Cooling mechanism of molecular pump

Abstract

The cooling mechanism of the molecular pump comprises a base, and the base is arranged at the bottom of a pump shell and arranged outside a pump shaft in a sleeving mode; a water cooling channel and an air cooling channel are arranged on the base, and the water cooling channel is arranged around the periphery of the pump shaft and used for circulation of cooling liquid; the air cooling channel penetrates through the base in the radial direction and is used for circulation of cooling gas. In the cooling mechanism of the molecular pump, the motor and the pump shaft are at least located in the base, the base is provided with the water cooling channel and the air cooling channel at the same time, the water cooling channel can allow the cooling liquid to circulate, the air cooling channel can allow the air to circulate, and then the pump shaft and the motor of the molecular pump can be subjected to water cooling and air cooling at the same time, and double-effect cooling is achieved; the cooling efficiency of the pump shaft is improved; and the water-cooling channel and the air-cooling channel are arranged on the base, so that the stability of the cooling channels can be ensured, the installation of the cooling mechanism is simplified, and the operation stability of the cooling mechanism is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of molecular pumps, and in particular to a cooling mechanism of a molecular pump. Background Art

[0002] A molecular pump consists of a pump shaft and a stator. The pump shaft rotates at high speed, constantly colliding with gas molecules, transferring momentum to the gas molecules, which in turn enables the molecules to move along the direction of the blades, thereby achieving vacuum. Therefore, the molecular pump generates a large amount of heat during operation. The accumulated heat will intensify the violent movement of gas molecules, affecting the molecular pump's pumping rate. It will also damage the molecular pump's internal parts, such as seals, electronic components, and bearings, thereby reducing the pump's service life.

[0003] In the existing technology, a water pipe is wound around the outside of the pump body, and cooling liquid is passed into the water pipe, and then the pump is cooled by water cooling, or a fan is set outside the pump body to achieve air cooling of the pump; however, the structures of these two cooling methods are too simple, with poor stability, and the contact area with the pump body is limited, resulting in low heat exchange efficiency and low cooling efficiency for the pump body.

[0004] Therefore, the molecular pump cooling device in the prior art has room for further improvement. Summary of the Invention

[0005] In view of this, in order to solve the technical problem that the cooling method of the molecular pump in the prior art, which adopts a single cooling water pipe or fan outside the pump body, is low in cooling efficiency, the present application provides a cooling mechanism of the molecular pump, which is arranged at the bottom of the pump casing and sleeved on the outside of the pump shaft. It can simultaneously perform air cooling and water cooling on the pump shaft part to ensure the cooling efficiency of the pump shaft.

[0006] The present application provides a cooling mechanism for a molecular pump, comprising: A base, provided at the bottom of the pump casing, for mounting the motor and the pump shaft; A water cooling channel is provided on the base and is arranged around the outer circumference of the pump shaft for circulating cooling liquid; At least one air cooling channel is provided on the base, penetrates the base in the radial direction, and is spaced apart from the water cooling channel in the axial direction for allowing cooling gas to circulate.

[0007] Compared with the prior art, in the cooling mechanism of the molecular pump of the present application, a base is provided at the bottom of the pump housing. The base is sleeved on the pump shaft, so that both the motor and the pump shaft are located inside the base. At the same time, a water cooling channel and an air cooling channel are provided on the base. The water cooling channel can allow the cooling liquid to flow through, and the air cooling channel can allow the gas to flow through. Thus, the pump shaft and the motor of the molecular pump can be water-cooled and air-cooled simultaneously, with double-effect cooling, improving the cooling efficiency of the pump shaft. And by arranging the water cooling and air cooling channels on the base, the stability of the cooling channels can be ensured. There is no need to cool by sleeving a water pipe outside the molecular pump as in the prior art, simplifying the installation of the cooling mechanism and ensuring the operation stability of the cooling mechanism.

[0008] Preferably, the water cooling channel includes: A cooling part, which is of an annular structure, with an outer diameter smaller than the outer diameter of the base and an inner diameter larger than the inner diameter of the base; A liquid inlet part, one end of which is connected to the cooling part, and the other end is open outside the base and connected to the liquid supply place; A liquid outlet part, one end of which is connected to the cooling part, and the other end is open outside the base and connected to the liquid return place.

[0009] In this embodiment, the cooling part is wound around the outer periphery of the pump shaft to increase the area and time of the cooling liquid flow, ensuring the temperature reduction effect on the pump shaft; while the liquid inlet part and the liquid outlet part can ensure the recycling effect of the cooling liquid.

[0010] Preferably, the projections of the liquid inlet part, the liquid outlet part, and the cooling part on the central axis overlap, and the cooling part is of a circular ring structure; The chord length of the liquid inlet part on the outer circle of the cooling part is L1, the chord length of the liquid outlet part on the outer circle of the cooling part is L3, the chord length of the interval part between the liquid inlet part and the liquid outlet part on the outer circle of the cooling part is L2, the outer diameter of the cooling part is R, and the angle of the cooling part is θ; Among them, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°.

[0011] In this embodiment, the liquid inlet part, the liquid outlet part, and the cooling part are arranged in the same axial plane, that is, in the axial direction, the lengths of each part of the liquid inlet part, the liquid outlet part, and the cooling part are the same, simplifying the structural difficulty of the water cooling channel and reducing the manufacturing cost; and by limiting the angle of the cooling part, it can ensure that while setting the liquid inlet part and the liquid outlet part, the setting length and angle of the cooling part are guaranteed, thus ensuring the cooling effect.

[0012] Preferably, the cooling part is of a regular circular structure, and there is an opening at the bottom of the cooling part on the base; The liquid inlet part and the liquid outlet part are arranged side by side in parallel at an interval, and there is a cover at the opening of the cooling channel; Wherein, a blocking piece is provided in the cooling portion, and the blocking piece is located between the liquid inlet portion and the liquid outlet portion.

[0013] In this embodiment, the difficulty of manufacturing the water cooling channel of the base can be reduced, and the manufacturing cost can be reduced.

[0014] Preferably, the cover comprises: A sealing ring is located at the bottom of the cooling portion and is used to seal the bottom of the cooling portion; A mounting ring is connected to the bottom of the sealing ring and protrudes radially toward both ends of the sealing ring, and the radial length of the mounting ring is greater than the radial length of the cooling portion; The sealing ring is arranged between the mounting ring and the base. Two sealing rings are provided, and the two sealing rings are respectively located at both ends of the sealing ring.

[0015] In this embodiment, the provision of the sealing ring and the mounting ring can seal the cooling portion.

[0016] Preferably, the cooling portion is a spiral structure, and the projections of the cooling portion on the central axis at least partially do not overlap; The liquid inlet and the liquid outlet are respectively arranged at two ends of the cooling part, and the liquid inlet and the liquid outlet are spaced and distributed along the axial direction.

[0017] In this embodiment, the cooling portion is configured as a spiral structure, which can lengthen the flow time of the cooling liquid in the base and increase the flow path, thereby increasing the cooling effect on the pump shaft.

[0018] Preferably, the air cooling channel includes: An axial portion, located below the motor and opening at the bottom of the base; The radial portion is provided in plurality, and the plurality of radial portions are arranged around the outer periphery of the axial portion and are radially communicated with the axial portion.

[0019] In this embodiment, the axial portion can draw the cooling gas from the bottom of the base upward, absorb the heat of the motor and then flow out radially, thereby rationally planning the flow path of the gas and increasing the cooling effect.

[0020] Preferably, it also includes: The heat dissipation column is arranged on the base, and the radial part of the air cooling channel is formed between two adjacent heat dissipation columns; The heat dissipation columns are provided in a plurality, and the plurality of heat dissipation columns are spaced apart and distributed along the same circumference to form an axial portion of the air cooling channel; The inner end width of the radial portion is smaller than the outer end width.

[0021] In this embodiment, the heat dissipation columns can form an air-cooling channel while absorbing heat to ensure the cooling effect on the pump shaft and the motor; and in the same radial direction, the width of the air-cooling channel between the heat dissipation columns expands outward, so that when the gas in the center of the pump shaft drives the heat to flow outward, the flow diameter of the gas becomes larger, which can reduce the gas flow rate and reduce the impact of the hot gas on equipment and personnel.

[0022] Preferably, it also includes: A base plate is provided at the bottom of the base; The support legs are arranged on the side of the bottom plate away from the base, and are used to support and raise the bottom plate; Wherein, a vent is provided on the bottom plate, the vent passes through the bottom plate along the axial direction, and the vent is communicated with the air cooling channel.

[0023] In this embodiment, vents are provided on the bottom plate so that the cooling gas can flow upward from the bottom into the base, exchange heat with the pump shaft and the motor, and then flow radially into the air cooling channel and out from the radial direction of the base, thereby ensuring the misalignment of the air inlet and the air outlet and ensuring the air cooling effect.

[0024] Preferably, it also includes: A fan is provided at the bottom of the vent and is used to direct external air to the vent; The outer diameter of the fan is larger than the diameter of the vent, and the diameter of the vent is smaller than the diameter of the circle formed at the inner end of the heat dissipation column.

[0025] In this embodiment, the fan can draw cooling air into the vents, thereby accelerating the air flow rate and improving the air cooling effect.

[0026] Preferably, it also includes: Installation channel, used for installing the pump shaft and motor; An air inlet channel is radially arranged on the base, with one end opening on the outside of the base and the other end opening on the installation channel, for guiding the protective gas into the installation channel; The exhaust channel is provided on the base, with one end opening on the upper end surface of the base and the other end opening on the outer side wall of the base, and is used for exhausting the gas in the molecular pump.

[0027] In this embodiment, the air inlet channel can transmit protective gas to the cavity where the pump shaft and the motor are located, thereby protecting the pump shaft and the motor, while the exhaust channel can effectively discharge the compressed gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 1 is a schematic diagram of the three-dimensional structure of the cooling mechanism of the molecular pump provided in one embodiment of the present application; Figure 2 1 is a schematic diagram of a three-dimensional cross-sectional structure of a cooling mechanism of a molecular pump provided in one embodiment of the present application; Figure 3 1 is a schematic cross-sectional view of a cooling mechanism of a molecular pump provided in one embodiment of the present application; Figure 4 This is a schematic diagram of the three-dimensional structure of a base provided in one embodiment of the present application; Figure 5 This is a schematic diagram of the bottom structure of a base provided in one embodiment of the present application; Figure 6 is a schematic cross-sectional structural diagram of a base provided in one embodiment of the present application; Figure 7 yes Figure 2 A magnified schematic diagram of local A.

[0029] Reference numerals: 1, pump housing; 2, cooling mechanism; 3, pump shaft; 4, motor; 5, base plate; 6, support leg; 21. Base; 22. Water cooling channel; 23. Air cooling channel; 24. Heat dissipation column; 25. Fan; 26. Sealing ring; 27. Mounting ring; 28. Sealing ring; 211, installation channel; 212, air intake channel; 213, exhaust channel; 221. Cooling unit; 222. Liquid inlet; 223. Liquid outlet; 224. Sealing member. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure is described in detail, clearly, and completely in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and are not intended to limit the present disclosure.

[0031] In the description of this application, if there is a description of first or second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0032] Those skilled in the art should understand that, in the disclosure of this application, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, which are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms cannot be understood as limiting this application.

[0033] The present application will be described in further detail below with reference to the accompanying drawings. Figures 1 to 7 illustrate.

[0034] The present application provides a cooling mechanism 2 of a molecular pump (hereinafter referred to as the cooling mechanism), which is connected to the bottom of a pump casing 1 of the molecular pump and is sleeved on the outside of a pump shaft 3, so that the motor 4 and the pump shaft 3 are both located inside the cooling mechanism 2, and then the cooling mechanism 2 can cool the motor 4 and the pump shaft 3, thereby reducing the overall temperature of the molecular pump and reducing the impact of high temperature on the working efficiency and service life of the molecular pump.

[0035] like Figure 1 、 Figure 2 As shown, the cooling mechanism 2 includes a base 21, a bottom plate 5 and legs. The base 21 is connected to the bottom of the pump housing 1, and the bottom plate 5 is connected to the bottom of the base 21; the legs 6 are connected to the bottom of the bottom plate 5, and the legs 6 are provided in at least three numbers. The three legs 6 are distributed along the same circumference to support the bottom plate 5 and raise the molecular pump.

[0036] Among them, Figure 2 As shown, the base 21 is provided with a mounting channel 211 for mounting the pump shaft 3 and the motor 4, the output end of the motor 4 is connected to the pump shaft 3, the motor 4 is fixedly connected to the base 21, and the end of the pump shaft 3 away from the motor 4 passes through the base 21; then, in the projection of the central axis, the projection of the motor 4 overlaps with the projection of the base 21, and the pump shaft 3 at least partially overlaps with the projection of the base 21.

[0037] like Figures 2 to 7 As shown, a water cooling channel 22 and an air cooling channel 23 are provided on the base 21. The water cooling channel 22 is used for supplying cooling liquid, and the air cooling channel 23 is used for supplying cooling gas. Then, the pump shaft 3 and the motor 4 of the molecular pump can be water-cooled and air-cooled at the same time, and dual-effect cooling is achieved to improve the cooling effect of the molecular pump. The water cooling channel 22 and the air cooling channel 23 are spaced apart along the axial direction, that is, the water cooling channel 22 and the air cooling channel 23 are arranged up and down, as shown in FIG. Figure 2 As shown, the water cooling channel 22 is arranged at the upper end of the air cooling channel 23, the water cooling channel 22 is correspondingly arranged on the periphery of the pump shaft 3, and the air cooling channel 23 is correspondingly arranged on the periphery of the motor 4 and the pump shaft 3, thereby increasing the cooling area of ​​the rotor and the motor 4 in the axial direction and improving the cooling efficiency.

[0038] In this embodiment, if Figure 3 As shown, the water cooling channel 22 is arranged around the outer periphery of the pump shaft 3 with the central axis of the pump shaft 3 as the reference line, thereby forming a cooling circle on the outer periphery of the pump shaft 3 to improve the cooling effect of the pump shaft 3; Figures 4 to 6 As shown, the air cooling channel 23 radially penetrates the base 21 so that the gas can directly flow to the central axis, directly exchange heat with the motor 4 and remove the heat of the motor 4, thereby ensuring a cooling effect on the motor 4.

[0039] Specifically, the water cooling channel 22 is further described; Figure 2 、 Figure 3 、 Figure 6 , Figure 7 As shown in Figure 7 , the water cooling channel 22 includes a cooling part 221, a liquid inlet part 222 and a liquid outlet part 223. The cooling part 221 is of an annular channel structure. The cooling part 221 is arranged around the outer circumference of the pump shaft 3. The inner diameter of the cooling part 221 is larger than the inner diameter of the installation channel 211, and the outer diameter of the cooling part 221 is smaller than the outer diameter of the base 21. And the cooling part 221 is arranged close to the pump shaft 3 to ensure the cooling effect on the pump shaft 3. Among them, the liquid inlet part 222 and the liquid outlet part 223 are of straight channel structures, and both the liquid inlet part 222 and the liquid outlet part 223 are arranged parallel to the radial direction. One end of the liquid inlet part 222 is connected to the cooling part 221, and the other end opens outside the base 21 and is connected to the liquid supply place to be used for guiding the cooling liquid into the cooling part 221. One end of the liquid outlet part 223 is connected to the cooling part 221, and the other end opens outside the base 21 and is connected to the liquid return place to be used for recovering the cooling liquid after heat absorption, which is convenient for recycling after re-cooling treatment.

[0040] In an optional embodiment of the present application, the liquid inlet part 222, the liquid outlet part 223 and the cooling part 221 are arranged in the same axial plane, that is, the projections of the liquid inlet part 222, the liquid outlet part 223 and the cooling part 221 on the central axis overlap. In this embodiment, the cooling part 221 is a regular circular ring structure. Among them, if the chord length of the liquid inlet part 222 on the outer ring of the cooling part 221 is L1, the chord length of the liquid outlet part 223 on the outer ring of the cooling part 221 is L3, the chord length of the interval part between the liquid inlet part 222 and the liquid outlet part 223 on the outer ring of the cooling part 221 is L2, the outer diameter of the cooling part 221 is R, and the angle of the cooling part 221 is θ. Among them, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°, that is, it is necessary to ensure that the angle of the cooling part 221 is greater than 180°, and then ensure the cooling efficiency of the pump shaft 3.

[0041] In this embodiment, the angle of the cooling part 221 is preferably 300° to 340°, and can be any one of 310°, 320°, 330° to ensure the maximum cooling area and maximum efficiency for the outer circumference of the pump shaft 3.

[0042] It should be noted that the liquid inlet part 222 and the liquid outlet part 223 are respectively connected to both ends of the cooling part 221, and the liquid inlet part 222 and the liquid outlet part 223 do not communicate with each other and interfere with each other, so that the cooling liquid can flow along the flow path of the liquid inlet part 222, the cooling part 221, and the liquid outlet part 223.

[0043] Among them, as Figure 3 , Figure 6As shown, the bottom of the cooling portion 221 is provided with an opening on the base 21, and the cooling portion 221 is a perfect circular structure. The open end of the cooling portion 221 is provided with a cover, which is used to seal the opening of the cooling portion 221; so that the cooling portion 221 can be formed by opening a circular groove on the base 21 and setting a cover, which can simplify the processing difficulty of the base 21, reduce costs and improve manufacturing efficiency; and in such a structure, as Figure 3 As shown, the liquid outlet portion 223 and the liquid inlet portion 222 are arranged side by side in parallel, and the distance between the two is controlled to be small to ensure that the effective use of the cooling portion 221 is maximized; wherein, a sealing member 224 is provided in the cooling portion 221 corresponding to the interval between the liquid inlet portion 222 and the liquid outlet portion 223, and the sealing member 224 can separate the circular cooling portion 221 into an open C-shaped annular structure, so that the liquid inlet portion 222 and the liquid outlet portion 223 can be exactly connected at the two ends of the cooling portion 221, completing the streamline of liquid inlet, cooling and liquid outlet.

[0044] like Figure 2 、 Figure 7 As shown, the cover includes a sealing ring 26, a mounting ring 27 and a sealing ring 28. The sealing ring 26, the mounting ring 27 and the sealing ring 28 are all annular structures and are coaxially arranged; the radial length of the sealing ring 26 is equal to or slightly less than or slightly greater than the radial length of the cooling portion 221, preferably equal to or greater than, so that the sealing ring 26 can extend into the cooling portion 221 and seal the bottom opening of the cooling portion 221 so that the cooling liquid cannot flow out; wherein, the mounting ring 27 is connected to the bottom of the sealing ring 26, the radial length of the sealing ring 26 is greater than the radial length of the sealing ring 26 and the cooling portion 221, and the two ends of the mounting ring 27 protrude radially relative to the two ends of the sealing ring 26, so that the cover forms an inverted T-shaped structure; a plurality of mounting holes are provided on the protruding portion of the mounting ring 27, and a corresponding plurality of matching holes are provided on the base 21. The mounting holes and the matching holes are coaxially arranged for the insertion of the same screw, thereby achieving a stable connection between the cover and the base 21.

[0045] like Figure 7 As shown, two sealing rings 28 are provided, and the two sealing rings 28 are respectively arranged at the protruding parts at both ends of the mounting ring 27 and located between the mounting ring 27 and the base 21, thereby achieving sealing of the radial ends of the cooling part 221 and ensuring the sealing effect of the cover on the cooling part 221.

[0046] In another optional embodiment of the present application, the cooling portion 221 is a spiral structure. The cooling portion 221 is spirally wound with the central axis of the pump shaft 3 as the reference line, that is, the projections of various parts of the cooling portion 221 on the central axis do not completely overlap, so that the axial setting height and the circumferential setting angle of the cooling portion 221 can be increased, that is, an angle setting of more than 360° can be achieved to increase the cooling effect; at the same time, the liquid inlet portion 222 and the liquid outlet portion 223 are respectively connected to the two ends of the cooling portion 221, and can be distributed along the axial direction, so that there is no need to set a cover and a sealing member 224, and the cooling effect of the water-cooling channel 22 can also be guaranteed.

[0047] In this embodiment, the base 21 can be manufactured by casting, injection molding, powder metallurgy, etc.

[0048] Based on any of the above embodiments, the air cooling channel 23 is further described; Figure 2 、 Figures 4 to 6 As shown, there are at least two air cooling channels 23, preferably multiple air cooling channels 23; there is an angle between two adjacent air cooling channels 23, that is, the air cooling channels 23 penetrate the base 21 in the radial direction, and the two adjacent air cooling channels 23 are spaced apart along the circumferential direction, thereby increasing the number of air cooling channels 23 and the heat exchange effect; at the same time, as shown in FIG. Figure 5 As shown, the intersection of multiple air cooling channels 23 is on the central axis of the base 21, which can ensure that the gas flows toward the pump shaft 3 and the motor 4 to take away heat and improve the cooling effect.

[0049] Specifically, such as Figure 4 、 Figure 5 As shown, a plurality of heat dissipation columns 24 are provided at the bottom of the mounting base. The heat dissipation columns 24 are block-shaped structures. The length extension direction of the heat dissipation columns 24 is parallel to the radial direction, and an air-cooling channel 23 is formed between two adjacent heat dissipation columns 24. There are multiple heat dissipation columns 24, and the multiple heat dissipation columns 24 are distributed along the same circumference. Among them, the outer diameter of the heat dissipation column 24 is the same as the outer diameter of the base 21, and the inner diameter of the heat dissipation column 24 is smaller than the outer diameter of the cooling portion 221 to reserve space for the cover.

[0050] like Figure 2 、 Figure 5 、 Figure 6As shown, the air-cooling channel 23 includes an axial part and a radial part; the axial part is located below the motor 4 and opens at the bottom of the base 21; multiple radial parts are provided, and the multiple radial parts are arranged around the outer periphery of the axial part and are radially connected to the axial part; wherein, the inner end surfaces of the multiple heat dissipation columns 24 form the axial part, and the radial part is formed between two adjacent heat dissipation columns 24. The radial part is arranged circumferentially outside the axial part and is connected to the axial part; the diameter of the axial part is larger than the outer diameters of the motor 4 and the cooling part 221; a bottom plate 5 is provided at the bottom of the heat dissipation column 24, and the bottom plate 5 is connected to the heat dissipation column 24 by screws or bolts. The outer diameter of the bottom plate 5 is the same as the set outer diameter of the heat dissipation column 24. The bottom plate 5 blocks the opening at the bottom of the heat dissipation column 24 to ensure the radial flow path of the cold air channel; wherein, a ventilation port is provided on the bottom plate 5, and the ventilation port penetrates the bottom plate 5 axially. The ventilation port is connected to the axial part formed by the heat dissipation column 24. The ventilation port is located at the bottom of the axial part, so that gas can flow axially from the ventilation port to the axial part. The motor 4 is located above the axial part. The gas带走电机4热量,再从轴向部沿径向流向径向部,继而流出底座21,以实现对电机4的风冷降温。 [[ID=*]]Note: The part '带走电机4热量' seems to be incorrect in the original Chinese. It should be something like 'carries away the heat of the motor 4'.

[0051] Further, as shown in Figure 1 and Figure 2 shown, the cooling mechanism 2 further includes a fan 25. The fan 25 is provided at the bottom of the bottom plate 5 and is located below the ventilation port. The fan 25 is used to generate suction to suck external air into the ventilation port, thereby accelerating the flow rate of the cooling gas and improving the air-cooling effect. The outer diameter of the fan 25 is larger than the diameter of the ventilation port, so that the fan 25 can be fixedly connected to the bottom plate 5 through connecting parts such as bolts; and the diameter of the ventilation port is smaller than the diameter of the axial part to ensure the complete supporting effect of the bottom plate 5 on the heat dissipation column 24.

[0052] Further, as shown in Figure 5 shown, the distance from one end of the radial part close to the central axis is D1, and the distance from the other end of the radial part far from the central axis is D2, D1 < D2. That is, in the same radial direction, the width of the radial part gradually expands outwards, so that the radial part of the air-cooling channel 23 is a fan-shaped structure. When the gas at the center of the pump shaft 3 carries heat and flows outwards, the flow diameter of the gas becomes larger, which can reduce the gas flow rate and reduce the impact of the heat-carrying gas on the equipment and personnel, improving the use safety.

[0053] On the basis of any of the above embodiments, the base 21 is further described; as shown in Figure 4 and Figure 6As shown, the base 21 is also provided with an air inlet channel 212 and an exhaust channel 213; the air inlet channel 212 is an L-shaped structure, which includes a first air inlet portion and a second air inlet portion; the first air inlet portion is arranged parallel to the radial direction, one end of the first air inlet portion is opened on the outer wall of the base 21, and the other end is opened on the mounting channel 211, so as to guide the protective gas to the cavity where the pump shaft 3 and the motor 4 are located, thereby protecting the lower part of the pump shaft 3 and the motor 4 and improving the service life of the molecular pump; the second air inlet portion is arranged parallel to the axis, the bottom of the second air inlet portion is connected to the mounting channel 211, and the top of the second air inlet portion is opened at the top of the base 21, the first air inlet portion and the second air inlet portion are connected through the mounting channel 211, and the protective gas enters the second air inlet portion after entering the mounting channel 211, and enters the top of the base 21 along the second air inlet portion, so as to protect the bearings on the base 21, the upper part of the pump shaft 3 and other parts.

[0054] One end of the exhaust channel 213 opens at the upper end surface of the base 21 , and the other end opens at the outer wall of the base 21 , and is used to discharge the compressed gas in the molecular pump along a specific path.

[0055] It should be noted that the various embodiments of the present application can be arbitrarily combined into new embodiments if the solutions do not conflict and the technical solutions can coexist.

[0056] The present application has been described in detail above. Specific examples have been used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is intended only to facilitate understanding of the present application and its core concepts. It should be noted that, without departing from the principles of the present application, a number of improvements and modifications may be made to the present application by a person skilled in the art, and such improvements and modifications shall fall within the scope of protection of the claims of the present application.

Claims

1. A cooling mechanism for a molecular pump, characterized in that: Comprising: A base (21), arranged at the bottom of the pump housing (1) for mounting the motor (4) and the pump shaft (3); A water cooling channel (22), arranged on the base (21) and surrounding the outer periphery of the pump shaft (3) for the circulation of cooling liquid; At least one air cooling channel (23), arranged on the base (21), penetrating the base (21) radially and spaced axially from the water cooling channel (22) for the circulation of cooling gas.

2. The cooling mechanism of the molecular pump according to claim 1, characterized in that: The water cooling channel (22) includes: A cooling part (221), having an annular structure, with an outer diameter smaller than the outer diameter of the base (21) and an inner diameter larger than the inner diameter of the base (21); A liquid inlet part (222), one end of which is connected to the cooling part (221), and the other end is open outside the base (21) and connected to the liquid supply place; A liquid outlet part (223), one end of which is connected to the cooling part (221), and the other end is open outside the base (21) and connected to the liquid return place.

3. The cooling mechanism of the molecular pump according to claim 2, wherein The projections of the liquid inlet part (222), the liquid outlet part (223), and the cooling part (221) on the central axis overlap with each other, and the cooling part (221) is a circular ring structure; The chord length of the liquid inlet part (222) on the outer circle of the cooling part (s21) is L1, the chord length of the liquid outlet part (223) on the outer circle of the cooling part (221) is L3, the chord length of the interval part between the liquid inlet part (222) and the liquid outlet part (223) on the outer circle of the cooling part (221) is L2, the outer diameter of the cooling part (221) is R, and the angle of the cooling part (221) is θ; Wherein, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°.

4. The cooling mechanism of the molecular pump according to claim 3, wherein The cooling part (221) is a regular circular structure, and an opening is provided at the bottom of the cooling part (221) on the base (21); The liquid inlet part (222) and the liquid outlet part (223) are arranged side by side in parallel at intervals, and a cover is provided at the opening of the cooling channel; Wherein, a blocking member (224) is provided in the cooling part (221), and the blocking member (224) is located between the liquid inlet part (222) and the liquid outlet part (223).

5. The cooling mechanism of the molecular pump according to claim 4, characterized in that: The cover includes: A sealing ring (26), located at the bottom of the cooling part (221) for sealing the bottom of the cooling part (221); A mounting ring (27), connected to the bottom of the sealing ring (26), protruding radially towards both ends of the sealing ring (26), and the radial length of the mounting ring (27) is greater than the radial length of the cooling part (221); Sealing rings (28), provided between the mounting ring (27) and the base (21), and two sealing rings (28) are provided, and the two sealing rings (28) are respectively located at both ends of the sealing ring (26).

6. The cooling mechanism of the molecular pump according to claim 2, wherein The cooling part (221) is a spiral structure, and at least part of the projection of the cooling part (221) on the central axis does not overlap; The liquid inlet portion (222) and the liquid outlet portion (223) are respectively arranged at two ends of the cooling portion (221), and the liquid inlet portion (222) and the liquid outlet portion (223) are spaced and distributed along the axial direction.

7. The cooling mechanism of the molecular pump according to claim 1, characterized in that: The air cooling channel (23) comprises: An axial portion, located below the motor (4) and opening at the bottom of the base (21); The radial portion is provided in plurality, and the plurality of radial portions are arranged around the outer periphery of the axial portion and are radially communicated with the axial portion.

8. The cooling mechanism of the molecular pump according to claim 7, characterized in that: Also includes: Heat dissipation columns (24) are arranged on the base (21), and a radial portion of the air cooling channel (23) is formed between two adjacent heat dissipation columns (24); The heat dissipation columns (24) are provided in plurality, and the plurality of heat dissipation columns (24) are distributed at intervals along the same circumference to form an axial portion of the air cooling channel (23); The inner end width of the radial portion is smaller than the outer end width.

9. The cooling mechanism of the molecular pump according to claim 1, characterized in that: Also includes: A bottom plate (5) is provided at the bottom of the base (21); A support leg (6) is provided on a side of the bottom plate (5) away from the base (21) and is used to support and elevate the bottom plate (5); The bottom plate (5) is provided with a vent, the vent axially passing through the bottom plate (5), and the vent is in communication with the air cooling channel (23).

10. The cooling mechanism of the molecular pump according to claim 9, characterized in that: Also includes: A fan (25) is provided at the bottom of the vent and is used to direct external air to the vent; A mounting channel (211) for mounting a pump shaft (3) and a motor (4); An air inlet channel (212) is radially arranged on the base (21), with one end opening outside the base (21) and the other end opening on the mounting channel (211), and is used to guide the protective gas into the mounting channel (211); The exhaust channel (213) is provided on the base (21), with one end opening on the upper end surface of the base (21) and the other end opening on the outer side wall of the base (21), and is used to discharge the gas in the molecular pump.

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