Substrate conveying device for manufacturing process of planar semiconductor display device

Abstract

The invention discloses a substrate conveying device for a plane semiconductor display device manufacturing process, and relates to the technical field of plane semiconductor display device manufacturing, the substrate conveying device specifically comprises a device body, and the top end of an inner cavity of the device body is connected with a flaw detector through a moving structure; conveying rolling wheel assemblies are arranged above the device body, supporting rolling wheels are arranged in the middle of the area between every two adjacent conveying rolling wheel assemblies, and the conveying rolling wheel assemblies are designed in a split mode. According to the substrate conveying device for the manufacturing process of the planar semiconductor display device, the conveying rollers and the supporting rollers are detected in real time through the flaw detector, the conveying rollers and the supporting rollers with defects such as cracks are screened out in time, and the faults such as deformation and damage of substrates caused by the defects of the conveying rollers and the supporting rollers are avoided; the conveying yield of the substrate is guaranteed, a worker can find potential problems of the roller in time, defects or faults are repaired in time, and the maintenance cost and the production loss are reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of flat-panel semiconductor display device manufacturing, and in particular to a substrate conveying device for a flat-panel semiconductor display device manufacturing process. Background Art

[0002] In the manufacturing process of flat-panel display devices, the process of forming circuit patterns on glass substrates generally includes three key stages: substrate pretreatment, photosensitive layer formation, and patterning. Substrate transportation operations are required between these process stages. The stability and reliability of substrate transportation operations directly affect the yield and performance of the final product.

[0003] Currently, roller conveyors are widely used in substrate transportation. Their working principle is usually to use a motor to drive a chain, belt, or gear set to drive the roller to rotate, and use friction to push the substrate to move. However, for ultra-thin or flexible substrates, the substrate is easily deformed due to local pressure during the process of using friction to push the substrate to move. The roller is subjected to alternating stress for a long time, and the probability of fracture is high. However, there is no obvious plastic deformation before the roller breaks, which is not conducive to the staff to find the faulty roller in time. As a result, the faulty roller may scratch the surface of the substrate, affecting the product yield. When the roller breaks, the broken part falls directly to the inside of the device under the action of gravity, which is not convenient for cleaning and reduces the efficiency of roller replacement. Based on this, the present application proposes a substrate conveying device for the manufacturing process of flat-panel semiconductor display devices. Summary of the Invention

[0004] The present invention provides a substrate conveying device for the manufacturing process of a flat-panel semiconductor display device, which solves the problems raised in the above-mentioned background technology that the substrate is subjected to local pressure during conveyance and is prone to deformation; the faulty roller cannot be discovered in time, and the faulty roller may scratch the surface of the substrate; when the roller breaks, the broken part falls directly to the inside of the device under the action of gravity, which is inconvenient to clean and reduces the efficiency of roller replacement.

[0005] The present invention provides the following technical solution: a substrate conveying device for a flat-panel semiconductor display device manufacturing process, comprising a device body, wherein the top end of an inner cavity of the device body is connected to a flaw detector via a movable structure; a conveying roller assembly is disposed above the device body, and a support roller is disposed in the middle of an area between two adjacent conveying roller assemblies. The conveying roller assembly is of a split design, comprising a fixed portion and a replaceable portion adapted to fit the fixed portion. The replaceable portion includes a conveying roller, each end of the conveying roller is movably fitted with a fixed sleeve, a transmission rod is movably connected to the middle portion of the conveying roller, an end of the transmission rod remote from the fixed portion extends to the outside of the conveying roller assembly and is movably fitted with a fixed plate, the fixed plate and the adjacent fixed sleeve being detachably connected thereto; a power input shaft is movably connected to the middle portion of the top end of the fixed portion, and a transmission groove is disposed in the middle portion of the power input shaft adapted to fit the transmission rod; the fixed portion, the fixed sleeve remote from the fixed portion, and the ends of the support roller are all connected to the device body via a connecting structure.

[0006] Preferably, the top of the conveying roller and the top of the supporting roller are at the same height.

[0007] Preferably, the bottom of the fixing sleeve is located above the bottom of the fixing part, and a support groove is provided at the bottom end of the fixing part. The inner cavity of the support groove is movably connected with a support block, and the support block is connected to the fixing part through a first telescopic structure. When the support block contacts the fixing sleeve, the support block and the fixing sleeve are in a state of magnetic attraction.

[0008] Preferably, the inner cavity of the transmission groove is movably connected to a push rod, and the push rod is connected to the power input shaft through a second telescopic structure.

[0009] Preferably, a slope is provided at the top of the inner cavity of the device body close to the fixing portion, and the distance between the top of the slope and the outer side wall of the device body is the same as the thickness of the fixing portion.

[0010] Preferably, the connecting structure includes a shift chain movably connected to the device body, a fixed plate in contact with the outer side wall of the shift chain, an electromagnet connected to the top of the fixed plate, and a fixed rod movably connected to the bottom end of the fixed plate, shift chains are provided on both sides of the top of the device body, slots adapted to the fixed rod are provided on both sides of the top of the device body, the slots are located below the shift chain, a clamping structure is provided at the top of the inner cavity of the slot, and the fixed rod is connected to the device body through the clamping structure.

[0011] Preferably, the electromagnet contacts the outer side wall of the shift chain, and when the electromagnet is in an energized state, the electromagnet and the shift chain are in a state of magnetic attraction.

[0012] Preferably, the outer side of the fixing portion, the outer side of the fixing sleeve away from the fixing portion, and both ends of the supporting roller are connected with fixing plates.

[0013] Preferably, the support roller includes a first support roller and a support roller body evenly arranged on the outer ring of the first support roller; the conveying roller includes a second support roller and a conveying roller body evenly arranged on the outer ring of the second support roller, and the support roller body and the conveying roller body are staggered.

[0014] Preferably, a waste slag conveying assembly is provided at the bottom end of the inner cavity of the device body.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The substrate conveying device of the flat-panel semiconductor display device manufacturing process uses support rollers and conveying rollers to jointly support the substrate, disperse the pressure on the substrate, make the force on the substrate more uniform, and reduce the probability of substrate deformation; use a connection structure to realize the movement of the position of the conveying roller and the support roller, so that the present application can adapt to substrates of various sizes, improving the adaptability of the present application; the conveying roller and the fixing part can be quickly disassembled and assembled, improving the efficiency of conveying roller replacement; use a waste residue conveying assembly to drive the broken part of the conveying roller to move, improving the convenience of cleaning the broken part of the conveying roller.

[0016] 2. The substrate conveying device in the manufacturing process of the flat-panel semiconductor display device uses a flaw detector to conduct real-time inspection of the conveying rollers and support rollers, and promptly screens out conveying rollers and support rollers with defects such as cracks, avoiding deformation, breakage and other faults of the substrates caused by defects in the conveying rollers and support rollers themselves, ensuring the conveying yield of the substrates, and enabling staff to promptly discover potential problems with the rollers, repair defects or failures in a timely manner, reducing maintenance costs and production losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a front view of the structure of the present invention; Figure 2 It is a schematic diagram of the back side of the structure of the present invention; Figure 3 This is a schematic diagram of the conveying roller assembly of the present invention; Figure 4 This is an exploded schematic diagram of the conveying roller assembly of the structure of the present invention; Figure 5 This is a schematic diagram of the explosion of the structural device body of the present invention.

[0018] In the figure: 1. Device body; 2. Flaw detector; 3. Fixed plate; 4. Fixed part; 5. Support roller; 6. Electromagnet; 7. Fixed rod; 8. Shift chain; 9. Lifting structure; 10. Pressing plate; 11. Slot; 12. Translation structure 1; 13. Translation structure 2; 14. Inclined plane; 15. Fixed sleeve; 16. Power structure; 17. Fixed plate; 18. Screw; 19. Conveying roller; 20. Support block; 21. Transmission rod; 22. First telescopic structure; 23. Push rod; 24. Second telescopic structure; 25. Power input shaft; 26. Support trough; 27. Waste slag conveying assembly. DETAILED DESCRIPTION

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0020] The present invention provides an embodiment: please refer to Figure 1-Figure 5 A substrate conveying device for a flat-panel semiconductor display device manufacturing process includes a device body 1, a conveying roller assembly is arranged above the device body 1, and a supporting roller 5 is arranged in the middle of the area between two adjacent conveying roller assemblies. The conveying roller assembly is a split design, including a fixed part 4 and a replaceable part adapted to the fixed part 4, and the replaceable part includes a conveying roller 19. The top of the conveying roller 19 and the top of the supporting roller 5 are at the same height. When in use, the present application utilizes the conveying roller 19 to convey the substrate for the manufacture of the flat-panel semiconductor display device. During the conveying process of the substrate, the supporting roller 5 is utilized to support the substrate, disperse the pressure on the substrate, make the force on the substrate more uniform, and reduce the probability of deformation of the substrate.

[0021] The support roller 5 includes a first support roller and a support roller body evenly arranged on the outer ring of the first support roller; the conveying roller 19 includes a second support roller and a conveying roller body evenly arranged on the outer ring of the second support roller. The support roller body and the conveying roller body are staggered. Such an arrangement can increase the contact points and support positions between the substrate and the present application, further make the force on the substrate used in the manufacture of flat semiconductor display devices more uniform, and reduce the probability of deformation of the substrate.

[0022] Both ends of the conveying roller 19 are movably sleeved with a fixed sleeve 15, and the end of the second support roller is movably connected to the fixed sleeve 15. There is damping between the second support roller and the fixed sleeve 15. Under the action of external force, the position between the fixed sleeve 15 and the conveying roller 19 can be changed. The middle part of the conveying roller 19 is movably connected with a transmission rod 21. The transmission rod 21 extends to the outside of the conveying roller assembly away from one end of the fixed part 4 and is movably sleeved with a fixed disk 17. The fixed disk 17 and the adjacent fixed sleeve 15 are detachably connected. When the fixed disk 17 and the fixed sleeve 15 are in a disassembled state, the user can move the transmission rod 21 through the fixed disk 17. When the fixed disk 17 and the fixed sleeve 15 are fixed, the position of the transmission rod 21 is fixed, and when the transmission rod 21 rotates, the conveying roller 19 can be driven to rotate.

[0023] In Example 1 of the present application, the fixed disk 17 and the adjacent fixed sleeve 15 are fixed by a screw 18 and a nut. The screw 18 is fixedly connected to the fixed sleeve 15, and the fixed disk 17 is movably connected to the screw 18. The position of the fixed disk 17 can be fixed by using a nut that matches the screw 18.

[0024] A power input shaft 25 is movably connected to the middle of the top of the fixing portion 4. A transmission groove adapted to the transmission rod 21 is provided in the middle of the power input shaft 25 near one end of the fixing sleeve 15. The user can push the transmission rod 21 to move through the fixing plate 17 so that the transmission rod 21 can be inserted into the transmission groove. When the transmission rod 21 is inserted into the transmission groove, the rotation of the power input shaft 25 can drive the transmission rod 21 to rotate, and the transmission rod 21 can drive the conveying roller 19 to rotate. A push rod 23 is movably connected to the inner cavity of the transmission groove. Push rod 23 is connected to the power input shaft 25 via a second telescopic structure 24. Due to the arrangement of push rod 23 and second telescopic structure 24, when the fixed plate 17 is released, the push rod 23, under the action of second telescopic structure 24, can push the transmission rod 21 outward until the transmission rod 21 is separated from the transmission groove, achieving rapid separation of the replaceable part from the fixed part 4 and facilitating replacement of the replaceable part. Second telescopic structure 24 is existing technology and only needs to ensure stable movement and precise positioning of push rod 23.

[0025] When the transmission rod 21 is inserted into the transmission groove, the bottom of the fixing sleeve 15 is located above the bottom of the fixing part 4, that is, the fixing sleeve 15 is in a suspended state, and a slope 14 is provided at the top of the inner cavity of the device body 1 close to the fixing part 4. The distance between the top of the slope 14 and the outer wall of the device body 1 is the same as the thickness of the fixing part 4, that is, the slope 14 is located below the fixing sleeve 15. When the present application is in use, the fixing sleeve 15 and the device body 1 are in a non-contact state, so that when the transmission rod 21 is separated from the transmission groove, under the action of gravity, the fixing sleeve 15 can drive the conveying roller 19 to move downward, thereby facilitating the replacement of the replaceable part.

[0026] A support groove 26 is provided at the bottom end of the fixed part 4, and the inner cavity of the support groove 26 is movably connected to the support block 20. The support block 20 is connected to the fixed part 4 through a first telescopic structure 22. The first telescopic structure 22 is a public technology and only needs to be able to achieve stable telescopic and precise positioning of the support block 20 in the width direction of the device body 1. Under the action of the first telescopic structure 22, the end of the support block 20 away from the first telescopic structure 22 can be moved to the outside of the support groove 26, or completely moved to the inner cavity of the support groove 26. When the transmission rod 21 is inserted into the transmission groove, the bottom of the support block 20 is at the same height as the bottom of the fixed sleeve 15. When the end of the support block 20 away from the first telescopic structure 22 moves to the outside of the support groove 26, the support block 20 contacts the bottom of the fixed sleeve 15 to support the fixed sleeve 15, and the support block 20 and the fixed sleeve 15 are in a state of magnetic attraction, thereby improving the stability of the replaceable part.

[0027] The fixing portion 4 , the fixing sleeve 15 away from the fixing portion 4 , and the end portion of the supporting roller 5 are all connected to the device body 1 via a connecting structure.

[0028] The connecting structure includes a shift chain 8 movably connected to the device body 1, a fixed plate 3 in contact with the outer wall of the shift chain 8, an electromagnet 6 connected to the top of the fixed plate 3 and a fixed rod 7 movably connected to the bottom end of the fixed plate 3. Shift chains 8 are provided on both sides of the top of the device body 1, and synchronous sprockets are movably connected on both sides of the top of the device body 1. The two synchronous sprockets are connected through the shift chain 8, and a driving structure for driving the synchronous sprocket is provided on both sides of the top of the device body 1. The driving structure is an existing technology and only needs to meet the requirements of stable rotation and precise positioning of the synchronous sprocket, and the rotation speed of the synchronous sprocket can be adjusted according to demand. When the driving structure drives the synchronous sprocket to rotate, the synchronous sprocket drives the shift chain 8 to rotate.

[0029] The electromagnet 6 contacts the outer wall of the shift chain 8, and when the electromagnet 6 is in the energized state, the electromagnet 6 and the shift chain 8 are in a state of magnetic attraction. At this time, when the shift chain 8 rotates, the fixed plate 3 can be driven to move by the electromagnet 6. The model of the electromagnet 6 and the material of the shift chain 8 can be selected according to needs and are not restricted here.

[0030] Both sides of the top of the device body 1 are provided with slots 11 adapted to the fixed rod 7. The slots 11 are located below the shift chain 8. A clamping structure is provided at the top of the inner cavity of the slot 11. The fixed rod 7 is connected to the device body 1 through the clamping structure. In Example 2 of the present application, the clamping structure includes a pressure plate 10 movably connected to the inner cavity of the slot 11. The pressure plate 10 is connected to the device body 1 through a lifting structure 9. Under the action of the lifting structure 9, the distance between the pressure plate 10 and the fixed rod 7 can change. When the pressure plate 10 is separated from the fixed rod 7, the fixed plate 3 can drive the fixed rod 7 to move when it moves. When the pressure plate 10 is tightly fitted with the fixed rod 7, the pressure plate 10 fixes the position of the fixed rod 7, thereby fixing the position of the fixed plate 3.

[0031] The outer side of the fixed portion 4, the outer side of the fixed sleeve 15 away from the fixed portion 4, and both ends of the support roller 5 are connected to the fixed plate 3. When the present application is in use, the controller of the present application can drive the electromagnet 6, which is magnetically attracted to it, to move through the shift chain 8. The electromagnet 6 drives the fixed plate 3 connected to it to move. The fixed plate 3 drives the fixed portion 4, the replaceable portion, or the support roller 5 connected to it to move. This allows the position of the conveying roller assembly and the position of the support roller 5 to be adjusted according to needs, improving the adaptability of the present application.

[0032] A power structure 16 is provided on one side of the device body 1. The power output end of the power structure 16 is connected to the power input shaft 25. The power structure 16 is conventional technology and only needs to meet the requirements of stable rotation and precise positioning of the power input shaft 25. The rotation of the power input shaft 25 can be set as required. Through the configuration of the power structure 16, the power structure 16 can drive the power input shaft 25 to rotate. When in use, the power input shaft 25 can drive the transmission rod 21 to rotate, and the transmission rod 21 drives the conveyor roller 19 to rotate. The present application can transport substrates used in the manufacture of flat-panel semiconductor display devices, facilitating the transfer of substrates between different process flows.

[0033] From the above description, it can be seen that when the present application is in use, the connection structure is used to realize the movement of the position of the conveying roller 19 and the supporting roller 5, so that the present application can adapt to substrates of various sizes, thereby improving the adaptability of the present application; the conveying roller 19 and the fixing part 4 can be quickly disassembled and assembled, thereby improving the efficiency of replacing the conveying roller 19.

[0034] A waste conveying assembly 27 is provided at the bottom end of the inner cavity of the device body 1. When the conveying roller 19 breaks, the broken portion of the conveying roller 19 can fall directly onto the waste conveying assembly 27 under the action of gravity. The waste conveying assembly 27 can drive the broken portion of the conveying roller 19 to move until the broken portion of the conveying roller 19 moves to the end of the device body 1, making it convenient for staff to clean the broken portion of the conveying roller 19. The waste conveying assembly 27 is a prior art and only needs to be able to drive the broken portion of the conveying roller 19 to move stably and accurately in the longitudinal direction of the device body 1, and the impact force when the broken portion of the conveying roller 19 falls will not affect the waste conveying assembly 27. No restrictions are imposed here.

[0035] A pressure sensor may be provided on the top of the waste conveying component 27. When the broken part falls onto the waste conveying component 27, the pressure sensor detects the impact force when the broken part contacts the waste conveying component 27, and uploads the detection result to the controller of this application. The controller of this application may control the operation of the waste conveying component 27 according to the detection result, so that the waste conveying component 27 automatically realizes the transportation of the broken part.

[0036] The top of the inner cavity of the device body 1 is connected to a flaw detector 2 through a movable structure; under the action of the movable structure, the movable structure includes a translation structure 12 and a translation structure 2 13, the translation structure 2 13 is connected to the moving end of the translation structure 12, and the flaw detector 2 is connected to the moving end of the translation structure 2 13. Under the action of the translation structure 12, the translation structure 2 13 and the flaw detector 2 can be stably moved and accurately positioned in the length direction of the device body 1. Under the action of the translation structure 2 13, the flaw detector 2 can be moved in the width direction of the device body 1, so that when the present application is in use, the flaw detector 2 can be used to realize multi-point flaw detection of the conveying roller 19 and the support roller 5, and defective conveying rollers 19 and support rollers 5 can be discovered in time, so that the conveying rollers 19 and support rollers 5 can be replaced in time, and the conveying rollers 19 and support rollers 5 can be prevented from scratching the substrate, thereby ensuring the conveying yield of the substrate. The mobile structure is an existing technology, and it only needs to be able to achieve stable movement and precise positioning of the flaw detector 2 on the X-axis and Y-axis. No restrictions are made here. The flaw detector 2 is a non-contact flaw detector in the existing technology, and its model can be set according to needs, and no restrictions are made here.

[0037] From the above description, it can be seen that when the present application is in use, the flaw detector 2 can be used to perform real-time detection on the conveying roller 19 and the support roller 5. The controller of the present application can timely screen out the conveying roller 19 and the support roller 5 with defects such as cracks based on the detection results, thereby avoiding deformation, breakage and other faults of the substrate caused by defects of the conveying roller 19 and the support roller 5 themselves, ensuring the conveying yield of the substrate, and enabling the staff to promptly discover potential problems of the rollers, repair defects or failures in a timely manner, and reduce maintenance costs and production losses.

[0038] The electrical components involved in this application are all existing technologies. Technicians in this field can select appropriate models of electrical components according to their needs. No restrictions or detailed descriptions are made here. Technicians in this field understand their connection methods. Through these people, all electrical components in this application are connected to their corresponding power supplies through wires, and according to actual conditions, appropriate controllers are selected to meet control requirements. Please refer to the description below for specific connections and control sequences. The electrical connections between the electrical components are completed in a sequential working order. The detailed connection methods are well known in this field. The following mainly introduces the working principles and processes, and no further explanation of electrical control is given.

[0039] In summary: when the substrate conveying device of the flat semiconductor display device manufacturing process is used, the power structure 16 is used to drive the power input shaft 25 to rotate, the power input shaft 25 can drive the transmission rod 21 to rotate, and the transmission rod 21 drives the conveying roller 19 to rotate. When the substrate for flat semiconductor display device manufacturing is placed on the top of this application, this application can convey the substrate, which is convenient for transferring the substrate between different process flows. During the conveying process of the substrate, the support roller 5 supports the substrate and disperses the pressure of the substrate, so that the force on the substrate is more uniform, and the probability of deformation of the substrate is reduced; under the action of the mobile structure, the flaw detector 2 realizes multi-point flaw detection of the conveying roller 19 and the support roller 5, and promptly finds defective conveying rollers 19 and support rollers 5, so that the conveying rollers 19 and support rollers 5 can be replaced in time to ensure good substrate conveying. The rate is high. If the conveying roller 19 or the supporting roller 5 suddenly breaks, the broken part can fall onto the waste conveying assembly 27 under the action of gravity. The waste conveying assembly 27 can convey the broken part, which is convenient for the staff to clean the waste conveying assembly. When the conveying roller 19 breaks, the controller of the present application can control the first telescopic structure 22 to drive the support block 20 away from the fixed sleeve 15 until the support block 20 is completely separated from the fixed sleeve 15, and the second telescopic structure 24 drives the push rod 23 to move until the push rod 23 separates the transmission rod 21 from the transmission groove, and the part of the conveying roller 19 connected to the fixed part 4 can be separated from the fixed part 4, so that the remaining part of the conveying roller 19 can be quickly disassembled from the fixed part 4, which is convenient for cleaning the remaining part of the conveying roller 19, and then convenient for the staff to replace the conveying roller 19.

[0040] The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each structure adopt conventional technical means such as mature bolt connections in the existing technology. Machinery, parts and equipment all adopt conventional models in the existing technology. The material of each component can be selected according to needs and is not limited here. The content not described in detail in this specification belongs to the existing technology known to professional and technical personnel in this field. Although the embodiments of the present invention have been shown and described, it can be understood by ordinary technicians in this field that various changes, modifications, substitutions and modifications can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A substrate conveying device for a flat-panel semiconductor display device manufacturing process, comprising a device body (1), characterized in that: The top end of the inner cavity of the device body (1) is connected to a flaw detector (2) via a movable structure; a conveying roller assembly is provided above the device body (1), and a supporting roller (5) is provided in the middle of the area between two adjacent conveying roller assemblies. The conveying roller assembly is of a split design, comprising a fixed portion (4) and a replaceable portion adapted to the fixed portion (4), the replaceable portion comprising a conveying roller (19), both ends of the conveying roller (19) being movably sleeved with a fixed sleeve (15), and the middle of the conveying roller (19) being movably connected to a transmission rod (21). One end of the transmission rod (21) away from the fixed portion (4) extends to the outside of the conveying roller assembly and is movably connected to a fixed disk (17). The fixed disk (17) and the adjacent fixed sleeve (15) are detachably connected. The middle part of the top of the fixed portion (4) is movably connected to a power input shaft (25). The middle part of the power input shaft (25) is provided with a transmission groove adapted to the transmission rod (21); the fixed portion (4), the fixed sleeve (15) away from the fixed portion (4) and the end of the support roller (5) are all connected to the device body (1) through a connecting structure.

2. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: The top of the conveying roller (19) and the top of the supporting roller (5) are at the same height.

3. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: The bottom of the fixing sleeve (15) is located above the bottom of the fixing portion (4); a supporting groove (26) is provided at the bottom end of the fixing portion (4); an inner cavity of the supporting groove (26) is movably connected to a supporting block (20); the supporting block (20) is connected to the fixing portion (4) via a first telescopic structure (22); when the supporting block (20) contacts the fixing sleeve (15), the supporting block (20) and the fixing sleeve (15) are in a state of magnetic attraction.

4. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: The inner cavity of the transmission groove is movably connected to a push rod (23), and the push rod (23) is connected to the power input shaft (25) via a second telescopic structure (24).

5. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: A slope (14) is provided at the top of the inner cavity of the device body (1) close to the fixing portion (4), and the distance between the top of the slope (14) and the outer wall of the device body (1) is the same as the thickness of the fixing portion (4).

6. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: The connection structure comprises a shift chain (8) movably connected to the device body (1), a fixed plate (3) in contact with the outer wall of the shift chain (8), an electromagnet (6) connected to the top of the fixed plate (3), and a fixed rod (7) movably connected to the bottom of the fixed plate (3), the shift chain (8) is provided on both sides of the top of the device body (1), the slot (11) adapted to the fixed rod (7) is provided on both sides of the top of the device body (1), the slot (11) is located below the shift chain (8), the top of the inner cavity of the slot (11) is provided with a clamping structure, and the fixed rod (7) is connected to the device body (1) through the clamping structure.

7. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 6, wherein: The electromagnet (6) contacts the outer side wall of the shift chain (8), and when the electromagnet (6) is in a powered state, the electromagnet (6) and the shift chain (8) are in a state of magnetic attraction.

8. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 6, wherein: The outer side of the fixing portion (4), the outer side of the fixing sleeve (15) away from the fixing portion (4), and both ends of the supporting roller (5) are all connected with fixing plates (3).

9. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: The support roller (5) comprises a first support roller and a support roller body evenly arranged on the outer ring of the first support roller; the conveying roller (19) comprises a second support roller and a conveying roller body evenly arranged on the outer ring of the second support roller, and the support roller body and the conveying roller body are arranged in an alternating manner.

10. The substrate conveying device for a flat-panel semiconductor display device manufacturing process according to claim 1, wherein: A waste residue conveying assembly (27) is provided at the bottom end of the inner cavity of the device body (1).

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