Power semiconductor device with non-rectangular semiconductor die for enhanced mechanical robustness and reduced stress concentration and electric field concentration

By adopting non-rectangular semiconductor dies and non-traditional dicing technology, the problem of poor mechanical robustness of power semiconductor devices caused by stress and electric field concentration in high-power applications is solved, and the reliability and performance of the devices are improved.

CN120660186APending Publication Date: 2025-09-16WOLF SEMICON CORP
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Patent Information

Application Number
CN202480011777.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-02-09
Filing Date
2024-01-17
Publication Date
2025-09-16

AI Technical Summary

Technical Problem

Existing power semiconductor devices are prone to stress concentration and electric field concentration caused by thermal cycling and physical stress in high-power applications, resulting in poor mechanical robustness and prone to cracks and failures.

Method used

Semiconductor tube cores with non-rectangular shapes, such as hexagonal or polygonal shapes, are designed with rounded or chamfered corners and formed through non-traditional scribing technologies such as plasma scribing and laser ablation to reduce thermal stress and electric field concentration.

Benefits of technology

It improves the mechanical robustness of the device, reduces stress concentration and electric field concentration, reduces the risk of failure, and improves the reliability and performance of the device.

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Abstract

A semiconductor device includes a semiconductor die including a substrate having a hexagonal crystal structure. The first and second sides of the semiconductor die extend along respective first and second crystal axes of the hexagonal crystal structure of the substrate.
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