Physical quantity sensor and inertial measurement device

Abstract

A physical quantity sensor and an inertial measurement device. Provided are a physical quantity sensor and the like capable of further improving detection accuracy while suppressing cross-axis sensitivity. The present embodiment relates to a physical quantity sensor (1) that detects physical quantities in a first direction (DR1) and a second direction (DR2) that are in-plane directions and are perpendicular to each other. The physical quantity sensor includes a substrate (10), a first fixed electrode support portion (113), a first fixed electrode portion (110), a first movable electrode portion (210), a second fixed electrode support portion (123), a second movable electrode portion (220), and a first movable electrode support portion (313). The first movable electrode support section is fixed to the substrate at a movable electrode fixing section (301), extends in a first intersecting direction (DR11) intersecting the first direction and the second direction, and supports the first movable electrode section and the second movable electrode section via a first spring (317).

Description

Technical Field

[0001] The present invention relates to a physical quantity sensor, an inertial measurement device, and the like. Background Art

[0002] A physical quantity sensor is known that varies the gap between a movable electrode portion and a fixed electrode portion included in a movable body, detecting a physical quantity such as acceleration based on the change in electrostatic capacitance. Patent Document 1 discloses a method that detects physical quantities along two axes corresponding to the surface of a substrate connected to the movable body by swinging the movable body in a direction parallel to the surface of the substrate.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2016-125842

[0004] In physical quantity sensors that detect physical quantities along two axes, a phenomenon known as cross-axis sensitivity may occur where a detection element detecting a physical quantity along one axis detects a physical quantity along the other axis, degrading detection accuracy. Therefore, there is a desire to develop physical quantity sensors with further improved detection accuracy. Summary of the Invention

[0005] One embodiment of the present disclosure relates to a physical quantity sensor that detects physical quantities in a first direction and a second direction that are in-plane directions and perpendicular to each other, the physical quantity sensor comprising: a substrate; a first fixed electrode support portion fixed to the substrate at the first fixed electrode fixing portion and extending in the first direction; a first fixed electrode portion having a first fixed electrode extending from the first fixed electrode support portion in the second direction and in a fourth direction opposite to the second direction; a first movable electrode portion having a first movable electrode extending in the second direction and the fourth direction and opposite to the first fixed electrode; and a second fixed electrode support portion fixed at the second fixed electrode supporting portion. A fixed electrode fixing portion is fixed to the substrate and extends toward the second direction, a second fixed electrode portion having a second fixed electrode extending from the second fixed electrode supporting portion toward the first direction and a third direction opposite to the first direction; a second movable electrode portion having a second movable electrode extending toward the first direction and the third direction and opposite to the second fixed electrode; and a first movable electrode supporting portion fixed to the substrate at the movable electrode fixing portion and extending in a first intersecting direction intersecting the first direction and the second direction, supporting the first movable electrode portion and the second movable electrode portion via a first spring.

[0006] Another aspect of the present disclosure relates to an inertial measurement device including: the physical quantity sensor described above; and a control unit that performs control based on a detection signal output from the physical quantity sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 This is a plan view illustrating an example of a physical quantity sensor.

[0008] Figure 2 This is a diagram illustrating an example of an operation mode of a physical quantity sensor.

[0009] Figure 3 These are diagrams for explaining examples of the first and second fixed electrode sections and the first and second movable electrode sections.

[0010] Figure 4 This is a diagram for explaining the first movable electrode supporting portion and the like.

[0011] Figure 5 This is a diagram illustrating an example of the length of the first fixed electrode provided in the first fixed electrode portion.

[0012] Figure 6 These are diagrams for explaining examples of the third and fourth fixed electrode sections and the third and fourth movable electrode sections.

[0013] Figure 7 These are diagrams for explaining examples of the second and third movable electrode supporting parts.

[0014] Figure 8 This is a diagram illustrating an example of the fourth movable electrode supporting portion.

[0015] Figure 9 These are diagrams for explaining other examples of the first fixed electrode section and the first movable electrode section.

[0016] Figure 10 These are diagrams for explaining other examples of the first fixed electrode section and the first movable electrode section.

[0017] Figure 11 These are diagrams for explaining other examples of the first fixed electrode section and the first movable electrode section.

[0018] Figure 12 These are diagrams for explaining other examples of the first fixed electrode section and the first movable electrode section.

[0019] Figure 13 These are diagrams for explaining other examples of the third fixed electrode section and the third movable electrode section.

[0020] Figure 14 This is a plan view illustrating another example of the physical quantity sensor.

[0021] Figure 15 This is a plan view illustrating another example of the physical quantity sensor.

[0022] Figure 16 This is a plan view illustrating another example of the physical quantity sensor.

[0023] Figure 17 This is a plan view illustrating another example of the physical quantity sensor.

[0024] Figure 18 Yes Figure 17 FIG. 1 is a diagram illustrating an EE cross section.

[0025] Figure 19 This is a plan view illustrating another example of the physical quantity sensor.

[0026] Figure 20 This is an exploded perspective view showing a schematic configuration of an inertial measurement device including a physical quantity sensor.

[0027] Figure 21 This is a perspective view of a circuit board of a physical quantity sensor.

[0028] Description of labels

[0029] 1: physical quantity sensor; 10: substrate; 110, 110-C, 110-D, 110-E, 110-F: first fixed electrode portion; 111, 111-C, 111-D, 111-E, 111-F: first fixed electrode fixing portion; 113: first fixed electrode supporting portion; 113-1A, 113-1B, 113-1C, 113-1D, 113-1E, 113-1F: first first fixed electrode supporting portion; 113-2A, 113-2B, 113-2C, 113-2D, 113-2E, 113-2F: second first fixed electrode supporting portion; 113-3A: third first fixed electrode supporting portion; 115: first fixed electrode; 120: first 2nd fixed electrode portion; 121, 121-C: 2nd fixed electrode fixing portion; 123: 2nd fixed electrode supporting portion; 125: 2nd fixed electrode; 130, 130-E, 130-F: 3rd fixed electrode portion; 131, 131-E, 131-F: 3rd fixed electrode fixing portion; 133: 3rd fixed electrode supporting portion; 133-1E, 133-1F: 1st 3rd fixed electrode supporting portion; 133-2E, 133-2F: 2nd 3rd fixed electrode supporting portion; 135: 3rd fixed electrode; 140: 4th fixed electrode portion; 141: 4th fixed electrode fixing portion; 143: 4th fixed electrode supporting portion; 145: 4th fixed electrode; 151-C, 151-D, 152, 153 3. 154: Wiring; 210, 210-C, 210-D, 210-E, 210-F: First movable electrode portion; 213: Second fixed electrode supporting portion; 215: First movable electrode; 220: Second movable electrode portion; 225: Second movable electrode; 230, 230-E, 230-F: Third movable electrode; 235: Third movable electrode; 240: Fourth movable electrode portion; 245: Fourth movable electrode; 301: Movable electrode fixing portion; 311: First movable electrode fixing portion; 313: First movable electrode supporting portion; 317: First spring; 321: Second movable electrode fixing portion; 323: Second movable electrode supporting portion; 327: Second spring; 331: Third movable electrode fixing portion; 333: Third movable electrode support portion; 337: Third spring; 341: Fourth movable electrode fixing portion; 343: Fourth movable electrode support portion; 347: Fourth spring; 410: First connecting portion; 420: Second connecting portion; 430: Third connecting portion; 440: Fourth connecting portion; 500: Prescribed component; 2000: Inertial measurement unit; 2100: Housing; 2110: Threaded hole; 2200: Joint component; 2300: Sensor module; 2310: Inner housing; 2311: Recess; 2312: Opening; 2320: Circuit board; 2330: Connector; 2340x, 2340y, 2340z: Angular velocity sensor; 2350: Acceleration sensor unit; DR1: First direction;DR2: Second direction; DR3: Third direction; DR4: Fourth direction; DR11: First intersecting direction; DR12: Second intersecting direction; DR13: Third intersecting direction; DR14: Fourth intersecting direction; L11, L12, L21, L22, L113, L123, L133, L143, L313, L323, L333, L343: Length; LS113, LS123, LS133, LS143, LS1X, LS1Y, LS11X, LS21X: Line segments; MB: Movable body; ax, ay, az: Acceleration; ωx: Angular velocity. DETAILED DESCRIPTION

[0030] Hereinafter, preferred embodiments of the present disclosure will be described in detail. Note that the embodiments described below do not unduly limit the contents described in the claims, and not all of the structures described in the embodiments are necessarily essential structural elements.

[0031] A configuration example of the physical quantity sensor 1 according to this embodiment will be described. Figure 1 1 is a schematic top view showing an example of the physical quantity sensor 1 of this embodiment when viewed from above in a direction perpendicular to the substrate 10. In this embodiment, for the sake of convenience, two axes perpendicular to each other are used. Figure 1 The figure shows the X-axis and the Y-axis. In addition, the Z-axis perpendicular to the X-axis and the Y-axis is omitted. The directions perpendicular to each other are set as the first direction DR1 and the second direction DR2. The first direction DR1 and the second direction DR2 correspond to, for example, the +X-axis direction and the +Y-axis direction, respectively. In addition, in this embodiment, the direction on the opposite side of the first direction DR1 is set as the third direction DR3, and the direction on the opposite side of the second direction DR2 is set as the fourth direction DR4. That is, in Figure 1 In the figure, the third direction DR3 is, for example, the -X-axis direction, and the fourth direction DR4 is, for example, the -Y-axis direction. In addition, "vertical" includes not only the case where they intersect at 90°, but also the case where they intersect at an angle slightly inclined from 90°. In the following, when there is no need to strictly distinguish between the + direction and the - direction, "the direction along the X-axis" is sometimes represented by "the direction along the first direction DR1", and "the direction along the Y-axis" is sometimes represented by "the direction along the second direction DR2". In addition, the correspondence between the first direction DR1 and the second direction DR2 and the XY axis is merely an example and is not limited to the above. The following description does not prevent the method of this embodiment from being applied, for example, using the first direction DR1 as the Y-axis.

[0032] exist Figure 1 In the physical quantity sensor 1, a frame-shaped movable body MB is connected to the substrate 10. Figure 1When viewed from above, the movable body MB is shown as forming a closed loop. However, in this embodiment, even if a portion is opened, it can be treated as a frame. The details will be described later. Figure 11 In addition, other structures connected to the substrate 10 or the movable body MB are divided into Figure 3 、 Figure 4 、 Figure 6 、 Figure 7 、 Figure 8 This will be described later. More specifically, Figure 1 The structure shown in the dotted box of A1 is the same as that described later. Figure 3 The structure shown in A11 corresponds to, Figure 1 The structure shown in the dotted box of A2 is the same as that described later. Figure 3 The structure shown in A12 corresponds to, Figure 1 The structure shown in the dotted box of B1 is the same as that described later. Figure 4 The structure shown in B11 corresponds to. Figure 1 The structure shown in the dotted box of A3 is the same as that described later. Figure 6 The structure shown in A13 corresponds to, Figure 1 The structure shown in the dotted box of A4 is the same as that described later. Figure 6 The structure shown in A14 corresponds to the above. Figure 1 The structure shown in the dotted box of B2 is the same as that described later. Figure 7 The structure shown in B12 corresponds to, Figure 1 The structure shown in the dotted box of B3 is the same as that described later. Figure 7 The structure shown in B13 corresponds to, Figure 1 The structure shown in the dotted box of B4 is the same as that described later. Figure 8 The structure shown in B14 corresponds to.

[0033] In addition, when implementing the method of this embodiment, Figure 1 The structures shown are not all necessary and some of them may be omitted. Figure 1 The structures shown in A3, A4, B2, B3, and B4 are appropriately omitted or changed.

[0034] The substrate 10 is, for example, a silicon substrate made of semiconductor silicon or a glass substrate made of a glass material such as borosilicate glass. However, the constituent material of the substrate 10 is not particularly limited, and a quartz substrate or an SOI (Silicon On Insulator) substrate may also be used. Figure 1 In the embodiment, a cavity may be formed in an area other than the predetermined area AR of the substrate 10. A specific example is shown in FIG. Figure 18In addition, the predetermined area AR is an area where the fixed electrode fixing portion, the movable electrode fixing portion 301, etc. are centrally connected to the substrate 10 as described later, and may also be referred to as a fixing portion connection area. Figure 2 Hereinafter, the illustration of the predetermined area AR will be omitted as appropriate ( Figure 18 except).

[0035] The physical quantity sensor 1 of this embodiment is, for example, an inertial sensor that is a MEMS (Micro Electro Mechanical Systems) device, and detects physical quantities in the first direction DR1 and the second direction DR2. Figure 2 The action mode shown in M10 is an action mode in which the movable body MB and the structures included in the movable body MB move in the direction shown in M11 or the direction shown in M12. The direction shown in M11 is consistent with the direction along the first direction DR1, and the direction shown in M12 is consistent with the direction along the second direction DR2. Thus, the physical quantities in the first direction DR1 and the second direction DR2 are detected by the method described later. In addition, strictly speaking, the physical quantity sensor 1 may also generate, for example Figure 2 The motion mode shown in M20 is an motion mode corresponding to the rotation of the movable body MB about the axis shown in M21 relative to the plane including the substrate 10, and may also be referred to as an in-plane rotation mode. However, the physical quantity sensor 1 of this embodiment is configured such that the motion based on the motion mode shown in M20 is reduced to a negligible level relative to the motion based on the motion mode shown in M10 by the method described below.

[0036] In addition, the following description primarily uses the case where the physical quantity detected by the physical quantity sensor 1 is acceleration as an example. However, the physical quantity is not limited to acceleration and can also be other physical quantities such as velocity, pressure, displacement, posture, angular velocity, or gravity. The physical quantity sensor 1 can also be used as a pressure sensor or MEMS switch. Furthermore, in each figure of this embodiment, the dimensions of various components, the spacing between components, and other aspects are schematic illustrations for ease of explanation and do not represent actual dimensions, spacing, etc. Furthermore, the physical quantity sensor 1 of this embodiment is illustrated with some components, such as electrodes and wiring, omitted where appropriate.

[0037] like Figure 3 As shown in A11 , the physical quantity sensor 1 of this embodiment includes a first fixed electrode section 110 , a first movable electrode section 210 , and a first connecting section 410 . The first connecting section 410 is configured as a part of the movable body MB, extends along the second direction DR2 , and includes the first movable electrode section 210 .

[0038] The first fixed electrode portion 110 includes: a first fixed electrode fixing portion 111, which is fixed to the substrate 10; and a first fixed electrode supporting portion 113, which extends from the first fixed electrode fixing portion 111 to the first direction DR1. In addition, the first fixed electrode 115 extends from the first fixed electrode supporting portion 113 to the second direction DR2 and the fourth direction DR4. In other words, the first fixed electrode portion 110 has the first fixed electrode 115 extending from the first fixed electrode supporting portion 113 to the second direction DR2 and the fourth direction DR4. In addition, the length of the first fixed electrode 115 extending to the second direction DR2 is the same as the length of the first fixed electrode 115 extending to the fourth direction DR4. In addition, the "same length" here includes not only the case where the length is actually the same, but also the case where it can be considered the same if the manufacturing error is taken into account. In addition, in this embodiment, it is sometimes defined as "approximately the same length", and the details will be described later. That is, the first fixed electrode portion 110 is relatively Figure 3 The line segment LS113 is a line segment passing through the first fixed electrode fixing portion 111 and along the first direction DR1. Figure 9 、 Figure 10 The first fixed electrode portion 110 described later is similarly configured to be line-symmetrical with respect to a line segment passing through the first fixed electrode fixing portion 111 and along the first direction DR1 .

[0039] The first fixed electrode portion 110 is fixed to the substrate 10 via the first fixed electrode fixing portion 111, and functions as a probe electrode. Alternatively, the first fixed electrode portion 110 may be configured such that a plurality of first fixed electrodes 115 extend from the first fixed electrode supporting portion 113. This allows the first fixed electrode portion 110 to have a so-called comb-tooth structure.

[0040] also, Figure 3 The first fixed electrode fixing portion 111 shown in A11 schematically illustrates the portion where the first fixed electrode support portion 113 is fixed to the substrate 10 and does not limit the specific structure of the first fixed electrode fixing portion 111. The same applies to the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131, the fourth fixed electrode fixing portion 141, the first movable electrode fixing portion 311, the second movable electrode fixing portion 321, the third movable electrode fixing portion 331, and the fourth movable electrode fixing portion 341 described later.

[0041] The first movable electrode section 210 includes a first movable electrode 215. The first movable electrode 215 extends in the second direction DR2 or the fourth direction DR4 and faces the first fixed electrode 115. Alternatively, the first movable electrode section 210 may include a plurality of first movable electrodes 215 to form a comb-teeth structure. In this case, Figure 3 As shown in A11 of FIG. 1 , the first movable electrode portion 210 is configured such that the first movable electrode 215 on the second direction DR2 side of the first fixed electrode support portion 113 and the first movable electrode 215 on the fourth direction DR4 side of the first fixed electrode support portion 113 are line-symmetrical with respect to the line segment LS113. That is, although not strictly illustrated, by providing a movable electrode on the side of the comb teeth formed by the first movable electrode 215 and providing a fixed electrode on the side of the comb teeth formed by the first fixed electrode 115, it is possible to function as a probe electrode. That is, the first movable electrode portion 210 plays the role of a probe electrode that can move as a whole with the movable body MB. In addition, in Figure 9 、 Figure 10 Similarly, the first movable electrode 215 described later is configured to be line-symmetrical with respect to a line segment passing through the first fixed electrode fixing portion 111 and along the first direction DR1 .

[0042] It can be considered that the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 constitutes a set of physical quantity detection units. In addition, the physical quantity detection unit is simply described as a detection unit below. That is, it can be considered that the above Figure 1 The number of the first fixed electrode 115 and the first movable electrode 215 is not limited to Figure 1 、 Figure 3 However, when the substrate 10 is viewed from above, the first fixed electrodes 115 are arranged on both sides of the first movable electrode 215. This stabilizes the movement of the movable body MB.

[0043] In addition, the relationship between the first fixed electrode 115 and the first movable electrode 215 described above also applies to the relationship between the second fixed electrode 125 and the second movable electrode 225, the relationship between the third fixed electrode 135 and the third movable electrode 235, and the relationship between the fourth fixed electrode 145 and the fourth movable electrode 245 described later. The details will be described later as appropriate.

[0044] right Figure 3 The following describes an example of the operation of the detection unit composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11. For example, by generating acceleration in the direction along the X-axis, the first movable electrode 215 moves along the X-axis, and the distance between the first movable electrode 215 and the first fixed electrode 115 in the direction along the X-axis changes, thereby changing the electrostatic capacitance. That is, Figure 3The detection unit indicated by A11 and composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 is a detection unit capable of detecting acceleration in the direction along the X-axis direction.

[0045] On the other hand, for example, when acceleration is generated in the direction along the second direction DR2, the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 toward the second direction DR2 increases, but the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 toward the fourth direction DR4 decreases. Similarly, when acceleration is generated in the direction along the fourth direction DR4, the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 toward the second direction DR2 decreases, but the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 toward the fourth direction DR4 increases. That is, in any case where acceleration occurs in the direction along the second direction DR2 or in the direction along the fourth direction DR4, the overall facing area between the first fixed electrode 115 and the first movable electrode 215 remains unchanged. Figure 3 The detection unit indicated by A11 and composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 is configured not to detect acceleration in the direction along the Y-axis direction.

[0046] In this way, by extending the first fixed electrode 115 from the first fixed electrode support portion 113 in the second direction DR2 and the fourth direction DR4, a detection unit is constructed that detects acceleration along the X-axis direction but does not detect acceleration along the Y-axis direction. In other words, Figure 3 The cross-axis sensitivity of the detection unit shown in A11, which is composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210, is suppressed. In other words, a physical quantity sensor having a structure in which the fixed electrode extends only in one direction from the fixed electrode support portion may not be able to suppress the cross-axis sensitivity.

[0047] In addition, “the first fixed electrode 115 extends from the first fixed electrode supporting portion 113 in the second direction DR2 and the fourth direction DR4” is not limited to the following. Figure 3The structure in which the first fixed electrode 115 extends from a first fixed electrode support portion 113 in the second direction DR2 and the fourth direction DR4 as shown in A11 of FIG. 1 can be deformed within the scope of the purpose of suppressing cross-axis sensitivity. For example, the method of this embodiment can be applied by expanding as follows, that is, the first fixed electrode portion 110 has a first fixed electrode 115 extending in the second direction DR2 and a first fixed electrode 115 having the same length as the first fixed electrode 115 and extending in the fourth direction DR4, separated by the first fixed electrode support portion 113. More specifically, for example, as in Figure 10 As described later, the following structure can also be processed as a structure included in the method of this embodiment, that is, within a detection unit, a combination of a first fixed electrode 115 extending from a first first fixed electrode support portion 113-1B to a second direction DR2 and a first fixed electrode 115 extending from a second first fixed electrode support portion 113-2B to a fourth direction DR4.

[0048] In addition, if Figure 3 As shown in A12 , the physical quantity sensor 1 of this embodiment includes a second fixed electrode section 120 , a second movable electrode section 220 , and a second connecting section 420 . The second connecting section 420 is configured as a part of the movable body MB, extends in the first direction DR1 , and includes the second movable electrode section 220 .

[0049] The second fixed electrode portion 120 includes a second fixed electrode fixing portion 121 fixed to the substrate 10 and a second fixed electrode supporting portion 123 extending from the second fixed electrode fixing portion 121 in the second direction DR2. Furthermore, a second fixed electrode 125 extends from the second fixed electrode supporting portion 123 in the first direction DR1 and the third direction DR3. In other words, the second fixed electrode portion 120 is fixed to the substrate 10 via the second fixed electrode fixing portion 121 and functions as a probe electrode.

[0050] The second movable electrode section 220 includes a second movable electrode 225. The second movable electrode 225 extends in the first direction DR1 and faces the second fixed electrode 125. That is, the second movable electrode section 220 functions as a probe electrode capable of moving integrally with the movable body MB.

[0051] In addition, according to Figure 3 What is clear is that Figure 3 The detection unit composed of the combination of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12 can be regarded as the same as the detection unit composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 rotated 90 degrees to the left. Therefore, although some detailed descriptions are omitted, Figure 3 The detection unit composed of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12 is a detection unit capable of detecting acceleration in the direction along the Y-axis, thereby suppressing cross-axis sensitivity. More specifically, since the length of the second fixed electrode 125 extending in the first direction DR1 is the same as the length of the second fixed electrode 125 extending in the third direction DR3, the second fixed electrode portion 120 is relatively Figure 3 The line segment LS123 is a line segment passing through the second fixed electrode fixing portion 121 and the second fixed electrode supporting portion 123 and along the second direction DR2. In addition, the "same length" here is as described above. In addition, as Figure 3 As shown in A12 , the second movable electrode portion 220 is configured such that the second movable electrode 225 on the first direction DR1 side of the second fixed electrode support portion 123 and the second movable electrode 225 on the third direction DR3 side of the second fixed electrode support portion 123 are line-symmetrical with respect to the line segment LS123 .

[0052] In addition, if Figure 4 As shown in B11 , the physical quantity sensor 1 of this embodiment further includes a first movable electrode fixing portion 311 , a first movable electrode supporting portion 313 , and a first spring 317 . The first movable electrode fixing portion 311 is fixed to the substrate 10 .

[0053] also, Figure 1 The physical quantity sensor 1 shown includes, in addition to the first movable electrode fixing portion 311, a second movable electrode fixing portion 321, a third movable electrode fixing portion 331, and a fourth movable electrode fixing portion 341 described later, which can be collectively referred to as a movable electrode fixing portion 301. Figure 4 B11 can be appropriately replaced with, and the physical quantity sensor 1 of this embodiment further includes a movable electrode fixing portion 301, a first movable electrode supporting portion 313, and a first spring 317. In addition, as described later, Figure 1 In the example shown, the physical quantity sensor 1 includes four movable electrode fixing portions 301. However, the number of movable electrode fixing portions 301 is not limited to four, and various modifications are possible. Figure 19 To be discussed later.

[0054] The first spring 317 is in the shape of a thin line when the substrate 10 is viewed from above, and one end thereof is connected to the first movable electrode supporting portion 313. In addition, the portion to which the other end of the first spring 317 is connected is not particularly limited as long as it can support the first connecting portion 410 and the second connecting portion 420. For example, it may be connected to Figure 4The corner portion of the movable body MB shown in B111 is connected. The corner portion shown in B111 can also be considered to be the intersection of the first connecting portion 410 and the second connecting portion 420. Moreover, by folding this thin wire into a meandering shape, the first spring 317 has the properties of a folding spring, capable of straining and deforming in the XY plane.

[0055] The first movable electrode supporting portion 313 extends from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) in the first cross direction DR11 and is connected to one side of the first spring 317. Figure 4 As shown, the first cross direction DR11 is a direction that intersects the first direction DR1 and the second direction DR2. In other words, the first cross direction DR11 is neither parallel to the X-axis (the first direction DR1 and the third direction DR3) nor parallel to the Y-axis (the second direction DR2 and the fourth direction DR4). Alternatively, the first cross direction DR11 is tilted relative to the X-axis and tilted relative to the Y-axis. The same applies to the second cross direction DR12, the third cross direction DR13, and the fourth cross direction DR14 described later.

[0056] In this manner, the movable electrode fixing portion 301 (first movable electrode fixing portion 311), the first movable electrode supporting portion 313, the first spring 317, the corner portion of the movable body MB indicated by B111, the first connecting portion 410, and the first movable electrode portion 210 are connected in this order. Similarly, the movable electrode fixing portion 301 (first movable electrode fixing portion 311), the first movable electrode supporting portion 313, the first spring 317, the corner portion of the movable body MB indicated by B111, the second connecting portion 420, and the second movable electrode portion 220 are connected in this order.

[0057] In addition, for ease of understanding, Figure 4 The first spring 317 is emphasized in the figure, but the first spring 317 can also be configured to be smaller. More specifically, for example, the length L313 of the first movable electrode support portion 313 can also be made longer than the length of the first spring 317. In addition, the length of the first spring 317 refers to the length of the longest part of the intersecting portion when the area occupied by the first spring 317 in the XY plane intersects with the straight line formed by the direction parallel to the first intersection direction DR11. Thus, the first spring 317 can be arranged at a further outside. Thus, the length L313 of the first movable electrode support portion 313 can be maximized. Thus, since the inertia moment based on the first movable electrode support portion 313 can be reduced, the in-plane rotation mode ( Figure 2 M20 action mode) action.

[0058] Alternatively, for example, a specific relationship may be established between the length L313 of the first movable electrode support portion 313, the length L113 of the first fixed electrode support portion 113, and the length L123 of the second fixed electrode support portion 123. Specifically, for example, the first fixed electrode support portion 113, the second fixed electrode support portion 123, and the first movable electrode support portion 313 may be configured such that the relationship "length L313 > length L113 and length L313 > length L123" is satisfied. This allows for a physical quantity sensor 1 that clearly defines the length reference for the first movable electrode support portion 313 required to suppress movement based on the in-plane rotation mode. This allows for suppression of movement based on the in-plane rotation mode when the first spring 317 is deformed. Similarly, the second movable electrode support portion 323, described below, may be configured such that the length L323 is longer than the length L123 of the second fixed electrode support portion 123 and the length L133 of the third fixed electrode support portion 133. Similarly, the third movable electrode supporting portion 333, described later, may be configured such that the length L333 thereof is longer than the length L133 of the third fixed electrode supporting portion 133 and the length L143 of the fourth fixed electrode supporting portion 143. Similarly, the fourth movable electrode supporting portion 343, described later, may be configured such that the length L343 thereof is longer than the length L143 of the fourth fixed electrode supporting portion 143 and the length L113 of the first fixed electrode supporting portion 113.

[0059] In addition, if Figure 4 As shown in FIG, by aligning the first cross direction DR11 with the direction from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) toward the corner portion shown in FIG, it is possible to establish a relationship in which the first spring 317 is arranged further outward. As a result, the length L313 of the first movable electrode supporting portion 313 can be maximized. As a result, since the moment of inertia based on the first movable electrode supporting portion 313 can be reduced, the in-plane rotation mode ( Figure 2 Furthermore, if the first movable electrode portion 210 and the first connecting portion 410 are considered to be the same, and the second movable electrode portion 220 and the second connecting portion 420 are considered to be the same, then it can also be said that "the first movable electrode supporting portion 313 extends in the first cross direction DR11 and supports the first movable electrode portion 210 and the second movable electrode portion 220 via the first spring 317".

[0060] Furthermore, the first fixed electrodes 115 having different lengths may be extended from the first fixed electrode support portion 113 in the direction along the first direction DR1. More specifically, for example, Figure 5In the first fixed electrode portion 110 shown in C10, the first fixed electrode 115 shown in C11 is set as the "first first fixed electrode", and the first fixed electrode 115 shown in C12 is set as the "second first fixed electrode". Figure 3 As described in the above, since the first fixed electrode portion 110 is a line-symmetrical structure with respect to the line segment LS113, Figure 5 In the first fixed electrode portion 110 shown in FIG. 10 , the first fixed electrode 115 extending toward the fourth direction DR4 is omitted. Figure 5 The same applies to the first fixed electrode portion 110 shown in C20.

[0061] exist Figure 5 In the first fixed electrode portion 110 shown in C10, the "second first fixed electrode" is located closer to the first direction DR1 than the "first first fixed electrode." Furthermore, the "first first fixed electrode" and the "second first fixed electrode" extend from the first fixed electrode supporting portion 113 along the second direction DR2 such that the length L12 of the "second first fixed electrode" is longer than the length L11 of the "first first fixed electrode."

[0062] In addition, in this embodiment, the length of the first fixed electrode 115 in the first fixed electrode unit 110 is not particularly limited, and does not exclude Figure 5 The first fixed electrode portion 110 shown in C20 is the same as the first fixed electrode portion 110 shown in C20. In the first fixed electrode portion 110 shown in C20, the first fixed electrode 115 shown in C21 corresponds to the "first first fixed electrode", and the first fixed electrode 115 shown in C22 corresponds to the "second first fixed electrode". Furthermore, the same applies to the case where, in the first fixed electrode portion 110 shown in C20, the "second first fixed electrode" is located closer to the first direction DR1 than the "first first fixed electrode". Furthermore, in the first fixed electrode portion 110 shown in C20, the length L22 of the "second first fixed electrode" is the same as the length L21 of the "first first fixed electrode". The "same length" here is as described above.

[0063] In this embodiment, the Figure 5 The structure of the first fixed electrode portion 110 shown in C10 is still the same as that of the first fixed electrode portion 110. Figure 5 The structure of the first fixed electrode portion 110 shown in C20 can be appropriately determined by the user in consideration of a predetermined situation. The predetermined situation is, for example, a situation related to the positional relationship of the first movable electrode support portion 313, but it can also be other situations. Specifically, for example, as described above, the first movable electrode support portion 313 is tilted relative to the X-axis, so that the boundary with the first movable electrode support portion 313 can be like Figure 5The dotted line of C13 is shown as follows. Figure 5 The same is true for the dotted line shown in C23. In this case, when using, for example Figure 5 When the first fixed electrode portion 110 is constructed as shown in C20, a vacant space as shown in C24 is generated. Figure 5 In the case where the first movable electrode supporting portion 313 has a boundary as shown by the dotted line of C13, by using Figure 5 The structure of the first fixed electrode portion 110 shown in C10 can improve the efficiency of the design of the physical quantity sensor 1. In addition, by adjusting the length L11 and the length L12, for example, the length L113 of the first fixed electrode support portion 113 can be adjusted. Similarly, since the length L123 of the second fixed electrode support portion 123 can be adjusted, for example, the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123 can be designed to be approximately the same. In addition, although not shown in the figure, Figure 5 The first fixed electrode portion 110 shown in C10 is illustrated in a manner that all the first fixed electrodes 115 have different lengths, but the present invention is not limited thereto, and the first fixed electrode portion 110 may be configured in a manner that some of the first fixed electrodes 115 have the same length. More specifically, for example, Figure 5 In the first fixed electrode portion 110 shown in C10, the first fixed electrode portion 110 may be configured such that the lengths of the plurality of first fixed electrodes 115 other than the first fixed electrode 115 shown in C11 and the first fixed electrode 115 shown in C12 are the same. In this case, the first fixed electrode portion 110 is also configured to be line-symmetrical with respect to the line segment LS113.

[0064] As described above, this embodiment relates to a physical quantity sensor 1 that detects physical quantities in a first direction DR1 and a second direction DR2, which are in-plane directions and perpendicular to each other. The physical quantity sensor 1 includes a substrate 10, a first fixed electrode support 113, a first fixed electrode section 110, a first movable electrode section 210, a second fixed electrode support 123, a second movable electrode section 220, and a first movable electrode support 313. The first fixed electrode support 113 is fixed to the substrate 10 at the first fixed electrode fixing section 111 and extends in the first direction DR1. The first fixed electrode section 110 includes a first fixed electrode 115 that extends from the first fixed electrode support 113 in the second direction DR2 and in the fourth direction DR4, which is the opposite direction of the second direction DR2. The first movable electrode section 210 includes a first movable electrode 215 extending in the second direction DR2 and the fourth direction DR4 and facing the first fixed electrode 115. The second fixed electrode support section 123 is fixed to the substrate 10 at the second fixed electrode fixing section 121 and extends in the second direction DR2. The second fixed electrode section 120 includes a second fixed electrode 125 extending from the second fixed electrode support section 123 in the first direction DR1 and in the third direction DR3, which is the opposite direction of the first direction DR1. The second movable electrode section 220 includes a second movable electrode 225 extending in the first direction DR1 and the third direction DR3 and facing the second fixed electrode 125. The first movable electrode supporting portion 313 is fixed to the substrate 10 at the movable electrode fixing portion 301 (first movable electrode fixing portion 311 ), extends in the first intersecting direction DR11 intersecting the first direction DR1 and the second direction DR2 , and supports the first movable electrode portion 210 and the second movable electrode portion 220 via the first spring 317 .

[0065] Thus, since the physical quantity sensor 1 of this embodiment includes the substrate 10, the first fixed electrode support portion 113, the first fixed electrode portion 110, and the first movable electrode portion 210, a detection unit can be constructed in which the first fixed electrode 115 and the first movable electrode 215 face each other. Furthermore, since the physical quantity sensor 1 of this embodiment includes the substrate 10, the second fixed electrode support portion 123, the second fixed electrode portion 120, and the second movable electrode portion 220, a detection unit can be constructed in which the second fixed electrode 125 and the second movable electrode 225 face each other. Thus, it is possible to construct a physical quantity sensor 1 that detects physical quantities in the first direction DR1 and the second direction DR2, which are perpendicular to each other. Furthermore, since the physical quantity sensor 1 also includes the first movable electrode support portion 313, it is possible to support the first movable electrode portion 210 and the second movable electrode portion 220.

[0066] Patent Document 1 discloses a method in which a fixed comb-tooth electrode extends from one side of a fixed electrode support. However, this method, as described above, may not suppress cross-axis sensitivity. Regarding this point, in the physical quantity sensor 1 of this embodiment, since the first fixed electrode support 113 includes the first fixed electrode 115 extending in the second direction DR2 and the fourth direction DR4 opposite thereto, it is possible to detect physical quantities along the first direction DR1 while suppressing cross-axis sensitivity. Similarly, since the second fixed electrode support 123 includes the second fixed electrode 125 extending in the first direction DR1 and the third direction DR3 opposite thereto, it is possible to detect physical quantities along the second direction DR2 while suppressing cross-axis sensitivity. This improves the detection accuracy of the physical quantity sensor 1. Furthermore, by extending the first movable electrode supporting portion 313 from the movable electrode fixing portion 301 along the first cross direction DR11 that intersects the first direction DR1 and the second direction DR2, it is possible to construct a basic structure of the physical quantity sensor 1 that suppresses cross-axis sensitivity and minimizes the influence of warping of the substrate 10.

[0067] Alternatively, the movable body MB may be supported by the first movable electrode support portion 313 via the first spring 317. Furthermore, the movable body MB may include a first connecting portion 410 extending in the second direction DR2 and having the first movable electrode portion 210, and a second connecting portion 420 extending in the first direction DR1 and having the second movable electrode portion 220. This allows for a relationship in which the first movable electrode support portion 313 extending along the first cross direction DR11 is connected to one side of the first spring 317, while the movable body MB, comprising the first connecting portion 410 extending in the second direction DR2 and the second connecting portion 420 extending in the first direction DR1, is connected to the other side. This allows the movable body MB to have a rectangular shape, with the first spring 317 positioned further outward. This configuration makes it possible to construct a physical quantity sensor 1 that suppresses motion based on the in-plane rotation mode by making the first movable electrode support portion 313 longer.

[0068] Alternatively, the first spring 317 may be provided at the corner (B111) where the first connecting portion 410 and the second connecting portion 420 of the movable body MB intersect. Alternatively, the first movable electrode support portion 313 may extend in the first intersecting direction DR11 from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) toward the corner (B111). This allows the first spring 317 to be positioned at the corner farthest from the movable electrode fixing portion 301 (first movable electrode fixing portion 311). This allows the first movable electrode support portion 313 to be configured longer, thereby enabling the construction of a physical quantity sensor 1 that suppresses movement based on the in-plane rotation mode.

[0069] Furthermore, the length L313 of the first movable electrode support portion 313 may be longer than the length of the first spring 317 in the first cross direction DR11. This allows the first spring 317 to be positioned further outward, increasing the length L313 of the first movable electrode support portion 313. This can suppress the in-plane rotation mode operation of the physical quantity sensor 1.

[0070] Furthermore, the length L313 of the first movable electrode support portion 313 may be longer than the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123. This allows for the construction of a physical quantity sensor 1 in which the length reference of the first movable electrode support portion 313 required to suppress movement based on the in-plane rotation mode is clearly defined.

[0071] Alternatively, the first fixed electrode portion 110 may include a first first fixed electrode and a second first fixed electrode located closer to the first first fixed electrode in the first direction DR1. Furthermore, the length (L12) of the second first fixed electrode in the second direction DR2 may be longer than the length (L11) of the first first fixed electrode. This allows for consideration of the arrangement of the first movable electrode support portion 313 tilted relative to the X-axis or Y-axis, improving the design efficiency of the physical quantity sensor 1.

[0072] In addition, the method of this embodiment can also be Figure 1 The physical quantity sensor 1 of the structure shown in A3, A4, B2, B3, and B4 is implemented. More specifically, for example, Figure 6 As shown in A13 , the physical quantity sensor 1 of this embodiment includes a third fixed electrode section 130 , a third movable electrode section 230 , and a third connecting section 430 . The third connecting section 430 is configured as a part of the movable body MB, extends along the second direction DR2 , and includes the third movable electrode section 230 .

[0073] The third fixed electrode portion 130 includes a third fixed electrode fixing portion 131 fixed to the substrate 10, and a third fixed electrode supporting portion 133 extending from the third fixed electrode fixing portion 131 in the third direction DR3 and having a length L133. Furthermore, a third fixed electrode 135 extends from the third fixed electrode supporting portion 133 in the second direction DR2 and the fourth direction DR4. In other words, the third fixed electrode portion 130 is fixed to the substrate 10 via the third fixed electrode fixing portion 131, functioning as a probe electrode.

[0074] The third movable electrode section 230 includes a third movable electrode 235. The third movable electrode 235 extends in the second direction DR2 or the fourth direction DR4 and faces the third fixed electrode 135. That is, the third movable electrode section 230 functions as a probe electrode capable of moving integrally with the movable body MB.

[0075] Figure 6 The detection unit shown in A13 is composed of a combination of the third fixed electrode portion 130 and the third movable electrode portion 230. Figure 3 Compared to the detection unit composed of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11, the relationship is symmetrical with respect to the Y axis when the substrate 10 is viewed from above. Therefore, although detailed description is omitted, Figure 6 The detection unit shown in A13, which is composed of the combination of the third fixed electrode portion 130 and the third movable electrode portion 230, is configured to detect acceleration in the direction along the X-axis and suppress cross-axis sensitivity. In addition, by making the length of the third fixed electrode 135 extending in the second direction DR2 and the length of the third fixed electrode 135 extending in the fourth direction DR4 the same, the detection unit 135 can be detected in the direction along the X-axis and suppress cross-axis sensitivity. Figure 6 The third fixed electrode portion 130 is formed in a line symmetrical manner along the line segment LS133. The line segment LS133 is a line segment passing through the third fixed electrode fixing portion 131 and the third fixed electrode supporting portion 133 and along the first direction DR1. In addition, the "same length" here is as described above. In addition, as Figure 6 As shown in A13 , the third movable electrode portion 230 is configured such that the third movable electrode 235 on the second direction DR2 side of the third fixed electrode support portion 133 and the third movable electrode 235 on the fourth direction DR4 side of the third fixed electrode support portion 133 are line symmetric with respect to the line segment LS133 .

[0076] In addition, for example, Figure 6 As shown in A14 , the physical quantity sensor 1 of this embodiment includes a fourth fixed electrode section 140 , a fourth movable electrode section 240 , and a fourth connecting section 440 . The fourth connecting section 440 is configured as a part of the movable body MB, extends in the first direction DR1 , and includes the fourth movable electrode section 240 .

[0077] The fourth fixed electrode portion 140 includes a fourth fixed electrode fixing portion 141 fixed to the substrate 10, and a fourth fixed electrode supporting portion 143 extending from the fourth fixed electrode fixing portion 141 in the fourth direction DR4 and having a length L143. Furthermore, a fourth fixed electrode 145 extends from the fourth fixed electrode supporting portion 143 in the first direction DR1 and the third direction DR3. In other words, the fourth fixed electrode portion 140 is fixed to the substrate 10 via the fourth fixed electrode fixing portion 141, functioning as a probe electrode.

[0078] The fourth movable electrode section 240 includes a fourth movable electrode 245. The fourth movable electrode 245 extends in the first direction DR1 or the third direction DR3 and faces the fourth fixed electrode 145. That is, the fourth movable electrode section 240 functions as a probe electrode capable of moving integrally with the movable body MB.

[0079] Figure 6 The detection unit shown in A14 is composed of a combination of the fourth fixed electrode portion 140 and the fourth movable electrode portion 240. Figure 3 Compared to the detection unit composed of the combination of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12, the relationship is symmetrical with respect to the X axis when the substrate 10 is viewed from above. Therefore, although detailed description is omitted, Figure 6 The detection unit shown in A14, which is composed of the combination of the fourth fixed electrode portion 140 and the fourth movable electrode portion 240, is configured to detect acceleration in the direction along the Y-axis and suppress cross-axis sensitivity. In addition, by making the length of the fourth fixed electrode 145 extending in the first direction DR1 the same as the length of the fourth fixed electrode 145 extending in the third direction DR3, the detection unit 140 can be configured to detect acceleration in the direction along the Y-axis and suppress cross-axis sensitivity. Figure 6 The fourth fixed electrode portion 140 is formed in a line symmetrical manner with respect to the line segment LS143. The line segment LS143 is a line segment passing through the fourth fixed electrode fixing portion 141 and the fourth fixed electrode supporting portion 143 and along the second direction DR2. In addition, the "same length" here is as described above. In addition, as Figure 6 As shown in A14 , the fourth movable electrode portion 240 is configured such that the fourth movable electrode 245 on the first direction DR1 side of the fourth fixed electrode support portion 143 and the fourth movable electrode 245 on the third direction DR3 side of the fourth fixed electrode support portion 143 are line-symmetrical with respect to the line segment LS143 .

[0080] In addition, if Figure 7 As shown in B12 , the physical quantity sensor 1 of this embodiment further includes a second movable electrode fixing portion 321 , a second movable electrode supporting portion 323 , and a second spring 327 . The second movable electrode fixing portion 321 is fixed to the substrate 10 .

[0081] The second spring 327 functions as a return spring similar to the first spring 317, and one end of the second spring 327 is connected to the second movable electrode support portion 323. Furthermore, the other end of the second spring 327 is connected to a corner portion of the movable body MB indicated by B112. The corner portion indicated by B112 is the portion where the second connecting portion 420 and the third connecting portion 430 intersect.

[0082] The second movable electrode supporting portion 323 extends from the movable electrode fixing portion 301 (the second movable electrode fixing portion 321) in the second cross direction DR12 and is connected to one side of the second spring 327. Figure 7 As shown, the second intersecting direction DR12 is a direction intersecting the second direction DR2 and the third direction DR3 and is a direction from the movable electrode fixing portion 301 (second movable electrode fixing portion 321 ) toward the corner portion indicated by B112 .

[0083] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (second movable electrode fixing portion 321), the second movable electrode supporting portion 323, the second spring 327, the corner portion of the movable body MB indicated by B112, the second connecting portion 420, and the second movable electrode portion 220 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (second movable electrode fixing portion 321), the second movable electrode supporting portion 323, the second spring 327, the corner portion of the movable body MB indicated by B112, the third connecting portion 430, and the third movable electrode portion 230 are connected in this order.

[0084] In addition, if Figure 7 As shown in B13 , the physical quantity sensor 1 of this embodiment further includes a third movable electrode fixing portion 331 , a third movable electrode supporting portion 333 , and a third spring 337 . The third movable electrode fixing portion 331 is fixed to the substrate 10 .

[0085] The third spring 337 functions as a return spring similar to the first spring 317 and the like, and one end thereof is connected to the third movable electrode support portion 333. Furthermore, the other end of the third spring 337 is connected to a corner portion of the movable body MB indicated by B113. The corner portion indicated by B113 is the portion where the third connecting portion 430 and the fourth connecting portion 440 intersect.

[0086] The third movable electrode supporting portion 333 extends from the movable electrode fixing portion 301 (third movable electrode fixing portion 331) in the third cross direction DR13 and is connected to one side of the third spring 337. Figure 7 As shown, the third intersecting direction DR13 is a direction intersecting the third direction DR3 and the fourth direction DR4 and is a direction from the movable electrode fixing portion 301 (third movable electrode fixing portion 331 ) toward the corner portion indicated by B113 .

[0087] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (third movable electrode fixing portion 331), the third movable electrode supporting portion 333, the third spring 337, the corner portion of the movable body MB indicated by B113, the third connecting portion 430, and the third movable electrode portion 230 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (third movable electrode fixing portion 331), the third movable electrode supporting portion 333, the third spring 337, the corner portion of the movable body MB indicated by B113, the fourth connecting portion 440, and the fourth movable electrode portion 240 are connected in this order.

[0088] In addition, if Figure 8 As shown in B14 , the physical quantity sensor 1 of this embodiment further includes a fourth movable electrode fixing portion 341 , a fourth movable electrode supporting portion 343 , and a fourth spring 347 . The fourth movable electrode fixing portion 341 is fixed to the substrate 10 .

[0089] The fourth spring 347 functions as a return spring similar to the first spring 317 and the like, and one end thereof is connected to the fourth movable electrode support portion 343. Furthermore, the other end of the fourth spring 347 is connected to a corner portion of the movable body MB indicated by B114. The corner portion indicated by B114 is the portion where the fourth connecting portion 440 intersects the first connecting portion 410.

[0090] The fourth movable electrode supporting portion 343 extends from the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341) in the fourth cross direction DR14 and is connected to one side of the fourth spring 347. Figure 8 As shown, the fourth intersecting direction DR14 is a direction intersecting the fourth direction DR4 and the first direction DR1 and is a direction from the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341 ) toward the corner portion indicated by B114 .

[0091] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), the fourth movable electrode supporting portion 343, the fourth spring 347, the corner portion of the movable body MB indicated by B114, the fourth connecting portion 440, and the fourth movable electrode portion 240 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), the fourth movable electrode supporting portion 343, the fourth spring 347, the corner portion of the movable body MB indicated by B114, the first connecting portion 410, and the first movable electrode portion 210 are connected in this order.

[0092] According to the above content, Figure 1 In the physical quantity sensor 1 shown, the movable electrode fixing portion 301 includes Figure 4The first movable electrode fixing portion 311 shown in B11, Figure 7 The second movable electrode fixing portion 321 shown in B12, Figure 7 The third movable electrode fixing portion 331 shown in B13 and Figure 8 The fourth movable electrode fixing portion 341 shown in B14 is shown in FIG. In addition, the first movable electrode fixing portion 311, the second movable electrode fixing portion 321, the third movable electrode fixing portion 331 and the fourth movable electrode fixing portion 341 are located at the same position when the substrate 10 is viewed from above. Figure 1 In addition, the first fixed electrode fixing portion 111, the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131 and the fourth fixed electrode fixing portion 141 are located in the predetermined area AR when the substrate 10 is viewed from above. Figure 1 Specifically, the fixed portions fixed to the substrate 10 are concentrated in the predetermined area AR, which is an area near the center of the substrate 10. This minimizes the effects of warping of the substrate 10 due to external stress or temperature changes. For example, this can suppress fluctuations in the electrical signal output from the probe electrode including the first fixed electrode portion 110. The same applies to the probe electrodes including the second fixed electrode portion 120, the third fixed electrode portion 130, and the fourth fixed electrode portion 140.

[0093] In the following, the first fixed electrode fixing portion 111, the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131, and the fourth fixed electrode fixing portion 141 are sometimes collectively referred to as "fixed electrode fixing portions." Figure 11 As will be described later, the same also applies when the first fixed electrode fixing portion 111 is divided into the first fixed electrode fixing portion 111 -C and the first fixed electrode fixing portion 111 -D.

[0094] As described above, the physical quantity sensor 1 of this embodiment includes a third fixed electrode support portion 133, a third fixed electrode portion 130, a third movable electrode portion 230, a fourth fixed electrode support portion 143, a fourth fixed electrode portion 140, a fourth movable electrode portion 240, a second movable electrode support portion 323, a third movable electrode support portion 333, and a fourth movable electrode support portion 343. The third fixed electrode support portion 133 is fixed to the substrate 10 at the third fixed electrode fixing portion 131 and extends in the third direction DR3. The third fixed electrode portion 130 includes a third fixed electrode 135 extending from the third fixed electrode support portion 133 in the second direction DR2 and the fourth direction DR4. The third movable electrode portion 230 includes a third movable electrode 235 extending in the second direction DR2 and the fourth direction DR4 and facing the third fixed electrode 135. The fourth fixed electrode support portion 143 is fixed to the substrate 10 at the fourth fixed electrode fixing portion 141 and extends in the fourth direction DR4. The fourth fixed electrode portion 140 includes a fourth fixed electrode 145 extending from the fourth fixed electrode support portion 143 in the first direction DR1 and the third direction DR3. The fourth movable electrode portion 240 includes a fourth movable electrode 245 extending in the first direction DR1 and the third direction DR3 and facing the fourth fixed electrode 145. The second movable electrode support portion 323 is fixed to the substrate 10 at the movable electrode fixing portion 301 (second movable electrode fixing portion 321) and extends in the second intersecting direction DR12 intersecting the second direction DR2 and the third direction DR3. It supports the second movable electrode portion 220 and the third movable electrode portion 230 via the second spring 327. The third movable electrode supporting portion 333 is fixed to the substrate 10 at the movable electrode fixing portion 301 (third movable electrode fixing portion 331), extends in a third intersecting direction DR13 intersecting the third direction DR3 and the fourth direction DR4, and supports the third movable electrode portion 230 and the fourth movable electrode portion 240 via the third spring 337. The fourth movable electrode supporting portion 343 is fixed to the substrate 10 at the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), extends in a fourth intersecting direction DR14 intersecting the fourth direction DR4 and the first direction DR1, and supports the fourth movable electrode portion 240 and the first movable electrode portion 210 via the fourth spring 347. Thus, a physical quantity sensor 1 can be constructed, which also includes a third fixed electrode support portion 133, a third fixed electrode portion 130, a third movable electrode portion 230, a fourth fixed electrode support portion 143, a fourth fixed electrode portion 140, a fourth movable electrode portion 240, a second movable electrode support portion 323, a third movable electrode support portion 333 and a fourth movable electrode support portion 343.

[0095] The physical quantity sensor 1 of this embodiment may include a movable body MB supported by first to fourth movable electrode supporting portions (313, 323, 333, 343) via first to fourth springs (317, 327, 337, 347). Furthermore, the movable body MB may include a first connecting portion 410 extending in the second direction DR2 and including the first movable electrode portion 210; a second connecting portion 420 extending in the first direction DR1 and including the second movable electrode portion 220; a third connecting portion 430 extending in the second direction DR2 and including the third movable electrode portion 230; and a fourth connecting portion 440 extending in the first direction DR1 and including the fourth movable electrode portion 240. Thus, the second connecting portion 420 and the fourth connecting portion 440 extend along the first direction DR1, and the first connecting portion 410 and the third connecting portion 430 extend along the second direction DR2, thereby constructing the physical quantity sensor 1 including the rectangular movable body MB. This allows the physical quantity sensor 1 to have a more suitable shape.

[0096] Furthermore, the movable electrode fixing portion 301 includes first to fourth movable electrode fixing portions (311, 321, 331, 341) that fix the first to fourth movable electrode supporting portions (313, 323, 333, 343) to the substrate 10. This allows for the construction of a physical quantity sensor 1 in which a plurality of movable electrode supporting portions are fixed to the substrate 10 using respective movable electrode fixing portions 301. This improves the degree of design freedom of the physical quantity sensor 1.

[0097] The method of this embodiment is not limited to the above, and various modifications can be implemented. For example, the physical quantity sensor 1 can also be configured so that a predetermined relationship holds true with respect to the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123. In this embodiment, the predetermined relationship of the lengths means, for example, that the lengths are substantially the same. "Substantially the same length" in this embodiment includes the following: the lengths are exactly the same; the lengths can be considered the same if manufacturing errors are taken into account; the lengths were originally intended to be the same but were subsequently adjusted in a predetermined manner, etc. More specifically, for example, the length that has been adjusted in a predetermined manner refers to a length that has a fluctuation range of approximately ±30% relative to the design value.

[0098] Thus, in the physical quantity sensor 1 of this embodiment, the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123 are approximately the same. This allows the physical quantity sensor 1 to be constructed in a manner that minimizes the effects of warping of the substrate 10. For example, warping may occur in the substrate 10 due to external stress or temperature changes. Therefore, if warping occurs near the center of the detection unit, the effects of warping will be greater as the distance from the center increases, such as the change in the opposing area of ​​the comb-tooth electrodes. Therefore, it is not preferable to construct the detection unit in a manner where one of the lengths in the X direction and the lengths in the Y direction is longer than the other. In this regard, by applying the method of this embodiment, the lengths in the X direction and the Y direction of the detection unit can be made approximately the same. This allows the physical quantity sensor 1 to be constructed in a manner that minimizes the effects of warping of the substrate 10.

[0099] In addition, for example, although not shown in the figure, the physical quantity sensor 1 may be configured so that the outer shape of the movable body MB is substantially square. More specifically, for example, Figure 1 As shown, when the shape of the movable body MB is a frame-like rectangle, the physical quantity sensor 1 may be configured so that the length of the first connecting portion 410 and the length of the second connecting portion 420 are substantially the same. Figure 1 The shape of the physical quantity sensor 1 shown is highly symmetrical. Therefore, if the outer shape of the movable body MB can be determined to be approximately square, the shape of the detection unit will naturally be determined to be approximately square as well. Specifically, in the physical quantity sensor 1 of this embodiment, the length of the first connecting portion 410 is approximately the same as the length of the second connecting portion 420. This creates a reference for configuring a detection unit whose length in the X-direction and the length in the Y-direction are approximately the same. This allows the construction of a physical quantity sensor 1 that minimizes the effects of warping of the substrate 10.

[0100] Alternatively, the physical quantity sensor 1 may be constructed so that a predetermined relationship holds between the angle R1 formed by the first direction DR1 and the first cross direction DR11 and the angle R2 formed by the second direction DR2 and the first cross direction DR11. More specifically, for example, the physical quantity sensor 1 may be constructed in such a manner that the angle R1 and the angle R2 are substantially the same. Furthermore, the above content may be replaced by the physical quantity sensor 1 being constructed in such a manner that the angle R3 and the angle R4 are substantially the same, in the case where there is an angle R3 formed by the third direction DR3 and the first cross direction DR11 and an angle R4 formed by the fourth direction DR4 and the first cross direction DR11. This is because, as Figure 4As shown, angle R3 is equal to angle R1, and angle R2 is equal to angle R4. In this embodiment, "approximately the same angle" includes the following: angles that are exactly the same; angles that can be considered the same after accounting for manufacturing errors; angles that were originally designed to be the same but subsequently underwent specified adjustments. More specifically, for example, an angle that has undergone specified adjustments refers to an angle that has a fluctuation range of approximately ±10° relative to the design value. Thus, in the physical quantity sensor 1 of this embodiment, the angle R1 formed between the first direction DR1 and the first intersecting direction DR11 and the angle R2 formed between the second direction DR2 and the first intersecting direction DR11 are approximately the same. Thus, based on the angle R1 formed between the first direction DR1 and the first intersecting direction DR11 and the angle R2 formed between the second direction DR2 and the first intersecting direction DR11, a reference for detecting cells having approximately the same length in the X-direction and the Y-direction can be constructed. This allows for the construction of a physical quantity sensor 1 that minimizes the effects of warping of the substrate 10.

[0101] In addition, although the above description Figure 1 The detection unit shown in the dotted box of A1 is as follows Figure 3 As shown in A11, a first fixed electrode support portion 113 extending in the first direction DR1 is included, but the method of this embodiment is not limited thereto. For example, Figure 1 The detection unit indicated by the dotted-line frame A1 may be configured such that a plurality of first fixed electrode support portions 113 extending in the first direction DR1 are arranged in parallel.

[0102] Specifically, for example, Figure 1 The detection unit shown in the dotted box of A1 is deformed into Figure 9 The detection unit shown in A21. Figure 9 In the detection unit, the first first fixed electrode support portion 113-1A extends from the first fixed electrode fixing portion 111 along the first direction DR1. Moreover, the fixed electrode support portion extends from the first first fixed electrode support portion 113-1A in the second direction DR2, and the second first fixed electrode support portion 113-2A ​​extends from the fixed electrode support portion along the first direction DR1. On the other hand, the fixed electrode support portion extends from the first first fixed electrode support portion 113-1A in the fourth direction DR4, and the third first fixed electrode support portion 113-3A extends from the fixed electrode support portion along the first direction DR1. That is, as Figure 9As shown, the first fixed electrode portion 110 is constructed such that the first first fixed electrode support portion 113-1A, the second first fixed electrode support portion 113-2A, and the third first fixed electrode support portion 113-3A are parallel to each other, and the three first fixed electrode support portions 113 are arranged in parallel. Moreover, the first fixed electrode 115 extends from the first first fixed electrode support portion 113-1A in the second direction DR2 and the fourth direction DR4. Moreover, the first movable electrode 215 is arranged in a manner opposite to the first fixed electrode 115. Similarly, the first fixed electrode 115 extends from the second first fixed electrode support portion 113-2A ​​in the second direction DR2 and the fourth direction DR4, and extends from the third first fixed electrode support portion 113-3A in the second direction DR2 and the fourth direction DR4. In addition, in Figure 9 In the embodiment, only one first fixed electrode is represented by the reference numeral 115, and the others are omitted. In addition, only one first movable electrode is represented by the reference numeral 215, and the others are omitted. Figure 10 、 Figure 11 、 Figure 12 The same is true in .

[0103] In addition, for example, Figure 9 The first fixed electrode portion 110 associated with the dotted frame of A121 is defined as the "first first fixed electrode portion," and the first fixed electrode portion 110 associated with the dotted frame of A122 is defined as the "second first fixed electrode portion." In this case, the position of the "second first fixed electrode portion" is located closer to the first direction DR1 than the position of the "first first fixed electrode portion." Furthermore, in the "first first fixed electrode portion," the number of fixed electrode support portions is only one, the first first fixed electrode support portion 113-1A. Therefore, there are two first fixed electrodes 115 arranged in the second direction DR2. On the other hand, the "second first fixed electrode portion" includes three fixed electrode support portions, namely the first first fixed electrode support portion 113-1A, the second first fixed electrode support portion 113-2A, and the third first fixed electrode support portion 113-3A. Therefore, in the "second first fixed electrode portion," there are a maximum of six first fixed electrodes 115 arranged in the second direction DR2. Thus, in the physical quantity sensor 1 of this embodiment, the first fixed electrode portion 110 includes a first first fixed electrode portion ( Figure 9 A121), and a second first fixed electrode portion ( Figure 9A122 of FIG. The number of first fixed electrodes 115 arranged in the second direction DR2 in the first first fixed electrode section is smaller than the number of first fixed electrodes 115 arranged in the second direction DR2 in the second first fixed electrode section. This allows for the formation of comb-teeth electrodes that take into account the shape of the detection unit, and the length of the first fixed electrodes 115 can be designed to be shorter, thereby increasing the rigidity of the first fixed electrodes 115 and the first movable electrode 215.

[0104] In addition, for example, Figure 1 The detection unit shown in the dotted box of A1 is deformed into Figure 10 The detection unit shown in A31. Figure 10 In the detection unit, the fixed electrode support portion extends from the first fixed electrode fixing portion 111 along the first direction DR1, and the fixed electrode support portion extends from the fixed electrode support portion to the second direction DR2. Moreover, the first first fixed electrode support portion 113-1B extends from the fixed electrode support portion extending in the second direction DR2 along the first direction DR1. In addition, the fixed electrode support portion extends from the first fixed electrode fixing portion 111 along the first direction DR1, and the fixed electrode support portion extends from the fixed electrode support portion to the fourth direction DR4. Moreover, the second first fixed electrode support portion 113-2B extends from the fixed electrode support portion extending in the fourth direction DR4 along the first direction DR1. That is, as Figure 10 As shown, the first fixed electrode portion 110 is configured such that the first first fixed electrode support portion 113-1B and the second first fixed electrode support portion 113-2B are parallel to each other, and the two first fixed electrode support portions 113 are arranged in parallel. Moreover, the first fixed electrode 115 extends from the first first fixed electrode support portion 113-1B in the second direction DR2 and the fourth direction DR4, and the first movable electrode 215 is arranged in a manner opposite to the first fixed electrode 115. Similarly, the first fixed electrode 115 extends from the second first fixed electrode support portion 113-2B in the second direction DR2 and the fourth direction DR4, and the first movable electrode 215 is arranged in a manner opposite to the first fixed electrode 115. In addition, the example of the first fixed electrode portion 110 in which a plurality of first fixed electrode support portions 113 are arranged side by side is not limited to Figure 9 、 Figure 10 In the example shown, for example, the number of the first fixed electrode supporting parts 113 arranged in parallel may be four or more.

[0105] in addition, Figure 9 、 Figure 10This is an example in which a fixed electrode support portion is extended from one first fixed electrode fixing portion 111 in one detection unit, but the present invention is not limited thereto. Fixed electrode support portions may be extended from a plurality of first fixed electrode fixing portions 111 in one detection unit. Specifically, for example, Figure 1 The detection unit shown in the dotted box of A1 is deformed into Figure 11 The detection unit shown in A41. Figure 11 In the figure, the detection unit indicated by the dotted box of A411 and the detection unit indicated by the dotted box of A412 constitute a detection unit.

[0106] The detection unit shown in A411 includes a first fixed electrode portion 110-C and a first movable electrode portion 210-C included in the first connecting portion 410. The first fixed electrode portion 110-C includes a first fixed electrode fixing portion 111-C, a first first fixed electrode supporting portion 113-1C, and a second first fixed electrode supporting portion 113-2C. The first first fixed electrode supporting portion 113-1C extends from the first fixed electrode fixing portion 111-C in the first direction DR1. Furthermore, a fixed electrode supporting portion extends from the first first fixed electrode supporting portion 113-1C in the second direction DR2, and a second first fixed electrode supporting portion 113-2C extends from this fixed electrode supporting portion along the first direction DR1.

[0107] The detection unit shown in A412 includes a first fixed electrode portion 110-D and a first movable electrode portion 210-D included in the first connecting portion 410. The first fixed electrode portion 110-D includes a first fixed electrode fixing portion 111-D, a first first fixed electrode supporting portion 113-1D, and a second first fixed electrode supporting portion 113-2D. The first first fixed electrode supporting portion 113-1D extends from the first fixed electrode fixing portion 111-D in the first direction DR1. Furthermore, a fixed electrode supporting portion extends from the first first fixed electrode supporting portion 113-1D in the fourth direction DR4, and a second first fixed electrode supporting portion 113-2D extends from this fixed electrode supporting portion along the first direction DR1.

[0108] Figure 11 The detection unit shown in A41 is Figure 3The detection unit shown in A11 is similarly configured to detect physical quantities in the X-axis direction while suppressing cross-axis sensitivity. For example, the first fixed electrode 115 extending from the first first fixed electrode support portion 113-1C in the second direction DR2 and the first fixed electrode 115 extending from the first first fixed electrode support portion 113-1D in the fourth direction DR4 can be considered the same as the first fixed electrode 115 extending from a single fixed electrode support portion in both the second direction DR2 and the fourth direction DR4. Furthermore, the first fixed electrode portion 110-C within the dashed frame of A411 and the first fixed electrode portion 110-D within the dashed frame of A412 are line-symmetrical with respect to a line segment (not shown) passing between the first fixed electrode fixing portion 111-C and the first fixed electrode fixing portion 111-D and along the first direction DR. The same applies to the first movable electrode 215 in the dotted-line frame of A411 and the first movable electrode 215 in the dotted-line frame of A412.

[0109] In addition, when using Figure 11 In the case of the detection unit shown in A41, it can also be as Figure 11 As shown in A413 of FIG, an opening is provided for the first connecting portion 410. Thus, Figure 17 As will be described later in the text, the wiring is routed from the fixed electrode support portion. Figure 11 It does not mean that an opening must be provided; Figure 1 The detection unit shown in the dotted box of A1 is deformed into, for example Figure 12 The detection unit of A51 is shown. Figure 12 The detection unit shown in A51 is different from the detection unit in that the first connection portion 410 does not have an opening. Figure 11 Different from others Figure 11 The detection unit shown in A41 is the same.

[0110] Specifically, Figure 12 The detection unit shown in A51 includes the detection unit shown in the dotted box of A511 and the detection unit shown in the dotted box of A512. The detection unit shown in A511 includes the first fixed electrode portion 110-E and the first movable electrode portion 210-E possessed by the first connecting portion 410. The first fixed electrode portion 110-E includes the first fixed electrode fixing portion 111-E, the first first fixed electrode supporting portion 113-1E and the second first fixed electrode supporting portion 113-2E. In addition, Figure 12 The first fixed electrode fixing portion 111-E and Figure 11 The first fixed electrode fixing portion 111-C is the same. Figure 12 The first first fixed electrode support portion 113-1E and Figure 11The first fixed electrode support portion 113-1C is the same as the first one. Figure 12 The second first fixed electrode support portion 113-2E and Figure 11 The second first fixed electrode support portion 113-2C is the same, so the description thereof is omitted. Figure 12 The first fixed electrode 115 extending from the first fixed electrode portion 110-E and Figure 11 The first fixed electrode 115 extending from the first fixed electrode portion 110 -C is similar. Figure 12 The first movable electrode 215 extending from the first movable electrode portion 210-E and Figure 11 The first movable electrode 215 extending from the first movable electrode portion 210 -C is similar, and therefore, description thereof is omitted.

[0111] The detection unit shown in A512 includes the first fixed electrode portion 110-F and the first movable electrode portion 210-F included in the first connecting portion 410. The first fixed electrode portion 110-F includes a first fixed electrode fixing portion 111-F, a first first fixed electrode supporting portion 113-1F, and a second first fixed electrode supporting portion 113-2F. Figure 12 The first fixed electrode fixing portion 111-F and Figure 11 The first fixed electrode fixing portion 111-D is the same. Figure 12 The first first fixed electrode support portion 113-1F and Figure 11 The first first fixed electrode support portion 113-1D is the same as the first one. Figure 12 The second first fixed electrode support portion 113-2F and Figure 11 The second first fixed electrode support portion 113-2D is the same, so the description thereof is omitted. Figure 12 The first fixed electrode 115 extending from the first fixed electrode portion 110-F and Figure 11 The first fixed electrode 115 extending from the first fixed electrode portion 110 -D is similar. Figure 12 The first movable electrode 215 extending from the first movable electrode portion 210-F and Figure 11 The first movable electrode 215 extending from the first movable electrode portion 210-D is identical, and therefore its description is omitted. Furthermore, the first fixed electrode portion 110-E within the dashed-line frame of A511 and the first fixed electrode portion 110-F within the dashed-line frame of A512 are line-symmetrical with respect to a line segment (not shown) passing between the first fixed electrode fixing portion 111-E and the first fixed electrode fixing portion 111-F and along the first direction DR. The same is true for the first movable electrode 215 within the dashed-line frame of A511 and the first movable electrode 215 within the dashed-line frame of A512.

[0112] As described above, in the physical quantity sensor 1 of this embodiment, the first fixed electrode support portion 113 includes a first first fixed electrode support portion (113-1A, 113-1B, 113-1C, 113-1D, 113-1E, 113-1F) and a second first fixed electrode support portion (113-2A, 113-2B, 113-2C, 113-2D, 113-2E, 113-2F) extending parallel to each other in the first direction DR1. This allows the length of the first fixed electrode 115 to be designed to be shorter, thereby increasing the rigidity of the first fixed electrode 115 and the first movable electrode 215.

[0113] Furthermore, the first fixed electrode support portion 113 may include a third first fixed electrode support portion (113-3A) extending parallel to the first first fixed electrode support portion (113-1A) and the second first fixed electrode support portion (113-2A) in the first direction DR1. This allows the length of the first fixed electrode 115 to be designed to be even shorter, thereby further improving the rigidity of the first fixed electrode 115 and the first movable electrode 215.

[0114] also, Figures 9 to 12 Yes Figure 1 The detection unit shown in A1 is deformed as an example of applying the method of this embodiment, but for Figure 1 The detection units shown in A2, A3, and A4 can also be modified to apply the method of this embodiment. Although the illustration of all combinations is omitted, for example, Figure 1 The detection unit shown in A3 is applied Figure 12 When the method shown is Figure 13 The detection unit of A53 is shown. Figure 13 In the figure, the detection unit indicated by the dotted box A531 and the detection unit indicated by the dotted box A532 constitute a detection unit.

[0115] The detection unit shown in A531 includes a third fixed electrode portion 130-E and a third movable electrode portion 230-E included in the third connecting portion 430. The third fixed electrode portion 130-E includes a third fixed electrode fixing portion 131-E, a first third fixed electrode supporting portion 133-1E, and a second third fixed electrode supporting portion 133-2E. The first third fixed electrode supporting portion 133-1E extends from the third fixed electrode fixing portion 131-E in the third direction DR3. Furthermore, a fixed electrode supporting portion extends from the first third fixed electrode supporting portion 133-1E in the second direction DR2, and a second third fixed electrode supporting portion 133-2E extends from this fixed electrode supporting portion along the first direction DR1. The third fixed electrode 135 extends from the second third fixed electrode supporting portion 133-2E in the second direction DR2 and the fourth direction DR4. Furthermore, the third movable electrode 235 is arranged so as to face the third fixed electrode 135. In addition, Figure 13 In the figure, only one third fixed electrode is representatively labeled with the reference numeral 135, while the others are omitted. Furthermore, only one third movable electrode is representatively labeled with the reference numeral 235, while the others are omitted. Furthermore, although the third fixed electrode 135 extends only in the second direction DR2 from the first third fixed electrode support 133-1E, the detection unit shown in A531 has a structure capable of suppressing cross-axis sensitivity. This is because, since the third fixed electrode 135, described later, extends only in the fourth direction DR4 from the first third fixed electrode support 133-1F, it can be considered the same as a case where the third fixed electrode 135 extends in both the second direction DR2 and the fourth direction DR4 from a single fixed electrode support.

[0116] The detection unit shown in A532 includes a third fixed electrode portion 130-F and a third movable electrode portion 230-F included in the third connecting portion 430. The third fixed electrode portion 130-F includes a third fixed electrode fixing portion 131-F, a first third fixed electrode supporting portion 133-1F, and a second third fixed electrode supporting portion 133-2F. The first third fixed electrode supporting portion 133-1F extends from the third fixed electrode fixing portion 131-F in the third direction DR3. Furthermore, a fixed electrode supporting portion extends from the first third fixed electrode supporting portion 133-1F in the fourth direction DR4, and a second third fixed electrode supporting portion 133-2F extends from this fixed electrode supporting portion along the first direction DR1. The third fixed electrode 135 extends from the second third fixed electrode supporting portion 133-2F in the second direction DR2 and the fourth direction DR4. The function of the third fixed electrode 135 extending only in the fourth direction DR4 from the first third fixed electrode supporting portion 133-1F is as described above. Furthermore, the third fixed electrode portion 130-E within the dashed-line frame of A531 and the third fixed electrode portion 130-F within the dashed-line frame of A532 are line-symmetrical with respect to a line segment (not shown) passing between the third fixed electrode fixing portion 131-E and the third fixed electrode fixing portion 131-F and along the first direction DR. The same applies to the third movable electrode 235 within the dashed-line frame of A531 and the third movable electrode 235 within the dashed-line frame of A532.

[0117] Next, use Figure 14 、 Figure 15 、 Figure 16 , a more specific structure of the physical quantity sensor 1 when the method of this embodiment is modified and implemented will be described. Figure 14 In order to facilitate the description and illustration, only the dotted line frame is shown for the area involved in the detection unit, and the details are appropriately referred to the above figures for explanation. More specifically, Figure 14 The dotted box of D10 shows Figure 1 A modification of the detection unit shown in A1. Figure 14 The dotted box of D20 shows Figure 1 A2 shows a modified example of the detection unit, and the dotted box D30 shows Figure 1 A3 shows a modified example of the detection unit, and the dotted box D40 shows Figure 1A modified example of the detection unit shown in A4 is shown. The first movable electrode fixing portion 311, the first movable electrode supporting portion 313, and the first spring 317, which have already been described, are only shown in the figure and their description is omitted. The same applies to the second movable electrode fixing portion 321, the second movable electrode supporting portion 323, the second spring 327, the third movable electrode fixing portion 331, the third movable electrode supporting portion 333, the third spring 337, the fourth movable electrode fixing portion 341, the fourth movable electrode supporting portion 343, and the fourth spring 347.

[0118] For example Figure 14 The modified example of the detection unit shown in D10 is preferably the same as Figure 14 More specifically, for example, Figure 14 The modified example of the detection unit shown in D10 is set to Figure 9 The detection unit shown in A21 is Figure 14 The modification of the detection unit shown in D30 is preferably to Figure 9 The method shown is applied to Figure 1 The detection unit shown in A3. Figure 14 The modified example of the detection unit shown in D10 is set to Figure 10 In the case of the detection unit shown in A31, it is set Figure 12 The same is true for the detection unit shown in A51. As a result, the line symmetry of the portion including the first fixed electrode portion 110 indicated by the dotted line frame D10, the third fixed electrode portion 130 indicated by the dotted line frame D30, and the movable body MB can be improved with respect to the line segment LS1Y. The line segment LS1Y is a portion passing through Figure 14 The first fixed electrode fixing portion 111 and the third fixed electrode fixing portion 131 not shown in the figure are along the line segment of the second direction DR2. Thus, the physical quantity sensor 1 can be constructed so that the detection sensitivity in the direction to be detected (X-axis direction) is improved by adding the changing behavior of the electrostatic capacitance between the comb electrodes in the detection unit shown by D10 and the changing behavior of the electrostatic capacitance between the comb electrodes in the detection unit shown by D30, thereby canceling out the noise generated in each detection unit. Thus, the characteristics of the physical quantity sensor 1 can be further improved. Similarly, Figure 14 The modification of the detection unit shown in D20 is preferably the same as Figure 14 The same is true for the modified example of the detection unit shown in D40. As a result, the line symmetry of the portion including the second fixed electrode portion 120 involved in the dotted frame of D20, the fourth fixed electrode portion 140 involved in the dotted frame of D40, and the movable body MB can be improved with respect to the line segment LS1X. The line segment LS1X is a portion passing through Figure 14The second fixed electrode fixing portion 121 and the fourth fixed electrode fixing portion 141 (not shown) are arranged along a line segment in the first direction DR1.

[0119] In addition, Figure 14 If the modified example of the detection unit shown in D10 is the same as the modified example of the detection unit shown in D30, the modified example of the detection unit shown in D20 and the modified example of the detection unit shown in D40 may also be made the same. This improves the linear symmetry with respect to line segment LS1X and the linear symmetry with respect to line segment LS1Y for the portion including the first fixed electrode portion 110 indicated by the dotted line frame of D10, the second fixed electrode portion 120 indicated by the dotted line frame of D20, the third fixed electrode portion 130 indicated by the dotted line frame of D30, the fourth fixed electrode portion 140 indicated by the dotted line frame of D40, and the movable body MB.

[0120] Figure 15 Show the Figure 1 The detection unit shown in A1 is applied Figure 11 An example of the structure of the physical quantity sensor 1 in the case of the method shown. Figure 15 The dotted box shown in D111 shows Figure 11 The detection unit involved in the dotted box shown in A411. Similarly, the dotted box shown in D112 shows Figure 11 The dotted box A412 shows the detection unit involved. Figure 15 The dotted box of D120 shows Figure 1 The detection unit shown in A2 or its modified example, the dotted box D130 shows Figure 1 The detection unit shown in A3 or its modified example, the dotted box D140 shows Figure 1 The detection unit shown in A4 or its modified example. Figure 1 The detection unit shown in A1 applies Figure 11 In the case of the method shown, it is preferred not to apply to other detection units Figure 11 This is because the presence of a plurality of openings may cause the movable electrode to be unable to function as a probe electrode.

[0121] In addition, with Figure 14 The same situation described in Figure 15 The modified example of the detection unit shown in D120 is Figure 15The modified example of the detection unit shown in D140 is the same as that shown in FIG. As a result, the line symmetry of the portion including the first fixed electrode portion 110 indicated by the dashed lines D111 and D112, the second fixed electrode portion 120 indicated by the dashed lines D120, the third fixed electrode portion 130 indicated by the dashed lines D130, the fourth fixed electrode portion 140 indicated by the dashed lines D140, and the movable body MB can be improved relative to the line segment LS11X. The line segment LS11X passes through the middle between the first fixed electrode portion 110-C and the first fixed electrode portion 110-D, the third fixed electrode portion 131, and runs along the first direction DR1.

[0122] In addition, as a more specific example, Figure 1 The detection unit shown in A1 is applied Figure 11 In the case of the method shown, the physical quantity sensor 1 is set to Figure 16 The structure example shown. Figure 16 The dotted box shown in D231 shows that the Figure 13 The detection unit A531 is involved, and the dotted box D232 shows the application of Figure 13 The A532 involves the detection unit. In addition, Figure 16 The dashed box shown in D211 corresponds to Figure 15 D111 is shown in the dotted box, Figure 16 The dashed box shown in D212 corresponds to Figure 15 D112 is shown in the dotted box, Figure 16 The dashed box shown in D220 corresponds to Figure 15 The D120 is shown in the dotted box, Figure 16 The dashed box shown in D240 corresponds to Figure 15 D140 is shown in the dotted box. That is, Figure 16 Therefore, Figure 15 The detection unit involved in D130 is limited to Figure 13 The detection unit described in the Figure 15 An example of hypothetical conceptualization.

[0123] In addition, if Figure 13 As described in Figure 13 The third fixed electrode portion 130-E is Figure 12 The relationship between the first fixed electrode portion 110-E and the Y axis is reversed. Figure 13 The third fixed electrode portion 130-F is Figure 12 The first fixed electrode portion 110-F is inverted relative to the Y axis. Figure 16 The physical quantity sensor 1, thereby relative to the physical quantity sensor 1 including Figure 16The first fixed electrode portion 110 in the detection unit involved in the dotted frame of D211, the third fixed electrode portion 130 in the detection unit involved in the dotted frame of D231, and the movable body MB can improve the symmetry with respect to the line segment LS21X. The line segment LS21X is a line segment that passes through the middle position between the first fixed electrode portion 110-C and the first fixed electrode portion 110-D, and the middle position between the third fixed electrode portion 130-E and the third fixed electrode portion 130-F and is along the first direction DR1. In addition, in Figure 16 In the physical quantity sensor 1, the modified example of the detection unit shown in D220 can be made the same as the modified example of the detection unit shown in D240. This improves the linear symmetry of the portion including the first fixed electrode portion 110 indicated by the dotted-line frame D210, the second fixed electrode portion 120 indicated by the dotted-line frame D220, the third fixed electrode portion 130 indicated by the dotted-line frame D230, the fourth fixed electrode portion 140 indicated by the dotted-line frame D240, and the movable body MB with respect to the line segment LS21X.

[0124] Then, for example Figure 11 、 Figure 15 In the physical quantity sensor 1 in which the first connecting portion 410 is provided with an opening as described in the examples of the method of routing the wiring from the fixed electrode fixing portion to the substrate 10, an example is described. Figure 15 The following describes an example of routing the wiring from the fixed electrode fixed portion using the physical quantity sensor 1 shown. Figure 17 The dashed box shown in D311 corresponds to Figure 15 D111 is shown in the dotted box, Figure 17 The dashed box shown in D312 corresponds to Figure 15 D112 is shown in the dotted box, Figure 17 The dashed box shown in D320 corresponds to Figure 15 The D120 is shown in the dotted box, Figure 17 The dashed box shown in D330 corresponds to Figure 15 The D130 is shown in the dotted box, Figure 17 The dashed box shown in D340 corresponds to Figure 15 In addition, for the sake of convenience, Figure 17 In the dotted frame shown in D311, only the fixed electrode fixing portion involved in the corresponding detection unit, that is, the first fixed electrode fixing portion 111-C, is shown, and illustration of other structures is omitted. Figure 17Only the first fixed electrode fixing portion 111-D is illustrated in the dotted frame shown in D312, only the second fixed electrode fixing portion 121 is illustrated in the dotted frame shown in D320, only the third fixed electrode fixing portion 131 is illustrated in the dotted frame shown in D330, and only the fourth fixed electrode fixing portion 141 is illustrated in the dotted frame shown in D340.

[0125] For example, Figure 17 As shown, when the movable body MB is formed by processing a silicon substrate or the like, a predetermined member 500 is formed simultaneously, thereby forming a path for wiring to pass through the fixed electrode fixing portion. More specifically, for example, the predetermined member 500 is formed in a frame shape surrounding the movable body MB, and is formed so as to pass through the opening of the first connecting portion 410 and connect to the movable electrode fixing portion 301.

[0126] Then, the predetermined component 500 is formed Figure 17 Insulating components not shown in the figure. Moreover, the wiring 151-C connected to the first fixed electrode fixing portion 111-C passes through the opening portion from the first fixed electrode fixing portion 111-C and is led out to the outside of the movable body MB. Similarly, the wiring 151-D connected to the first fixed electrode fixing portion 111-D passes through the opening portion from the first fixed electrode fixing portion 111-D and is led out to the outside of the movable body MB. Similarly, the wiring 152 connected to the second fixed electrode fixing portion 121 passes through the opening portion from the second fixed electrode fixing portion 121 and is led out to the outside of the movable body MB. Similarly, the wiring 153 connected to the third fixed electrode fixing portion 131 passes through the opening portion from the third fixed electrode fixing portion 131 and is led out to the outside of the movable body MB. Similarly, the wiring 154 connected to the fourth fixed electrode fixing portion 141 passes through the opening portion from the fourth fixed electrode fixing portion 141 and is led out to the outside of the movable body MB.

[0127] Figure 18 yes Figure 17 EE cross-sectional view. Figure 18 This is a schematic diagram for easy understanding, so the dimensions are appropriately changed relative to the actual cross-sectional view. The direction from the left side of the paper to the right side of the paper corresponds to the second direction DR2. Figure 1 A cavity is formed in an area other than the prescribed area AR described in the above. The second fixed electrode support portion 123 is fixed to the prescribed area AR of the substrate 10 by the second fixed electrode fixing portion 121. Similarly, the fourth fixed electrode support portion 143 is fixed to the prescribed area AR of the substrate 10 by the fourth fixed electrode fixing portion 141. The prescribed component 500 overlapping with the prescribed area AR when the substrate 10 is viewed from above is fixed to the prescribed area AR by the same method as the second fixed electrode fixing portion 121 and the fourth fixed electrode fixing portion 141. Moreover, in Figure 18In the cross-sectional view of FIG, an insulating member F is formed so as to span the second fixed electrode fixing portion 121, the fourth fixed electrode fixing portion 141 and the prescribed member 500, and wiring 152, wiring 153, and wiring 154 are formed on the formed insulating member. Figure 18 Although not accurately shown in the figure, the insulating member shown by F, for example, may be formed to fill the gap between the fixed electrode fixing portion and the prescribed member 500.

[0128] In this manner, the wiring 151-C, wiring 151-D, wiring 152, wiring 153, and wiring 154 drawn to the outside of the movable body MB are connected to electrode terminals (not shown) formed on the substrate 10. Thus, the electrical signal detected by the probe electrode included in the detection unit can be connected to a differential amplifier circuit (not shown) via the electrode terminals (not shown).

[0129] In addition, although the above description is about an example in which the movable electrode fixing portion 301 includes the first movable electrode supporting portion 313, the second movable electrode supporting portion 323, the third movable electrode supporting portion 333, and the fourth movable electrode supporting portion 343, the physical quantity sensor 1 of this embodiment may also be configured as follows. Figure 19 As shown in FIG. 3 , the movable electrode fixing portion 301 is included. Figure 19 In the physical quantity sensor 1 , the movable electrode fixing portion 301 is connected to any one of the first movable electrode supporting portion 313 , the second movable electrode supporting portion 323 , the third movable electrode supporting portion 333 , and the fourth movable electrode supporting portion 343 .

[0130] Although the details have been explained in detail, Figure 19 The detection unit involved in the physical quantity sensor 1 shown in FIG. 1 may also be applied to a modified example of the method of this embodiment. Figure 19 The dotted box of D410 Figure 14 The dotted box of D10 corresponds to Figure 19 The dotted box of D420 Figure 14 The dotted box of D20 corresponds to Figure 19 The dotted box of D430 Figure 14 The dotted box of D30 corresponds to Figure 19 The dotted box of D440 and Figure 14 The dotted box of D40 corresponds to the Figure 19 Combination application of physical quantity sensor 1 Figure 15 、 Figure 16 、 Figure 17According to the method described above, in the physical quantity sensor 1 of this embodiment, the first to fourth movable electrode supporting portions (313, 323, 333, 343) are fixed to the substrate 10 by a single movable electrode fixing portion 301. Thus, since the single movable electrode fixing portion 301 can be arranged at the center of the substrate, the movable electrode fixing portion 301 can be fixed to the substrate 10 in a manner that minimizes the influence of warpage of the substrate 10.

[0131] In addition, the method of this embodiment can also be performed by, for example Figure 20 、 Figure 21 This is achieved by using an inertial measurement device 2000. Specifically, the inertial measurement device 2000 of this embodiment includes the aforementioned physical quantity sensor 1 and a control IC 2360 serving as a control unit. The control IC 2360 performs control based on the detection signal output from the physical quantity sensor 1. Thus, by using the acceleration sensor unit 2350 including the aforementioned physical quantity sensor 1, the effects of the aforementioned physical quantity sensor 1 can be achieved, and an inertial measurement device 2000 capable of achieving high precision can be provided. The inertial measurement device 2000 (IMU) is a device that detects inertial motion quantities such as the posture and behavior of a moving object such as an automobile or a robot. The inertial measurement device 2000 is a so-called six-axis motion sensor that includes acceleration sensors for detecting accelerations ax, ay, and az along the three axes, and angular velocity sensors for detecting angular velocities ωx, ωy, and ωz about the three axes.

[0132] Inertial measurement unit 2000 is a rectangular parallelepiped with a roughly square shape when viewed from above. Threaded holes 2110, serving as mounting points, are formed near two diagonal vertices of the square. Two screws can be inserted through these two threaded holes 2110 to secure inertial measurement unit 2000 to a mounting surface, such as an automobile. Furthermore, through component selection and design modifications, it can be miniaturized to a size suitable for use in smartphones and digital cameras, for example.

[0133] Inertial measurement unit 2000 includes a housing 2100, a joint member 2200, and a sensor module 2300. Sensor module 2300 is inserted into housing 2100 with joint member 2200 interposed therebetween. Sensor module 2300 includes an inner housing 2310 and a circuit board 2320. Inner housing 2310 includes a recess 2311 to prevent contact with circuit board 2320 and an opening 2312 to expose a connector 2330, described later. Circuit board 2320 is bonded to the lower surface of inner housing 2310 with an adhesive.

[0134] like Figure 21As shown, a connector 2330, an angular velocity sensor 2340z for detecting angular velocity about the Z axis, an acceleration sensor unit 2350 for detecting acceleration in the X, Y, and Z axis directions, and the like are mounted on the top surface of the circuit board 2320. Furthermore, an angular velocity sensor 2340x for detecting angular velocity about the X axis and an angular velocity sensor 2340y for detecting angular velocity about the Y axis are mounted on the side surfaces of the circuit board 2320.

[0135] The acceleration sensor unit 2350 includes at least the physical quantity sensor 1 for measuring acceleration in the X-axis and Y-axis directions. It can detect acceleration in a single axis, or in two or three axes, as needed. The angular velocity sensors 2340x, 2340y, and 2340z are not particularly limited; for example, a vibration gyroscope sensor utilizing the Coriolis force can be used.

[0136] Furthermore, a control IC 2360 is mounted on the bottom surface of circuit board 2320. Control IC 2360, which serves as a control unit that performs control based on the detection signal output from physical quantity sensor 1, is, for example, an MCU (Micro Controller Unit), and has a built-in storage unit including nonvolatile memory, an A / D converter, and other components, and controls various components of inertial measurement unit 2000. Furthermore, a number of other electronic components are mounted on circuit board 2320.

[0137] In addition, inertial measurement device 2000 is not limited to Figure 20 、 Figure 21 For example, inertial measurement device 2000 may be configured such that angular velocity sensors 2340x, 2340y, and 2340z are not provided, and only physical quantity sensor 1 is provided as an inertial sensor. In this case, inertial measurement device 2000 may be implemented by housing physical quantity sensor 1 and control IC 2360, which implements a control unit, in a package serving as a storage container.

[0138] As described above, this embodiment relates to a physical quantity sensor that detects physical quantities in a first direction and a second direction that are in-plane directions and perpendicular to each other. The physical quantity sensor includes a substrate, a first fixed electrode support, a first fixed electrode portion, a first movable electrode portion, a second fixed electrode support, a second movable electrode portion, and a first movable electrode support. The first fixed electrode support is fixed to the substrate at the first fixed electrode fixing portion and extends in the first direction. The first fixed electrode portion includes a first fixed electrode that extends from the first fixed electrode support portion in the second direction and in a fourth direction opposite to the second direction. The first movable electrode portion includes a first movable electrode that extends in the second direction and in the fourth direction and faces the first fixed electrode. The second fixed electrode support is fixed to the substrate at the second fixed electrode fixing portion and extends in the second direction. The second fixed electrode portion includes a second fixed electrode that extends from the second fixed electrode support portion in the first direction and in a third direction opposite to the first direction. The second movable electrode portion includes a second movable electrode extending in the first and third directions and facing the second fixed electrode. The first movable electrode supporting portion is fixed to the substrate at the movable electrode fixing portion, extends in a first intersecting direction intersecting the first and second directions, and supports the first and second movable electrode portions via a first spring.

[0139] Thus, since the first fixed electrode support portion includes the first fixed electrode extending in the second direction and the fourth direction, which is opposite thereto, it is possible to detect physical quantities along the first direction while suppressing cross-axis sensitivity. Similarly, since the second fixed electrode support portion includes the second fixed electrode extending in the first direction and the third direction, which is opposite thereto, it is possible to detect physical quantities along the second direction while suppressing cross-axis sensitivity. Furthermore, since the first movable electrode support portion extends from the movable electrode fixing portion in the first cross direction, the design freedom of the physical quantity sensor is increased, and the shape of the physical quantity sensor can be optimized.

[0140] In addition, it may also include a movable body supported on the first movable electrode supporting portion via a first spring, and the movable body may also include: a first connecting portion, which extends in the second direction and has a first movable electrode portion; and a second connecting portion, which extends in the first direction and has a second movable electrode portion.

[0141] This allows for a relationship in which a movable electrode support extending along the first intersecting direction is connected to one side of the first spring, and a movable body comprising a first connecting portion extending in the second direction and a second connecting portion extending in the first direction is connected to the other side. This allows the movable body to have a rectangular shape, with the first spring positioned further outward. This allows for a longer movable electrode support, enabling the construction of a physical quantity sensor that suppresses motion based on the in-plane rotation mode.

[0142] Furthermore, the first spring may be provided at a corner where the first connecting portion and the second connecting portion of the movable body intersect, and the first movable electrode supporting portion may extend in the first intersecting direction from the movable electrode fixing portion toward the corner.

[0143] This allows the first spring to be placed at the corner farthest from the movable electrode fixing portion. This allows the movable electrode supporting portion to be made longer, thereby enabling the construction of a physical quantity sensor that suppresses movement based on the in-plane rotation mode.

[0144] Furthermore, the length of the first fixed electrode supporting portion and the length of the second fixed electrode supporting portion may be substantially the same.

[0145] This makes it possible to construct a physical quantity sensor that minimizes the influence of substrate warpage.

[0146] In addition, the length of the first connecting portion and the length of the second connecting portion may be substantially the same.

[0147] This makes it possible to construct a reference for a detection unit having substantially the same length in the X direction and the Y direction. This makes it possible to construct a physical quantity sensor that minimizes the influence of substrate warpage.

[0148] Furthermore, the angle formed between the first direction and the first intersecting direction and the angle formed between the second direction and the first intersecting direction may be substantially the same.

[0149] Thus, based on the angles formed between the first direction and the first intersecting direction, and the angles formed between the second direction and the first intersecting direction, a reference for forming a detection unit with approximately the same length in the X direction and the Y direction can be established. This allows for the construction of a physical quantity sensor that minimizes the effects of substrate warpage.

[0150] Furthermore, the length of the first movable electrode supporting portion may be longer than the length of the first spring in the first intersecting direction.

[0151] This allows the first spring to be arranged further outward, lengthening the first movable electrode support portion, and suppressing the in-plane rotation mode operation of the physical quantity sensor.

[0152] Furthermore, the length of the first movable electrode supporting portion may be longer than the length of the first fixed electrode supporting portion and the length of the second fixed electrode supporting portion.

[0153] This makes it possible to construct a physical quantity sensor that clearly defines the length reference of the first movable electrode supporting portion required to suppress the movement based on the in-plane rotation mode.

[0154] Furthermore, the first fixed electrode portion may include a first first fixed electrode and a second first fixed electrode provided closer to the first direction than the first first fixed electrode, and the second first fixed electrode may be longer than the first first fixed electrode in the second direction.

[0155] This makes it possible to take into account the arrangement relationship of the first movable electrode supporting portion tilted with respect to the X-axis or the Y-axis, and improve the design efficiency of the physical quantity sensor.

[0156] Furthermore, the first fixed electrode supporting portion may include a first first fixed electrode supporting portion and a second first fixed electrode supporting portion extending parallel to each other in the first direction.

[0157] This allows the length of the first fixed electrode to be designed to be short, thereby increasing the rigidity of the first fixed electrode and the first movable electrode.

[0158] Furthermore, the first fixed electrode supporting portion may include a third first fixed electrode supporting portion extending in parallel with the first first fixed electrode supporting portion and the second first fixed electrode supporting portion in the first direction.

[0159] This allows the length of the first fixed electrode to be designed to be shorter, and thus the rigidity of the first fixed electrode and the first movable electrode can be further improved.

[0160] In addition, the first fixed electrode portion may also have a first first fixed electrode portion and a second first fixed electrode portion arranged on the first direction side than the first first fixed electrode portion, and the number of first fixed electrodes arranged in the second direction in the first first fixed electrode portion may also be less than the number of first fixed electrodes arranged in the second direction in the second first fixed electrode portion.

[0161] This allows for the configuration of a comb-shaped electrode taking the shape of the detection unit into consideration, and also allows for the design of a shorter length of the first fixed electrode, thereby increasing the rigidity of the first fixed electrode and the first movable electrode.

[0162] In addition, the present invention may also include a third fixed electrode support portion, a third fixed electrode portion, a third movable electrode portion, a fourth fixed electrode portion, a fourth movable electrode portion, a second movable electrode support portion, a third movable electrode support portion, and a fourth movable electrode support portion. The third fixed electrode support portion is fixed to the substrate at the third fixed electrode fixing portion and extends in the third direction. The third fixed electrode portion includes a third fixed electrode that extends from the third fixed electrode support portion in the second and fourth directions. The third movable electrode portion includes a third movable electrode that extends in the second and fourth directions and is opposite to the third fixed electrode. The fourth fixed electrode support portion is fixed to the substrate at the fourth fixed electrode fixing portion and extends in the fourth direction. The fourth fixed electrode portion includes a fourth fixed electrode that extends from the fourth fixed electrode support portion in the first and third directions. The fourth movable electrode portion includes a fourth movable electrode extending in the first and third directions and opposing the fourth fixed electrode. The second movable electrode supporting portion is fixed to the substrate at the movable electrode fixing portion, extends in a second intersecting direction intersecting the second and third directions, and supports the second and third movable electrode portions via a second spring. The third movable electrode supporting portion is fixed to the substrate at the movable electrode fixing portion, extends in a third intersecting direction intersecting the third and fourth directions, and supports the third and fourth movable electrode portions via a third spring. The fourth movable electrode supporting portion is fixed to the substrate at the movable electrode fixing portion, extends in a fourth intersecting direction intersecting the fourth direction and the first direction, and supports the fourth movable electrode portion and the first movable electrode portion via a fourth spring.

[0163] Thus, a physical quantity sensor can be constructed, which also includes a third fixed electrode support portion, a third fixed electrode portion, a third movable electrode portion, a fourth fixed electrode support portion, a fourth fixed electrode portion, a fourth movable electrode portion, a second movable electrode support portion, a third movable electrode support portion and a fourth movable electrode support portion.

[0164] In addition, it may also include a movable body supported on the first to fourth movable electrode supporting parts via the first to fourth springs, and the movable body may also include a first connecting part extending in the second direction and having the first movable electrode part, a second connecting part extending in the first direction and having the second movable electrode part, a third connecting part extending in the second direction and having the third movable electrode part, and a fourth connecting part extending in the first direction and having the fourth movable electrode part.

[0165] Thus, the second and fourth connecting portions extend in the first direction, and the first and third connecting portions extend in the second direction, thereby enabling a physical quantity sensor composed of a rectangular movable body MB to be constructed.

[0166] Furthermore, the movable electrode fixing portion may include first to fourth movable electrode fixing portions that fix the first to fourth movable electrode supporting portions to the substrate.

[0167] This makes it possible to construct a physical quantity sensor in which a plurality of movable electrode support portions are fixed to a substrate using respective movable electrode fixing portions, thereby increasing the degree of freedom in designing the physical quantity sensor.

[0168] Alternatively, the first to fourth movable electrode supporting portions may be fixed to the substrate by a single movable electrode fixing portion.

[0169] Thus, since one movable electrode fixing portion can be arranged at the center of the substrate, the movable electrode fixing portion can be fixed to the substrate so as to minimize the influence of the warping of the substrate.

[0170] Furthermore, the inertial measurement device of the present embodiment includes the above-described physical quantity sensor and a control unit that performs control based on a detection signal output from the physical quantity sensor.

[0171] In addition, the present embodiment has been described in detail as described above, but those skilled in the art can easily understand that many modifications can be made without substantially departing from the new matters and effects of the present disclosure. Therefore, all such modifications are included in the scope of the present disclosure. For example, in the specification or the drawings, a term that is recorded at least once together with a different term in a broader sense or with the same meaning can be replaced with the different term in any part of the specification or the drawings. In addition, all combinations of the present embodiment and the modifications are also included in the scope of the present disclosure. In addition, the structure and operation of the physical quantity sensor, inertial measurement device, etc. are not limited to the contents described in the present embodiment, and various modifications can be implemented.

Claims

1. A physical quantity sensor, characterized in that: Detecting physical quantities in a first direction and a second direction that are in-plane directions and perpendicular to each other, The physical quantity sensor comprises: substrate; a first fixed electrode supporting portion fixed to the substrate at a first fixed electrode fixing portion and extending in the first direction; a first fixed electrode portion including a first fixed electrode extending from the first fixed electrode support portion in the second direction and in a fourth direction opposite to the second direction; a first movable electrode portion including a first movable electrode extending in the second direction and the fourth direction and facing the first fixed electrode; a second fixed electrode supporting portion fixed to the substrate at a second fixed electrode fixing portion and extending in the second direction; a second fixed electrode portion having a second fixed electrode extending from the second fixed electrode support portion in the first direction and in a third direction opposite to the first direction; a second movable electrode portion including a second movable electrode extending in the first direction and the third direction and facing the second fixed electrode; as well as A first movable electrode supporting portion is fixed to the substrate at a movable electrode fixing portion, extends in a first intersecting direction intersecting the first direction and the second direction, and supports the first movable electrode portion and the second movable electrode portion via a first spring.

2. The physical quantity sensor according to claim 1, wherein The physical quantity sensor includes a movable body supported by the first movable electrode supporting portion via the first spring. The movable body includes: a first connecting portion extending in the second direction and having the first movable electrode portion; and The second connecting portion extends in the first direction and includes the second movable electrode portion.

3. The physical quantity sensor according to claim 2, wherein: The first spring is provided at a corner where the first connecting portion and the second connecting portion of the movable body intersect. The first movable electrode supporting portion extends in the first intersecting direction from the movable electrode fixing portion toward the corner portion.

4. The physical quantity sensor according to claim 1, wherein The length of the first fixed electrode support portion is substantially the same as the length of the second fixed electrode support portion.

5. The physical quantity sensor according to claim 2, wherein The length of the first connecting portion is substantially the same as the length of the second connecting portion.

6. The physical quantity sensor according to claim 1, wherein An angle formed between the first direction and the first intersecting direction is substantially the same as an angle formed between the second direction and the first intersecting direction.

7. The physical quantity sensor according to claim 1, wherein The length of the first movable electrode supporting portion is longer than the length of the first spring in the first intersecting direction.

8. The physical quantity sensor according to claim 1, wherein The length of the first movable electrode supporting portion is longer than the length of the first fixed electrode supporting portion and the length of the second fixed electrode supporting portion.

9. The physical quantity sensor according to claim 1, wherein The first fixed electrode portion includes a first first fixed electrode and a second first fixed electrode provided on the first direction side relative to the first first fixed electrode. In the second direction, the length of the second first fixed electrode is longer than the length of the first first fixed electrode.

10. The physical quantity sensor according to claim 1, wherein The first fixed electrode supporting portion includes a first first fixed electrode supporting portion and a second first fixed electrode supporting portion extending parallel to each other in the first direction.

11. The physical quantity sensor according to claim 10, wherein The first fixed electrode supporting portion includes a third first fixed electrode supporting portion extending in parallel with the first first fixed electrode supporting portion and the second first fixed electrode supporting portion in the first direction.

12. The physical quantity sensor according to claim 10, wherein The first fixed electrode portion includes a first first fixed electrode portion and a second first fixed electrode portion provided on the first direction side relative to the first first fixed electrode portion. The number of the first fixed electrodes arranged in the second direction in the first first fixed electrode portion is smaller than the number of the first fixed electrodes arranged in the second direction in the second first fixed electrode portion.

13. The physical quantity sensor according to claim 1, wherein The physical quantity sensor comprises: a third fixed electrode supporting portion fixed to the substrate at a third fixed electrode fixing portion and extending in the third direction; a third fixed electrode portion having a third fixed electrode extending from the third fixed electrode support portion in the second direction and the fourth direction; a third movable electrode portion having a third movable electrode extending in the second direction and the fourth direction and facing the third fixed electrode; a fourth fixed electrode support portion fixed to the substrate at a fourth fixed electrode fixing portion and extending in the fourth direction; a fourth fixed electrode portion having a fourth fixed electrode extending from the fourth fixed electrode support portion in the first direction and the third direction; a fourth movable electrode portion including a fourth movable electrode extending in the first direction and the third direction and facing the fourth fixed electrode; a second movable electrode supporting portion fixed to the substrate at the movable electrode fixing portion, extending in a second intersecting direction intersecting the second direction and the third direction, and supporting the second movable electrode portion and the third movable electrode portion via a second spring; a third movable electrode supporting portion fixed to the substrate at the movable electrode fixing portion, extending in a third intersecting direction intersecting the third direction and the fourth direction, and supporting the third movable electrode portion and the fourth movable electrode portion via a third spring; and A fourth movable electrode supporting portion is fixed to the substrate at the movable electrode fixing portion, extends in a fourth intersecting direction intersecting the fourth direction and the first direction, and supports the fourth movable electrode portion and the first movable electrode portion via a fourth spring.

14. The physical quantity sensor according to claim 13, wherein The physical quantity sensor includes a movable body supported by the first to fourth movable electrode supporting portions via the first to fourth springs. The movable body includes: a first connecting portion extending in the second direction and having the first movable electrode portion; a second connecting portion extending in the first direction and having the second movable electrode portion; a third connecting portion extending in the second direction and having the third movable electrode portion; as well as The fourth connecting portion extends in the first direction and includes the fourth movable electrode portion.

15. The physical quantity sensor according to claim 13, wherein The movable electrode fixing portion includes a first movable electrode fixing portion to a fourth movable electrode fixing portion that fix the first movable electrode supporting portion to the fourth movable electrode supporting portion to the substrate.

16. The physical quantity sensor according to claim 15, wherein The first to fourth movable electrode supporting portions are fixed to the substrate by one movable electrode fixing portion.

17. An inertial measurement device, characterized in that: Include: The physical quantity sensor according to any one of claims 1 to 16; and A control unit performs control based on a detection signal output from the physical quantity sensor.

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