Transport device of display module and method of transmitting display module

Abstract

Disclosed is a transfer device including: a moving station configured to mount a display module; an ion generator located at one side of the mobile station and configured to be spaced apart from a side edge of the display module by a first space of at least about 5 cm; and a fixed moving unit disposed on the moving stage and configured to adsorb and move the display module, whereby it is possible to reduce an electrostatic discharge (ESD) failure during transmission of the display module.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority from Korean Patent Application No. 10-2024-0036384, filed on March 15, 2024, which is hereby incorporated by reference in its entirety. Technical Field

[0003] The present disclosure relates to a device for transferring a display module and a method for transferring a display module. Background Art

[0004] Multimedia devices such as televisions, laptops, navigation devices, and game consoles can display images to users through display screens and provide touch-based input methods, which enable users to input information or commands intuitively and conveniently. Electronic devices may include a display panel for generating images and an input sensor for sensing user touch.

[0005] Electrodes of input sensors and the like may be damaged due to static electricity generated in a process of manufacturing electronic devices, and therefore, it is desirable to develop a device and method for minimizing static electricity generated or transmitted in the process. Summary of the Invention

[0006] The present disclosure provides a transfer device that can minimize electrostatic discharge (ESD) failures.

[0007] The present disclosure also provides a method of transferring a display module, which can reduce or minimize electrostatic discharge during the transfer of the display module.

[0008] An embodiment of the conveying device includes: a moving platform configured to mount a display module; an ion generator located at one side of the moving platform and configured to be spaced apart from a side edge of the display module by a first space of approximately 5 cm or more; and a fixed moving unit disposed on the moving platform and configured to adsorb and move the display module.

[0009] In an embodiment, the fixing movement unit may include a vacuum suction unit having a suction hole; and a pick-up pad surrounding at least a portion of the vacuum suction unit and configured to contact the display module.

[0010] In an embodiment, the vacuum suction unit may be provided with a metal material, and the vacuum suction unit may be configured to be spaced apart from the display module by a second space of about 3 mm or more.

[0011] In an embodiment, the surface resistivity of the pickup pad may be about 10 12 Ω / sq or greater.

[0012] In an embodiment, the first space may be at least about 10 cm.

[0013] In an embodiment, the display module may include an active area and a pad area disposed at at least one side of the active area and having a plurality of pads disposed therein, and the first space may be between an edge of the pad area and the ionizer.

[0014] In an embodiment, the mobile station may be configured to mount the display module, wherein at least a portion of the pad region protrudes from a side of the mobile station.

[0015] In an embodiment, the display module may include a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and the fixing moving unit may be configured to be adsorbed to a side of the input sensor of the display panel.

[0016] In an embodiment, the mobile station may be configured to mount a plurality of display modules, and the plurality of display modules may be arranged parallel to one side of the ionizer.

[0017] An embodiment of the conveying device includes: a moving platform configured to mount a display module; an ion generator spaced apart from one side of the moving platform; and a fixed moving unit disposed on the moving platform and configured to adsorb and move the display module, wherein the fixed moving unit includes a vacuum suction unit having a suction hole and a pickup pad surrounding at least a portion of the vacuum suction unit and contacting the display module, and wherein the ion generator can be configured to be spaced apart from a side edge of the display module by a first space of approximately 5 cm or more, and the vacuum suction unit can be configured to be spaced apart from a top surface of the display module by a second space of approximately 3 mm or more.

[0018] In an embodiment, the vacuum suction unit may be provided with a metal material, and the pickup pad may be provided with a polymer material.

[0019] In an embodiment, the surface resistivity of the pickup pad may be about 10 12 Ω / sq or greater.

[0020] In an embodiment, the display module may include an active area and a pad area disposed at at least one side of the active area and having a plurality of pads disposed therein, and the first space may be between an edge of the pad area and the ionizer.

[0021] In an embodiment, the display module may include a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and the fixing moving unit may be configured to be adsorbed to a side of the input sensor of the display panel.

[0022] An embodiment of a method for transporting a display module includes: setting the display module on a moving stage; arranging the display module and an ion generator to be spaced apart by a space of approximately 5 cm or more; ion-treating the display module using the ion generator to form an ion-treated display module; and moving the ion-treated display module from the moving stage using a fixed moving unit.

[0023] In an embodiment, the fixed moving unit may include a vacuum suction unit having a suction hole defined therethrough and a pickup pad surrounding at least a portion of the vacuum suction unit, and wherein moving the display module from the moving table may include: bringing the fixed moving unit close to the display module so that the pickup pad contacts a top surface of the display module; fixing the display module to the fixed moving unit; and moving the fixed moving unit to transfer the display module from the moving table to a transfer tray.

[0024] In an embodiment, the method may further include inspecting the display module between performing the ion treatment on the display module and moving the display module from the moving stage using the fixed moving unit.

[0025] In an embodiment, the fixing moving unit may include a vacuum suction unit having a suction hole and a pickup pad surrounding at least a portion of the vacuum suction unit and contacting the display module, and the vacuum suction unit and the display module may be spaced apart by a second space of about 3 mm or more.

[0026] In an embodiment, the method may further include inspecting the display module between performing the ion treatment on the display module and moving the display module from the moving stage using the fixed moving unit.

[0027] In an embodiment, the surface resistivity of the pickup pad may be about 10 12 Ω / sq or greater.

[0028] In an embodiment, the display module may include a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and the fixing moving unit may be adsorbed to a side of the input sensor of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are included to provide a further understanding of the inventive concept and are incorporated into and constitute a part of this specification. The accompanying drawings illustrate embodiments of the inventive concept and, together with the description, serve to explain the principles of the inventive concept. In the drawings:

[0030] Figure 1 is a block diagram of a display device manufacturing apparatus according to an embodiment of the present inventive concept;

[0031] Figure 2 is a perspective view of a display module according to an embodiment;

[0032] Figure 3A is a cross-sectional view of a display module according to an embodiment;

[0033] Figure 3B is a cross-sectional view of a display module according to an embodiment;

[0034] Figure 4 is a perspective view of a conveying device according to an embodiment;

[0035] Figure 5 is a perspective view of a mobile station according to an embodiment;

[0036] Figure 6 is a perspective view of an ion generator according to an embodiment of the present inventive concept.

[0037] Figure 7 shows an exemplary positional relationship between a moving stage and an ion generator according to an embodiment;

[0038] Figure 8 is a perspective view of a fixed moving unit according to an embodiment;

[0039] Figure 9 is a perspective view of a portion of a fixed moving unit according to an embodiment;

[0040] Figure 10A 、 Figure 10B and Figure 10C Each is a cross-sectional view of a fixed moving unit according to an embodiment;

[0041] Figure 11 shows an exemplary operating state of a fixed mobile unit according to an embodiment;

[0042] Figure 12 shows a bottom surface of a fixed moving unit according to an embodiment;

[0043] Figure 13 The steps of a method for transferring a display module using a transfer device according to an embodiment are shown;

[0044] Figure 14 is a flowchart of steps of a method of transferring a display module according to an embodiment; and

[0045] Figure 15 is a flowchart of steps of a method of transferring a display module according to an embodiment. DETAILED DESCRIPTION

[0046] The present disclosure can be variously modified and implemented in various forms, and therefore will be illustrated in the accompanying drawings and described in detail below in detail. However, it will be understood that the present disclosure is not intended to be limited to the specific forms set forth herein, and includes all changes, equivalents, and substitutions included in the technical scope and spirit of the claims.

[0047] It will be understood that when an element or layer is referred to as being “on,” “connected to” or “coupled to” another element or layer, it can be directly on, connected to or coupled to the other element, or an intervening third element may be present.

[0048] The same reference numerals in the accompanying drawings represent the same elements. In addition, in the accompanying drawings, the thickness, proportions, and sizes of the elements are exaggerated in order to effectively describe the technical content. As used herein, the word "or" means a logical "or" so that unless the context indicates otherwise, the expression "A, B, or C" means "A and B and C," "A and B but not C," "A and C but not B," "B and C but not A," "A but not B and not C," "B but not A and not C," and "C but not A and not B."

[0049] Terms such as first, second, etc. can be used to describe various elements, but these elements should not be limited by these terms. Such terms are only used to distinguish one element from other elements. For example, without departing from the scope of this disclosure, a first component can be referred to as a second component, or similarly, a second component can be referred to as a first component. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0050] In addition, terms such as "below," "lower," "above," and "upper" are used to describe the relationship of the configurations shown in the drawings. The terms are used as relative concepts and are described with reference to the directions indicated in the drawings.

[0051] It should be understood that the terms “comprise,” “include,” and “have” (and variations such as “comprising”) are intended to specify the presence of stated features, integers, steps, operations, elements, components, or combinations thereof in the present disclosure, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

[0052] It should be understood that "directly disposed" may mean that there are no additional layers, films, regions, plates, etc. between one portion and another portion of a layer, film, region, plate, etc. For example, "directly disposed" may mean that disposing two layers or two components is performed without using an additional component such as an adhesive component therebetween.

[0053] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art to which the exemplary embodiments belong. In addition, it will be further understood that terms (such as those defined in commonly used dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless explicitly defined as such herein.

[0054] Hereinafter, a transfer apparatus and a method of transferring a display module using the transfer apparatus according to an embodiment will be described.

[0055] Figure 1 1 is a block diagram of a display device manufacturing apparatus according to an embodiment of the present inventive concept. The display device manufacturing apparatus 10 may include a supply unit LDU, an ion treatment unit ITU, and a moving unit TRU. In addition, the display device manufacturing apparatus 10 according to an embodiment may further include an inspection unit ISU. Figure 1 The display device manufacturing apparatus 10 briefly shows a part of the manufacturing apparatus, in which the display module DM (see Figure 2 ) after which ion processing, inspection, and the like are performed, and then a step of moving the display module to the mobile unit TRU is performed.

[0056] The supply unit LDU in the display device manufacturing apparatus 10 according to the embodiment may be a device for storing and moving the display modules DM manufactured in the previous steps (see FIG. Figure 2 ) and then transfers the display module to the part of the ion treatment unit ITU. The supply unit LDU may be referred to as an unloader.

[0057] Display module DM (see Figure 2 ) can use the transmission device TMU of the embodiment described below (see Figure 4 ) is transferred to the ion treatment unit ITU. The ion treatment unit ITU can perform an ion treatment process using an ion generator to reduce electrostatic discharge. The transfer device TMU of the embodiment (see Figure 4 ) may be provided in the ion processing unit ITU. The ion processing unit ITU may have a chamber shape and be distinguished from other units of the display device manufacturing apparatus 10. However, the embodiment is not limited thereto, and the ion processing unit ITU may be provided in an open space so that the display module can be easily moved between the adjacent supply unit LDU, mobile unit TRU, and inspection unit ISU.

[0058] In an embodiment, a transport unit TMU is provided (see Figure 4) can be referred to as the ion processing unit ITU. In order to move the display module to the adjacent supply unit LDU, mobile unit TRU and inspection unit ISU, in addition to the ion processing unit ITU, the transport device TMU (see Figure 4 )'s components can be moved to the supply unit LDU, the mobile unit TRU, the inspection unit ISU, etc.

[0059] The mobile unit TRU in the display device manufacturing apparatus 10 of the embodiment may be a unit for moving the display module ion-treated in the ion treatment unit ITU. The ion-treated display module is moved to other facilities of the display device manufacturing apparatus 10 using the mobile unit TRU and then manufactured into a display device through a continuous process.

[0060] The inspection unit (ISU) in the display device manufacturing apparatus 10 of the embodiment can be used to inspect the quality of the display module. The inspection unit (ISU) can inspect the operation and appearance quality of the display module. Static electricity in the display module is eliminated by ion treatment in the ion treatment unit (ITU) after being supplied by the supply unit (LDU). For example, the inspection unit (ISU) can inspect the operational performance of the display module's input sensor.

[0061] The display module inspected by the inspection unit ISU may be moved to the mobile unit TRU. The display module may be transferred from the inspection unit ISU directly to the mobile unit TRU, or from the inspection unit ISU to the mobile unit TRU via the ion processing unit ITU.

[0062] The steps of the display device manufacturing method using the display device manufacturing apparatus 10 according to the embodiment may include the steps of transferring the manufactured display module to the supply unit LDU and transferring the manufactured display module from the supply unit LDU to the ion processing unit ITU. The display module may then be ion-processed in the ion processing unit ITU and moved to the mobile unit TRU, or may be ion-processed in the ion processing unit ITU, quality-checked in the inspection unit ISU, and then moved to the mobile unit TRU. In addition, the display module may be ion-processed in the ion processing unit ITU, fully quality-checked in the inspection unit ISU, re-transferred to the ion processing unit ITU, and then moved to the mobile unit TRU.

[0063] Figure 1 The block diagram of a display device manufacturing apparatus 10 or a portion of an apparatus for performing a method of transferring a display module according to an embodiment is schematically shown. A transfer apparatus according to an embodiment described below is provided in the display device manufacturing apparatus 10. Therefore, the display device manufacturing apparatus 10 is not limited to the block diagram shown and may include other components without limitation as long as the components are configured to perform the functions shown.

[0064] Figure 2 、 Figure 3A and Figure 3B A display module transferred using a transfer device according to an embodiment is shown. Figure 2 is a perspective view of a display module according to an embodiment. Figure 3A and Figure 3B Each corresponds to Figure 2 Cross-sectional view along line II'.

[0065] According to an embodiment, an active area AA and a peripheral area NAA may be defined in the display module DM. The active area AA may be activated according to an electrical signal. The peripheral area NAA may be provided on at least one side of the active area AA. In an embodiment, the peripheral area NAA may surround the active area AA.

[0066] The area in the peripheral area NAA in which the pads PD and VID are provided may be referred to as a pad area PDA. The pad area PDA may be a part of the peripheral area NAA. The pad area PDA may be provided with a driving circuit or a driving line for driving the components of the active area AA. The driving pads PD provided in the pad area PDA may be electrically connected to the display panel DP or the input sensor ISP. The inspection pads VID may be used to check the operating status, disconnection, etc. of the driving wiring, sensor electrodes, etc. For the display module DM, the pads PD and VID may be exposed. That is, the display module DM transmitted using the transmission device of the embodiment may be transmitted with the pads PD and VID exposed to the outside. Through the pads PD and VID of the display module DM, the inspection unit ISU may check whether the display module DM is operating normally.

[0067] The display module DM transferred using the transfer device of the embodiment can be used in electronic devices such as monitors, tablet computers, notebook computers, etc. For example, the display module DM transferred using the transfer device of the embodiment can be used in large and medium-sized electronic devices and have a large display surface.

[0068] Figure 2The first to third directional axes DR1 to DR3 are shown in the drawings and other figures, and the directions indicated by the first, second, and third directional axes DR1, DR2, and DR3 described herein may be relative concepts and may be changed to other directions. Furthermore, the directions indicated by the first, second, and third directional axes DR1, DR2, and DR3 may be described as the first, second, and third directions DR3, and may be designated by the same reference numerals. The first and second directional axes DR1 and DR2 described herein may be orthogonal to each other, and the third directional axis DR3 may be a normal direction to a plane defined by the first and second directional axes DR1 and DR2.

[0069] The thickness direction of the display module DM can be parallel to the third directional axis DR3, which is the normal direction of the plane defined by the first directional axis DR1 and the second directional axis DR2. The display module DM can provide an image to the user through the display surface. In this specification, the front surface (or top surface) and the rear surface (or bottom surface) of each component are defined based on the direction in which the image is displayed.

[0070] In this specification, the expression "in a plan view" may refer to a state observed in the third direction DR3. In this specification, the expression "in a cross-sectional view" may refer to a state observed in the first direction DR1 or the second direction DR2.

[0071] The display module DM may include a display panel DP and an input sensor ISP disposed on the display panel DP. The display panel DP and the input sensor ISP may be stacked in a third direction DR3.

[0072] Figure 3A is a cross-sectional view illustrating the structure of the display panel DP in detail The display panel DP according to an embodiment may include a base layer BS, a circuit layer DP-CL, a display element layer DP-ED, and an encapsulation layer TFE.

[0073] The base layer BS may be a member configured to provide a base surface on which the circuit layer DP-CL is provided. The base layer BS may be a rigid substrate or a flexible substrate that is bendable, foldable, rollable, etc. The base layer BS may be a glass substrate, a metal substrate, a polymer substrate, etc. However, embodiments are not limited thereto, and the base layer BS may be an inorganic layer, an organic layer, or a composite material layer.

[0074] The circuit layer DP-CL can be provided on the base layer BS. The circuit layer DP-CL may include an insulating layer, a semiconductor pattern, a conductive pattern, signal wiring, and the like. The insulating layer, semiconductor layer, and conductive layer may be provided on the base layer BS by coating, deposition, or the like, and then selectively patterned through multiple photolithography processes. The semiconductor pattern, conductive pattern, and signal lines included in the circuit layer DP-CL may then be provided. The circuit layer DP-CL may include multiple inorganic insulating layers and multiple organic insulating layers as insulating layers.

[0075] The display element layer DP-ED may be disposed on the circuit layer DP-CL. The display element layer DP-ED may include light-emitting elements. For example, the display element layer DP-ED may include organic light-emitting materials, inorganic light-emitting materials, organic-inorganic light-emitting materials, quantum dots, quantum rods, micro-LEDs, or nano-LEDs. The light-emitting elements of the display element layer DP-ED may be electrically connected to the driving elements of the circuit layer DP-CL and generate light in response to signals provided by the driving elements to display images.

[0076] The encapsulation layer TFE may be disposed on the display element layer DP-ED. The encapsulation layer TFE may protect the display element layer DP-ED from moisture, oxygen, and foreign matter such as dust particles. The encapsulation layer TFE may encapsulate the light-emitting element of the display element layer DP-ED. The encapsulation layer TFE may include at least one thin film for improving the optical efficiency of the display element layer DP-ED or protecting the display element layer DP-ED.

[0077] The input sensor ISP may be provided on the display panel DP. The input sensor ISP may sense external input applied from the outside. The external input may include various types of external inputs, including a part of the user's body, light, heat, a pen, pressure, and the like. The input sensor ISP may provide an input signal including information about the external input, so that the display panel DP may sense the external input and generate an image corresponding to the external input. The input sensor ISP may be driven in various ways using static capacitance, a resistive film, infrared rays, sound waves, or pressure, and the driving method is not limited to a specific method. In an embodiment, the input sensor ISP will be described as being driven in a static capacitance manner.

[0078] The input sensor ISP may be disposed on the display panel DP through a continuous process. In this case, the input sensor ISP may be directly disposed on the display panel DP. Directly disposed may mean that no third element is disposed between the input sensor ISP and the display panel DP. In other words, a separate adhesive member may not be disposed between the input sensor ISP and the display panel DP.

[0079] refer to Figure 3BThe input sensor ISP may include a sensor base layer ISL-B, sensor conductive layers MTL1 and MTL2, and sensor insulating layers ISL-C and ISL-T. The sensor base layer ISL-B may be directly disposed on the display panel DP.

[0080] The input sensor ISP may include a sensor base layer ISL-B, sensor conductive layers MTL1 and MTL2 disposed on the sensor base layer ISL-B, and sensor insulating layers ISL-C and ISL-T disposed on the sensor base layer ISL-B. For example, the input sensor ISP in an embodiment may include a sensor base layer ISL-B, a first sensor conductive layer MTL1, a first sensor insulating layer ISL-C, a second sensor conductive layer MTL2, and a second sensor insulating layer ISL-T sequentially stacked on the display panel DP in the third direction DR3.

[0081] The sensor base layer ISL-B may be an inorganic layer including at least one of silicon nitride, silicon oxynitride, and silicon oxide. Alternatively, the sensor base layer ISL-B may be an organic layer including epoxy resin, acrylic resin, or imide resin. The sensor base layer ISL-B may have a single-layer structure or a multi-layer structure having layers stacked in the third direction DR3.

[0082] Each of the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may include silicon nitride (SiN X ) and silicon oxynitride (SiO X N Y ) In addition, each of the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may include silicon oxide (SiO X ). Meanwhile, the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may include aluminum oxide, titanium oxide, zirconium oxide, and hafnium oxide as inorganic layers. X ), silicon oxynitride (SiO X N Y ) and silicon oxide (SiO X ), X and Y are each greater than 0.

[0083] The first sensor insulating layer ISL-C may be disposed on the first sensor conductive layer MTL1. The second sensor insulating layer ISL-T may be disposed on the second sensor conductive layer MTL2. The first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may each include an inorganic film. Alternatively, the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may each include an organic film.

[0084] When the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T each include an organic film, the organic film may include at least one of an acrylic-based resin, a methacrylic-based resin, a polyisoprene-based resin, a vinyl-based resin, an epoxy-based resin, a urethane-based resin, a cellulose-based resin, a siloxane-based resin, a polyimide-based resin, a polyamide-based resin, and a polyparaxylene-based resin.

[0085] Each of the first sensor conductive layer MTL1 and the second sensor conductive layer MTL2 may have a single-layer or multi-layer structure. A multi-layered sensor conductive layer may have two or more transparent conductive layers or metal layers. For example, a multi-layered sensor conductive layer may have a structure in which a transparent conductive layer and a metal layer are stacked, or metal layers including different metals are stacked.

[0086] The transparent conductive layer included in the first sensor conductive layer MTL1 and the second sensor conductive layer MTL2 may include indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium tin zinc oxide (ITZO), PEDOT, metal nanowires, graphene, etc. The metal layer included in the first sensor conductive layer MTL1 and the second sensor conductive layer MTL2 may include molybdenum, silver, copper, aluminum, or alloys thereof.

[0087] at the same time, Figure 3B The input sensor ISP is shown as including a stacked first sensor conductive layer MTL1 and a second sensor conductive layer MTL2, but embodiments are not limited thereto. For example, in embodiments, the input sensor ISP may include a single sensor conductive layer disposed on the sensor base layer ISL-B. In this case, one of the first sensor insulating layer ISL-C and the second sensor insulating layer ISL-T may be omitted.

[0088] When static electricity is generated by metal materials in the first and second sensor conductive layers MTL1 and MTL2, static electricity may be discharged. In this case, a portion of the sensor conductive layers MTL1 and MTL2 may be disconnected, or a connection portion where the sensor conductive layers MTL1 and MTL2 are connected to each other may burn.

[0089] Therefore, when a metal material or a charged material contacts or rubs against the top of the display module DM including the input sensor ISP, the display module DM is likely to be damaged. Therefore, when transporting the display module DM, a transport device and a transport method for effectively eliminating static electricity and not causing contact electrification are required.

[0090] Figure 42 is a perspective view of a transport device according to an embodiment. The transport device TMU of the embodiment may include a mobile stage MST, an ionizer INZ, and a fixed mobile unit FXM. The ionizer INZ may be provided on one side of the mobile stage MST. The fixed mobile unit FXM may be located above the mobile stage MST.

[0091] Meanwhile, the transport device TMU of the embodiment may further include a plurality of control units CUN-M, CUN-I, and CUN-P. The transport device TMU of the embodiment may include a stage control unit CUN-M configured to adjust the movement and arrangement of the mobile stage MST, an ion generator control unit CUN-I configured to control movement, arrangement, ion generation, and ion supply amount, and a movement control unit CUN-P configured to control the movement and arrangement of the fixed mobile unit FXM and the degree of adsorption of the display module DM.

[0092] The transmission device TMU of the embodiment can be set according to Figure 1 The ion processing unit ITU in the display device manufacturing apparatus 10 of the embodiment shown in FIG (see Figure 1 In addition, the fixed mobile unit FXM of the conveying device TMU in the embodiment can be moved to other components of the display device manufacturing apparatus 10 adjacent to the ion processing unit ITU, for example, the supply unit LDU, the inspection unit ISU, the mobile unit TRU, etc.

[0093] The ion generator INZ in the transfer device TMU of the embodiment may be located at one side of the display module DM mounted on the mobile station MST. The mobile station MST may have the display module DM mounted thereon, and the ion generator INZ may be provided on the pad area PDA side of the display module DM mounted on the mobile station MST.

[0094] The stage control unit CUN-M may be a portion configured to adjust the position of the mobile stage MST. In addition, the stage control unit CUN-M may control the display module DM to be mounted thereon and fixed.

[0095] The ionizer INZ can provide ions to prevent electrostatic discharge in the display module DM. The ionizer control unit CUN-I can control the movement and operation of the ionizer INZ. In addition to the ionizer control unit CUN-I, the ionizer INZ may also include an operation control line CL-M and a static elimination control line CL-I. The operation control line CL-M may be a component that provides signals for controlling the placement and movement of the ionizer INZ, and the static elimination control line CL-I may be a component that provides signals for controlling the type and degree of static elimination of ions generated and emitted from the ionizer INZ.

[0096] The fixed mobile unit FXM can be fixed to move the display module DM. The fixed mobile unit FXM can be fixed to move the display module DM to the top of the mobile station MST, or to pick up the display module DM from the mobile station MST to move the display module DM to another location. The movement control unit CUN-P can adjust the movement of the fixed mobile unit FXM and the fixing strength of the display module DM.

[0097] Figure 5 is a perspective view of a mobile station according to an embodiment. Figure 4 and Figure 5 The display module DM may be mounted on the mobile station MST. One side of the display module DM may be configured to protrude from the mobile station MST to be adjacent to the ion generator INZ. For example, at least a portion of the pad area PDA of the display module DM may be configured to protrude from the mobile station MST.

[0098] The top surface US-MST of the mobile station MST may be defined with vacuum suction holes VH, and the display module DM may be adsorbed and fixed to the mobile station MST through the vacuum suction holes VH.

[0099] The mobile station MST may move in an X direction X or a Y direction Y. The X direction X may be parallel to the first direction DR1, and the Y direction Y may be parallel to the second direction DR2. However, the embodiment is not limited thereto, and the mobile station MST may move on a plane defined by the first direction DR1 and the second direction DR2.

[0100] A plurality of display modules DM may be mounted on the mobile station MST and arranged such that the pad area PDA side is adjacent to the ion generator INZ.

[0101] Figure 6 is a perspective view of an ion generator according to an embodiment of the present inventive concept. Figure 4 and Figure 6 The ionizer INZ included in the transport unit TMU of the embodiment may include an irradiation unit SIP configured to directly irradiate with ions, and an irradiation control unit AGM configured to fix and change the direction of the irradiation unit SIP. The irradiation unit SIP and the irradiation control unit AGM of the ionizer INZ may be controlled and operated by the ionizer control unit CUN-1.

[0102] In the edge portion ED-INZ of the irradiation unit SIP, an emission hole HL-IZ from which ions are directly irradiated is provided. A plurality of emission holes HL-IZ may be defined in the edge portion ED-INZ.

[0103] Positive (+) ions may be emitted from some of the emission holes HL-IZ, and negative (-) ions may be emitted from other emission holes in the emission holes HL-IZ. Positive and negative ions may be irradiated simultaneously or alternately at intervals. This ion irradiation method is merely an example, and the operation type of the ion generator INZ is not limited to that described above.

[0104] Figure 7 An exemplary positional relationship between the mobile station MST and the ion generator INZ is shown. Figure 7 In FIG, X represents the moving direction of the mobile stage MST, and X-IZ represents the moving direction of the ionizer INZ. Figure 7 The ionizer INZ may be located on one side of the mobile stage MST on which the display module DM is mounted. In the conveying device of the embodiment, the first space SP between one side edge ED-DM of the display module DM and the ionizer INZ may be approximately 5 cm or longer. For example, in the conveying device of the embodiment, the first space SP between one side edge ED-DM of the display module DM and the ionizer INZ may be approximately 10 cm or longer. Specifically, in the conveying device of the embodiment, the first space SP between one side edge ED-DM of the display module DM and the ionizer INZ may be approximately 5 cm to approximately 50 cm.

[0105] In an embodiment, the first space SP may be a space between an edge of the pad area PDA and the ionizer INZ. In addition, in an embodiment, the first space SP may be a space between the emission hole HL-IZ of the ionizer INZ and one side edge ED-DM of the display module DM.

[0106] With the conveying device of the embodiment in which the position of the ionizer INZ is adjusted so that the first space SP is at least about 5 cm, electrification of the sensor conductive layer of the input sensor caused by ion contact irradiation can be prevented.

[0107] When the distance between one side edge ED-DM of the display module DM and the ionizer INZ is less than approximately 5 cm, an increase in the amount of ions directly irradiated on the display module DM may cause discharge in the sensor conductive layer of the input sensor included in the display module DM. Furthermore, when the distance between one side edge ED-DM of the display module DM and the ionizer INZ is greater than approximately 50 cm, the static elimination effect of the ionizer INZ may be reduced.

[0108] Table 1 shows the failure rate due to electrostatic discharge depending on the difference in spacing between the display module and the ionizer. The failure rate in Table 1 shows the failure rate due to damage to the input sensor. In Comparative Example 1, the display module was transported using a transport device in which the spacing between the ionizer and the display module was less than approximately 5 cm, and in Example 1, the display module was transported using a transport device according to an embodiment in which the spacing between the ionizer and the display module was at least approximately 5 cm.

[0109] [Table 1]

[0110] category Comparative Example 1 Example 1 Failure rate (%) 0.56 0.07

[0111] When comparing Comparative Example 1 and Example 1, it can be understood that the failure rate of Example 1 is reduced by about 88% compared to Comparative Example 1. In other words, for Example 1 using the transmission device of the embodiment in which the space between the ion generator and the display module is at least about 5 cm, it can be understood that electrostatic discharge is reduced and the failure rate of the input sensor is significantly improved.

[0112] Figure 8 FIG. 1 shows a fixed mobile unit according to an embodiment. Figure 4 and Figure 8 , the fixed mobile unit FXM in the transport device TMU in the embodiment may include a pickup unit FP and a transport unit MP.

[0113] Each of the pickup units FP in the fixed moving unit FXM may include a vacuum suction unit MH and a pickup pad FPD. The vacuum suction unit MH may be defined with a suction hole HL (see Figure 9 Suction hole HL (see Figure 9 ) can be a through hole. The display module DM can be through the suction hole HL (see Figure 9 ) is adsorbed to be fixed using a vacuum state. However, the vacuum suction unit MH may not directly contact the display module DM, and the suction hole HL (see Figure 9 ) may be spaced apart from the top surface of the display module DM.

[0114] The pickup pad FPD may surround at least a portion of the vacuum suction unit MH. The pickup pad FPD may be a portion that directly contacts the display module DM.

[0115] Figure 9 is a perspective view of a pickup unit FP according to an embodiment of the present inventive concept. Figure 9 , the fourth direction DR4 is the opposite direction of the third direction DR3. Figures 10A to 10C Each shows a cross section of a pickup unit FP according to an embodiment. Figure 9 as well as Figures 10A to 10C, the pickup pad FPD may expose at least a portion of the suction hole HL and surround an edge portion of the vacuum suction unit MH.

[0116] refer to Figure 10A , the inner diameter W of the vacuum suction unit MH having the suction hole HL defined therethrough in the pickup unit FP included in the fixed moving unit FXM of the embodiment MH may be smaller than the width W of the opening defined on the bottom of the pickup pad FPD PD1 , so that the display module DM can be sucked. However, embodiments of the inventive concept are not limited thereto.

[0117] according to Figure 10B The inner diameter W of the vacuum suction unit MH in the pickup unit FP-a of the embodiment shown in FIG. MH may be larger than the width W of the opening defined on the bottom of the pickup pad FPD PD2 , so as to surround the vacuum suction unit MH and be able to suck the display module DM. Figure 10C The inner diameter W of the vacuum suction unit MH in the pickup unit FP-b of the embodiment shown in FIG. MH may be substantially equal to the width W of the opening defined on the bottom of the pickup pad FPD PD3 , so as to surround the vacuum suction unit MH and be able to suck the display module DM.

[0118] exist Figure 9 as well as Figures 10A to 10C In the figure, the pickup pad FPD is shown as having a width that gradually widens from the top surface to the bottom surface in a cross-sectional view. However, this is merely an example, and the shape of the pickup pad FPD is not limited thereto. The shape of the pickup pad FPD is not particularly limited, as long as it allows the vacuum unit MH to secure and move the display module without directly contacting the display module and using the vacuum provided by the vacuum unit MH.

[0119] Figure 11 An example state in which the pickup unit is located on the display module is shown. Figure 12 An exemplary bottom portion of a pickup unit is shown. Figure 11 and Figure 12 The reference Figure 9 and Figure 10A The described embodiment uses the display module adsorption state of the pickup unit FP and the bottom surface shape of the pickup unit FP.

[0120] refer to Figure 11 and Figure 12 , the vacuum suction unit MH in the conveying device of the embodiment can be in the second space t SP The second space t is spaced apart from the top surface US-DM of the display module DM.SP The second space t may be at least about 3 mm. SP The upper limit value of is not particularly limited, and the second space t may be determined in consideration of whether the display module DM can be stably fixed and moved by the vacuum suction unit MH. SP That is, the second space t SP The upper limit value of may be determined according to the level of the vacuum state provided by the vacuum suction unit MH of the pickup unit FP.

[0121] The vacuum suction unit MH may be provided with a metal material. Therefore, when the vacuum suction unit MH and the display module DM become adjacent to each other by about 3 mm or less, electrostatic discharge may occur in the display module DM due to the vacuum suction unit MH.

[0122] Table 2 below shows a range of voltage at which electrostatic discharge occurs according to a space between the vacuum suction unit MH and the display module DM.

[0123] [Table 2]

[0124] Space (mm) 1 3 5 ESD voltage (V) 400 1500 100000

[0125] Referring to Table 2, when the vacuum suction unit MH and the display module DM are spaced at least about 3 mm apart and a voltage of at least about 1500 V is induced, electrostatic discharge may occur. Therefore, when the vacuum suction unit MH and the display module DM are spaced at least about 3 mm apart, the display module DM may be safely fixed and transferred using the pickup unit FP. When the pickup unit FP moves toward the display module DM and fixes the display module DM, the pickup pad FPD may be disposed to contact the top surface US-DM of the display module DM. The top surface US-DM of the display module DM in contact with the pickup pad FPD may be an input sensor ISP (see Figure 2 )side.

[0126] refer to Figure 11 and Figure 12 The pickup pad FPD may surround the vacuum suction unit MH having the suction hole HL defined therein. The bottom surface FPD-B of the pickup pad FPD may contact the top surface US-DM of the display module DM. The pickup pad FPD may surround at least a portion of the vacuum suction unit MH so that the vacuum suction unit MH does not directly contact the display module DM, and the space between the vacuum suction unit MH and the display module DM may be maintained by the pickup pad FPD.

[0127] The pickup pad FPD may include a polymer material. The surface resistivity of the pickup pad FPD may be at least about 10 12 Ω / sq. When the surface resistivity is at least about 10 12When the pickup pad FPD of Ω / sq is adsorbed onto the display module DM, electrification caused by the contact of the pickup pad FPD can be reduced, and electrostatic discharge failure caused by the contact of the pickup pad FPD can be reduced.

[0128] Table 3 shows the failure rate of electrostatic discharge according to the difference in surface resistivity value of the pickup pad. The failure rate in Table 3 shows the failure rate due to damage of the input sensor. Comparative Example 2 is a method using a device including a device having about 10 6 to about 10 9 Ω / sq, and Example 2 is a method for measuring the failure rate of display modules transferred by a transfer device of a pickup unit having a surface resistivity of at least about 10 Ω / sq. 12 The failure rate of the display modules transmitted by the transmission device of the embodiment of Ω / sq.

[0129] In Table 3, in both Comparative Example 2 and Example 2, failure rate comparison results were measured in a state in which the space between the vacuum suction unit in the pickup unit and the display module was equal to about 3 mm.

[0130] [Table 3]

[0131] category Comparative Example 2 Example 2 Failure rate (%) 9.92 4.24

[0132] When comparing Comparative Example 2 and Example 2, it can be understood that the failure rate of Example 2 is reduced by about 57% compared to Comparative Example 2. In other words, for a device using a substrate in which the surface resistivity of the pickup pad is at least about 10 12 As can be understood from the example 2 of the transmission device of the embodiment of Ω / sq, electrostatic discharge is reduced and the failure rate of the input sensor is significantly improved. Figure 8 The fixed moving unit FXM in the conveying device of the embodiment may include a plurality of pickup units FP. The plurality of pickup units FP may be fixed to the conveying unit MP to be moved simultaneously. The plurality of pickup units FP may be used to simultaneously convey a plurality of display modules DM.

[0133] Figure 13 The following are exemplary steps of a method of operating a conveying device according to an embodiment. Figure 13 The display module DM mounted on the mobile station MST can be moved from the mobile station MST using the pickup unit FP. The display module DM can be in a position where static electricity has been eliminated using an ionizer and has been inspected by the inspection unit ISU (see Figure 1 Here, the moving direction PD1 of the fixed moving unit including the pickup unit FP may be a direction for separating the display module DM from the mobile station MST.

[0134] The display module DM held by the pickup unit FP can then be transferred from the mobile station MST to the mobile unit TRU (see Figure 1 ). Figure 13 A transfer tray TR is shown as an exemplary moving unit. The moving direction PD2 of the fixed moving unit including the pickup unit FP may be a direction in which the display module DM is transferred toward the transfer tray TR.

[0135] The display module DM transported toward the transport tray TR can be placed on the transport tray TR, and then the pickup unit FP can be desorbed from the display module DM. The moving direction PD3 of the fixed moving unit including the pickup unit FP on the transport tray TR can be a direction adjacent to the transport tray TR or a direction spaced apart from the transport tray TR.

[0136] The display module DM transferred to the transfer tray TR may be manufactured into a display device through additional display device manufacturing processes. For example, after being transferred to the transfer tray TR, various processes may be performed, including a process for bonding optical components such as a polarizing plate to the display module DM, a process for attaching a driving circuit board, and a process for encapsulating the display module DM with a housing.

[0137] The conveying device of the embodiment may include a moving stage, an ion generator, and a fixed moving unit, and reduces the failure rate caused by static electricity by setting the space between the ion generator and the display module placed on the moving stage to at least about 5 cm and preventing static electricity discharge in the display module during ion contact irradiation. In addition, the conveying device of the embodiment may be configured to set the space between the vacuum suction unit in the fixed moving unit and the display module to at least about 3 mm and the surface resistivity of the pickup pad to at least about 10 12 Ω / sq to prevent electrostatic discharge due to contact of the fixed moving unit, and the fixed moving unit can be used to effectively transfer the display module.

[0138] Furthermore, the conveying device of the embodiment can reduce electrostatic discharge failures in display modules during the conveyance of display modules including input sensors. Specifically, for display modules having a medium or large display surface with a large area, a process can be employed in which a fixed moving unit is brought into direct contact with the top surface of the display module. In this case, even when the fixed moving unit is in direct contact, electrostatic failures can be minimized when conveying the display module using the conveying device of the embodiment.

[0139] In the following, reference Figure 14 and Figure 15 , the method of transmitting the display module of the embodiment will be described. When describing the method of transmitting the display module of the embodiment, it is not necessary to repeat the reference Figures 1 to 13The above content is repeated, and you can focus mainly on the differences.

[0140] Figure 14 is a flowchart of steps of a method of transferring a display module according to an embodiment. Figure 15 This is a detailed flowchart of the step of moving the display module from the mobile station in the steps of the method of transferring the display module according to the embodiment.

[0141] refer to Figure 14 and Figure 15 The method for transporting a display module according to an embodiment may include step S100 of placing the display module on a mobile stage, step S200 of arranging the display module and an ion generator, step S300 of performing ion treatment on the display module using the ion generator, and step S500 of moving the display module from the mobile stage using a fixed moving unit. Furthermore, the method for transporting a display module according to an embodiment may include step S400 of inspecting the display module between step S300 of performing ion treatment on the display module and step S500 of moving the display module from the mobile stage using the fixed moving unit. The method for transporting a display module according to an embodiment may be performed using a transport device according to an embodiment.

[0142] The step S100 of placing the display module on the mobile station may be performed using a transfer unit TMU (see Figure 4 ) will be supplied by the supply unit LDU (see Figure 1 ) provided by the display module is delivered and fixed to the mobile station MST (see Figure 4 In the step S100 of setting the display module on the mobile station, the display module can be provided by the fixed mobile unit FXM (see Figure 4 ) adsorption, from the supply unit LDU (see Figure 1 ) is transmitted to the mobile station MST (see Figure 4 In the step S100 of setting the display module on the mobile station, the mobile unit FXM (see Figure 4 ) in the same step to transmit multiple display modules to the mobile station MST at once (see Figure 4 However, the embodiment is not limited thereto, and may be configured according to the supply unit LDU (see Figure 1 ) and mobile station MST (see Figure 4 ) relative position, the size of the display module DM or included in the fixed mobile unit FXM (see Figure 4 ) to individually transfer a plurality of display modules DM.

[0143] In step S100 of placing a display module on a mobile station, the display module may be placed on the mobile station so that the pad area PDA (see FIG. Figure 4) faces the ion generator. In addition, the pad area in the embodiment may be positioned so that at least a portion of the pad area protrudes from the moving stage.

[0144] After the display module is set on the mobile platform, the space between the display module and the ion generator can be adjusted. That is, after step S100 of setting the display module on the mobile platform, step S200 of arranging the display module and the ion generator can be performed. In step S200 of arranging the display module and the ion generator, at least one of the ion generator and the mobile platform on which the display module is mounted can be controlled to move so that the space between the display module and the ion generator is at least approximately 5 cm. The space between the display module and the ion generator can be the space between a side edge of the display module and the ion generator. For example, at least one of the mobile platform and the ion generator can be controlled to move so that the space between the edge of the display module adjacent to the pad area and the emission hole of the ion generator is at least approximately 5 cm.

[0145] The step S300 of treating the display module with ions using the ion generator may be performed after the step S200 of arranging the display module and the ion generator so that the space between the display module and the ion generator is at least about 5 cm. The surface or periphery of the display module may be electrified by using an ion generator through the emission hole HL-IZ (see Figure 6 ) is controlled by the ion irradiation display module.

[0146] After the step S300 of ionizing the display module using the ion generator, the step S500 of moving the ionized display module from the mobile station using the fixed mobile unit may be performed. That is, the display module deionized using the ion generator may be transferred to the mobile unit TRU (see Figure 1 Meanwhile, the step S400 of inspecting the display module may be performed between the step S300 of performing ion treatment on the display module and the step S500 of moving the display module from the moving stage using the fixed moving unit.

[0147] The display module that has been de-electrified in the step S300 of performing ion treatment on the display module using the ion generator may be moved to the inspection unit ISU (see FIG. Figure 1 ). It is possible to move to the inspection unit ISU (see Figure 1 ) is inspected to determine normal operation, appearance quality, etc., and then transferred to the mobile unit TRU (see Figure 1 ). In addition, the display module can be checked to determine whether a fault has occurred and then the transmission device can be used to transmit the fault information to the ion processing unit ITU (see Figure 1 ) is transmitted to the mobile unit TRU (see Figure 1 ).

[0148] The step S500 of moving the display module from the moving stage may include a step S510 of bringing a fixed moving unit close to the display module, a step S530 of fixing the display module to the fixed moving unit, and a step S550 of transferring the display module from the moving stage to a transfer tray.

[0149] The step S510 of bringing the fixing moving unit close to the display module may be a step of bringing the fixing moving unit close to the display module so that a pick-up pad of the fixing moving unit contacts a top surface of the display module.

[0150] The step S530 of fixing the display module to the fixing moving unit may be a step of fixing the display module using a vacuum state provided by a vacuum suction unit after a pickup pad of the fixing moving unit contacts a top surface of the display module by bringing the fixing moving unit close to the display module.

[0151] The step S550 of transferring the display module from the moving station to the transfer tray may be a step of fixing the display module to a fixed moving unit and then moving the fixed moving unit to transfer the display module to the transfer tray. Figure 13 ) may be a component on which the ion-treated display module is moved and placed, and may be a type of mobile unit TRU.

[0152] When a conveyor device is used to secure the display module for movement in each of the steps of the method for transporting a display module according to an embodiment, the fixed moving unit may include a vacuum suction unit and a pickup pad. In step S100 of placing the display module on a moving stage and step S500 of moving the display module from the moving stage using the fixed moving unit, the display module may be secured to the fixed moving unit of the conveyor device according to an embodiment and then moved. Furthermore, in step S530 of securing the display module to the fixed moving unit and step S550 of transferring the display module from the moving stage to a transport tray, the display module may be transported using a pickup pad secured to the fixed moving unit of the display module.

[0153] When the display module is adsorbed onto the fixed moving unit and then fixed and moved, the fixed moving unit may be spaced apart to have a space of at least about 3 mm from the top surface of the display module. In addition, the surface resistivity of the pickup pad directly contacting the display module may be at least about 10 12 Ω / sq.

[0154] In addition, before and after the step S400 of inspecting the display module in the steps of the method of transporting the display module of the embodiment, the position of the display module may be changed after the display module is adsorbed onto the fixed moving unit. Even in this case, the fixed moving unit is spaced at least about 3 mm from the top surface of the display module, and the surface resistivity of the pickup pad that directly contacts the display module may be at least about 10 12 Ω / sq.

[0155] The method of conveying a display module of the embodiment can be performed using a conveying device of the embodiment including a moving stage, an ionizer, and a fixed moving unit. The method of conveying a display module of the embodiment can minimize electrostatic discharge failure during conveying the display module by including the following steps: a step of arranging the display module and the ionizer so that the space between the display module and the ionizer is at least about 5 cm, a step of ionizing the display module using the ionizer, and a step of moving the display module using the fixed moving unit in a state where the fixed moving unit includes a vacuum suction unit and a pickup pad and the vacuum suction unit and the display module are spaced at least about 3 mm apart. In addition, even in a state where the pickup pad contacts the display module, by making the surface resistivity of the pickup pad at least about 10 12 Ω / sq, which can prevent contact electrification to reduce electrostatic discharge failures.

[0156] The transfer device according to the embodiment may include an ion generator arranged together with the display module through a predetermined space or more to improve electrostatic discharge malfunction caused by ion contact irradiation.

[0157] The transfer device according to the embodiment can reduce electrostatic discharge generated when contacting a display module including an input sensor, thereby reducing damage to the input sensor.

[0158] The method of transferring a display module according to an embodiment may include the steps of performing arrangement and ion treatment by an ion generator to minimize damage to the display module due to electrostatic discharge.

[0159] While the inventive concept has been described with reference to its embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments without departing from the spirit and technical field defined in the appended claims and their equivalents.

[0160] Thus, the scope of the inventive concept should not be restricted or limited by the foregoing description, but should be determined by the broadest permissible interpretation of the appended claims.

Claims

1. A conveying device comprising: a mobile station configured to mount a display module; an ion generator located at one side of the mobile station and configured to be spaced apart from a side edge of the display module by a first space of 5 cm or more; as well as The fixed moving unit is arranged on the moving platform and is configured to absorb and move the display module.

2. The conveying device according to claim 1, wherein The fixed mobile unit comprises: a vacuum suction unit having a suction hole; and A pickup pad surrounds at least a portion of the vacuum suction unit and is configured to contact the display module.

3. The conveying device according to claim 2, wherein: The vacuum suction unit is provided with a metal material, and The vacuum suction unit is configured to be spaced apart from the display module by a second space of 3 mm or more.

4. The conveying device according to claim 2, wherein: The surface resistivity of the pickup pad is 10 12 Ω / sq or greater.

5. The conveying device according to claim 1, wherein The first space is 10 cm or larger. The conveying device according to claim 1 , wherein: The display module includes an active area and a pad area disposed at at least one side of the active area and having a plurality of pads disposed therein, and The first space is between an edge of the pad area and the ion generator.

7. The conveying device according to claim 6, wherein: The mobile station is configured to mount the display module, wherein at least a portion of the pad area protrudes from a side of the mobile station.

8. The conveying device according to claim 1, wherein The display module includes a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and The fixing moving unit is configured to be adsorbed onto an input sensor side of the display panel.

9. The conveying device according to claim 1, wherein The mobile station is configured to mount a plurality of display modules, and The plurality of display modules are arranged parallel to one side of the ionizer.

10. A conveying device comprising: a mobile station configured to mount a display module; an ion generator spaced apart from a side of the movable platform; as well as a fixed moving unit, disposed on the moving platform and configured to absorb and move the display module, wherein the fixed moving unit comprises a vacuum suction unit having a suction hole and a pickup pad surrounding at least a portion of the vacuum suction unit and contacting the display module, and The ion generator is configured to be spaced apart from a side edge of the display module by a first space of 5 cm or more, and the vacuum suction unit is configured to be spaced apart from a top surface of the display module by a second space of 3 mm or more.

11. The conveying device according to claim 10, wherein: The vacuum suction unit is provided with a metal material, and the pickup pad is provided with a polymer material.

12. The conveying device according to claim 11, wherein The surface resistivity of the pickup pad is 10 12 Ω / sq or greater.

13. The conveying device according to claim 10, wherein: The display module includes an active area and a pad area disposed at at least one side of the active area and having a plurality of pads disposed therein, and The first space is between an edge of the pad area and the ion generator.

14. The conveying device according to claim 10, wherein The display module includes a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and The fixing moving unit is configured to be adsorbed onto an input sensor side of the display panel.

15. A method for transmitting a display module, comprising: Arrange the display module on the mobile station; arranging the display module and the ion generator to be spaced apart by a space of 5 cm or more; performing ion treatment on the display module using the ion generator to form the ion-treated display module; and The ion-treated display module is moved from the moving stage using a fixed moving unit.

16. The method according to claim 15, in, The fixed moving unit includes a vacuum suction unit having a suction hole defined therethrough and a pickup pad surrounding at least a portion of the vacuum suction unit, and Wherein, moving the display module from the mobile station comprises: bringing the fixed moving unit close to the display module so that the pickup pad contacts a top surface of the display module; fixing the display module to the fixed moving unit; and The fixed moving unit is moved to transfer the display module from the moving stage to a transfer tray.

17. The method according to claim 15, further comprising: The display module is inspected between performing the ion treatment on the display module and moving the display module from the moving stage using the fixed moving unit.

18. The method according to claim 15, wherein The fixed moving unit includes a vacuum suction unit having a suction hole and a pickup pad surrounding at least a portion of the vacuum suction unit and contacting the display module, and The vacuum suction unit and the display module are spaced apart by a second space of 3 mm or more.

19. The method according to claim 18, wherein The surface resistivity of the pickup pad is 10 12 Ω / sq or greater.

20. The method according to claim 15, wherein The display module includes a display panel and an input sensor disposed on the display panel and including a sensor conductive layer, and The fixed moving unit is adsorbed onto the input sensor side of the display panel.

Images