A metal base combined high-strength getter

Abstract

The application relates to the field of getters, and discloses a metal base combined high-strength getter, which comprises a Kovar alloy base, a titanium alloy component fixed on the Kovar alloy base, and a titanium-zirconium getter material fixedly connected with the titanium alloy component. The titanium metal base of the application can be connected with the getter material, so that the overall strength of the getter is improved, and the getter can resist a large amount of vibration requirements. The titanium alloy surface of the application does not release gas, and the Kovar alloy surface slowly releases gas under vacuum. In a vacuum device, the use of the gas-releasing material is reduced as much as possible, which helps maintain the vacuum.

Description

Technical Field

[0001] This invention relates to the field of getters, and more particularly to a high-strength getter with a metal base. Background Technology

[0002] With the continuous development of science and technology, the requirements for vacuum degree of vacuum devices are also getting higher and higher. The residual active gas inside the vacuum device has a very adverse effect on its service life and stability. Whether the device can maintain a high vacuum state inside for a long time directly determines the life and stability of the vacuum device.

[0003] Getters are functional products that can effectively absorb active gases (H2, O2, CO2, etc.) in low-pressure operating environments. They can achieve an active state by being vacuum-insulated at a certain temperature for a period of time. If they are inside a vacuum device, they can absorb residual gases and gases that have leaked or permeated into the device, allowing the vacuum device to quickly obtain ultra-high vacuum or extremely high vacuum without the need for a vacuum pump or other vacuum system, and maintain this vacuum state for a long time.

[0004] Getter materials, as one of the three key materials in vacuum packaging, are essential for maintaining the effectiveness and safe operation of vacuum devices. After packaging, the chip and the packaged casing slowly release intergranular gas, which severely affects the effective vacuum level within the detector, thereby impacting signal acquisition and reducing signal quality. The role of getter materials is to absorb this gas and ensure an effective vacuum level.

[0005] Currently, getters are widely used in vacuum devices required by industries such as aerospace, defense, security monitoring, forest fire prevention, and medical examination. Therefore, the requirements for getters are extremely strict. It is necessary to ensure that the getter absorbs residual gas while maintaining high strength. Otherwise, the shedding or falling off of the getter may cause arcing in the vacuum device, signal distortion, or the inability to detect the signal. Therefore, it is particularly important to ensure both high getter performance and high strength.

[0006] The existing technology uses Kovar alloy as a metal support frame and sintersects the getter onto the metal support frame. This technology increases the strength of the getter to a certain extent, but it does not solve the fundamental problem of the getter not bonding with the metal base. Therefore, the strength improvement is limited and the problem of getter strength cannot be completely solved. Summary of the Invention

[0007] The main objective of this invention is to solve the technical problem in the prior art where getters cannot maintain their integrity and shed powder under large-scale vibrations. A high-strength getter with a metal base assembly comprises:

[0008] Kovar alloy base; titanium alloy component, the titanium alloy component being fixed on the Kovar alloy base; titanium-zirconium-based air-getting material, the titanium-zirconium-based air-getting material being fixedly connected to the titanium alloy component.

[0009] As a preferred technical solution, the Kovar alloy base consists of a Kovar alloy chassis and a base connecting part, wherein the Kovar alloy chassis has a circular through hole; the base connecting part is connected to the Kovar alloy chassis and is used for connection with titanium alloy.

[0010] As a preferred technical solution, the titanium alloy component has a titanium alloy connecting part that matches the base connecting part.

[0011] As a preferred technical solution, the titanium alloy connecting part of the base connection part is connected by an internal thread, and the internal thread structure is destroyed by bottom laser welding.

[0012] As a preferred technical solution, the connection method between the base connecting part and the titanium alloy connecting part is one or more of the following: brazing, tenon and mortise, adhesive, and internal thread.

[0013] As a preferred technical solution, the Kovar alloy chassis is provided with multiple waist-shaped grooves.

[0014] As a preferred technical solution, the titanium alloy component includes an upper cylinder, a support platform, and a lower cylinder. The lower cylinder is provided with a titanium alloy connecting part, and the support platform is disposed between the upper cylinder and the lower cylinder. The titanium alloy component as a whole has a circular through hole, and the titanium-zirconium-based air-absorbing material is disposed outside the upper cylinder and above the support platform.

[0015] As a preferred technical solution, the outer surface of the upper cylinder is provided with multiple protruding structures.

[0016] As a preferred technical solution, the protruding structure is one or more of the following: circular point, conical point, triangle, and rhombus.

[0017] As a preferred technical solution, the titanium-zirconium-based air-absorbing material is a cylindrical body with an internal circular through hole.

[0018] The present invention has the following beneficial effects:

[0019] The titanium metal base of the present invention can be connected with the getter material, thereby improving the overall strength of the getter and thus resisting large-scale vibration requirements.

[0020] The titanium alloy surface of this invention does not release gas, while the Kovar alloy surface will slowly release gas under vacuum. In vacuum devices, minimizing the use of outgassing materials helps to maintain vacuum. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a titanium alloy component provided in an embodiment of the present invention.

[0022] Figure 2 This is a schematic diagram of the Kovar alloy base provided in an embodiment of the present invention.

[0023] Figure 3 This is a schematic diagram of the structure of the Kovar alloy base and titanium alloy assembly provided in an embodiment of the present invention.

[0024] Figure 4 This is a schematic diagram of the structure of the metal base combined high-strength getter provided in an embodiment of the present invention.

[0025] Figure 5 The figures show the results of the vibration intensity comparison experiment. The top figure is the random vibration spectrum (RMS 20.3g), the bottom left figure is the titanium alloy component of the present invention, and the bottom right figure is the component using Kovar alloy instead of titanium alloy.

[0026] Figure 6 The figures show the results of random vibration experiments. The top figure is the random vibration spectrum (RMS 15.7 g), the bottom left figure is the titanium alloy component of the present invention, and the bottom right figure is the component using Kovar alloy instead of titanium alloy.

[0027] Figure 7 The graphs show the test results of mechanical properties and structural strength. The upper graph is the functional vibration spectrum (RMS 15.7g), which is the titanium alloy component of this invention. The lower right graph shows the component using Kovar alloy instead of titanium alloy.

[0028] Figure 8 The figures show the results of the impact performance test. The top figure is the functional impact spectrum (RMS 20 g), the bottom left figure is the titanium alloy component of the present invention, and the bottom right figure is the component using Kovar alloy instead of titanium alloy.

[0029] Figure 9 A comparative diagram of the bonding surfaces of the first getter and the metal base;

[0030] Figure 10 A comparative diagram of the bonding surfaces of the second getter and the metal base;

[0031] Figure 11 A comparative diagram of the bonding surfaces of the third getter and the metal base;

[0032] Figure 12 For comparison of the outgassing rate of the first type of metal;

[0033] Figure 13 For comparison of the outgassing rate of the second type of metal;

[0034] Figure 14 The third type of metal is used for gas release rate comparison.

[0035] The attached figures are labeled as follows:

[0036] Kovar alloy base 1;

[0037] Titanium alloy component 2;

[0038] Titanium-zirconium getter material 3; Electrode wire 31;

[0039] Kovar alloy chassis 11, base connecting part 12, waist-shaped groove 13;

[0040] Titanium alloy connecting part 21, upper cylinder 22, support platform 23, lower cylinder 24;

[0041] Protrusion structure 221. Detailed Implementation

[0042] The terms "first," "second," "third," "fourth," etc. (if present) in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in a sequence other than that illustrated or described herein.

[0043] The getter of the present invention refers to an integral vacuum getter structure containing getter material.

[0044] Existing bases, to maintain consistency with the infrared encapsulation metal shell material, are made of Kovar alloy 4J29. Kovar alloy is primarily composed of Fe-Ni-Co, while the getter is a titanium-zirconium alloy. These two metals cannot bond during high-temperature sintering. Infrared encapsulation metal shells are typically used for infrared detection and guidance, often requiring exposure to extremely high levels of vibration. The getter needs to maintain its structural integrity and prevent powder shedding under such vibration. Therefore, if a getter made of Kovar alloy is used, the lack of bonding between the getter and the Kovar alloy could lead to detachment and powder shedding under such high-level vibration. Our designed structure leverages the advantages of combining titanium and Kovar alloys. Through brazing, laser welding, threading, and snap-fit ​​connections, the Kovar alloy and titanium alloy are joined. This ensures both the welding of the Kovar alloy portion to the metal shell and the connection between the getter and the titanium alloy portion. This retains the advantages of existing technologies while improving their strength limitations, thus meeting the requirements for high-level vibration.

[0045] For ease of understanding, the specific process of the embodiments of the present invention is described below. Please refer to [link / reference]. Figure 1 The first embodiment of the metal base combined high-strength getter in this invention includes:

[0046] A Kovar alloy base; a titanium alloy component fixed to the Kovar alloy base; and a titanium-zirconium getter material fixedly connected to the titanium alloy component. Kovar alloy is a nickel-based alloy with a low coefficient of thermal expansion and good weldability. It is mainly composed of iron, nickel, and cobalt, with iron making up the majority, while nickel and cobalt account for 29% and 17%, respectively.

[0047] This invention primarily involves sintering a getter material onto the surface of a titanium alloy, then connecting it to a Kovar alloy via threads. Finally, laser welding is used to lock the threads, thus integrating the Kovar alloy and titanium alloy components into a single unit. The titanium alloy is mainly connected to the getter portion; the getter and titanium alloy are sintered together to fix the getter to the titanium alloy. The Kovar alloy portion is mainly connected to the infrared encapsulation shell via laser welding, thus fixing it within the metal shell. Connections between the titanium alloy and Kovar alloy can be made via brazing, laser welding, threads, or snap-fit, but are not limited to these methods.

[0048] In a preferred embodiment, the Kovar alloy base consists of a Kovar alloy chassis and a base connecting part, wherein the Kovar alloy chassis has a circular through hole; the base connecting part is connected to the Kovar alloy chassis and is used for connection with titanium alloy.

[0049] In a preferred embodiment, the titanium alloy assembly has a titanium alloy connecting part that matches the base connecting part. The connection method of the titanium alloy connecting part of the base connecting part is internal thread, and the internal thread structure is disrupted by bottom laser welding. The connection method between the base connecting part and the titanium alloy connecting part is one or more of brazing, tenon and mortise, adhesive, and internal thread. The Kovar alloy chassis is provided with multiple waist-shaped grooves.

[0050] The Kovar alloy base serves as the basic support structure and is matched with the infrared encapsulation metal shell (usually made of Kovar alloy), achieving hermetic sealing through laser welding.

[0051] The Kovar alloy chassis provides main support and features a central circular through-hole (allowing gas to flow to the air-absorbing material).

[0052] The waist-shaped groove is used to guide the environment at both ends of the intake material.

[0053] The base connection connects to the titanium alloy components (e.g., via threads / brazing / mortise and tenon joints) to achieve integration of dissimilar metal structures.

[0054] In a preferred embodiment, the titanium alloy assembly includes an upper cylinder, a support platform, and a lower cylinder. The lower cylinder is provided with a titanium alloy connecting portion, and the support platform is disposed between the upper and lower cylinders. The titanium alloy assembly as a whole has a circular through hole, and the titanium-zirconium based air-absorbing material is disposed outside the upper cylinder and above the support platform. In a preferred embodiment, the outer surface of the upper cylinder is provided with multiple protrusions. In a preferred embodiment, the protrusions are one or more of the following: circular dots, conical dots, triangles, and rhombuses.

[0055] The titanium alloy component is metallurgically bonded to a titanium-zirconium-based getter material through high-temperature sintering, solving the strength problem of traditional Kovar alloys not bonding with getters; the titanium alloy surface does not release gas, maintaining vacuum. The titanium alloy of this invention can also use pure titanium, primarily TA2, but TB-type (such as TB11) and TC-type (such as TC4) can also be used.

[0056] Titanium alloy connecting part: Matches the base connecting part, and achieves permanent locking by laser welding the bottom to destroy the threads, resisting high-level vibration.

[0057] The upper cylinder features a raised structure (including circular / conical / triangular / rhomboid shapes) to increase the contact area between the titanium alloy and the gas-absorbing material, preventing it from falling off after sintering; it also provides vibration resistance, suppressing the shedding of gas-absorbing material during vibration.

[0058] Support platform: Supports titanium-zirconium-based gas-absorbing materials and provides a sintering base surface.

[0059] Lower cylinder: Connects to the titanium alloy connector, serving as a heat insulation component.

[0060] In a preferred embodiment, the titanium-zirconium-based getter material is a cylindrical body with an internal circular through-hole. The titanium-zirconium-based getter material is the core functional material, absorbing residual active gases within the vacuum device and maintaining an ultra-high vacuum environment. The cylindrical design maximizes the specific surface area, improving gas adsorption efficiency; it aligns with the through-hole of the titanium alloy component to form a gas flow path, wherein the electrode wire passes through the titanium-zirconium-based getter material.

[0061] Vibration intensity comparison experiment

[0062] The purpose of this experiment is to evaluate the ability of a sample to maintain all its intended functions and performance without damage under various environmental conditions it may encounter during storage, transportation, and use throughout its lifespan. The mechanical properties and structural strength of the test sample under vibration are assessed to determine whether they meet design requirements. Experimental conditions are shown in Table 1. Standard: GJB1027A-2020 "Test Requirements for Launch Vehicles, Upper Stages and Spacecraft".

[0063] Table 1

[0064]

[0065] method

[0066] 1) Visually inspect the appearance and structure of the sample at room temperature before the test;

[0067] 2) Conduct random vibration tests on the sample in the X, Y, and Z directions according to the requirements of the test conditions;

[0068] 3) After the test, visually inspect the appearance and structure of the sample at room temperature.

[0069] See results Figure 5 As can be seen, the titanium alloy components used are not easily damaged.

[0070] Random vibration experiment

[0071] Experimental objective: To assess whether the mechanical properties and structural strength of the test sample under vibration meet the design requirements. Experimental conditions are shown in Table 2. Standard: GJB 1027A-2020 "Test Requirements for Launch Vehicles, Upper Stages and Spacecraft".

[0072] Table 2

[0073]

[0074] method

[0075] 1) Visually inspect the appearance and structure of the sample at room temperature before the test;

[0076] 2) Conduct random vibration tests on the sample in the X, Y, and Z directions according to the requirements of the test conditions;

[0077] 3) After the test, visually inspect the appearance and structure of the sample at room temperature.

[0078] See results Figure 6 As can be seen, the titanium alloy components used are not easily damaged.

[0079] Mechanical properties and structural strength tests

[0080] The test is conducted to assess whether the mechanical properties and structural strength of the test sample under vibration meet the design requirements. Test conditions are shown in Table 3. Standard: GJB 150.16A-2009 "Laboratory Environmental Testing Methods for Military Equipment - Part 16: Vibration Test".

[0081] Table 3

[0082]

[0083] Note: This test was conducted at twice the functional vibration value.

[0084] See results Figure 7 As can be seen, the titanium alloy components used are not easily damaged.

[0085] Impact Functional Experiment

[0086] Experimental Objective

[0087] The test is conducted to assess whether the mechanical properties and structural strength of the test sample under impact meet the design requirements. The test conditions are shown in Table 4, and the standard is GJB 150.18A-2009 "Laboratory Environmental Test Methods for Military Equipment - Part 18: Impact Test".

[0088] Table 4

[0089]

[0090] See results Figure 8 As can be seen, the titanium alloy components used are not easily damaged.

[0091] The present invention compares the titanium alloy component with a Kovar alloy alternative to the titanium alloy component, combining surface comparison and outgassing rate comparison, see appendix. Figure 9-11 . Figure 9 , 12 Zirconium vanadium iron getter is used. Figure 10 , 13 Titanium molybdenum getter is used. Figure 11 , 14 The getter used is zirconium-titanium-vanadium-aluminum.

[0092] The present invention combines titanium alloy with getter material and uses Kovar-titanium alloy mechanical locking structure to solve the problem of powder shedding / falling off of traditional getters during vibration.

[0093] The titanium alloy of this invention does not release gas, and Kovar alloy is only used for tube shell welding, thereby reducing the sources of gas release inside the device.

[0094] The waist-shaped groove of the present invention promotes gas diffusion, and the through-holes of the cylindrical gas-absorbing material can accelerate the gas adsorption kinetics process.

[0095] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-strength getter with a metal base assembly, characterized in that, The getter includes: Kovar alloy base; A titanium alloy component, which is fixed to the Kovar alloy base; A titanium-zirconium-based air-getting material, wherein the titanium-zirconium-based air-getting material is fixedly connected to the titanium alloy component by sintering; The titanium alloy assembly includes an upper cylinder, a support platform, and a lower cylinder. The lower cylinder is provided with a titanium alloy connecting part. The support platform is located between the upper cylinder and the lower cylinder. The titanium alloy assembly has a circular through hole. The titanium-zirconium-based air-absorbing material is located outside the upper cylinder and above the support platform.

2. The metal base combined high-strength getter according to claim 1, characterized in that, The Kovar alloy base consists of a Kovar alloy chassis and a base connecting part. The Kovar alloy chassis has a circular through hole. The base connecting part is connected to the Kovar alloy chassis and is used for connection with titanium alloy.

3. The metal base combined high-strength getter according to claim 2, characterized in that, The titanium alloy component has a titanium alloy connector that matches the base connector.

4. The metal base combined high-strength getter according to claim 3, characterized in that, The connection between the base connecting part and the titanium alloy connecting part is an internal thread, and the internal thread structure is destroyed by bottom laser welding.

5. A metal-based composite high-strength getter according to claim 3, characterized in that, The connection between the base connecting part and the titanium alloy connecting part is one or more of the following: brazing, mortise and tenon joint, adhesive, and internal thread.

6. A metal-based composite high-strength getter according to claim 2, characterized in that, The Kovar alloy chassis is provided with multiple waist-shaped grooves.

7. A high-strength getter with a metal base as described in claim 1, characterized in that, The outer surface of the upper cylinder is provided with multiple protruding structures.

8. A metal-based composite high-strength getter according to claim 7, characterized in that, The protruding structure is one or more of the following: circular point, conical point, triangle, and rhombus.

9. A metal-based composite high-strength getter according to claim 1, characterized in that, The titanium-zirconium-based air-absorbing material is a cylindrical body with an internal circular through-hole.

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