A control system for a silicon carbide molecular pump

Abstract

The application relates to the technical field of molecular pump control, and discloses a control system for a silicon carbide molecular pump, which comprises a control module and a power module, the power module comprises a transmission circuit, a first current control circuit, a second current control circuit and an output circuit, the transmission circuit is connected with the output circuit through a transformer T3, the transmission circuit is connected with the second current control circuit through a transformer T2, the transmission circuit is connected with the first current control circuit through L0 points and N2 points, the first current control circuit is connected with the second current control circuit through an output point vdr, the transformer T3 is connected with the transformer T2, and the transformer T3 is connected with a capacitor C7, a resistor R3 and a resistor R4 in parallel. The capacitor C7, the resistor R3 and the resistor R4 can store electric energy, the magnetic permeability of the transformer T3 is increased, the overall power of the transformer T3 is reduced, the magnetic core volt-second balance is realized, the overall power is further reduced, and the heat emission of the controller is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of molecular pump control, in particular to a control system for a silicon carbide molecular pump. BACKGROUND

[0002] In the field of control of silicon carbide molecular pumps, a controller is needed to control the working state of the molecular pump, such as the on-off of the molecular pump; most existing molecular pump controllers are provided with a fan for reducing the temperature of the controller during operation to avoid excessive temperature of the controller, but in the field of silicon carbide molecular pumps, a large amount of silicon carbide powder is floating in the working site of the molecular pump, and the controller will enter the interior of the controller through the fan port thereon during long-term use, and the silicon carbide powder will adhere to the control circuit board, affecting the service life of the controller; if the fan port is cancelled, the controller will lack heat dissipation, causing the working temperature of the control circuit board to be too high, also reducing the service life of the controller. SUMMARY

[0003] To solve the above problems, the technical scheme adopted by the present application is as follows:

[0004] A control system for a silicon carbide molecular pump, comprising a control module and a power module, the control module being connected with the power module, the control module being used for controlling the molecular pump, and the power module providing electric energy for the control module,

[0005] The power module comprises a delivery circuit, a first current control circuit, a second current control circuit and an output circuit, the delivery circuit being connected with the output circuit through a transformer T3, the delivery circuit being connected with the second current control circuit through a transformer T2, the delivery circuit being provided with an L0 point and an N2 point and being connected with the first current control circuit through the L0 point and the N2 point, the first current control circuit being provided with an output point vdr and being connected with the second current control circuit through the output point vdr, the transformer T3 being connected with the transformer T2, and the transformer T3 being connected in parallel with a capacitor C7, a resistor R3 and a resistor R4.

[0006] Further, the first current control circuit comprises a current control chip U2, the L0 point is connected with a common mode inductor T1 and a diode D1 in sequence, the N2 point is connected with a thermal sensitive RT3, a common mode inductor T1 and a diode D4 in sequence, the diode D1 and the diode D4 are connected in parallel and connected with a VCC interface of the current control chip U2, and the VCC interface is further connected with a resistor R16 in sequence, the resistor R16 is connected with an input point of a transformer T4 in parallel, an output point of the transformer T4 is connected with a diode D8, an inductor L3 and a resistor R2 in sequence, the diode D8 is connected with a resistor R20 and a capacitor C36 in parallel, a capacitor C41 is connected in parallel between the diode D8 and the inductor L3 and provided with an FBVdr+ output point, the inductor L3 and the resistor R2 are connected with a capacitor C42 in parallel and provided with an REFVdr output point, and the resistor R2 is provided with a Vdr output point.

[0007] Further, the REFVdr output point is connected with a resistor R71, a diode D27 and an indicator lamp D28 in sequence.

[0008] Further, the second current control circuit comprises a current control chip U0, the Vdr output point is connected with a VIN interface and a VCC interface of the current control chip U0 respectively for power supply of the current control chip U0, a BOUT interface and an AOUT interface of the current control chip U0 are connected with an input point of a transformer T2, the BOUT interface is connected with a resistor R100, a triode Q11 and a triode Q13, the resistor R100 is connected in series with the BOUT interface, the triode Q11 and the triode Q13 are connected in parallel and connected with the resistor R100 in series, and the triode Q11 and the triode Q13 are further connected with a 6 input point of the input point of the transformer T2 in series after being connected in parallel, the AOUT interface is connected with a resistor R30, a triode Q12 and a triode Q14, the resistor R30 is connected in series with the AOUT interface, the triode Q12 and the triode Q14 are connected in parallel and connected with the resistor R30 in series, and the triode Q12 and the triode Q14 are further connected with a 5 input point of the input point of the transformer T2 in series after being connected in parallel, and the 5 input point is further connected with a capacitor C64 in series, the triode Q13 and the triode Q14 are connected with a capacitor C48 in series and grounded, and the triode Q11 and the triode Q12 are connected with a resistor R23 in series and grounded, and a resistor R29 is connected in parallel between the triode Q12 and the resistor R23.

[0009] Further, the 1 output point and the 2 output point of the output end of the transformer T2 are connected in series with the transistor Q1, the 11 output point and the 10 output point are connected in series with the transistor Q3, the transistor Q1 and the transistor Q3 are connected in parallel and then connected in series with the 6 input point of the input end of the transformer T3, the 14 output point and the 13 output point of the output end of the transformer T2 are connected in series with the transistor Q2, the 8 output point and the 7 output point are connected in series with the transistor Q4, the transistor Q2 and the transistor Q4 are connected in parallel and then connected in series with the 2 input point of the input end of the transformer T3, and the 6 input point and the 2 input point of the transformer T3 are connected in parallel with the resistor R4, the resistor R3 and the capacitor C7.

[0010] Further, the 9 output point and the 10 output point of the output end of the transformer T3 are connected in series with the diode D15 and the inductor L2 in sequence and then connected to the 1 pin of the pin J3, the 12 output point and the 13 output point are connected in series with the diode D13, and the diode D13 is connected in parallel between the diode D15 and the inductor L2, and the 2 pin of the pin J3 is connected in parallel with the diode D14 and the diode D16, wherein the diode D14 is connected in series with the 12 output point and the 13 output point, and the diode D16 is connected in series with the diode D15.

[0011] The beneficial effects of the present application are as follows:

[0012] The capacitor C7, the resistor R3 and the resistor R4 are connected in parallel on the transformer T3, and when the transformer 3 works, the capacitor C7, the resistor R3 and the resistor R4 can store electric energy, which is used to increase the magnetic permeability of the transformer T3, reduce the overall power of the transformer T3, realize the magnetic core volt-second balance, and then reduce the overall power and reduce the heat generation of the controller. BRIEF DESCRIPTION OF DRAWINGS

[0013] The drawings incorporated in the specification and constituting a part hereof illustrate embodiments consistent with the present application and together with the specification are used to explain the principles of the application.

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows, and obviously, other drawings can also be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0015] Figure 1 Part of the current control circuit Figure One ;

[0016] Figure 2 Part of the current control circuit Figure Two ;

[0017] Figure 3 Part of the first current control circuit Figure One ;

[0018] Figure 4 Part of the first current control circuit Figure Two ;

[0019] Figure 5 Part of the second current control circuit Figure One ;

[0020] Figure 6 Part of the second current control circuit Figure Two ;

[0021] Figure 7 Circuit diagram for the output circuit. DETAILED DESCRIPTION

[0022] In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some but not all of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present disclosure.

[0023] Unless otherwise defined, technical or scientific terms used in the present disclosure should have the same meaning as commonly understood by one of ordinary skill in the art to which the present disclosure belongs. The terms "first", "second", and similar terms used in the present disclosure do not denote any order, quantity, or importance, but are used to distinguish different components. The terms "include", "contain", and similar terms mean that the elements or objects before the terms encompass the elements or objects listed after the terms and their equivalents, and do not exclude other elements or objects. "Up", "down", "left", "right", and the like are only used to indicate relative positional relationships, and when the absolute positions of the described objects are changed, the relative positional relationships may also be changed accordingly.

[0024] As shown in Figures 1-7 A control system for a silicon carbide molecular pump, comprising a control module and a power module, the control module is connected with the power module, the control module is used for controlling the molecular pump, and the power module provides electric energy for the control module,

[0025] The power module comprises a delivery circuit, a first current control circuit, a second current control circuit and an output circuit, the delivery circuit is connected with the output circuit through a transformer T3, the delivery circuit is connected with the second current control circuit through a transformer T2, the delivery circuit is provided with an L0 point and an N2 point and is connected with the first current control circuit through the L0 point and the N2 point, the first current control circuit is provided with an output point vdr and is connected with the second current control circuit through the output point vdr, the transformer T3 is connected with the transformer T2, and the transformer T3 is connected with a capacitor C7, a resistor R3 and a resistor R4 in parallel.

[0026] In the application, the control module can control the molecular pump using an existing single-chip microcomputer, the power module provides power kinetic energy for the control module, the delivery circuit is used for connecting an external power source such as a battery, a power socket and the like, the delivery circuit is provided with a pin header J1, the pin header J1 is provided with three pins, wherein a first pin of the pin header J1 is grounded for ensuring the overall safety of the circuit, a second pin and a third pin of the pin header J1 are connected with an L pole and an N pole of the external power source respectively, and a capacitor C1 is connected in parallel between the second pin and the first pin, and a capacitor C2 is connected in parallel between the third pin and the first pin, the capacitor C1 and the capacitor C2 provide a low-impedance path for high-frequency noise, preventing interference signals from affecting other circuits through the power source.

[0027] In the application, a fuse F1 is connected in series on the first pin of the pin header J1, and thermistors RT1 and RT2 are arranged, the thermistors RT1 and RT2 are connected in parallel and then connected in series with the fuse F1, the fuse F1 is used for protecting the circuit from overcurrent damage, when the current exceeds the rated value, the fuse F1 will be fused, thereby cutting off the circuit. The thermistors RT1 and RT2 can detect the temperature change in the circuit, when the temperature exceeds the set value, the resistance value of the thermistor will change, thereby triggering the protection mechanism, so that the circuit is automatically disconnected in the case of overheating, avoiding damage to the control module.

[0028] In the application, the thermistor RT1 and RT2 are connected in parallel and further connected in series with the inductor L1 and the rectifier diode DB1, and connected with the 2 input point of the input end of the transformer T3; the 2 pin of the row pin J1 is connected in series with the inductor L1 and the rectifier diode DB1, and connected with the 6 input point of the input end of the transformer T3. The adjusting resistor RV1 and the capacitor C3 are connected in parallel between the inductor L1 and the 3 pin of the row pin J1, the capacitor C4 is connected in parallel between the inductor L1 and the rectifier diode DB1, and the capacitor C5, the capacitor C6 and the resistor R56 are connected in parallel between the rectifier diode DB1 and the input end of the transformer T3. Among them, the RV1 is used for adjusting the input voltage, ensuring that the circuit obtains a suitable voltage input; the capacitor C3 and the capacitor C4 are used as filter capacitors for smoothing the output voltage, reducing voltage fluctuation and ensuring the stability of the circuit; the inductor L1 is a common mode inductor with an inductance of 3mH, which is used to suppress common mode interference and improve the anti-interference ability of the circuit; the rectifier diode DB1 is used to ensure that the voltage in the circuit is stable and consistent in direction; the capacitor C5 and the capacitor C6 are output filter capacitors, which further stabilize the output voltage and ensure that the circuit output is smooth and without fluctuation; and the resistor 56 is a current limiting resistor for limiting the current size and protecting other elements in the circuit from damage caused by excessive current.

[0029] In the application, the L0 point is located between the 2 pin of the row pin J1 and the inductor L1, and the N2 point is located between the resistor wire F1 and the parallel-connected thermistor RT1 and RT2.

[0030] In the application, the capacitor C7, the resistor R3 and the resistor R4 are connected in parallel on the transformer T3. When the transformer 3 works, the capacitor C7, the resistor R3 and the resistor R4 can store electric energy, which is used to increase the magnetic permeability of the transformer T3, reduce the overall power of the transformer T3, realize the balance of the magnetic core volt-second, and further reduce the overall power and the heat generation of the controller.

[0031] Specifically, the first current control circuit includes a current control chip U2, the L0 point is connected with a common mode inductor T1 and a diode D1 in sequence, the N2 point is connected with a thermal resistor RT3, a common mode inductor T1 and a diode D4 in sequence, the diode D1 and the diode D4 are connected in parallel and connected with a VCC interface of the current control chip U2, and the VCC interface is further connected with a resistor R16 in series, the resistor R16 is connected with an input point of a transformer T4 in parallel, wherein a 5 input point of the transformer T4 is connected with the resistor R16, a 6 input point is connected with a D interface of the current control chip U2, and the 5 input point and the 6 input point are connected with a capacitor C46 and a resistor R51 in parallel and connected with a diode D5 in series, a 7 input point and an 8 input point of the transformer T4 are connected with the resistor R16 in parallel through a diode D6 and a resistor R18, and connected with the VCC interface of the current control chip U2; an output point of the transformer T4 is connected with a diode D8, an inductor L3 and a resistor R2 in sequence, wherein the diode D8 is connected with a resistor 20 and a capacitor C36 in parallel, a capacitor C41 is connected between the diode D8 and the inductor L3 in parallel and provided with an FBVdr+ output point, the inductor L3 and the resistor R2 are connected with a capacitor C42 in parallel and provided with an REFVdr output point, and the resistor R2 is provided with a Vdr output point.

[0032] In the application, the L0 point and the N2 point provide power for the current control chip U2.

[0033] In the application, the model of the current control chip U2 is KA5H0165, T1 is a common mode inductor with an inductance of 30 mH, mainly used for filtering and suppressing electromagnetic interference, and ensuring stable operation of the circuit; the thermal resistor RT3 can detect temperature changes in the circuit, when the temperature exceeds the set value, the resistance value of the thermal resistor RT3 will change, thereby triggering the protection mechanism, so that the circuit is automatically disconnected in the case of overheating, avoiding damage to the current control chip U2; the diode D1 and the diode D4 are rectifier diodes used to ensure that the voltage in the circuit is stable and consistent in direction; the capacitor C45, the diode D2 and the diode D3 are used to stabilize the voltage, prevent reverse voltage or excessive voltage in the circuit from damaging other elements; the resistor R16, the resistor R18 and the resistor R51 are used for current limiting to ensure normal operation of the circuit; the diode D5 and the diode D6 are used to prevent reverse voltage or excessive voltage in the circuit from damaging other elements.

[0034] In the application, the 3 output point, 4 output point and 1 output point of the transformer T4 are connected in series and grounded, and the 2 output point is connected in series with a diode D8, an inductor L3 and a resistor R2 in turn, wherein the diode D8 is used to ensure the voltage in the circuit stable and consistent in direction, R20 and the capacitor C36 are used to limit current and reduce voltage fluctuation, to provide stable voltage output, L3 is used to store energy and filter, cooperates with the capacitor element such as C36, further smooths the voltage; the resistor R20 is used to limit current, the capacitor C41 and the capacitor C42 are used as filter capacitors, and cooperate with C36 to further reduce voltage fluctuation and improve the stability of the circuit.

[0035] Specifically, the REFVdr output point is connected in series with a resistor R71, a diode D27 and an indicator lamp D28 in turn; the indicator lamp D28 is a green lamp, and whether the voltage is normal can be judged by whether the indicator lamp D28 works.

[0036] In the application, the REFVdr output point and the FBVdr+ output point are further connected with a photoelectric coupler U3, wherein the FBVdr+ output point is connected with the 1 interface of the photoelectric coupler U3 after being connected in series with a resistor R19, the REFVdr output point is connected with the 2 interface of the photoelectric coupler U3 after being connected in series with a resistor R22 and a diode N1, and the diode N1 is further connected in parallel with a resistor R21 and a capacitor C37; the 4 interface of the photoelectric coupler U3 is connected with the FB interface of the current control chip U2, and the capacitor C60 is connected in parallel between the 3 interface and the 4 interface of the photoelectric coupler U3. The input part and the output part in the circuit are electrically isolated by the photoelectric coupler U3, to prevent high voltage or high current from causing interference or damage to the low voltage or low current part.

[0037] Specifically, the second current control circuit comprises a current control chip U0, the Vdr output point is connected with the VIN interface and the VCC interface of the current control chip U0 respectively, and is used for power supply of the current control chip U0; the BOUT interface and the AOUT interface of the current control chip U0 are connected with the input point of the transformer T2, wherein the BOUT interface is connected with the resistor R100, the triode Q11 and the triode Q13, the resistor R100 is connected in series at the BOUT interface, the triode Q11 and the triode Q13 are connected in parallel and then connected in series with the resistor R100, and the triode Q11 and the triode Q13 are connected in series with the 6 input point of the input point of the transformer T2 after being connected in parallel; the AOUT interface is connected with the resistor R30, the triode Q12 and the triode Q14, the resistor R30 is connected in series at the AOUT interface, the triode Q12 and the triode Q14 are connected in parallel and then connected in series with the resistor R30, and the triode Q12 and the triode Q14 are connected in series with the 5 input point of the input point of the transformer T2 after being connected in parallel, and the 5 input point is further connected in series with the capacitor C64; the triode Q13 and the triode Q14 are connected in series with the capacitor C48 and then grounded; the triode Q11 and the triode Q12 are connected in series with the resistor R23 and then grounded, and the resistor R29 is connected in parallel between the triode Q12 and the resistor R23.

[0038] In the application, the model of the current control chip U0 is UC2846, which is used for adjusting output voltage and current and ensuring stable operation of the circuit; R100 and R24 are current limiting resistors, which are used for protecting Q11 and Q13 from being damaged due to excessive current; Q11, Q13 and C48 jointly constitute a driving circuit, which is used for adjusting power output of the circuit; R23, R29 and R30 are also current limiting resistors, which are used for protecting Q12 and Q14 and ensuring stability of the circuit in high power output; Q12, Q14 and C64 jointly constitute a driving circuit, which is used for further adjusting and controlling the circuit.

[0039] In the application, the Vdr output point is further connected in series with the capacitor C18 and then grounded, and the capacitor C18 can reduce voltage fluctuation caused by load change and improve stability of the circuit; and when an abnormality occurs in the circuit, such as voltage mutation, the capacitor C18 can absorb part of energy and lead to the ground, thereby protecting subsequent circuits from being damaged.

[0040] In the application, the current control chip U2 is provided with a CS interface, a CS+ interface and a CS- interface, the CS+ interface and the CS- interface are used for monitoring the size of the output current, and the protection circuit is protected from overcurrent damage, wherein the CS- interface is grounded, the CS+ interface is connected with the VREF interface of the power supply control chip U2 after being connected with resistors R35, R34 and a transistor Q9 in series, a capacitor C23 is connected in parallel between the resistor R35 and the CS+ interface and grounded to prevent voltage fluctuation and current mutation in the circuit, thereby enhancing the reliability and stability of the circuit; resistors R36, R37 and R38 are arranged between the resistor R35 and the resistor R34, wherein the resistor R37 and the resistor R36 constitute a current sampling voltage dividing circuit, which is used for detecting the output current of the UC2846 chip and converting the current signal into a voltage signal for subsequent control and protection, and the resistor R38 is used for adjusting the current sampling voltage to ensure that the circuit operates within a normal working range. By adjusting the resistance value of R38, the sensitivity of the current sampling circuit can be changed, thereby realizing more fine control of the circuit. A resistor R28 is connected in parallel between the resistor R34 and the transistor Q9 and grounded, and the R28 is used for limiting the current to prevent damage of elements caused by excessive current.

[0041] In the application, the VREF interface of the current control chip U2 is used for determining the reference of the output voltage and is set to 5V, a REF point is arranged between the VREF interface and the transistor Q9, a resistor R41 is connected in series at the REF point and connected with the CS interface, a transistor Q10 is connected in parallel between the resistor R41 and the CS interface, resistors R54, R57, a capacitor C28 and a capacitor C24 are connected in parallel at the transistor Q10, wherein the transistor Q10 serves as an adjusting tube and plays a role of controlling the current in the circuit, the working state of the transistor Q10 can be adjusted to further adjust the CS voltage and ensure the stable operation of the circuit; the resistor R54 serves as a current limiting resistor and is used for protecting the transistor Q10 to prevent damage of the Q10 caused by excessive current; the resistor R57 serves as a voltage dividing resistor and is used for accurately adjusting the CS voltage in cooperation with other elements in the circuit to meet the working requirements of the circuit; the capacitor C28 serves as a filter capacitor and can smooth the fluctuation of the CS voltage, improve the stability of the circuit and reduce noise interference; the capacitor C24 also serves as a filter capacitor and cooperates with the C28 to further stabilize the CS voltage and ensure the performance of the circuit.

[0042] In the application, the RT interface of the current control chip U2 is connected with the ground after being connected with a resistor R31 in series, which is used for setting the charging current of the oscillator to adjust the frequency reference. The CT interface is connected with the ground after being connected with a capacitor C62 in series, and forms an RC network with the RT interface to store and release charges to generate a stable oscillation signal; and a resistor R32 is connected in parallel between the capacitor C62 and the CT interface and connected with the transistor Q10.

[0043] In the application, the EA+ interface and the EA- interface of the current control chip U2 are used to receive a feedback voltage, compare the feedback voltage with a reference voltage, and adjust the output after comparison to maintain the stability of the output voltage, wherein the EA+ interface is connected in series with a resistor R42 and a resistor R46, the resistor R42 and the resistor R46 are current limiting resistors, and a resistor R43 is connected in parallel between the resistor R42 and the resistor R46, the resistor R43 is connected with the VREF interface of the current control chip U2 to provide a stable feedback voltage, which helps to stabilize the working state of the entire circuit and ensures the accuracy of the output voltage. The EA- interface is connected in series with a resistor R39, and a capacitor C20 and a capacitor C50 are connected in parallel between the resistor R39 and the EA- interface, the resistor R39 serves as a voltage feedback resistor and participates in the voltage feedback mechanism of the adjustment circuit to ensure that the circuit can work in a stable state and accurately control the output voltage; the capacitor C20 and the capacitor C50 are used to smooth the fluctuation of the power supply voltage, reduce the noise interference caused by unstable power supply, and improve the overall stability of the circuit.

[0044] In the application, the COMP interface of the current control chip U2 is connected to the EA- interface in series with a resistor R33 and a capacitor C61, which is used to introduce an external compensation network to stabilize the output voltage and improve the transient response of the system, wherein the capacitor C61 is used to smooth the fluctuation of the power supply voltage, reduce the noise interference caused by unstable power supply, and improve the overall stability of the circuit.

[0045] Specifically, the 1 output point and the 2 output point of the output end of the transformer T2 are connected in series with a triode Q1, the 11 output point and the 10 output point are connected in series with a triode Q3, the triode Q1 and the triode Q3 are connected in parallel and connected in series with the 6 input point of the input end of the transformer T3, the 14 output point and the 13 output point of the output point of the transformer T2 are connected in series with a triode Q2, the 8 output point and the 7 output point are connected in series with a triode Q4, the triode Q2 and the triode Q4 are connected in parallel and connected in series with the 2 input point of the input end of the transformer T3, and the 6 input point and the 2 input point of the transformer T3 are connected in parallel with a resistor R4, a resistor R3 and a capacitor C7.

[0046] In the application, Q1 and Q3, Q2 and Q4 form a push-pull drive, by alternating on and off, control the primary winding of the transformer, to achieve efficient transmission of energy; Q1 is in series with a diode D12, and in parallel with a resistor R8, a resistor R10 and a triode Q5, wherein the resistor R8 and R10 are used for current limiting, which can limit the current size through the circuit, prevent excessive current damage other components; diode D12 and triode Q5 are used to ensure the stability of the voltage. Q3 is in series with a diode D10, and in parallel with a resistor R6, a resistor R11 and a triode Q7, wherein the resistor R6 and R11 are used for current limiting, which can limit the current size through the circuit, prevent excessive current damage other components; diode D10 and triode Q7 are used to ensure the stability of the voltage. Q2 is in series with a diode D9, and in parallel with a resistor R7, a resistor R9 and a triode Q6, wherein the resistor R7 and R9 are used for current limiting, which can limit the current size through the circuit, prevent excessive current damage other components; diode D9 and triode Q6 are used to ensure the stability of the voltage. Q4 is in series with a diode D11, and in parallel with a resistor R5, a resistor R12 and a triode Q8, wherein the resistor R5 and R12 are used for current limiting, which can limit the current size through the circuit, prevent excessive current damage other components; diode D11 and triode Q8 are used to ensure the stability of the voltage.

[0047] In the application, Q1 is in parallel with a capacitor C11, Q2 is in parallel with a capacitor C10, Q3 is in parallel with a capacitor C9, Q4 is in parallel with a capacitor C8, through the capacitor C8, the capacitor C9, the capacitor C10 and the capacitor C11 for smoothing input voltage, reduce the noise caused by power supply fluctuation, ensure that the circuit obtains stable power supply voltage.

[0048] Specifically, the 9 output point and the 10 output point of the output end of the transformer T3 are connected to the 1 pin of the pin J3 in sequence after being connected in series with the diode D15 and the inductor L2, the 12 output point and the 13 output point are connected in series with the diode D13, and the diode D13 is connected in parallel between the diode D15 and the inductor L2, the 2 pin of the pin J3 is connected in parallel with the diode D14 and the diode D16, wherein the diode D14 is connected in series with the 12 output point and the 13 output point, and the diode D16 is connected in series with the diode D15.

[0049] In the application, the pin J3 is used to connect the single-chip microcomputer, that is, the control module, and transmit the power supply through the pin J3. The capacitor C58 is connected in parallel on D15, and D51 is a protection diode, which is used to prevent the reverse voltage or transient overvoltage from damaging the circuit and protecting other elements from being damaged; C58 is a filter capacitor, which reduces voltage fluctuations and ensures the stable operation of the circuit. The capacitor C56 is connected in parallel on D13, and D13 is a protection diode, which is used to prevent the reverse voltage or transient overvoltage from damaging the circuit and protecting other elements from being damaged; C56 is a filter capacitor, which reduces voltage fluctuations and ensures the stable operation of the circuit. The capacitor C57 is connected in parallel on D14, and D14 is a protection diode, which is used to prevent the reverse voltage or transient overvoltage from damaging the circuit and protecting other elements from being damaged; C57 is a filter capacitor, which reduces voltage fluctuations and ensures the stable operation of the circuit. The capacitor C59 is connected in parallel on D16, and D16 is a protection diode, which is used to prevent the reverse voltage or transient overvoltage from damaging the circuit and protecting other elements from being damaged; C59 is a filter capacitor, which reduces voltage fluctuations and ensures the stable operation of the circuit.

[0050] In the application, the inductor L2 is connected in parallel with C12, resistor R67 and resistor R14, and also connected in parallel with resistor R63, R65, R69, R50 and W1, and also connected in parallel with resistor R66, R64; wherein the resistor R63, R65, R69, R50 and W1 are connected in series and connected in parallel with the inductor L2, and the resistor R66 and R64 are connected in series and connected in parallel with the inductor L2. C12 is a filter capacitor, which is used to smooth the output voltage, effectively reduce the voltage ripple, and ensure the stability of the circuit; R67 and R14 are current limiting resistors, which protect the subsequent circuit from excessive current impact; R63, R65, R69, R50 are sampling resistors, which are used to accurately detect the output voltage and realize the feedback control of the circuit; W1 is an adjustable resistor, which allows users to adjust the output voltage according to their needs, increasing the flexibility of the circuit; R66, R64 are current limiting resistors, which protect other elements in the circuit from being damaged.

[0051] In the application, the capacitor C34 is also connected in parallel with the resistor R65 and R66, and the capacitor C33 is connected in parallel with the resistor R50. C33 is used for filtering, which can smooth the feedback signal and effectively reduce the noise interference on the circuit, ensuring the purity of the signal; C34 is responsible for stabilizing the feedback voltage, which can maintain the stability of the output voltage under different load conditions through its capacitor characteristics, enhancing the reliability and stability of the circuit.

[0052] In the application, the resistor R60 and the indicator lamp D26 are also connected in parallel with the inductor L2, wherein the resistor R60 is connected in series with the indicator lamp D26 and connected in parallel with the inductor L2, and R60 is used for current limiting to protect the indicator lamp D26; the indicator lamp D26 is used to display whether the circuit is working normally, and in the application, the indicator lamp D26 is a green light, which indicates that the circuit is working normally when the indicator lamp D26 is bright green.

[0053] In the application, the 1st pin and the 2nd pin of the pin J3 are connected in parallel with the capacitor C52 and the capacitor C53, for smoothing the output voltage, effectively reducing the voltage ripple, and ensuring the stability of the circuit.

[0054] (1) Unless otherwise defined, like numbers refer to like elements throughout the present disclosure and the accompanying drawings.

[0055] (2) In the accompanying drawings of the present disclosure, only the structures involved in the present disclosure are involved, and other structures can be referred to the general design.

[0056] (3) For the sake of clarity, in the accompanying drawings used to describe the embodiments of the present disclosure, components or regions are enlarged. It can be understood that when an element is referred to as being located "on" or "under" another element, the element can be "directly" located on or under another element, or there can be an intermediate element.

[0057] The above is only a specific implementation of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present disclosure, which should be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.

Claims

1. A control system for a silicon carbide molecular pump, characterized by: The control module is connected with the power module, the control module is used for controlling the molecular pump, and the power module provides electric energy for the control module, The power module comprises a delivery circuit, a first current control circuit, a second current control circuit and an output circuit, the delivery circuit is connected with the output circuit through a transformer T3, the delivery circuit is connected with the second current control circuit through a transformer T2, the delivery circuit is provided with L0 point and N2 point and is connected with the first current control circuit through the L0 point and the N2 point, the first current control circuit is provided with an output point vdr and is connected with the second current control circuit through the output point vdr, the transformer T3 is connected with the transformer T2, and the transformer T3 is connected with a capacitor C7, a resistor R3 and a resistor R4 in parallel. The 1 output point and the 2 output point of the output end of the transformer T2 are connected with a triode Q1 in series, the 11 output point and the 10 output point are connected with a triode Q3 in series, the triode Q1 and the triode Q3 are connected in parallel and are connected with the 6 input point of the input end of the transformer T3 in series, the 14 output point and the 13 output point of the output point of the transformer T2 are connected with a triode Q2 in series, the 8 output point and the 7 output point are connected with a triode Q4 in series, the triode Q2 and the triode Q4 are connected in parallel and are connected with the 2 input point of the input end of the transformer T3 in series, and the 6 input point and the 2 input point of the transformer T3 are connected with the resistor R4, the resistor R3 and the capacitor C7 in parallel. The 9 output point and the 10 output point of the output end of the transformer T3 are connected with a diode D15 and an inductor L2 in series in sequence and are connected to the 1 pin of the pin J3, the 12 output point and the 13 output point are connected with a diode D13 in series, and the diode D13 is connected in parallel between the diode D15 and the inductor L2, the 2 pin of the pin J3 is connected with a diode D14 and a diode D16 in parallel, wherein the diode D14 is connected with the 12 output point and the 13 output point in series, and the diode D16 is connected with the diode D15 in series.

2. A control system for a silicon carbide molecular pump according to claim 1, wherein: The first current control circuit comprises a current control chip U2, the L0 point is connected with a common mode inductor T1 and a diode D1 in series in sequence, the N2 point is connected with a thermistor RT3, a common mode inductor T1 and a diode D4 in series in sequence, the diode D1 and the diode D4 are connected in parallel and are connected with the VCC interface of the current control chip U2, and the VCC interface is further connected with a resistor R16 in series, the resistor R16 is connected with the input point of a transformer T4 in parallel, the output point of the transformer T4 is connected with a diode D8, an inductor L3 and a resistor R2 in series in sequence, wherein the diode D8 is connected with a resistor 20 and a capacitor C36 in parallel, a capacitor C41 is connected in parallel between the diode D8 and the inductor L3 and is provided with an FBVdr+ output point, a capacitor C42 is connected in parallel between the inductor L3 and the resistor R2 and is provided with a REFVdr output point, and the resistor R2 is provided with a Vdr output point.

3. A control system for a silicon carbide molecular pump according to claim 2, wherein: The REFVdr output point is connected with a resistor R71, a diode D27 and an indicator lamp D28 in series in sequence.

4. A control system for a silicon carbide molecular pump according to claim 2, wherein: The second current control circuit comprises a current control chip U0, the Vdr output point is connected with the VIN interface and the VCC interface of the current control chip U0 respectively, for power supply of the current control chip U0, the BOUT interface and the AOUT interface of the current control chip U0 are connected with the input point of the transformer T2, wherein the BOUT interface is connected with the resistor R100, the triode Q11 and the triode Q13, the resistor R100 is connected in series at the BOUT interface, the triode Q11 and the triode Q13 are connected in parallel and then connected in series with the resistor R100, and the triode Q11 and the triode Q13 are connected in parallel and then connected in series with the 6 input point of the input point of the transformer T2, the AOUT interface is connected with the resistor R30, the triode Q12 and the triode Q14, the resistor R30 is connected in series at the AOUT interface, the triode Q12 and the triode Q14 are connected in parallel and then connected in series with the resistor R30, and the triode Q12 and the triode Q14 are connected in parallel and then connected in series with the 5 input point of the input point of the transformer T2, and the 5 input point is further connected in series with the capacitor C64, the triode Q13 and the triode Q14 are connected in series with the capacitor C48 and then grounded, the triode Q11 and the triode Q12 are connected in series with the resistor R23 and then grounded, and the resistor R29 is connected in parallel between the triode Q12 and the resistor R23.

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