may invoke logic instructions in the memory 330 to execute a method for tracing the spectral radiance of a vacuum ultraviolet deuterium lamp. The method includes: determining the relative spectral distribution of a deuterium lamp in the vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; obtaining the spectral radiance of the deuterium lamp at 200 nm using a black body as a standard radiation source; and determining the spectral radiance of the deuterium lamp in the vacuum ultraviolet band based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiance of the deuterium lamp at 200 nm.

[0053] Furthermore, the logic instructions in the aforementioned memory 330 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the portion that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product, stored in a storage medium, includes several instructions for enabling a computer device (which can be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as a USB flash drive, a mobile hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0054] On the other hand, the present invention also provides a computer program product, which includes a computer program, and the computer program can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method provided by the above methods, the method including: determining the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band; the relative spectral distribution is used to characterize the relationship between the spectral radiation and the wavelength; obtaining the spectral radiation brightness of the deuterium lamp at 200nm when a black body is used as a standard radiation source; determining the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band based on the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200nm.

[0055] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements a quality testing method for a multi-tenant system provided by the above methods, the method comprising: obtaining a metadata combination corresponding to a user's operation in the multi-tenant system; determining a meta-operation scenario based on the metadata combination; generating a scenario-based test case based on the meta-operation scenario; and performing a quality test on the multi-tenant system based on the scenario-based test case.

[0056] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, i.e., they may be located in one location or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0057] Through the description of the above embodiments, those skilled in the art will clearly understand that each embodiment can be implemented using software plus a necessary general-purpose hardware platform, or of course, hardware. Based on this understanding, the essence of the above technical solution, or the portion that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a magnetic disk, or an optical disk, and includes a number of instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to execute the methods described in the embodiments or certain portions of the embodiments.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp, characterized in that: include: Determine the relative spectral distribution of deuterium lamps in the vacuum ultraviolet band; The relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; The spectral radiation brightness of the deuterium lamp at 200 nm is obtained when a black body is used as a standard radiation source; The spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band is determined according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200 nm.

2. The vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method according to claim 1, characterized in that: Determining the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band includes: Obtain the spectral responsivity of the detector and the transmittance of the monochromator in the vacuum ultraviolet band; Obtain the signal intensity of the deuterium lamp in the vacuum ultraviolet band; The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined according to the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator and the signal intensity of the deuterium lamp.

3. The method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp according to claim 2, characterized in that: Determining the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band according to the spectral responsivity of the detector in the vacuum ultraviolet band, the transmittance of the monochromator, and the signal intensity of the deuterium lamp comprises: The relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band is determined based on the following method: W(λ) R -1 (l) T -1 (l) Where W(λ) represents the signal intensity of the deuterium lamp in the vacuum ultraviolet band; R -1 (λ) represents the spectral responsivity of the detector in the vacuum ultraviolet band; T -1 (λ) represents the transmittance of the monochromator in the ultraviolet band.

4. The method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp according to any one of claims 1 to 3, characterized in that: When a black body is used as a standard radiation source, the spectral radiation brightness of the deuterium lamp at 200 nm includes: According to Planck's radiation law, determine the spectral radiation brightness of a black body; The spectral radiance of the deuterium lamp at 200 nm is determined based on the spectral radiance of the black body.

5. The method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp according to any one of claims 1 to 3, characterized in that: Determining the spectral radiance of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiance of the deuterium lamp at 200 nm comprises: The spectral radiance of a deuterium lamp in the vacuum ultraviolet band is determined as follows: L(λ)= L 200 / H N (200) H N (l) Where L(λ) represents the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band; L 200 Indicates the spectral radiation brightness of the deuterium lamp at 200nm; H N (200) and H N (λ) represents the value at different wavelengths in the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band.

6. The method for tracing the spectral radiation brightness of a vacuum ultraviolet deuterium lamp according to claim 2, characterized in that: The method further comprises: obtaining an input light radiation signal of the monochromator and an output light radiation signal of the monochromator; The ratio of the outgoing light radiation signal of the monochromator to the input light radiation signal of the monochromator is used as the transmittance of the monochromator.

7. A vacuum ultraviolet deuterium lamp spectral radiation brightness tracing device, characterized in that: include: A determination module, used to determine the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band; The relative spectral distribution is used to characterize the relationship between spectral radiation and wavelength; an acquisition module, for acquiring the spectral radiation brightness of the deuterium lamp at 200 nm when a black body is used as a standard radiation source; The tracing module is used to determine the spectral radiation brightness of the deuterium lamp in the vacuum ultraviolet band according to the relative spectral distribution of the deuterium lamp in the vacuum ultraviolet band and the spectral radiation brightness of the deuterium lamp at 200nm.

8. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the computer program, the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method as described in any one of claims 1 to 6 is implemented.

9. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the vacuum ultraviolet deuterium lamp spectral radiation brightness tracing method as claimed in any one of claims 1 to 6 is implemented.

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