High-precision heavy-load three-dimensional piezoelectric deflection table

Abstract

The invention relates to the technical field of precision positioning tables, and discloses a high-precision heavy-load three-dimensional piezoelectric deflection table which comprises an X-axis and Y-axis piezoelectric driving mechanism and a Z-axis piezoelectric rotating mechanism. The X-axis and Y-axis piezoelectric driving mechanism sequentially comprises a first connecting part, a second connecting part and a third connecting part from inside to outside. And an X-axis piezoelectric actuator and a first flexible hinge are arranged between the first connecting part and the second connecting part. And a Y-axis piezoelectric actuator and a second flexible hinge are arranged between the second connecting part and the third connecting part. The Z-axis piezoelectric rotating mechanism comprises a fixed part and a rotating part. And a first piezoelectric ceramic and a third flexible hinge are arranged between the fixed part and the rotating part. According to the high-precision heavy-load three-dimensional piezoelectric deflection table, ultra-precise movement of X-axis and Y-axis straight lines and theta Z-axis rotation is achieved. And the Z-axis piezoelectric rotating mechanism adopts a first piezoelectric ceramic direct drive and a friction-free third flexible hinge, so that the robot has the characteristics of large rotating angle, large load, high response speed and high positioning accuracy.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning stages, and in particular relates to a high-precision, large-load, three-dimensional piezoelectric deflection stage. Background Art

[0002] Tilt and tilt stages are widely used in space laser communications, adaptive optics, composite-axis precision tracking, astronomical telescopes, laser imaging radar, laser beam stabilization systems, confocal microscopes, laser scanning, and other fields. They are devices that adjust the angle of a mirror in real time under the control of an input electrical signal. Piezoelectric ceramics are compact, generate high thrust, and can achieve nanometer-level resolution. As a driving force, piezoelectric ceramics are ideal for achieving high-precision micro-displacement. However, existing multi-dimensional piezoelectric tilt and tilt stages suffer from low load capacity, small rotation angles, high kinematic coupling, and low repeatability.

[0003] Based on the above, the current problem to be solved is to provide a high-precision, large-load, three-dimensional piezoelectric tilt table that can realize linear motion in the X and Y axes and rotational motion in the θZ axis, with large load, large rotation angle, small motion coupling, and high repeatability. Summary of the Invention

[0004] The purpose of the present invention is to provide a high-precision, large-load three-dimensional piezoelectric tilt table, aiming to solve the problems in the prior art of multi-dimensional piezoelectric tilt tables, such as small load capacity, small rotation angle, low repeatability, and large motion coupling.

[0005] The present invention is achieved as follows: a high-precision, large-load, three-dimensional piezoelectric tilting stage comprises, from bottom to top, an X-axis, Y-axis piezoelectric drive mechanism and a Z-axis piezoelectric rotation mechanism;

[0006] The X-axis and Y-axis piezoelectric drive mechanism includes, from the inside out, a first connecting portion, a second connecting portion, and a third connecting portion. Two X-axis piezoelectric drivers and a first flexible hinge are provided between the first connecting portion and the second connecting portion; two Y-axis piezoelectric drivers and a second flexible hinge are provided between the second connecting portion and the third connecting portion.

[0007] The Z-axis piezoelectric rotating mechanism includes a fixed part and a rotating part from the inside out, a first piezoelectric ceramic and a third flexible hinge are provided between the fixed part and the rotating part; the fixed part is connected to the first connecting part.

[0008] Furthermore, the X-axis piezoelectric driver includes a first quadrilateral magnifying body and a second piezoelectric ceramic arranged in the first quadrilateral magnifying body, the movable end of the first quadrilateral magnifying body is connected to the first connecting part, and the fixed end of the first quadrilateral magnifying body is connected to the second connecting part.

[0009] Furthermore, the Y-axis piezoelectric driver includes a second quadrilateral magnifying body and a third piezoelectric ceramic arranged in the second quadrilateral magnifying body, the movable end of the second quadrilateral magnifying body is connected to the second connecting part, and the fixed end of the second quadrilateral magnifying body is connected to the third connecting part.

[0010] Furthermore, the first flexible hinge is configured as a straight beam type flexible hinge, and a plurality of the first flexible hinges are parallel to the Y axis and symmetrically arranged on both sides of the first connecting portion.

[0011] Furthermore, the second flexible hinge is configured as a straight beam type flexible hinge, and a plurality of the second flexible hinges are parallel to the X axis and symmetrically arranged on both sides of the second connecting portion.

[0012] Furthermore, a plurality of moving surfaces are symmetrically provided on the top surface of the rotating portion, and the moving surfaces are used to be connected to the load mechanism.

[0013] Furthermore, the third flexible hinge is configured as a straight beam type flexible hinge, and a plurality of the third flexible hinges are arranged along the diameter direction of a circle having the center of the fixing portion as the center.

[0014] Furthermore, at least two of the first piezoelectric ceramics are provided, and the two first piezoelectric ceramics generate two forces with opposite directions, equal magnitudes, parallel and not in the same straight line when voltage is applied, so as to drive the rotating part to rotate.

[0015] Furthermore, the movable end of the first piezoelectric ceramic is connected to the rotating part, and the fixed end of the first piezoelectric ceramic is connected to the fixed part.

[0016] Furthermore, the X-axis and Y-axis piezoelectric driving mechanism and the Z-axis piezoelectric rotation mechanism are provided with strain sensors.

[0017] The high-precision, high-load, three-dimensional piezoelectric tilt stage provided by the present invention has the following beneficial effects:

[0018] The high-precision, high-load, three-dimensional piezoelectric tilt and tilt stage of this invention achieves ultra-precise motion along the X and Y axes, as well as rotational motion along the θZ axis. The Z-axis piezoelectric rotation mechanism utilizes a first piezoelectric ceramic direct drive and a frictionless third flexible hinge, resulting in a wide rotation angle, high load, fast response, and highly accurate positioning.

[0019] The X- and Y-axis piezoelectric drive mechanism utilizes a magnifying structure consisting of a first quadrilateral amplifying body and a second quadrilateral amplifying body, resulting in large X- and Y-axis travel and stable operation. The X- and Y-axis piezoelectric drive mechanism utilizes first, second, and third connecting parts connected in series from the inside out, along with first and second frictionless flexible hinges. The resulting structure is rational and compact, offering high load capacity, minimal kinematic coupling, and high positioning accuracy.

[0020] The present invention is provided with a strain sensor to eliminate the influence of load installation on sensing, achieve more precise control, perform real-time detection and feedback of position, and further realize nanometer-level precision positioning control, which is very suitable for high-precision positioning applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the three-dimensional structure of the high-precision, large-load three-dimensional piezoelectric tilt stage provided by the present invention;

[0022] Figure 2 Exploded view of the high-precision, high-load, three-dimensional piezoelectric tilt stage provided by the present invention;

[0023] Figure 3 A top view of the combination of the Z-axis piezoelectric rotation mechanism, the X-axis and Y-axis piezoelectric drive mechanism, and the stage provided by the present invention;

[0024] Figure 4 A top view of the combination of the X-axis and Y-axis piezoelectric drive mechanism and the stage provided by the present invention;

[0025] In the figure: 1-X-axis and Y-axis piezoelectric drive mechanism; 11-first connecting part; 12-second connecting part; 13-third connecting part; 14-X-axis piezoelectric driver; 141-first quadrilateral magnifying body; 142-second piezoelectric ceramic; 15-first flexible hinge; 16-Y-axis piezoelectric driver; 161-second quadrilateral magnifying body; 162-third piezoelectric ceramic; 17-second flexible hinge; 2-Z-axis piezoelectric rotation mechanism; 21-fixed part; 22-rotating part; 221-moving surface; 23-first piezoelectric ceramic; 24-third flexible hinge; 3-upper cover; 31-first through hole; 4-table; 5-bottom cover; 6-second through hole; 7-strain sensor. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0027] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0028] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "up", "down", "left", "right", etc. indicate directions or positional relationships, they are based on the directions or positional relationships shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0029] Reference Figure 1-4 The figure shows a preferred embodiment of the present invention.

[0030] The high-precision, high-load three-dimensional piezoelectric tilt table includes a bottom cover 5, a table body 4 and an upper cover 3. Figure 1 The bottom cover 5 and the top cover 3 are provided with a second through hole 6 for light to pass through, making the present invention easy to integrate into optical systems such as microscopes and scanners. The bottom cover 5, the platform 4 and the top cover 3 form a cavity. The cavity includes the X-axis and Y-axis piezoelectric drive mechanism 1 and the Z-axis piezoelectric rotation mechanism 2 from bottom to top. Figure 2 . The X-axis and Y-axis piezoelectric drive mechanism 1 and the Z-axis piezoelectric rotation mechanism 2 are connected in series. A moving surface 221 is provided on the Z-axis piezoelectric rotation mechanism 2. A first through hole 31 is provided on the upper cover 3 corresponding to the moving surface 221. The moving surface 221 passes through the first through hole 31. A gap is left between the moving surface 221 and the first through hole 31, so that the moving surface 221 can move linearly along the X-axis and Y-axis or rotate around the Z-axis in the first through hole 31. The X-axis, Y-axis, and Z-axis are spatial rectangular coordinate axes. The four edges of the X-axis and Y-axis piezoelectric drive mechanism 1 are connected to the table 4, that is, the X-axis and Y-axis piezoelectric drive mechanism 1 and the table 4 are integrally formed.

[0031] The X-axis and Y-axis piezoelectric drive mechanism 1 includes a first connecting portion 11, a second connecting portion 12, and a third connecting portion 13 from the inside out. Figure 4. The first connecting part 11 is connected to the Z-axis piezoelectric rotation mechanism 2. The third connecting part 13 is connected to the table 4. Two X-axis piezoelectric drivers 14 and a first flexible hinge 15 are provided between the first connecting part 11 and the second connecting part 12. Two Y-axis piezoelectric drivers 16 and a second flexible hinge 17 are provided between the second connecting part 12 and the third connecting part 13. The two X-axis piezoelectric drivers 14 are arranged relative to each other along the X-axis, and the two Y-axis piezoelectric drivers 16 are arranged relative to each other along the Y-axis. Preferably, the first flexible hinge 15 is configured as a straight beam type flexible hinge, which can be configured as a single straight beam type flexible hinge or a double straight beam type flexible hinge. Several first flexible hinges 15 are arranged parallel to the Y-axis and are symmetrically arranged on both sides of the first connecting part 11. The second flexible hinge 17 is configured as a straight beam type flexible hinge, which can be configured as a single straight beam type flexible hinge or a double straight beam type flexible hinge. Several second flexible hinges 17 are arranged parallel to the X-axis and are symmetrically arranged on both sides of the second connecting part 12. The second connecting part 12 is configured as a hollow ring. The X-axis and Y-axis piezoelectric drive mechanism 1 is set as a planar series structure, which has a reasonable and compact overall structure, large bearing capacity, small motion coupling, and high positioning accuracy.

[0032] Preferred embodiment: The X-axis piezoelectric actuator 14 includes a first quadrilateral magnifying body 141 and a second piezoelectric ceramic 142 disposed within the first quadrilateral magnifying body 141. The movable end of the first quadrilateral magnifying body 141 is connected to the first connecting portion 11. The fixed end of the first quadrilateral magnifying body 141 is connected to the second connecting portion 12. The long axis of the second piezoelectric ceramic 142 is arranged parallel to the Y-axis. When a voltage is applied to the second piezoelectric ceramic 142, the second piezoelectric ceramic 142 extends, and the first quadrilateral magnifying body 141 pushes the first connecting portion 11 for linear motion along the positive or negative direction of the X-axis, simultaneously deforming the first flexible hinge 15. When the voltage is removed, the second piezoelectric ceramic 142 restores its length, and the first quadrilateral magnifying body 141 pushes the first connecting portion 11 for linear motion along the negative or positive direction of the X-axis, simultaneously deforming the first flexible hinge 15. The first connecting portion 11 is connected in series with the Z-axis piezoelectric rotation mechanism 2, thereby driving the moving surface 221 for linear motion along the X-axis.

[0033] The Y-axis piezoelectric driver 16 includes a second quadrilateral magnifying body 161 and a third piezoelectric ceramic 162 arranged in the second quadrilateral magnifying body 161. The movable end of the second quadrilateral magnifying body 161 is connected to the second connecting part 12. The fixed end of the second quadrilateral magnifying body 161 is connected to the third connecting part 13. The long axis of the third piezoelectric ceramic 162 is arranged parallel to the X-axis. When voltage is applied to the third piezoelectric ceramic 162, the third piezoelectric ceramic 162 extends, and the second quadrilateral magnifying body 161 pushes the second connecting part 12, the first flexible hinge 15, the X-axis piezoelectric driver 14, and the first connecting part 11 as a whole to move linearly along the positive or negative direction of the Y-axis, and at the same time the second flexible hinge 17 is deformed. When the voltage is removed, the third piezoelectric ceramic 162 recovers its length, and the second quadrilateral amplifying element 161 propels the second connecting portion 12, the first flexible hinge 15, the X-axis piezoelectric actuator 14, and the first connecting portion 11 for linear motion along the positive or negative Y-axis. Simultaneously, the second flexible hinge 17 deforms. The first connecting portion 11 is connected in series with the Z-axis piezoelectric rotation mechanism 2, thereby driving the moving surface 221 for linear motion along the Y-axis. The X-axis piezoelectric actuator 14 and the Y-axis piezoelectric actuator 16 utilize an amplifying mechanism and frictionless flexible hinges, resulting in a large travel range and fast response speed.

[0034] The Z-axis piezoelectric rotating mechanism 2 includes a fixed portion 21 and a rotating portion 22 from the inside to the outside. Figure 3 . The fixed part 21 is connected to the first connecting part 11. The fixed part 21 and the first connecting part 11 are preferably arranged in a circular ring shape. The top surface of the rotating part 22 is symmetrically provided with a plurality of raised moving surfaces 221. The moving surface 221 is used to connect with the load mechanism. The moving surface 221 is preferably arranged as 4 strip-shaped protrusions and symmetrically distributed. A first piezoelectric ceramic 23 and a third flexible hinge 24 are arranged between the fixed part 21 and the rotating part 22. The moving end of the first piezoelectric ceramic 23 is connected to the rotating part 22. The fixed end of the first piezoelectric ceramic 23 is connected to the fixed part 21. At least two first piezoelectric ceramics 23 are arranged. Under the condition of applying voltage, the two first piezoelectric ceramics 23 generate two forces with opposite directions, equal magnitudes, parallel and not in the same straight line, which can push the rotating part 22 to rotate. Preferably, four first piezoelectric ceramics 23 are arranged. The third flexible hinge 24 is preferably a straight beam type flexible hinge, and a plurality of third flexible hinges 24 are arranged along the diameter direction of a circle with the center of the fixed part 21 as the center. When voltage is applied, the first piezoelectric ceramic 23 extends, the third flexible hinge 24 deforms, and the rotating portion 22 rotates, driving the moving surface 221 to rotate. The Z-axis piezoelectric rotating mechanism 2 features a simple, rational, and compact planar series structure from the inside out, minimizing kinematic coupling and enabling more precise positioning. The Z-axis piezoelectric rotating mechanism 2 utilizes direct drive from the first piezoelectric ceramic 23 and a frictionless third flexible hinge 24, resulting in a larger rotation angle, higher resolution, greater load capacity, and faster response.

[0035] The X-axis and Y-axis piezoelectric drive mechanisms 1 and the Z-axis piezoelectric rotation mechanism 2 are equipped with strain sensors 7. Specifically, the sidewalls of the first, second, and third flexible hinges 15, 17, and 24 are bonded with strain sensors 7. The presence of these sensors eliminates the effects of load installation on sensing, enabling more precise control and real-time position detection and feedback, further enabling nanometer-level precision positioning control, making them ideally suited for high-precision positioning applications.

[0036] It is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A high-precision, high-load, three-dimensional piezoelectric tilting stage, characterized in that: From bottom to top, it includes an X-axis and Y-axis piezoelectric drive mechanism (1) and a Z-axis piezoelectric rotation mechanism (2); The X-axis and Y-axis piezoelectric drive mechanism (1) includes, from the inside out, a first connecting portion (11), a second connecting portion (12), and a third connecting portion (13); two X-axis piezoelectric drivers (14) and a first flexible hinge (15) are provided between the first connecting portion (11) and the second connecting portion (12); two Y-axis piezoelectric drivers (16) and a second flexible hinge (17) are provided between the second connecting portion (12) and the third connecting portion (13); The Z-axis piezoelectric rotating mechanism (2) includes a fixed portion (21) and a rotating portion (22) from the inside out, wherein a first piezoelectric ceramic (23) and a third flexible hinge (24) are provided between the fixed portion (21) and the rotating portion (22); the fixed portion (21) is connected to the first connecting portion (11).

2. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: The X-axis piezoelectric driver (14) includes a first quadrilateral magnifying body (141) and a second piezoelectric ceramic (142) arranged in the first quadrilateral magnifying body (141), the movable end of the first quadrilateral magnifying body (141) is connected to the first connecting portion (11), and the fixed end of the first quadrilateral magnifying body (141) is connected to the second connecting portion (12).

3. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 2, characterized in that: The Y-axis piezoelectric driver (16) includes a second quadrilateral magnifying body (161) and a third piezoelectric ceramic (162) arranged in the second quadrilateral magnifying body (161), the movable end of the second quadrilateral magnifying body (161) is connected to the second connecting portion (12), and the fixed end of the second quadrilateral magnifying body (161) is connected to the third connecting portion (13).

4. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: The first flexible hinge (15) is configured as a straight beam type flexible hinge, and a plurality of the first flexible hinges (15) are parallel to the Y axis and symmetrically arranged on both sides of the first connecting portion (11).

5. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: The second flexible hinge (17) is configured as a straight beam type flexible hinge, and a plurality of the second flexible hinges (17) are parallel to the X axis and symmetrically arranged on both sides of the second connecting portion (12).

6. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: A plurality of moving surfaces (221) are symmetrically provided on the top surface of the rotating portion (22), and the moving surfaces (221) are used to be connected to a load mechanism.

7. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: The third flexible hinge (24) is configured as a straight beam type flexible hinge, and a plurality of the third flexible hinges (24) are arranged along the diameter direction of a circle with the center of the fixing portion (21) as the center.

8. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: At least two of the first piezoelectric ceramics (23) are provided, and the two first piezoelectric ceramics (23) generate two forces with opposite directions, equal magnitudes, parallel and not in the same straight line under the condition of voltage application, so as to push the rotating part (22) to rotate.

9. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 8, characterized in that: The movable end of the first piezoelectric ceramic (23) is connected to the rotating part (22), and the fixed end of the first piezoelectric ceramic (23) is connected to the fixed part (21).

10. The high-precision, high-load, three-dimensional piezoelectric tilt stage according to claim 1, characterized in that: The X-axis and Y-axis piezoelectric drive mechanism (1) and the Z-axis piezoelectric rotation mechanism (2) are provided with strain sensors (7).

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