Quartz pendulous reed capable of reducing influence of edge deformation of magnetic conductive ring

Abstract

The invention relates to a quartz pendulous reed capable of reducing edge deformation influence of a magnetic conductive ring, the quartz pendulous reed is composed of an outer ring part, a pendulous tongue part and a flexible beam part, the pendulous tongue part is connected in the outer ring part through the flexible beam part, and two surfaces of the outer ring part are respectively provided with three bosses; the inner side faces of the three bosses and the inner side face of the outer ring part of the quartz pendulous reed are arranged in a coplanar mode, and the diameter of the outer side faces of the three bosses on the two faces is smaller than that of the outer side face of the outer ring part of the quartz pendulous reed. The positions of the bosses are far away from the edge of the pendulous reed, so that mechanical contact between the bosses and the edges of the magnetic conductive rings is avoided, good uniform contact between the three bosses and the magnetic conductive rings on the two sides is achieved, and the reliability and precision of the accelerometer are improved.

Description

Technical Field

[0001] The invention belongs to the technical field of sensor design, and in particular relates to a quartz pendulum capable of reducing the influence of edge deformation of a magnetic ring, so as to improve the reliability and accuracy of a quartz flexible accelerometer. Background Art

[0002] The quartz flexible accelerometer consists of an upper magnetic ring component 2, a pendulum component 1, a lower magnetic ring component 3, a connecting ring 4, an isolating ring, and a housing. The pendulum component is constructed by gluing a pendulum plate and a torquer coil. The pendulum plate's tongue and the torquer coil form the acceleration sensing mass. The pendulum plate's tongue, coated with gold on both sides, serves as the moving electrode of the sensor. The end faces of the upper and lower magnetic rings serve as the fixed electrode of the sensor, forming a differential capacitance sensor. The upper and lower magnetic ring components are composed of upper and lower magnetic rings and magnets. The torquer coil on the pendulum component is located in the working air gap of the magnetic circuit, forming a permanent magnet torquer. The upper and lower magnetic ring components and the pendulum component are enclosed by a connecting ring and connected by welding to form the sensitive core component. The sensitive core component is then enclosed by an isolating ring, installed in the housing, and connected by gluing to form the accelerometer.

[0003] When there is no acceleration input, the detection mass, consisting of the pendulum tongue and the torquer coil, is in a neutral equilibrium position. When there is acceleration input, the detection mass deviates from the equilibrium position due to inertia, causing the position of the moving plate of the differential capacitor to change, and the differential capacitance to change. The differential capacitance detection circuit converts this into an electrical signal output. This electrical signal is converted into a corresponding current signal by the servo amplifier and input into the torquer coil. The torquer coil is subjected to an electromagnetic force in the air gap magnetic field, causing the detection mass to return to the equilibrium position. The magnitude of the current in the torquer coil is related to the magnitude of the input acceleration. By detecting the magnitude of the current in the torquer coil, the magnitude of the input acceleration can be obtained.

[0004] The traditional pendulum and magnetic ring structure is as follows Figure 2 、 3 As shown in the figure, the pendulum is in mechanical contact with the magnetic ring by means of three bosses, and the two together form the watch core components. Figure 1 shown.

[0005] The pendulum is usually made of quartz glass, which is a harder material, while the magnetic ring is usually made of Invar alloy, which is softer than the pendulum. The last step in the processing of the magnetic ring is end face grinding. After the edge is finely ground, the grinding material will cause the edge of the magnetic ring to collapse irregularly. During the use of the accelerometer, the three bosses of the pendulum are always in mechanical contact with one end face of the magnetic ring. At the same time, because the three bosses are located at the edge, the edge of the magnetic ring that is in mechanical contact with them is always in a state of extrusion and deformation. The irregular collapse of the magnetic ring results in loose contact between the magnetic ring and the pendulum boss, and the three bosses are subjected to uneven pressure. Over time and under the influence of external environmental stresses such as temperature cycle, shock and vibration, the position or posture of the pendulum is deformed, resulting in changes in the bias value and scale factor, affecting the reliability and accuracy of the accelerometer.

[0006] In order to better improve the reliability and accuracy of the accelerometer, it is necessary to reduce the deformation of the edge of the magnetic ring. Summary of the Invention

[0007] In view of the deficiencies of the prior art, the present invention proposes a quartz pendulum which can improve the reliability and accuracy of an accelerometer and reduce the influence of the edge deformation of a magnetic ring.

[0008] The above-mentioned purpose of the present invention is achieved through the following technical solutions: A quartz pendulum that reduces the influence of edge deformation of a magnetic ring, the quartz pendulum consisting of an outer ring portion, a pendulum tongue portion, and a winding beam portion, the pendulum tongue portion being connected to the inner portion of the outer ring portion via the winding beam portion, and three bosses being provided on both sides of the outer ring portion; the invention is characterized in that the inner side surfaces of the three bosses are coplanar with the inner side surface of the outer ring portion of the quartz pendulum, and the diameters of the outer side surfaces of the three bosses on both sides are smaller than the diameter of the outer side surface of the outer ring portion of the quartz pendulum.

[0009] Moreover, the diameters of the outer surfaces of the three bosses on both sides are 0.3 mm to 0.8 mm smaller than the diameter of the outer surface of the outer ring portion of the quartz pendulum.

[0010] The advantages and positive effects of the present invention are: The present invention moves the three bosses on the quartz pendulum piece inward by a certain distance, which can not only ensure the required capacitance area of ​​the original pendulum piece (to ensure the resolution of the accelerometer), but also make the bosses away from the edge of the pendulum piece. Therefore, mechanical contact between the bosses and the edge of the magnetic ring is avoided, and the three bosses maintain good and uniform contact with the magnetic rings on both sides, thereby improving the reliability and accuracy of the accelerometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a cross-sectional view of a core component in an existing quartz flexible accelerometer; Figure 2This is a schematic diagram of the structure of a quartz pendulum in an existing quartz flexible accelerometer; Figure 3 This is a diagram showing the contact between the quartz pendulum and the magnetic ring components in an existing quartz flexible accelerometer; Figure 4 It is a structural schematic diagram of the quartz pendulum of the present invention; Figure 5 This is the quartz pendulum processing flow chart; Figure 6 It is an improved leading magnetic toroidal change diagram; Figure 7 It is an improved magnetic permeable ring variable diagram; Figure 8 This is a comparison chart of the full-temperature stability of the quartz flexible accelerometer before and after improvement. DETAILED DESCRIPTION

[0012] A quartz pendulum that reduces the effect of magnetic ring edge deformation, see Figures 1-8 The invention point is as follows: the quartz pendulum is composed of an outer ring portion 1.2, a pendulum tongue portion 1.4 and a winding beam portion 1.3. The pendulum tongue portion is connected to the inner side of the outer ring portion through the winding beam portion. Three bosses 1.1 are provided on both sides of the outer ring portion for contacting the inner side surface of the upper magnetic conductive ring component and the inner side surface of the lower magnetic conductive ring component of the quartz flexible accelerometer, respectively. In the present invention, through reasonable layout and design, the positions of the three bosses on both sides of the quartz pendulum are moved inward by a certain distance without changing the capacitance area of ​​the quartz pendulum. This ensures the capacitance area that the original pendulum should have (to ensure the resolution of the accelerometer) and the complete mechanical contact between the boss and the end face of the magnetic conductive ring (avoiding the edge of the end face of the magnetic conductive ring). The three bosses are subjected to uniform pressure, thereby improving the reliability and accuracy of the accelerometer.

[0013] In the present invention, the inner side surfaces of the three bosses on both sides are coplanar with the inner side surface of the outer ring portion of the quartz pendulum, and the outer side surfaces of the three bosses on both sides have a diameter smaller than the outer side surface of the outer ring portion of the quartz pendulum. Preferably, the outer side surfaces of the three bosses on both sides are 0.3 mm to 0.8 mm smaller than the outer side surface of the outer ring portion of the quartz pendulum.

[0014] The processing method of quartz pendulum is as follows: Figure 5 In the present invention, the change of the positions of the three bosses on both sides of the outer ring of the quartz pendulum leads to a change in its processing method. In the present invention, the processing method of the quartz pendulum that reduces the influence of the edge deformation of the magnetic ring includes the following steps: Gluing tooling (1) Take out the rubber pad used to etch the three bosses and cut it into small pieces with a scalpel; (2) Use metal tweezers to pick up a small piece of rubber pad, dip it in a small amount of glue, and then stick it to the tooling where the three bosses are etched; (3) After the glue has dried, use a scalpel to trim the rubber pad along the edge of the tooling.

[0015] Install (1) Place the three boss fixtures with threaded holes into the positioning base; (2) Use pointed plastic tweezers to pick up the pendulum and place it on the positioning base. Use the tweezers to hold the square hole and gently rotate the pendulum so that the three bosses are pressed against the rubber pad of the tooling. (3) Place the three boss fixtures with through holes into the positioning base; (4) Use a torque screwdriver to tighten the copper screws to secure the three bosses.

[0016] Etching Place the installed pendulum on the bracket and then place it in acid for etching.

[0017] The quartz pendulum of the present invention, which reduces the influence of the edge deformation of the magnetic ring, is applied to a quartz flexible accelerometer. The three bosses on the outer ring of the quartz pendulum avoid contact with the edge parts of the upper and lower magnetic ring components, thereby reducing the influence of the edge deformation of the magnetic ring.

[0018] The comparison data of the magnetic ring deformation of the quartz pendulum using the present invention to reduce the influence of the magnetic ring edge deformation and the existing magnetic ring deformation is as follows: Figure 6 Figure 7 As shown: Figure 6 In order to improve the edge collapse of the leading magnetic ring, the collapse height was calculated to be 1.07 μm according to the laser interferometer test principle; Figure 7 In order to improve the edge collapse of the leading magnetic ring, the collapse height was converted to 0.52μm according to the laser interferometer test principle.

[0019] The comparison data of the quartz flexible acceleration of the quartz pendulum using the present invention to reduce the influence of the edge deformation of the magnetic ring and the existing quartz flexible acceleration are as follows: Figure 8 As shown: Although the embodiments and drawings of the present invention are disclosed for illustrative purposes, those skilled in the art will understand that various replacements, changes and modifications are possible without departing from the spirit of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. A quartz pendulum for reducing the effect of edge deformation of a magnetic ring, the quartz pendulum comprising an outer ring portion, a pendulum tongue portion, and a winding beam portion, the pendulum tongue portion being connected to the inner portion of the outer ring portion via the winding beam portion, and three bosses being provided on both sides of the outer ring portion; characterized in that: The inner side surfaces of the three bosses are coplanar with the inner side surface of the outer ring portion of the quartz pendulum, and the diameters of the outer side surfaces of the three bosses on both sides are smaller than the diameter of the outer side surface of the outer ring portion of the quartz pendulum.

2. The quartz pendulum for reducing the influence of magnetic ring edge deformation according to claim 1, characterized in that: The diameters of the outer side surfaces of the three bosses on the two sides are 0.3 mm to 0.8 mm smaller than the diameter of the outer side surface of the outer ring portion of the quartz pendulum.

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