Tackifier dosage monitoring method and device, gluing and developing equipment and storage medium

Abstract

The invention discloses a tackifier dosage monitoring method and device, gluing and developing equipment and a storage medium, and belongs to the technical field of photolithography. The method comprises the following steps: judging whether a tackifier coating unit runs or not; when sheet running of the tackifier coating unit is detected, the sheet running number of the tackifier coating unit is obtained; when sheet running of the tackifier coating unit is detected, the unit spraying amount of the tackifier corresponding to each sheet running of the tackifier coating unit is obtained; and determining the use amount of the tackifier in the liquid storage tank according to the sheet running number and the tackifier unit spraying amount. According to the invention, the quantity of the running sheets is combined with the dosage of the tackifier, so that accurate monitoring of the dosage of the tackifier is realized, and when the liquid level sensor in the liquid storage tank is abnormal or the liquid level calibration is wrong, the abnormal dosage of the tackifier can be found in time, and subsequent products are prevented from passing goods under the condition of insufficient flow of the tackifier, so that the safety of the products is ensured.

Description

Technical Field

[0001] The present application relates to the field of photolithography technology, and in particular to a method and device for monitoring the amount of a tackifier, a coating and developing device, and a computer-readable storage medium. Background Art

[0002] In the photolithography process, to improve the photoresist coating, the wafer surface is treated with a hydrophobic treatment in the adhesion unit of the coating and development equipment. The material used in this process is a tackifier (HMDS, hexamethyldisilazane). The tackifier is generally introduced via vapor phase and adsorbed on the wafer surface, changing its hydrophilicity to hydrophobicity. If the tackifier concentration or dosage is insufficient, the hydrophobicity of the wafer surface will also be inconsistent, resulting in uneven photoresist coating, which in turn leads to increased product defects and yield loss.

[0003] Current coating and developing equipment only features a liquid level sensor at the reservoir location within the thickener pipeline. When the sensor detects that the thickener level in the reservoir falls below a threshold, it triggers refill. If the level sensor malfunctions or the level calibration is incorrect, the machine will not be able to detect it in time, and the reservoir will not be refilled. Subsequent products may be shipped without sufficient thickener flow, creating a high risk and difficult to detect in a short period of time. Therefore, how to promptly detect abnormal thickener usage is a technical problem currently facing those skilled in the art. Summary of the Invention

[0004] The purpose of this application is to provide a method, device, coating and developing equipment and computer-readable storage medium for monitoring the amount of thickener, so as to avoid the problem of increased product defects and yield loss due to insufficient thickener dosage by timely monitoring the amount of thickener.

[0005] To achieve the above objectives, the present application provides a method for monitoring the amount of tackifier, comprising:

[0006] Determine whether the adhesion promoter coating unit is running;

[0007] When it is detected that the tackifier coating unit is running, the number of films running by the tackifier coating unit is obtained;

[0008] When it is detected that the tackifier coating unit is running, the unit spray volume of the tackifier coating unit corresponding to each running of the tackifier coating unit is obtained;

[0009] The amount of the thickener in the liquid storage tank is determined according to the number of films run and the unit spray volume of the thickener.

[0010] Optionally, determining the amount of the tackifier in the liquid storage tank according to the number of films run and the unit spray volume of the tackifier includes:

[0011] The amount of thickener in the liquid storage tank is determined based on the current cumulative amount of thickener, the number of films run and the unit spray volume of the thickener; the current cumulative amount of thickener is the amount of thickener obtained after the films are run for a preset time, based on the number of films run and the unit spray volume of the thickener within the preset time period.

[0012] Optionally, the step of determining whether the tackifier coating unit has failed to apply the film includes:

[0013] The log file generated on the machine side during film running can be used to determine whether the adhesion promoter coating unit has run the film.

[0014] Optionally, obtaining the number of films run by the tackifier coating unit includes:

[0015] The number of films run by the tackifier coating unit is obtained through a log file generated on the machine side when the films are run.

[0016] Optionally, obtaining the unit spray volume of the tackifier corresponding to each film run of the tackifier coating unit includes:

[0017] The unit spray volume of the tackifier corresponding to each sheet run of the tackifier coating unit is obtained through a flow meter at the machine end.

[0018] Optionally, after determining the amount of the viscosity enhancer in the liquid storage tank, the method further includes:

[0019] determining the remaining amount of the thickener in the liquid storage tank according to the amount of the thickener used;

[0020] When it is detected that the remaining amount of the viscosity enhancer reaches a threshold value, it is determined whether the viscosity enhancer in the liquid storage tank is replenished normally.

[0021] Optionally, after determining whether the viscosity enhancer in the liquid storage tank is replenished normally, the method further includes:

[0022] When it is detected that the viscosity enhancer in the liquid storage tank is replenished normally, the obtained viscosity enhancer usage amount is reset to zero;

[0023] When it is detected that the viscosity enhancer in the liquid storage tank is not replenished normally, an alarm mechanism is triggered to prompt that the viscosity enhancer replenishment is abnormal.

[0024] Optionally, the determining whether the viscosity enhancer in the liquid storage tank is replenished normally includes:

[0025] By monitoring whether the pressure pump issues an instruction to deliver the viscosity enhancer into the liquid storage tank, it is determined whether the viscosity enhancer in the liquid storage tank is replenished normally.

[0026] To achieve the above objectives, the present application also provides a device for monitoring the amount of a tackifier, comprising:

[0027] The first judgment module is used to judge whether the tackifier coating unit has run out of film;

[0028] a first data acquisition module, configured to acquire the number of films run by the tackifier coating unit when detecting that the tackifier coating unit has run films;

[0029] a second data acquisition module, configured to acquire a unit spray volume of the tackifier corresponding to each film run of the tackifier coating unit when detecting that the tackifier coating unit is running;

[0030] The dosage determination module is used to determine the dosage of the viscosity enhancer in the liquid storage tank according to the number of films run and the unit spray volume of the viscosity enhancer.

[0031] To achieve the above-mentioned purpose, the present application also provides a coating and developing device, comprising:

[0032] memory for storing computer programs;

[0033] A processor is configured to implement the steps of any of the above-described methods for monitoring the amount of tackifier when executing the computer program.

[0034] To achieve the above objectives, the present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the method for monitoring the amount of tackifier as described in any one of the above are implemented.

[0035] The present application provides a method for monitoring the amount of a tackifier, including: determining whether a tackifier coating unit is running; when it is detected that the tackifier coating unit is running, obtaining the number of runs of the tackifier coating unit; when it is detected that the tackifier coating unit is running, obtaining the unit spray volume of the tackifier corresponding to each run of the tackifier coating unit; and determining the amount of tackifier in a liquid storage tank based on the number of runs and the unit spray volume of the tackifier.

[0036] Obviously, the present application combines the number of films run with the amount of thickener used, achieving accurate monitoring of the amount of thickener used. When an abnormality occurs in the liquid level sensor in the liquid storage tank or the liquid level calibration is incorrect, abnormal thickener usage can be detected in a timely manner to avoid the subsequent products from being shipped under conditions of insufficient thickener flow, thereby ensuring product safety. By adding the above-mentioned software monitoring method on the machine side and working in parallel with the liquid level sensor in the liquid storage tank, it can effectively prevent mistakes, thereby reducing the distortion of the thickener amount caused by hardware damage or human negligence. The present application also provides a thickener dosage monitoring device, a glue coating and developing device, and a computer-readable storage medium, which have the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without any creative work.

[0038] Figure 1 A flow chart of a method for monitoring the amount of a tackifier provided in an embodiment of the present application;

[0039] Figure 2 A schematic flow chart of a method for monitoring the amount of a tackifier provided in an embodiment of the present application;

[0040] Figure 3 This is a structural block diagram of a device for monitoring viscosity enhancer dosage provided in an embodiment of the present application. DETAILED DESCRIPTION

[0041] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0042] Please refer to Figure 1 , Figure 1 A flowchart of a method for monitoring the amount of a tackifier provided in an embodiment of the present application, the method may include:

[0043] S101: Determine whether the tackifier coating unit is running.

[0044] This embodiment does not limit the specific method for determining whether the tackifier coating unit has failed to run. This method may include, but is not limited to, determining whether the tackifier coating unit has failed to run based on the log file generated on the machine side during the run. It should be noted that because the operating data of the tackifier coating unit is recorded on the machine side in the form of a log file, whether the tackifier coating unit has failed to run can be directly determined based on the log file generated on the machine side during the run. This method is easy to implement and does not require additional hardware, which reduces design difficulty and avoids overly complex machines.

[0045] S102: When it is detected that the tackifier coating unit is running, the number of films running by the tackifier coating unit is obtained.

[0046] It should be noted that the number of wafers run refers to the number of silicon wafers coated by the adhesion promoter coating unit.

[0047] This embodiment does not limit the specific method for obtaining the number of films run by the tackifier coating unit, and may include, but is not limited to, obtaining the number of films run by the tackifier coating unit from the log file generated by the machine during film running. It should be noted that because the log file generated by the machine during film running records various operating data such as the operation status, alarm information, and operation information of the tackifier coating unit, the number of films run by the tackifier coating unit can be directly extracted from the log file generated by the machine during film running.

[0048] It should be noted that the coating and developing equipment may include multiple liquid storage tanks, each of which may correspond to multiple tackifier coating units. In this case, the number of films run by each tackifier coating unit corresponding to each liquid storage tank must be counted.

[0049] S103: When it is detected that the tackifier coating unit is running, the unit spray volume of the tackifier corresponding to each running of the tackifier coating unit is obtained.

[0050] It should be noted that the unit spray amount of the adhesion promoter refers to the amount of adhesion promoter used to coat a silicon wafer.

[0051] This embodiment is not limited to obtaining the unit spray volume of the tackifier coating unit corresponding to each film run, and may include but is not limited to obtaining the unit spray volume of the tackifier coating unit corresponding to each film run through a flow meter on the machine end.

[0052] S104: Determine the amount of thickener in the liquid storage tank according to the number of films run and the unit spray volume of the thickener.

[0053] Furthermore, to simplify calculations, step S104 in this embodiment may include determining the amount of thickener in the reservoir based on the current cumulative amount of thickener used, the number of films run, and the unit spray volume of the thickener. The current cumulative amount of thickener is the amount of thickener obtained after a preset film run time, based on the number of films run and the unit spray volume of the thickener within a preset time period. It should be noted that the current cumulative amount of thickener used is recorded at regular intervals, and subsequent amounts can be accumulated based on the previous record, eliminating the need to recalculate from scratch each time, thereby simplifying calculations.

[0054] Furthermore, after step S104, this embodiment may also: determine the remaining amount of thickener in the liquid storage tank based on the thickener usage; and when it is detected that the remaining amount of thickener has reached a threshold, determine whether the thickener in the liquid storage tank is being replenished normally. It should be noted that when it is detected that the remaining amount of thickener has reached the threshold, it indicates that the liquid storage tank needs to be replenished with thickener. This embodiment adds the step of determining whether the thickener in the liquid storage tank is being replenished normally when it is detected that the remaining amount of thickener has reached the threshold. This can be used to monitor the rehydration status of the liquid storage tank and promptly detect abnormal rehydration conditions.

[0055] This embodiment does not limit the specific operations after determining whether the thickener in the liquid storage tank is replenished normally. The specific subsequent operations can be determined according to actual needs. For example, when it is detected that the thickener in the liquid storage tank is replenished normally, the obtained thickener usage can be reset to zero; when it is detected that the thickener in the liquid storage tank is not replenished normally, an alarm mechanism can be triggered to indicate that the thickener replenishment is abnormal.

[0056] This embodiment does not limit the specific method of determining whether the viscosity enhancer in the liquid storage tank is replenished normally, and may include but is not limited to determining whether the viscosity enhancer in the liquid storage tank is replenished normally by monitoring whether the pressure pump issues an instruction to transport the viscosity enhancer into the liquid storage tank.

[0057] Based on the above-mentioned embodiments, this application combines the number of films run with the amount of thickener used, achieving precise monitoring of the thickener amount. This allows for timely detection of abnormal thickener usage in the event of an abnormality in the liquid level sensor within the liquid storage tank or a level calibration error, thereby preventing subsequent products from being shipped due to insufficient thickener flow, thereby ensuring product safety. By adding the aforementioned software monitoring method on the machine side, operating in parallel with the liquid level sensor within the liquid storage tank, effective error prevention can be achieved, thereby reducing distortion of the thickener amount caused by hardware damage or human negligence.

[0058] The following is a specific example to illustrate the above-mentioned tackifier dosage monitoring process. Please refer to Figure 2 , Figure 2 This is a flow chart of a method for monitoring the amount of a tackifier provided in an embodiment of the present application. The specific process is as follows:

[0059] 1. Use the log file generated on the machine side during film running to determine whether the viscosity enhancer coating unit corresponding to the liquid storage tank is running;

[0060] 2. If not, return to step 1;

[0061] If so, the number of films run by the tackifier coating unit is obtained from the log file generated on the machine side during film running; the unit spray volume of the tackifier coating unit corresponding to each film run is obtained from the flow meter on the machine side; the amount of tackifier in the liquid storage tank is determined based on the current cumulative amount of tackifier used, the number of films run, and the unit spray volume of tackifier;

[0062] 3. Determine the remaining amount of thickener in the liquid storage tank based on the amount of thickener used, and judge whether the remaining amount of thickener reaches the threshold;

[0063] 4. If not, return to step 1;

[0064] If so, it is determined whether the thickener in the liquid storage tank is replenished normally by monitoring whether the pressure pump issues an instruction to deliver the thickener to the liquid storage tank;

[0065] 5. If yes, clear the obtained amount of tackifier; after clearing, return to step 1;

[0066] If not, the alarm mechanism is triggered to indicate that the thickener refill is abnormal and requires timely processing by engineers.

[0067] The following is an introduction to a tackifier dosage monitoring device, a glue coating and developing device, and a computer-readable storage medium provided in an embodiment of the present application. The tackifier dosage monitoring device, the glue coating and developing device, and the computer-readable storage medium described below can be referenced to each other with the tackifier dosage monitoring method described above.

[0068] Please refer to Figure 3 , Figure 3 This is a structural block diagram of a device for monitoring the amount of a tackifier provided in an embodiment of the present application. The device may include:

[0069] The first judgment module 100 is used to judge whether the tackifier coating unit has run out of film;

[0070] The first data acquisition module 200 is used to acquire the number of films run by the tackifier coating unit when it is detected that the tackifier coating unit runs;

[0071] The second data acquisition module 300 is used to acquire the unit spray volume of the tackifier corresponding to each film run of the tackifier coating unit when it is detected that the tackifier coating unit runs the film;

[0072] The dosage determination module 400 is used to determine the dosage of the thickener in the liquid storage tank according to the number of films run and the unit spray volume of the thickener.

[0073] Based on the above-mentioned embodiments, this application combines the number of films run with the amount of thickener used, achieving precise monitoring of the thickener amount. This allows for timely detection of abnormal thickener usage in the event of an abnormality in the liquid level sensor within the liquid storage tank or a level calibration error, thereby preventing subsequent products from being shipped due to insufficient thickener flow, thereby ensuring product safety. By adding the aforementioned software monitoring method on the machine side, operating in parallel with the liquid level sensor within the liquid storage tank, effective error prevention can be achieved, thereby reducing distortion of the thickener amount caused by hardware damage or human negligence.

[0074] Based on the above embodiment, the dosage determination module 400 is specifically used to determine the dosage of the thickener in the liquid storage tank according to the current cumulative dosage of the thickener, the number of films run and the unit spray volume of the thickener; the current cumulative dosage of the thickener is the dosage of the thickener obtained after the preset time of running the film in advance, based on the number of films run and the unit spray volume of the thickener in the preset time period.

[0075] Based on the above embodiments, the first judgment module 100 is specifically configured to judge whether the tackifier coating unit has run the film according to the log file generated on the machine side during the film running.

[0076] Based on the above embodiments, the first data acquisition module 200 is specifically configured to obtain the number of films run by the tackifier coating unit through a log file generated on the machine side during film running when the tackifier coating unit is detected to be running.

[0077] Based on the above embodiments, the second data acquisition module 300 is specifically used to obtain the unit spray volume of the tackifier coating unit corresponding to each film run through the flow meter on the machine side when the film run of the tackifier coating unit is detected.

[0078] Based on the above embodiments, the device for monitoring the amount of tackifier may further include:

[0079] The remaining amount determination module 500 is used to determine the remaining amount of the thickener in the liquid storage tank according to the amount of the thickener used;

[0080] The second judgment module 600 is used to judge whether the viscosity enhancer in the liquid storage tank is replenished normally when it is detected that the viscosity enhancer remaining amount reaches a threshold value.

[0081] Based on the above embodiments, the device for monitoring the amount of tackifier may further include:

[0082] A dosage reset module 700 is used to reset the acquired dosage of the thickener when it is detected that the thickener in the liquid storage tank is replenished normally;

[0083] The alarm module 800 is used to trigger an alarm mechanism when it is detected that the viscosity enhancer in the liquid storage tank is not replenished normally, so as to prompt that the viscosity enhancer replenishment is abnormal.

[0084] Based on the above embodiments, the second judgment module 600 is specifically used to determine whether the viscosity enhancer in the liquid storage tank is normally replenished by monitoring whether the pressure pump issues an instruction to transport the viscosity enhancer to the liquid storage tank when it is detected that the viscosity enhancer remaining amount reaches a threshold.

[0085] Based on the above embodiments, the present application further provides a coating and developing device comprising: a memory and a processor, wherein the memory is configured to store a computer program; and the processor is configured to implement the steps of the tackifier dosage monitoring method described in each of the above embodiments when executing the computer program. Of course, the coating and developing device may also include various necessary network interfaces, a power supply, and other components.

[0086] The present application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for monitoring the amount of tackifier described in each of the above embodiments. The storage medium may include: a USB flash drive, a mobile hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, among other media capable of storing program code.

[0087] Specific examples are used herein to illustrate the principles and implementation methods of the present application, and the various embodiments are in a progressive relationship. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the devices disclosed in the embodiments, please refer to the corresponding method section description. The description of the above embodiments is only used to help understand the method of the present application and its core idea. For ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

[0088] It should also be noted that, in this specification, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or device comprising the element.

Claims

1. A method for monitoring the amount of a tackifier, characterized in that: include: Determine whether the adhesion promoter coating unit is running; When it is detected that the tackifier coating unit runs a film, obtaining the number of films run by the tackifier coating unit; When it is detected that the tackifier coating unit is running, obtaining the unit spray volume of the tackifier corresponding to each running of the tackifier coating unit; The amount of the thickener in the liquid storage tank is determined according to the number of films run and the unit spray volume of the thickener.

2. The method for monitoring the amount of tackifier according to claim 1, wherein: The method of determining the amount of the thickener in the liquid storage tank according to the number of films run and the unit spray volume of the thickener includes: The amount of thickener in the liquid storage tank is determined based on the current cumulative amount of thickener, the number of films run and the unit spray volume of the thickener; the current cumulative amount of thickener is the amount of thickener obtained after the films are run for a preset time, based on the number of films run and the unit spray volume of the thickener within the preset time period.

3. The method for monitoring the amount of tackifier according to claim 1, wherein: The determining whether the tackifier coating unit is running includes: The log file generated on the machine side during film running can be used to determine whether the adhesion promoter coating unit has run the film.

4. The method for monitoring the amount of tackifier according to claim 1, wherein: The obtaining of the number of films run by the tackifier coating unit includes: The number of films run by the tackifier coating unit is obtained through a log file generated on the machine side when the films are run.

5. The method for monitoring the amount of tackifier according to claim 1, wherein: The step of obtaining the unit spray volume of the tackifier corresponding to each film run of the tackifier coating unit includes: The unit spray volume of the tackifier corresponding to each sheet run of the tackifier coating unit is obtained through a flow meter at the machine end.

6. The method for monitoring the amount of tackifier according to any one of claims 1 to 5, characterized in that: After determining the amount of the viscosity enhancer in the liquid storage tank, the method further includes: determining the remaining amount of the thickener in the liquid storage tank according to the amount of the thickener used; When it is detected that the remaining amount of the viscosity enhancer reaches a threshold value, it is determined whether the viscosity enhancer in the liquid storage tank is replenished normally.

7. The method for monitoring the amount of tackifier according to claim 6, wherein: After determining whether the viscosity enhancer in the liquid storage tank is replenished normally, the method further includes: When it is detected that the viscosity enhancer in the liquid storage tank is replenished normally, the obtained viscosity enhancer usage amount is reset to zero; When it is detected that the viscosity enhancer in the liquid storage tank is not replenished normally, an alarm mechanism is triggered to prompt that the viscosity enhancer replenishment is abnormal.

8. The method for monitoring the amount of tackifier according to claim 6, wherein: The determining whether the viscosity enhancer in the liquid storage tank is replenished normally includes: By monitoring whether the pressure pump issues an instruction to deliver the viscosity enhancer into the liquid storage tank, it is determined whether the viscosity enhancer in the liquid storage tank is replenished normally.

9. A device for monitoring the amount of tackifier, characterized in that: include: The first judgment module is used to judge whether the tackifier coating unit has run out of film; a first data acquisition module, configured to acquire the number of films run by the tackifier coating unit when detecting that the tackifier coating unit has run films; A second data acquisition module is configured to acquire a unit spray volume of the tackifier corresponding to each film run of the tackifier coating unit when detecting that the tackifier coating unit is running; The dosage determination module is used to determine the dosage of the viscosity enhancer in the liquid storage tank according to the number of films run and the unit spray volume of the viscosity enhancer.

10. A coating and developing device, characterized in that: include: memory for storing computer programs; A processor, configured to implement the steps of the method for monitoring the amount of tackifier according to any one of claims 1 to 8 when executing the computer program.

11. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method for monitoring the amount of tackifier according to any one of claims 1 to 8 are implemented.

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