Liquid zoom microscopic system and control method thereof

Abstract

The invention discloses a liquid zoom microscope system and a control method thereof, and mainly solves the technical problem that an existing liquid zoom microscope system cannot realize effective and reliable uniform light illumination. The uniform light illumination assembly and the imaging objective lens assembly are coaxial and arranged on the two sides of the objective table respectively, and the CMOS camera is used for obtaining images of the imaging objective lens assembly and electrically connected to the displayer. The combined design of the lens array, the condensing lens and the beam expanding lens allows the size of a light spot to adapt to the numerical aperture of the imaging objective lens. The lens array divides an incident light beam into a plurality of sub-light beams and refocuses the sub-light beams to realize uniformity gt; and 95% of light spots are formed. And through the distributed design of each lens unit in the lens array, the local light source fluctuation is averaged, so that the influence on the whole illumination is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of microscopes, and in particular to a liquid zoom microscope system and a control method thereof. Background Art

[0002] Liquid zoom microscopes achieve zooming by changing the optical properties of a liquid lens. This zoom method eliminates the need for physical movement of complex mechanical parts, resulting in an extremely smooth zoom process and avoiding imaging instability caused by mechanical wear or vibration. Furthermore, the liquid zoom microscope's zoom response is extremely fast, capable of completing zoom changes within milliseconds. Furthermore, its liquid lens optimizes optical shape, reduces aberrations, and maintains stable optical performance, enabling high-resolution images in diverse environments.

[0003] Liquid zoom microscope systems usually include illumination systems. Among them, common microscope illumination systems include critical illumination and Köhler illumination. However, in the process of implementing the technical solutions in the embodiments of the present application, the inventors of the present application found that critical illumination directly images the light source filament on the sample plane, which causes the non-uniformity of the light source to be directly reflected in the sample illumination, making it difficult to achieve uniform illumination of the entire field of view. For observation and analysis tasks that require high-uniformity illumination, such as high-precision cell imaging and research on the uniformity of material microstructures, errors and interference may be introduced. In addition, critical illumination has high requirements for light source stability. Any fluctuation or non-uniformity of the light source will directly affect the illumination effect of the sample, thereby affecting the imaging quality. In addition, although Köhler illumination allows each point on the light source to make a uniform contribution to the points on the entire plane of the illuminated light field, thus achieving uniform illumination to a certain extent, slight non-uniformity may still exist at the microscopic scale or when extremely high uniformity requirements are required. This slight non-uniformity can have an adverse effect on some cutting-edge scientific research and high-end application scenarios that require ultra-high uniformity illumination, such as single-molecule imaging and quantum material research. In addition, its optical path design is relatively fixed. Once the system is installed and debugged, its uniform light effect is basically determined, making it difficult to flexibly adjust according to different sample characteristics and observation requirements.

[0004] The information disclosed in this background technology section is only used to deepen the understanding of the background technology of the present disclosure and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art known to those skilled in the art. Summary of the Invention

[0005] In view of at least one of the above technical problems, the present disclosure provides a liquid zoom microscope system and a control method thereof, which mainly solve the technical problem that the existing liquid zoom microscope system cannot achieve effective and reliable uniform light illumination.

[0006] According to one aspect of the present disclosure, a liquid zoom microscope system is provided, which includes a uniform light illumination assembly and an imaging objective lens assembly coaxially disposed on both sides of a stage, and a CMOS camera for acquiring an image of the imaging objective lens assembly and electrically connected to a display; the image-side numerical aperture of the uniform light illumination assembly is not less than the object-side numerical aperture of the imaging objective lens assembly; the uniform light illumination assembly includes a light source, a condenser lens, a lens array including a plurality of lens units, and a beam expander lens for expanding the light source in cooperation with the condenser lens; the imaging objective lens assembly includes a spherical aberration correction lens for correcting spherical aberration, an astigmatism correction lens for correcting coma and astigmatism, a magnification liquid lens unit for adjusting magnification and including 2 to 8 liquid lenses, a field curvature correction lens for assisting in correcting field curvature and convex toward the magnification liquid lens unit, and a focusing liquid lens unit for adjusting focal length and including 1 to 4 liquid lenses; the liquid zoom microscope system also includes a control module for respectively controlling the corresponding voltages of the magnification liquid lens unit and the focusing liquid lens unit.

[0007] In some embodiments of the present disclosure, the diameter of each lens unit is 1 to 2 mm, the focal length is 5 to 10 mm, and the transmittance is greater than 98%.

[0008] In some embodiments of the present disclosure, the focal length of the focusing lens is 78.5 mm; the diameter of each lens unit is 1.3 mm and the focal length is 5 mm; the focal length of the beam expander lens is -33.8 mm; the distance between the focusing lens and the lens array is 17.5 mm, and the distance between the lens array and the beam expander lens is 77.5 mm.

[0009] In some embodiments of the present disclosure, the surfaces of the focusing lens, beam expanding lens, spherical aberration correction lens, astigmatism correction lens, and field curvature correction lens are respectively provided with an anti-reflection film with a reflectivity less than 0.5%.

[0010] In some embodiments of the present disclosure, the magnification liquid lens unit includes a first liquid lens, a second liquid lens, and a third liquid lens; the focusing liquid lens unit includes a fourth liquid lens; the front and rear curvature radii of the spherical aberration correction lens are 42.17 mm and -6.6 mm, respectively, and the thickness is 1.6 mm; the front and rear curvature radii of the astigmatism correction lens are -4.75 mm and -7.05 mm, respectively, and the thickness is 1.9 mm; the front and rear curvature radii of the field curvature correction lens are 3.34 mm and 23.23 mm, respectively, and the thickness is 7.83 mm; the spacing between the spherical aberration correction lens, the astigmatism correction lens, the first liquid lens, the second liquid lens, the third liquid lens, the field curvature correction lens, and the fourth liquid lens are 3.7 mm, 2 mm, 2.1 mm, 3.4 mm, 2.6 mm, and 9.8 mm, respectively.

[0011] According to another aspect of the present disclosure, a control method for controlling the above-mentioned liquid zoom microscope system is provided. When there is a demand to increase the magnification of the liquid zoom microscope system, the control module increases the voltages of the first liquid lens and the third liquid lens to a corresponding extent, decreases the voltage of the second liquid lens to a corresponding extent, and changes the curvature of the fourth liquid lens to a corresponding extent until the corresponding magnification requirement is achieved. When there is a demand to decrease the magnification of the liquid zoom microscope system, the control module decreases the voltages of the first liquid lens and the third liquid lens to a corresponding extent, increases the voltage of the second liquid lens to a corresponding extent, and changes the curvature of the fourth liquid lens to a corresponding extent until the corresponding magnification requirement is achieved.

[0012] One or more technical solutions provided in the embodiments of this application have at least any of the following technical effects or advantages: 1. The combined design of the lens array and beam expansion system (consisting of a condenser lens and a beam expander lens) allows the spot size to be adapted to the numerical aperture of the imaging objective. The lens array splits the incident beam into multiple sub-beams and refocuses them, achieving a spot uniformity of >95%. Furthermore, the distributed design of the lens elements in the lens array averages local light source fluctuations, thereby minimizing their impact on overall illumination.

[0013] 2. The spherical aberration correction lens, astigmatism correction lens, and field curvature correction lens are glass solid lenses that can perform the main optical power and aberration correction tasks. Combined with the dynamic adjustment compensation of each liquid lens, it can effectively avoid the aberration over-correction problem of pure liquid lens systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 Schematic diagram of the structure of the liquid zoom microscope system in one embodiment of the present application.

[0015] Figure 2 This is a simulation result of a liquid zoom microscope system in one embodiment of the present application.

[0016] In the above figures, 1 is the stage, 2 is the uniform light illumination assembly, 20 is the light source, 21 is the focusing lens, 22 is the lens array, 23 is the beam expander lens, 3 is the imaging objective lens assembly, 31 is the spherical aberration correction lens, 32 is the astigmatism correction lens, 33 is the field curvature correction lens, 4 is the magnification liquid lens unit, 41 is the first liquid lens, 42 is the second liquid lens, 43 is the third liquid lens, 5 is the focusing liquid lens unit, 51 is the fourth liquid lens, 6 is the CMOS camera, and 7 is the display. DETAILED DESCRIPTION

[0017] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "vertical", "horizontal", "clockwise", "counterclockwise", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting this application. The terms "first", "second", etc. involved in this application are used to distinguish the objects being described and do not have any order or technical meaning.

[0018] The procedures involved or relied upon in the following embodiments are all conventional or simple procedures in the art, and those skilled in the art can make conventional selections or adaptive adjustments based on specific application scenarios. The devices involved in the following embodiments, unless otherwise specified, are all conventional commercially available products.

[0019] In order to better understand the technical solution of the present application, the above technical solution will be described in detail below with reference to the accompanying drawings and specific implementation methods.

[0020] To solve the technical problem that existing liquid zoom microscope systems cannot achieve effective and reliable uniform illumination, which leads to errors and interference in observation and analysis tasks such as high-precision imaging and microscopic research, this example discloses a liquid zoom microscope system, see Figure 1 The apparatus comprises an objective stage 1, a uniform light illumination assembly 2 disposed below the objective stage, an imaging objective lens assembly 3 disposed above the objective stage, and a CMOS camera 6 for capturing an image of the imaging objective lens assembly 3 and electrically connected to a display 7. To ensure that the entire imaging field of view, especially the edges of the field of view, are fully illuminated by the uniform light illumination assembly and to maximize the resolving power of the imaging objective lens assembly, in this example, the image-side numerical aperture of the uniform light illumination assembly is not less than the object-side numerical aperture of the imaging objective lens assembly.

[0021] For details, see Figure 1 The uniform illumination assembly 2 includes a light source 20, a focusing lens 21, a lens array 22, and a beam expander lens 23, which are coaxially arranged in sequence. The light source 20 is used to provide the necessary illumination for the operation of the liquid zoom microscope system. In this embodiment, the light source 20 uses a highly stable white light LED light source with low fluctuation, long life, and a wide spectrum, and is adapted to the light transmission range of each lens in the uniform illumination assembly in this example.

[0022] Considering that the light emitted by the light source 20 is divergent and cannot be used directly, in this embodiment, see Figure 1, a focusing lens 21 is provided, wherein the focusing lens 21 is a convex lens, which is used to collect and converge the light emitted by the light source 20. In order to achieve the uniformity of the light converged by the focusing lens 21, a lens array 22 is provided, and the lens array 22 includes a plurality of lens units, each lens unit has a diameter of 1 to 2 mm, a focal length of 5 to 10 mm, and a transmittance greater than 98%. Thus, after ensuring that the divergent light emitted by the light source 20 can be converged to the entrance pupil plane of the lens array 22, that is, the boundary contour of the lens array 22, the lens array divides the incident light beam into multiple sub-beams. However, considering that after the light beam is processed by the lens array, the sub-spots overlap in space, and the total light intensity is the incoherent superposition of the light intensities of the sub-beams, direct projection and use will lead to the problem of uneven lighting. For this reason, in this embodiment, see Figure 1 , a beam expander lens 23 is provided, and cooperates with the condenser lens 21 to form a beam expansion system. The beam expander lens 23 refocuses each sub-beam so that the beam is emitted in parallel, thereby converting the divergent sub-beams into parallel light, realizing the parallelization of the beam and achieving the purpose of uniformly irradiating the stage and forming a uniform light spot at the stage.

[0023] Specifically, in this embodiment, to achieve effective and reliable homogenization of the light source beam, the focal length of the focusing lens is set to 78.5 mm; the diameter of each lens unit in the lens array 22 is 1.3 mm and the focal length is 5 mm; and the focal length of the beam expander lens is set to -33.8 mm. In this embodiment, both the focusing lens 21 and the beam expander lens 23 are made of fused quartz with high transmittance and low dispersion, with a transmittance greater than 99% within the 400-700 nm wavelength range. Furthermore, in this embodiment, the surfaces of the focusing lens 21 and the beam expander lens 23 are each coated with an anti-reflection coating to reduce light reflection loss and enhance light transmission. In this embodiment, the anti-reflection coating reduces the lens light reflectivity to less than 0.2%. Furthermore, when assembling the uniform lighting assembly, the spacing between the focusing lens and the lens array is set to 17.5 mm, and the spacing between the lens array and the beam expander lens is set to 77.5 mm, to match the focal lengths of the lenses, thereby achieving optimal uniform lighting effects.

[0024] Compared to traditional Köhler illumination, which exhibits inconsistencies between the center and the edge, light source fluctuations or mechanical vibrations can adversely affect the consistency of light intensity incident on the sample area, necessitating aperture adjustment. In this example, the uniform illumination assembly 2 evenly distributes the entire light spot onto the sample area on the stage, eliminating the need for aperture adjustment in Köhler illumination.

[0025] In order to achieve effective observation of the target object on the stage, the liquid zoom microscope system disclosed in this example also includes an imaging objective lens assembly 3. Figure 1In this example, the imaging objective lens assembly 3 includes a spherical aberration correction lens 31, an astigmatism correction lens 32, a magnification liquid lens unit 4, a field curvature correction lens 33, and a focusing liquid lens unit 5, which are coaxially arranged in sequence.

[0026] Specifically, in this embodiment, the NA value of the spherical aberration correction lens 31 is less than or equal to 0.2, and is used to collect the divergent light beam that penetrates the sample on the stage and converge it to the subsequent optical elements. At the same time, considering that the center and edge of the spherical lens have different light converging abilities, the curvature of the lens center area is small and the refractive ability is weak, while the curvature of the edge area is large and the refractive ability is strong, resulting in the light emitted by the on-axis object point not being able to converge at the same point, causing spherical aberration. Therefore, in this embodiment, the spherical aberration correction lens 31 is provided to achieve spherical aberration correction of the imaging objective lens assembly 3. In order to avoid coma and astigmatism in the light beam passing through the target sample, see Figure 1 In this example, an astigmatism correction lens 32 is provided to balance the aberrations of different fields of view, ensuring that the resolution of the edge field of view is consistent with that of the center, thereby correcting coma and astigmatism.

[0027] To adjust the magnification and focal length of the imaging objective lens assembly 3, in this example, the imaging objective lens assembly 3 is equipped with a magnification liquid lens unit 4 comprising two to eight liquid lenses. When the magnification of the magnification liquid lens unit 4 changes, i.e., the focal length changes, the position of the rear principal surface of the liquid zoom microscope system changes, resulting in a change in the image distance. To ensure image stability during zooming, the imaging objective lens assembly 3 also includes a focusing liquid lens unit 5 comprising one to four liquid lenses. In this example, the focusing liquid lens unit 5 serves as a focus compensation unit, adjusting the image distance by changing the curvature (equivalent focal length) of each liquid lens, ensuring that the final image plane remains on the COMS camera target surface.

[0028] The greater the number of liquid lenses in the magnification liquid lens unit 4, the greater the zoom ratio of the liquid zoom microscope system; the greater the number of liquid lenses in the focusing liquid lens unit 5, the stronger the focusing capability of the liquid zoom microscope system; by connecting multiple liquid lenses in series, larger changes in image distance can be compensated. In addition, in this embodiment, the liquid zoom microscope system also includes a control module for controlling the voltage of the magnification liquid lens unit 4 and the focusing liquid lens unit 5 respectively. Specifically, the control module adjusts the voltage corresponding to each liquid lens, and then achieves precise control of the liquid interface shape of the liquid lens by adjusting the voltage, thereby achieving the corresponding magnification adjustment or focal length adjustment effect.

[0029] To avoid defocusing of the edge of the field, i.e., field curvature problem, in this embodiment, a field curvature correction lens 33 is further provided between the magnification liquid lens unit 4 and the focusing liquid lens unit 5 to ensure that the light rays in the meridian and sagittal directions are focused uniformly, so that the focal plane remains flat to match the planar sensor of the CMOS camera 6 and achieve field curvature correction.

[0030] In this embodiment, a spherical aberration correction lens 31 is selected, with a thickness of 1.6 mm and front and rear curvature radii of 42.17 mm and -6.6 mm, respectively. It is made of low-dispersion glass (BK7) and coated with a multilayer antireflection coating with a transmittance within the 400-700 nm wavelength range and a reflectivity of less than 0.5%. The astigmatism correction lens 32 has front and rear curvature radii of -4.75 mm and -7.05 mm, respectively, and a thickness of 1.9 mm. It is made of low-dispersion, high-refractive-index glass (CAF2) and similarly coated with a multilayer antireflection coating with a transmittance within the 400-700 nm wavelength range and a reflectivity of less than 0.5%. In this example, the field curvature correction lens 33 has front and rear curvature radii of 3.34 mm and 23.23 mm, respectively, and a thickness of 7.83 mm. It is made of low-dispersion, high-refractive-index glass (CAF2) and coated with a multi-layer antireflection coating with a transmittance within the 400-700 nm wavelength range and a reflectivity of less than 0.5%. Furthermore, in this embodiment, the magnification liquid lens unit 4 includes three liquid lenses: a first liquid lens 41, a second liquid lens 42, and a third liquid lens 43. The focusing liquid lens unit includes a fourth liquid lens 51, a single liquid lens. This number of lenses meets basic zoom and focusing requirements. To ensure reliable imaging, the spacing between the spherical aberration correction lens 31, the astigmatism correction lens 32, the first liquid lens 41, the second liquid lens 42, the third liquid lens 43, the field curvature correction lens 33, and the fourth liquid lens 51 is, respectively, 3.7 mm, 2 mm, 2.1 mm, 3.4 mm, 2.6 mm, and 9.8 mm.

[0031] See also Figure 1 In this example, a CMOS camera 6 is connected above the imaging objective lens assembly 3, and the CMOS camera is in communication with a display 7. Thus, the optical image signal formed by the imaging objective lens assembly 3 is converted into an electrical signal by the CMOS camera 6 and transmitted to the display 7 via a communication cable. The display receives, processes, and restores the information carried by the electrical signal into an image for display.

[0032] Furthermore, this example discloses a control method for the aforementioned liquid zoom microscope system, which enables effective magnification and focal length adjustment while ensuring imaging quality and effect. Specifically, for the imaging objective lens assembly 3, the curvature and other parameters of its spherical aberration correction lens 31, astigmatism correction lens 32, and field curvature correction lens 33 are fixed. After the corresponding imaging objective lens assembly is assembled, the optical effect produced is relatively fixed. In this example, by adjusting each liquid lens, the magnification and focal length of the liquid zoom microscope system can be adjusted.

[0033] In this embodiment, the first, second, and third liquid lenses 41, 42, and 43 within the magnification liquid lens unit 4, as well as the fourth liquid lens 51 within the focusing liquid lens unit 5, are all spherical lenses with variable curvature. These lenses are composed of an insulating liquid and a conductive liquid, respectively. When no voltage is applied, they are flat. The curvature of the liquid-liquid interface can be varied by applying a corresponding voltage via a control module. Specifically, increasing the voltage increases the convexity of the interface (equivalent to a convex lens), while decreasing it decreases (equivalent to a concave lens). In this embodiment, the voltage adjustment range is 0 to 100 V, corresponding to an adjustment range of 5 to 50 mm for the curvature radius of the liquid lens.

[0034] In this example, voltage control is performed independently between each liquid lens. To avoid aberration imbalance caused by adjusting only a single lens (for example, adjusting only liquid lens 1 will introduce coma, which must be compensated by the coordinated curvature changes of liquid lenses 2 and 3), in this embodiment, during adjustment, the first liquid lens 41, the second liquid lens 42, and the third liquid lens 43 in the magnification liquid lens unit 4 are coordinated and controlled. Specifically, when there is a need to increase the magnification of the liquid zoom microscope system, the control module increases the voltage of the first liquid lens 41 and the third liquid lens 43 to a corresponding degree, thereby reducing the radius of curvature of the first liquid lens 41 and the third liquid lens 43 and shortening the equivalent focal length. At the same time, the voltage of the second liquid lens 42 is reduced to a corresponding degree, thereby increasing the radius of curvature of the second liquid lens 42 and lengthening the equivalent focal length. Thus, by matching the optical power of each liquid lens in the magnification liquid lens unit 4, the focal length of the system is shortened. Similarly, when there is a need to reduce the magnification of the liquid zoom microscope system, the control module reduces the voltage of the first liquid lens and the third liquid lens to a corresponding extent, and increases the voltage of the second liquid lens to a corresponding extent, thereby achieving the purpose of increasing the focal length of the system.

[0035] In addition, in this embodiment, the fourth liquid lens 51 is used for focus compensation. Specifically, when the liquid lenses in the magnification liquid lens unit 4 are adjusted to adjust the system magnification, the position of the rear principal surface of the system will change relatively, resulting in a change in the image distance. Therefore, the curvature of the fourth liquid lens 51 is changed to adjust the image distance so that the final image plane is always located on the target surface of the CMOS camera. Specifically, in this embodiment, based on the imaging formula 1 / f=1 / s'-1 / s ,in, s is the object distance from the field curvature correction lens 33 to the fourth liquid lens 51. Due to the limitation of the assembly relationship, the object distance is fixed. s’ The image distance from the fourth liquid lens 51 to the CMOS camera needs to be fixed; furthermore, when the system is adjusting the magnification, by adjusting f , that is, the curvature of the fourth liquid lens is changed by adjusting the control voltage of the control module to ensure s’It is unchanged (fixed), so that even if the liquid lenses in the magnification liquid lens unit 4 are adjusted to change the focal length, the total image distance can still be kept stable, thereby achieving continuous zooming without focal plane movement.

[0036] Thus, by adjusting the curvature of each liquid lens in the magnification liquid lens unit 4 in the opposite direction during zooming (e.g., when the magnification decreases, the voltages of the first and third liquid lenses are correspondingly reduced, while the voltage of the second liquid lens is correspondingly increased, making the first and third liquid lenses equivalent to convex lenses, and the second liquid lens equivalent to concave lenses), the spherical aberration of a single lens can be effectively offset. Furthermore, by optimizing the focal length distribution of each liquid lens group, the field curvature can be kept within the focal depth range (±5μm) of the CMOS camera as the focal length changes. Furthermore, because the material of each liquid lens is liquid, its refractive index varies little with wavelength. Combined with other solid lenses made of low-dispersion materials within the imaging objective assembly, the chromatic aberration of the overall system can be controlled within a range of ±0.5μm.

[0037] To verify the illumination uniformity of the liquid zoom microscope system, this example conducts simulation experiments based on the above structure in the optical simulation software ZEMAX. The results are shown in Figure 2 As shown. Among them, for Figure 2 The NSDD operands corresponding to the "Non-Sequential Evaluation Function: Uniformity" section are shown in the table below: "-10 0" represents the root mean square (RMS) difference between the X coordinate of all pixels with non-zero luminous flux on the entire detection screen and the X coordinate of the spot center; "-11 0" represents the RMS difference between the Y coordinate of all pixels with non-zero luminous flux on the entire detection screen and the Y coordinate of the spot center; "-4 0" represents the standard deviation of the luminous flux for all non-zero pixels. Target is set to 0; smaller values ​​indicate more uniformity. The numerical results in the figure show that this system's uniform illumination can achieve a spot uniformity greater than 95%.

[0038] Although some preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0039] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the inventive concept. Thus, if such modifications and variations of the present disclosure fall within the scope of the claims and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A liquid zoom microscope system, characterized in that: The device comprises a uniform light illumination assembly and an imaging objective lens assembly coaxially disposed on both sides of the stage, and a CMOS camera for acquiring an image of the imaging objective lens assembly and electrically connected to a display; the image-side numerical aperture of the uniform light illumination assembly is not less than the object-side numerical aperture of the imaging objective lens assembly; The uniform light illumination assembly includes a light source, a focusing lens, a lens array including a plurality of lens units, and a beam expander lens used to expand the beam of the light source in conjunction with the focusing lens. The imaging objective lens assembly includes a spherical aberration correction lens for correcting spherical aberration, an astigmatism correction lens for correcting coma and astigmatism, a magnification liquid lens unit for adjusting magnification and including 2 to 8 liquid lenses, a field curvature correction lens for assisting in correcting field curvature and convex toward the magnification liquid lens unit, and a focusing liquid lens unit for adjusting focal length and including 1 to 4 liquid lenses. The liquid zoom microscope system further includes a control module for controlling voltages corresponding to the magnification liquid lens unit and the focusing liquid lens unit respectively.

2. The liquid zoom microscope system according to claim 1, characterized in that: The diameter of each lens unit is 1-2 mm, the focal length is 5-10 mm, and the light transmittance is greater than 98%.

3. The liquid zoom microscope system according to claim 2, characterized in that: The focal length of the condenser lens is 78.5 mm; the diameter of each lens unit is 1.3 mm and the focal length is 5 mm; the focal length of the beam expander lens is -33.8 mm; the distance between the condenser lens and the lens array is 17.5 mm, and the distance between the lens array and the beam expander lens is 77.5 mm.

4. The liquid zoom microscope system according to claim 1, wherein: The surfaces of the condensing lens, the beam expanding lens, the spherical aberration correction lens, the astigmatism correction lens, and the field curvature correction lens are respectively provided with an anti-reflection film with a reflectivity less than 0.5%.

5. The liquid zoom microscope system according to claim 1, wherein: The magnification liquid lens unit includes a first liquid lens, a second liquid lens, and a third liquid lens; the focusing liquid lens unit includes a fourth liquid lens; the front and rear curvature radii of the spherical aberration correction lens are 42.17 mm and -6.6 mm respectively, and the thickness is 1.6 mm; the front and rear curvature radii of the astigmatism correction lens are -4.75 mm and -7.05 mm respectively, and the thickness is 1.9 mm; the front and rear curvature radii of the field curvature correction lens are 3.34 mm and 23.23 mm respectively, and the thickness is 7.83 mm; the spacing between the spherical aberration correction lens, the astigmatism correction lens, the first liquid lens, the second liquid lens, the third liquid lens, the field curvature correction lens, and the fourth liquid lens are 3.7 mm, 2 mm, 2.1 mm, 3.4 mm, 2.6 mm, and 9.8 mm, respectively.

6. A control method based on the liquid zoom microscope system according to claim 5, characterized in that: When there is a need to increase the magnification of the liquid zoom microscope system, the control module increases the voltages of the first liquid lens and the third liquid lens to a corresponding extent, decreases the voltage of the second liquid lens to a corresponding extent, and changes the curvature of the fourth liquid lens to a corresponding extent until the corresponding magnification requirement is achieved; when there is a need to decrease the magnification of the liquid zoom microscope system, the control module decreases the voltages of the first liquid lens and the third liquid lens to a corresponding extent, increases the voltage of the second liquid lens to a corresponding extent, and changes the curvature of the fourth liquid lens to a corresponding extent until the corresponding magnification requirement is achieved.

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