Concentrated cleaning equipment and method for barrel cover and insertion pipe of high-purity chemical storage container

Abstract

The invention discloses concentrated cleaning equipment and method for a barrel cover and an insertion pipe of a high-purity chemical storage container. An independent cleaning cavity and an independent replacement cavity are formed in a cleaning area; the cleaning cavity is divided into a cleaning medium containing area, an insertion pipe containing area and a barrel cover containing area through partition plates. The cleaning medium accommodating area is communicated with the barrel cover placing area, so that a cleaning medium can flow between the cleaning medium accommodating area and the barrel cover placing area; the inserting pipe placing area is communicated with the barrel cover placing area, so that the cleaning medium can flow between the inserting pipe placing area and the barrel cover placing area; an ultrasonic generator, an insertion pipe and a barrel cover are installed in the cleaning medium containing area. By the adoption of the cleaning method, common cleaning can be adopted for common cleanliness requirements, and replacement cleaning can also be adopted for high cleanliness requirements; according to the two modes, a proper cleaning method is selected according to requirements, and the cleaning efficiency can be improved and the cleaning cost can be reduced on the premise that the cleaning requirement is met.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning barrels for electronic-grade chemicals, and in particular to a centralized cleaning device and method for barrel covers and cannulas of high-purity chemical storage containers. Background Art

[0002] Large quantities of high-purity chemicals are required in large-scale integrated circuit (IC) manufacturing, such as RCA cleaning and wet etching. Furthermore, with the continuous advancement of IC process technology, the requirements for particle control in the production and packaging of high-purity electronic-grade chemicals are becoming increasingly stringent.

[0003] Currently, most electronics-grade chemicals are transported and stored in 200L standard barrels. Before being packed into 200L barrels, these chemicals must be cleaned with high-purity deionized water and high-purity nitrogen. Furthermore, these 200L barrels are imported and relatively expensive, so they are often recycled and cleaned for reuse.

[0004] The composition of the microparticles in the recycling barrel is complex and the pollutant content is high. Currently, there is only cleaning equipment for the barrel body on the market, while the barrel cover and the insert tube as standard barrel accessories still rely on manual cleaning. Especially for the inner wall of the insert tube, manual cleaning efficiency is low, the control ability for low microparticles is weak, and the cleaning effect is poor, which makes it difficult to meet the increasingly high quality storage needs of high-purity electronic-grade chemicals. Summary of the Invention

[0005] The object of the present invention is to provide a centralized cleaning device and method for barrel covers and cannulas of high-purity chemical storage containers, so as to solve the defects and difficulties existing in manual cleaning of barrel covers and cannulas of high-purity chemical storage containers.

[0006] To solve the above technical problems, the present invention provides a centralized cleaning device for barrel covers and cannulas of high-purity chemical storage containers, comprising a body, which is divided into a cleaning area and a control area; An independent cleaning chamber and replacement chamber are provided in the cleaning area; wherein the cleaning chamber is divided into a cleaning medium accommodating area, a cannula placement area and a barrel cover placement area by a partition plate; The cleaning medium accommodating area is located above the barrel cover placement area, and the two are connected, so that the cleaning medium can flow between the cleaning medium accommodating area and the barrel cover placement area; The cannula placement area is located on one side of the barrel cover placement area, and the two are connected, so that the cleaning medium can flow between the cannula placement area and the barrel cover placement area; An ultrasonic generator is installed in the cleaning medium accommodating area, and uses the cavitation effect of ultrasonic waves in the cleaning medium to clean the cannula in the cannula placement area and the barrel cover in the barrel cover placement area; The replacement chamber is located on the other side of the barrel cover placement area, and the two are communicated with each other, so that the cleaning medium can flow between the barrel cover placement area and the replacement chamber.

[0007] Preferably, a diversion hole is provided on the partition plate between the cleaning medium accommodating area and the barrel cover placement area, and when the cleaning medium liquid level in the cleaning medium accommodating area is higher than the partition plate, it enters the barrel cover placement area through the diversion hole; and a plurality of partitions are arranged at intervals in the barrel cover placement area, and a plurality of barrel covers are placed in sequence.

[0008] Preferably, at least one overflow hole is provided on the partition plate between the cannula placement area and the bucket cover placement area, and when the cleaning medium level in the bucket cover placement area is higher than the overflow hole, the cleaning medium enters the cannula placement area; at least one overflow trough is provided on the partition plate between the bucket cover placement area and the displacement chamber, and when the cleaning medium level in the bucket cover placement area is higher than the overflow trough, the cleaning medium enters the displacement chamber; Furthermore, the liquid level of the overflow hole is lower than the liquid level of the overflow trough. When the liquid level of the cleaning medium gradually rises, it first enters the cannula placement area and then enters the replacement cavity.

[0009] Preferably, a plurality of insertion holes are provided on a partition plate between the cannula placement area and the cleaning medium accommodating area, and the long tube portion of the cannula to be cleaned passes through the insertion holes and is inserted into the cleaning medium accommodating area, while the tube end portion is mounted in the cannula placement area; A plurality of support pins are provided on the upper edge of the cannula hole for supporting the end of the cannula to be cleaned; A plurality of clamping pieces are provided on the lower edge of the cannula hole, and the plurality of clamping pieces are all inclined inwards to form a conical clamping area for clamping the long tube portion of the cannula to be cleaned.

[0010] Preferably, the ultrasonic generator includes an ultrasonic vibrating rod and a PFA-HP sleeve covering the outside of the ultrasonic vibrating rod; the ultrasonic generator is installed at the bottom of the cleaning medium accommodating area, the ultrasonic vibrating rod extends upward in the cleaning medium accommodating area, and the PFA-HP sleeve covers the portion of the ultrasonic vibrating rod located in the cleaning medium accommodating area; The PFA-HP bushing is a through-cylindrical structure, and both ends thereof are welded to the M-PTFE plates by hot air welding.

[0011] Preferably, a plurality of spiral cleaning components are further provided in the cleaning medium accommodating area, and each set of the spiral cleaning components is respectively inserted into the long tube portion of the cannula to be cleaned, and cleans the interior of the cannula to be cleaned; The spiral cleaning assembly includes a rotating rod and a spiral cleaning sheet extending along the rotating rod, and the spiral cleaning sheet rotates along with the rotating rod inside the long tube portion of the cannula to be cleaned while cleaning; A sealed bearing and a driving gear are sequentially provided at the lower end of the rotating rod. The rotating rod is connected to the cleaning chamber via the sealed bearing, and the driving gear is connected to the power motor via a gear set. Each set of the spiral cleaning components is independently controlled. The spiral cleaning sheet spirals from bottom to top. During cleaning, on the one hand, the rotation of the spiral cleaning sheet scrubs the inside of the long tube portion of the cannula to be cleaned; on the other hand, the spiral cleaning sheet pushes the cleaning medium in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula while flushing out pollutants.

[0012] Preferably, the replacement chamber is divided into a filtration area and a replacement area by a partition plate. The filtration area is located above the replacement area and is connected to the barrel cover placement area. The cleaning medium enters the replacement area after being filtered by the multi-layer filter components in the filtration area.

[0013] Preferably, a water inlet pipe is provided at the bottom of the cleaning medium accommodating area, and the water inlet pipe is also equipped with a water inlet control valve for transporting the cleaning medium into the cleaning medium accommodating area; A water outlet pipe is also provided at the bottom of the cleaning medium accommodating area, and the water outlet pipe is also equipped with a water outlet control valve for controlling the discharge of the cleaning medium in the cleaning medium accommodating area.

[0014] Preferably, an openable machine cover is provided above the cleaning area, and the machine cover is also connected to a first overflow pressure plate and a second overflow pressure plate through an adjusting screw; wherein, the first overflow pressure plate is located in the intubation placement area, for pressing and covering the intubation to be cleaned placed therein; the second overflow pressure plate is located in the barrel cover placement area, for pressing and covering the barrel cover to be cleaned placed therein.

[0015] The present invention also provides a method for cleaning a barrel cover and a cannula of a high-purity chemical storage container using a centralized cleaning device, comprising the following steps: Step A: Preparation of ultrasonic generator, Step A1: Install the customized PFA-HP bushing on the ultrasonic vibrator by tight lining. Before installation, heat the PFA-HP bushing to 260 degrees and then cover the ultrasonic vibrator. Step A2: After cooling and responding to the force, smooth the ends of the PFA-HP bushing; Step A3: Weld the M-PTFE plates to both ends of the PFA-HP bushing using hot air welding; Step B: Preparation before cleaning; Step B1: First, separate the cannula to be cleaned and the barrel cover and place them in the cannula placement area and barrel cover placement area respectively; when placing the barrel cover, place it in an upright manner and separate them one by one by partitions. When placing the cannula, the long tube part passes through the cannula hole and is inserted into the cleaning medium storage area. Ensure that the spiral cleaning assembly is inserted into the cannula until the tube end of the cannula contacts the support pin. Step B2: Then, close the cover and adjust the positions of the first overflow pressure plate and the second overflow pressure plate by adjusting the nut on the screw until they respectively cover the fixed insert and the barrel cover; Step C: For general cleanliness requirements, use ordinary cleaning; Step C1: First, open the water inlet control valve to deliver ultrapure water into the cleaning medium storage area through the water inlet pipe. As the water level rises, the ultrapure water enters the barrel cover placement area through the diversion hole and the cannula placement area through the overflow hole until it submerges the end of the cannula. At this point, the ultrapure water level is lower than the overflow tank. When the ultrapure water enters the cannula placement area through the overflow hole, it flushes the threads of the cannula end, further improving the cleaning effect. Step C2: turning on the ultrasonic generator and using the cavitation effect of ultrasonic waves in ultrapure water to clean the cannulas in the cannula placement area and the barrel covers in the barrel cover placement area; Step C3: Turn on the spiral cleaning assembly. The spiral cleaning piece rotates along with the rotating rod inside the long tube portion of the cannula to be cleaned while cleaning. At the same time, the spiral cleaning piece pushes the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula and flushing out contaminants. Step C4: After cleaning is completed, open the water outlet control valve and discharge the ultrapure water through the outlet pipe. Finally, open the machine cover and remove the cleaning intubation tube and barrel cover; Step D: For those with higher cleanliness requirements, displacement cleaning is used; Step D1: First, open the water inlet control valve to deliver ultrapure water to the cleaning medium storage area through the water inlet pipe. As the water level rises, the ultrapure water enters the barrel cover placement area through the diversion hole and the cannula placement area through the overflow hole until it submerges the end of the cannula. As the ultrapure water is continuously delivered, the liquid level gradually rises above the overflow tank. At this time, the ultrapure water passes through the overflow tank and is filtered by the multi-layer filter assembly in the filtration area before entering the replacement area. Step D2: Initially, the ultrapure water in the displacement zone is filtered and returned to the cleaning medium storage zone for further cleaning. After a period of time, the ultrapure water in the displacement zone is directly discharged, while the cleaning medium storage zone continues to supply clean ultrapure water. Step D3: Turn on the ultrasonic generator and use the cavitation effect of ultrasonic waves in ultrapure water to clean the cannula in the cannula placement area and the barrel cover in the barrel cover placement area; Step D4: Turn on the spiral cleaning assembly, and the spiral cleaning piece rotates along with the rotating rod inside the long tube portion of the cannula to be cleaned while cleaning; Step D41: The spiral cleaning sheet rotates forward under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, accelerating the water flow to flush the inner wall of the cannula and flush out contaminants; Step D42: The spiral cleaning disc rotates in reverse under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from top to bottom. This forms a vortex with the ultrapure water rising in the cleaning medium storage area, further cleaning the middle area of ​​the cannula, which is the most difficult to clean. Step D5: After cleaning is completed, open the water outlet control valve and discharge the ultrapure water through the outlet pipe. Finally, open the machine cover and remove the cleaning intubation tube and barrel cover.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The centralized cleaning equipment of the present invention can realize the centralized and fully automatic cleaning of the hard-to-clean cannulas and barrel covers in 200L barrels used for electronic-grade chemicals (such chemicals are stored in high-purity chemical containers). Compared with traditional manual cleaning, it has the following advantages: faster speed, cannulas and barrel covers can be cleaned in a short time, greatly shortening the cleaning time of multiple objects, thereby improving the overall cleaning efficiency; better consistency and stability, the cleaning machine can accurately control the cleaning parameters, as long as the equipment is set correctly, each cleaning can be guaranteed to be carried out under the same high quality standards, so that all cannulas and barrel covers can achieve consistent and stable cleaning effects, which is very important for electronic-grade chemicals. Cleaning chemical packaging containers is crucial, as even tiny impurities can affect the purity of the chemicals. Ultrasonic cleaning provides a more thorough cleaning effect, creating cavitation that allows the cleaning medium to penetrate into hard-to-reach areas such as tiny gaps and blind holes in cannulas and barrel lids, removing dirt. Furthermore, the risk of human exposure to hazardous substances is reduced. When cleaning packaging containers for electronic-grade chemicals, the automated cleaning process isolates personnel from potential hazardous chemical residues. Furthermore, the cleaning machine can perform cleaning operations in a closed environment, preventing direct contact with residual chemical reagents on cannulas and barrel lids, thereby reducing the risk of harm to operators' health due to exposure to hazardous substances. 2. The cleaning method of the present invention can be used for both conventional cleaning for general cleanliness requirements and displacement cleaning for higher cleanliness requirements. The two modes can select the appropriate cleaning method according to the needs, thereby improving cleaning efficiency and reducing cleaning costs while meeting the cleaning requirements. 3. In the present invention, since the cannula to be cleaned is inserted from top to bottom, and the ultrasonic generator is arranged from bottom to top, and the cleaning intensity formed by the ultrasonic generator using the cavitation effect is gradually weakened from bottom to top, the cleaning difficulty of the middle and upper parts of the cannula is relatively large; in addition, compared with the outer wall, the inner wall of the cannula is more difficult to clean due to the existence of the tube wall barrier, the cavitation effect is weak and the ultrapure water flow is small, and the middle and upper parts of the inner wall are the most difficult parts of the entire cannula to clean. By adding a spiral cleaning component, under the forward or reverse rotation of the spiral cleaning piece, the ultrapure water in the cannula will form a vortex, which can increase the flow rate and form a flushing effect, thereby further improving the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic structural diagram of the centralized cleaning equipment for the barrel cover and cannula of a high-purity chemical storage container provided by the present invention; Figure 2 This is an internal diagram of the centralized cleaning equipment for the lid and cannula of a high-purity chemical storage container provided by the present invention; Figure 3 yes Figure 2 Front view of Figure 4 It is a schematic diagram of the partition structure in the cleaning area provided by the present invention; Figure 5 yes Figure 4 Front view of Figure 6 yes Figure 4 A top view of Figure 7 This is a structural diagram of the position of the insertion hole provided by the present invention; Figure 8 It is a structural schematic diagram of the ultrasonic generator provided by the present invention; Figure 9 It is a structural schematic diagram of the spiral cleaning assembly provided by the present invention; Figure 10 It is a structural schematic diagram of the position of the cover provided by the present invention.

[0018] In the figure: 1. Cleaning area; 2. Control area; 3. Cleaning chamber; 301. Cleaning medium accommodating area; 302. Intubation placement area; 303. Bucket cover placement area; 4. Replacement chamber; 401. Filtration area; 402. Replacement area; 5. Ultrasonic generator; 501. Ultrasonic vibrator; 502. PFA-HP bushing; 503. M-PTFE plate; 6. Guide hole; 7. Partition; 8. Overflow hole; 9. Overflow trough; 10. Intubation hole; 11. Support pin; 12. Clamping piece; 13. Spiral cleaning assembly; 1301. Rotating rod; 1302. Spiral cleaning piece; 1303. Sealing bearing; 1304. Driving gear; 15. Water inlet pipe; 16. Water inlet control valve; 17. Water outlet pipe; 18. Water outlet control valve; 19. Machine cover; 20. First overflow pressure plate; 21. Second overflow pressure plate. DETAILED DESCRIPTION

[0019] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the drawings are greatly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention.

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0021] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0022] In addition, the features, operations, and characteristics described in this specification may be combined in any appropriate manner to form various embodiments. Similarly, the steps or actions described in the method may be reordered in a manner readily apparent to those skilled in the art. Therefore, the various sequences in the specification and drawings are provided for clarity of description of a particular embodiment and are not mandatory unless otherwise specified. Example

[0023] The present invention provides a centralized cleaning device for the lid and cannula of a high-purity chemical storage container. Figure 1-3 , including a body, which is divided into a cleaning area 1 and a control area 2; an independent cleaning chamber 3 and a replacement chamber 4 are provided in the cleaning area 1; wherein, the cleaning chamber 3 is divided into a cleaning medium accommodating area 301, a cannula placement area 302 and a barrel cover placement area 303 by a partition plate; the cleaning medium accommodating area 301 is located above the barrel cover placement area 303, and the two are connected, so that the cleaning medium can flow between the cleaning medium accommodating area 301 and the barrel cover placement area 303; the cannula placement area 302 is located above the barrel cover placement area The cannula placement area 302 and the barrel cover placement area 303 are on one side of the cannula placement area 302 and the barrel cover placement area 303, and the two are connected, so that the cleaning medium can flow between the cannula placement area 302 and the barrel cover placement area 303; an ultrasonic generator 5 is installed in the cleaning medium accommodating area 301, and the cavitation effect of ultrasonic waves in the cleaning medium is used to clean the cannula in the cannula placement area 302 and the barrel cover in the barrel cover placement area 303; the replacement chamber 4 is located on the other side of the barrel cover placement area 303, and the two are connected, so that the cleaning medium can flow between the barrel cover placement area 303 and the replacement chamber 4.

[0024] The centralized cleaning equipment of the present invention can realize the centralized and fully automatic cleaning of the difficult-to-clean cannulas and barrel covers in 200L barrels used for electronic-grade chemicals. Compared with traditional manual cleaning, it has the following advantages: faster speed, cannulas and barrel covers can be cleaned in a short time, greatly shortening the cleaning time of multiple objects, thereby improving the overall cleaning efficiency; better consistency and stability, the cleaning machine can accurately control the cleaning parameters, as long as the equipment is set correctly, each cleaning can be guaranteed to be carried out under the same high quality standards, so that all cannulas and barrel covers can achieve consistent and stable cleaning effects, which is crucial for the cleaning of electronic-grade chemical packaging containers. Ultrasonic cleaning is important because even tiny impurities may affect the purity of chemicals; for a more thorough cleaning effect, ultrasonic cleaning can produce cavitation, allowing the cleaning medium to penetrate into hard-to-reach areas such as tiny gaps and blind holes in the cannula and barrel cover, and remove dirt; reducing the risk of personnel contact with hazardous substances. When cleaning packaging containers of electronic-grade chemicals, the automated cleaning process can isolate personnel from possible harmful chemical residues. At the same time, the cleaning machine can perform cleaning operations in a closed environment, avoiding direct contact between personnel and possible residual chemical reagents on the cannula and barrel cover, reducing the risk of damage to the operator's health due to contact with harmful substances.

[0025] For details, please refer to Figure 5 and Figure 6 A guide hole 6 is provided on the partition plate between the cleaning medium accommodating area 301 and the barrel cover placement area 303. When the cleaning medium liquid level in the cleaning medium accommodating area 301 is higher than the partition plate, it enters the barrel cover placement area 303 through the guide hole 6; and a plurality of partitions 7 are arranged at intervals in the barrel cover placement area 303, and a plurality of barrel covers are placed in sequence.

[0026] Furthermore, at least one overflow hole 8 is provided on the partition plate between the cannula placement area 302 and the bucket cover placement area 303. When the cleaning medium level in the bucket cover placement area 303 is higher than the overflow hole 8, it enters the cannula placement area 302; at least one overflow groove 9 is provided on the partition plate between the bucket cover placement area 303 and the replacement chamber 4. When the cleaning medium level in the bucket cover placement area 303 is higher than the overflow groove 9, it enters the replacement chamber 4; and the liquid level of the overflow hole 8 is lower than the liquid level of the overflow groove 9. When the liquid level of the cleaning medium gradually rises, it first enters the cannula placement area 302 and then enters the replacement chamber 4.

[0027] For details, please refer to Figure 7A plurality of pipe insertion holes 10 are provided on the partition plate between the pipe placement area 302 and the cleaning medium accommodating area 301. The long pipe portion of the pipe to be cleaned is inserted into the cleaning medium accommodating area 301 through the pipe insertion holes 10, and the pipe end portion is mounted in the pipe placement area 302. A plurality of support pins 11 are provided on the upper edge of the pipe insertion hole 10 for supporting the pipe end portion of the pipe to be cleaned. A plurality of clamping pieces 12 are provided on the lower edge of the pipe insertion hole 10, and the clamping pieces 12 are all inclined inwardly to form a conical clamping area for clamping the long pipe portion of the pipe to be cleaned.

[0028] In this embodiment, the clamping sheet 12 is a corrosion-resistant elastic sheet. When the cannula to be cleaned is inserted into the cannula hole 10, the clamping sheet 12 can form a restraining force on the cannula to be cleaned and guide it to move vertically downward; it can also prevent the cannula to be cleaned from colliding with each other due to the flow of the cleaning medium.

[0029] Specifically, such as Figure 8 As shown, the ultrasonic generator 5 includes an ultrasonic vibrator 501 and a PFA-HP sleeve 502 covering the outside of the ultrasonic vibrator 501; the ultrasonic generator 5 is installed at the bottom of the cleaning medium accommodating area 301, the ultrasonic vibrator 501 extends upward in the cleaning medium accommodating area 301, and the PFA-HP sleeve 502 covers the part of the ultrasonic vibrator 501 located in the cleaning medium accommodating area 301.

[0030] The PFA-HP bushing 502 is a through-cylindrical structure, and both ends thereof are welded to the M-PTFE plate 503 by hot air welding.

[0031] Specifically, such as Figure 9 As shown, a plurality of spiral cleaning components 13 are further provided in the cleaning medium accommodating area 301 , and each group of the spiral cleaning components 13 is respectively inserted into the long tube portion of the cannula to be cleaned and cleans the interior of the cannula to be cleaned.

[0032] The spiral cleaning assembly 13 includes a rotating rod 1301 and a spiral cleaning sheet 1302 extending along the rotating rod 1301. The spiral cleaning sheet 1302 rotates with the rotating rod 1301 to clean the long tube portion of the cannula to be cleaned. A sealed bearing 1303 and a driving gear 1304 are provided at the lower end of the rotating rod 1301. The rotating rod 1301 is connected to the cleaning chamber 3 via the sealed bearing 1303, and the driving gear 1304 is connected to the power motor via a gear set. Each group of the spiral cleaning assemblies 13 is independently controlled. The spiral cleaning sheet 1302 spirals from bottom to top. During cleaning, on the one hand, the rotation of the spiral cleaning sheet 1302 scrubs the long tube portion of the cannula to be cleaned; on the other hand, the spiral cleaning sheet 1302 pushes the cleaning medium in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula and flushing out contaminants.

[0033] In this embodiment, the rotating rod 1301 and the spiral cleaning sheet 1302 are integrally formed of high-purity fluoroplastics, which can withstand the corrosion of chemicals in the cleaning medium.

[0034] For details, please refer to Figure 10 The replacement chamber 4 is divided into a filtration area 401 and a replacement area 402 by a partition plate. The filtration area 401 is located above the replacement area 402 and is connected to the barrel cover placement area 303. The cleaning medium enters the replacement area 402 after being filtered by the multi-layer filter assembly 14 in the filtration area 401.

[0035] Furthermore, a water inlet pipe 15 is provided at the bottom of the cleaning medium accommodating area 301, and the water inlet pipe 15 is also equipped with a water inlet control valve 16 for delivering cleaning medium into the cleaning medium accommodating area 301. A water outlet pipe 17 is also provided at the bottom of the cleaning medium accommodating area 301, and the water outlet pipe 17 is also equipped with a water outlet control valve 18 for controlling the discharge of cleaning medium from the cleaning medium accommodating area 301.

[0036] Furthermore, an openable machine cover 19 is provided above the cleaning area 1, and the machine cover 19 is also connected to a first overflow pressure plate 20 and a second overflow pressure plate 21 through an adjusting screw; wherein, the first overflow pressure plate 20 is located in the intubation placement area 302, for pressing the intubation to be cleaned placed therein; the second overflow pressure plate 21 is located in the barrel cover placement area 303, for pressing the barrel cover to be cleaned placed therein.

[0037] The present invention also provides a method for cleaning a barrel cover and a cannula of a high-purity chemical storage container using a centralized cleaning device, comprising the following steps: Step A: Preparation of ultrasonic generator, Step A1: Install the customized PFA-HP bushing 502 (a high-purity fluoroplastic made from a copolymer of tetrafluoroethylene (Teflon) and perfluoroalkyl vinyl ether, with excellent heat resistance, chemical corrosion resistance, and electrical insulation) on the ultrasonic vibrator 501 by means of a tight lining. Before installation, heat the PFA-HP bushing 502 to 260 degrees Celsius and then wrap it around the ultrasonic vibrator 501. Step A2: After cooling and responding to the force, the ends of the PFA-HP bushing 502 are smoothed; Step A3: Hot air welding is used to weld M-PTFE plates 503 (a suspension resin, made by suspension polymerization process, has a granular structure and needs to be formed by compression sintering. It has the characteristics of high temperature resistance, chemical corrosion resistance and electrical insulation) to both ends of the PFA-HP bushing 502. Step B: Preparation before cleaning; Step B1: First, separate the cannula to be cleaned and the barrel cover and place them in the cannula placement area 302 and the barrel cover placement area 303 respectively; when placing the barrel cover, place it in an upright manner and separate them one by one by the partition 7. When placing the cannula, the long tube part passes through the cannula hole 10 and is inserted into the cleaning medium storage area 301, and the spiral cleaning assembly 13 is ensured to be inserted into the cannula until the tube end of the cannula contacts the support pin 11. Step B2: Then, cover the machine cover 19 and adjust the positions of the first overflow pressure plate 20 and the second overflow pressure plate 21 by adjusting the nuts on the screws until they respectively cover the fixed insert and the barrel cover; Step C: For general cleanliness requirements, use ordinary cleaning; Step C1: First, open the water inlet control valve 16 to deliver ultrapure water into the cleaning medium storage area 301 through the water inlet pipe 15. As the water level rises, the ultrapure water enters the barrel cover placement area 303 through the diversion hole 6 and enters the cannula placement area 302 through the overflow hole 8, until it submerges the end of the cannula. At this point, the ultrapure water level is lower than the overflow groove 9. When the ultrapure water enters the cannula placement area 302 through the overflow hole 8, it flushes the threads of the cannula end, further improving the cleaning effect. Step C2: Turn on the ultrasonic generator 5 and use the cavitation effect of ultrasonic waves in ultrapure water to clean the cannulas in the cannulas placement area 302 and the barrel covers in the barrel cover placement area 303; Step C3: The spiral cleaning assembly 13 is turned on. The spiral cleaning sheet 1302 rotates along with the rotating rod 1301 inside the long tube portion of the cannula to be cleaned while cleaning. At the same time, the spiral cleaning sheet 1302 pushes the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula and flushing out contaminants. Step C4: After cleaning is completed, open the water outlet control valve 18 to discharge the ultrapure water through the outlet pipe 17, and finally open the machine cover 19 to remove the cleaned intubation tube and the barrel cover; Step D: For those with higher cleanliness requirements, displacement cleaning is used; Step D1: First, open the water inlet control valve 16 to deliver ultrapure water to the cleaning medium storage area 301 through the water inlet pipe 15. As the water level rises, the ultrapure water enters the barrel cover placement area 303 through the diversion hole 6 and enters the cannula placement area 302 through the overflow hole 8 until it submerges the end of the cannula. As the ultrapure water continues to be delivered, the liquid level gradually rises above the overflow trough 9. At this time, the ultrapure water passes through the overflow trough 9 and is filtered by the multi-layer filter assembly 14 in the filtration area 401 before entering the displacement area 402. Step D2: Initially, the ultrapure water in the displacement zone 402 is filtered and returned to the cleaning medium storage zone 301 for further cleaning. After a period of time, the ultrapure water in the displacement zone 402 is directly discharged, while the cleaning medium storage zone 301 continues to supply clean ultrapure water. Step D3: Turn on the ultrasonic generator 5 and use the cavitation effect of ultrasonic waves in ultrapure water to clean the cannulas in the cannulas placement area 302 and the barrel covers in the barrel cover placement area 303; Step D4: Turn on the spiral cleaning assembly 13, and the spiral cleaning piece 1302 rotates along with the rotating rod 1301 inside the long tube portion of the cannula to be cleaned while cleaning; Step D41: The spiral cleaning piece 1302 rotates forward under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, accelerating the water flow to flush the inner wall of the cannula and flush out contaminants; Step D42: The spiral cleaning sheet 1302 rotates in reverse under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from top to bottom. This forms a vortex with the ultrapure water rising in the cleaning medium storage area 301, further cleaning the middle area of ​​the cannula, which is the most difficult to clean. Since the cannula to be cleaned is inserted from top to bottom, and the ultrasonic generator 5 is arranged from bottom to top, and the cleaning intensity formed by the ultrasonic generator 5 using the cavitation effect is gradually weakened from bottom to top, the cleaning difficulty of the middle and upper parts of the cannula is relatively large; in addition, compared with the outer wall, the inner wall of the cannula is more difficult to clean due to the existence of the tube wall barrier, the cavitation effect is weak and the ultrapure water flow is small, and the middle and upper parts of the inner wall are the most difficult parts of the entire cannula to clean. By adding a spiral cleaning component 13, under the forward or reverse rotation of the spiral cleaning piece 1302, the ultrapure water in the cannula will form a vortex, which can increase the flow rate and form a flushing effect, thereby further improving the cleaning effect.

[0038] Step D5: After cleaning is completed, open the water outlet control valve 18 and discharge the ultrapure water through the water outlet pipe 17. Finally, open the machine cover 19 and take out the cleaned intubation tube and the barrel cover.

[0039] The cleaning method of the present invention can be used for both ordinary cleaning for general cleanliness requirements and replacement cleaning for higher cleanliness requirements; the two modes select the appropriate cleaning method according to the needs, which can improve the cleaning efficiency and reduce the cleaning cost while meeting the cleaning requirements.

[0040] The above description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. Centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers, characterized by: It comprises a machine body, which is divided into a cleaning area (1) and a control area (2); An independent cleaning chamber (3) and a replacement chamber (4) are provided in the cleaning area (1); wherein the cleaning chamber (3) is divided into a cleaning medium accommodating area (301), a cannula placement area (302), and a barrel cover placement area (303) by a partition plate; The cleaning medium accommodating area (301) is located above the barrel cover placement area (303), and the two are connected, so that the cleaning medium can flow between the cleaning medium accommodating area (301) and the barrel cover placement area (303); The cannula placement area (302) is located on one side of the barrel cover placement area (303), and the two are connected, so that the cleaning medium can flow between the cannula placement area (302) and the barrel cover placement area (303); An ultrasonic generator (5) is installed in the cleaning medium accommodating area (301), and utilizes the cavitation effect of ultrasonic waves in the cleaning medium to clean the cannulas in the cannulas placement area (302) and the barrel covers in the barrel cover placement area (303); The replacement chamber (4) is located on the other side of the barrel cover placement area (303), and the two are communicated with each other, so that the cleaning medium can flow between the barrel cover placement area (303) and the replacement chamber (4).

2. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: A diversion hole (6) is provided on the partition plate between the cleaning medium accommodating area (301) and the barrel cover placement area (303). When the cleaning medium liquid level in the cleaning medium accommodating area (301) is higher than the partition plate, the cleaning medium enters the barrel cover placement area (303) through the diversion hole (6). In addition, a plurality of partition plates (7) are arranged at intervals in the barrel cover placement area (303), and a plurality of barrel covers are placed in sequence.

3. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 2, characterized in that: At least one overflow hole (8) is provided on the partition plate between the cannula placement area (302) and the barrel cover placement area (303). When the cleaning medium level in the barrel cover placement area (303) is higher than the overflow hole (8), the cleaning medium enters the cannula placement area (302). At least one overflow groove (9) is provided on the partition plate between the barrel cover placement area (303) and the displacement chamber (4). When the cleaning medium level in the barrel cover placement area (303) is higher than the overflow groove (9), the cleaning medium enters the displacement chamber (4). Furthermore, the liquid level of the overflow hole (8) is lower than the liquid level of the overflow trough (9). When the liquid level of the cleaning medium gradually rises, it first enters the cannula placement area (302) and then enters the replacement chamber (4).

4. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: A plurality of intubation holes (10) are provided on the partition plate between the intubation placement area (302) and the cleaning medium storage area (301); the long tube portion of the intubation tube to be cleaned passes through the intubation holes (10) and is inserted into the cleaning medium storage area (301), while the tube end portion is mounted in the intubation placement area (302); A plurality of support pins (11) are provided on the upper edge of the cannula hole (10) for overhead support of the end of the cannula to be cleaned; A plurality of clamping pieces (12) are provided at the lower edge of the cannula hole (10), and the plurality of clamping pieces (12) are all inclined inwardly to form a conical clamping area for clamping the long tube portion of the cannula to be cleaned.

5. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: The ultrasonic generator (5) comprises an ultrasonic vibrating rod (501) and a PFA-HP bushing (502) covering the outside of the ultrasonic vibrating rod (501); the ultrasonic generator (5) is installed at the bottom of the cleaning medium accommodating area (301), the ultrasonic vibrating rod (501) extends upward in the cleaning medium accommodating area (301), and the PFA-HP bushing (502) covers the portion of the ultrasonic vibrating rod (501) located in the cleaning medium accommodating area (301); The PFA-HP bushing (502) is a through-cylindrical structure, and both ends thereof are welded to the M-PTFE plates (503) by hot air welding.

6. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: A plurality of spiral cleaning components (13) are further provided in the cleaning medium accommodating area (301), and each set of the spiral cleaning components (13) is respectively inserted into the long tube portion of the cannula to be cleaned, and cleans the interior of the cannula to be cleaned; The spiral cleaning assembly (13) comprises a rotating rod (1301) and a spiral cleaning sheet (1302) extending along the rotating rod (1301); the spiral cleaning sheet (1302) rotates along with the rotating rod (1301) inside the long tube portion of the cannula to be cleaned while cleaning; A sealed bearing (1303) and a driving gear (1304) are sequentially provided at the lower end of the rotating rod (1301); the rotating rod (1301) is connected to the cleaning chamber (3) via the sealed bearing (1303), and the driving gear (1304) is connected to the power motor via a gear set; and each group of the spiral cleaning components (13) is independently controlled; The spiral cleaning sheet (1302) spirals from bottom to top. During cleaning, on the one hand, the rotation of the spiral cleaning sheet (1302) scrubs the inside of the long tube portion of the cannula to be cleaned; on the other hand, the spiral cleaning sheet (1302) pushes the cleaning medium in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula while flushing out pollutants.

7. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: The replacement chamber (4) is divided into a filtration zone (401) and a replacement zone (402) by a partition plate. The filtration zone (401) is located above the replacement zone (402) and is connected to the barrel cover placement zone (303). The cleaning medium enters the replacement zone (402) after being filtered by the multi-layer filter assembly (14) in the filtration zone (401).

8. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 7, characterized in that: The bottom of the cleaning medium accommodating area (301) is connected to a water inlet pipe (15), and the water inlet pipe (15) is also equipped with a water inlet control valve (16) for transporting the cleaning medium into the cleaning medium accommodating area (301); A water outlet pipe (17) is also provided at the bottom of the cleaning medium accommodating area (301), and the water outlet pipe (17) is also equipped with a water outlet control valve (18) for controlling the discharge of the cleaning medium in the cleaning medium accommodating area (301).

9. The centralized cleaning equipment for barrel covers and cannulas of high-purity chemical storage containers according to claim 1, characterized in that: An openable machine cover (19) is provided above the cleaning area (1), and a first overflow pressure plate (20) and a second overflow pressure plate (21) are connected to the machine cover (19) via an adjusting screw; wherein the first overflow pressure plate (20) is located in the cannula placement area (302) and is used to press the cannula to be cleaned placed therein; and the second overflow pressure plate (21) is located in the barrel cover placement area (303) and is used to press the barrel cover to be cleaned placed therein.

10. A method for cleaning a centralized cleaning device for the lid and cannula of a high-purity chemical storage container according to any one of claims 1 to 9, characterized in that: The steps include: Step A: Preparation of ultrasonic generator, Step A1: The customized PFA-HP bushing (502) is installed on the ultrasonic vibrating rod (501) by means of a tight lining. Before installation, the PFA-HP bushing (502) is heated to 260 degrees and then covered with the ultrasonic vibrating rod (501); Step A2: After cooling and responding to the force, both ends of the PFA-HP bushing (502) are smoothed; Step A3: welding the M-PTFE plates (503) to both ends of the PFA-HP bushing (502) by hot air welding; Step B: Preparation before cleaning; Step B1: First, the cannula to be cleaned and the barrel cover are separated and placed in the cannula placement area (302) and the barrel cover placement area (303) respectively; when the barrel covers are placed, they are placed in an upright manner and separated one by one by the partitions (7); when the cannula is placed, the long tube portion passes through the cannula hole (10) and is inserted into the cleaning medium storage area (301), and the spiral cleaning assembly (13) is ensured to be inserted into the cannula until the tube end of the cannula contacts the support pin (11). Step B2: Then, the machine cover (19) is closed, and the positions of the first overflow pressure plate (20) and the second overflow pressure plate (21) are adjusted by adjusting the nut on the screw until the two cover the fixed insert and the barrel cover respectively; Step C: normal cleaning; Step C1: First, open the water inlet control valve (16) to deliver ultrapure water to the cleaning medium storage area (301) through the water inlet pipe (15). As the water level rises, the ultrapure water enters the barrel cover placement area (303) through the guide hole (6) and enters the cannula placement area (302) through the overflow hole (8) until it covers the end of the cannula. At this time, the liquid level of the ultrapure water is lower than the overflow groove (9). When the ultrapure water enters the cannula placement area (302) through the overflow hole (8), it can flush the threads of the cannula end, further improving the cleaning effect. Step C2: turning on the ultrasonic generator (5) and using the cavitation effect of ultrasonic waves in ultrapure water to clean the cannulas in the cannulas placement area (302) and the barrel covers in the barrel cover placement area (303); Step C3: Turn on the spiral cleaning assembly (13), and the spiral cleaning piece (1302) rotates along with the rotating rod (1301) inside the long tube portion of the cannula to be cleaned while cleaning. At the same time, the spiral cleaning piece (1302) pushes the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, flushing the inner wall of the cannula while flushing out the contaminants; Step C4: After cleaning is completed, open the water outlet control valve (18) to discharge the ultrapure water through the outlet pipe (17), and finally open the machine cover (19) to remove the cleaned intubation tube and the barrel cover; Step D: replacement cleaning; Step D1: First, open the water inlet control valve (16) to deliver ultrapure water to the cleaning medium storage area (301) through the water inlet pipe (15). As the water level rises, the ultrapure water enters the barrel cover placement area (303) through the guide hole (6) and enters the cannula placement area (302) through the overflow hole (8) until it covers the end of the cannula. As the ultrapure water is continuously delivered, the liquid level gradually rises above the overflow trough (9). At this time, the ultrapure water passes through the overflow trough (9) and is filtered by the multi-layer filter assembly (14) of the filter area (401) before entering the replacement area (402). Step D2: Initially, the ultrapure water in the replacement zone (402) is filtered and then returned to the cleaning medium storage zone (301) for further cleaning. After a period of time, the ultrapure water in the replacement zone (402) is directly discharged, while the clean ultrapure water is continuously supplied to the cleaning medium storage zone (301); Step D3: turning on the ultrasonic generator (5) and using the cavitation effect of ultrasonic waves in ultrapure water to clean the cannulas in the cannulas placement area (302) and the barrel covers in the barrel cover placement area (303); Step D4: Turn on the spiral cleaning assembly (13), and the spiral cleaning piece (1302) rotates along with the rotating rod (1301) inside the long tube portion of the cannula to be cleaned while cleaning; Step D41: The spiral cleaning piece (1302) rotates forward under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from bottom to top, accelerating the water flow to flush the inner wall of the cannula while flushing out the pollutants; Step D42: The spiral cleaning sheet (1302) is reversed under the action of the rotating rod, pushing the ultrapure water in the long tube portion of the cannula to be cleaned from top to bottom, and forming a vortex with the ultrapure water rising in the cleaning medium accommodating area (301), further cleaning the middle area of ​​the cannula which is the most difficult to clean; Step D5: After cleaning is completed, open the water outlet control valve (18) and discharge the ultrapure water through the outlet pipe (17). Finally, open the machine cover (19) and remove the cleaned intubation tube and the barrel cover.

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