Pressure sensing element and pressure sensor

Abstract

The pressure sensing element comprises a main body unit, the main body unit comprises a main body and a pressure receiving end, the main body is provided with an accommodating cavity, one end of the accommodating cavity along a first direction is provided with an opening, and the pressure receiving end is arranged at the opening to receive a pressure signal; the opening is provided with a first extension groove, the first extension groove is arranged along the first direction, and the first extension groove is adjacent to the pressure receiving end; the slit unit comprises slit assemblies which are arranged at intervals in the first direction in an array mode, the slit assemblies are arranged on the main body in an extending mode in the second direction, and the second direction is perpendicular to the first direction; the slit assembly comprises a slit groove, a containing part and an induction assembly, the slit groove extends in the main body in the second direction and communicates with the first extending groove, and the containing part is arranged on the main body. According to the invention, the measurement requirements of high sensitivity and wide range can be met simultaneously.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a pressure sensing element and a pressure sensor. Background Art

[0002] Pressure sensors are devices that convert pressure signals into measurable electrical signals and are widely used in industrial control, automotive electronics, medical equipment, consumer electronics, and other fields. As research on animals in nature deepens, it is becoming clear that animals often possess unique structures that allow them to acquire remarkable abilities. Therefore, we can draw design inspiration from these animals and apply artificial bionic structures designed by mimicking the structure, function, or behavior of natural organisms to pressure sensors, thereby improving their performance.

[0003] In existing technologies, high-sensitivity pressure sensors can detect minute pressure changes, but their measurable range is often limited. Meanwhile, wide-range pressure sensors, while offering a wider measurement range, may lack sensitivity. Consequently, existing technologies face technical bottlenecks in achieving both high sensitivity and a wide range. Improving the accuracy of pressure sensing, particularly in complex environments, remains a pressing challenge. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the existing technology and provide a pressure sensing element and a pressure sensor that can meet the measurement requirements of high sensitivity and wide range at the same time.

[0005] In order to solve the above technical problems, the present invention provides a pressure sensing element, comprising: The main unit includes a main body and a pressure receiving end, wherein the main body has an accommodating cavity, one end of the accommodating cavity along a first direction has an opening, and the pressure receiving end is disposed at the opening to receive a pressure signal; the opening is provided with a first extension groove, the first extension groove is disposed along the first direction, and the first extension groove is disposed adjacent to the pressure receiving end; A slit unit, comprising slit components spaced apart and arranged in an array along the first direction, the slit components extending along a second direction on the main body, the second direction being perpendicular to the first direction; the slit component comprising a slit groove, a receiving portion, and a sensing component, the slit groove extending along the second direction on the main body and communicating with the first extension groove, the receiving portion being provided on the main body and adjacent to an end of the slit groove, the sensing component being accommodated in the receiving portion; the sensing component being capable of deforming synchronously with the deformation of the slit groove and converting a pressure signal of the deformation into an electrical signal; the depths of the slit grooves of two adjacent slit components decreasing sequentially along the direction of pressure application; The range control unit includes a range control component, which is arranged relative to the slit groove and located at one end close to the first extension groove.

[0006] In one embodiment of the present invention, the sensing component includes a packaging layer, a sensitive layer, and an adhesion layer sequentially arranged along a thickness direction thereof, and the adhesion layer is arranged close to the slit groove.

[0007] In one embodiment of the present invention, the sensitive layer is made of a conductive material; the sensitive layer includes a body and a crack structure, and the crack structure is arranged in a radial array on the body.

[0008] In one embodiment of the present invention, the accommodating portion has a continuous and smooth curved edge, and the curved edge includes a first arc segment and a second arc segment. The first arc segment and the second arc segment are connected to form an accommodating groove, and the sensing component is accommodated in the accommodating groove. Both ends of the accommodating portion extend toward both sides of the slit groove and gradually taper to form a sharp angle at the end.

[0009] In one embodiment of the present invention, the sensing component matches the accommodating portion.

[0010] In one embodiment of the present invention, the main body is further provided with a top notch structure, the top notch structure is formed concavely along the height direction of the opening edge, and the top notch structure is communicated with the first extension groove.

[0011] In one embodiment of the present invention, the top notch structure includes a top groove, and a bottom surface of the top groove is parallel to the second direction.

[0012] In one embodiment of the present invention, the slit unit includes a first slit assembly, a second slit assembly, a third slit assembly and a fourth slit assembly arranged at intervals along the first direction; the first slit assembly includes a first slit groove, a first accommodating portion and a first sensing component, the second slit assembly includes a second slit groove, a second accommodating portion and a second sensing component; the third slit assembly includes a third slit groove, a third accommodating portion and a third sensing component; the fourth slit assembly includes a fourth slit groove, a fourth accommodating portion and a fourth sensing component; the lengths of the first slit groove, the second slit groove, the third slit groove and the fourth slit groove decrease in sequence.

[0013] In one embodiment of the present invention, the material of the main body includes nylon, resin, acrylic, polycarbonate and metal; the metal material includes aluminum and stainless steel.

[0014] The present invention further provides a pressure sensor, comprising a control unit and a pressure sensor element as described above, wherein an output end of the pressure sensor element is communicatively connected to the control unit to output a signal to the control unit.

[0015] The above technical solution of the present invention has the following advantages over the prior art: The pressure sensing element of the present invention comprises a main body unit, a slit unit, and a range control unit. The main body unit includes a main body and a pressure receiving end, which is located at the opening of the main body. The slit unit includes a plurality of slit components arranged in an array on the main body, and the length of the slit components decreases gradually along the height direction. When external pressure gradually increases, the slit components undergo compression deformation in descending order. Without considering the sensing characteristics of the sensing component itself, the detection sensitivity of the slit unit is positively correlated with its length. This unique structural design enables the sensing element to achieve high-sensitivity pressure measurement while maintaining a wide range of detection capabilities. Because the sensing component is located at the end of the slit component, when the tail of the slit contracts, stress is concentrated at the slit tip. The strain material of the sensing component bends as the slit tip contracts, efficiently converting the pressure signal into an electrical signal, thereby improving the sensitivity of the pressure sensing element. As external pressure gradually increases, the slit components of different lengths arranged from long to short are squeezed and contracted in sequence, completing the detection of a larger range of pressure. The sensitivity of the slit unit increases with the increase of slit length within a certain range. Therefore, the pressure sensing element of the present invention can meet the measurement requirements of high sensitivity and wide range at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings, wherein:

[0017] Figure 1 It is a schematic diagram of the overall structure from the first perspective of a preferred embodiment of the present invention.

[0018] Figure 2 It is a schematic diagram of the overall structure from a second viewing angle of a preferred embodiment of the present invention.

[0019] Figure 3 Schematic diagram of the induction component of the preferred embodiment of the present invention.

[0020] Explanation of the reference numerals in the specification: 10. Main body; 101. Opening; 102. First extension groove; 103. Top notch structure; 11. Pressure receiving end; 20. Slit assembly; 201. Slit groove; 202. Accommodating portion; 203. Sensing assembly; 2030. Encapsulation layer; 2031. Sensitive layer; 2032. Adhesion layer; 30. Range control component. DETAILED DESCRIPTION

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0022] Scorpions possess crack receptors, tiny, slit-like openings (50-200 μm long and 1-2 μm wide) distributed across the surface of their appendages (such as legs and pedipalps). These receptors are connected to sensory nerves and are specifically designed to detect weak vibrations and surface stress, helping scorpions detect prey movement or the approach of predators. Their sensitivity can reach nanometer-scale displacements. These "microcrack"-like structures amplify mechanical deformation, enabling the cracks on the scorpion's surface to accurately sense the vibration signals needed by organisms in complex environments. Therefore, when applied to sensor devices, these structures can effectively enhance the sensor's response to minute pressures. Therefore, the biomimetic structure of the scorpion's surface provides a unique inspiration for the design of pressure sensors, particularly in terms of high sensitivity, environmental adaptability, and multifunctional sensing.

[0023] The pressure sensing element of the present invention is designed and developed based on the slit-shaped structure of the scorpion's appearance. Example 1

[0024] Reference Figure 1 As shown in FIG*, the present invention discloses a pressure sensing element, including a main unit, wherein the main unit includes a main body 10 and a pressure receiving end 11, wherein the main body 10 has a receiving cavity, and the receiving cavity has an opening 101 at one end along a first direction, and the pressure receiving end 11 is arranged at the opening to receive a pressure signal from the outside.

[0025] It should be noted that the first direction is the height direction of the main body 10 .

[0026] The opening 101 is provided with a first extension groove 102 . The first extension groove 102 is arranged along the first direction, and the first extension groove 102 is arranged adjacent to the pressure receiving end 11 .

[0027] The pressure sensing element further includes a slit unit, and the slit unit includes slit components 20 that are spaced apart and arranged in an array along the first direction.

[0028] The slit assembly 20 extends along a second direction perpendicular to the first direction on the main body 10. In this embodiment, a plurality of slit assemblies 20 are provided. The slit assemblies 20 are arranged in an array downwardly from the opening 101, and the extension lengths of the slit assemblies 20 along the second direction decrease in sequence.

[0029] Specifically, the slit assembly includes a slit groove 201, a receiving portion 202, and a sensing assembly 203. The slit groove 201 extends along the second direction and is disposed on the main body 10. The slit groove 201 is connected to the first extension groove 102. The receiving portion 202 is disposed on the main body 10 and is adjacent to a distal end of the slit groove. However, the receiving portion 202 and the slit groove 201 are independent of each other. The sensing assembly 203 is accommodated in the receiving portion 202.

[0030] The sensing component 203 is capable of deforming synchronously with the deformation of the slit groove 202, and the sensing component 203 is capable of converting the pressure signal of the deformation into an electrical signal. Pressure is applied to the pressure sensing element through the pressure receiving end 11, and the depths of the slit grooves 201 of two adjacent slit components decrease in sequence along the direction of pressure application, that is, from top to bottom. The pressure sensing element further includes a range control unit capable of adjusting the range of the detected pressure. The range control unit includes a range control member 30 disposed opposite to the slit groove 202 and located near one end of the first extension slot 102 .

[0031] Under the action of external force, the end of the slit unit is deformed under the extrusion force, and the sensing component 203 embedded in the accommodating portion 202 is a structure made of ultra-thin strain-sensitive material. The sensing component 203 has a small bending stiffness and is very easy to bend and deform with extrusion, and accordingly completes the conversion of the external pressure signal into an electrical signal, thereby being able to achieve more sensitive detection of weak external pressure.

[0032] As external pressure gradually increases, adjacent slit components 20 deform in sequence along the direction of pressure transmission, causing several slit grooves 201 to contract in sequence. This creates a relatively concentrated stress on the sensing components 203 at their ends, thereby enabling pressure detection within different ranges. Furthermore, the slit grooves 201 are equipped with range control elements 30 for each unit, located at the opening of the slit grooves 201 away from the accommodating portion 202. These features give the pressure sensing element excellent wide-range performance.

[0033] The main body 1 converts pressure into slit contraction, concentrating stress at the end of the slit groove 202, which is then transmitted to the sensing component 203 within the accommodating portion 202. The sensing component 203 then converts the contraction force of the slit groove 202 into an electrical signal. By receiving different degrees of compression transmission force, different electrical signals are output.

[0034] The present invention discloses a pressure sensing element comprising a main body, a slit unit, and a range control unit. The main body comprises a main body and a pressure receiving end, the pressure receiving end being located at an opening of the main body. The slit unit comprises a plurality of slit components arranged in an array on the main body, wherein the length of the slit components decreases gradually along the height direction. When external pressure gradually increases, the slit components undergo compression deformation in descending order. Without considering the sensing characteristics of the sensing component itself, the detection sensitivity of the slit unit is positively correlated with its length. This unique structural design enables the sensing element to achieve high-sensitivity pressure measurement while maintaining a wide range of detection capabilities. Because the sensing component is located at the end of the slit component, when the tail of the slit contracts, stress is concentrated at the slit tip. The strain material of the sensing component bends as the slit tip contracts, efficiently converting the pressure signal into an electrical signal, thereby improving the sensitivity of the pressure sensing element. As external pressure gradually increases, the slit components of different lengths arranged from long to short are squeezed and contracted in sequence, completing the detection of a larger range of pressures. The sensitivity of the slit unit increases with the increase of the slit length within a certain range. Therefore, the pressure sensing element of the present invention can meet the measurement requirements of high sensitivity and wide range at the same time.

[0035] As a preferred embodiment, the pressure receiving end 11 includes a convex block provided at the opening 101 , and the external force can be transmitted to the slit unit through the convex block.

[0036] In detail, the sensing component 23 includes a packaging layer 2030 , a sensitive layer 2031 and an adhesion layer 2032 arranged in sequence along the thickness direction, and the adhesion layer 2032 is arranged close to the slit groove 201 .

[0037] As a preferred embodiment, the sensitive layer 2031 is made of a conductive material; the sensitive layer 2031 includes a main body and a crack structure, with the crack structure arranged in a radial array within the main body. The crack structure is nanoscale, and the crack width varies with the bending deformation of the sensing component 203, causing the resistance of the sensitive layer 2031 to change. This makes the sensing component 203 highly sensitive and capable of rapidly responding to tiny changes in external forces. The crack structure includes multiple crack grooves spaced apart within the main body to form the crack structure. When subjected to external forces, the crack grooves can contract or stretch, effectively transmitting the applied force while also increasing sensitivity to external force sensing.

[0038] The accommodating portion 202 has a continuous, smooth curved edge comprising a first arc segment and a second arc segment. The first and second arc segments are connected to form a accommodating groove, which receives the sensing component 203. The ends of the accommodating portion 202 extend toward the sides of the slit groove 201 and taper to form sharp corners at the ends. From another perspective, the projection of the accommodating groove along the thickness direction of the main body 10 is crescent-shaped.

[0039] Preferably, the outer diameter of the accommodating groove is 0.8 mm, the inner diameter is 1 mm, and the chord length is 1.5 mm, so as to constrain and limit the sensing component 203.

[0040] As a preferred embodiment, the sensing component 203 matches the accommodating portion 202 and can be tightly attached to the accommodating portion 202 .

[0041] Furthermore, the main body 10 is provided with a top notch structure 103, which is formed inwardly along the height direction of the edge of the opening 101 and communicates with the first extension groove 102. Specifically, the top notch structure 103 has a depth of 1 mm, which can reduce interference with the measurement process by the structure during measurement, thereby ensuring the precision and accuracy of the measurement structure.

[0042] As a preferred embodiment, the top notch structure 103 includes a top groove, and the bottom surface of the top groove is parallel to the second direction.

[0043] As a preferred embodiment, the slit unit includes a first slit assembly, a second slit assembly, a third slit assembly and a fourth slit assembly arranged at intervals along the first direction, and the first slit assembly is arranged adjacent to the opening 101; wherein, the first slit assembly includes a first slit groove, a first accommodating portion and a first sensing assembly, the second slit assembly includes a second slit groove, a second accommodating portion and a second sensing assembly; the third slit assembly includes a third slit groove, a third accommodating portion and a third sensing assembly; the fourth slit assembly includes a fourth slit groove, a fourth accommodating portion and a fourth sensing assembly.

[0044] It should be noted that the lengths of the first slit groove, the second slit groove, the third slit groove and the fourth slit groove decrease in sequence.

[0045] As a preferred embodiment, the material of the main body 10 includes nylon, resin, acrylic, polycarbonate and metal; the metal material includes but is not limited to aluminum and stainless steel.

[0046] As a preferred embodiment, the material of the range control member 30 is consistent with that of the main body 10 .

[0047] In terms of details, the range control part 30 is a boss with a diameter of 0.4 mm, a slope of 20°, and a height of 0.1 mm.

[0048] Specifically, the material of the sensing component 203 may also be a thin flexible piezoresistive material, including but not limited to flexible piezoelectric materials such as PVDF film. Example 2

[0049] The present invention further discloses a pressure sensor, comprising a control unit and a pressure sensor element as described in the first embodiment, wherein an output end of the pressure sensor element is communicatively connected to the control unit to output an electrical signal to the control unit.

[0050] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0051] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0052] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A pressure sensing element, characterized in that: include, The main unit includes a main body and a pressure receiving end, wherein the main body has an accommodating cavity, one end of the accommodating cavity along a first direction has an opening, and the pressure receiving end is disposed at the opening to receive a pressure signal; the opening is provided with a first extension groove, the first extension groove is disposed along the first direction, and the first extension groove is disposed adjacent to the pressure receiving end; A slit unit, comprising slit components spaced apart and arranged in an array along the first direction, the slit components extending along a second direction on the main body, the second direction being perpendicular to the first direction; the slit component comprising a slit groove, a receiving portion, and a sensing component, the slit groove extending along the second direction on the main body and communicating with the first extension groove, the receiving portion provided on the main body and adjacent to a distal end of the slit groove, the sensing component being accommodated in the receiving portion; the sensing component being capable of deforming synchronously with the deformation of the slit groove and converting a pressure signal of the deformation into an electrical signal; Along the direction of pressure application, the depths of the slit grooves of two adjacent slit assemblies decrease successively; The range control unit includes a range control component, which is arranged relative to the slit groove and located at one end close to the first extension groove.

2. The pressure sensing element according to claim 1, characterized in that: The sensing component comprises a packaging layer, a sensitive layer and an adhesion layer which are sequentially arranged along the thickness direction thereof, and the adhesion layer is arranged close to the slit groove.

3. The pressure sensing element according to claim 2, characterized in that: The sensitive layer is made of a conductive material; the sensitive layer includes a body and a crack structure, and the crack structure is arranged in a radial array on the body.

4. The pressure sensing element according to claim 1, wherein: The accommodating portion has a continuous and smooth curved edge, which includes a first arc segment and a second arc segment. The first arc segment and the second arc segment are connected to form an accommodating groove. The sensing component is accommodated in the accommodating groove. Both ends of the accommodating portion extend toward both sides of the slit groove and gradually taper to form a sharp angle at the end.

5. The pressure sensing element according to claim 1, characterized in that: The sensing component matches the accommodating portion.

6. The pressure sensing element according to claim 1, characterized in that: The main body is further provided with a top notch structure, which is concavely formed along the edge of the opening in the height direction, and is communicated with the first extension groove.

7. The pressure sensing element according to claim 6, characterized in that: The top notch structure includes a top groove, and a bottom surface of the top groove is parallel to the second direction.

8. The pressure sensing element according to claim 1, characterized in that: The slit unit includes a first slit assembly, a second slit assembly, a third slit assembly and a fourth slit assembly arranged at intervals along the first direction; the first slit assembly includes a first slit groove, a first accommodating portion and a first sensing component, the second slit assembly includes a second slit groove, a second accommodating portion and a second sensing component; the third slit assembly includes a third slit groove, a third accommodating portion and a third sensing component; the fourth slit assembly includes a fourth slit groove, a fourth accommodating portion and a fourth sensing component; the lengths of the first slit groove, the second slit groove, the third slit groove and the fourth slit groove decrease in sequence.

9. The pressure sensing element according to claim 1, characterized in that: The material of the main body includes nylon, resin, acrylic, polycarbonate and metal; the metal material includes aluminum and stainless steel.

10. A pressure sensor, characterized in that: It comprises a control unit and a pressure sensor element according to any one of claims 1 to 9, wherein an output end of the pressure sensor element is communicatively connected to the control unit to output a signal to the control unit.

Images