Ceramic-metal composite high-reliability quartz flexible accelerometer movement hoisting structure

Abstract

The invention relates to a ceramic-metal composite high-reliability quartz flexible accelerometer movement hoisting structure, which comprises a quartz flexible accelerometer shell and a sensitive movement, wherein the sensitive movement is arranged in the quartz flexible accelerometer shell through a support ring and a ceramic isolation ring; the supporting ring is a metal supporting ring with an elastic structure, the supporting ring is in a circular ring shape, a notch is formed in the circular ring shape, and when the supporting ring is connected with the sensitive meter core, the notch of the supporting ring can play a role in adjusting the size; the ceramic isolating ring and the supporting ring are matched with each other through a step structure, and the purpose of improving the reliability and strength of the bonding structure is achieved. According to the quartz flexible accelerometer, the process complexity of a traditional structure is reduced, the fixing capacity of the sensitive meter core is enhanced, the stability of the misalignment angle of the accelerometer is enhanced, the impact resistance and the deformation resistance of the accelerometer are enhanced, and the production efficiency and the reliability of the quartz flexible accelerometer are greatly improved.

Description

Technical Field

[0001] The invention relates to the technical field of sensors, and in particular to a ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure. Background Art

[0002] The quartz flexible accelerometer is a high-precision sensor for measuring acceleration and is an important component of the inertial system. It was first successfully developed by the American company Sundstein in the 1970s. The existing quartz flexible accelerometer uses a hanging structure such as Figure 1 As shown, it includes a housing, an isolation ring and a sensitive core, wherein the sensitive core contains a sensitive element and a magnetic ring component. The sensitive core is the core component of the accelerometer. The housing, which plays a protective and sealing role, is connected to the sensitive core through the isolation ring. The isolation ring plays an insulating role and is fixed by gluing to form a quartz flexible accelerometer.

[0003] In existing accelerometers, the isolation ring is a circular ring structure, and the movement and the housing are connected by adhesive; or the movement and the housing are directly connected by adhesive, which has the following problems:

[0004] 1. Isolation rings are generally made of metal and treated with an insulating oxide layer. During assembly, bumps and other factors can easily cause the insulating oxide layer to fall off, leaving the accelerometer uninsulated.

[0005] 2. The traditional isolation ring bonding structure relies only on adhesive connection in the direction of the sensitive axis. The shell does not support the movement, and the misalignment angle is very easy to change. At the same time, the reliability of the accelerometer is poor when it is in special environments such as air pressure changes, severe vibration, and large impact.

[0006] The output equation of the accelerometer is:

[0007]

[0008] Where, δ o is the swing misalignment angle, δ p is the gate-state misalignment angle. For a high-precision accelerometer (K0 bias stability ≤ 10 μg), under the action of a 1 g gravity field, if the misalignment angle changes by 2 arc seconds, the output changes by about 10 μg, which has a great impact on the accelerometer accuracy.

[0009] 3. During assembly, due to the lack of a stepped structure, adhesive often seeps into the inner wall of the housing, posing a risk to the reliability of the overall bonding structure. Using a softer adhesive, while providing a better buffering effect against external shocks and vibrations or micro-deformations of the housing, can easily deform during normal use due to its low strength, leading to changes in the installation error angle and unstable accelerometer output. Using a harder adhesive cannot buffer against external shocks and vibrations or micro-deformations of the housing, easily affecting the instrument's output accuracy and, in more serious cases, damaging the instrument.

[0010] To address these issues, patent CN203037668U proposes a quartz flexible accelerometer with an assemblable non-metallic isolation ring. The sensor uses a hoisting structure that can assemble a non-metallic isolation ring. However, this solution uses segmented ceramic isolation rings, which require extremely high assembly precision. Any assembly error in any segment will affect the output accuracy and stability of the accelerometer.

[0011] In view of the above technical problems, the present invention proposes a ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure. Summary of the Invention

[0012] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure, which overcomes the shortcomings of the traditional quartz flexible accelerometer isolation ring structure, replaces the traditional isolation ring with a composite structure of a metal support ring and a ceramic isolation ring, and fundamentally eliminates the low reliability problem caused by the insulation oxidation process with the ceramic isolation ring, thereby greatly improving the production efficiency and reliability of the quartz flexible accelerometer; using a support ring with an elastic structure, the accelerometer's ability to resist impact and deformation is enhanced, the isolation ring and the support ring cooperate with each other through a step structure, which reduces the risk of adhesive penetration, increases the constraint in the sensitive axis direction, enhances the reliability and strength of the bonding structure, enhances the stability of the accelerometer's misalignment angle, and improves the reliability of the accelerometer.

[0013] The present invention solves the technical problem by the following technical solutions:

[0014] A ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure includes a quartz flexible accelerometer housing and a sensitive core installed in the quartz flexible accelerometer housing via a support ring and a ceramic isolation ring;

[0015] The support ring is a metal support ring with an elastic structure. Its inner diameter is consistent with the outer diameter of the magnetic ring of the sensitive watch core. Its height is H = αR-δ, where R is the outer diameter of the magnetic ring, α is the adjustment coefficient, which corresponds to the outer dimensions of the quartz flexible accelerometer, and δ is the difference between the inner and outer radii of the support ring.

[0016] The ceramic isolation ring is a ceramic isolation ring with an L-shaped step, and its wall thickness is 0.1-0.4 mm.

[0017] Furthermore, an L-shaped step 2 is provided on the inner wall of the quartz flexible accelerometer housing, which matches the L-shaped step 1 of the ceramic isolation ring.

[0018] Furthermore, the support ring is fixedly connected to the magnetic conductive ring of the sensitive watch movement by welding.

[0019] Furthermore, the support ring is in the shape of a ring, and a notch is provided in the ring.

[0020] Furthermore, when the support ring is connected to the sensitive watch movement, the gap size of the support ring is 1.5 to 2 mm.

[0021] Furthermore, the ceramic isolation ring is fixedly connected to the support ring and the quartz flexible accelerometer housing respectively through adhesive 2.

[0022] The advantages and positive effects of the present invention are:

[0023] 1. The ceramic-metal composite high-reliability quartz flexible accelerometer core hoisting structure of the present invention overcomes the shortcomings of the traditional quartz flexible accelerometer isolation ring structure. The traditional isolation ring is replaced by a composite structure of a metal support ring and a ceramic isolation ring. The use of the ceramic isolation ring fundamentally eliminates the low reliability problem caused by the insulating oxidation process, thereby greatly improving the production efficiency and reliability of the quartz flexible accelerometer.

[0024] 2. The ceramic-metal composite high-reliability quartz flexible accelerometer core hoisting structure of the present invention uses a support ring with an elastic structure, which enhances the accelerometer's ability to resist impact and deformation and improves the reliability of the accelerometer.

[0025] 3. In the ceramic-metal composite high-reliability quartz flexible accelerometer core hoisting structure of the present invention, the isolation ring and the support ring cooperate with each other through a step structure, which reduces the risk of adhesive penetration, increases the constraint in the direction of the sensitive axis, enhances the reliability and strength of the bonding structure, enhances the stability of the accelerometer misalignment angle, and improves the reliability of the accelerometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of the existing accelerometer hoisting structure;

[0027] Figure 2 This is a schematic diagram of the lifting structure of the ceramic-metal composite high-reliability quartz flexible accelerometer core of the present invention;

[0028] Figure 3 A top view of the support ring of the lifting structure of the core of the ceramic-metal composite high-reliability quartz flexible accelerometer of the present invention;

[0029] In the figure: 101. Housing; 102. Isolation ring; 103. Adhesive 1; 104. Sensitive movement; 201. Quartz flexible accelerometer housing; 202. Support ring; 203. Adhesive 2; 204. Ceramic isolation ring. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below through specific examples. The following examples are only illustrative and not restrictive, and the scope of protection of the present invention cannot be limited thereto.

[0031] like Figure 1 As shown, the existing accelerometer's hanging structure, wherein the sensitive watch core 104 as the core component is connected to the shell 101 which plays a protective and sealing role through an isolation ring 102, and the three are fixed by adhesive 103. The isolation ring 102 is generally made of metal material and is subjected to insulation oxidation treatment to play an insulating role. During the assembly process, factors such as bumps can easily cause the insulating oxide layer to fall off, making the accelerometer uninsulated and reducing the reliability of the instrument. The isolation ring 102 is connected by adhesive 103, and there is no supporting structure in the direction of the sensitive axis. It is only fixed by adhesive 103, and the misalignment angle is very easy to change; at the same time, the reliability is poor when in special environments such as air pressure changes, severe vibrations, and large impacts. During assembly, due to the lack of a step structure, the adhesive often penetrates into the inner wall of the shell 101, and there are hidden dangers in the reliability of the overall bonding structure. If a softer adhesive is used for connection, although it has a better buffering effect on external impact vibration or micro-changes of the shell 101, it is easy to deform during normal use due to its low strength, seriously affecting the stability of the misalignment angle; if a stronger adhesive connection is used, it cannot buffer the external air pressure changes or impact vibration changes, which is easy to affect the output accuracy of the instrument, and even more seriously cause damage to the instrument.

[0032] like Figure 2 As shown, a high-reliability ceramic-metal composite quartz flexible accelerometer movement hanging structure includes a quartz flexible accelerometer housing 201 and a sensitive movement 104 installed in the quartz flexible accelerometer housing 201 via a support ring 202 and a ceramic isolation ring 204; the support ring 202 and the magnetic ring of the sensitive movement 104 are fixedly connected by welding; the ceramic isolation ring 204 is fixedly connected to the support ring 202 and the quartz flexible accelerometer housing 201 respectively via an adhesive 203.

[0033] The support ring 202 is a metal support ring 202 with an elastic structure. Its inner diameter is consistent with the outer diameter of the magnetic ring of the sensitive watch core 104, and its height is H = αR-δ, where R is the outer diameter of the magnetic ring, α is the adjustment coefficient, which corresponds to the outer dimensions of the accelerometer, and δ is the difference between the inner and outer radii of the support ring 202; the support ring 202 is annular and has a notch. When the support ring 202 is connected to the sensitive watch core 104, the notch size of the support ring 202 is 1.5 to 2 mm. The notch can adjust the size and reduce the difficulty of assembly.

[0034] The ceramic isolation ring 204 has an L-shaped step 1 and a wall thickness of 0.1 to 0.4 mm, which plays an insulating role. The step support structure of the ceramic isolation ring 204 plays an insulating role for the sensitive watch movement 104 and the quartz flexible accelerometer housing 201.

[0035] An L-shaped step 2 is provided on the inner wall of the quartz flexible accelerometer housing 201 , matching the L-shaped step 1 of the ceramic isolation ring 204 , for mounting the ceramic isolation ring 204 .

[0036] The support ring 202 , the ceramic isolation ring 204 and the quartz flexible accelerometer housing 201 are combined and connected to form a support structure for mounting the sensitive watch core 104 , thereby ensuring the stability of the sensitive watch core 104 .

[0037] The ceramic isolation ring 204 is connected to the quartz flexible accelerometer housing 201 by gluing, and the inner wall of the quartz flexible accelerometer housing 201 is provided with an L-shaped step 2 that matches the L-shaped step 1 of the ceramic isolation ring 204, which plays a role in limiting and enhancing the connection strength, preventing dislocation caused by deformation of the adhesive, reducing the change of the misalignment angle; and at the same time, it can avoid the problem of adhesive penetration.

[0038] Unlike existing accelerometer structures, the sensitive core 104 of the present invention is connected to the ceramic isolation ring 204 via a support ring 202. The support ring 202 is a metal support ring 202 with an elastic structure that can produce progressive deformation when compressed, stretched, or bent. This effectively disperses stress concentration, improves energy absorption efficiency and dynamic adjustment capabilities, and achieves an elastic effect, enhancing the accelerometer's impact resistance and reducing the impact of housing deformation on the accelerometer's output accuracy. The support ring 202 is made of the same low-expansion alloy material, 4J36 or 4J32A, as the sensitive core 104. It is fixedly connected to the magnetic ring at the top of the sensitive core 104 by welding, enhancing the connection strength and preventing creep of the adhesive. The sensitive core 104 also has a stepped structure at the weld, which limits the support ring 202 and enhances the connection strength.

[0039] The ceramic-metal composite high-reliability quartz flexible accelerometer movement hanging structure of the present invention overcomes the shortcomings of the traditional quartz flexible accelerometer isolation ring 102 structure, and replaces the traditional isolation ring 102 with a composite structure of a metal support ring 202 and a ceramic isolation ring 204. The use of the ceramic isolation ring 204 fundamentally eliminates the low reliability problem caused by the insulation oxidation process, thereby greatly improving the production efficiency and reliability of the quartz flexible accelerometer; the use of the support ring 202 with an elastic structure enhances the accelerometer's ability to resist impact and deformation, thereby improving the accelerometer's reliability; the ceramic isolation ring 204 and the support ring 202 cooperate with each other through a step structure, thereby reducing the risk of adhesive penetration, increasing the constraint in the sensitive axis direction, enhancing the reliability and strength of the bonding structure, enhancing the stability of the accelerometer's misalignment angle, and improving the accelerometer's reliability.

[0040] The height H of the support ring 202 is αR-δ, where α is any value between 0.16 and 0.28. This value is adjusted accordingly according to the outer diameter of the accelerometer. The outer diameter R of the accelerometer ranges from 25.6 mm to 40.6 mm; the size range of δ is 1 mm to 2.2 mm.

[0041] The size of the ceramic isolation ring 204 ranges from 1.8 mm to 6 mm, and the wall thickness ranges from 0.1 mm to 0.4 mm. Specifically, α is the value obtained after optimizing the orientation during the actual development of the accelerometer. The specific example is as follows:

[0042] Example 1

[0043] An accelerometer with an outer diameter R of 40.6 mm was selected as the experimental object. The support ring 202 was made of 4J32A niobium-indium alloy. The difference δ between the inner and outer radii of the support ring 202 was 2.2 mm. The outer diameter of the magnetic ring of the sensitive core 104 was 29.6 mm. While ensuring the key indicator of the accelerometer (installation error angular stability), the range of values ​​for the height H of the support ring 202 was shown in Table 1. The adjustment coefficient for this size was then determined:

[0044] Serial number H(mm) α 1 5 0.243 2 5.2 0.250 3 5.4 0.257 4 5.6 0.264 6 6 0.277

[0045] As shown in Table 1, when the outer diameter of the accelerometer is 40.6 mm, the adjustment coefficient ranges from 0.243 to 0.277.

[0046] Example 2

[0047] An accelerometer with an outer diameter R of 25.4 mm was selected as the experimental object. The support ring 202 was made of 4J36 indium var alloy. The difference δ between the inner and outer radii of the support ring 202 was 1 mm. The outer diameter of the magnetic ring of the sensitive core 104 was 22 mm. Under the premise of ensuring the key indicator of the accelerometer (installation error angular stability), the range of values ​​for the height H of the support ring 202 was shown in Table 2, and the adjustment coefficient under this size was confirmed:

[0048] Serial number H(mm) α 1 2.5 0.159 2 2.8 0.173 3 3.1 0.186 4 3.3 0.195 5 3.6 0.209

[0049] As shown in Table 2, when the outer diameter of the accelerometer is 25.4 mm, the adjustment coefficient ranges from 0.159 to 0.209.

[0050] Although the embodiments and drawings of the present invention are disclosed for illustrative purposes, those skilled in the art will understand that various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. A high-reliability ceramic-metal composite quartz flexible accelerometer core hanging structure, characterized by: The invention comprises a quartz flexible accelerometer housing (201) and a sensitive watch core (104) installed in the quartz flexible accelerometer housing (201) via a support ring (202) and a ceramic isolation ring (204); The support ring (202) is a metal support ring (202) with an elastic structure, the inner diameter of which is consistent with the outer diameter of the magnetic ring of the sensitive watch core (104), and the height thereof is H=αR-δ, wherein R is the outer diameter of the magnetic ring, α is an adjustment coefficient corresponding to the outer dimensions of the quartz flexible accelerometer, and δ is the difference between the inner and outer radii of the support ring (202); The ceramic isolation ring (204) is a ceramic isolation ring (204) having an L-shaped step, and its wall thickness is 0.1-0.4 mm.

2. The ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure according to claim 1, characterized in that: An L-shaped step 2 matching the L-shaped step 1 of the ceramic isolation ring (204) is provided on the inner wall of the quartz flexible accelerometer housing (201).

3. The ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure according to claim 1, characterized in that: The support ring (202) is fixedly connected to the magnetic conductive ring of the sensitive watch core (104) by welding.

4. The ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure according to claim 1, characterized in that: The support ring (202) is in the shape of a ring, and a notch is provided in the ring.

5. The ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure according to claim 4, characterized in that: When the support ring (202) is connected to the sensitive watch core (104), the size of the gap of the support ring (202) is 1.5 to 2 mm.

6. The ceramic-metal composite high-reliability quartz flexible accelerometer core hanging structure according to claim 1, characterized in that: The ceramic isolation ring (204) is fixedly connected to the support ring (202) and the quartz flexible accelerometer housing (201) respectively through a second adhesive (203).

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