Reflection power protection method, device and system and computer readable storage medium

Abstract

The invention provides a reflection power protection method, device and system and a computer readable storage medium, and relates to the technical field of radio frequency. The reflection power protection method is used for protecting radio frequency power supply equipment. The reflection power protection method comprises the following steps: at least obtaining a reflection power value when the radio frequency power supply equipment works, and at least determining a power loss value of a radio frequency transistor according to the reflection power value. And acquiring the environment temperature of the radio frequency transistor, and determining the maximum power threshold value at least according to the environment temperature of the radio frequency transistor. At least according to the relation between the power loss value of the radio frequency transistor and the maximum power threshold value, whether shutdown protection operation is executed on the radio frequency power supply equipment or not is determined. According to the invention, the radio frequency power supply equipment can be effectively protected.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a reflected power protection method, device, system, and computer-readable storage medium. Background Art

[0002] With the advancement of RF power technology, RF power equipment is now widely used in various fields. During operation, RF power equipment may generate reflected power. When the reflected power is excessive, the equipment must be protected. Therefore, how to effectively protect RF power equipment from damage during operation has become a critical issue. Summary of the Invention

[0003] The present application provides a reflected power protection method, device, system and computer-readable storage medium, which can effectively protect radio frequency power supply equipment and avoid damage to the radio frequency power supply equipment.

[0004] In a first aspect, a reflected power protection method is provided for protecting radio frequency power supply equipment. The reflected power protection method includes: obtaining at least a reflected power value of the radio frequency power supply equipment during operation, and determining a power loss value of a radio frequency transistor based at least on the reflected power value; obtaining an ambient temperature of the radio frequency transistor, and determining a maximum power threshold based at least on the ambient temperature of the radio frequency transistor; and determining whether to shut down the radio frequency power supply equipment for protection based at least on a relationship between the power loss value of the radio frequency transistor and the maximum power threshold.

[0005] In one possible implementation, at least obtaining the reflected power value of the RF power supply device when it is working, and determining the power loss value of the RF transistor at least based on the reflected power value, includes: obtaining the reflected power value and forward power of the RF power supply device when it is working, and determining the power loss value of the RF transistor based on the reflected power value and the forward power at the corresponding moment.

[0006] In a possible implementation, the power loss value of the RF transistor is the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, wherein the weighted power value is the product of the forward power value at the corresponding moment and a preset weighting coefficient.

[0007] In a possible implementation, obtaining the ambient temperature of the RF transistor and determining the maximum power threshold at least based on the ambient temperature of the RF transistor includes: obtaining the ambient temperature of the RF transistor and determining the maximum power threshold based on the ambient temperature of the RF transistor, a preset temperature threshold, and a preset thermal resistance value.

[0008] In a possible implementation, the maximum power threshold of the RF transistor is the ratio of the temperature difference at the corresponding moment to the preset thermal resistance value, wherein the temperature difference at the corresponding moment is the difference between the preset temperature threshold and the ambient temperature of the RF transistor at the corresponding moment.

[0009] In one possible implementation, determining whether to perform a shutdown protection operation on the RF power supply device based at least on a relationship between a power loss value of the RF transistor and a maximum power threshold includes: when the power loss value of the RF transistor is greater than the maximum power threshold, determining whether to perform a shutdown protection operation on the RF power supply device based on a relationship between a duration during which the power loss value of the RF transistor is greater than the maximum power threshold and a preset duration. When the power loss value of the RF transistor is less than or equal to the maximum power threshold, not performing a shutdown protection operation on the RF power supply device.

[0010] In one possible implementation, when the power loss value of the RF transistor is greater than a maximum power threshold, determining whether to perform a shutdown protection operation on the RF power supply device based on a relationship between a duration during which the power loss value of the RF transistor is greater than the maximum power threshold and a preset duration includes: performing a shutdown protection operation on the RF power supply device when the power loss value of the RF transistor is greater than the maximum power threshold and a duration during which the power loss value of the RF transistor is greater than the maximum power threshold is greater than the preset duration; and not performing a shutdown protection operation on the RF power supply device when the power loss value of the RF transistor is greater than the maximum power threshold and a duration during which the power loss value of the RF transistor is greater than the maximum power threshold is less than or equal to the preset duration.

[0011] In a second aspect, a reflected power protection device is further provided, wherein the reflected power protection device uses the above-mentioned reflected power protection method to protect a radio frequency power supply device, wherein the radio frequency power supply device includes a radio frequency transistor. The reflected power protection device includes an acquisition unit and a control unit. The acquisition unit is used to acquire the reflected power value of the radio frequency power supply device when it is operating and the ambient temperature of the radio frequency transistor. The control unit is used to determine the power loss value of the radio frequency transistor based on at least the reflected power value, and to determine the maximum power threshold of the radio frequency transistor based on at least the ambient temperature of the radio frequency transistor, and to determine whether to perform a shutdown protection operation on the radio frequency power supply device based on at least the relationship between the power loss value of the radio frequency transistor and the maximum power threshold.

[0012] In a third aspect, a radio frequency power supply system is also provided, comprising a radio frequency power supply device and a reflected power protection device. The reflected power protection device comprises an acquisition unit and a control unit. The acquisition unit is configured to acquire a reflected power value of the radio frequency power supply device during operation and the ambient temperature of the radio frequency transistor. The control unit is configured to determine a power loss value of the radio frequency transistor based at least on the reflected power value, determine a maximum power threshold based at least on the ambient temperature of the radio frequency transistor, and determine whether to perform a shutdown protection operation on the radio frequency power supply device based at least on the relationship between the power loss value of the radio frequency transistor and the maximum power threshold.

[0013] In a fourth aspect, a computer-readable storage medium is further provided, wherein a computer program is stored in the computer-readable storage medium. When the computer program is run on a computer or a processor, the above-mentioned reflected power protection method is implemented.

[0014] The reflected power protection method, reflected power protection device, RF power supply system and computer-readable storage medium of the present application can determine the power loss value of the RF transistor by obtaining the reflected power value of the RF power supply device when it is working, and can further determine the maximum power threshold by obtaining the ambient temperature of the RF transistor. Then, based on the relationship between the power loss value of the RF transistor and the maximum power threshold, it can be determined whether to perform a shutdown protection operation on the RF power supply device, thereby effectively protecting the RF power supply device and avoiding damage to the RF power supply device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 This is a flow chart of a reflected power protection method in some embodiments of the present application.

[0017] Figure 2 This is another flow chart of the reflected power protection method in some embodiments of the present application.

[0018] Figure 3 for Figure 1 A sub-flowchart of step S300 in FIG.

[0019] Figure 4 for Figure 3 A sub-flowchart of step S310 in FIG.

[0020] Figure 5 FIG. 1 is a schematic diagram of a reflected power protection device in an embodiment of the present application.

[0021] Figure 6Schematic diagram of a radio frequency power supply system in one embodiment of the present application.

[0022] Explanation of reference numerals: 1000, RF power supply system, 10, reflected power protection device, 100, acquisition unit, 200, control unit, 20, RF power supply equipment, RFM, RF transistor, RL, load. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] In the following, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more.

[0026] In describing the embodiments of the present application, it should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0027] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0028] See also Figure 1 , Figure 1 Flowchart of the reflected power protection method in some embodiments of the present application. Figure 1 As shown, the present application provides a reflected power protection method, which is used to protect radio frequency power supply equipment, wherein the radio frequency power supply equipment includes radio frequency transistors. The reflected power protection method includes:

[0029] Step S100: obtaining at least a reflected power value of the radio frequency power supply device when it is in operation, and determining a power loss value of the radio frequency transistor at least according to the reflected power value.

[0030] Step S200: Acquire the ambient temperature of the radio frequency transistor, and determine a maximum power threshold at least according to the ambient temperature of the radio frequency transistor.

[0031] Step S300: determining whether to perform a shutdown protection operation on the radio frequency power supply device based at least on a relationship between a power loss value of the radio frequency transistor and a maximum power threshold.

[0032] Therefore, the above-mentioned reflected power protection method in the present application can determine the power loss value of the RF transistor by obtaining the reflected power value when the RF power supply device is working, and can further determine the maximum power threshold by obtaining the ambient temperature of the RF transistor. Then, based on the relationship between the power loss value of the RF transistor and the maximum power threshold, it can be determined whether to perform a shutdown protection operation on the RF power supply device, thereby effectively protecting the RF power supply device and avoiding damage to the RF power supply device.

[0033] Specifically, determining whether to shut down the RF power supply equipment for protection, that is, determining whether the reflected power is too high, is directly related to the maximum power threshold of the RF transistor at the corresponding moment. This can provide more reliable and reasonable protection for the RF power supply equipment, rather than making judgments based on the reflected power threshold obtained from a small number of extreme tests, thus avoiding false protection or even damage to the RF power supply equipment.

[0034] The "corresponding time" in the power loss value at the corresponding time may be the same as the time when the ambient temperature of the RF transistor is obtained or the time interval is less than a preset time interval. The preset time interval may be a shorter time interval such as 0.5 seconds or 0.3 seconds.

[0035] In some embodiments, the reflected power value of the RF power supply device when it is working can be obtained in real time, and the power loss value of the RF transistor can be determined in real time based on the reflected power value, and then the ambient temperature of the RF transistor can be obtained in real time, and the maximum power threshold can be determined in real time based on the ambient temperature of the RF transistor.

[0036] In other embodiments, the reflected power value of the RF power supply device during operation can be obtained at preset time intervals, and the power loss value of the RF transistor can be determined based on the reflected power value at preset time intervals. The ambient temperature of the RF transistor can then be obtained at preset time intervals, and the maximum power threshold can be determined based on the ambient temperature of the RF transistor at preset time intervals. The preset time intervals can be 0.1 seconds, 0.2 seconds, etc. Therefore, the preset time intervals are relatively short, which can ensure the real-time nature of the data.

[0037] In some other embodiments, the above steps S100 to S200 can be completed within a preset time length. For example, the preset time length can be 0.2 seconds, 0.5 seconds, etc., which can also ensure the real-time nature of the data.

[0038] In some embodiments, performing a shutdown protection operation on the RF power supply device may be controlling to cut off the power supply path to the RF power supply device, or controlling the RF power supply device to shut down.

[0039] In some embodiments, the RF power supply device may include an RF power amplifier having an RF transistor. The RF power amplifier can be used to input an initial RF signal and a power supply voltage, and amplify the power of the initial RF signal according to the power supply voltage to obtain RF electrical energy, wherein the initial RF signal is used to control the conduction and disconnection of the RF transistor.

[0040] Please also refer to Figure 2 , Figure 2 FIG. 1 is another flow chart of the reflected power protection method in some embodiments of the present application. Figure 2 As shown, the reflected power protection method also includes:

[0041] Step S110: obtaining the reflected power value and the forward power value of the radio frequency power supply device when it is working, and determining the power loss value of the radio frequency transistor according to the reflected power value and the forward power at the corresponding moment.

[0042] Step S210: Acquire the ambient temperature of the radio frequency transistor, and determine the maximum power threshold according to the ambient temperature of the radio frequency transistor, a preset temperature threshold, and a preset thermal resistance value.

[0043] Step S300: determining whether to perform a shutdown protection operation on the radio frequency power supply device based at least on a relationship between a power loss value of the radio frequency transistor and a maximum power threshold.

[0044] Among them, such as Figure 2 The step S110 shown may be as follows Figure 1 The sub-flowchart of step S100 shown in FIG. Figure 1 、 Figure 2As shown, step S100: obtaining at least a reflected power value of the RF power supply device when it is working, and determining at least a power loss value of the RF transistor based on the reflected power value, may specifically include:

[0045] Step S110: obtaining the reflected power value and the forward power value of the radio frequency power supply device when it is working, and determining the power loss value of the radio frequency transistor according to the reflected power value and the forward power at the corresponding moment.

[0046] Therefore, the above-mentioned reflected power protection method in the present application obtains the reflected power value and forward power when the RF power supply equipment is working, and determines the power loss value of the RF transistor based on the reflected power value and the forward power at the corresponding moment. It can obtain a more accurate power loss value of the RF transistor and provide more effective protection for the RF power supply equipment.

[0047] In some embodiments, the power loss value of the RF transistor is the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, wherein the weighted power value is the product of the forward power value at the corresponding moment and a preset weighting coefficient.

[0048] Therefore, the above-mentioned reflected power protection method in the present application converts the forward power value at the corresponding moment into a weighted power value by setting a weighting coefficient, and then configures the power loss value of the RF transistor to be the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, thereby avoiding false protection.

[0049] In some embodiments, the power loss value of the radio frequency transistor may be 70%, 80%, 90%, etc., of the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment.

[0050] Therefore, the above-mentioned reflected power protection method in the present application can further avoid false protection by configuring the power loss value of the RF transistor to be less than the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment. Specifically, in addition to the loss of the RF transistor, the RF power output by the RF power supply device may also be lost by electronic components such as inductors, capacitors, and transformers. The same is true for the reflected power. Not all of it is lost in the RF transistor, that is, the power loss value of the RF transistor, which is the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, is greater than the actual power loss of the RF transistor. Therefore, configuring the power loss value of the RF transistor to be less than the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, for example, configuring the power loss value of the RF transistor to be 80% of the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, can provide more effective and accurate protection for the RF power supply device.

[0051] Among them, such as Figure 2 Step S210 shown may be as follows Figure 1The sub-flowchart of step S200 shown in FIG. Figure 1 、 Figure 2 As shown, step S200: obtaining the ambient temperature of the RF transistor and determining the maximum power threshold at least according to the ambient temperature of the RF transistor may specifically include:

[0052] Step S210: Acquire the ambient temperature of the radio frequency transistor, and determine the maximum power threshold according to the ambient temperature of the radio frequency transistor, a preset temperature threshold, and a preset thermal resistance value.

[0053] Therefore, the above-mentioned reflected power protection method in the present application can determine the maximum power threshold of the RF transistor by calculation based on the ambient temperature, the preset temperature threshold and the preset thermal resistance value of the RF transistor.

[0054] In some embodiments, the ambient temperature of the RF transistor is the case temperature of the RF transistor, that is, the heat sink temperature of the RF transistor of the RF power supply device is obtained as the ambient temperature of the RF transistor.

[0055] In some embodiments, the maximum power threshold is a ratio of a temperature difference at a corresponding moment to a preset thermal resistance value, wherein the temperature difference at a corresponding moment is a difference between the preset temperature threshold and an ambient temperature of the RF transistor at the corresponding moment.

[0056] Therefore, the above-mentioned reflected power protection method in the present application is based on the power loss value of the RF transistor being the ratio of the temperature difference at the corresponding moment to the preset thermal resistance value, wherein the temperature difference at the corresponding moment is the difference between the preset temperature threshold and the ambient temperature of the RF transistor at the corresponding moment, and can quickly calculate the maximum power threshold of the RF transistor.

[0057] In some embodiments, the preset thermal resistance value may be 0.1° C. / W, 0.2° C. / W, etc.

[0058] In some embodiments, the preset temperature threshold may be 70%, 80%, 90%, etc. of the maximum ambient temperature of the RF transistor. For example, if the maximum ambient temperature of the RF transistor is 175°C, the preset temperature threshold may be 140°C.

[0059] Among them, such as Figure 2 The step S300 shown can refer to the aforementioned related content and will not be described again here.

[0060] Please also refer to Figure 3 , Figure 3 for Figure 1 A sub-flowchart of step S300 in FIG. Figure 1 、 Figure 3As shown, step S300: determining whether to perform a shutdown protection operation on the RF power supply device based on at least the relationship between the power loss value of the RF transistor and the maximum power threshold, which may specifically include:

[0061] Step S310: When the power loss value of the RF transistor is greater than the maximum power threshold, determine whether to perform a shutdown protection operation on the RF power supply device according to the relationship between the duration that the power loss value of the RF transistor is greater than the maximum power threshold and a preset duration.

[0062] Step S320: when the power loss value of the radio frequency transistor is less than or equal to the maximum power threshold, the radio frequency power supply device is not shut down for protection.

[0063] Therefore, the above-mentioned reflected power protection method in the present application can determine whether to perform shutdown protection on the RF power supply device based on the relationship between the power loss value of the RF transistor and the maximum power threshold, and further based on the relationship between the time when the power loss value of the RF transistor is greater than the maximum power threshold and the preset time. In particular, when the power loss value of the RF transistor is less than or equal to the maximum power threshold, it indicates that the reflected power will not damage the RF power supply device, and therefore the shutdown protection operation is not performed on the RF power supply device.

[0064] In some embodiments, the RF power supply device is not shut down for protection, that is, the RF power supply device is kept in a working state.

[0065] Please also refer to Figure 4 , Figure 4 for Figure 3 A sub-flowchart of step S310 in FIG. Figure 3 、 Figure 4 As shown, step S310: when the power loss value of the RF transistor is greater than the maximum power threshold, determining whether to perform a shutdown protection operation on the RF power supply device based on the relationship between the duration for which the power loss value of the RF transistor is greater than the maximum power threshold and a preset duration, may specifically include:

[0066] Step S311: when the power loss value of the RF transistor is greater than the maximum power threshold, and the duration for which the power loss value of the RF transistor is greater than the maximum power threshold is greater than a preset duration, performing a shutdown protection operation on the RF power supply device.

[0067] Step S312: when the power loss value of the RF transistor is greater than the maximum power threshold, and the duration for which the power loss value of the RF transistor is greater than the maximum power threshold is less than or equal to a preset duration, the RF power supply device is not shut down for protection.

[0068] Therefore, the above-mentioned reflected power protection method in the present application, based on the relationship between the power loss value of the RF transistor and the maximum power threshold, and the relationship between the time when the power loss value of the RF transistor is greater than the maximum power threshold and the preset time, can avoid erroneous protection when the reflected power is high but the power loss value of the RF transistor is far from the maximum power threshold, and can also avoid failure to protect when the reflected power is low but the power loss value of the RF transistor is close to the maximum power threshold, thereby providing effective protection for the RF power supply equipment.

[0069] In some embodiments, the preset duration may be 1ms, 2ms, 3ms, etc.

[0070] The reflected power protection method of the present application, through the above steps, can provide more reliable and reasonable protection for the RF power supply equipment, thereby effectively protecting the RF power supply equipment and avoiding misprotection or even damage to the RF power supply equipment.

[0071] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a reflected power protection device in an embodiment of the present application. Figure 5 As shown, the present application also provides a reflected power protection device 10, which uses the reflected power protection method in any of the aforementioned embodiments to protect the RF power supply device 20, and the RF power supply device 20 includes a RF transistor RFM. The reflected power protection device 10 includes an acquisition unit 100 and a control unit 200. The acquisition unit 100 is used to obtain the reflected power value of the RF power supply device 20 when it is working and the ambient temperature of the RF transistor RFM. The control unit 200 is used to determine the power loss value of the RF transistor RFM at least based on the reflected power value, and determine the power loss value of the RF transistor RFM at least based on the ambient temperature of the RF transistor RFM, and determine whether to perform a shutdown protection operation on the RF power supply device 20 at least based on the relationship between the power loss value of the RF transistor RFM and the maximum power threshold.

[0072] The operations performed by the reflected power protection device 10 or the control unit 200 correspond to the steps in the reflected power protection method in any of the aforementioned embodiments. For further operations that can be performed by the reflected power protection device 10 or the control unit 200, please refer to the relevant contents of the reflected power protection method in any of the aforementioned embodiments, and will not be repeated here.

[0073] like Figure 5 As shown, the acquisition unit 100 can be used to connect to the RF power supply device 20, and specifically can also be connected to the RF transistor RFM to obtain the reflected power value of the RF power supply device 20 when working and the ambient temperature of the RF transistor RFM.

[0074] like Figure 5 As shown, the control unit 200 can be connected to both the acquisition unit 100 and the RF power supply device 20 to determine the power loss value of the RF transistor RFM at least based on the reflected power value, and determine the power loss value of the RF transistor RFM at least based on the ambient temperature of the RF transistor RFM, and determine whether to perform a shutdown protection operation on the RF power supply device 20 at least based on the relationship between the power loss value of the RF transistor RFM and the maximum power threshold.

[0075] Among them, the acquisition unit 100 is mainly used to execute the steps of obtaining the reflected power value and the forward power value of the RF power supply device 20 when it is working in the above-mentioned reflected power protection method, and the step of obtaining the ambient temperature of the RF transistor RFM. The acquisition unit 100 may include a power sensor and a temperature sensor, etc.

[0076] Among them, the control unit 200 is mainly used to execute other specific steps of the above-mentioned reflected power protection method. The control unit 200 may include a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0077] The reflected power protection method and reflected power protection device 10 of the present application, through the above steps and structures, can provide more reliable and reasonable protection for the RF power supply equipment 20, thereby effectively protecting the RF power supply equipment 20 and avoiding misprotection or even damage to the RF power supply equipment 20.

[0078] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000 , which includes a radio frequency power supply device 20 and the reflected power protection device 10 in any of the aforementioned embodiments.

[0079] Please refer again Figure 5 .like Figure 5As shown, the reflected power protection device 10 includes an acquisition unit 100 and a control unit 200. The acquisition unit 100 is configured to acquire a reflected power value of the RF power supply device 20 and an ambient temperature of the RF transistor RFM during operation. The control unit 200 is configured to determine a power loss value of the RF transistor RFM based at least on the reflected power value, determine the power loss value of the RF transistor RFM based at least on the ambient temperature of the RF transistor RFM, and determine whether to perform a shutdown protection operation on the RF power supply device 20 based at least on a relationship between the power loss value of the RF transistor RFM and a maximum power threshold.

[0080] The more specific structure of the reflected power protection device 10 can be found in the relevant content of the reflected power protection device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0081] In some embodiments, the RF power supply system 1000 may further include an impedance matching device. The RF power supply device 20 may be connected to the load RL through the impedance matching device to output RF power to the load RL. The impedance matching device is used to perform impedance matching between the RF power supply device 20 and the load RL.

[0082] The reflected power protection method, reflected power protection device 10 and RF power supply system 1000 of the present application can provide more reliable and reasonable protection for the RF power supply equipment 20, thereby effectively protecting the RF power supply equipment 20, avoiding misprotection or even damage to the RF power supply equipment 20, and improving the stability of the RF power supply system 1000.

[0083] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the reflected power protection method of any of the aforementioned embodiments is implemented.

[0084] In the multiple embodiments provided in this application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely schematic; for example, the division of units is merely a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0085] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0086] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.

[0087] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform some steps of the method of each embodiment of the present invention. The aforementioned storage medium includes: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc., various media that can store program code.

[0088] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A reflected power protection method, characterized in that: Used to protect radio frequency power supply equipment, wherein the radio frequency power supply equipment includes a radio frequency transistor; The reflected power protection method includes: obtaining at least a reflected power value of the radio frequency power supply device when the device is operating, and determining at least a power loss value of the radio frequency transistor based on the reflected power value; obtaining an ambient temperature of the radio frequency transistor, and determining a maximum power threshold based at least on the ambient temperature of the radio frequency transistor; Whether to perform a shutdown protection operation on the radio frequency power supply device is determined at least according to a relationship between a power loss value of the radio frequency transistor and a maximum power threshold.

2. The reflected power protection method according to claim 1, characterized in that: The step of obtaining at least a reflected power value of the radio frequency power supply device when the radio frequency power supply device is in operation, and determining at least a power loss value of the radio frequency transistor based on the reflected power value, includes: The reflected power value and the forward power of the radio frequency power supply device when the radio frequency power supply device is working are obtained, and the power loss value of the radio frequency transistor is determined according to the reflected power value and the forward power at the corresponding moment.

3. The reflected power protection method according to claim 2, wherein: The power loss value of the radio frequency transistor is the sum of the reflected power value at the corresponding moment and the weighted power value at the corresponding moment, wherein the weighted power value is the product of the forward power value at the corresponding moment and a preset weighting coefficient.

4. The reflected power protection method according to claim 1, wherein: The obtaining of the ambient temperature of the radio frequency transistor and determining the maximum power threshold at least according to the ambient temperature of the radio frequency transistor includes: An ambient temperature of the radio frequency transistor is obtained, and a maximum power threshold is determined according to the ambient temperature, a preset temperature threshold, and a preset thermal resistance value of the radio frequency transistor.

5. The reflected power protection method according to claim 4, characterized in that: The maximum power threshold is a ratio of a temperature difference at a corresponding moment to the preset thermal resistance value, wherein the temperature difference at a corresponding moment is a difference between a preset temperature threshold and an ambient temperature of the RF transistor at the corresponding moment.

6. The reflected power protection method according to claim 1, characterized in that: The step of determining whether to perform a shutdown protection operation on the radio frequency power supply device based on at least a relationship between a power loss value of the radio frequency transistor and a maximum power threshold comprises: When the power loss value of the radio frequency transistor is greater than the maximum power threshold, determining whether to perform a shutdown protection operation on the radio frequency power supply device according to a relationship between a time period during which the power loss value of the radio frequency transistor is greater than the maximum power threshold and a preset time period; When the power loss value of the radio frequency transistor is less than or equal to the maximum power threshold, the radio frequency power supply device is not shut down for protection.

7. The reflected power protection method according to claim 6, characterized in that: The method of determining whether to perform a shutdown protection operation on the radio frequency power supply device when the power loss value of the radio frequency transistor is greater than the maximum power threshold according to a relationship between a duration during which the power loss value of the radio frequency transistor is greater than the maximum power threshold and a preset duration includes: When the power loss value of the radio frequency transistor is greater than the maximum power threshold, and the duration for which the power loss value of the radio frequency transistor is greater than the maximum power threshold is greater than a preset duration, performing a shutdown protection operation on the radio frequency power supply device; When the power loss value of the RF transistor is greater than the maximum power threshold, and the duration for which the power loss value of the RF transistor is greater than the maximum power threshold is less than or equal to a preset duration, the RF power supply device is not shut down for protection.

8. A reflected power protection device, characterized in that: The reflected power protection device uses the reflected power protection method according to any one of claims 1 to 7 to protect the radio frequency power supply device, wherein the radio frequency power supply device includes a radio frequency transistor; Wherein, the reflected power protection device includes: an acquiring unit, configured to acquire a reflected power value of the radio frequency power supply device when the radio frequency power supply device is operating and an ambient temperature of the radio frequency transistor; A control unit is configured to determine a power loss value of the RF transistor based at least on the reflected power value, determine a maximum power threshold based at least on the ambient temperature of the RF transistor, and determine whether to perform a shutdown protection operation on the RF power supply device based at least on a relationship between the power loss value of the RF transistor and the maximum power threshold.

9. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply device and the reflected power protection device as claimed in claim 8.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is run on a computer or a processor, the reflected power protection method according to any one of claims 1 to 7 is implemented.

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