Calibration jig and probe station calibration method

Abstract

The invention relates to the technical field of semiconductor manufacturing, and provides a calibration jig and a probe station calibration method, and the calibration jig comprises a carrier plate which is used for placing probe testing equipment; the reference plate is mounted on the carrier plate, and when the carrier plate is placed on the probe test equipment, the upper plate surface of the reference plate is parallel to the reference surface of the probe test equipment; the calibration plate is arranged on the carrier plate and can move relative to the carrier plate; the calibration plate is used for calibrating the probe test equipment; the adjusting assembly is used for adjusting the movement of the calibration plate; when the adjusting assembly enables the upper end face of the calibration plate to be parallel to the upper end face of the reference plate, the calibration plate can calibrate the probe test equipment. Through the adjustment of the adjusting assembly, the end face of the calibration plate is parallel to the end face of the reference plate, and the upper end face of the reference plate is parallel to the end face of the probe station. In this way, it is guaranteed that the calibration plate is parallel to the end face of the probe station, and therefore when the probe station is leveled, only the calibration plate needs to be leveled, and loss and abrasion to instruments do not need to be caused.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a calibration fixture and a probe station calibration method. Background Art

[0002] The probe card is the core consumable in the wafer testing process. Its main function is to achieve electrical connection between the chip on the wafer and the probe card testing equipment. During the probe card testing process, the probe card is first placed on the probe station, the test signal of the probe card testing equipment is transmitted to the chip, and the response signal of the chip is transmitted back to the probe card testing equipment, thereby completing the electrical performance and functional testing of the chip.

[0003] During the semiconductor manufacturing process, when testing the probe card, after the probe card is placed on the probe table, if the probe table is tilted, some probes may be suspended in the air or the pressure may be too high, causing the current / voltage measurement value to deviate from the actual value, resulting in test distortion or sample damage. To solve the deflection problem, the existing method is to level the probe card after placing it on the probe table. However, using this leveling method will cause product loss. If unevenness occurs, the high pressure of the probe card will cause wear of the equipment, which will affect the later accuracy. Summary of the Invention

[0004] In view of the shortcomings of the prior art in terms of product loss and instrument wear, the present invention aims to provide a calibration fixture and a probe station calibration method that is free of loss and wear.

[0005] In order to solve the above problems, the present invention provides the following technical solutions: In a first aspect, an embodiment of the present application provides a calibration fixture, comprising: a carrier plate for being placed on a probe testing device; A reference plate is mounted on the carrier plate, and when the carrier plate is placed on the probe test equipment, the upper surface of the reference plate is parallel to the reference surface of the probe test equipment; A calibration plate, provided on the carrier plate, the calibration plate being movable relative to the carrier plate; the calibration plate being used for calibrating a probe test device; an adjustment component for adjusting the movement of the calibration plate; When the adjustment assembly makes the upper end surface of the calibration plate parallel to the upper end surface of the reference plate, the calibration plate can be used to calibrate the probe testing equipment.

[0006] In some embodiments, the calibration plate is a calibration plate.

[0007] In some embodiments, the adjustment assembly includes an adjustment plate and an adjustment mechanism; The adjustment plate is used for fixing and installing the calibration plate; The adjustment mechanism is used to adjust the adjustment plate so that the calibration plate on the adjustment plate is parallel to the reference plate.

[0008] In some embodiments, the adjustment mechanisms are greater than or equal to three; The adjustment mechanism includes an adjustment member and a positioning groove provided on the adjustment plate; The inner end of the adjusting member is placed in the positioning groove, and the adjusting member prevents the adjustment plate from deflecting through the positioning groove.

[0009] In some embodiments, the adjustment member includes a coarse adjustment screw rod and a fine adjustment screw rod; The coarse adjustment screw rod is used for quick adjustment of the calibration plate relative to the reference plate; The fine adjustment screw rod is used for precision adjustment of the calibration plate relative to the reference plate.

[0010] In some embodiments, the coarse adjustment screw rod and the fine adjustment screw rod are coaxially arranged; The coarse adjustment screw rod is sleeved on the outside of the fine adjustment screw rod or the fine adjustment screw rod is sleeved on the outside of the coarse adjustment screw rod.

[0011] In some embodiments, the fine adjustment screw rod located on the inner side or the coarse adjustment screw rod located on the inner side is chamfered at one end close to the adjustment plate; The chamfer is placed in the positioning groove to prevent the adjustment plate from deflecting.

[0012] In some embodiments, the calibration jig further includes a base plate; The bottom plate is mounted on the carrier plate, the coarse adjustment screw rod located on the outside or the fine adjustment screw rod located on the outside is rotatably mounted on the bottom plate, and the adjustment plate is mounted on the bottom plate.

[0013] In some embodiments, the calibration jig further includes a frame-shaped cover; The cover plate is arranged on the calibration plate, and the cover plate prevents the calibration plate from being separated from the adjustment plate.

[0014] In a second aspect, an embodiment of the present application provides a probe station calibration method, using a calibration fixture as described in any one of the first aspects, characterized in that it includes the following steps: S1: Place the calibration jig with the target facing downwards, and then place the calibration jig on the probe station for installation and positioning. The calibration jig and the probe station are now installed so that the reference plate of the calibration jig is parallel to the probe station, and the target on the calibration jig corresponds to the detection sensor on the probe card test equipment. S2: The detection sensor scans the target points on the calibration fixture, scanning three target points at any position, and the three target points are not located on the same straight line; S3: The processing module on the probe card test equipment measures and compares the heights of the three targets; S4: When the height differences of the three target points obtained by the processing module are inconsistent or the measured height deviates from the actual height of the probe station, the processing module will drive the calibration piece on the probe station to make adjustments; S5: Continue to repeat steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station, the detection sensor stops, and the probe station completes calibration; S6: Remove the calibration fixture from the probe station.

[0015] The beneficial effects of the present invention are: by adjusting the adjustment component, the end face of the calibration plate is made parallel to the end face of the reference plate, and since the upper end face of the reference plate is parallel to the end face of the probe station, it is ensured that the calibration plate is parallel to the end face of the probe station, so when leveling the probe station, it is only necessary to level the calibration plate, without loss or wear on the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A perspective view of the present invention; Figure 2 A three-dimensional diagram for facilitating observation of the adjusting member of the present invention; Figure 3 This is a first exploded view of the present invention; Figure 4 is a second exploded view of the present invention; Figure 5 It is a cross-sectional schematic diagram of the adjusting member of the present invention; Figure 6 This is a three-dimensional schematic diagram of the calibration fixture of the present invention installed on a probe station; Figure 7 This is a three-dimensional diagram of the detection sensor of the present invention scanning the target point of the calibration fixture.

[0017] Reference numerals: 100, calibration fixture; 110, carrier plate; 120, reference plate; 130, calibration plate; 140, adjustment assembly; 150, base plate; 160, cover plate; 141. Adjustment plate; 142. Adjustment mechanism; 142a. Adjustment member; 2a1. Coarse adjustment screw; 2a2. Fine adjustment screw; 142b. Positioning groove; 143. Chamfer; 200. Probe card test equipment; 210. Probe station; 220. Detection sensor. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0020] For the convenience of describing the first, second, and third directions in the embodiments of this application, the first direction is the left-right direction in the drawings, the second direction is the front-back direction in the drawings, and the third direction is the up-down direction in the drawings. The x-axis arrow direction is referred to as the "right" direction, the y-axis arrow direction is referred to as the "up" direction, and the z-axis arrow direction is referred to as the "back" direction in the following text. However, in the actual application of this application, this is not limiting.

[0021] like Figures 1-4 As shown, this embodiment provides a calibration fixture 100, which includes a carrier plate 110, a reference plate 120, a calibration plate 130, and an adjustment assembly 140. The carrier plate 110 is used to be placed on a probe test device; the reference plate 120 is installed on the carrier plate 110. When the carrier plate 110 is placed on the probe test device, the upper surface of the reference plate 120 is parallel to the reference surface of the probe test device. The reference plate 120 is a PCB board; that is, after the substrate and the carrier plate 110 are fixed, when the reference plate 120 is placed on the probe test device, the upper end surface of the reference plate 120 remains parallel to the end surface of the probe station 210; the calibration plate 130 is provided on the carrier plate 110, and the calibration plate 130 can move relative to the carrier plate 110; the calibration plate 130 is used to calibrate the probe test device; the adjustment assembly 140 is used to adjust the movement of the calibration plate 130; when the adjustment assembly 140 makes the upper end surface of the calibration plate 130 parallel to the upper end surface of the reference plate 120, the calibration plate 130 can calibrate the probe test device. By adjusting the adjustment component 140, the end face of the calibration plate 130 is made parallel to the end face of the reference plate 120. Since the upper end face of the reference plate 120 is parallel to the end face of the probe station 210 when the reference plate 120 is placed on the probe testing equipment, it is ensured that the calibration plate 130 is parallel to the end face of the probe station 210. Therefore, when leveling the probe station 210, it is only necessary to level the calibration plate 130 without loss or wear to the equipment.

[0022] In some embodiments, the calibration plate 130 is a calibration plate; point scanning can be effectively performed through the target points on the calibration plate.

[0023] Preferably, the standard plate 130 is made of glass or metal.

[0024] Preferably, the glass material is laser glass, quartz optical glass, etc., which is not specifically limited here.

[0025] Preferably, the metal material is steel plate, aluminum plate, etc., which is not specifically limited here.

[0026] like Figure 3-Figure 4 As shown, in some embodiments, adjustment assembly 140 includes an adjustment plate 141 and an adjustment mechanism 142; adjustment plate 141 is used to securely mount calibration plate 130; and adjustment mechanism 142 is used to adjust adjustment plate 141 so that calibration plate 130 on adjustment plate 141 is parallel to reference plate 120. By securing calibration plate 130 to adjustment plate 141, calibration plate 130 is well supported. Adjustment of adjustment plate 141 by adjustment mechanism 142 effectively ensures that calibration plate 130 is parallel to reference plate 120.

[0027] In some embodiments, the carrier plate 110 is frame-shaped, and a clearance hole is provided on the reference plate 120. The periphery of the clearance hole coincides with the inner side of the carrier plate 110. The adjustment plate 141 and the calibration plate 130 are placed inside the carrier plate 110, with a gap between the adjustment plate 141 and the calibration plate 130 and the inner side of the carrier plate 110. This ensures that the adjustment plate 141 and the calibration plate 130 are not blocked during adjustment.

[0028] like Figure 3-Figure 4 As shown, in some embodiments, multiple adjustment mechanisms 142 are provided, each including an adjustment member 142a and a positioning groove 142b provided on the adjustment plate 141. The inner end of the adjustment member 142a is positioned within the positioning groove 142b, and the adjustment member 142a prevents the adjustment plate 141 from deflecting via the positioning groove 142b. The provision of multiple positioning grooves 142b ensures that the adjustment member 142a and the positioning grooves 142b do not disengage when the adjustment plate 141 moves up and down, and the positioning grooves 142b prevent the adjustment plate 141 from shifting horizontally.

[0029] Preferably, there are three or four adjustment mechanisms 142 .

[0030] like Figure 3-Figure 5As shown, in some embodiments, adjustment member 142a includes a coarse adjustment screw 2a1 and a fine adjustment screw 2a2. Coarse adjustment screw 2a1 is used for rapid adjustment of calibration plate 130 relative to reference plate 120, while fine adjustment screw 2a2 is used for precise adjustment of calibration plate 130 relative to reference plate 120. Adjustment of coarse adjustment screw 2a1 enables rapid movement of adjustment plate 141, accelerating adjustment efficiency. Adjustment of fine adjustment screw 2a2 ensures small adjustments of adjustment plate 141, ensuring that calibration plate 130 is parallel to reference plate 120.

[0031] In some embodiments, the coarse adjustment screw 2a1 and the fine adjustment screw 2a2 are coaxially arranged; the coarse adjustment screw 2a1 is sleeved outside the fine adjustment screw 2a2, or the fine adjustment screw 2a2 is sleeved outside the coarse adjustment screw 2a1. The coaxial arrangement of the coarse adjustment screw 2a1 and the fine adjustment screw 2a2 allows for single-sided adjustment when rotating either the coarse adjustment screw 2a1 or the fine adjustment screw 2a2, reducing operational difficulty.

[0032] Example 1: Figure 3-Figure 5 As shown, when coarse adjustment screw 2a1 is positioned outside fine adjustment screw 2a2, adjustment requires first rotating the outer coarse adjustment screw 2a1, then rotating the inner fine adjustment screw 2a2. At this point, the friction between fine adjustment screw 2a2 and coarse adjustment screw 2a1 is less than the friction between coarse adjustment screw 2a1 and base plate 150. This ensures that coarse adjustment screw 2a1 does not rotate when fine adjustment screw 2a2 rotates, thereby ensuring adjustment accuracy.

[0033] Example 2: When fine adjustment screw 2a2 is positioned outside coarse adjustment screw 2a1, adjustment requires first rotating the inner coarse adjustment screw 2a1, followed by the outer fine adjustment screw 2a2. In this case, the friction between fine adjustment screw 2a2 and base plate 150 is less than the friction between coarse adjustment screw 2a1 and fine adjustment screw 2a2. This ensures that when coarse adjustment screw 2a1 rotates, fine adjustment screw 2a2 can rotate, but when fine adjustment screw 2a2 rotates, coarse adjustment screw 2a1 does not rotate, thereby ensuring adjustment accuracy.

[0034] In some embodiments, the inner end of the fine adjustment screw 2a2 or the inner coarse adjustment screw 2a1 near the adjustment plate 141 is chamfered 143; chamfer 143 is positioned within the positioning groove 142b to prevent deflection of the adjustment plate 141. The chamfer 143 at the inner end of the screw ensures that the chamfer 143 at the end of the screw is positioned within the positioning groove 142b and does not disengage from the positioning groove 142b, preventing horizontal deviation of the adjustment plate 141 and displacement of the calibration plate 130.

[0035] Preferably, the chamfer 143 is a rounded corner.

[0036] Preferably, the chamfer 143 is a chamfered right angle.

[0037] like Figure 3-Figure 4 As shown, in some embodiments, the calibration jig 100 further includes a base plate 150; the base plate 150 is mounted on the carrier plate 110, the outer coarse adjustment screw rod 2a1 or the outer fine adjustment screw rod 2a2 is rotatably mounted on the base plate 150, and the adjustment plate 141 is mounted on the base plate 150. The provision of the base plate 150 can prevent the adjustment plate 141 from falling off and also facilitate the installation and rotation of the screw rods.

[0038] Preferably, the bottom plate is provided with a mounting hole, and the adjustment plate is fixed by bolts passing through the mounting hole on the bottom plate, and there is a gap between the bolts and the mounting hole on the bottom plate.

[0039] like Figure 3-Figure 4 As shown, in some embodiments, the calibration jig 100 further includes a frame-shaped cover 160; the cover 160 is disposed over the calibration plate 130 and secures the calibration plate 130 to the adjustment plate 141. The frame-shaped design of the cover 160 prevents the calibration plate 130 from falling off and does not affect the identification of the calibration plate 130 during testing.

[0040] Leveling method of the calibration plate 130 of the calibration fixture 100: S1: Make the adjustment plate 141 and the base plate 150 active; place the calibration fixture 100 with the target side facing upwards on a fixed detection device; S2: The detection sensor on the detector scans the target points on the calibration fixture 100, scanning three target points at any position, and the three target points are not located on the same straight line; S3: The processing module on the detector measures the heights of the three targets; S4: The display module on the detector shows the heights of the corresponding positions of the three targets; S5: Determine the deviation from the preset height based on the height displayed on the display module. If the deviation is large, first adjust the coarse adjustment screw rod. The range of large deviation is between 100-10 microns. If the deviation is small, adjust the fine adjustment screw rod. The range of small deviation is between 10-0.5 microns. S6: Continue to repeat steps S2-S5 until the height difference obtained by the processing module is consistent and the height is adjusted to the preset height.

[0041] S7: Finally, the adjusting plate 141 is fixed to the bottom plate 150, that is, the adjusting plate is pressed on the adjusting screw and does not move.

[0042] Optionally, the detection instrument is one of a laser level, a level indicator calibrator, etc., and no specific selection is made here.

[0043] like Figure 6-Figure 7 As shown, the present application also provides a probe station calibration method, which uses a calibration fixture 100 and includes the following steps: S1: Place the calibration jig 100 with the target facing downward, and then place the calibration jig 100 on the probe station 210 for installation and positioning. The calibration jig 100 and the probe station 210 are now installed. The reference plate 120 of the calibration jig 100 is parallel to the probe station 210, and the target on the calibration jig 100 corresponds to the detection sensor on the probe card test equipment 200. S2: The detection sensor scans the target points on the calibration fixture 100, scanning three target points at any position, and the three target points are not located on the same straight line; S3: The processing module on the probe card testing device 200 measures and compares the heights of the three targets; S4: When the height differences of the three target points obtained by the processing module are inconsistent or the measured height deviates from the actual height of the probe station 210, the processing module drives the calibration piece on the probe station 210 to make adjustments; S5: Continue to repeat steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station 210, the detection sensor stops, and the probe station 210 completes calibration; S6 : Remove the calibration jig 100 from the probe station 210 .

[0044] A detection sensor calibration method on a probe card test device 200: first, the probe station calibration is completed, and then the calibration fixture 100 continues to be placed on the probe card test device 200. Subsequently, the detection sensor corresponds to two adjacent points on the calibration fixture 100 and randomly and continuously identifies whether the detection sensor identification distance is accurate based on the distance between the two adjacent target points, and completes the calibration to ensure that the probe card in the subsequent semiconductor manufacturing process can perform accurate detection.

[0045] In summary, the present invention provides a calibration jig and a probe station calibration method. By adjusting the adjustment component, the end face of the calibration plate is made parallel to the end face of the reference plate. Since the upper end face of the reference plate is parallel to the end face of the probe station, it is ensured that the calibration plate is parallel to the end face of the probe station. Therefore, when calibrating the probe station, it is only necessary to level the calibration plate, without loss or wear on the instrument.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A calibration jig, characterized in that: include: A carrier board, used to be placed on the probe test equipment; A reference plate is mounted on the carrier plate, and when the carrier plate is placed on the probe test equipment, the upper surface of the reference plate is parallel to the reference surface of the probe test equipment; A calibration plate, provided on the carrier plate, the calibration plate being movable relative to the carrier plate; the calibration plate being used for calibrating a probe test device; an adjustment component for adjusting the movement of the calibration plate; When the adjustment assembly makes the upper end surface of the calibration plate parallel to the upper end surface of the reference plate, the calibration plate can be used to calibrate the probe testing equipment.

2. The calibration jig according to claim 1, characterized in that: The calibration plate is a calibration plate.

3. The calibration jig according to claim 1, characterized in that: The adjustment assembly includes an adjustment plate and an adjustment mechanism; The adjustment plate is used for fixing and installing the calibration plate; The adjustment mechanism is used to adjust the adjustment plate so that the calibration plate on the adjustment plate is parallel to the reference plate.

4. The calibration jig according to claim 3, characterized in that: There are more than or equal to three adjustment mechanisms; The adjustment mechanism includes an adjustment member and a positioning groove provided on the adjustment plate; The inner end of the adjusting member is placed in the positioning groove, and the adjusting member prevents the adjustment plate from deflecting through the positioning groove.

5. The calibration jig according to claim 4, characterized in that: The adjusting member includes a coarse adjustment screw rod and a fine adjustment screw rod; The coarse adjustment screw rod is used for quick adjustment of the calibration plate relative to the reference plate; The fine adjustment screw rod is used for precision adjustment of the calibration plate relative to the reference plate.

6. The calibration jig according to claim 5, characterized in that: The coarse adjustment screw rod and the fine adjustment screw rod are coaxially arranged; The coarse adjustment screw rod is sleeved on the outside of the fine adjustment screw rod or the fine adjustment screw rod is sleeved on the outside of the coarse adjustment screw rod.

7. The calibration jig according to claim 6, characterized in that: One end of the fine adjustment screw rod located on the inner side or the coarse adjustment screw rod located on the inner side close to the adjustment plate is chamfered; The chamfer is placed in the positioning groove to prevent the adjustment plate from deflecting.

8. The calibration jig according to claim 5, characterized in that: The calibration jig also includes a base plate; The bottom plate is mounted on the carrier plate, the coarse adjustment screw rod located on the outside or the fine adjustment screw rod located on the outside is rotatably mounted on the bottom plate, and the adjustment plate is mounted on the bottom plate.

9. The calibration jig according to claim 3, characterized in that: The calibration jig also includes a frame-shaped cover; The cover plate is arranged on the calibration plate, and the cover plate prevents the calibration plate from being separated from the adjustment plate.

10. A probe station calibration method, using a calibration fixture 100 according to any one of claims 1 to 9, characterized in that The steps include: S1: Place the calibration jig with the target facing downwards, and then place the calibration jig on the probe station for installation and positioning. The calibration jig and the probe station are now installed so that the reference plate of the calibration jig is parallel to the probe station, and the target on the calibration jig corresponds to the detection sensor on the probe card test equipment. S2: The detection sensor scans the target points on the calibration fixture, scanning three target points at any position, and the three target points are not located on the same straight line; S3: The processing module on the probe card test equipment measures and compares the heights of the three targets; S4: When the height differences of the three target points obtained by the processing module are inconsistent or the measured height deviates from the actual height of the probe station, the processing module will drive the calibration piece on the probe station to make adjustments; S5: Continue to repeat steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station, the detection sensor stops, and the probe station completes calibration; S6: Remove the calibration fixture from the probe station.

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