High-low pressure two-stage pressure reduction air supply system for air floating platform and air pressure adjusting method

Abstract

The invention belongs to the technical field of pneumatic control, and particularly relates to a high-low pressure two-stage pressure reducing gas supply system for a gas floating platform and a gas pressure adjusting method. High-pressure gas and low-pressure gas are stored in a high-pressure gas cylinder and a low-pressure gas cylinder respectively, and the high-pressure gas cylinder and the low-pressure gas cylinder are connected with an inlet of a high-pressure pressure reducing valve through pipelines respectively; an outlet of the high-pressure reducing valve is connected with an inlet of the air capacitor through a pipeline, an outlet of the air capacitor is connected with an inlet of the low-pressure reducing valve through a pipeline, an outlet of the low-pressure reducing valve is connected with an inlet of the high-speed switching valve through a pipeline, an outlet of the high-speed switching valve is divided into a plurality of branches, and each branch is connected with one air bearing. Each air bearing is mounted on the bottom surface of the structural frame; and the high-speed switch valve and the main valve are respectively connected with the controller. Through high-low pressure grading pressure reduction, high-pressure gas is firstly reduced to medium pressure and then precisely adjusted to working pressure, gas pressure fluctuation is balanced through gas capacity, and gas pressure closed-loop control is achieved through a high-speed switch valve and a digital pressure gauge.

Description

Technical Field

[0001] The present invention belongs to the technical field of pneumatic control, and in particular relates to a high-low pressure two-stage decompression air supply system for an air floating platform and an air pressure regulating method. Background Art

[0002] Air flotation platforms, devices that utilize an air film to achieve low-friction motion, are widely used in precision measurement, microgravity simulation, semiconductor processing, and aerospace experiments. The stable operation of air flotation platforms relies heavily on the air supply system providing constant and precise air pressure to maintain the thickness of the air film and the stable suspension of the platform. However, existing air flotation platforms generally use a single-stage pressure reducing valve structure, which directly reduces the pressure of the high-pressure gas cylinder to the operating pressure. Although this structure is simple, it has the following problems: First, due to the limited adjustment range of single-stage pressure reduction, when the gas source pressure fluctuates greatly or the dynamic load of the platform changes, it is easy to cause output pressure fluctuations, affecting the stability of the gas film thickness, and thus causing vibration or position drift of the platform.

[0003] Secondly, the response speed of the single-stage pressure reducing valve is relatively slow and cannot meet the experimental platform requirements of high dynamic performance, especially in application scenarios that require rapid adjustment of the air float support force.

[0004] In addition, existing gas supply systems mostly use traditional mechanical pressure gauges, which have limited accuracy and are difficult to accurately reflect air pressure changes in a timely manner, which is not conducive to achieving closed-loop control.

[0005] Therefore, there is an urgent need for an air supply system with a more reasonable structure, higher pressure reduction accuracy, faster response, and the ability to achieve precise air pressure control to meet the higher requirements of the air flotation platform for stability and dynamic performance. Summary of the Invention

[0006] In order to overcome the above-mentioned shortcomings of the existing air supply system for flotation platforms, the purpose of the present invention is to provide a high-low pressure two-stage pressure reduction air supply system and air pressure regulation method for air flotation platforms, so as to achieve higher-precision air pressure regulation, improve the stability and response speed of air supply, and meet the strict requirements of air flotation platforms for the air source system.

[0007] The object of the present invention is achieved through the following technical solutions: The gas supply system of the present invention includes a structural frame and a high-speed switching valve, a high-pressure gas cylinder, a gas container, a low-pressure pressure reducing valve, a high-pressure pressure reducing valve, a main valve and a low-pressure gas cylinder respectively installed in the structural frame, wherein the high-pressure gas cylinder and the low-pressure gas cylinder respectively store high-pressure gas and low-pressure gas, and the high-pressure gas cylinder and the low-pressure gas cylinder are respectively connected to the inlet of the high-pressure pressure reducing valve through a pipeline, and the high-pressure pressure reducing valve reduces the high-pressure gas in the high-pressure gas cylinder to a medium pressure range, and the outlet of the high-pressure pressure reducing valve is connected to the inlet of the gas container through a pipeline, and the gas container is used to temporarily store medium-pressure gas and balance the fluctuation of gas supply pressure. The outlet is connected to the inlet of the low-pressure reducing valve through a pipeline. The low-pressure reducing valve further reduces the pressure of the medium-pressure gas to the working pressure required by the air flotation platform. The outlet of the low-pressure reducing valve is connected to the inlet of the high-speed switching valve through a pipeline. The outlet of the high-speed switching valve is divided into multiple branches, each branch is connected to an air flotation bearing, and each air flotation bearing is installed on the bottom surface of the structural frame; the high-speed switching valve and the main valve are respectively connected to the controller. The high-speed switching valve quickly opens or closes the gas flow according to the control signal of the controller, and the main valve controls the main gas source switch of the entire air supply system.

[0008] Wherein: the pipeline between the high-pressure gas cylinder and the high-pressure reducing valve and the pipeline between the low-pressure gas cylinder and the high-pressure reducing valve are respectively provided with filters for filtering impurities in the gas.

[0009] The pipeline in front of the inlet of the high-pressure reducing valve and the pipeline in front of the inlet of the low-pressure reducing valve are respectively provided with a digital pressure gauge for real-time detection of the output air pressure and outputting a pressure signal. The digital pressure gauge is connected to the controller. The digital pressure gauge feeds back the detected air pressure signal to the controller. The controller controls the opening and closing of the high-speed switching valve according to the preset target pressure value to achieve closed-loop regulation of the output air pressure.

[0010] There are three branches, and a tee is provided between the outlet of the high-speed switching valve and each branch. The first interface of the tee is connected to the outlet of the high-speed switching valve through a pipeline, the second interface of the tee is connected to one end of a branch, and the third interface of the tee is connected to one end of the other two branches respectively. The other ends of the three branches are respectively connected to an air bearing.

[0011] The tee is fixed on the structural frame through a tee supporting member, and the outside of the tee is covered with a tee protective sleeve for preventing the pipeline from loosening or leaking due to vibration or external force.

[0012] The main valve is an electric control valve, which is used to realize remote opening and closing operations through the control signal sent by the controller.

[0013] The structural frame includes an upper cover plate, support columns and a lower base plate. Multiple support columns are provided between the upper cover plate and the lower base plate. The upper and lower ends of each support column are respectively connected to the upper cover plate and the lower base plate by bolts. The main valve is installed on the upper surface of the lower base plate.

[0014] A partition fixed on each support column is provided between the upper cover plate and the lower base plate. The bottle bodies of the high-pressure gas cylinder and the low-pressure gas cylinder are installed on the partition through a gas cylinder fixing device. The bottom and bottle mouth of the high-pressure gas cylinder and the low-pressure gas cylinder are respectively located on the upper and lower sides of the partition. The high-speed switching valve and the high-pressure pressure reducing valve are respectively installed on the upper surface of the partition, the gas container is fixed on the lower surface of the partition, and the low-pressure pressure reducing valve and the main valve are both located below the partition.

[0015] The bottle mouths of the high-pressure gas cylinder and the low-pressure gas cylinder are respectively connected to gas cylinder connectors, and the gas cylinder connectors are connected to the inlet of the high-pressure reducing valve through pipelines. A stop valve A is provided on the pipeline between the gas cylinder connector of the high-pressure gas cylinder and the inlet of the high-pressure reducing valve, and a stop valve B is provided on the pipeline between the gas cylinder connector of the low-pressure gas cylinder and the inlet of the high-pressure reducing valve; the high-pressure gas cylinder and the low-pressure gas cylinder are respectively connected to the gas source through pipelines, and a stop valve C is provided on the pipeline connected to the gas source.

[0016] The air pressure regulating method of the high-low pressure two-stage decompression air supply system for an air flotation platform of the present invention comprises the following steps: Step A: The high-pressure gas cylinder is in operation, and high-pressure gas is output to the high-pressure pressure reducing valve; Step B, the high-pressure pressure reducing valve reduces the high-pressure gas to a medium pressure range; Step C, temporarily storing the medium-pressure gas in the gas container to balance pressure fluctuations; Step D, the low-pressure pressure reducing valve further reduces the medium-pressure gas to the working pressure required by the air flotation platform; Step E, controlling the rapid on-off of the gas by the high-speed switching valve to achieve dynamic regulation of the gas pressure; Step F: installing digital pressure gauges on the pipelines before the inlets of the high-pressure pressure reducing valve and the low-pressure pressure reducing valve, respectively. The digital pressure gauges are connected to a controller, and the digital pressure gauges detect the air pressure on the pipelines in real time and feed back the pressure signals to the controller. The controller controls the opening and closing of the high-speed switching valve according to a preset pressure value to achieve closed-loop control. Step G, distributing the gas output by the high-speed switching valve to the air bearings on multiple branches to provide uniform support for the air floating platform; In step H, when the air flotation platform needs to be lowered, the low-pressure gas cylinder and the high-pressure gas cylinder work simultaneously. The low-pressure gas in the low-pressure gas cylinder is mixed with the high-pressure gas in the high-pressure gas cylinder and then output to the high-pressure reducing valve to quickly reduce the gas pressure. Then, steps B to G are repeated to quickly lower the air flotation platform.

[0017] The advantages and positive effects of the present invention are: 1. This invention uses high and low pressure dual-stage decompression to effectively reduce the fluctuation of output air pressure and improve the stability of the air flotation platform operation.

[0018] 2. The high-pressure pressure reducing valve and the low-pressure pressure reducing valve of the present invention are arranged in series, and through two-stage decompression, the pressure fluctuation caused by single-stage decompression is effectively reduced, thereby improving the stability of air pressure output.

[0019] 3. This invention utilizes a high-speed on-off valve in conjunction with a digital pressure gauge to achieve rapid, precise regulation and closed-loop control of air pressure, enabling rapid response to external pressure adjustment requirements, improving the system's regulation accuracy and dynamic response performance, and meeting the demand for high dynamic performance.

[0020] 4. The tee support and tee protection cover of the present invention are used to fix and protect the tee, preventing the pipeline from loosening or leaking due to vibration or external force, thereby improving system reliability.

[0021] 5. The present invention has a compact structure, is easy to install and integrate, and improves the convenience of maintenance and overall safety through modular design. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a structural front view of the gas supply system of the present invention; Figure 2 It is a left side view of the structure of the gas supply system of the present invention; Figure 3 A bottom view of the structure of the gas supply system of the present invention; Figure 4 It is the gas circuit principle diagram of the gas supply system of the present invention; Among them: 1 is a three-way supporting part, 2 is a three-way, 3 is a high-speed switching valve, 4 is an upper cover plate, 5 is a support column, 6 is a filter, 7 is a gas cylinder fixing device, 8 is a high-pressure gas cylinder, 9 is a gas container, 10 is a digital pressure gauge, 11 is a low-pressure pressure reducing valve, 12 is a three-way protective cover, 13 is a high-pressure pressure reducing valve, 14 is a gas cylinder connector, 15 is a low-pressure gas cylinder, 16 is a main valve, 1701 is an air bearing A, 1702 is an air bearing B, 1703 is an air bearing C, 18 is a lower base plate, 19 is a partition, 20 is a stop valve A, 21 is a stop valve B, and 22 is a stop valve C. DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] like Figures 1 to 4As shown, the high-low pressure two-stage pressure reducing gas supply system of the present invention includes a structural frame and a high-speed switching valve 3, a high-pressure gas cylinder 8, a gas container 9, a low-pressure pressure reducing valve 11, a high-pressure pressure reducing valve 13, a main valve 16 and a low-pressure gas cylinder 15 respectively installed in the structural frame, wherein the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are arranged side by side, and the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 respectively store high-pressure gas and low-pressure gas, and the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are respectively connected to the inlet of the high-pressure pressure reducing valve 13 through a pipeline, and the high-pressure pressure reducing valve 13 reduces the high-pressure gas in the high-pressure gas cylinder 8 to a medium pressure range. The outlet of the high-pressure pressure reducing valve 13 is connected to the inlet of the gas container 9 through a pipeline. The gas container 9 is used to temporarily store medium-pressure gas and balance the fluctuation of gas supply pressure to ensure the stability of downstream gas supply; the outlet of the gas container 9 is connected to the inlet of the low-pressure pressure reducing valve 11 through a pipeline. The low-pressure reducing valve 11 further reduces the medium-pressure gas to the working pressure required by the air flotation platform. The outlet of the low-pressure reducing valve 11 is connected to the inlet of the high-speed switching valve 3 through a pipeline. The outlet of the high-speed switching valve 3 is divided into multiple branches, each of which is connected to an air flotation bearing, and each air flotation bearing is installed on the bottom surface of the structural frame; the high-speed switching valve 3 and the main valve 16 are respectively connected to the controller (the controller of the present invention can be implemented by the industrial control system in the prior art). The high-speed switching valve 3 can quickly open or close the gas flow according to the control signal of the controller, and is used to quickly adjust the air pressure of the air flotation platform, thereby improving the dynamic response performance; the main valve 16 is an electric control valve, which is used to realize remote opening and closing operations through the control signal sent by the controller, and control the main switch of the gas source of the entire air supply system.

[0025] The structural frame of this embodiment includes an upper cover plate 4, support columns 5 and a lower base plate 18. Multiple support columns 5 are provided between the upper cover plate 4 and the lower base plate 18. The upper and lower ends of each support column 5 are respectively connected to the upper cover plate 4 and the lower base plate 18 by bolts. The main valve 16 is installed on the upper surface of the lower base plate 18, and each air bearing is installed on the lower surface of the lower base plate 18. In this embodiment, the upper cover plate 4 and the lower base plate 18 are both square plates, and there are four support columns 5, which form a rectangular parallelepiped structural frame after being connected, which is used to support and fix the high-pressure gas cylinder 8, the low-pressure gas cylinder 15, the valve components and pipelines to ensure the structural stability of the gas supply system; a partition 19 fixed to each support column 5 is also provided between the upper cover plate 4 and the lower base plate 18, and the bottle bodies of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are mounted on the partition 19 through the gas cylinder fixing device 7 (which can be a clamp in this embodiment), and the bottom and bottle mouth of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are respectively located on the upper and lower sides of the partition 19; the high-speed switching valve 3 and the high-pressure reducing valve 13 are respectively mounted on the upper surface of the partition 19, the gas volume 9 is fixed to the lower surface of the partition 19, and the low-pressure reducing valve 11 and the main valve 16 are both located below the partition 19.

[0026] In this embodiment, the bottle mouths of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are respectively connected to a gas cylinder connector 14, and the gas cylinder connector 14 is connected to the inlet of the high-pressure reducing valve 13 through a pipeline. A stop valve A20 and a filter 6 are provided on the pipeline between the gas cylinder connector 14 of the high-pressure gas cylinder 8 and the inlet of the high-pressure reducing valve 13, and a stop valve B21 and a filter 6 are provided on the pipeline between the gas cylinder connector 14 of the low-pressure gas cylinder 15 and the inlet of the high-pressure reducing valve 13, that is, the high-pressure gas cylinder 8, the stop valve A20 and the filter 6 are connected in parallel with the low-pressure gas cylinder 15, the stop valve B21 and the filter 6; the filter 6 is used to filter solid particle impurities in the gas to prevent impurities from entering downstream valve components and air bearings to affect the system accuracy or block the valve components. High-pressure gas cylinder 8 and low-pressure gas cylinder 15 are connected to a gas source via pipelines. A shutoff valve C22 is provided on the pipelines connecting to the gas source. By controlling the opening and closing of shutoff valves A20, B21, and C22, the gas source can be used to fill high-pressure gas (which can reach 20 MPa) into high-pressure gas cylinder 8 or low-pressure gas (which can reach 5 MPa) into low-pressure gas cylinder 15. The filter 6 of this embodiment is a conventional metal sintered filter element with a filtration accuracy of 5 to 20 μm.

[0027] In this embodiment, a digital pressure gauge 10 is respectively provided on the pipeline in front of the inlet of the high-pressure reducing valve 13 and the pipeline in front of the inlet of the low-pressure reducing valve 11. Each digital pressure gauge 10 is connected to the controller for real-time detection of the output air pressure and outputting a pressure signal; the digital pressure gauge 10 feeds back the real-time detected air pressure signal to the controller, and the controller controls the opening and closing of the high-speed switching valve 3 according to the preset target pressure value to achieve closed-loop regulation of the output air pressure, thereby achieving precise air pressure regulation.

[0028] This embodiment has three branches. A tee 2 is installed between the outlet of the high-speed on / off valve 3 and each branch. The tee 2 is secured to the lower base plate 18 via a tee support 1. A tee protective cover 12 covers the outside of the tee 2. This cover 12 is made of metal or high-strength engineering plastic to prevent loosening or leakage caused by vibration or external impact. The first port of the tee 2 is connected to the outlet of the high-speed on / off valve 3 via a pipeline. The second port of the tee 2 is connected to one end of the first branch. The other end of the first branch is equipped with an air bearing A1701. The third port of the tee 2 is connected to one end of each of the other two branches. The other ends of the other two branches are connected to air bearings B1702 and C1703, respectively. Air bearings A1701, B1702, and C1703 are mounted on the air flotation platform to provide uniform, stable, and independently adjustable air support force to the platform's multiple support points, achieving low-friction levitation of the platform.

[0029] The three air bearings of this embodiment are all commercially available products, purchased from Eisenberg Air Flotation Technology (Beijing) Co., Ltd., with the model number EZ-0053-045. The high-pressure pressure reducing valve 13 of this embodiment is a commercially available product, purchased from GENTEC Corporation in the United States, with the model number R21SLBK-DHG-00-00. The low-pressure pressure reducing valve 11 of this embodiment is a commercially available product, purchased from SMC Corporation in Japan, with the model number IR1020-01BG-A. The high-speed switching valve 3 of this embodiment is a commercially available product, purchased from FESTO Corporation in Germany, with the model number MHJ9-QS-4-LF, and a response time of less than 50ms, allowing for rapid adjustment. The main valve 16 of this embodiment is a commercially available product, purchased from FESTO Corporation in Germany, with the model number HE-2-1 / 4-QS-8. In this embodiment, there are two high-speed switching valves 3 and filters 6, which are divided into two groups. The high-speed switching valves 3 and filters 6 in each group are integrated into a module. Both filters 6 are used, but only one high-speed switching valve 3 is used, and the other high-speed switching valve 3 is not used.

[0030] In this embodiment, the gas container 9 is a sealed medium-pressure gas buffer container with a capacity of 0.5 to 2 liters, which is used to reduce pressure fluctuations between the high-pressure pressure reducing valve 13 and the low-pressure pressure reducing valve 11. In this embodiment, the high-pressure pressure reducing valve 13 is used to reduce the high-pressure gas from 10 to 30 MPa to a medium pressure range of 1 to 3 MPa. The low-pressure pressure reducing valve 11 further reduces the medium-pressure gas to an operating pressure range of 0.05 to 0.3 MPa.

[0031] The air pressure regulating method of the high-low pressure two-stage decompression air supply system for an air flotation platform of the present invention comprises the following steps: Step A: Open the stop valve C22 and the stop valve A20, close the stop valve B21 and the high-pressure reducing valve 13, and fill the high-pressure gas cylinder 8 with 20 MPa high-pressure gas through the gas source; after it is full, close the stop valve A20, open the stop valve B21, and fill the low-pressure gas cylinder 15 with 5 MPa low-pressure gas through the gas source until it is full; then, close the stop valve B21 and the stop valve C22; Step B, open the stop valve A20 and the high-pressure reducing valve 13, the high-pressure gas cylinder 8 works, and the high-pressure gas is output to the high-pressure reducing valve 13; Step C: The high-pressure pressure reducing valve 13 reduces the high-pressure gas to a medium pressure range of 2 MPa; Step D, temporarily storing the medium-pressure gas in the gas container 9 to balance the pressure fluctuations; Step E: The low-pressure pressure reducing valve 11 further reduces the medium-pressure gas pressure to the working pressure required by the air flotation platform; Step F, controlling the rapid on-off of the gas through the high-speed switching valve 3 to achieve dynamic regulation of the gas pressure; Step G: The digital pressure gauge 10 detects the air pressure in the pipeline in real time and feeds the pressure signal back to the controller. The controller controls the opening and closing of the high-speed switching valve 3 according to the preset pressure value to achieve closed-loop control. Step H: The gas outputted by the high-speed switching valve 3 is distributed to the air bearing A1701, air bearing B1702, and air bearing C1703 on the three branches to provide uniform support for the air bearing platform. In step I, when the air flotation platform needs to be lowered, the shut-off valve B21 is opened, and the low-pressure gas cylinder 15 and the high-pressure gas cylinder 8 work simultaneously. The low-pressure gas in the low-pressure gas cylinder 15 is mixed with the high-pressure gas in the high-pressure gas cylinder 8 and then output to the high-pressure reducing valve 13, which rapidly reduces the gas pressure. Then, steps B to G are repeated to rapidly lower the air flotation platform.

[0032] The present invention significantly reduces the pressure fluctuation caused by single-stage pressure reduction through a high-low pressure two-stage pressure reduction design, and uses a high-speed switching valve and a digital pressure gauge to achieve rapid response and closed-loop control, thereby improving the dynamic performance and accuracy of the air supply system. It is suitable for air flotation platforms with high requirements for air supply stability and response speed.

Claims

1. A high-low pressure dual-stage decompression air supply system for an air flotation platform, characterized by: The invention comprises a structural frame and a high-speed switch valve (3), a high-pressure gas cylinder (8), a gas container (9), a low-pressure pressure reducing valve (11), a high-pressure pressure reducing valve (13), a main valve (16) and a low-pressure gas cylinder (15) respectively installed in the structural frame, wherein the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) store high-pressure gas and low-pressure gas respectively, and the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to the inlet of the high-pressure pressure reducing valve (13) through a pipeline, and the high-pressure pressure reducing valve (13) reduces the high-pressure gas in the high-pressure gas cylinder (8) to a medium pressure range, and the outlet of the high-pressure pressure reducing valve (13) is connected to the inlet of the gas container (9) through a pipeline, and the gas container (9) is used to temporarily store the medium-pressure gas and balance the supply pressure. The outlet of the gas container (9) is connected to the inlet of the low-pressure pressure reducing valve (11) through a pipeline. The low-pressure pressure reducing valve (11) further reduces the pressure of the medium-pressure gas to the working pressure required by the air flotation platform. The outlet of the low-pressure pressure reducing valve (11) is connected to the inlet of the high-speed switch valve (3) through a pipeline. The outlet of the high-speed switch valve (3) is divided into multiple branches, each branch is connected to an air flotation bearing, and each of the air flotation bearings is installed on the bottom surface of the structural frame; the high-speed switch valve (3) and the main valve (16) are respectively connected to the controller. The high-speed switch valve (3) quickly opens or closes the gas flow according to the control signal of the controller, and the main valve (16) controls the main switch of the gas source of the entire air supply system.

2. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: Filters (6) for filtering impurities in the gas are respectively provided on the pipeline between the high-pressure gas cylinder (8) and the high-pressure reducing valve (13) and the pipeline between the low-pressure gas cylinder (15) and the high-pressure reducing valve (13).

3. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: A digital pressure gauge (10) for detecting the output air pressure in real time and outputting a pressure signal is provided on the pipeline in front of the inlet of the high-pressure pressure reducing valve (13) and the pipeline in front of the inlet of the low-pressure pressure reducing valve (11), respectively. The digital pressure gauge (10) is connected to a controller. The digital pressure gauge (10) feeds back the detected air pressure signal to the controller. The controller controls the opening and closing of the high-speed switch valve (3) according to a preset target pressure value to achieve closed-loop regulation of the output air pressure.

4. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: There are three branches, and a tee (2) is provided between the outlet of the high-speed switch valve (3) and each branch. The first interface of the tee (2) is connected to the outlet of the high-speed switch valve (3) through a pipeline, the second interface of the tee (2) is connected to one end of a branch, and the third interface of the tee (2) is respectively connected to one end of the other two branches, and the other ends of the three branches are respectively connected to an air bearing.

5. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 4, characterized in that: The tee (2) is fixed to the structural frame via a tee support (1), and the outside of the tee (2) is covered with a tee protective sleeve (12) for preventing the pipeline from loosening or leaking due to vibration or external force.

6. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: The main valve (16) is an electric control valve, which is used to realize remote opening and closing operations through the control signal sent by the controller.

7. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: The structural frame comprises an upper cover plate (4), support columns (5) and a lower base plate (18), wherein a plurality of support columns (5) are provided between the upper cover plate (4) and the lower base plate (18), and the upper and lower ends of each support column (5) are respectively connected to the upper cover plate (4) and the lower base plate (18) by bolts, and the main valve (16) is mounted on the upper surface of the lower base plate (18).

8. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 7, characterized in that: A partition (19) fixed to each support column (5) is provided between the upper cover plate (4) and the lower base plate (18); the bodies of the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are mounted on the partition (19) through a gas cylinder fixing device (7); the bottoms and mouths of the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively located on the upper and lower sides of the partition (19); the high-speed switching valve (3) and the high-pressure pressure reducing valve (13) are respectively mounted on the upper surface of the partition (19); the gas container (9) is fixed on the lower surface of the partition (19); and the low-pressure pressure reducing valve (11) and the main valve (16) are both located below the partition (19).

9. The high-low pressure dual-stage decompression air supply system for an air flotation platform according to claim 1, characterized in that: The mouths of the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to gas cylinder connectors (14), and the gas cylinder connectors (14) are connected to the inlet of the high-pressure reducing valve (13) through pipelines. A stop valve A (20) is provided on the pipeline between the gas cylinder connector (14) of the high-pressure gas cylinder (8) and the inlet of the high-pressure reducing valve (13), and a stop valve B (21) is provided on the pipeline between the gas cylinder connector (14) of the low-pressure gas cylinder (15) and the inlet of the high-pressure reducing valve (13). The high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to a gas source through pipelines, and a stop valve C (22) is provided on the pipeline connected to the gas source.

10. An air pressure regulating method for a high- and low-pressure dual-stage decompression air supply system for an air flotation platform according to any one of claims 1 to 9, characterized in that: The steps include: Step A, the high-pressure gas cylinder (8) is operated, and the high-pressure gas is output to the high-pressure pressure reducing valve (13); Step B, the high-pressure pressure reducing valve (13) reduces the high-pressure gas to a medium pressure range; Step C, temporarily storing the medium-pressure gas in the gas container (9) to balance pressure fluctuations; Step D, the low-pressure pressure reducing valve (11) further reduces the pressure of the medium-pressure gas to the working pressure required by the air flotation platform; Step E, controlling the rapid on-off of the gas through the high-speed on-off valve (3) to achieve dynamic regulation of the gas pressure; In step F, digital pressure gauges (10) are respectively provided on the pipelines before the inlets of the high-pressure pressure reducing valve (13) and the low-pressure pressure reducing valve (11), and the digital pressure gauges (10) are connected to a controller. The digital pressure gauges (10) detect the air pressure on the pipelines in real time and feed back the pressure signal to the controller. The controller controls the opening and closing of the high-speed switching valve (3) according to a preset pressure value to realize closed-loop control. Step G, the gas output by the high-speed switching valve (3) is distributed to the air bearings on the multiple branches to provide uniform support for the air floating platform; In step H, when the air flotation platform needs to be lowered, the low-pressure gas cylinder (15) and the high-pressure gas cylinder (8) work simultaneously, and the low-pressure gas in the low-pressure gas cylinder (15) and the high-pressure gas in the high-pressure gas cylinder (8) are mixed and output to the high-pressure pressure reducing valve (13), so that the gas pressure is quickly reduced, and then steps B to G are repeated to make the air flotation platform quickly descend.

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