Slit adjusting device and method for vacuum cavity

Abstract

The invention relates to the technical field of vacuum experiment equipment, and discloses a slit adjusting device and method for a vacuum cavity, and the device comprises a mounting rack which is connected with a vacuum housing; the lifting table is movably connected to the mounting frame, and the lifting table is driven to move in the height direction of the mounting frame through a lifting assembly; the experiment frame is provided with a material heating box, a slit integration assembly and a material experiment box, and the sealing plate is installed on the experiment frame and used for sealing the vacuum shell; the first driving assembly drives the baffle plate to move along the experiment frame and is used for preventing material steam from entering the material experiment box, and the second driving assembly drives the multi-layer slit plate to move along the experiment frame and is used for switching the positions of slit holes in the multi-layer slit plate and enabling the material steam to enter the material experiment box. The problems that in the prior art, vacuum experiment equipment is inflexible in material steam control and difficult to accurately adjust are solved, and therefore the accuracy and repeatability of experiments are improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum experimental equipment and discloses a slit adjustment device and method for a vacuum chamber. Background Art

[0002] During the testing and operation of vacuum devices, the reliability and maintainability of core components are crucial. Currently, when process problems arise with core components during testing, the test is often forced to stop, forcing operators to enter the furnace for maintenance. This maintenance method not only interrupts the test process but also makes it difficult to achieve the expected test results.

[0003] When conducting material experiments under a vacuum environment, on the one hand, an inlet is set between the feed box and the test box. During long-term testing, the inlet is prone to blockage, often forcing the test to be stopped and the operator to enter the furnace for inspection and cleaning, making it difficult to ensure the continuity of the test or operation; on the other hand, an inlet is set between the feed box and the test box. The control means for the test pieces passing through the inlet are relatively simple, and it is impossible to flexibly and effectively adjust the channel of the inlet into the experimental area according to the experimental requirements. It is also difficult to accurately control the flow rate of the inlet, resulting in poor accuracy and repeatability of the experiment, which limits the research and development of related experiments.

[0004] Therefore, there is an urgent need to design a slit adjustment device and method for a vacuum chamber to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a slit adjustment device and method for a vacuum chamber to solve the problem in the prior art that vacuum experimental equipment is inflexible and difficult to accurately adjust the material vapor, thereby improving the accuracy and repeatability of the experiment.

[0006] In order to achieve the above technical effects, the technical solution adopted by the present invention is: a slit adjustment device for a vacuum chamber, comprising:

[0007] a mounting frame, to which a vacuum housing is connected;

[0008] The lifting platform is slidably connected to the mounting frame and is driven to move along the height direction of the mounting frame through the lifting assembly;

[0009] The experimental equipment is movably connected to the lifting platform and is moved into the vacuum shell by the lifting assembly. The experimental equipment includes an experimental frame, on which are installed, from top to bottom, a material heating box, a slit integrated assembly, and a material experimental box. The material heating box is used to heat the experimental piece to generate material vapor, and the material experimental box is used to store the material vapor for testing;

[0010] Sealing plate, installed on the experimental frame, used to seal the vacuum shell;

[0011] The slit integrated assembly includes a shielding plate and a multi-layer slit plate and a first drive assembly and a second drive assembly, wherein the first drive assembly and the second drive assembly are both connected to the vacuum housing via a mounting plate, and the shielding plate and the multi-layer slit plate are both movably connected to the experimental frame, and the slit plate is provided with at least two slit holes;

[0012] The first driving component drives the shielding plate to move along the experimental rack to prevent material vapor from entering the material experimental box, and the second driving component drives the multi-layer slit plate to move along the experimental rack to switch the position of the slit holes on the multi-layer slit plate to allow material vapor to enter the material experimental box.

[0013] As a preferred embodiment, it also includes:

[0014] A cooling plate is installed on the experimental frame. The cooling plate is provided with a cooling pipe and a cooling medium is passed through the cooling plate to cool the material experimental box;

[0015] A cooling installation track is installed on the experimental frame. The cooling installation track is provided with a track groove, which is used to install the baffle and the multi-layer slit plate. A cooling pipe is provided in the track groove, and a cooling medium is passed through it to cool the baffle and the multi-layer slit plate.

[0016] As a preferred embodiment, the lifting assembly includes:

[0017] A guide rail is fixedly connected to the mounting frame, and the guide rail is slidably connected to the lifting platform;

[0018] A lifting screw is rotatably connected to the mounting frame, and the lifting screw is threadedly connected to the lifting platform;

[0019] The lifting motor is used to drive the lifting screw to rotate.

[0020] As a preferred embodiment, the first drive assembly includes:

[0021] a first propulsion plate, slidably connected to the inner side wall of the mounting plate, wherein a first baffle is mounted on the first propulsion plate for driving the shielding plate;

[0022] a first lead screw rotatably connected to the mounting plate, wherein the first lead screw is threadedly connected to the first propulsion plate;

[0023] The first magnetohydrodynamic sealing cylinder and the first motor are both mounted on the mounting plate, and the first lead screw is driven to rotate via the magnetohydrodynamic sealing cylinder.

[0024] As a preferred embodiment, the second drive assembly includes:

[0025] a second propulsion plate, slidably connected to the inner side wall of the mounting plate, wherein a second baffle is mounted on the second propulsion plate for driving the multi-layer slit plate;

[0026] a second lead screw, rotatably connected to the mounting plate, wherein the second lead screw is threadedly connected to the second propulsion plate;

[0027] The second magnetohydrodynamic sealing cylinder and the second motor are both installed on the mounting plate, and the second lead screw is driven to rotate through the two magnetohydrodynamic sealing cylinders.

[0028] A slit adjustment method for a vacuum chamber, comprising:

[0029] The lifting platform is driven to move along the height direction of the mounting frame by the lifting assembly, and the experimental equipment movably connected to the lifting platform is moved into the vacuum shell;

[0030] The test piece is heated by a material heating box to generate material vapor;

[0031] When it is necessary to prevent material vapor from entering the material test box, the shielding plate is driven by the first driving component to move along the test frame to block the passage of material vapor from entering the material test box;

[0032] When the material vapor needs to enter the material test box, the second driving component drives the multi-layer slit plate to move along the test frame, switches the different slit hole positions on the multi-layer slit plate, and allows the material vapor to enter the material test box through the selected slit hole.

[0033] As a preferred embodiment, during the experiment, the cooling medium is introduced through the cooling pipe on the cooling plate to cool the material test box; at the same time, the cooling medium is introduced through the cooling pipe in the cooling installation track groove to cool the baffle plate and the multi-layer slit plate.

[0034] As a preferred embodiment, the method of driving the lifting platform to move along the height direction of the mounting frame by the lifting assembly specifically includes:

[0035] The lifting motor drives the lifting screw to rotate. Since the lifting screw is threadedly connected to the lifting platform, and the guide rail is slidably connected to the lifting platform for guidance, the lifting platform is driven to move along the height direction of the mounting frame.

[0036] As a preferred embodiment, the method of driving the shielding plate to move along the experimental frame by the first driving assembly specifically includes:

[0037] The first motor drives the first screw to rotate. Since the first screw is threadedly connected to the first propulsion plate, and the first propulsion plate is slidably connected to the inner wall of the mounting plate, the first propulsion plate is driven to move along the inner wall of the mounting plate, and then the shielding plate is driven to move along the experimental frame through the first baffle on the first propulsion plate.

[0038] As a preferred embodiment, the method of driving the multi-layer slit plate to move along the experimental frame by the second driving component specifically includes:

[0039] The second motor drives the second lead screw to rotate. Since the second lead screw is threadedly connected to the second propulsion plate, and the second propulsion plate is slidably connected to the inner wall of the mounting plate, the second propulsion plate is driven to move along the inner wall of the mounting plate, and then the multi-layer slit plate is driven to move along the experimental frame through the second baffle on the second propulsion plate.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] 1. The present invention, by providing structures such as a lifting assembly and a slit integrated assembly, can flexibly move the experimental equipment into the vacuum shell, and accurately control the channel and flow rate of material vapor entering the material experimental box, thereby improving the accuracy and repeatability of the experiment.

[0042] 2. The setting of cooling plates and cooling mounting rails ensures the temperature stability of the equipment during the experiment, avoids adverse effects on experimental results due to excessive temperature, and further improves the reliability of the experiment.

[0043] 3. Each drive component adopts a screw drive method, which has the advantages of high transmission accuracy and good stability. It can achieve precise control of the baffle, multi-layer slit plate and lifting platform, meeting the high-precision requirements of the experiment for material vapor control. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0045] Figure 2 It is a schematic diagram of the experimental component structure of the present invention;

[0046] Figure 3 This is a schematic structural diagram of the first drive assembly of the present invention;

[0047] Figure 4 This is a schematic structural diagram of the second drive assembly of the present invention;

[0048] Figure 5 This is a schematic diagram of the cooperation between the shielding plate and the slit plate and the cooling installation track of the present invention;

[0049] Figure 6This is a schematic diagram of the cooperation between the shielding plate and the slit plate and the first baffle and the second baffle of the present invention.

[0050] Reference numerals:

[0051] 1. Mounting frame;

[0052] 2. Vacuum shell;

[0053] 3. Lifting platform; 31. Lifting assembly; 301. Guide rail; 302. Lifting screw; 303. Lifting motor;

[0054] 4. Experimental stand; 41. Material heating box; 42. Slit integrated assembly; 402. Shielding plate; 403. Slit plate; 4031. Slit hole; 404. First drive assembly; 4041. First propulsion plate; 4042. First baffle; 4043. First lead screw; 4044. First magnetohydrodynamic sealing cylinder; 4045. First motor; 405. Second drive assembly; 4051. Second propulsion plate; 4052. Second baffle; 4053. Second lead screw; 4054. Second magnetohydrodynamic sealing cylinder; 4055. Second motor; 43. Material experimental box; 44. Sealing plate; 45. Mounting plate;

[0055] 5. Cooling plate;

[0056] 6. Cooling installation track; 61. Track groove. DETAILED DESCRIPTION

[0057] The present invention will be described in further detail below with reference to the embodiments and accompanying drawings. However, this should not be construed as limiting the scope of the present invention to the following embodiments, as all technologies implemented based on the present invention fall within the scope of the present invention.

[0058] In Example 1, the present invention provides a slit adjustment device for a vacuum chamber, the specific structure of which is as follows:

[0059] refer to Figure 1 , the overall structure, the device includes a mounting frame 1, the mounting frame 1 is connected to a vacuum shell 2, providing a vacuum environment for the experiment; a lifting platform 3 is slidably connected to the mounting frame 1, and the lifting platform 3 is moved along the height direction of the mounting frame 1 through a lifting component 31; the experimental equipment is movably connected to the lifting platform 3, and the experimental equipment can be moved into the vacuum shell 2 through the lifting component 31, so as to perform experimental operations in a vacuum environment. In addition, a sealing plate 44 is also installed on the experimental frame 4 to achieve sealing with the vacuum shell 2 to ensure the sealing of the vacuum chamber.

[0060] refer to Figure 3 、 4, 5, 6, Experimental equipment structure: The experimental equipment includes an experimental frame 4, on which are mounted, from top to bottom, a material heating box 41, a slit integrated assembly 42, and a material experimental box 43. The material heating box 41 is used to heat the experimental pieces to generate material vapor, providing the material vapor source required for the experiment; the material experimental box 43 is used to store material vapor for testing and is the main area where the experiment takes place; the slit integrated assembly 42 includes a shielding plate 402 and a multi-layer slit plate 403, as well as a first drive assembly 404 and a second drive assembly 405. The first drive assembly 404 and the second drive assembly 405 are both connected to the vacuum housing 2 via a mounting plate 45. The shielding plate 402 and the multi-layer slit plate 403 are both movably connected to the experimental frame 4, and the slit plate 403 is provided with at least two slit holes 4031. The first drive component 404 is used to drive the baffle plate 402 to move along the experimental rack 4, thereby blocking the material vapor from entering the material experimental box 43; the second drive component 405 is used to drive the multi-layer slit plate 403 to move along the experimental rack 4, thereby switching the position of the slit hole 4031 on the multi-layer slit plate 403, so that the material vapor can enter the material experimental box 43 according to the experimental requirements.

[0061] refer to Figure 2 、 5 6. Cooling structure: In order to ensure the stability of the equipment and the accuracy of the experimental results during the experiment, a cooling plate 5 and a cooling installation rail 6 are also provided. The cooling plate 5 is installed on the experimental frame 4. A cooling pipe is provided on the cooling plate 5, and a cooling medium can be passed into it to cool the material experimental box 43; the cooling installation rail 6 is also installed on the experimental frame 4. A rail groove 61 is provided on the cooling installation rail 6. The rail groove 61 is used to install the baffle plate 402 and the multi-layer slit plate 403, and a cooling pipe is provided in the rail groove 61. After the cooling medium is passed into it, the baffle plate 402 and the multi-layer slit plate 403 can be cooled.

[0062] refer to Figure 1 Lifting assembly 31 structure: Lifting assembly 31 includes a guide rod, a lifting screw 302, and a lifting motor 303. The guide rod is fixedly connected to the mounting frame 1 and slidably connected to the lifting platform 3, providing guidance and ensuring the stability of the movement of the lifting platform 3. The lifting screw 302 is rotatably connected to the mounting frame 1 and threadedly connected to the lifting platform 3. Its rotation drives the movement of the lifting platform 3. The lifting motor 303 is used to drive the lifting screw 302 to rotate, providing power for the movement of the lifting platform 3.

[0063] refer to Figure 3, first drive assembly 404: The first drive assembly 404 includes a first propulsion plate 4041, a first lead screw 4043, a first magnetohydrodynamic sealing cylinder 4044 and a first motor 4045. The first propulsion plate 4041 is slidably connected to the inner wall of the mounting plate 45, on which a first baffle 4042 is mounted for driving the baffle 402. The first lead screw 4043 is rotatably connected to the mounting plate 45 and is threadedly connected to the first propulsion plate 4041. The first magnetohydrodynamic sealing cylinder 4044 and the first motor 4045 are both mounted on the mounting plate 45. The first lead screw 4043 is driven to rotate by the first magnetohydrodynamic sealing cylinder 4044, thereby driving the first propulsion plate 4041 to move, thereby driving the baffle 402.

[0064] refer to Figure 4 , Second drive assembly 405: The second drive assembly 405 has a similar structure to the first drive assembly 404, and includes a second propulsion plate 4051, a second lead screw 4053, a second magnetohydrodynamic sealing cylinder 4054, and a second motor 4055. The second propulsion plate 4051 is slidably connected to the inner side wall of the mounting plate 45, on which a second baffle 4052 is mounted for driving the multi-layer slit plate 403. The second lead screw 4053 is rotatably connected to the mounting plate 45 and is threadedly connected to the second propulsion plate 4051. The second magnetohydrodynamic sealing cylinder 4054 and the second motor 4055 are both mounted on the mounting plate 45. The second lead screw 4053 is driven to rotate by the second magnetohydrodynamic sealing cylinder 4054, thereby driving the second propulsion plate 4051 to move, thereby driving the multi-layer slit plate 403.

[0065] When in use, select a flat and stable laboratory bench, fix the mounting frame 1 vertically on the laboratory bench, ensure that the mounting frame 1 is in a horizontal state, and tightly connect the vacuum shell 2 to the mounting frame 1 with bolts. Use a sealing rubber ring to fill the gap during the connection process to ensure the sealing of the vacuum shell 2.

[0066] Fix the guide rail 301 vertically along the height of the mounting frame 1. Use a level to calibrate the verticality of the guide rail 301 to ensure that the error is within the allowable range. Rotatably connect the lifting screw 302 to the preset positions at the top and bottom of the mounting frame 1 via bearings to ensure smooth rotation of the lifting screw 302. Install the lifting motor 303, rigidly connect its output shaft to the lifting screw 302 through a coupling, and connect the motor's power cord and control circuit.

[0067] Install the material heating box 41, slit integrated assembly 42, and material test box 43 on the experimental rack 4 in sequence, ensuring each component is securely installed and positioned accurately. Install the sealing plate 44 around the edge of the experimental rack 4, ensuring it fits snugly against the vacuum housing 2. Connect the experimental rack 4 to the lifting platform 3 via sliding rails, ensuring smooth sliding of the experimental rack 4 on the lifting platform 3.

[0068] Secure the first drive assembly 404 and the second drive assembly 405 to the vacuum housing 2 via the mounting plate 45, ensuring a tight connection and accurate installation. Slidingly connect the shielding plate 402 and the multi-layer slit plate 403 to the track groove 61 of the cooling mounting track 6 on the experimental rack 4 via sliders. Adjust the position of the shielding plate 402 and the multi-layer slit plate 403 so that they can slide flexibly within the track groove 61.

[0069] Cooling structure installation: Install cooling plate 5 on test stand 4, exposing the cooling pipe connections on cooling plate 5 for easy connection. Lay the cooling pipe in track groove 61 of cooling mounting track 6 and connect it to the cooling pipe on cooling plate 5 using joints, ensuring a tight connection without leaks. Connect the cooling pipe inlet and outlet to the external cooling medium supply system.

[0070] Turn on the power and start the lifting motor 303. Observe whether the lifting platform 3 can move smoothly along the height direction of the mounting frame 1. Check for any problems such as jamming or abnormal noise during the lifting process. Use a vacuum detector to check the sealing of the vacuum shell 2 to ensure that the vacuum chamber meets the vacuum requirements for the experiment. Test the first drive assembly 404 and the second drive assembly 405. By controlling the first motor 4045 and the second motor 4055, observe whether the shielding plate 402 and the multi-layer slit plate 403 can move normally. Adjust the parameters of the drive assembly to ensure its driving accuracy and stability.

[0071] Example 2: Based on the above-mentioned slit adjustment device, the present invention further provides a slit adjustment method for a vacuum chamber, and the specific steps are as follows:

[0072] Equipment in place: The lifting platform 3 is driven by the lifting assembly 31 to move along the height direction of the mounting frame 1, and the experimental equipment movably connected to the lifting platform 3 is moved into the vacuum shell 2. At the same time, the sealing plate 44 is sealed with the vacuum shell 2 to ensure the sealing of the vacuum chamber and create a good vacuum environment for the experiment.

[0073] Material vapor generation: The test piece is heated by the material heating box 41 to generate material vapor, thereby providing material vapor conditions for subsequent experiments.

[0074] Material vapor blocking: When it is necessary to block material vapor from entering the material test box 43 , the first driving component 404 drives the shielding plate 402 to move along the test rack 4 to block the passage of material vapor into the material test box 43 , thereby preventing material vapor from entering the material test box 43 .

[0075] Material vapor entry: When it is necessary to allow material vapor to enter the material test box 43, the second drive component 405 drives the multi-layer slit plate 403 to move along the test frame 4, switching the positions of different slit holes 4031 on the multi-layer slit plate 403, so that the material vapor enters the material test box 43 through the selected slit hole 4031, thereby realizing the control of the material vapor entry channel and flow rate.

[0076] Cooling control: During the experiment, the cooling medium is introduced through the cooling pipe on the cooling plate 5 to cool the material experimental box 43; at the same time, the cooling medium is introduced through the cooling pipe in the track groove 61 of the cooling installation track 6 to cool the baffle plate 402 and the multi-layer slit plate 403 to ensure that the experimental equipment operates under appropriate temperature conditions.

[0077] Specific driving method: When the lifting assembly 31 drives the lifting platform 3 to move, the lifting motor 303 is used to drive the lifting screw 302 to rotate. Since the lifting screw 302 is threadedly connected to the lifting platform 3, and the guide rod is slidably connected to the lifting platform 3 for guidance, the lifting platform 3 is driven to move along the height direction of the mounting frame 1; when the first driving assembly 404 drives the shielding plate 402 to move, the first motor 4045 drives the first screw 4043 to rotate. Since the first screw 4043 is threadedly connected to the first propulsion plate 4041, and the first propulsion plate 4041 is slidably connected to the inner wall of the mounting plate 45, the first propulsion plate 4041 is driven to rotate. It moves along the inner wall of the mounting plate 45, and then drives the shielding plate 402 to move along the experimental frame 4 through the first baffle 4042 on the first propulsion plate 4041; when the second driving component 405 drives the multi-layer slit plate 403 to move, the second motor 4055 drives the second lead screw 4053 to rotate. Since the second lead screw 4053 is threadedly connected to the second propulsion plate 4051, and the second propulsion plate 4051 is slidingly connected to the inner wall of the mounting plate 45, the second propulsion plate 4051 is driven to move along the inner wall of the mounting plate 45, and then the multi-layer slit plate 403 is driven to move along the experimental frame 4 through the second baffle 4052 on the second propulsion plate 4051.

[0078] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A slit adjustment device for a vacuum chamber, characterized in that: include: A mounting frame (1), wherein a vacuum housing (2) is connected to the mounting frame (1); A lifting platform (3) is movably connected to the mounting frame (1), and is driven by a lifting assembly (31) to move along the height direction of the mounting frame (1); An experimental assembly is movably connected to a lifting platform (3), and is moved into a vacuum housing (2) by a lifting assembly (31). The experimental assembly includes an experimental rack (4), and a material heating box (41), a slit integrated assembly (42), and a material experimental box (43) are sequentially installed on the experimental rack (4) from top to bottom. The material heating box (41) is used to heat the experimental piece to generate material vapor, the slit integrated assembly (42) is used to limit the diffusion of the material vapor to form a fixed shape or range, and the material experimental box (43) is used to test the diffused material vapor; A sealing plate (44) is mounted on the experimental frame (4) and is used to seal the vacuum housing (2); The slit integrated component (42) comprises a shielding plate (402) and a multi-layer slit plate (403) as well as a first drive component (404) and a second drive component (405); the first drive component (404) and the second drive component (405) are both connected to the vacuum housing (2) via a mounting plate (45); the shielding plate (402) and the multi-layer slit plate (403) are both movably connected to the experimental frame (4); and the slit plate (403) is provided with at least two slit holes (4031); The shielding plate (402) is driven by the first driving component (404) to move along the experimental rack (4) to prevent material vapor from entering the material experimental box (43); the multi-layer slit plate (403) is driven by the second driving component (405) to move along the experimental rack (4) to switch the position of the slit hole (4031) on the multi-layer slit plate (403) to allow material vapor to enter the material experimental box (43).

2. The slit adjustment device for a vacuum chamber according to claim 1, characterized in that: Also includes: A cooling plate (5) is installed on the experimental frame (4), wherein a cooling pipe is provided on the cooling plate (5) and a cooling medium is introduced therein to cool the material experimental box (43); A cooling installation track (6) is installed on the experimental frame (4); a track groove (61) is provided on the cooling installation track (6); the track groove (61) is used to install the shielding plate (402) and the multi-layer slit plate (403); a cooling pipe is provided in the track groove (61), and a cooling medium is passed through the cooling pipe to cool the shielding plate (402) and the multi-layer slit plate (403).

3. The slit adjustment device for a vacuum chamber according to claim 2, characterized in that: The lifting assembly (31) comprises: A guide rail (301) is fixedly connected to the mounting frame (1), and the guide rail (301) is slidably connected to the lifting platform (3); A lifting screw (302) is rotatably connected to the mounting frame (1), and the lifting screw (302) is threadedly connected to the lifting platform (3); The lifting motor (303) is used to drive the lifting screw (302) to rotate.

4. The slit adjustment device for a vacuum chamber according to claim 3, characterized in that: The first drive assembly (404) includes: A first push plate (4041) is slidably connected to the inner wall of the mounting plate (45), and a first baffle (4042) is mounted on the first push plate (4041) for connecting to and driving the shielding plate (402); A first lead screw (4043) is rotatably connected to the mounting plate (45), wherein the first lead screw (4043) is threadedly connected to the first propulsion plate (4041); The first magnetohydrodynamic sealing cylinder (4044) and the first motor (4045) are both mounted on the mounting plate (45). The magnetohydrodynamic sealing cylinder drives the first lead screw (4043) to rotate, thereby realizing external power drive.

5. The slit adjustment device for a vacuum chamber according to claim 4, characterized in that: The second drive assembly (405) comprises: A second propulsion plate (4051) is slidably connected to the inner wall of the mounting plate (45), and a second baffle (4052) is mounted on the second propulsion plate (4051) for driving the multi-layer slit plate (403); A second lead screw (4053) is rotatably connected to the mounting plate (45), and the second lead screw (4053) is threadedly connected to the second propulsion plate (4051); The second magnetic fluid dynamic sealing cylinder (4054) and the second motor (4055) are both mounted on the mounting plate (45), and the second lead screw (4053) is driven to rotate via the two magnetic fluid dynamic sealing cylinders.

6. A slit adjustment method for a vacuum chamber, characterized in that: Applied to the slit adjustment device for a vacuum chamber according to any one of claims 1 to 5, the method comprises: The lifting platform (3) is driven to move along the height direction of the mounting frame (1) by the lifting assembly (31), and the experimental assembly movably connected to the lifting platform (3) is moved into the vacuum housing (2). At the same time, the sealing plate (44) is sealed with the vacuum housing (2); The test piece is heated by a material heating box (41) to generate material vapor from the test piece; When it is necessary to prevent material vapor from entering the material test box (43), the shielding plate (402) is driven by the first driving component (404) to move along the test rack (4) to block the passage of material vapor from entering the material test box (43); When it is necessary to allow material vapor to enter the material test box (43), the second driving component (405) drives the multi-layer slit plate (403) to move along the test frame (4), and switches the positions of different slit holes (4031) on the multi-layer slit plate (403), so that the material vapor can enter the material test box (43) according to the selected slit hole (4031), thereby solving the problem of slit blockage and improving the test time.

7. The slit adjustment method for a vacuum chamber according to claim 6, characterized in that: During the experiment, a cooling medium is introduced through the cooling pipe on the cooling plate (5) to cool the material experimental box (43); at the same time, a cooling medium is introduced through the cooling pipe in the track groove (61) of the cooling installation track (6) to cool the multi-layer slit plate (403) to prevent the heating of the material heating box (41) and the material vapor from affecting the performance.

8. The slit adjustment method for a vacuum chamber according to claim 7, characterized in that: The method of driving the lifting platform (3) to move along the height direction of the mounting frame (1) by the lifting assembly (31) specifically includes: The lifting screw (302) is driven to rotate by the lifting motor (303). Since the lifting screw (302) is threadedly connected to the lifting platform (3), and the guide rail (301) is slidably connected to the lifting platform (3) for guidance, the lifting platform (3) is driven to move along the height direction of the mounting frame (1).

9. The slit adjustment method for a vacuum chamber according to claim 8, characterized in that: The method of driving the shielding plate (402) to move along the experimental frame (4) by the first driving component (404) specifically includes: The first lead screw (4043) is driven to rotate by the first motor (4045). Since the first lead screw (4043) is threadedly connected to the first propulsion plate (4041), and the first propulsion plate (4041) is slidably connected to the inner wall of the mounting plate (45), the first propulsion plate (4041) is driven to move along the inner wall of the mounting plate (45), and then the shielding plate (402) is driven to move along the experimental frame (4) through the first baffle (4042) on the first propulsion plate (4041).

10. The slit adjustment method for a vacuum chamber according to claim 9, characterized in that: The method of driving the multi-layer slit plate (403) to move along the experimental frame (4) by the second driving component (405) specifically includes: The second lead screw (4053) is driven to rotate by the second motor (4055). Since the second lead screw (4053) is threadedly connected to the second propulsion plate (4051), and the second propulsion plate (4051) is slidably connected to the inner wall of the mounting plate (45), the second propulsion plate (4051) is driven to move along the inner wall of the mounting plate (45), and then the multi-layer slit plate (403) is driven to move along the experimental frame (4) through the second baffle (4052) on the second propulsion plate (4051).

Images