Vacuum coating water-cooling machine adopting gas-liquid separation type cooling module

Abstract

The invention relates to the technical field of vacuum coating equipment, and discloses a vacuum coating water-cooling machine adopting a gas-liquid separation type cooling module, which comprises a case with an upper partition plate and a lower partition plate, a water tank and a water-cooling plate heat exchanger are respectively mounted on the left side and the right side of the upper partition plate, and a gas-liquid separator is mounted on the left side of the lower partition plate in a penetrating manner; a compressor is installed on the left rear side of the inner wall of the bottom end of the machine box, and a condenser is installed on the front side of the bottom end of the machine box. The vacuum coating water cooling machine adopting the gas-liquid separation type cooling module can effectively solve the problems that in the prior art, a gas-liquid separator is mostly adopted for simple gas-liquid separation, the separation effect is unstable, the load caused to the gas-liquid separator is large, and the gas-liquid separation efficiency is further affected; the problems that a traditional gas-liquid separator is mostly connected through welding or customized flanges, the requirement of a rapid parallel refrigeration unit cannot be met, and different flange plates cannot be rapidly connected in a butt joint mode when the gas-liquid separator is connected through the customized flanges are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a vacuum coating water cooling machine adopting a gas-liquid separation cooling module. Background Art

[0002] Vacuum coating equipment, a core component of modern precision manufacturing, is widely used in fields such as optical coating, semiconductor packaging, decorative coatings, and functional thin film deposition. Its stable operation relies heavily on efficient and precise temperature control. Existing water-cooled chillers can improve basic cooling performance by enhancing heat exchanger efficiency and optimizing compressor control. These chillers fulfill the core task of efficiently dissipating the continuously accumulated heat load on key components such as the coating chamber, magnetron targets, and vacuum pump units.

[0003] In this regard, the present application designs a vacuum coating water-cooling machine using a gas-liquid separation cooling module. In order to avoid liquid refrigerant rushing into the compressor and causing mechanical damage, existing water-cooling machines mostly use gas-liquid separators for simple gas-liquid separation. Due to the unstable separation effect, the separated gas will still have problems of oil mist and steam carryover, and when processing the high-speed airflow transported from the evaporator, since it will be mixed with large droplets and entrained solid particles, the load on the gas-liquid separator is relatively large, further affecting the gas-liquid separation efficiency; at the same time, traditional gas-liquid separators are mostly connected by welding or customized flanges. When the vacuum coating production line is expanded to add a new PVD chamber, due to its rigid connection and difficulty in adaptation, it cannot meet the needs of fast parallel refrigeration units, and it is also impossible to quickly connect different flanges when connected through customized flanges. The applicability needs to be improved. Summary of the Invention

[0004] In response to the above-mentioned shortcomings of the prior art, the present invention provides a vacuum coating water chiller using a gas-liquid separation cooling module, which can effectively solve the problem in the prior art that most of the gas-liquid separators are used for simple gas-liquid separation, the separation effect is unstable, and the load on the gas-liquid separator is large, further affecting the gas-liquid separation efficiency; traditional gas-liquid separators are mostly connected by welding or customized flanges, which cannot meet the needs of fast parallel refrigeration units, and the problem that different flanges cannot be quickly connected when connected by customized flanges.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: The present invention provides a vacuum coating water cooling machine using a gas-liquid separation cooling module, comprising: A chassis with upper and lower partitions, with a water tank and a water-cooled plate heat exchanger installed on the left and right sides of the upper partition respectively, a gas-liquid separator installed through the left side of the lower partition, an evaporator installed on the right side of the lower partition, a compressor installed on the left rear side of the inner wall of the bottom end of the chassis, and a condenser installed on the front side of the bottom end of the chassis. The chassis and the gas-liquid separator are jointly provided with a load reduction adjustment part, and the gas-liquid separator, evaporator and compressor are jointly provided with a quick release part; The load reduction adjustment part includes a liquid accumulation seat installed on the inner wall of the bottom end of the chassis, the lower end of the gas-liquid separator is connected to the liquid accumulation seat, the upper end of the gas-liquid separator is installed with a gas phase discharge pipe through a circular hole, a rotating shaft is provided in the middle of the gas phase discharge pipe, a liquid separation plate is fixedly sleeved on the upper side of the outer wall of the gas phase discharge pipe, and a load reduction group is commonly provided on the gas-liquid separator, the gas phase discharge pipe and the rotating shaft corresponding to the liquid separation plate; Among them, the load reduction adjustment part also includes a threaded sleeve located on the lower middle side of the outer wall of the rotating shaft and connected by threads. The gas-liquid separator, the threaded sleeve and the rotating shaft are jointly provided with a flow adjustment group, and the sliding sleeve on the lower side of the outer wall of the rotating shaft is provided with a sleeve.

[0006] Furthermore, the quick-release part includes a docking tube located at the upper end of the gas-liquid separator and connected to the upper and lower sides of the outer wall. The corresponding multiple docking tubes on the evaporator and the compressor are also connected to docking tubes. The opposite ends of the two adjacent docking tubes are connected to flanges through threads, and a quick-release group is jointly provided on the flange and the docking tube.

[0007] Furthermore, the load reduction group includes strong magnetic rings symmetrically arranged on the upper and lower inner walls of the gas phase discharge pipe, and symmetrically provided with air vents on the strong magnetic rings. The upper strong magnetic ring is fixedly mounted on the rotating shaft and rotates to fit the inner wall of the gas phase discharge pipe. The lower strong magnetic ring is connected to the rotating shaft through a thread, and a matching slide groove is symmetrically provided on the outer wall of the lower strong magnetic ring. Matching sliders are symmetrically installed on the inner wall of the gas phase discharge pipe corresponding to the upper threaded section of the rotating shaft. The two matching sliders are respectively slidably connected to the corresponding inner walls of the matching slide grooves. The lower end of the rotating shaft is rotatably connected to the inner wall of the effusion seat, and the upper end rotates through the corresponding docking pipe.

[0008] Furthermore, the load reduction group also includes a positioning ring fixedly mounted at both ends of the upper threaded section of the rotating shaft, a magnetic sleeve is provided on the outer wall of the gas phase exhaust pipe corresponding to the upper strong magnetic ring rotating sleeve, and a plurality of brush plates evenly distributed in a circle are installed on the outer wall of the magnetic sleeve, and a magnetic blocking plate is provided on the outer wall of the gas phase exhaust pipe corresponding to the lower strong magnetic ring sliding sleeve.

[0009] Furthermore, the load reduction group also includes a plurality of stepped holes located on the outer wall of the gas-liquid separator corresponding to the liquid separation plate. The plurality of stepped holes are evenly distributed around the circumference. An electromagnet is installed on the upper side of the inner wall on the side with a larger diameter of the stepped hole, and the end of the electromagnet facing the rotating shaft is connected to a plug through a compression spring. The outer wall of the plug is movably fitted on the inner wall on the side with a smaller diameter of the stepped hole. A collection cover is provided on the outer wall of the gas-liquid separator corresponding to the plurality of electromagnet fixing sleeves.

[0010] Furthermore, the flow regulating group includes a positioning ring 2 fixedly mounted at both ends of the threaded section on the lower side of the rotating shaft, and a plurality of telescopic separation plates evenly distributed in a circle are hinged on the outer wall of the threaded sleeve, and the end of the telescopic separation plate away from the threaded sleeve is connected to the inner wall of the gas-liquid separator.

[0011] Furthermore, a buoyancy plate is provided on the upper rotating sleeve of the outer wall of the sleeve, and a liquid blocking plate is provided on the lower rotating sleeve of the outer wall of the sleeve that is movably fitted on the inner wall of the liquid accumulation seat. The lower end of the liquid blocking plate is connected to the inner wall of the bottom end of the liquid accumulation seat through a tension spring.

[0012] Furthermore, a spiral blade is fixedly sleeved on the middle part of the outer wall of the gas phase exhaust pipe, and a plurality of foam breaking nets evenly distributed from bottom to top are installed on the bottom end of the inner wall of the gas phase exhaust pipe.

[0013] Furthermore, an optical axis segment is provided on the middle part of the threaded section on the flange and on one side of the threaded section on the docking tube near the tail end. The quick-release group includes a plurality of accommodating holes corresponding to the optical axis segments on the inner wall of the flange. The plurality of accommodating holes are respectively connected to the corresponding bolt holes, and a resisting plug rod is slidably installed on the inner wall of the accommodating hole through a compression spring. A card slot is provided on the outer wall of the optical axis segment in the threaded section on the docking tube corresponding to the plurality of accommodating holes.

[0014] Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects: The present invention provides a vacuum coating water cooling machine adopting a gas-liquid separation cooling module. When it is necessary to adapt to a docking pipe with flanges of different specifications, the staff will remove the mounting bolts on multiple flanges on the gas-liquid separator in turn, thereby quickly releasing the effect of multiple interference rods for clamping the flange and the corresponding docking pipe. The staff will separate the flange from the docking pipe by spiral rotation, and install the adapted flange of the same specification on the tail end of the docking pipe by spiral rotation. When the vacuum coating production line is expanded to add a new PVD chamber, the problem of conventional welding or customized flange connection being unable to meet the needs of fast parallel refrigeration units due to rigid connection and difficulty in adaptation is avoided. Different flanges can be quickly docked and have an anti-loosening function, effectively improving the applicability of the gas-liquid separator.

[0015] The refrigerant used in the evaporator will be converted into a high-speed airflow in a gas-liquid state and input into the gas-liquid separator through the docking pipe on the upper side of the outer wall of the gas-liquid separator. It will be filtered by multiple coarse filter holes on the liquid separator plate and then continue to be transported to the lower side of the gas-liquid separator, thereby achieving preliminary interception of large liquid droplets and entrained solid particles in the high-speed airflow, reducing the load on the main separation area on the lower side of the gas-liquid separator, and avoiding the problem of subsequent separation components being easily blocked.

[0016] When the slow airflow that has undergone gas-liquid separation is transported to the top of the telescopic separation plate, the gas phase in the slow airflow will move upward after contacting the upper end surfaces of multiple telescopic separation plates, and the liquid phase in the slow airflow will be filtered and separated through the fine filter holes on the multiple telescopic separation plates, and condensed into water droplets that drip down into the liquid accumulation area at the bottom of the gas-liquid separator, thereby further improving the droplet capture effect through the secondary filtration of the mixed small droplets in the slow airflow through the inclined telescopic separation plate, avoiding the problem of unstable separation effect causing the separated gas to still have oil mist and steam carryover, and the telescopic separation plate can buffer the impact of the high-speed airflow on the accumulated liquid at the bottom of the gas-liquid separator, preventing the accumulated liquid from mixing into the high-speed airflow again. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0018] Figure 1 Schematic diagram of the three-dimensional structure in an embodiment of the present invention; Figure 2 A schematic diagram of the three-dimensional structure of a chassis without a heat dissipation baffle in an embodiment of the present invention; Figure 3 Schematic diagram of the three-dimensional structure inside the chassis in an embodiment of the present invention; Figure 4 A schematic structural diagram of a three-dimensional partial cross-section of a load-reducing adjustment portion and a quick-release portion in an embodiment of the present invention; Figure 5 For the present invention Figure 4 Enlarged schematic diagram of the X in the middle; Figure 6 This is a schematic diagram of the structure of the three-dimensional separation of the quick-release part in an embodiment of the present invention; Figure 7 Schematic diagram of the structure of the three-dimensional separation of the gas-liquid separator and the load reduction group in an embodiment of the present invention; Figure 8 A schematic structural diagram of a three-dimensional partial cross-section of a load reduction adjustment portion in an embodiment of the present invention; Figure 9 It is a schematic structural diagram of the three-dimensional separation of the load reduction adjustment part in an embodiment of the present invention.

[0019] 85. The numbers in the figure represent: 1. chassis; 2. water tank; 3. water-cooled plate heat exchanger; 4. gas-liquid separator; 5. evaporator; 6. compressor; 7. condenser; 8. load-reducing adjustment part; 81. liquid accumulation seat; 82. gas phase discharge pipe; 821. spiral blade; 822. foam breaking net; 83. rotating shaft; 84. liquid separation plate; 85. load-reducing group; 851. strong magnetic ring; 852. positioning ring one; 853. magnetic sleeve; 854. brush plate; 855. magnetic blocking plate; 856. electromagnet; 857. plug; 858. collecting cover; 86. threaded sleeve; 87. flow regulating group; 871. positioning ring two; 872. telescopic separation plate; 88. sleeve; 881. buoyancy plate; 882. liquid blocking plate; 9. quick-release part; 91. flange; 92. quick-release group; 921. resistance rod. DETAILED DESCRIPTION

[0020] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0021] The present invention will be further described below with reference to the embodiments.

[0022] Example:

[0023] See also Figures 1-9 The present invention provides a technical solution: a vacuum coating water chiller using a gas-liquid separation cooling module, comprising: A chassis 1 with upper and lower partitions, with a water tank 2 and a water-cooled plate heat exchanger 3 installed on the left and right sides of the upper partition respectively, a gas-liquid separator 4 is installed through the left side of the lower partition, and an evaporator 5 is installed on the right side of the lower partition. A compressor 6 is installed on the left rear side of the inner wall of the bottom end of the chassis 1, and a condenser 7 is installed on the front side of the bottom end of the chassis 1. A load reduction adjustment part 8 is provided on the chassis 1 and the gas-liquid separator 4, and a quick-release part 9 is provided on the gas-liquid separator 4, the evaporator 5 and the compressor 6; The load reduction regulating portion 8 includes a liquid accumulating seat 81 mounted on the inner wall of the bottom end of the chassis 1. The lower end of the gas-liquid separator 4 is connected to the liquid accumulating seat 81. A gas phase discharge pipe 82 is mounted on the upper end of the gas-liquid separator 4 through a circular hole. A rotating shaft 83 is provided in the middle of the gas phase discharge pipe 82. A liquid separator plate 84 is fixedly sleeved on the upper side of the outer wall of the gas phase discharge pipe 82. A plurality of groups of coarse filter holes uniformly distributed around the circumference are provided on the arc-shaped end surface of the liquid separator plate 84. A load reduction group 85 is provided on the gas-liquid separator 4, the gas phase discharge pipe 82 and the rotating shaft 83 corresponding to the liquid separator plate 84. Among them, the load reduction adjustment part 8 also includes a threaded sleeve 86 located on the lower middle side of the outer wall of the rotating shaft 83 and connected by threads. The gas-liquid separator 4, the threaded sleeve 86 and the rotating shaft 83 are jointly provided with a flow adjustment group 87, and the sliding sleeve on the lower side of the outer wall of the rotating shaft 83 is provided with a sleeve 88.

[0024] The quick-release portion 9 includes a docking tube located at the upper end of the gas-liquid separator 4 and connected to the upper and lower sides of the outer wall. The corresponding multiple docking tubes on the evaporator 5 and the compressor 6 are also connected to docking tubes. The opposite ends of two adjacent docking tubes are connected to flanges 91 through threads, and a quick-release group 92 is jointly provided on the flange 91 and the docking tube.

[0025] The load-reducing group 85 includes a strong magnetic ring 851 symmetrically arranged on the upper and lower inner walls of the gas phase discharge pipe 82. Ventilation holes are symmetrically opened on the strong magnetic ring 851. The upper strong magnetic ring 851 is fixedly sleeved on the rotating shaft 83 and rotates to fit the inner wall of the gas phase discharge pipe 82. The lower strong magnetic ring 851 is connected to the rotating shaft 83 through a thread, and matching grooves are symmetrically opened on the outer wall of the lower strong magnetic ring 851. Matching sliders are symmetrically installed on the inner wall of the gas phase discharge pipe 82 corresponding to the upper threaded section of the rotating shaft 83. The two matching sliders are respectively slidably connected to the corresponding inner walls of the matching grooves. The lower end of the rotating shaft 83 is rotatably connected to the inner wall of the effusion seat 81, and the upper end rotates through the corresponding docking pipe.

[0026] The load-reducing group 85 also includes a positioning ring 852 fixedly mounted on the upper and lower ends of the upper threaded section of the rotating shaft 83. A magnetic sleeve 853 is provided on the outer wall of the gas phase exhaust pipe 82 corresponding to the rotating sleeve of the upper strong magnetic ring 851. The magnetic sleeve 853 is magnetically connected to the upper strong magnetic ring 851, and a plurality of brush plates 854 uniformly distributed in a circle are installed on the outer wall of the magnetic sleeve 853. A magnetic blocking plate 855 is provided on the outer wall of the gas phase exhaust pipe 82 corresponding to the sliding sleeve of the lower strong magnetic ring 851. The magnetic blocking plate 855 is magnetically connected to the lower strong magnetic ring 851.

[0027] The load reduction group 85 also includes a plurality of stepped holes located on the outer wall of the gas-liquid separator 4 corresponding to the liquid separation plate 84. The plurality of stepped holes are evenly distributed around the circumference. An electromagnet 856 is installed on the upper side of the inner wall on the side with a larger diameter of the stepped hole. The electromagnet 856 is a semicircular structure, and the end of the electromagnet 856 facing the rotating shaft 83 is connected to a plug 857 through a compression spring. The outer wall of the plug 857 is movably fitted on the inner wall on the side with a smaller diameter of the stepped hole. A collection cover 858 is fixedly provided on the outer wall of the gas-liquid separator 4 corresponding to the plurality of electromagnets 856.

[0028] The flow regulating group 87 includes a positioning ring 871 fixedly mounted at both ends of the threaded section on the lower side of the rotating shaft 83. A plurality of telescopic separation plates 872 evenly distributed around the circumference are hinged on the outer wall of the threaded sleeve 86. The end of the telescopic separation plate 872 away from the threaded sleeve 86 is connected to the inner wall of the gas-liquid separator 4, and a plurality of groups of fine filter holes evenly distributed around the circumference are provided on the telescopic separation plate 872.

[0029] A buoyancy plate 881 is provided on the upper rotating sleeve of the outer wall of the sleeve 88, and a liquid blocking plate 882 is provided on the lower rotating sleeve of the outer wall of the sleeve 88, which is movably fitted on the inner wall of the liquid accumulation seat 81. The lower end of the liquid blocking plate 882 is connected to the inner wall of the bottom end of the liquid accumulation seat 81 through a tension spring.

[0030] A spiral blade 821 is fixedly sleeved on the middle part of the outer wall of the gas phase discharge pipe 82, and a plurality of foam breaking nets 822 evenly distributed from bottom to top are installed on the bottom end of the inner wall of the gas phase discharge pipe 82.

[0031] A section of optical axis segment is provided on the middle part of the threaded section on the flange 91 and on the side of the threaded section on the docking tube near the tail end. The quick-release group 92 includes a plurality of accommodating holes corresponding to the optical axis segments on the inner wall of the flange 91. The plurality of accommodating holes are respectively connected to the corresponding bolt holes, and a resisting plug rod 921 is slidably installed on the inner wall of the accommodating hole through a compression spring. A card slot is provided on the outer wall of the optical axis segment in the threaded section on the docking tube corresponding to the plurality of accommodating holes.

[0032] The water tank 2 is connected to the water-cooled plate heat exchanger 3 through a water pump, the evaporator 5 is connected to the water tank 2, the water-cooled plate heat exchanger 3 and the condenser 7 through delivery pipes, and the compressor 6 is also connected to the condenser 7 through a delivery pipe.

[0033] When implementing: First of all, the load reduction adjustment part 8 in the present application adopts a graded processing method, which has the advantages of compact structure, small size, low energy consumption, high efficiency, and real-time processing. It can effectively reduce the load on the gas-liquid separator 4 caused by the mixed large droplets and entrained solid particles, and effectively increase the effect of gas-liquid separation. The quick-release part 9 adopts a replaceable flange 91 with an anti-loosening function to meet the needs of fast parallel refrigeration units. It can also quickly connect different flanges 91, which is suitable for scenarios such as mixed use of multiple generations of equipment in vacuum coating production lines, high-frequency expansion and transformation, and vibration-sensitive refrigeration unit docking.

[0034] It should be noted that the water tank 2, water pump, water-cooled plate heat exchanger 3 and evaporator 5 in this application form a water circulation closed-loop system through a delivery pipe, and the compressor 6, condenser 7, external expansion valve, evaporator 5 and gas-liquid separator 4 form a refrigerant circulation closed-loop system through a delivery pipe and a docking pipe. This is the existing technology and will not be described in detail here.

[0035] When installing the gas-liquid separator 4, the staff first moves the flange 91 corresponding to the multiple butt joints on the gas-liquid separator 4 to the tail end of the butt joint by spiral rotation. At this time, the multiple receiving holes on the inner wall of the flange 91 are respectively aligned with the corresponding optical axis segments on the outer wall of the butt joint, and the multiple resistance rods 921 on the flange 91 are under the action of the compression spring. The resistance ends of the resistance rods 921 are initially located in the corresponding bolt holes on the flange 91, and the insertion ends of the resistance rods 921 are initially retracted into the corresponding reception holes. When the gas-liquid separator 4 is placed in a suitable position, the multiple butt joints on the gas-liquid separator 4 are respectively aligned with the evaporator 5 and After the docking pipes on the compressor 6 are docked through the flange 91, the staff will screw the installation bolts into the bolt holes on the flange 91 in turn for locking installation. During this period, the installation bolts will gradually be inserted into the corresponding bolt holes, pushing the corresponding interference rods 921 so that the interference ends are retracted into the corresponding receiving holes, and the insertion ends are extended out of the corresponding receiving holes and inserted into the corresponding card slots, thereby achieving the effect of further clamping the position between the flange 91 and the corresponding docking pipes through multiple interference rods 921, effectively preventing the flange 91 from loosening due to external vibration and other factors, resulting in connection failure and leakage between the docking pipes.

[0036] When it is necessary to adapt to a docking pipe with a flange 91 of different specifications, the staff will remove the mounting bolts on the multiple flanges 91 on the gas-liquid separator 4 in turn. During this period, as the mounting bolts gradually withdraw from the corresponding bolt holes, the corresponding interference rods 921 will also return to their original positions under the action of the compression springs. At this time, the interference ends of the interference rods 921 will be located in the corresponding bolt holes on the flange 91 again, and the insertion ends of the interference rods 921 will be retracted into the corresponding receiving holes again, thereby quickly releasing the multiple interference rods 921 from clamping the flanges 91 and the corresponding docking pipes. The effect is achieved by the staff removing the flanges 91 corresponding to the multiple docking tubes on the gas-liquid separator 4 by spiral rotation to separate them from the docking tubes, and installing the adapted flanges 91 of the same specification on the tail end of the docking tubes by spiral rotation. The above operation can be repeated to perform the docking installation work. When the vacuum coating production line is expanded to add a new PVD chamber, the problem of conventional welding or customized flange connection being unable to meet the needs of fast parallel refrigeration units due to rigid connection and difficulty in adaptation is avoided. Different flanges 91 can be quickly docked and have an anti-loosening function, thereby effectively improving the applicability of the gas-liquid separator 4.

[0037] When the gas-liquid separator 4 is working, it should be noted that in this application, the high-temperature heat generated by the coating equipment is first directly absorbed by the water-cooled plate heat exchanger 3, and the heat is transferred to the water circulation medium. The heated cooling water is then output to the evaporator 5. This is a first-stage heat exchange. The evaporator 5 uses the latent heat of evaporation of the refrigerant to deeply cool the medium-temperature cooling water output by the water-cooled plate to the set temperature. This is a second-stage deep cooling, and the low-temperature cooling water is output to the water tank 2. The water tank 2 transports the low-temperature cooling water to the water-cooled plate heat exchanger 3 through a water pump to realize a water circulation closed-loop system.

[0038] The refrigerant used in the evaporator 5 will be converted into a high-speed airflow in a gas-liquid state and input into the gas-liquid separator 4 through the docking pipe on the upper side of the outer wall of the gas-liquid separator 4. When processing the high-speed airflow transported from the evaporator 5, it will be mixed with large droplets and entrained solid particles. When the high-speed airflow enters the gas-liquid separator 4, it will be filtered by multiple coarse filter holes on the liquid separator plate 84 and continue to be transported to the lower side of the gas-liquid separator 4, thereby achieving preliminary interception of large droplets mixed with the high-speed airflow and entrained solid particles, reducing the load of the main separation area on the lower side of the gas-liquid separator 4, and avoiding the problem of subsequent separation components being easily blocked. It should be noted that the large droplets intercepted on the liquid separator plate 84 will drip downwards onto the spiral blade 821 after condensation, and spirally drip onto the telescopic separation plate 872 along with the spiral blade 821, and finally further filtered and refined by the multiple fine filter holes on the telescopic separation plate 872 and drip into the liquid accumulation area at the bottom of the gas-liquid separator 4. The high-speed airflow intercepted and screened by the liquid separator plate 84 will reduce the flow rate and be converted into a slow airflow.

[0039] When the slow airflow that has been preliminarily filtered is transported to the spiral blades 821, the spiral blades 821 will force the slow airflow to perform centrifugal swirling motion and generate centrifugal force, causing the gas phase and liquid phase with different densities in the slow airflow to move relative to each other. The liquid will adhere to the inner wall of the gas-liquid separator 4 and, under the action of gravity, will also spiral downward along the spiral blades 821 to the telescopic separation plate 872 and gather in the liquid accumulation area at the bottom of the gas-liquid separator 4, thereby achieving the effect of gas-liquid separation. At this time, the gas phase and a small amount of unseparated liquid phase in the slow airflow will be transported to the top of the telescopic separation plate 872 through the spiral blades 821.

[0040] When the slow airflow that has undergone gas-liquid separation is transported to the top of the telescopic separation plate 872, it should be noted that multiple telescopic separation plates 872 together form an umbrella-shaped guide plate. Under the guiding and filtering effect of the umbrella-shaped guide plate, the water droplets will settle downward due to their weight, and the gas will move upward. The gas phase in the slow airflow will move upward after contacting the upper end surfaces of the multiple telescopic separation plates 872, and be transported to the bottom inlet of the gas phase discharge pipe 82. The fine water droplets entrained in the slow airflow are separated by multiple foam-breaking nets 822, and condensed into larger water droplets that sink to the multiple telescopic separation plates 872. Then, the pure gaseous airflow is discharged from the top of the gas phase discharge pipe 82 to the docking pipe at the upper end of the gas-liquid separator 4, and finally transported to the compressor 6 by the docking pipe to realize the refrigerant circulation closed-loop system.

[0041] During this period, the liquid phase in the slow airflow will be filtered and separated through the fine filter holes on multiple telescopic separation plates 872, and condensed into water droplets that drip down into the liquid accumulation area at the bottom of the gas-liquid separator 4, thereby achieving the effect of secondary filtration of the mixed small droplets in the slow airflow through the inclined telescopic separation plate 872, further improving the droplet capture effect, and avoiding the problem of unstable separation effect causing the separated gas to still have oil mist and steam carryover, and the telescopic separation plate 872 can buffer the impact of the high-speed airflow on the accumulated liquid at the bottom of the gas-liquid separator 4, preventing the accumulated liquid from mixing into the high-speed airflow again.

[0042] It should also be noted that when the coating process suddenly changes from the standby state to the high-power sputtering / evaporation stage, due to the step-like increase in heat load, the traditional temperature feedback loop response delay causes the cooling water outlet temperature to increase instantaneously. At this time, the step change of sputtering / evaporation power will directly cause the slow airflow flow rate to change. Since the slow airflow residence time varies with the fluctuation of the intake volume, when the slow airflow flow rate is low, the rotation of the rotating shaft 83 is controlled by the external servo motor. The rotating shaft 83 will drive multiple telescopic separation plates 872 to move downward synchronously through the threaded sleeve 86, reducing the guide angle / resistance, shortening the flow path to avoid excessive retention, and maintaining a reasonable pressure drop. When the slow airflow is low, the rotation of the rotating shaft 83 is controlled by the external servo motor. The rotating shaft 83 will drive multiple telescopic separation plates 872 to move downward synchronously through the threaded sleeve 86, reducing the diversion angle / resistance, shortening the flow path to avoid excessive retention, and maintaining a reasonable pressure drop. When the fast air flow rate is high, the rotating shaft 83 is controlled by the external servo motor to rotate in the opposite direction. The rotating shaft 83 will drive multiple telescopic separation plates 872 to move upward synchronously through the threaded sleeve 86, thereby increasing the diversion angle / resistance, extending the flow path to reduce the flow rate, and increasing the residence time to ensure that the tiny droplets are fully settled. During the up and down movement of the threaded sleeve 86, the multiple telescopic separation plates 872 will all perform adaptive telescopic compensation, thereby achieving the effect of adjusting the diversion angle of multiple telescopic separation plates 872, avoiding the problem of excessive efficiency caused by too long residence time when the slow air flow rate is low, and the problem of incomplete gas-liquid separation caused by insufficient residence time when the slow air flow rate is high.

[0043] When the liquid separation plate 84 needs to be cleaned, the rotating shaft 83 is controlled by the external servo motor to rotate, and the rotating shaft 83 will drive the upper strong magnetic ring 851 to rotate, and the upper strong magnetic ring 851 will drive the magnetic sleeve 853 to rotate synchronously through the magnetic connection, and the magnetic sleeve 853 will drive multiple brush plates 854 to rotate synchronously to clean the upper end surface of the liquid separation plate 84 to prevent the filtered large droplets and entrained solid particles from clogging the multiple coarse filter holes on the liquid separation plate 84. The filtered solid particles will slide from the arc-shaped inclined surface end of the liquid separation plate 84 to the horizontal surface end. At the same time, the rotating shaft 83 will drive the lower strong magnetic ring 851 to move upward through the threaded connection, and the lower strong magnetic ring 851 will drive the magnetic blocking plate 855 to move upward synchronously through the magnetic connection until the upper end surface of the magnetic blocking plate 855 is tightly fitted on the lower end surface of the liquid separation plate 84. Thereby achieving the effect of sealing the liquid separation plate 84, at this time, the multiple electromagnets 856 can be controlled to start working, and under the strong magnetic attraction of the multiple electromagnets 856, the multiple plugs 857 will withdraw from the inner wall of the side with the smaller diameter of the stepped hole to the inner wall of the side with the larger diameter, and approach the corresponding electromagnets 856 respectively, and then the external vacuum pump connected to the collection cover 858 will suck out the solid particles on the upper end of the liquid separation plate 84 from the multiple stepped holes for processing, thereby achieving the effect of cleaning the liquid separation plate 84. After cleaning, the multiple electromagnets 856 are controlled to stop working, and under the action of the compression spring, the multiple plugs 857 will return to their original position and be inserted into the inner wall of the side with the smaller diameter of the stepped hole again for sealing, thereby avoiding the problem of high-speed airflow leakage when the gas-liquid separator 4 is working.

[0044] When the liquid refrigerant stored in the bottom liquid accumulation area of ​​the gas-liquid separator 4 exceeds the predetermined high liquid level and needs to be discharged, it should be noted that during the gas-liquid separation process, as the liquid level of the liquid refrigerant stored in the bottom liquid accumulation area of ​​the gas-liquid separator 4 gradually increases, under the buoyancy of the buoyancy plate 881, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move upward synchronously along the rotating shaft 83 until the liquid blocking plate 882 moves upward to the liquid accumulation area of ​​the gas-liquid separator 4, the liquid refrigerant will flow into the liquid accumulation seat 81, and will be pumped out by the external water pump through the docking pipe and transported to the steam generator. In the transmitter 5, as the liquid refrigerant level stored in the bottom liquid accumulation area in the gas-liquid separator 4 gradually decreases and reaches the predetermined low liquid level, under the combined action of the tension of the tension spring and the buoyancy of the buoyancy plate 881, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move downward synchronously along the rotating shaft 83 until the liquid blocking plate 882 moves downward and returns to its original position, and again blocks the docking pipe inlet on the liquid accumulation seat 81, thereby achieving the effect of automatic quantitative discharge through the coordination of the liquid refrigerant level by the buoyancy plate 881 and the liquid blocking plate 882, without the need for external drive to reduce equipment costs.

[0045] In summary, this application has the following advantages: Advantage 1: When installing the gas-liquid separator 4, the staff first moves the flange 91 to the tail end of the docking pipe by spiral rotation, and then the staff screws the installation bolts into the bolt holes on the flange 91 in turn to lock and install them, thereby achieving the effect of further clamping the position between the flange 91 and the corresponding docking pipe through multiple interference rods 921, effectively preventing the flange 91 from loosening due to external vibration and other factors, resulting in connection failure and leakage between the docking pipes.

[0046] Advantage 2: When it is necessary to adapt a docking tube with flanges 91 of different specifications, the staff will remove the mounting bolts on the multiple flanges 91 on the gas-liquid separator 4 in turn, thereby quickly releasing the multiple interference rods 921 from the clamping connection between the flange 91 and the corresponding docking tube, and the staff will separate the flange 91 from the docking tube by spiral rotation, and install the adapted flange 91 of the same specification on the tail end of the docking tube by spiral rotation. When the vacuum coating production line is expanded to add a new PVD chamber, the problem of conventional welding or customized flange connection being unable to meet the needs of fast parallel refrigeration units due to rigid connection and difficulty in adaptation is avoided. Different flanges 91 can be quickly docked and have an anti-loosening function, effectively improving the applicability of the gas-liquid separator 4.

[0047] Advantage three, the refrigerant after use in the evaporator 5 will be converted into a high-speed airflow in a gas-liquid state, and will be input into the gas-liquid separator 4 through the docking pipe on the upper side of the outer wall of the gas-liquid separator 4. It will be filtered by multiple coarse filter holes on the liquid separator plate 84 and then continue to be transported to the lower side of the gas-liquid separator 4, thereby achieving preliminary interception of large liquid droplets mixed in the high-speed airflow and entrained solid particles, reducing the load of the main separation area on the lower side of the gas-liquid separator 4, and avoiding the problem of subsequent separation components being easily blocked.

[0048] Advantage four, when the slow airflow that has undergone gas-liquid separation is transported to the top of the telescopic separation plate 872, the gas phase in the slow airflow will move upward after contacting the upper end surfaces of multiple telescopic separation plates 872, and the liquid phase in the slow airflow will be filtered and separated through the fine filter holes on the multiple telescopic separation plates 872, and condensed into water droplets that drip downward into the liquid accumulation area at the bottom of the gas-liquid separator 4, thereby further improving the droplet capture effect through the secondary filtration of the mixed small droplets in the slow airflow through the inclined telescopic separation plate 872, avoiding the problem of oil mist and steam being carried by the separated gas due to unstable separation effect, and the telescopic separation plate 872 can buffer the impact of the high-speed airflow on the liquid accumulation at the bottom of the gas-liquid separator 4, preventing the accumulated liquid from mixing into the high-speed airflow again.

[0049] Advantage five: when the slow air flow rate is low, the rotating shaft 83 is controlled by an external servo motor to drive multiple telescopic separation plates 872 to move downward synchronously through the threaded sleeve 86, thereby reducing the diversion angle / resistance, shortening the flow path to avoid excessive retention, and maintaining a reasonable pressure drop. When the slow air flow rate is high, the rotating shaft 83 is controlled by an external servo motor to drive multiple telescopic separation plates 872 to move upward synchronously through the threaded sleeve 86, thereby increasing the diversion angle / resistance, extending the flow path to reduce the flow rate, increasing the residence time, and ensuring that the tiny droplets are fully settled, thereby achieving the effect of adjusting the diversion angles of multiple telescopic separation plates 872, avoiding the problem of excessive efficiency caused by too long a residence time when the slow air flow rate is low, and the problem of incomplete gas-liquid separation caused by insufficient residence time when the slow air flow rate is high.

[0050] Advantage six, when it is necessary to clean the separator plate 84, the external servo motor controls the rotation of the rotating shaft 83, and multiple brush plates 854 rotate synchronously to clean the upper end surface of the separator plate 84 to prevent the filtered large droplets and entrained solid particles from clogging the multiple coarse filter holes on the separator plate 84. At the same time, the upper end surface of the magnetic plugging plate 855 is tightly fitted on the lower end surface of the separator plate 84, thereby achieving the effect of sealing the separator plate 84. At this time, the multiple electromagnets 856 can be controlled to start working, and then the external vacuum pump connected to the collection cover 858 sucks the solid particles on the upper end of the separator plate 84 out of the multiple stepped holes for processing, thereby achieving the effect of cleaning the separator plate 84. After cleaning, the multiple electromagnets 856 are controlled to stop working, and the multiple plugs 857 will return to their original position and be inserted into the inner wall of the side with the smaller diameter of the stepped hole again for sealing, thereby avoiding the problem of high-speed airflow leakage when the gas-liquid separator 4 is working.

[0051] Advantage seven, as the liquid refrigerant level stored in the bottom liquid accumulation area in the gas-liquid separator 4 gradually increases, under the buoyancy of the buoyancy plate 881, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move upward synchronously along the rotating shaft 83, and the liquid refrigerant will flow into the liquid accumulation seat 81, be extracted through the docking pipe and transported to the evaporator 5. As the liquid refrigerant level stored in the bottom liquid accumulation area in the gas-liquid separator 4 gradually decreases, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move downward synchronously along the rotating shaft 83, thereby achieving the effect of automatic quantitative discharge through the coordination of the liquid refrigerant level by the buoyancy plate 881 and the liquid blocking plate 882, without the need for external drive to reduce equipment costs.

[0052] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A vacuum coating water chiller using a gas-liquid separation cooling module, characterized in that: include: A chassis (1) with upper and lower partitions, a water tank (2) and a water-cooled plate heat exchanger (3) are respectively installed on the left and right sides of the upper partition, a gas-liquid separator (4) is installed through the left side of the lower partition, an evaporator (5) is installed on the right side of the lower partition, a compressor (6) is installed on the left rear side of the inner wall of the bottom end of the chassis (1), a condenser (7) is installed on the front side of the bottom end of the chassis (1), a load reduction adjustment part (8) is provided on the chassis (1) and the gas-liquid separator (4), and a quick-release part (9) is provided on the gas-liquid separator (4), the evaporator (5) and the compressor (6); The load reduction regulating portion (8) includes a liquid accumulation seat (81) installed on the inner wall of the bottom end of the chassis (1), the lower end of the gas-liquid separator (4) is connected to the liquid accumulation seat (81), the upper end of the gas-liquid separator (4) is installed with a gas phase discharge pipe (82) through a circular hole, a rotating shaft (83) is provided in the middle of the gas phase discharge pipe (82), a liquid separation plate (84) is fixedly sleeved on the upper side of the outer wall of the gas phase discharge pipe (82), and a load reduction group (85) is commonly provided on the gas-liquid separator (4), the gas phase discharge pipe (82) and the rotating shaft (83) corresponding to the liquid separation plate (84); The load-reducing regulating portion (8) further comprises a threaded sleeve (86) located on the lower middle side of the outer wall of the rotating shaft (83) and connected by a thread; a flow regulating group (87) is provided on the gas-liquid separator (4), the threaded sleeve (86) and the rotating shaft (83); and a sleeve (88) is provided on the sliding sleeve on the lower side of the outer wall of the rotating shaft (83).

2. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 1, characterized in that: The quick-release portion (9) includes a butt joint pipe located at the upper end of the gas-liquid separator (4) and connected to both upper and lower sides of the outer wall. The corresponding plurality of butt joint pipes on the evaporator (5) and the compressor (6) are also connected to butt joint pipes. The opposite ends of two adjacent butt joint pipes are connected to flanges (91) through threads. The flanges (91) and the butt joint pipes are jointly provided with a quick-release group (92).

3. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 1, characterized in that: The load reduction group (85) includes a strong magnetic ring (851) symmetrically arranged on the upper and lower inner walls of the gas phase discharge pipe (82), and symmetrically provided with ventilation holes on the strong magnetic ring (851). The upper strong magnetic ring (851) is fixedly sleeved on the rotating shaft (83) and rotates to fit on the inner wall of the gas phase discharge pipe (82). The lower strong magnetic ring (851) is connected to the rotating shaft (83) through a thread, and a matching slide is symmetrically provided on the outer wall of the lower strong magnetic ring (851). Matching sliders are symmetrically installed on the inner wall of the gas phase discharge pipe (82) corresponding to the upper threaded section of the rotating shaft (83). The two matching sliders are respectively slidably connected to the inner walls of the corresponding matching slides. The lower end of the rotating shaft (83) is rotatably connected to the inner wall of the effusion seat (81), and the upper end rotates through the corresponding docking pipe.

4. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 3, characterized in that: The load reduction group (85) further includes a positioning ring (852) fixedly sleeved at both upper and lower ends of the upper threaded section of the rotating shaft (83); a magnetic sleeve (853) is provided on the outer wall of the gas phase discharge pipe (82) corresponding to the rotating sleeve of the upper strong magnetic ring (851); and a plurality of brush plates (854) uniformly distributed in a circumference are installed on the outer wall of the magnetic sleeve (853); and a magnetic blocking plate (855) is provided on the outer wall of the gas phase discharge pipe (82) corresponding to the sliding sleeve of the lower strong magnetic ring (851).

5. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 4, characterized in that: The load reduction group (85) further comprises a plurality of stepped holes corresponding to the liquid separation plate (84) on the outer wall of the gas-liquid separator (4), the plurality of stepped holes being evenly distributed in a circumference, an electromagnet (856) being installed on the upper side of the inner wall on the side with a larger diameter of the stepped hole, and a plug (857) being connected to one end of the electromagnet (856) facing the rotating shaft (83) via a compression spring, the outer wall of the plug (857) being movably fitted on the inner wall on the side with a smaller diameter of the stepped hole, and a collecting cover (858) being fixedly sleeved on the outer wall of the gas-liquid separator (4) corresponding to the plurality of electromagnets (856).

6. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 1, characterized in that: The flow regulating group (87) includes a second positioning ring (871) fixedly mounted on both upper and lower ends of the threaded section on the lower side of the rotating shaft (83); a plurality of telescopic separation plates (872) evenly distributed in a circumference are hinged on the outer wall of the threaded sleeve (86); the end of the telescopic separation plate (872) away from the threaded sleeve (86) is connected to the inner wall of the gas-liquid separator (4).

7. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 1, characterized in that: The upper side of the outer wall of the sleeve (88) is rotatably sleeved with a buoyancy plate (881), and the lower side of the outer wall of the sleeve (88) is rotatably sleeved with a liquid blocking plate (882) that movably fits on the inner wall of the liquid accumulation seat (81), and the lower end of the liquid blocking plate (882) is connected to the inner wall of the bottom end of the liquid accumulation seat (81) through a tension spring.

8. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 4, characterized in that: A spiral blade (821) is fixedly sleeved on the middle portion of the outer wall of the gas phase discharge pipe (82), and a plurality of foam breaking nets (822) evenly distributed from bottom to top are installed on the bottom end of the inner wall of the gas phase discharge pipe (82).

9. The vacuum coating water chiller using a gas-liquid separation cooling module according to claim 2, characterized in that: A section of an optical axis section is provided on the middle of the threaded section on the flange (91) and on one side of the threaded section on the butt-joint tube near the tail end. The quick-release assembly (92) includes a plurality of accommodating holes corresponding to the optical axis sections on the inner wall of the flange (91). The plurality of accommodating holes are respectively connected to the corresponding bolt holes, and a resisting rod (921) is slidably mounted on the inner wall of the accommodating hole via a compression spring. A card slot is provided on the outer wall of the optical axis section in the threaded section on the butt-joint tube corresponding to the plurality of accommodating holes.

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