Process material selection method and system, equipment, storage medium and computer program product

Abstract

The invention discloses a process material selection method and system, equipment, a storage medium and a computer program product. The method comprises the following steps: acquiring process environment information of a target process; obtaining a material selection range of a target process; performing material process matching on the process environment information and the material selection range, and obtaining an initial material matched with the process environment information in the material selection range; predicting a process result of the target process according to the initial material; and selecting an initial material as a target material of the target process based on the process result. The method is beneficial for improving the product quality and reliability.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of semiconductor manufacturing, and in particular to a method and system for selecting process materials, equipment, storage medium, and computer program product. Background Art

[0002] Integrated circuits are core components of modern electronic devices and are widely used in various fields, including computers, communications equipment, consumer electronics, and automotive electronics. Therefore, integrated circuit manufacturing plays a vital role in modern science and technology and the economy. In integrated circuit manufacturing, cost and yield are closely linked, and increasing yield is a key goal for manufacturers. Integrated circuit manufacturing involves numerous materials, including silicon, silicon nitride, polysilicon, photoresist, and metals. Different materials have varying properties, such as conductivity, insulation, and optical properties, which affect chip performance and yield.

[0003] Therefore, proper material selection is crucial to improving yield. Summary of the Invention

[0004] The problem solved by the embodiments of the present invention is to provide a method and system, device, storage medium and computer program product for selecting process materials, which are conducive to improving product quality and reliability.

[0005] To solve the above problems, an embodiment of the present invention provides a method for selecting process materials, including: obtaining process environment information of the target process; obtaining a material selection range for the target process; matching the process environment information with the material selection range for material and process, and obtaining an initial material that matches the process environment information in the material selection range; predicting the process results of the target process based on the initial material; and selecting the initial material based on the process results as the target material for the target process.

[0006] Optionally, before obtaining the process environment information of the target process, the method further includes: establishing a monitoring system, the monitoring system including a sensor system and a monitoring system; and in obtaining the process environment information of the target process, collecting the process environment information through the monitoring system.

[0007] Optionally, in obtaining process environment information of the target process, the process environment information includes temperature data, humidity data, and equipment status data.

[0008] Optionally, before matching the process environment information with the material selection range for material and process, the method further includes: pre-processing the process environment information to filter out invalid information.

[0009] Optionally, before obtaining the material selection range of the target process, it also includes: establishing a material database, the material database includes a mapping relationship between processes and materials; obtaining the material selection range of the target process, including: querying the target process in the material database; obtaining all materials corresponding to the target process as the material selection range.

[0010] Optionally, before matching the process environment information with the material selection range for material-process matching and obtaining the initial material that matches the process environment information in the material selection range, the method further includes: establishing a material-process matching model; matching the process environment information with the material selection range for material-process matching, using the material-process matching model to perform material-process fitting, and obtaining the initial material that matches the process environment information in the material selection range; and predicting the process results of the target process based on the initial material, using the material-process matching model to predict the process results of the target process.

[0011] Optionally, a material-process matching model is established, including: obtaining historical production information of the target process, the historical production information including the properties, costs, and corresponding output indicators of historical materials of the target process; performing model fitting on the historical production information to establish a material-process matching model.

[0012] Optionally, in predicting process results of the target process based on the initial materials, the process results include product performance and output of the target process.

[0013] Optionally, an initial material is selected based on the process result as the target material for the target process, including: determining whether the process result meets the standard; if the process result meets the standard, confirming the initial material as the target material; if the process result does not meet the standard, returning to execute the step of matching the process environment information with the material selection range for material process, obtaining the initial material that matches the process environment information in the material selection range, until the process result meets the standard, and confirming the initial material as the target material.

[0014] Optionally, in the step of returning to perform material-process matching of the process environment information with the material selection range, the number of material-process fittings for the current material-process matching is greater than the number of fittings for the previous material-process matching.

[0015] Optionally, after selecting an initial material based on the process result as a target material for the target process, the method further includes: allocating the target material to a manufacturing system of the target process.

[0016] Correspondingly, an embodiment of the present invention also provides a process material selection system, including: a process environment information acquisition module, used to obtain the process environment information of the target process; a material selection range acquisition module, used to obtain the material selection range of the target process; a material process matching module, used to match the process environment information with the material selection range, and obtain the initial material that matches the process environment information in the material selection range; a process result prediction module, used to predict the process result of the target process based on the initial material; and a target material determination module, used to select the initial material based on the process result as the target material of the target process.

[0017] Accordingly, an embodiment of the present invention also provides a device comprising at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the process material selection method provided in an embodiment of the present invention.

[0018] Correspondingly, an embodiment of the present invention further provides a storage medium, which stores one or more computer instructions, and the one or more computer instructions are used to implement the process material selection method provided by the embodiment of the present invention.

[0019] Accordingly, an embodiment of the present invention further provides a computer program product, including a computer program / instruction, which, when executed by a processor, implements the method for selecting process materials provided in an embodiment of the present invention.

[0020] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0021] In the method for selecting process materials provided in an embodiment of the present invention, material-process matching is performed between process environment information and a material selection range, an initial material matching the process environment information is obtained in the material selection range, the process result of the target process is predicted based on the initial material, and the initial material is selected based on the process result as the target material for the target process; in an embodiment of the present invention, automated material selection is achieved through material-process matching, the process of process development and material selection is accelerated, errors caused by human selection are reduced, and production efficiency is improved; and the process result of the target process is predicted based on the initial material, and then the initial material is selected based on the process result, which is conducive to selecting more suitable materials, reducing the scrap rate of the target process, reducing manufacturing costs, and improving product competitiveness, thereby ensuring that the selected target material can maintain stable performance throughout the entire manufacturing process and improving product quality and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a flow chart of an embodiment of a method for selecting process materials of the present invention;

[0023] Figure 2 is a functional block diagram of an embodiment of a process material selection system of the present invention;

[0024] Figure 3 It is a hardware structure diagram of an embodiment of the device provided by the present invention. DETAILED DESCRIPTION

[0025] As can be seen from the background technology, integrated circuit manufacturing uses many different types of materials, including semiconductor materials, insulator materials, metal materials, etc. Each material has unique properties and uses. Therefore, there is an urgent need for methods that can handle these diverse material selection issues. Moreover, the manufacturing process of integrated circuits is usually very complex, including hundreds of steps, each of which may require different material selections. Therefore, automated material selection for complex process requirements is also a challenge. At the same time, the performance of materials will change with factors such as time, temperature, and humidity. These changes in performance need to be considered in material selection to ensure that the selected materials maintain stable performance throughout the entire manufacturing process.

[0026] In order to solve the above technical problems, an embodiment of the present invention provides a method for selecting process materials. Figure 1 , which shows a flow chart of an embodiment of a method for selecting process materials of the present invention.

[0027] In this embodiment, the method for selecting process materials includes the following basic steps:

[0028] Step S1: Obtain process environment information of the target process;

[0029] Step S2: Obtaining the material selection range of the target process;

[0030] Step S3: Matching the process environment information with the material selection range to obtain the initial material that matches the process environment information in the material selection range;

[0031] Step S4: predicting the process result of the target process based on the initial material;

[0032] Step S5: Selecting an initial material based on the process result as a target material for the target process.

[0033] In an embodiment of the present invention, automated material selection is achieved through material-process matching, the process of process development and material selection is accelerated, errors caused by human selection are reduced, and production efficiency is improved. The process results of the target process are predicted based on the initial materials, and the initial materials are selected based on the process results. This is conducive to selecting more suitable materials, reducing the scrap rate of the target process, reducing manufacturing costs, and improving product competitiveness, thereby ensuring that the selected target material can maintain stable performance throughout the entire manufacturing process and improving product quality and reliability.

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below.

[0035] In semiconductor manufacturing, reasonable material selection is particularly important for different processes. Semiconductor processes are usually very complex and include multiple steps. Each step may require different material selection. In this embodiment, material selection is performed based on the target process, and the target process can be a specific step in the semiconductor process.

[0036] Execute step S1: obtain process environment information of the target process.

[0037] The performance of materials will change with changes in environmental factors. Therefore, obtaining the process environment information of the target process and selecting materials based on the process environment information will help improve the stability of the performance of the selected materials.

[0038] As an example, in this embodiment, the target process may be a process in a deposition process or a process in an etching process.

[0039] In this embodiment, the process environment information of the target process is obtained, and the process environment information includes temperature data, humidity data, and equipment status data.

[0040] Temperature data, humidity data, and equipment status data can characterize the environmental characteristics of the target process.

[0041] In this embodiment, before obtaining the process environment information of the target process, the method further includes: establishing a monitoring system, which includes a sensor system and a monitoring system.

[0042] The monitoring system is used to monitor the process environment to obtain data representing the process environment. The sensor system can obtain process environment information through sensor data, and the monitoring system can obtain process environment information through monitoring data.

[0043] Specifically, in this embodiment, sensors, monitoring, etc. are arranged in the process environment space and distributed in multiple key locations of the production workshop to collect environmental data in real time, such as temperature data, humidity data and equipment status data.

[0044] In this embodiment, in establishing a monitoring system, redundant sensor systems and monitoring systems are set up to ensure that a single sensor failure or a single monitoring failure will not affect the overall data collection.

[0045] In this embodiment, after the monitoring system is established, the following steps are further included: real-time monitoring of the status of the sensor system and the monitoring system, and timely replacement or repair of faulty sensors and monitoring systems.

[0046] Accordingly, in this embodiment, in obtaining the process environment information of the target process, the process environment information is collected through a monitoring system.

[0047] Specifically, temperature data, humidity data and equipment status data are obtained through the sensor system and the monitoring system.

[0048] In this embodiment, before subsequently matching the process environment information with the material selection range for material and process, the method further includes: pre-processing the process environment information to filter out invalid information.

[0049] After collecting the process environment information, preprocessing is performed to ensure the data quality of the process environment information.

[0050] Specifically, in this embodiment, data cleaning is performed on temperature data, humidity data, and device status data to obtain valid data.

[0051] In this embodiment, the process environment information is pre-processed to filter out invalid information, including: real-time monitoring of fluctuations in the process environment information data, and identification and processing of abnormal data.

[0052] This embodiment also includes: establishing a data early warning mechanism to prevent abnormal process environment information data from affecting material selection decisions.

[0053] In this embodiment, before obtaining the material selection range of the target process, the method further includes: establishing a material database, which includes a mapping relationship between processes and materials.

[0054] The material database includes a mapping relationship between processes and materials, which means that the material database includes different processes and one or more material selections corresponding to each process.

[0055] In this embodiment, after the material database is established, the process also includes: regularly backing up and updating the material database to prevent data loss.

[0056] In this embodiment, after the material database is established, the process further includes establishing a rapid recovery mechanism to ensure that the material database can be quickly restored to normal when a failure occurs.

[0057] Execute step S2: obtain the material selection range of the target process.

[0058] Obtain the material selection range of the target process to facilitate subsequent material selection within the material selection range.

[0059] In this embodiment, obtaining the material selection range of the target process includes: searching the material database for the target process.

[0060] The target process is queried in the material database to obtain the material corresponding to the target process in the material database.

[0061] Accordingly, in this embodiment, all materials corresponding to the target process are obtained as the material selection range.

[0062] In this embodiment, before performing material-process matching between the process environment information and the material selection range and obtaining the initial material matching the process environment information in the material selection range, the method further includes: establishing a material-process matching model.

[0063] Establish a material-process matching model for subsequent matching of target processes with corresponding materials.

[0064] In this embodiment, establishing a material-process matching model includes: obtaining historical production information of a target process, where the historical production information includes properties, costs, and corresponding yield indicators of historical materials of the target process.

[0065] Obtain historical production information of the target process, including the properties, costs, and corresponding output indicators of historical materials of the target process, so as to establish a material-process matching model based on the historical production information.

[0066] In this embodiment, model fitting is performed on historical production information to establish a material-process matching model.

[0067] Specifically, machine learning is used to fit historical production information into a model and establish a material-process matching model.

[0068] Execute step S3: perform material-process matching between the process environment information and the material selection range, and obtain an initial material that matches the process environment information in the material selection range.

[0069] The process environment information is matched with the material selection range to obtain the initial material that best matches the current process environment.

[0070] In this embodiment, the process environment information is matched with the material selection range for material-process matching, and a material-process matching model is used to perform material-process fitting to obtain an initial material that matches the process environment information within the material selection range.

[0071] The material-process matching model is used to design and run an algorithm to output materials that match the current process environment based on the process environment information and material selection range input by the data.

[0072] Execute step S4: predict the process result of the target process based on the initial material.

[0073] The process results of the target process are predicted based on the initial materials, so as to judge whether the selection of the initial materials is correct based on the process results.

[0074] In this embodiment, the process results of the target process are predicted based on the initial materials, and the process results include product performance and yield of the target process.

[0075] Product performance and yield are useful indicators for evaluating the effectiveness of target processes using starting materials.

[0076] Accordingly, in this embodiment, in predicting the process result of the target process based on the initial material, the material-process matching model is used to predict the process result of the target process.

[0077] Specifically, the material-process matching model uses an algorithm to match materials with the current process environment and predict material properties and yields.

[0078] Executing step S5: selecting an initial material based on the process result as a target material for the target process.

[0079] Based on the process results, the initial material is selected as the target material for the target process to carry out the actual target process production work.

[0080] In this embodiment, material-process matching is used to achieve automated material selection, accelerate the process of process development and material selection, reduce errors caused by human selection, and improve production efficiency. The process results of the target process are predicted based on the initial materials, and the initial materials are selected based on the process results. This is conducive to selecting more suitable materials, reducing the scrap rate of the target process, reducing manufacturing costs, and improving product competitiveness, thereby ensuring that the selected target material can maintain stable performance throughout the entire manufacturing process and improving product quality and reliability.

[0081] In this embodiment, the initial material is selected based on the process result as the target material of the target process, including: executing step S51: determining whether the process result meets the standard.

[0082] Determine whether the process results meet the standards to determine whether the initial material selection is suitable.

[0083] In this embodiment, if the process result does not meet the standard, return to step S3: match the process environment information with the material selection range for material process, obtain the initial material that matches the process environment information in the material selection range, and confirm the initial material as the target material after the process result meets the standard.

[0084] If the process result does not meet the requirements, the process returns to step S3 to re-match the process environment information with the material and update the selected initial material.

[0085] In this embodiment, in the step of returning to perform material-process matching between the process environment information and the material selection range, the number of material-process fitting times of the current material-process matching is greater than the number of fitting times of the previous material-process matching.

[0086] The number of material-process fittings currently being performed for material-process matching is greater than the number of fittings performed for the previous material-process matching, that is, each time step S3 is returned to be executed to re-perform the process and material matching operation, the number of fittings is greater than the number of fittings performed for the previous process and material matching operation, so that the matching fitting accuracy is continuously improved each time step S3 is returned to be executed. The material selection strategy is continuously optimized through the feedback loop, and the production efficiency and output are improved, which is conducive to selecting more accurate initial materials as target materials so that the process results meet the standards.

[0087] Accordingly, in the embodiment, if the process result meets the requirements, step S52 is executed: confirming the initial material as the target material.

[0088] In this embodiment, after selecting the initial material based on the process result as the target material for the target process, the method further includes: allocating the target material to a manufacturing system of the target process.

[0089] Allocate the target materials to the manufacturing system of the target process to carry out the actual target process production work.

[0090] Correspondingly, the present invention also provides a system for selecting process materials. Figure 2 It is a functional block diagram of an embodiment of a process material selection system of the present invention.

[0091] In this embodiment, the process material selection system 50 includes: a process environment information acquisition module 501, which is used to obtain the process environment information of the target process; a material selection range acquisition module 502, which is used to obtain the material selection range of the target process; a material process matching module 503, which is used to match the process environment information with the material selection range, and obtain the initial material that matches the process environment information in the material selection range; a process result prediction module 504, which is used to predict the process result of the target process based on the initial material; and a target material determination module 505, which is used to select the initial material based on the process result as the target material of the target process.

[0092] In semiconductor manufacturing, reasonable material selection is particularly important for different processes. Semiconductor processes are usually very complex and include multiple steps. Each step may require different material selection. In this embodiment, material selection is performed based on the target process, and the target process can be a specific step in the semiconductor process.

[0093] The process environment information acquisition module 501 is used to acquire process environment information of a target process.

[0094] The performance of materials will change with changes in environmental factors. Therefore, obtaining the process environment information of the target process and selecting materials based on the process environment information will help improve the stability of the performance of the selected materials.

[0095] As an example, in this embodiment, the target process may be a process in a deposition process or a process in an etching process.

[0096] In this embodiment, the process environment information of the target process is obtained, and the process environment information includes temperature data, humidity data, and equipment status data.

[0097] Temperature data, humidity data, and equipment status data can characterize the environmental characteristics of the target process.

[0098] In this embodiment, before obtaining the process environment information of the target process, the method further includes: establishing a monitoring system, which includes a sensor system and a monitoring system.

[0099] The monitoring system is used to monitor the process environment to obtain data representing the process environment. The sensor system can obtain process environment information through sensor data, and the monitoring system can obtain process environment information through monitoring data.

[0100] Specifically, in this embodiment, sensors, monitoring, etc. are arranged in the process environment space and distributed in multiple key locations of the production workshop to collect environmental data in real time, such as temperature data, humidity data and equipment status data.

[0101] In this embodiment, in establishing a monitoring system, redundant sensor systems and monitoring systems are set up to ensure that a single sensor failure or a single monitoring failure will not affect the overall data collection.

[0102] In this embodiment, after the monitoring system is established, the following steps are further included: real-time monitoring of the status of the sensor system and the monitoring system, and timely replacement or repair of faulty sensors and monitoring systems.

[0103] Accordingly, in this embodiment, in obtaining the process environment information of the target process, the process environment information is collected through a monitoring system.

[0104] Specifically, temperature data, humidity data and equipment status data are obtained through the sensor system and the monitoring system.

[0105] In this embodiment, before subsequently matching the process environment information with the material selection range for material and process, the method further includes: pre-processing the process environment information to filter out invalid information.

[0106] After collecting the process environment information, preprocessing is performed to ensure the data quality of the process environment information.

[0107] Specifically, in this embodiment, data cleaning is performed on temperature data, humidity data, and device status data to obtain valid data.

[0108] In this embodiment, the process environment information is pre-processed to filter out invalid information, including: real-time monitoring of fluctuations in the process environment information data, and identification and processing of abnormal data.

[0109] This embodiment also includes: establishing a data early warning mechanism to prevent abnormal process environment information data from affecting material selection decisions.

[0110] In this embodiment, before obtaining the material selection range of the target process, the method further includes: establishing a material database, which includes a mapping relationship between processes and materials.

[0111] The material database includes a mapping relationship between processes and materials, which means that the material database includes different processes and one or more material selections corresponding to each process.

[0112] In this embodiment, after the material database is established, the process also includes: regularly backing up and updating the material database to prevent data loss.

[0113] In this embodiment, after the material database is established, the process further includes establishing a rapid recovery mechanism to ensure that the material database can be quickly restored to normal when a failure occurs.

[0114] The material selection range acquisition module 502 is used to acquire the material selection range of the target process.

[0115] Obtain the material selection range of the target process to facilitate subsequent material selection within the material selection range.

[0116] In this embodiment, obtaining the material selection range of the target process includes: searching the material database for the target process.

[0117] The target process is queried in the material database to obtain the material corresponding to the target process in the material database.

[0118] Accordingly, in this embodiment, all materials corresponding to the target process are obtained as the material selection range.

[0119] In this embodiment, before performing material-process matching between the process environment information and the material selection range and obtaining the initial material matching the process environment information in the material selection range, the method further includes: establishing a material-process matching model.

[0120] Establish a material-process matching model for subsequent matching of target processes with corresponding materials.

[0121] In this embodiment, establishing a material-process matching model includes: obtaining historical production information of a target process, where the historical production information includes properties, costs, and corresponding yield indicators of historical materials of the target process.

[0122] Obtain historical production information of the target process, including the properties, costs, and corresponding output indicators of historical materials of the target process, so as to establish a material-process matching model based on the historical production information.

[0123] In this embodiment, model fitting is performed on historical production information to establish a material-process matching model.

[0124] Specifically, machine learning is used to fit historical production information into a model and establish a material-process matching model.

[0125] The material-process matching module 503 is used to perform material-process matching between the process environment information and the material selection range, and obtain an initial material that matches the process environment information in the material selection range.

[0126] The process environment information is matched with the material selection range to obtain the initial material that best matches the current process environment.

[0127] In this embodiment, the process environment information is matched with the material selection range for material-process matching, and a material-process matching model is used to perform material-process fitting to obtain an initial material that matches the process environment information within the material selection range.

[0128] The material-process matching model is used to design and run an algorithm to output materials that match the current process environment based on the process environment information and material selection range input by the data.

[0129] The process result prediction module 504 is used to predict the process result of the target process according to the initial materials.

[0130] The process results of the target process are predicted based on the initial materials, so as to judge whether the selection of the initial materials is correct based on the process results.

[0131] In this embodiment, the process results of the target process are predicted based on the initial materials, and the process results include product performance and yield of the target process.

[0132] Product performance and yield are useful indicators for evaluating the effectiveness of target processes using starting materials.

[0133] Accordingly, in this embodiment, in predicting the process result of the target process based on the initial material, the material-process matching model is used to predict the process result of the target process.

[0134] Specifically, the material-process matching model uses an algorithm to match materials with the current process environment and predict material properties and yields.

[0135] The target material determination module 505 is used to select an initial material as a target material for a target process based on the process result.

[0136] Based on the process results, the initial material is selected as the target material for the target process to carry out the actual target process production work.

[0137] In this embodiment, material-process matching is used to achieve automated material selection, accelerate the process of process development and material selection, reduce errors caused by human selection, and improve production efficiency. The process results of the target process are predicted based on the initial materials, and the initial materials are selected based on the process results. This is conducive to selecting more suitable materials, reducing the scrap rate of the target process, reducing manufacturing costs, and improving product competitiveness, thereby ensuring that the selected target material can maintain stable performance throughout the entire manufacturing process and improving product quality and reliability.

[0138] In this embodiment, selecting the initial material as the target material for the target process based on the process result includes: determining whether the process result meets the requirements.

[0139] Determine whether the process results meet the standards to determine whether the initial material selection is suitable.

[0140] In this embodiment, if the process result does not meet the standard, the process returns to the step of matching the process environment information with the material selection range for material process matching, and obtains the initial material that matches the process environment information in the material selection range until the process result meets the standard, and then confirms the initial material as the target material.

[0141] If the process result does not meet the requirements, the process returns to step S3 to re-match the process environment information with the material and update the selected initial material.

[0142] In this embodiment, in the step of returning to perform material-process matching between the process environment information and the material selection range, the number of material-process fitting times of the current material-process matching is greater than the number of fitting times of the previous material-process matching.

[0143] The number of material-process fittings for the current material-process matching is greater than the number of fittings for the previous material-process matching, that is, each time the process and material matching operation is repeated, the number of fittings is greater than the number of fittings for the previous process and material matching operation. This makes the matching fitting accuracy of each return to the process and material matching operation continuously improved. Through the feedback loop, the material selection strategy is continuously optimized, the production efficiency and output are improved, which is conducive to selecting more accurate initial materials as target materials to make the process results meet the standards.

[0144] Accordingly, in the embodiment, if the process result meets the requirements, the initial material is confirmed as the target material.

[0145] In this embodiment, after selecting the initial material based on the process result as the target material for the target process, the method further includes: allocating the target material to a manufacturing system of the target process.

[0146] Allocate the target materials to the manufacturing system of the target process to carry out the actual target process production work.

[0147] The embodiment of the present invention further provides a device that can implement the process material selection method provided by the embodiment of the present invention by loading the above process material selection method in the form of a program. An optional hardware structure of the terminal device provided by the embodiment of the present invention can be as follows Figure 3 As shown, it includes: at least one processor 01, at least one communication interface 02, at least one memory 03 and at least one communication bus 04.

[0148] In this embodiment, the number of the processor 01, the communication interface 02, the memory 03, and the communication bus 04 is at least one, and the processor 01, the communication interface 02, and the memory 03 communicate with each other through the communication bus 04. The communication interface 02 can be an interface of a communication module for network communication, such as an interface of a GSM module. The processor 01 may be a central processing unit (CPU), or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement an embodiment of the present invention. The memory 03 may include a high-speed RAM memory, and may also include a non-volatile memory (NVM), such as at least one disk storage. The memory 03 stores one or more computer instructions, and the one or more computer instructions are executed by the processor 01 to implement the method for selecting process materials provided in an embodiment of the present invention.

[0149] It should be noted that the above-mentioned terminal device may also include other devices (not shown) that may not be necessary for understanding the contents disclosed in the embodiments of the present invention; given that these other devices may not be necessary for understanding the contents disclosed in the embodiments of the present invention, the embodiments of the present invention will not introduce them one by one.

[0150] An embodiment of the present invention further provides a storage medium storing one or more computer instructions, wherein the one or more computer instructions are used to implement the method for selecting process materials provided in the embodiment of the present invention.

[0151] An embodiment of the present invention further provides a computer program product, including a computer program / instruction, which, when executed by a processor, implements the method for selecting process materials provided in an embodiment of the present invention.

[0152] In an embodiment of the present invention, automated material selection is achieved through material-process matching, the process of process development and material selection is accelerated, errors caused by human selection are reduced, and production efficiency is improved. The process results of the target process are predicted based on the initial materials, and the initial materials are selected based on the process results. This is conducive to selecting more suitable materials, reducing the scrap rate of the target process, reducing manufacturing costs, and improving product competitiveness, thereby ensuring that the selected target material can maintain stable performance throughout the entire manufacturing process and improving product quality and reliability.

[0153] The embodiments of the present invention described above are combinations of elements and features of the present invention. Unless otherwise mentioned, the elements or features may be considered as optional. Each element or feature may be put into practice without being combined with other elements or features. In addition, the embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some configurations of any one embodiment may be included in another embodiment and may be replaced by the corresponding configuration of another embodiment. It is obvious to those skilled in the art that claims that do not have a clear reference relationship to each other in the appended claims may be combined into embodiments of the present invention, or may be included as new claims in amendments after submitting this application.

[0154] The embodiments of the present invention can be implemented by various means such as hardware, firmware, software or a combination thereof. In a hardware configuration, the method according to the exemplary embodiment of the present invention can be implemented by one or more application specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc. In a firmware or software configuration, the embodiments of the present invention can be implemented in the form of modules, processes, functions, etc. The software code can be stored in a memory unit and executed by a processor. The memory unit is located inside or outside the processor and can send data to the processor and receive data from the processor via various known means.

[0155] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein, but is to be construed in the widest possible manner consistent with the principles and novel features disclosed herein.

[0156] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope defined by the claims.

Claims

1. A method for selecting process materials, characterized in that: include: Obtain process environment information of the target process; Obtain the material selection range for the target process; Performing material-process matching between the process environment information and a material selection range, and obtaining an initial material matching the process environment information within the material selection range; predicting a process result of the target process based on the initial material; The initial material is selected based on the process result as the target material for the target process.

2. The selection method according to claim 1, wherein: Before obtaining the process environment information of the target process, the method further includes: establishing a monitoring system, the monitoring system including a sensor system and a monitoring system; and in obtaining the process environment information of the target process, collecting the process environment information through the monitoring system.

3. The selection method according to claim 1, wherein: The process environment information of the target process is obtained, wherein the process environment information includes temperature data, humidity data and equipment status data.

4. The selection method according to claim 1, wherein: Before matching the process environment information with the material selection range for material and process, the method further includes: pre-processing the process environment information to filter out invalid information.

5. The selection method according to claim 1, wherein: Before obtaining the material selection range of the target process, the method further includes: establishing a material database, wherein the material database includes a mapping relationship between processes and materials; Obtaining a material selection range for a target process, including: querying the target process in the material database; All materials corresponding to the target process are obtained as the material selection range.

6. The selection method according to claim 1, wherein: Performing material-process matching on the process environment information and the material selection range, before obtaining an initial material matching the process environment information in the material selection range, further comprising: establishing a material-process matching model; Performing material-process matching between the process environment information and the material selection range, performing material-process fitting using the material-process matching model, and obtaining an initial material that matches the process environment information within the material selection range; In predicting the process result of the target process according to the initial material, the process result of the target process is predicted using the material-process matching model.

7. The selection method according to claim 6, wherein: Establishing the material-process matching model includes: obtaining historical production information of the target process, the historical production information including attributes, costs, and corresponding yield indicators of historical materials of the target process; Model fitting is performed on the historical production information to establish the material-process matching model.

8. The selection method according to claim 1, wherein: In predicting the process result of the target process based on the initial material, the process result includes product performance and yield of the target process.

9. The selection method according to claim 1, wherein: Selecting the initial material as the target material for the target process based on the process result includes: determining whether the process result meets the standard; If the process result meets the requirements, confirming the initial material as the target material; If the process result does not meet the standard, return to the step of matching the process environment information with the material selection range for material process matching, obtain the initial material that matches the process environment information in the material selection range, and confirm the initial material as the target material after the process result meets the standard.

10. The selection method according to claim 9, wherein: In the step of returning to perform material-process matching between the process environment information and the material selection range, the number of material-process fitting times of the current material-process matching is greater than the number of fitting times of the previous material-process matching.

11. The selection method according to claim 1, wherein: After selecting the initial material as the target material for the target process based on the process result, the method further includes: allocating the target material to a manufacturing system of the target process.

12. A process material selection system, characterized in that: include: A process environment information acquisition module is used to obtain process environment information of the target process; A material selection range acquisition module is used to obtain the material selection range of the target process; A material-process matching module, configured to perform material-process matching between the process environment information and a material selection range, and to obtain an initial material matching the process environment information within the material selection range; A process result prediction module, configured to predict a process result of the target process based on the initial material; A target material determination module is used to select the initial material as the target material of the target process based on the process result.

13. A device, characterized in that The method comprises at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the process material selection method according to any one of claims 1 to 11.

14. A storage medium, characterized in that The storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the process material selection method according to any one of claims 1 to 11.

15. A computer program product comprising a computer program / instructions, characterized in that When the computer program / instruction is executed by a processor, the method for selecting process materials according to any one of claims 1 to 11 is implemented.

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