MEMS micro galvanometer initial mirror surface deflection angle test structure and method

Abstract

The invention provides an MEMS micro galvanometer initial mirror surface deflection angle test structure, which comprises a laser emission device, a displacement detection device, a standard reflector and a bearing frame, the standard reflector is placed in the bearing frame, and the laser emission device and the displacement detection device are oppositely mounted on the bearing frame. Laser emitted by the laser emitting device irradiates the standard reflector and is reflected to the view center of the displacement detection device to form a standard light path; replacing the standard reflecting mirror with a to-be-detected MEMS micro-vibrating mirror, emitting laser to the to-be-detected MEMS micro-vibrating mirror by a laser emitting device at the same angle, reflecting the laser to a displacement detection device, and recording the position of a light spot in a visual field; and calculating a mirror surface deflection angle through a formula, and screening unqualified products. The initial deflection angle of the mirror surface is tested by irradiating the mirror surface with laser, so that the measurement of the deflection angle of the initial mirror surface position of an optical motion device such as an MEMS micro galvanometer is realized, and the commercial application of a product is effectively promoted.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-electromechanical systems (MEMS), and in particular relates to a structure and method for testing the initial mirror deflection angle of a MEMS micro-vibration mirror. Background Art

[0002] A MEMS micro-vibration mirror is a precision optical component that primarily alters the optical path in optical link structures. When stationary, the angle between the mirror surface and the mounting plane is called the initial mirror deviation angle. This initial mirror deviation angle is caused by non-parallel bonding during assembly and the tolerances of individual components. Excessively large initial mirror deviation angles can cause the optical axis of the optical system to deviate from the center, affecting the adjustable range of the optical axis. In severe cases, the optical axis can significantly exceed the system's field of view, rendering it inoperable. Therefore, it is necessary to measure this initial deviation angle to screen out substandard components.

[0003] Coordinate measuring machines (CMMs) and optical measuring machines (OMMs) are commonly used for angle measurement. CMMs are contact measuring devices that use a test probe to contact the surface of an object to establish a three-dimensional virtual structure and estimate angle values. However, the mirror surface of a MEMS micro-vibration mirror is a moving mechanism, and probe contact will cause natural deflection, making measurement impossible. OMMs use cameras for non-contact measurement, which is suitable for plane measurement but has difficulty obtaining depth information. MEMS micro-vibration mirrors are usually tested for depth by flipping the workpiece, but the side will block the mirror surface, making it impossible to photograph the mirror surface. Therefore, it is not very suitable for moving devices such as MEMS micro-vibration mirrors. Therefore, a structure and method for testing the initial mirror deflection angle of a MEMS micro-vibration mirror is urgently needed to address the technical defects mentioned above. Summary of the Invention

[0004] The present invention aims to solve all or part of the problems of the above-mentioned prior art, and provides a structure and method for testing the initial mirror deflection angle of a MEMS micro-vibration mirror, wherein the laser is irradiated on the mirror to test the initial deflection angle of the mirror. The technical solution of the present invention is as follows: the initial deflection angle of the mirror is tested by irradiating the mirror with a laser, a standard reflector is placed in a supporting frame, and the laser emitted by a laser emitting device is irradiated on the standard reflector and reflected to the center of the field of view of a displacement detection device, forming a standard optical path. The standard reflector is replaced with the MEMS micro-vibration mirror to be tested, and the laser is emitted at the same angle to irradiate the center of the MEMS micro-vibration mirror to be tested, and the position of its reflected light spot in the field of view of the displacement detection device is recorded, and the deflection angle is calculated and determined.

[0005] The present invention provides a test structure for the initial mirror deflection angle of a MEMS micro-vibration mirror, comprising a laser emitting device, a displacement detection device, a standard reflector, and a supporting frame. The standard reflector is placed in the supporting frame, and the laser emitting device and the displacement detection device are mounted on the supporting frame opposite each other. The laser emitted by the laser emitting device irradiates the standard reflector and is reflected by the standard reflector to the center of the field of view of the displacement detection device, forming a standard optical path, thereby providing a benchmark for subsequent testing of the MEMS micro-vibration mirror.

[0006] The supporting frame is provided with a first opening and a second opening opposite to each other. The laser emitting device is installed at the first opening, and the displacement detecting device is installed at the second opening to ensure that the laser can be reflected into the field of view of the displacement detecting device.

[0007] The laser emitting device is installed in a connecting member, and the connecting member is installed at the first opening. The laser emitting device is installed to emit laser light toward the standard reflector.

[0008] The displacement detection device includes a PSD position sensitive sensor, which is embedded in a mounting member. The mounting member is mounted at the second opening, and the PSD position sensitive sensor is fixedly mounted to receive reflected light.

[0009] The supporting frame is made of an aluminum alloy material with a blackened surface treatment, and has the characteristics of light weight, high strength and corrosion resistance.

[0010] The shape of the supporting frame is an eccentric rhombus, a triangle or a square, and the shape of the supporting frame can be flexibly selected.

[0011] A testing method using a MEMS micro-vibration mirror initial mirror deflection angle testing structure includes the following steps: S1: placing a standard reflector at a testing position, a laser emitting device emitting laser light at a certain angle to illuminate the center of the standard reflector and reflecting it to the center of the field of view of a displacement detection device, forming a standard optical path; S2: replacing the standard reflector with a MEMS micro-vibration mirror to be tested, a laser emitting device emitting laser light at the same angle to illuminate the MEMS micro-vibration mirror to be tested and reflecting it to the displacement detection device, forming a test optical path, and recording the position of the light spot in the field of view; S3: calculating the mirror deflection angle using a formula and recording it, and subsequently adjusting the tooling used for assembling the MEMS micro-vibration mirror according to the calculated angle.

[0012] In S2 and S3, the laser incident angle is 15°-60°; the center positions of the MEMS micro-vibration mirror to be measured and the standard reflector are consistent, ensuring accurate angle measurement results.

[0013] In S4, the formula is The d xis the distance that the light spot is offset in the X direction, and d y is the distance that the light spot is offset in the Y direction, and h is the vertical distance from the laser irradiation point on the MEMS micro-vibration mirror to be measured to the light spot in the field of view of the displacement detection device.

[0014] Compared with the existing technology, the beneficial effects of the present invention are as follows: the initial deflection angle of the mirror is tested by irradiating the mirror with laser, a standard reflector is placed in a supporting frame, a laser emitting device and a displacement detection device are mounted on the supporting frame relative to each other, the laser emitted by the laser emitting device irradiates the standard reflector and reflects to the center of the field of view of the displacement detection device, forming a standard optical path, the standard reflector is replaced with the MEMS micro-vibration mirror to be tested, irradiated with the same laser, the position of the light spot on the displacement detection device is recorded, the deflection angle is calculated, and unqualified products are screened out. This enables convenient and accurate measurement of the initial mirror position deflection angle of optical motion devices such as MEMS micro-vibration mirrors, effectively promoting the commercial application of products. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 A schematic diagram of the test structure for the initial mirror deflection angle of the micro-vibration mirror provided by the present invention;

[0017] Figure 2 This is a schematic diagram of S1 of the present invention;

[0018] Figure 3 This is a schematic diagram of S2 of the present invention.

[0019] Reference numerals: 1-laser emitting device, 2-displacement detection device, 3-standard reflector, 4-carrying frame DETAILED DESCRIPTION

[0020] The following description and accompanying drawings fully illustrate specific embodiments of the present invention to enable those skilled in the art to practice them. Other embodiments may include structural, logical, electrical, process and other changes. The examples represent only possible variations. Unless clearly required, separate components and functions are optional, and the order of operation may vary. Parts and features of some embodiments may be included in or replace parts and features of other embodiments.

[0021] Example 1

[0022] like Figure 1As shown, this embodiment provides a MEMS micro-vibration mirror initial mirror deflection angle test structure, including a laser emitting device 1, a displacement detection device 2, a standard reflector 3 and a supporting frame 4.

[0023] The standard reflector 3 is placed in the supporting frame 4, and the laser emitting device 1 and the displacement detection device 2 are installed on the supporting frame 4 opposite to each other. The laser emitted by the laser emitting device 1 irradiates the standard reflector 3 and is reflected by the standard reflector 3 to the center of the field of view of the displacement detection device 2, forming a standard optical path, which provides a benchmark for the subsequent measurement of the deflection angle.

[0024] The supporting frame 4 is provided with a first opening and a second opening relative to each other, the laser emitting device 1 is installed at the first opening, and the displacement detection device 2 is installed at the second opening; the laser emitting device 1 is installed in the connecting part, and the connecting part is installed at the first opening; the displacement detection device 2 includes a PSD position sensitive sensor, the PSD position sensitive sensor is embedded in the mounting part, and the mounting part is installed at the second opening; the laser emitting device 1 emits laser which is reflected by the mirror to the displacement detection device 2.

[0025] The supporting frame 4 is made of aluminum alloy material with black surface treatment, which has the characteristics of light weight, high strength and corrosion resistance. The shape of the supporting frame 4 is eccentric rhombus, triangle or square, and the shape of the supporting frame can be flexibly selected.

[0026] Example 2

[0027] This embodiment provides a method for testing a structure using a MEMS micro-mirror initial mirror deflection angle test. Figure 2 、 Figure 3 As shown, the following steps are included: S1: The standard reflector 3 is placed at the detection position, and the laser emitting device 1 emits a laser at a certain angle to the center of the standard reflector 3 and reflects it to the center of the field of view of the displacement detection device 2, forming a standard optical path; S2: The standard reflector 3 is replaced with the MEMS micro-vibration mirror to be tested, and the laser emitting device 1 emits a laser at the same angle to the MEMS micro-vibration mirror to be tested and reflects it to the displacement detection device 2, forming a test optical path, and recording the position of the light spot in the field of view; S3: The angle of mirror deflection is calculated by a formula and recorded, and the tooling used to assemble the MEMS micro-vibration mirror is subsequently adjusted according to the calculated angle. In this embodiment, the displacement detection device 2 uses a PSD position sensitive sensor to automatically measure the light spot position, facilitating digital and automated integration.

[0028] The center positions of the MEMS micro-vibration mirror to be measured and the standard reflector 3 are aligned to ensure the accuracy of angle measurement. In S2 and S3, the laser incident angle is 15°-60°, which can be 22.5°, 30°, or 45°. In S3, the calculation formula is: d x is the distance the light spot is offset in the X direction, dy is the distance that the light spot is offset in the Y direction, and h is the vertical distance from the laser irradiation point on the MEMS micro-vibration mirror to be measured to the light spot in the field of view of the displacement detection device 2.

[0029] Example 3

[0030] Another embodiment of the testing method provided by the present invention uses a MEMS micro-vibration mirror initial mirror deflection angle testing structure. Different from Example 2, the displacement detection device 2 in Example 2 is a PSD position-sensitive sensor that automatically measures the light spot position. In this embodiment, the displacement detection device 2 uses standard-sized graph paper to manually measure the light spot offset. The rest is the same as Example 2.

[0031] Example 4

[0032] This embodiment provides a MEMS micro-vibration mirror package structure, including a MEMS micro-vibration mirror body, a housing, gold wires, and a PCB substrate. The housing comprises an upper shell and a lower shell. The upper shell has a laser aperture for illuminating the mirror surface with laser light. The MEMS micro-vibration mirror body and the PCB substrate are connected by gold wires. The lower shell and upper shell are tightly fitted together to form an inner cavity. The MEMS micro-vibration mirror body and the PCB substrate are bonded to the upper shell and located within the inner cavity.

[0033] It should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A MEMS micro-mirror initial mirror deflection angle test structure, characterized in that: The invention comprises a laser emitting device (1), a displacement detection device (2), a standard reflector (3) and a carrying frame (4); the standard reflector (3) is placed in the carrying frame (4); the laser emitting device (1) and the displacement detection device (2) are mounted on the carrying frame (4) opposite to each other; the laser emitted by the laser emitting device (1) irradiates the standard reflector (3) and is reflected by the standard reflector (3) to the center of the field of view of the displacement detection device (2), thereby forming a standard optical path.

2. The MEMS micro-mirror initial mirror deflection angle test structure according to claim 1, characterized in that: The supporting frame (4) is provided with a first opening and a second opening opposite to each other; the laser emitting device (1) is installed at the first opening; and the displacement detecting device (2) is installed at the second opening.

3. The MEMS micro-mirror initial mirror deflection angle test structure according to claim 2, characterized in that: The laser emitting device (1) is installed in a connecting piece, and the connecting piece is installed at the first opening.

4. The MEMS micro-mirror initial mirror deflection angle test structure according to claim 2, characterized in that: The displacement detection device (2) comprises a PSD position sensitive sensor, wherein the PSD position sensitive sensor is embedded in a mounting member, and the mounting member is mounted at the second opening.

5. The MEMS micro-mirror initial mirror deflection angle test structure according to claim 1, characterized in that: The supporting frame (4) is made of an aluminum alloy material with a blackened surface treatment.

6. The MEMS micro-mirror initial mirror deflection angle test structure according to claim 1, characterized in that: The shape of the supporting frame (4) is an eccentric rhombus, triangle or square.

7. A method for testing a structure for testing the initial mirror deflection angle using a MEMS micro-vibration mirror, characterized in that: The method comprises the following steps: S1: a standard reflector (3) is placed at a detection position, a laser emitting device (1) emits laser light at a certain angle to illuminate the center of the standard reflector (3) and reflects it to the center of the field of view of a displacement detection device (2), thereby forming a standard light path; S2: the standard reflector (3) is replaced with a MEMS micro-vibration mirror to be tested, the laser emitting device (1) emits laser light at the same angle to illuminate the MEMS micro-vibration mirror to be tested and reflects it to the displacement detection device (2), thereby forming a test light path and recording the position of the light spot in the field of view; and S3: the angle of mirror deflection is calculated by a formula and recorded.

8. The test method of claim 7 using a MEMS micro-vibration mirror initial mirror deflection angle test structure, characterized in that: In S1 and S2, the laser incident angle is 15°-60°.

9. The test method of claim 7 using a MEMS micro-vibration mirror initial mirror deflection angle test structure, characterized in that: The center positions of the mirror surfaces of the MEMS micro-vibration mirror to be tested and the standard reflector (3) are consistent.

10. The testing method of the MEMS micro-vibration mirror initial mirror deflection angle testing structure according to claim 7, characterized in that: In S3, the formula is The d x is the distance that the light spot is offset in the X direction, and d y is the distance that the light spot is offset in the Y direction, and h is the vertical distance from the laser irradiation point on the MEMS micro-vibration mirror to be measured to the light spot in the field of view of the displacement detection device (2).

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