Visual lens adjusting mechanism for PECVD (plasma enhanced chemical vapor deposition)
By introducing a three-axis movement and tilt adjustment structure into the PECVD process, the problem of insufficient applicability of existing visual inspection mechanisms is solved, multi-angle adjustment of the visual lens is achieved, and the flexibility and stability of inspection are improved.
Patent Information
- Application Number
- CN202511102751.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-07
- Publication Date
- 2025-09-19
AI Technical Summary
The existing visual inspection mechanism in the PECVD process has a complex structure and only has a three-axis movement and adjustment function. It cannot achieve detection at specific angles and has low applicability.
A visual lens adjustment mechanism for PECVD was designed. Combining a three-axis moving structure and a tilt adjustment structure, the multi-angle adjustment of the visual lens, including flexible adjustment of position and tilt angle, was achieved through the setting of fine-tuning blocks, swivels and connecting shafts.
It realizes multi-angle adjustment of the visual lens, improves the flexibility and applicability of detection, simplifies the adjustment process, and enhances the stability and accuracy of detection.
Smart Images
Figure CN120666316A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of panel transmission industry, in particular to a visual lens adjustment mechanism used in PECVD. Background Art
[0002] PECVD is a chemical vapor deposition technology commonly used in thin film preparation. PECVD (Plasma-enhanced Chemical Vapor Deposition) uses glow discharge to activate chemical reactions to deposit the desired thin film on a substrate.
[0003] The principle of PECVD is to accelerate chemical reactions by introducing a plasma (glow discharge). Glow discharge generates an ionized plasma region in a low-pressure gas environment by increasing the voltage difference between electrodes. The plasma ionizes gas molecules to produce reactive species (such as ions, free radicals, and excited atoms), which can trigger chemical reactions on the surface. By controlling the discharge parameters and the flow rate of the reactive gas, the concentration and energy of the reactive species in the plasma can be adjusted, thereby controlling the properties of the deposited film.
[0004] Visual inspection systems play a crucial role in the PECVD process, primarily improving process stability, product quality, and production efficiency. These systems include substrate positioning and alignment, deposition uniformity monitoring, and process control. Existing visual inspection systems are relatively complex and generally only offer three-axis movement and adjustment, making them incapable of detecting specific angles and limiting their applicability. Summary of the Invention
[0005] The object of the present invention is to provide a visual lens adjustment mechanism used in PECVD to solve the problems raised in the above background technology.
[0006] To achieve the above objectives, the present invention provides the following technical solution: a visual lens adjustment mechanism for PECVD, comprising a first mounting plate, a three-axis movable structure disposed below the first mounting plate, a rotatable tilt adjustment structure connected to a side of the three-axis movable structure, the tilt adjustment structure connected to a vertically disposed second mounting plate, a lens substrate disposed on a side of the second mounting plate away from the tilt adjustment structure, and a visual lens mounted vertically upwardly disposed on the lens substrate;
[0007] The tilt adjustment structure includes a vertically arranged adjustment base, a T-shaped plate is provided on the side of the adjustment base close to the lens substrate, a horizontally arranged fine-tuning block is provided between the adjustment base and the T-shaped plate, and the fine-tuning block can rotate up and down relative to the fine-tuning base, a step-shaped mounting hole is provided in the middle and upper part of the T-shaped plate, a swivel is installed in the mounting hole, and the swivel is rotatably connected to a connecting shaft, the connecting shaft passes through the fine-tuning block and is inserted into the T-shaped plate, a waist-shaped hole for the connecting shaft to move up and down is provided on the adjustment base, the connecting shaft is fixedly connected to the fine-tuning block, a first adjusting screw is provided on both sides of the lower side of the T-shaped plate, and a second adjusting screw is connected to the middle of the lower side of the T-shaped plate.
[0008] Further optimization, the fine-tuning block is a semi-cylindrical structure, and its arc surface is close to the adjustment base. The adjustment base is provided with a trapezoidal groove for installing the arc surface of the fine-tuning block, which facilitates the rotation adjustment of the fine-tuning block; the waist-shaped hole is set in the middle of the trapezoidal groove, which is used for the rotation and clearance of the connecting shaft.
[0009] Further optimization is that two symmetrically arranged adjustment blocks are provided below the adjustment base near the side of the T-shaped plate, and the two adjustment blocks are respectively arranged on both sides of the lower end of the T-shaped plate. The adjustment blocks are provided with horizontally arranged adjustment holes, and the first adjustment screw is screwed into the adjustment hole. The end of the first adjustment screw is in contact with the lower end of the T-shaped plate, and the rotation of the T-shaped plate is achieved by rotating the first adjustment screw.
[0010] Further optimization is that a connecting hole is provided in the middle and lower part of the T-shaped plate, the connecting hole is threadedly connected to the second adjusting screw, the end of the second adjusting screw is abutted against the adjustment base, and the adjustment base is pushed to rotate by rotating the second adjusting screw.
[0011] Further optimization is carried out, the two relative longitudinal side surfaces of the adjustment base are each provided with a first avoidance groove set at an angle, the two relative longitudinal side surfaces of the T-shaped plate are respectively provided with a second avoidance groove matching the first avoidance groove, the two ends of the entire groove body formed by the first avoidance groove and the corresponding second avoidance groove are respectively higher and lower than the fine-tuning block, a first connecting rod is respectively provided in the two first avoidance grooves, a second connecting rod is respectively provided in the two second avoidance grooves, and a first spring is respectively connected between each first connecting rod and the corresponding second connecting rod.
[0012] Further optimization is that a raised pad is provided at the position of the T-shaped plate corresponding to the first adjusting screw, and a fixing bolt is connected between the connecting shaft and the fine-tuning block to realize the connection between the connecting shaft and the fine-tuning block.
[0013] Further optimized, the three-axis moving structure includes a first manual slide arranged under the first mounting plate, a second manual slide arranged under the first manual slide, and a third manual slide arranged under the second manual slide. The first manual slide and the second manual slide are both horizontally moving slides and the sliding directions are perpendicular to each other, and the third manual slide is a vertically moving slide.
[0014] Further optimization is provided with a horizontally arranged fourth mounting plate below the Y-axis manual slide, a vertically arranged fifth mounting plate is provided below the fourth mounting plate, reinforcing ribs are connected between the fourth mounting plate and the fifth mounting plate, the third manual slide is installed on the fifth mounting plate, and a third mounting plate is provided between the third manual slide and the tilt adjustment structure.
[0015] Further optimization is performed, wherein the two longitudinal sides of the third mounting plate and the two longitudinal sides of the second mounting plate are respectively connected with a second spring, and a plurality of heat insulation blocks are provided above the first mounting plate.
[0016] Further optimization is that there are two lens substrates and they are arranged up and down, and each lens substrate is connected to a lens clamping plate on the side away from the second mounting plate. The visual lens is clamped between the lens substrate and the lens clamping plate, and a ring-shaped light source is provided above the upper one of the two lens substrates and is mounted on the visual lens.
[0017] Beneficial effects: The visual lens adjustment mechanism used in the PECVD of the present invention realizes three-axis movement adjustment of the tilt adjustment structure through a three-axis moving structure, and ultimately realizes front-to-back, left-to-right, and up-and-down position adjustment of the visual lens, that is, left-to-right position adjustment is realized by a first manual slide, front-to-back position adjustment is realized by a second manual slide, and up-and-down position adjustment is realized by a third manual slide; front-to-back rotation adjustment of the T-plate is realized by a first adjusting screw, thereby realizing front-to-back rotation adjustment of the visual lens; left-to-right rotation adjustment of the T-plate is realized by a second adjusting screw, thereby realizing left-to-right rotation adjustment of the visual lens;
[0018] Through the structural setting of the fine-tuning block, swivel and connecting shaft, the T-plate can be rotated forward and backward and left and right to adjust the tilt angle of the visual lens;
[0019] The visual adjustment mechanism is simple and easy to adjust, and can arbitrarily adjust the visual lens within a certain range, including the adjustment of the position, front and rear tilt angles, and left and right tilt angles, thereby being able to adjust the visual lens to the required direction, and has high applicability. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1This is a schematic diagram of the axonometric structure of the visual lens adjustment mechanism used in the PECVD disclosed in an embodiment of the present invention;
[0021] Figure 2 This is a schematic diagram of the main structure of the visual lens adjustment mechanism used in the PECVD disclosed in an embodiment of the present invention;
[0022] Figure 3 This is a schematic diagram of the coordination structure between the third manual slide and the tilt adjustment structure disclosed in an embodiment of the present invention;
[0023] Figure 4 This is a schematic diagram of the decomposed structure of the tilt adjustment structure disclosed in an embodiment of the present invention;
[0024] Figure 5 A schematic cross-sectional view of the tilt adjustment structure disclosed in an embodiment of the present invention;
[0025] Figure 6 A schematic structural diagram of an adjustment base disclosed in an embodiment of the present invention;
[0026] Figure 7 A schematic diagram of the main viewing adjustment direction of the visual lens adjustment mechanism used in the PECVD disclosed in an embodiment of the present invention;
[0027] Figure 8 Schematic diagram of the right-view adjustment direction of the visual lens adjustment mechanism used in the PECVD disclosed in an embodiment of the present invention.
[0028] Reference numerals
[0029] 1-first mounting plate, 2-insulation block, 3-first manual slide, 4-second manual slide, 5-third manual slide, 6-tilt adjustment structure, 61-adjustment base, 611-trapezoidal groove, 612-waist-shaped hole, 613-adjustment block, 614-adjustment hole, 615-first avoidance groove, 616-first connecting rod, 62-T-plate, 621-mounting hole, 622-connecting hole, 623-pad, 624-second avoidance groove, 6 25-second connecting rod, 63-fine-tuning block, 631-through hole, 64-swivel, 65-connecting shaft, 66-fixing bolt, 67-first adjusting screw, 68-second adjusting screw, 69-first spring, 7-second mounting plate, 8-lens substrate, 9-lens clamping plate, 10-third mounting plate, 11-second spring, 12-fourth mounting plate, 13-fifth mounting plate, 14-reinforcement rib, 15-visual lens, 16-annular light source. DETAILED DESCRIPTION
[0030] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.
[0031] like Figure 1-8 As shown, a visual lens adjustment mechanism used in PECVD includes a first mounting plate 1, a three-axis movable structure is provided below the first mounting plate 1, a rotatable tilt adjustment structure 6 is connected to the side of the three-axis movable structure, the tilt adjustment structure 6 is connected to a vertically arranged second mounting plate 7, and a lens substrate 8 is provided on the side of the second mounting plate 7 away from the tilt adjustment structure 6, and a visual lens 15 is mounted on the lens substrate 8.
[0032] The tilt adjustment structure 6 includes a vertically arranged adjustment base 61, a T-shaped plate 62 is provided on the side of the adjustment base 61 close to the lens substrate 8, a horizontally arranged fine-tuning block 63 is provided between the adjustment base 61 and the T-shaped plate 62, and the fine-tuning block 63 can rotate up and down relative to the fine-tuning base 61, and a step-shaped mounting hole 621 is provided in the middle and upper part of the T-shaped plate 62, a swivel 64 is installed in the mounting hole 621, and the swivel 64 is rotatably connected to the connecting shaft 65, which passes through the fine-tuning block 63 and is inserted into the T-shaped plate 62, and a waist-shaped hole 612 for the connecting shaft 65 to move up and down is provided on the adjustment base 61, and the connecting shaft 65 is fixedly connected to the fine-tuning block 63, and a first adjusting screw 67 is provided on both sides of the lower part of the T-shaped plate 62, and a second adjusting screw 68 is connected to the middle of the lower part of the T-shaped plate 62.
[0033] In this application, the visual lens adjustment mechanism is used in the PECVD process flow, enabling in-process monitoring of the PECVD process through the visual lens 15. The visual lens adjustment mechanism facilitates adjustment of the visual lens 15. The first mounting plate 1 is used for the overall installation and fixation of the visual lens adjustment mechanism. The three-axis movable structure enables left-right, front-back, and up-down position adjustment of the visual lens 15, thereby adjusting the monitoring range and direction of the visual lens 15. The tilt adjustment structure 6 enables forward and backward rotation adjustment of the visual lens 15, as well as fine-tuning of left-right rotation, thereby adjusting the monitoring direction and angle of the visual lens 15. The lens substrate 8 is used for mounting the visual lens 15.
[0034] In the present application, the tilt adjustment structure 6 includes an adjustment base 61, a T-plate 62, a fine-tuning block 63, a rotating ring 64, a connecting shaft 65, and a first adjustment screw 67. The adjustment base 61 is used to connect to the three-axis movable structure, and the T-plate 62 is used to connect to the adjustment base 61 and the lens substrate 8. At the same time, the T-plate 62 can rotate relative to the adjustment base 61 around the connecting shaft 65, thereby driving the lens substrate 8 and the visual lens 15 to rotate synchronously, thereby adjusting the detection direction and angle of the visual lens 15. The mounting hole 621 is used for mounting the rotating ring 64 and the connecting shaft 65, and the mounting hole 621 is a stepped structure that can form a mounting and limiting position for the rotating ring 64; the connecting shaft 65 can rotate relative to the rotating ring 64 to achieve rotation adjustment of the T-plate 62; the fine-tuning block 63 is used to connect to the connecting shaft 65, so that the T-plate 62 can rotate relative to the connecting shaft 65 and the fine-tuning block 63, ultimately driving the visual lens 15 to rotate around the connecting shaft 65. The waist-shaped hole 612 is used for inserting the end of the connecting shaft 65, and through the waist-shaped structure design, it can provide space for the connecting shaft 65 to rotate up and down, which is convenient for the fine-tuning block 63 to rotate left and right, and finally realize the left and right rotation fine-tuning of the T-plate 62, driving the visual lens 15 to rotate left and right fine-tuning, so as to achieve the detection direction and angle adjustment of the visual lens 15.
[0035] In the present application, there are two first adjusting screws 67, and the T-shaped plate 62 is driven to rotate by rotating the two first adjusting screws 67. For example, by rotating the first adjusting screw 67 on the front side to move it backward, and rotating the first adjusting screw 67 on the rear side to move it backward synchronously, the lower end of the T-shaped plate 62 clamped between the two first adjusting screws 67 is pushed backward, and finally the T-shaped plate 62 is rotated counterclockwise around the connecting shaft 65. Conversely, by rotating the first adjusting screw 67 to move it forward, the T-shaped plate 62 is pushed forward, and finally the T-shaped plate 62 is rotated clockwise around the connecting shaft 65. By rotating the second adjusting screw 68, the lower end of the T-shaped plate 62 is moved away from or close to the adjustment base 61, and the T-shaped plate 62 is driven to rotate left and right relative to the adjustment base 61 with the fine-tuning block 63 as the rotation axis, and finally the visual lens 15 is adjusted to rotate forward and backward or left and right.
[0036] Please refer to Figure 4 As shown, in one embodiment of the present application, the fine-tuning block 63 is a semi-cylindrical structure, and its arc surface is close to the adjustment base 61. The adjustment base 61 is provided with a trapezoidal groove 611 for installing the arc surface of the fine-tuning block 63, and the waist-shaped hole 612 is arranged in the middle of the trapezoidal groove 611.
[0037] In this embodiment, the semi-cylindrical structure of the fine-tuning block 63 facilitates the vertical rotation of the fine-tuning block 63 relative to the adjustment base 61, thereby driving the T-shaped plate 62 to rotate up and down, and ultimately driving the visual lens 15 to rotate up and down. The trapezoidal groove 611 provided on the adjustment base 61 is used for installing the fine-tuning block 63 and facilitates the left and right rotation of the fine-tuning block 63, ultimately achieving fine-tuning of the left and right rotation of the visual lens 15. The waist-shaped hole 612 is used for inserting the end of the connecting shaft 65 and can also limit the forward and backward movement of the connecting shaft 65, preventing the T-shaped plate 62 from moving back and forth relative to the adjustment base 61.
[0038] Please continue to refer to Figure 3-5 As shown, in another embodiment of the present application, two symmetrically arranged adjustment blocks 613 are provided below the adjustment base 61 near the side of the T-shaped plate 62. The two adjustment blocks 613 are respectively arranged on both sides of the lower end of the T-shaped plate 62. A horizontally arranged adjustment hole 614 is provided on the adjustment block 613. The first adjustment screw 67 is screwed into the adjustment hole 614, and the end of the first adjustment screw 67 is abutted against the lower end of the T-shaped plate 62.
[0039] In this embodiment, the adjustment block 613 is used to mount the first adjustment screw 67, facilitating the rotation of the first adjustment screw 67. The first adjustment screw 67 is rotated through the adjustment hole 614 threadedly connected to the first adjustment screw 67, thereby achieving forward and backward movement of the first adjustment screw 67. The forward and backward movement of the first adjustment screw 67 drives the T-shaped plate 62 to rotate forward and backward, ultimately achieving forward and backward rotation adjustment of the vision lens 15.
[0040] In this embodiment, the adjustment block 613 is a T-shaped structure, which facilitates the installation of the first adjustment screw 67 and ensures stable installation.
[0041] Please continue to refer to Figure 4 As shown, in another embodiment of the present application, a connecting hole 622 is provided in the middle and lower portion of the T-shaped plate 62. The connecting hole 622 is threadedly connected to the second adjusting screw 68, and the end of the second adjusting screw 68 abuts the adjustment base 61. Specifically, the connecting hole 622 is used for installing the second adjusting screw 68. By rotating the second adjusting screw 68, the second adjusting screw 68 is extended to the left side of the T-shaped plate 62, thereby driving the T-shaped plate 62 to rotate left and right relative to the adjustment base 61. When the length of the second adjusting screw 68 extending out of the left side of the T-shaped plate 62 becomes longer, the lower end of the T-shaped plate 62 can be moved away from the adjustment base 61, thereby driving the T-shaped plate 62 to rotate rightward with the fine-tuning block 63 as the rotation axis, and the T-shaped plate 62 rotates counterclockwise; when the length of the second adjusting screw 68 extending out of the left side of the T-shaped plate 62 becomes shorter, the lower end of the T-shaped plate 62 can be moved closer to the adjustment base 61, thereby driving the T-shaped plate 62 to rotate leftward with the fine-tuning block 63 as the rotation axis, and the T-shaped plate 62 rotates clockwise, ultimately achieving the adjustment of the left or right tilt angle of the visual lens 15.
[0042] Please refer to Figure 4 As shown, in another embodiment of the present application, two opposite longitudinal side surfaces of the adjustment base 61 are each provided with an inclined first avoidance groove 615, and two opposite longitudinal side surfaces of the T-shaped plate 62 are respectively provided with a second avoidance groove 624 that cooperates with the first avoidance groove 615. The two ends of the entire groove body formed by the first avoidance groove 615 and the corresponding second avoidance groove 624 are respectively higher and lower than the fine-tuning block 63, a first connecting rod 616 is respectively provided in the two first avoidance grooves 615, and a second connecting rod 625 is respectively provided in the two second avoidance grooves 624, and a first spring 69 is respectively connected between each first connecting rod 616 and the corresponding second connecting rod 625.
[0043] In this embodiment, the first escape groove 615 and the second escape groove 624 are used to provide a safe installation for the first spring 69. The first spring 69 is secured via the first connecting rod 616 and the second connecting rod 625 within the corresponding first escape groove 615 and second escape groove 624, ultimately achieving the connection between the T-shaped plate 62 and the adjustment base 61. Furthermore, the flexible connection of the first spring 69 facilitates fine-tuning of the forward and backward rotation and left and right rotation of the T-shaped plate 62. The ends of the entire groove formed by the first escape groove 615 and the corresponding second escape groove 624 are respectively higher and lower than the fine-tuning block 63, ensuring the stability of the connection between the adjustment base 61, the T-shaped plate 62, and the fine-tuning block 63.
[0044] In the present application, the two integral grooves formed by the two first avoidance grooves 615 on both sides of the adjustment base 61 and the two second avoidance grooves 624 on both sides of the T-plate 62 are in an X-shape and intersect in space. This can provide constraints in multiple directions, increase the connection stability of the adjustment base 61 and the T-plate 62, and when the T-plate 62 rotates back and forth relative to the adjustment base 61, one first spring 69 will be stretched and the other first spring 69 will be compressed, allowing the T-plate 62 to rotate. At the same time, when the T-plate 62 rotates up and down relative to the adjustment base 61, the first spring 69 will be compressed or stretched, also allowing the T-plate 62 to rotate. By arranging the two first springs 69 in an X-shape, the force acting on the adjustment base 61 and the T-plate 62 can be more evenly distributed, the force points can be dispersed, and stress concentration can be avoided; and support can be provided in multiple directions to reduce excessive deformation in a single direction. Furthermore, the two X-shaped first springs 69 make the force on the T-shaped plate 62 symmetrical, so that external forces in any direction can be balanced by the symmetrical arrangement of the first springs 69 , thereby preventing the T-shaped plate 62 from deflecting.
[0045] Please refer to Figure 4As shown, in another embodiment of the present application, a raised spacer 623 is provided on the T-shaped plate 62 at a position corresponding to the first adjustment screw 67, and a fixing bolt 66 is connected between the connecting shaft 65 and the fine-tuning block 63. The spacer 623 is used to correspond to the first adjustment screw 67 to reduce wear of the first adjustment screw 67 on the T-shaped plate 62. The fixing bolt 66 is used to securely connect the connecting shaft 65 to the fine-tuning block 63. This simple connection method is easy to assemble and process.
[0046] Please refer to Figure 1-2 and Figure 7-8 As shown, in another embodiment of the present application, the three-axis moving structure includes a first manual slide 3 arranged below the first mounting plate 1, a second manual slide 4 arranged below the first manual slide 3, and a third manual slide 5 arranged below the second manual slide 4. The first manual slide 3 and the second manual slide 4 are both horizontally moving slides and the sliding directions are perpendicular to each other, and the third manual slide 5 is a vertically moving slide.
[0047] In this embodiment, the three-axis moving structure adopts a first manual slide 3, a second manual slide 4 and a third manual slide 5, wherein the first manual slide 3 and the second manual slide 4 are horizontally movable slides, respectively used for left and right movement and front and back movement, to achieve left and right, front and back position adjustment of the visual lens 15; the third manual slide 5 is a vertically movable slide, to achieve adjustment of the up and down position of the visual lens 15, that is, the first manual slide 3, the second manual slide 4 and the third manual slide 5 are used to achieve front and back, left and right and up and down movement, to achieve three-axis movement, and finally to achieve position adjustment of the visual lens 15.
[0048] Furthermore, a fourth mounting plate 12 is provided horizontally below the Y-axis manual slide 4, a fifth mounting plate 13 is provided vertically below the fourth mounting plate 12, a reinforcing rib 14 is connected between the fourth mounting plate 12 and the fifth mounting plate 13, the third manual slide 5 is mounted on the fifth mounting plate 13, and a third mounting plate 10 is provided between the third manual slide 5 and the tilt adjustment structure 6. The fourth mounting plate 12 is used to connect with the second manual slide 4 and the fifth mounting plate 13, and the reinforcing rib 14 is used to connect the fourth mounting plate 12 and the fifth mounting plate 13 to improve the connection strength between the fourth mounting plate 12 and the fifth mounting plate 13. The second manual slide 4 is connected to the third manual slide 5 through the fourth mounting plate 12 and the fifth mounting plate 13, that is, the connection is achieved in the horizontal and vertical directions. The third mounting plate 10 is used to connect the third manual slide 5 to the tilt adjustment structure 6.
[0049] Furthermore, a second spring 11 is respectively connected to the two longitudinal sides of the third mounting plate 10 and the two longitudinal sides of the second mounting plate 7. A plurality of thermal insulation blocks 2 are provided above the first mounting plate 1. The second spring 11 is used to connect the third mounting plate 10 and the second mounting plate 7, and can offset a portion of the weight of the visual lens 15, thereby reducing the weight borne by the tilt adjustment structure 6 and improving the stability of the overall structure. The thermal insulation blocks 2 are used for thermal insulation, preventing heat from the equipment connected to the visual lens adjustment mechanism from being transferred to the visual lens adjustment mechanism, thereby affecting subsequent manual adjustment of the first manual slide 3, the second manual slide 4, the third manual slide 5, and the tilt adjustment structure 6, thereby improving safety performance.
[0050] Please continue to refer to Figure 1-2 As shown, in another embodiment of the present application, there are two lens substrates 8 and they are arranged one above the other. A lens clamping plate 9 is connected to the side of each lens substrate 8 away from the second mounting plate 7. The visual lens 15 is clamped between the lens substrate 8 and the lens clamping plate 9. A ring light source 16 is provided above the upper one of the two lens substrates 8 and is mounted on the visual lens 15.
[0051] In this embodiment, two lens substrates 8 are provided, further ensuring the stability and firmness of the visual lens 15. The visual lens 15 is clamped to the lens substrate 8 via the lens clamp 9, making installation simple and easy, and adaptable to the installation of visual lenses 15 of different diameters. The provision of the annular light source 16 can effectively overcome the problem of insufficient or unevenly distributed ambient light, highlighting the details and defect features of the target object, and ensuring that the image clarity meets the detection requirements. It can also simplify the complexity of the image processing algorithm, reduce ambient light interference, ensure the image signal-to-noise ratio, and improve the anti-interference ability and operational reliability of the visual lens 15.
[0052] like Figure 7-8 As shown, in the present application, the visual lens adjustment mechanism realizes the three-axis movement adjustment of the tilt adjustment structure 6 through a three-axis moving structure, and finally realizes the front-back, left-right and up-down position adjustment of the visual lens 15, that is, the left-right position adjustment is realized by the first manual slide 3, the front-back position adjustment is realized by the second manual slide 4, and the up-down position adjustment is realized by the third manual slide 5; the front-back rotation adjustment of the T-plate 62 is realized by the first adjustment screw 67, and the front-back rotation adjustment of the visual lens 15 is realized; the left-right rotation adjustment of the T-plate 62 is realized by the second adjustment screw 68, and the left-right rotation adjustment of the visual lens 15 is realized. The adjustment method of the visual adjustment mechanism is simple and easy to adjust, and the visual lens 15 can be adjusted to the required direction.
[0053] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A visual lens adjustment mechanism for PECVD, comprising a first mounting plate (1), characterized in that: A three-axis movable structure is provided below the first mounting plate (1), a rotatable tilt adjustment structure (6) is connected to a side of the three-axis movable structure, the tilt adjustment structure (6) is connected to a vertically arranged second mounting plate (7), a lens substrate (8) is provided on a side of the second mounting plate (7) away from the tilt adjustment structure (6), and a visual lens (15) is mounted on the lens substrate (8); The tilt adjustment structure (6) comprises a vertically arranged adjustment base (61), a T-shaped plate (62) is provided on the side of the adjustment base (61) close to the lens substrate (8), a horizontally arranged fine-tuning block (63) is provided between the adjustment base (61) and the T-shaped plate (62), and the fine-tuning block (63) can rotate up and down relative to the fine-tuning base (61), a stepped mounting hole (621) is provided in the middle and upper part of the T-shaped plate (62), and a rotating ring (64) is installed in the mounting hole (621). The rotating ring (64) is rotatably connected to a connecting shaft (65), the connecting shaft (65) passes through the fine-tuning block (63) and is inserted into the T-shaped plate (62), the adjustment base (61) is provided with a waist-shaped hole (612) for the connecting shaft (65) to move up and down, the connecting shaft (65) is fixedly connected to the fine-tuning block (63), a first adjusting screw (67) is respectively provided on both sides of the lower side of the T-shaped plate (62), and a second adjusting screw (68) is connected to the middle of the lower side of the T-shaped plate (62).
2. The visual lens adjustment mechanism used in PECVD according to claim 1, characterized in that: The fine-tuning block (63) is a semi-cylindrical structure, and its arc surface is close to the adjustment base (61). The adjustment base (61) is provided with a trapezoidal groove (611) for installing the arc surface of the fine-tuning block (63), and the waist-shaped hole (612) is arranged in the middle of the trapezoidal groove (611).
3. The visual lens adjustment mechanism used in PECVD according to claim 1, characterized in that: Two symmetrically arranged adjustment blocks (613) are provided below the adjustment base (61) and on the side of the T-shaped plate (62). The two adjustment blocks (613) are respectively arranged on both sides of the lower end of the T-shaped plate (62). A horizontally arranged adjustment hole (614) is provided on the adjustment block (613). The first adjustment screw (67) is screwed to the adjustment hole (614), and the end of the first adjustment screw (67) abuts against the lower end of the T-shaped plate (62).
4. The visual lens adjustment mechanism for PECVD according to claim 1, characterized in that: A connecting hole (622) is provided in the middle and lower part of the T-shaped plate (62), and the connecting hole (622) is screwed to the second adjusting screw (68), and the end of the second adjusting screw (68) is in contact with the adjustment base (61).
5. The visual lens adjustment mechanism used in PECVD according to claim 1, characterized in that: The two opposite longitudinal sides of the adjustment base (61) are each provided with a first avoidance groove (615) arranged obliquely, and the two opposite longitudinal sides of the T-shaped plate (62) are respectively provided with a second avoidance groove (624) matched with the first avoidance groove (615), and the two ends of the entire groove body formed by the first avoidance groove (615) and the corresponding second avoidance groove (624) are respectively higher and lower than the fine-tuning block (63), and a first connecting rod (616) is respectively provided in the two first avoidance grooves (615), and a second connecting rod (625) is respectively provided in the two second avoidance grooves (624), and a first spring (69) is respectively connected between each first connecting rod (616) and the corresponding second connecting rod (625).
6. The visual lens adjustment mechanism used in PECVD according to claim 1, characterized in that: A raised pad (623) is provided at a position of the T-shaped plate (62) corresponding to the first adjusting screw (67), and a fixing bolt (66) is connected between the connecting shaft (65) and the fine-tuning block (63).
7. The visual lens adjustment mechanism for PECVD according to claim 1, characterized in that: The three-axis moving structure comprises a first manual slide (3) arranged below the first mounting plate (1), a second manual slide (4) arranged below the first manual slide (3), and a third manual slide (5) arranged below the second manual slide (4). The first manual slide (3) and the second manual slide (4) are both horizontally movable slides with vertical sliding directions, and the third manual slide (5) is a vertically movable slide.
8. The visual lens adjustment mechanism for PECVD according to claim 7, characterized in that: A fourth mounting plate (12) is provided horizontally below the Y-axis manual slide (4), a fifth mounting plate (13) is provided vertically below the fourth mounting plate (12), a reinforcing rib (14) is connected between the fourth mounting plate (12) and the fifth mounting plate (13), the third manual slide (5) is installed on the fifth mounting plate (13), and a third mounting plate (10) is provided between the third manual slide (5) and the tilt adjustment structure (6).
9. The visual lens adjustment mechanism for PECVD according to claim 8, characterized in that: The two longitudinal sides of the third mounting plate (10) and the two longitudinal sides of the second mounting plate (7) are respectively connected with a second spring (11), and a plurality of heat insulation blocks (2) are provided above the first mounting plate (1).
10. The visual lens adjustment mechanism used in PECVD according to claim 1, characterized in that: There are two lens substrates (8) arranged one above the other. A lens clamping plate (9) is connected to the side of each lens substrate (8) away from the second mounting plate (7). The visual lens (15) is clamped between the lens substrate (8) and the lens clamping plate (9). An annular light source (16) sleeved on the visual lens (15) is provided above the upper one of the two lens substrates (8).