Quartz exhaust fan and processing method thereof

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and particularly relates to a quartz exhaust fan and a processing method thereof.The quartz exhaust fan comprises a plate body, the middle of the plate body is connected with the air outlet end of a plasma processing device, and a plurality of through holes penetrating through the plate body are formed in the plate body; the surface, facing the plasma processing device, of the plate body is provided with at least one circle of circumferential ventilation grooves surrounding the center of the plate body, the surface, facing the plasma processing device, of the plate body is further provided with a plurality of radial ventilation grooves, through holes are formed in the circumferential ventilation grooves and the radial ventilation grooves, and the radial ventilation grooves are communicated with the circumferential ventilation grooves in a staggered mode. As the top surface is provided with the circumferential ventilation grooves and the radial ventilation grooves which are communicated with each other, gas discharged from a plasma processing device flows to the middle part of the plate body and can be quickly diffused along the radial ventilation grooves, so that process gas is uniformly distributed in the radial direction of the plate body, and then the process gas enters each circumferential ventilation groove from each radial ventilation groove; and the process gas is uniformly distributed in the circumferential direction of the plate body.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a quartz exhaust fan and a processing method thereof. Background Art

[0002] The plasma chamber gas distributor is a core component in processes such as semiconductor manufacturing and material coating. It is used to accurately adjust the gas diffusion path into the reaction chamber through slits and distribution holes, ensure uniform plasma distribution, and evenly deliver process gases (such as argon, oxygen, fluoride, etc.), which directly affects plasma stability and process effects.

[0003] The exhaust fan is a gas distributor inside the plasma etcher (directly facing the plasma). In a vacuum environment, the exhaust fan evenly diverts the gas and then passes it through the gas distribution plate to etch the chip, which can make the chip etching amount more stable.

[0004] The core of the gas distributor lies in the rationality of the design of the gas diffusion channel on the gas distributor. Summary of the Invention

[0005] The purpose of the present invention is to provide a quartz exhaust fan and a processing method thereof to address the above-mentioned technical problems, so as to achieve the effect of uniformly distributing the process gas in the circumferential direction of the plate body.

[0006] In view of this, the present invention provides a quartz exhaust fan, including a plate body, the middle part of the plate body is connected to the air outlet end of the plasma processing device, a plurality of through holes penetrating the plate body are opened on the plate body, the surface of the plate body facing the plasma processing device is provided with at least one circle of circumferential ventilation grooves surrounding its center position, and the surface facing the plasma processing device is also provided with a plurality of radial ventilation grooves, the circumferential ventilation grooves and the radial ventilation grooves are both provided with through holes, and the radial ventilation grooves are interconnected with the circumferential ventilation grooves.

[0007] In the present technical solution, since the top surface is provided with interconnected circumferential ventilation grooves and radial ventilation grooves, the gas discharged from the plasma processing device flows to the middle of the plate body and can quickly diffuse along the radial ventilation grooves, so that the process gas is evenly distributed in the radial direction of the plate body. Subsequently, the process gas enters the circumferential ventilation grooves from each radial ventilation groove, so that the process gas is evenly distributed in the circumferential direction of the plate body.

[0008] Furthermore, the width of the radial ventilation groove gradually decreases from the central part of the plate body to the peripheral part thereof.

[0009] In the present technical solution, since the reaction chamber space below the peripheral part of the plate body is larger and the demand for process gas is also greater, the width of the radial ventilation groove is designed to gradually decrease outward as mentioned above, which helps the process gas to flow from the center along the radial ventilation groove to the peripheral part of the plate body at a higher speed, ensuring that the reaction chamber below the peripheral part obtains sufficient process gas and avoids gas shortage in the peripheral part.

[0010] Furthermore, the diameter of the through hole gradually increases from the center of the plate body to the peripheral portion along the diameter direction of the plate body.

[0011] In this technical solution, the reaction chamber below the outer peripheral part of the plate body has a greater demand for process gas. Therefore, appropriately increasing the diameter of the through hole in the outer peripheral part can improve the process gas passing capacity, thereby increasing the gas supply and better avoiding gas shortage in the outer peripheral part of the reaction chamber.

[0012] Furthermore, the processing method of the quartz exhaust fan includes: S1: Blank inspection; S2: Milling: Milling circumferential ventilation grooves and radial ventilation grooves on the plate body through a milling machining center; S3: Drilling: drilling through holes in the circumferential ventilation groove and radial ventilation groove of the plate body by a drilling processing center; S4: Surface treatment, SiC coating on quartz exhaust fan.

[0013] Furthermore, the drilling processing center includes: A clamping assembly, wherein the clamping assembly is used to clamp the plate; A tool assembly is disposed above the clamping assembly, and includes a plurality of drill bits on the same horizontal line. The plurality of drill bits are connected by a synchronization structure and can rotate synchronously for drilling. The arrangement and positional relationship between the drill bits are the same as the arrangement and positional relationship of the through holes in the same radial ventilation groove on the plate body. The drill bits on the tool assembly are respectively used to drill the through holes in the same radial ventilation groove; The clamping assembly can rotate the plate body so that all radial ventilation grooves on the plate body are rotated to the bottom of the tool assembly in sequence.

[0014] In this technical solution, all through holes in the same radial ventilation groove can be drilled simultaneously by multiple drill bits on the tool assembly in a single drilling operation, without drilling one hole at a time, thereby greatly improving the drilling efficiency.

[0015] Furthermore, the synchronization structure includes: A driving gear, wherein the driving gear is sleeved and fixed on the cutter bar of the drill bit at the end; Synchronous gear, except for the one connected to the driving gear, the cutter bars of the other drill bits are all sleeved and fixedly connected with a synchronous gear; A synchronous toothed belt, which is tensioned on the driving gear and the synchronous gear at the end and meshes with the driving gear and all the synchronous gears; A driving power source is connected to the cutter rod corresponding to the driving gear to drive the cutter rod to rotate.

[0016] In this technical solution, the driving power source is started to drive the active gear and the cutter rod connected to the active gear to rotate, and the rotation is synchronously transmitted to the synchronous gear through the synchronous toothed belt, so that all the cutter rods rotate with the corresponding drill bits.

[0017] Furthermore, the driving power source is a motor, and the motor is fixedly arranged on the frame of the drilling machining center.

[0018] Furthermore, the clamping assembly includes: The indexing plate is fixedly mounted on the frame of the drilling machining center and can intermittently rotate circumferentially by a preset angle; The clamping chuck is fixedly arranged on the indexing plate, and the clamping chuck is in contact with the lower surface of the plate body and clamps the outer periphery of the plate body.

[0019] Furthermore, a scraping assembly is provided on the frame, and the scraping assembly is used to scrape the drilled flanges below the plate body.

[0020] Furthermore, the shaving assembly includes a fixed rod and a scraping rod, the fixed rod is fixedly arranged on the frame, and the scraping rod is vertically connected to the fixed rod.

[0021] In this technical solution, after drilling, a drilled flange will appear on the lower surface of the plate. When the dividing plate rotates with the plate, the scraper rod will scrape off the flange, reducing the collision between parts caused by the flange in subsequent processes and ensuring the quality of the plate.

[0022] The beneficial effects of the present invention are: 1. Since the top surface is provided with interconnected circumferential ventilation grooves and radial ventilation grooves, the gas exhausted from the plasma processing device flows to the middle of the plate body and can diffuse rapidly along the radial ventilation grooves, thereby making the process gas evenly distributed in the radial direction of the plate body. Subsequently, the process gas enters the circumferential ventilation grooves from the radial ventilation grooves, making the process gas evenly distributed in the circumferential direction of the plate body.

[0023] 2. Since the reaction chamber space below the outer peripheral part of the plate body is larger and the demand for process gas is also greater, the width of the radial ventilation groove is designed to gradually decrease outward as mentioned above, which helps the process gas flow from the center along the radial ventilation groove to the outer peripheral part of the plate body at a higher speed, ensuring that the reaction chamber below the outer peripheral part obtains sufficient process gas and avoids gas shortage in the outer peripheral part.

[0024] 3. The reaction chamber below the outer peripheral part of the plate has a greater demand for process gas. Therefore, appropriately increasing the diameter of the through-hole in the outer peripheral part can improve the process gas passing capacity, thereby increasing the gas supply and better avoiding gas shortage in the outer peripheral part of the reaction chamber.

[0025] 4. By drilling holes simultaneously with multiple drill bits on the tool assembly, all through holes in the same radial ventilation groove can be drilled without drilling one hole at a time, which greatly improves the drilling efficiency.

[0026] 5. After drilling, a drilling flange will appear on the lower surface of the plate. When the indexing plate rotates with the plate, the scraper rod will scrape off the flange, reducing the collision between parts caused by the flange in subsequent processes and ensuring the quality of the plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a three-dimensional picture of a quartz exhaust fan; Figure 2 This is a three-dimensional picture of the quartz exhaust fan from another angle; Figure 3 It is a three-dimensional diagram of a drilling machining center; Figure 4 yes Figure 3 A partial enlarged view of point A in the middle; Figure 5 is a schematic diagram of the tool assembly; Figure 6 is a top view of the tool assembly.

[0028] The marks in the figure are: 1. Plate; 2. Through hole; 3. Circumferential ventilation groove; 4. Radial ventilation groove; 5. Drilling center; 6. Clamping assembly; 7. Tool assembly; 8. Drill bit; 9. Driving gear; 10. Tool bar; 11. Synchronous gear; 12. Synchronous belt; 13. Motor; 14. Indexing plate; 15. Clamping chuck; 16. Scraping assembly; 17. Fixing rod; 18. Scraping rod; 19. Frame. DETAILED DESCRIPTION

[0029] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0030] In the description of this application, it should be noted that the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the exemplary embodiments according to this application. For ease of description, the dimensions of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Technologies, methods and equipment known to ordinary technicians in the relevant fields may not be discussed in detail, but where appropriate, the technologies, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0031] It should be noted that the terms "first," "second," etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than those illustrated or described herein, and that the objects distinguished by "first," "second," etc. are generally of the same type, and do not limit the number of objects. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0032] It should be noted that, in the description of this application, the directions or positional relationships indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description. Unless otherwise specified, these directional terms do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of this application; the directional terms "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0033] It should be noted that, in the present application, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the opposite order according to the functions involved. For example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0034] Example 1: like Figure 1-2 As shown, a quartz exhaust fan includes a plate body 1, the middle part of the plate body 1 is connected to the gas outlet end of the plasma processing device, a plurality of through holes 2 penetrating the plate body 1 are provided on the plate body 1, and the surface of the plate body 1 facing the plasma processing device is provided with at least one circle of circumferential ventilation grooves 3 surrounding its center position, and the surface facing the plasma processing device is also provided with a plurality of radial ventilation grooves 4, and the circumferential ventilation grooves 3 and the radial ventilation grooves 4 are both provided with through holes 2, and the radial ventilation grooves 4 are connected to the circumferential ventilation grooves 3 in an alternating manner.

[0035] Since the top surface is provided with interconnected circumferential ventilation grooves 3 and radial ventilation grooves 4, the gas exhausted from the plasma processing device flows to the middle of the plate body 1 and can quickly diffuse along the radial ventilation grooves 4, so that the process gas is evenly distributed in the radial direction of the plate body 1. Subsequently, the process gas enters the circumferential ventilation grooves 3 from each radial ventilation groove 4, so that the process gas is evenly distributed in the circumferential direction of the plate body 1.

[0036] The width of the radial ventilation grooves 4 gradually decreases from the center to the periphery of the plate body 1. Because the reaction chamber below the periphery of the plate body 1 has a larger space and a greater demand for process gas, designing the radial ventilation grooves 4 to gradually decrease in width outwards as described above helps the process gas flow from the center along the radial ventilation grooves 4 toward the periphery of the plate body 1 at a higher speed, ensuring that the reaction chamber below the periphery receives a sufficient amount of process gas and avoiding gas shortages in the periphery.

[0037] The diameter of the through-holes 2 gradually increases from the center of the plate 1 to the periphery along the diameter direction of the plate 1. The reaction chamber below the periphery of the plate 1 has a greater demand for process gas. Therefore, appropriately increasing the diameter of the through-holes 2 in this peripheral portion can improve the process gas flow capacity, thereby increasing the gas supply and better preventing gas shortages in the periphery of the reaction chamber.

[0038] Example 2: like Figure 3-6 As shown, the processing method of the quartz exhaust fan includes: S1: Blank inspection; S2: Milling: Milling the circumferential ventilation groove 3 and the radial ventilation groove 4 on the plate body 1 by a milling machining center; S3: Drilling: drilling a through hole 2 in the circumferential ventilation groove 3 and the radial ventilation groove 4 of the plate body 1 by a drilling processing center 5; S4: Surface treatment, SiC coating on quartz exhaust fan.

[0039] The drilling processing center 5 includes: A clamping assembly 6, wherein the clamping assembly 6 is used to clamp the plate 1; a tool assembly 7, the tool assembly 7 being disposed above the clamping assembly 6, the tool assembly 7 including a plurality of drill bits 8 on the same horizontal line. The plurality of drill bits 8 are connected by a synchronization structure and can rotate synchronously for drilling. The arrangement and positional relationship between the drill bits 8 are the same as the arrangement and positional relationship of the through holes 2 within the same radial ventilation groove 4 on the plate body 1. The drill bits 8 on the tool assembly 7 are respectively used to drill the through holes 2 within the same radial ventilation groove 4; The clamping assembly 6 can rotate with the plate body 1 so that all radial ventilation grooves 4 on the plate body 1 are rotated to be directly below the tool assembly 7 in sequence.

[0040] By drilling holes simultaneously with the multiple drill bits 8 on the tool assembly 7, all the through holes 2 in the same radial ventilation groove 4 can be drilled without drilling holes one by one, thereby greatly improving the drilling efficiency.

[0041] The synchronization structure includes: A driving gear 9, which is sleeved and fixed on a cutter bar 10 of a drill bit 8 at the end; Synchronous gear 11, except for the one connected to the driving gear 9, the cutter bars 10 of the other drill bits 8 are all sleeved and fixedly connected with a synchronous gear 11; a synchronous toothed belt 12, which is tensioned on the driving gear 9 and the synchronous gear 11 at the end and meshes with the driving gear 9 and all the synchronous gears 11; A driving power source is connected to the knife rod 10 corresponding to the driving gear 9 to drive the knife rod 10 to rotate.

[0042] The driving power source is started to drive the driving gear 9 and the cutter bar 10 connected to the driving gear 9 to rotate, and at the same time, the rotation is synchronously transmitted to the synchronous gear 11 through the synchronous toothed belt 12, so that all the cutter bars 10 rotate with the corresponding drill bits 8.

[0043] The driving power source is a motor 13 , which is fixed on a frame 19 of the drilling machining center 5 .

[0044] The clamping assembly 6 includes: The indexing plate 14 is fixedly mounted on the frame 19 of the drilling processing center 5 and can intermittently rotate circumferentially by a preset angle; The clamping chuck 15 is fixedly arranged on the indexing plate 14 , and the clamping chuck 15 is in contact with the lower surface of the plate body 1 and clamps the outer periphery of the plate body 1 .

[0045] A scraping assembly 16 is also provided on the frame 19 , and the scraping assembly 16 is used to scrape the drilled flange below the plate body 1 .

[0046] The scraping assembly 16 includes a fixed rod 17 and a scraping rod 18. The fixed rod 17 is fixedly mounted on a frame 19, and the scraping rod 18 is vertically connected to the fixed rod 17. After drilling, a drilled flange will appear on the lower surface of the plate 1. When the indexing plate 14 rotates with the plate 1, the scraping rod 18 will scrape off the flange, thereby reducing the collision between parts caused by the flange in subsequent processes and ensuring the quality of the plate 1.

[0047] The embodiments of the present application are described above in conjunction with the accompanying drawings. Unless there is a conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A quartz exhaust fan, characterized in that: The invention comprises a plate body (1), wherein the middle portion of the plate body (1) is connected to the gas outlet end of the plasma treatment device, a plurality of through holes (2) penetrating the plate body (1) are provided on the plate body (1), a surface of the plate body (1) facing the plasma treatment device is provided with at least one circumferential ventilation groove (3) surrounding the center position thereof, and a plurality of radial ventilation grooves (4) are also provided on the surface facing the plasma treatment device, wherein the circumferential ventilation groove (3) and the radial ventilation groove (4) are both provided with through holes (2), and the radial ventilation grooves (4) are connected to the circumferential ventilation grooves (3) in an interlaced manner.

2. A quartz exhaust fan according to claim 1, characterized in that: The width of the radial ventilation groove (4) gradually decreases from the central part of the plate body (1) to the peripheral part thereof.

3. A quartz exhaust fan according to claim 2, characterized in that: The diameter of the through hole (2) gradually increases from the center of the plate body (1) to the peripheral portion along the diameter direction of the plate body (1).

4. A processing method for a quartz exhaust fan according to claim 3, characterized in that: The following steps are involved: S1: Blank inspection; S2: milling, milling a circumferential ventilation groove (3) and a radial ventilation groove (4) on the plate body (1) by a milling machining center; S3: Drilling, using a drilling processing center (5) to drill through holes (2) in the circumferential ventilation groove (3) and the radial ventilation groove (4) of the plate body (1); S4: Surface treatment, SiC coating on quartz exhaust fan.

5. The method for processing a quartz exhaust fan according to claim 4, characterized in that: The drilling processing center (5) comprises: A clamping assembly (6), the clamping assembly (6) being used to clamp the plate body (1); A tool assembly (7), wherein the tool assembly (7) is arranged above the clamping assembly (6), and the tool assembly (7) includes a plurality of drill bits (8) on the same horizontal line, wherein the plurality of drill bits (8) are connected by a synchronous structure and can rotate synchronously for drilling, and the arrangement and position relationship between the drill bits (8) are the same as the arrangement and position relationship of the through holes (2) in the same radial ventilation groove (4) on the plate body (1), and the drill bits (8) on the tool assembly (7) are respectively used to drill the through holes (2) in the same radial ventilation groove (4); The clamping assembly (6) can rotate the plate body (1) so that all radial ventilation grooves (4) on the plate body (1) are rotated to be directly below the tool assembly (7) in sequence.

6. The method for processing a quartz exhaust fan according to claim 5, characterized in that: The synchronization structure includes: A driving gear (9), the driving gear (9) being sleeved and fixed on a cutter bar (10) of a drill bit (8) located at an end portion; A synchronous gear (11) is fixedly connected to the cutter bars (10) of the drill bits (8) except the one connected to the driving gear (9); a synchronous toothed belt (12), wherein the synchronous toothed belt (12) is tensioned on the driving gear (9) and the synchronous gear (11) at the end and meshes with the driving gear (9) and all the synchronous gears (11); A driving power source is connected to a knife rod (10) corresponding to the driving gear (9) and is used to drive the knife rod (10) to rotate.

7. The method for processing a quartz exhaust fan according to claim 6, characterized in that: The driving power source is a motor (13), and the motor (13) is fixedly arranged on a frame (19) of the drilling processing center (5).

8. The method for processing a quartz exhaust fan according to claim 6, characterized in that: The clamping assembly (6) comprises: A dividing plate (14), wherein the dividing plate (14) is fixedly mounted on a frame (19) of a drilling processing center (5), and the dividing plate (14) can intermittently rotate circumferentially at a preset angle; A clamping chuck (15) is fixedly arranged on the indexing plate (14), and the clamping chuck (15) is in contact with the lower surface of the plate body (1) and clamps the outer periphery of the plate body (1).

9. The method for processing a quartz exhaust fan according to claim 6, characterized in that: A scraping assembly (16) is also provided on the frame (19), and the scraping assembly (16) is used to scrape off the drilled flange below the plate body (1).

10. The method for processing a quartz exhaust fan according to claim 9, characterized in that: The scraping assembly (16) comprises a fixed rod (17) and a scraping rod (18), wherein the fixed rod (17) is fixedly arranged on the frame (19), and the scraping rod (18) is vertically connected to the fixed rod (17).

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