Segmented laser beam path straightness adjustment method and laser optical system

Abstract

The application relates to a segmented laser light path straightness adjustment method and a laser optical system, which comprises the following steps: adjusting a mirror according to a light spot formed on a light path cross after a light beam output by a laser is reflected by the mirror, so that the center of the light spot on the light path cross is completely coincident with the cross center of the light path cross; adjusting a beam expander according to the position of a light spot on a first detection cross after the light beam is expanded by the beam expander, so that the center of the light spot on the first detection cross is coincident with the cross center of the first detection cross; adjusting a shaping mirror according to the position of a light spot formed on a second detection cross after the light beam shape is adjusted by the shaping mirror, so that the center of the light spot on the second detection cross is coincident with the cross center of the second detection cross. The mirror, the beam expander and the shaping mirror are adjusted in sequence along the light beam transmission direction, the light path straightness is calibrated in stages, and the efficiency and accuracy of the light path adjustment are improved.

Description

Technical Field

[0001] This application relates to the field of optical inspection equipment technology, and in particular to a segmented laser optical path straightness adjustment method and a laser optical system. Background Technology

[0002] In laser optics systems, the straightness and stability of the optical path are crucial factors in ensuring system performance. Traditional methods for adjusting the straightness of the optical path typically involve sequentially installing each optical component and then comprehensively adjusting the beam position by observing the overall beam pattern. However, the influence of each optical component is interdependent during this adjustment process, making it difficult to accurately pinpoint the optical path deviation of a single element. This results in repeated adjustments, cumbersome operations, and low efficiency in optical path adjustment. Summary of the Invention

[0003] Therefore, it is necessary to provide a segmented laser optical path straightness adjustment method and laser optical system that can improve the efficiency of optical path adjustment, in order to address the above problems.

[0004] This application provides a segmented laser optical path straightness adjustment method. The laser optical system includes a laser, a reflector, an optical path crosshair, a beam expander, a first detection crosshair, a shaping mirror, a second detection crosshair, and a laser scanning system arranged sequentially along the beam transmission direction. The central axes of the optical path crosshair, the first detection crosshair, and the second detection crosshair are all coincident with a preset optical path axis. The method includes:

[0005] Based on the spot formed on the optical crosshair after the laser beam is reflected by the reflector, the reflector is adjusted so that the center of the spot on the optical crosshair is completely aligned with the center of the crosshair of the optical crosshair.

[0006] Based on the position of the spot on the first detection crosshair after the beam expanded by the beam expander, the beam expander is adjusted so that the center of the spot on the first detection crosshair coincides with the center of the crosshair of the first detection crosshair.

[0007] After the beam shape is adjusted according to the shaping mirror, the beam shape is adjusted to the position of the light spot formed on the second detection crosshair so that the center of the light spot of the second detection crosshair coincides with the center of the crosshair of the second detection crosshair.

[0008] In one embodiment, adjusting the reflector includes: fine-tuning the lateral position and tilt angle of the reflector using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the optical path crosshair.

[0009] In one of the embodiments, the adjustment of the beam expander includes: according to the detection data returned by the photoelectric detection unit in the first detection cross, adjusting the lateral position and the tilt angle of the beam expander through the fine adjustment mechanism.

[0010] In one of the embodiments, the adjustment of the shaping mirror includes: according to the detection data returned by the photoelectric detection unit in the second detection cross, adjusting the lateral position and the tilt angle of the shaping mirror through the fine adjustment mechanism.

[0011] In one of the embodiments, the detection data includes the offset between the center of the light spot and the center of the cross.

[0012] The second aspect of the present application provides a laser optical system, which includes a laser, a mirror, a light path cross, a beam expander, a first detection cross, a shaping mirror, a second detection cross and a laser scanning system arranged in sequence along the direction of the light beam transmission, the light path cross, the first detection cross and the second detection cross all have the same central axis as the preset light path axis; the laser optical system further includes a control device and a fine adjustment mechanism, the control device is connected to the light path cross, the first detection cross, the second detection cross and the fine adjustment mechanism, the fine adjustment mechanism is connected to the mirror, the beam expander and the shaping mirror, and the control device adjusts the straightness of the segmented laser light path according to the above method.

[0013] In one of the embodiments, the number of the mirrors is more than two, and the light beam output by the laser is reflected by each of the mirrors in sequence to form a light spot on the light path cross; the control device adjusts the mirror of the last reflected light beam according to the detection data returned by the photoelectric detection unit in the light path cross, so that the center of the light spot on the light path cross is completely coincident with the cross center of the light path cross.

[0014] In one of the embodiments, the light path cross, the first detection cross and the second detection cross all include a cross reticle and a photoelectric detection unit, the cross reticle is engraved with cross lines perpendicular to each other, and the photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the cross and feed back the offset to the control device.

[0015] In one of the embodiments, the light path cross, the first detection cross and the second detection cross are all telescopic cross, and the light path cross, the first detection cross and the second detection cross are retracted to avoid blocking the light beam transmission after completing the light path adjustment of the corresponding segment.

[0016] In one of the embodiments, the laser scanning system is composed of a galvanometer and a field lens.

[0017] The segmented laser beam path straightness adjustment method and the laser optical system, in combination with the beam path cross, the first detection cross and the second detection cross, sequentially adjust the mirrors, the beam expander and the shaping mirror along the beam transmission direction, realize the phased high-precision calibration of the beam path straightness, and improve the efficiency and accuracy of the beam path adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A flowchart of the segmented laser beam path straightness adjustment method in one embodiment;

[0019] Figure 2 A structural schematic diagram of the laser optical system in one embodiment;

[0020] Figure 3 A structural schematic diagram of the cross reticle in one embodiment;

[0021] Figure 4 A schematic diagram of the light spot on the beam path cross in one embodiment. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not intended to limit the present application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application.

[0024] It can be understood that the terms "first", "second", etc. used in the present application can be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element. It can be understood that "connection" in the following embodiments, if the connected circuits, modules, units, etc. have the transmission of electrical signals or data between each other, should be understood as "electrical connection", "communication connection" and the like.

[0025] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0026] In one embodiment, such as Figure 1 As shown, a segmented laser optical path straightness adjustment method is provided, the method comprising:

[0027] Step S110: Based on the spot formed on the optical crosshair after the laser beam is reflected by the mirror, adjust the mirror so that the center of the spot on the optical crosshair is completely aligned with the center of the crosshair.

[0028] like Figure 2 As shown, the laser optical system includes a laser 110, a reflector 120, an optical path crosshair 130, a beam expander 140, a first detection crosshair 150, a shaping mirror 160, a second detection crosshair 170, and a laser scanning system 180, arranged sequentially along the beam transmission direction. The central axes of the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all aligned with a preset optical path axis. Furthermore, the laser optical system may also include an optical platform for fixing the various optical components. Before using the laser optical system, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are installed, ensuring their central axes are aligned with the preset optical path axis. Then, other optical components are placed, and the linearity of the laser optical path is adjusted segmentally according to the beam transmission direction.

[0029] When adjusting the optical path of each segment, the operator can manually adjust the corresponding optical components by observing the position of the light spot with their eyes, or the control device can adjust the corresponding optical components through a fine-tuning mechanism based on the position of the light spot detected by the photoelectric detection unit. The control device can be a device such as an MCU, CPU, or FPGA. Among them, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all retractable crosshairs. After the optical path adjustment of the corresponding segment is completed, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are retracted to avoid blocking the propagation of the light beam.

[0030] The number of reflectors 120 can be one or more, depending on the actual area of ​​the optical platform and the optical path design requirements. For example, if there are two or more reflectors 120, the beam output from the laser 110 will be reflected by multiple reflectors 120 and form a light spot on the optical crosshair 130. The control device can adjust the reflector 120 of the last reflected beam according to the detection data returned by the photoelectric detection unit in the optical crosshair 130, so that the center of the light spot on the optical crosshair 130 is completely aligned with the crosshair center of the optical crosshair 130.

[0031] In this embodiment, the reflector 120 includes a first reflector 122 and a second reflector 124 for reflecting the laser beam. The laser 110 emits a 532nm green calibration beam, but can also emit 355nm violet light or 1064nm red light, depending on the process requirements. The beam is reflected sequentially by the first reflector 122 and the second reflector 124 and then transmitted to the optical path crosshair 130. The optical path crosshair 130 is fixedly installed behind the light-emitting side of the second reflector 124, and its central axis coincides with the preset optical path axis. A beam expander 140 is installed behind the optical path crosshair 130 to expand the beam. A first detection crosshair 150 is installed behind the light-emitting side of the beam expander 140, and its central axis coincides with the preset optical path axis. A shaping mirror 160 is installed behind the first detection crosshair 150 to shape the beam. A second detection crosshair 170 is installed behind the light-emitting side of the shaping mirror 160, and its central axis coincides with the preset optical path axis. The shaping mirror 160 can adjust the beam shape to a circle, square, or rectangle, etc., and the type of shaping mirror 160 is selected according to actual needs. The fine-tuning mechanism can adopt a precision angle adjustment frame and a displacement stage, etc. The fine-tuning mechanism is connected to the second reflecting mirror 124, the beam expander 140, and the shaping mirror 160 respectively, and is used to precisely adjust the position and angle of each optical element.

[0032] In one embodiment, adjusting the reflector in step S110 includes: fine-tuning the lateral position and tilt angle of the reflector using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the first detection crosshair. In this embodiment, the detection data includes the offset between the center of the light spot and the center of the crosshair.

[0033] Specifically, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 all include a crosshair reticle and a photoelectric detection unit, such as Figure 3 As shown, the crosshair reticle is engraved with mutually perpendicular crosshairs. The photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the crosshair, and feeds back the offset to the control device.

[0034] When adjusting the straightness of a segmented laser optical path, the initial determination of the two-reflector optical path (reference establishment) is performed first: A second reflector 124 (two-reflector) is installed in the laser optical system, and a telescopic optical path crosshair 130 is fixedly installed behind the light-emitting side of the second reflector 124. The central axis of the optical path crosshair 130 coincides with the preset optical path axis. Using the light spot formed on the optical path crosshair 130 after the laser beam emitted from the laser 110 is reflected by the second reflector 124 as a reference, the tilt angle and lateral position of the second reflector 124 are adjusted so that the center of the light spot completely coincides with the crosshair center of the optical path crosshair 130, completing the initial calibration of the two-reflector optical path. Figure 4 As shown, when the light spot is divided into four equal parts by the crosshairs on the reticle, the center of the light spot can be considered to coincide completely with the center of the crosshairs.

[0035] Step S120: Adjust the beam expander according to the position of the beam spot on the first detection crosshair after beam expansion, so that the center of the beam spot on the first detection crosshair coincides with the center of the crosshair of the first detection crosshair. Adjusting the beam expander includes: fine-tuning the lateral position and tilt angle of the beam expander using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the first detection crosshair.

[0036] Specifically, the procedure for confirming the straightness of the optical path behind the beam expander is as follows: A beam expander 140 is installed behind the second reflector 124 and the optical path crosshair 130 to expand the light beam. A first detection crosshair 150 is placed behind the light-emitting side of the beam expander 140. The position of the beam spot on the first detection crosshair 150 is observed. By finely adjusting the lateral position and tilt angle of the beam expander 140, the center of the beam spot is aligned with the center of the crosshair of the first detection crosshair 150, ensuring that the expanded optical path maintains straightness with the optical path calibrated by the second reflector 124.

[0037] Step S130: After adjusting the beam shape according to the shaping mirror, adjust the shaping mirror at the position of the light spot formed on the second detection crosshair so that the center of the light spot on the second detection crosshair coincides with the center of the crosshair of the second detection crosshair. The adjustment of the shaping mirror includes: fine-tuning the lateral position and tilt angle of the shaping mirror using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the second detection crosshair.

[0038] Specifically, the procedure for confirming the straightness of the optical path after the shaping mirror is as follows: A shaping mirror 160 is installed behind the beam expander 140 and the first detection crosshair 150, allowing the expanded beam to pass through the shaping mirror 160 for beam shape adjustment. A second detection crosshair 170 is set behind the light-emitting side of the shaping mirror 160. The position of the beam spot on the second detection crosshair 170 is observed. By finely adjusting the lateral position and tilt angle of the shaping mirror 160, the center of the beam spot is made to coincide with the center of the crosshair of the second detection crosshair 170, thus completing the segmented calibration of the straightness of the entire optical path.

[0039] After adjusting the straightness of the optical path in each segment, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all retracted to avoid obstructing the beam propagation. The beam output from the laser 110 is reflected by the first reflecting mirror 122 and the second reflecting mirror 124 and then transmitted to the beam expander 140 for beam expansion. The expanded beam is then shaped by the shaping mirror 160, and the beam of the desired shape is output to the laser scanning system 180, which consists of a field mirror and a galvanometer.

[0040] Galvanometer: It contains two high-speed vibrating reflective mirrors (X-axis and Y-axis mirrors). It receives commands from the control system and guides the laser beam to perform high-speed scanning motion on the working plane (drawing graphics, trajectories, etc.) by rapidly and precisely changing the angle of the mirrors.

[0041] Field lens: Also known as an F-theta lens or flat-field focusing lens. It is located after the galvanometer. Its core functions are twofold: 1. Focusing: Focusing the parallel laser beam, deflected by the galvanometer, onto the working plane. 2. Flat-field correction: Ensuring that regardless of where the laser beam is deflected by the galvanometer (center or edge) on the working plane, its focal point accurately falls on the same flat focal plane, thus achieving a uniform focused spot size and processing effect throughout the entire scanning area.

[0042] In addition, after a period of use, the laser optical system may experience deviations due to environmental factors (temperature, humidity, etc.), which may affect its accuracy. The optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 can be extended to perform segmented laser optical path straightness adjustment again, ensuring the straightness and stability of the laser optical system.

[0043] During the straightness adjustment of each laser beam segment, the control device receives detection data returned by the photoelectric detection unit and controls the fine-tuning mechanism to fine-tune the lateral position and tilt angle of the corresponding optical components. The collimation of the laser beam can be indirectly determined by measuring or observing the distribution of energy density (or power density). The core principle is as follows:

[0044] The collimation (parallelism) of a laser beam is closely related to the size of the focused spot and its energy distribution. When the laser beam is well collimated (high beam parallelism):

[0045] 1. Small beam divergence angle: The beam spreads slowly during propagation.

[0046] 2. Small and regular focused spot: When focusing with a lens with a fixed focal length (such as a field lens), a well-collimated beam will converge into a small, symmetrical (usually circular or nearly circular) spot with uniform energy distribution (close to an ideal Gaussian distribution).

[0047] 3. High and concentrated energy density: Due to the small spot size, the laser energy is highly concentrated in a very small area, resulting in a very high peak energy density in that area.

[0048] Observe the uniformity of energy distribution:

[0049] Method: The energy distribution map (cross-sectional intensity distribution) of the light spot at the focal point (or near the focal point) was directly photographed using a beam analyzer.

[0050] Judgment: A well-collimated beam, after focusing, should have an energy distribution that is a circular spot with the highest intensity at the center and a smooth, symmetrical decay outwards (approaching a Gaussian distribution). A poorly collimated beam may have a low energy density at the focal point, and the energy density drops sharply after leaving the focal point. By comparing the energy density values ​​at different locations and their rate of change, it is possible to detect whether the straightness adjustment of each segment of the laser beam path has been successful.

[0051] In one embodiment, such as Figure 2 As shown, a laser optical system is also provided, including a laser 110, a reflector 120, an optical path crosshair 130, a beam expander 140, a first detection crosshair 150, a shaping mirror 160, a second detection crosshair 170, and a laser scanning system 180 arranged sequentially along the beam transmission direction. The central axes of the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all coincident with a preset optical path axis. The laser optical system also includes a control device and a fine-tuning mechanism. The control device is connected to the optical path crosshair 130, the first detection crosshair 150, the second detection crosshair 170, and the fine-tuning mechanism. The fine-tuning mechanism is connected to the reflector 120, the beam expander 140, and the shaping mirror 160. The control device performs segmented laser beam straightness adjustment according to the above method. The control device can be a device such as an MCU, CPU, or FPGA, and the fine-tuning mechanism can adopt a precision angle adjustment frame and a displacement stage for precisely adjusting the position and angle of each optical element.

[0052] The number of reflectors 120 can be one or more, depending on the actual area of ​​the optical platform and the optical path design requirements. For example, with two or more reflectors 120, the beam output from the laser 110 is reflected by multiple reflectors 120, forming a light spot on the optical path crosshair 130. The control device adjusts the reflector 120 of the last reflected beam based on the detection data returned by the photoelectric detection unit in the optical path crosshair 130, so that the center of the light spot on the optical path crosshair 130 completely coincides with the center of the crosshair of the optical path crosshair 130. In this embodiment, the reflector 120 includes a first reflector 122 and a second reflector 124 for reflecting the laser beam. The laser 110 emits a calibration beam, which is reflected sequentially by the first reflector 122 and the second reflector 124 before being transmitted to the optical path crosshair 130.

[0053] Furthermore, the laser scanning system 180 consists of two parts: a galvanometer and a field lens. The field lens functions to change the characteristics of the laser beam through the focusing effect of the lens, controlling the shape, size, and focal point of the laser beam to ensure that the laser can be accurately focused on the target. The galvanometer functions to change the direction of the laser beam by electrically controlling the angle of the mirror surface, responsible for the movement trajectory of the laser beam, and can quickly adjust the laser irradiation position in one-dimensional or two-dimensional space.

[0054] In one embodiment, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 all include a crosshair reticle and a photoelectric detection unit. The crosshair reticle is engraved with mutually perpendicular crosshair lines, and the photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the crosshair, and feeds back the offset to the control device.

[0055] In one embodiment, the optical path crosshair 130, the first detection crosshair 150, and the second detection crosshair 170 are all retractable crosshairs. After the optical path adjustment of their respective segments is completed, the optical path crosshairs 130, 150, and 170 are retracted to avoid obstructing beam propagation. The beam output from the laser 110 is reflected by the first reflecting mirror 122 and the second reflecting mirror 124 and then transmitted to the beam expander 140 for beam expansion. The expanded beam is then shaped by the shaping mirror 160, and the desired beam shape is output to the laser scanning system 180. Furthermore, after the laser optical system has been used for a period of time, the optical path crosshairs 130, 150, and 170 can be extended again for segmented laser optical path straightness adjustment to ensure the straightness and stability of the laser optical system.

[0056] Specifically, the segmented optical path adjustment method for the above-mentioned laser optical system includes the following steps:

[0057] 1. Preliminary determination of the optical path reference for the second reflecting mirror 124:

[0058] The second reflector 124 is fixedly installed on the optical platform, and the initial position of the second reflector 124 is adjusted so that the beam emitted by the laser 110 is approximately incident on the reflecting surface of the second reflector 124.

[0059] An optical path crosshair 130 is fixedly installed behind the light-emitting side of the second reflector 124 (i.e., in the direction of propagation after the light beam is reflected by the second reflector 124), ensuring that the central axis of the optical path crosshair 130 coincides with the preset optical path axis. The optical path crosshair 130 includes a crosshair reticle and a photoelectric detection unit. The crosshair reticle is engraved with clear crosshair lines, and the photoelectric detection unit can detect the offset between the center of the light spot and the center of the crosshair.

[0060] When laser 110 is turned on, the beam is reflected by the second reflector 124 and projected onto the reticle of the optical path crosshair 130 to form a light spot. The tilt angle and lateral position of the second reflector 124 are slowly adjusted by a fine-tuning mechanism (such as a precision angle adjustment frame and a displacement stage), while observing the offset data of the photoelectric detection unit or directly visually observing the alignment of the light spot with the crosshair, until the center of the light spot completely coincides with the center of the crosshair of the reticle. At this point, the two-reflector optical path has been initially calibrated, forming a reference optical path.

[0061] 2. Confirm the straightness of the optical path after the beam expander is 140°:

[0062] A beam expander 140 is installed behind the optical cross 130 so that the beam calibrated by the second reflector 124 is accurately incident on the central region of the beam expander 140.

[0063] A first detection crosshair 150 is installed at an appropriate position behind the light-emitting side of the beam expander 140. The structure of the first detection crosshair 150 is the same as that of the optical path crosshair, and its central axis coincides with the preset optical path axis.

[0064] After being expanded by the beam expander 140, the light beam is projected onto the first detection crosshair 150. If there is a deviation in the position or angle of the beam expander 140, the center of the light spot will deviate from the crosshair center of the first detection crosshair 150. The lateral position (left and right, up and down) and tilt angle of the beam expander 140 are adjusted by the fine-tuning mechanism, and the position of the light spot is monitored in real time until the center of the light spot coincides with the crosshair center of the first detection crosshair 150. At this time, the expanded light path and the reference light path calibrated by the second reflector 124 maintain straightness, thus completing the light path adjustment of the beam expander 140.

[0065] 3. Confirm the straightness of the optical path after 160 degrees of orthopedic lens application:

[0066] A shaping mirror 160 is installed behind the first detection crosshair 150 so that the expanded beam is incident on the shaping mirror 160 for beam shape adjustment.

[0067] A second detection crosshair 170 is installed behind the light-emitting side of the shaping mirror 160, which also ensures that its central axis coincides with the preset optical path axis.

[0068] Observe the position of the beam spot on the second detection crosshair 170 after the beam has been shaped. If there is a deviation, finely adjust the lateral position and tilt angle of the shaping mirror 160 through the fine adjustment mechanism until the center of the beam spot is completely aligned with the crosshair center of the second detection crosshair. At this time, the straightness of the entire optical path has reached the high precision requirement through segmented adjustment, and the optical path calibration is completed.

[0069] Traditional methods for adjusting the straightness of the optical path typically employ a one-time, overall adjustment approach. This involves sequentially installing each optical component and then comprehensively adjusting the beam position by observing the overall pattern. This method has the following drawbacks:

[0070] 1. During the adjustment process, the influence of various optical components is coupled with each other, making it difficult to accurately locate the optical path deviation of a single component, resulting in cumbersome adjustment steps and low efficiency.

[0071] 2. The cumulative error is large. The optical path deviation in the previous stage will be directly transmitted to the subsequent components, affecting the straightness accuracy of the overall optical path.

[0072] 3. The lack of precise calibration methods in stages makes it difficult to independently verify and optimize the optical path of each key node.

[0073] The segmented laser optical path straightness adjustment method and laser optical system provided in this application achieve high-precision, staged calibration of the optical path straightness by clearly defining the adjustment sequence and reference of each optical component and combining it with the precise positioning of the optical path crosshair, thereby improving the efficiency and accuracy of optical path adjustment. This solution has the following advantages:

[0074] 1. Segmented calibration for high precision: By adjusting the optical path of the two-mirror, beam expander, and shaping mirror in stages, each step is independently calibrated based on the optical path crosshair, avoiding the cumulative error in traditional overall adjustment and significantly improving the accuracy of optical path straightness.

[0075] 2. High adjustment efficiency: The adjustment targets at each stage are clear. Through the intuitive feedback of the optical crosshair or the automated control of photoelectric detection, deviations can be quickly located and precise adjustments can be made, reducing debugging time and improving work efficiency.

[0076] 3. Easy to operate: The adjustment sequence is clear and the benchmarks for each step are well-defined. Even operators can intuitively judge the optical path status by aligning the crosshairs, which reduces the difficulty of operation.

[0077] 4. Wide applicability: It is suitable for various optical systems that require high-precision optical path straightness calibration, and has significant advantages, especially in fields such as laser processing and laser communication where high optical path stability is required.

[0078] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A segmented laser optical path straightness adjustment method, characterized in that, The laser optical system includes a laser, a mirror, an optical path crosshair, a beam expander, a first detection crosshair, a shaping mirror, a second detection crosshair, and a laser scanning system arranged sequentially along the beam transmission direction. The central axes of the optical path crosshair, the first detection crosshair, and the second detection crosshair are all coincident with a preset optical path axis. The method includes: Based on the spot formed on the optical crosshair after the laser beam is reflected by the reflector, the reflector is adjusted so that the center of the spot on the optical crosshair is completely aligned with the center of the crosshair of the optical crosshair. Based on the position of the spot on the first detection crosshair after the beam expanded by the beam expander, the beam expander is adjusted so that the center of the spot on the first detection crosshair coincides with the center of the crosshair of the first detection crosshair. After the beam shape is adjusted according to the shaping mirror, the beam shape is adjusted to the position of the light spot formed on the second detection crosshair so that the center of the light spot of the second detection crosshair coincides with the center of the crosshair of the second detection crosshair. The optical path crosshair, the first detection crosshair, and the second detection crosshair all include a crosshair reticle and a photoelectric detection unit. By receiving the detection data returned by the photoelectric detection unit, the distribution of energy density is measured or observed to detect whether the laser optical path is collimated. The energy density values ​​and their rate of change at different positions are compared to detect whether the straightness adjustment of each segment of the laser optical path is successful.

2. The method according to claim 1, characterized in that, Adjusting the reflector includes: fine-tuning the lateral position and tilt angle of the reflector using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the optical path crosshair.

3. The method according to claim 1, characterized in that, Adjusting the beam expander includes: fine-tuning the lateral position and tilt angle of the beam expander using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the first detection crosshair.

4. The method according to claim 1, characterized in that, Adjusting the orthopedic mirror includes: fine-tuning the lateral position and tilt angle of the orthopedic mirror using a fine-tuning mechanism based on the detection data returned by the photoelectric detection unit in the second detection crosshair.

5. The method according to any one of claims 2 to 4, characterized in that, The detection data includes the offset between the center of the light spot and the center of the crosshair.

6. A laser optical system, characterized in that, The system includes a laser, a reflector, an optical path crosshair, a beam expander, a first detection crosshair, a shaping mirror, a second detection crosshair, and a laser scanning system arranged sequentially along the beam transmission direction. The central axes of the optical path crosshair, the first detection crosshair, and the second detection crosshair are all coincident with a preset optical path axis. The laser optical system also includes a control device and a fine-tuning mechanism. The control device is connected to the optical path crosshair, the first detection crosshair, the second detection crosshair, and the fine-tuning mechanism. The fine-tuning mechanism is connected to the reflector, the beam expander, and the shaping mirror. The control device performs segmented laser beam straightness adjustment according to the method described in any one of claims 1 to 5.

7. The system according to claim 6, characterized in that, The number of reflectors is two or more. The laser beam output by the laser is reflected by each of the reflectors in sequence to form a light spot on the optical crosshair. The control device adjusts the reflector of the last reflected beam according to the detection data returned by the photoelectric detection unit in the optical crosshair so that the center of the light spot on the optical crosshair is completely aligned with the crosshair center of the optical crosshair.

8. The system according to claim 6, characterized in that, The reticle is engraved with mutually perpendicular cross lines. The photoelectric detection unit is used to detect the offset between the center of the light spot and the center of the cross, and feeds back the offset to the control device.

9. The system according to claim 6, characterized in that, The optical path cross, the first detection cross, and the second detection cross are all retractable cross structures. After the optical path adjustment of the corresponding segment is completed, the optical path cross, the first detection cross, and the second detection cross are retracted and placed to avoid blocking the propagation of the light beam.

10. The system according to any one of claims 6 to 9, characterized in that, The laser scanning system consists of two parts: a galvanometer and a field mirror.

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