Pre-calibration method, automatic adjustment method and device for optical slit installation position

Abstract

This application provides a pre-calibration method, automatic adjustment method, and apparatus for the installation position of an optical slit. The pre-calibration method includes: constructing a power system; constructing an optical path system; installing the optical slit in a mounting groove near the drive mechanism; controlling the drive mechanism to move the optical slit towards a reset mechanism within the mounting groove; a detector receiving light passing through the optical slit in real time, calculating and outputting the optical power value, and obtaining an optical power data curve; obtaining the optical power peak value P from the optical power data curve, and setting a first threshold Y1, a second threshold Y2, and a third threshold Y3 based on the optical power peak value P; and controlling the drive mechanism and the reset mechanism to automatically adjust the installation position of the optical slit based on the first threshold Y1, the second threshold Y2, and the third threshold Y3. This application improves the efficiency of optical slit installation and ensures the accuracy and consistency of the optical slit installation position of the spectrometer.

Description

Technical Field

[0001] This application relates to the field of optical precision instrument technology, and in particular to a pre-calibration method, automatic adjustment method and device for the installation position of an optical slit. Background Technology

[0002] The optical slit is a very important component of a spectrometer, mainly consisting of an entrance slit and an exit slit, and its width can be continuously adjusted within the range of 0.01-2 mm.

[0003] Currently, the installation of optical slits is done manually. During the adjustment of the installation position of the optical slit, the operator uses a microscope to magnify the optical slit and observes the light transmitted through the optical slit through the electronic display screen of the microscope. The operator then manually uses an adjustment knob to push the optical slit so that it is centered under the observation of the operator. This adjustment method is inefficient, lacks consistency, and has large errors, which does not meet the requirements of industrialization. Summary of the Invention

[0004] The technical problem to be solved by this application is to provide a pre-calibration method, automatic adjustment method and device for the installation position of an optical slit, so as to improve the efficiency of optical slit installation and ensure the accuracy and consistency of the optical slit installation position of the spectrometer.

[0005] To address the aforementioned technical problems, in a first aspect, this application provides a pre-calibration method for the installation position of an optical slit, used to pre-calibrate a threshold value during the movement of the optical slit, the pre-calibration method comprising:

[0006] A drive mechanism and a reset mechanism are respectively installed on both sides of the mounting slot to build a power system;

[0007] Connect the light source and the optical fiber, and place one end of the optical fiber and the detector on the front and back of the mounting slot, respectively, to build an optical path system;

[0008] The optical slit is installed in the mounting slot and on one side close to the drive mechanism;

[0009] The drive mechanism is controlled to move the optical slit within the mounting slot toward the reset mechanism;

[0010] The detector receives light passing through the optical slit in real time, calculates and outputs the optical power value, and obtains the optical power data curve.

[0011] The optical power peak value P is obtained from the optical power data curve, and a first threshold Y1, a second threshold Y2 and a third threshold Y3 are set based on the optical power peak value P;

[0012] Based on the first threshold Y1, the second threshold Y2, and the third threshold Y3, the drive mechanism and the reset mechanism are controlled to automatically adjust the installation position of the optical slit.

[0013] In some embodiments of this application, the optical power peak value P is obtained from the optical power data curve, and a first threshold Y1, a second threshold Y2, and a third threshold Y3 are set based on the optical power peak value P, including:

[0014] Multiple optical slits are sequentially installed in the mounting groove, and the optical slits are pushed to move toward the reset mechanism in the mounting groove by the driving mechanism, so that the detector obtains multiple corresponding optical power data curves;

[0015] Multiple corresponding optical power peaks P are obtained from the multiple optical power data curves, and the multiple optical power peaks P are averaged to obtain the optical power average. ;

[0016] Based on the average optical power Set the first threshold Y1, the second threshold Y2, and the third threshold Y3.

[0017] In some embodiments of this application, obtaining the optical power peak value P from the optical power data curve includes:

[0018] k1=(P m -P n ) / δt;

[0019] k2=(P m +1-P n +1) / δt;

[0020] k3 = (P m +2-P n +2) / δt;

[0021] Where m is a natural number, m≥1, n=m+5, and δt represents the time difference between Pm and Pn;

[0022] If k1, k2, and k3 are all less than 0, then the peak optical power P is obtained.

[0023] Secondly, this application provides an automatic adjustment method for the mounting position of an optical slit, used to automatically align the center of one end of an optical fiber with the center of the optical slit, and to mount the aligned optical slit on a spectrometer used for semiconductor etching and thin film process endpoint detection. The method includes:

[0024] The optical slit is installed in the mounting slot and on the side close to the drive mechanism;

[0025] Control the operation of the driving mechanism to push the optical slit to move towards the reset mechanism in the installation groove;

[0026] When the real-time optical power value P obtained by the detector S reaches the set first threshold Y1, control the driving mechanism to stop moving;

[0027] Control the operation of the reset mechanism to push the optical slit to move towards the driving mechanism in the installation groove;

[0028] When the real-time optical power value P obtained by the detector S reaches the set second threshold Y2, control the reset mechanism to reduce the speed;

[0029] When the real-time optical power value P obtained by the detector S reaches the set third threshold Y3, control the reset mechanism to stop moving.

[0030] In some embodiments of the present application, when the real-time optical power value P obtained by the detector S reaches the set first threshold Y1, controlling the driving mechanism to stop moving includes:

[0031] When the real-time optical power value P obtained by the detector S is equal to the first threshold Y1, and the magnitude of the real-time optical power value P obtained by the detector S is gradually decreasing, control the driving mechanism to stop operating;

[0032] Wherein, the first threshold Y1 = a * P, a is the proportional coefficient of the first threshold, when 0 < P ≤ 5 mW, 40% ≤ a < 45%; when 5 < P ≤ 10 mW, 45% ≤ a ≤ 50%; when 10 < P ≤ 15 mW, 50% < a ≤ 60%.

[0033] In some embodiments of the present application, when the real-time optical power value P obtained by the detector S reaches the set second threshold Y2, controlling the reset mechanism to reduce the speed includes:

[0034] When the real-time optical power value P obtained by the detector S is equal to the second threshold Y2, and the magnitude of the optical power value obtained by the detector is gradually increasing, control the reset mechanism to reduce the speed;

[0035] Wherein, the second threshold Y2 = b * P, b is the proportional coefficient of the second threshold, and 80% ≤ b ≤ 90%.

[0036] In some embodiments of this application, the third threshold Y3 = c * P, where c is the proportionality coefficient of the third threshold, and 98% ≤ c ≤ 100%.

[0037] In some embodiments of this application, controlling the reset mechanism to reduce speed includes:

[0038] The voltage U supplied to the reset mechanism is automatically reduced to 0.2U.

[0039] Thirdly, this application provides an automatic adjustment device for an optical slit, comprising:

[0040] A mounting base having a channel and a mounting slot, the channel connecting the mounting slot for mounting an optical slit;

[0041] A drive mechanism is provided on one side of the fixed base. The drive mechanism has a push rod for pushing the optical slit to move toward the other side of the fixed base.

[0042] A reset mechanism is provided on the other side of the fixed base. The reset mechanism has a reset rod, which is used to push the optical slit to move toward the drive mechanism.

[0043] A detector, configured corresponding to the channel, is used to receive light passing through the optical slit and convert it into optical power data;

[0044] The controller is electrically connected to the detector, the drive mechanism, and the reset mechanism.

[0045] In some embodiments of this application, both the driving mechanism and the reset mechanism include a driving component;

[0046] The drive assembly includes a mounting plate, a driver, and a transmission assembly. The mounting plate is connected to the fixed base, and the driver is mounted on the mounting plate and connected to the transmission assembly.

[0047] In the driving mechanism, the transmission component is connected to the push rod, and in the reset mechanism, the transmission component is connected to the reset rod.

[0048] In some embodiments of this application, the transmission assembly includes a lead screw sleeve, a secondary gear, and a connecting rod;

[0049] The driver is a motor, and the drive shaft is connected to the lead screw sleeve to move the lead screw sleeve;

[0050] The lead screw sleeve has a first rack structure on one side wall near the mounting groove;

[0051] The secondary gear is rotatably mounted on the mounting plate. The secondary gear has a gear structure and an arc-shaped second rack structure. The second rack structure meshes with the first rack structure. The gear structure is coaxially arranged with the shaft of the secondary gear.

[0052] The outer wall of the connecting rod has a third rack structure, which meshes with the gear structure;

[0053] In the driving mechanism, the connecting rod is connected to the pushing rod, and in the reset mechanism, the connecting rod is connected to the reset rod.

[0054] In some embodiments of this application, a mounting bracket is also included;

[0055] The mounting base is provided with an installation port;

[0056] The mounting bracket is detachably located at the mounting opening, and the mounting bracket has the channel and the mounting groove.

[0057] The advantages of the pre-calibration method, automatic adjustment method, and device for the installation position of the slit provided in this application are as follows:

[0058] The position of the optical slit is adjusted by controlling the movement of the drive mechanism and the reset mechanism. Specifically, the controller controls the movement of the drive mechanism and the reset mechanism according to the magnitude of the light power value received by the detector. Finally, the automatic adjustment of the installation position is completed when the light power value detected by the detector is within the threshold range. This method is applicable to the position adjustment of optical slits of various specifications, improves the efficiency of optical slit installation, and ensures the accuracy and consistency of the optical slit installation position of the spectrometer. Attached Figure Description

[0059] Figure 1 A flowchart of the pre-calibration method for the optical slit mounting position provided in this application;

[0060] Figure 2 A flowchart of the automatic adjustment method for the installation position of the optical slit provided in this application;

[0061] Figure 3 A schematic diagram of the optical power data curve during the automatic adjustment method of the installation position through the optical slit provided in this application;

[0062] Figure 4 A schematic diagram of the structure of the automatic adjustment device for the optical slit provided in this application;

[0063] Figure 5 A front view of the automatic adjustment device for the optical slit provided in this application after the detector has been removed.

[0064] Figure label:

[0065] Fixed base 1, mounting slot 11, optical slit 2, optical fiber 3, drive mechanism 4, push rod 41, reset mechanism 5, reset rod 51, detector 6, drive assembly 7, mounting plate 71, driver 72, transmission assembly 73, lead screw sleeve 731, first rack structure 7311, second gear 732, gear structure 7321, second rack structure 7322, connecting rod 733, third rack structure 7331. Detailed Implementation

[0066] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this application pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0067] Furthermore, it should be understood that the orientations or positional relationships indicated by terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" in this document are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The terms "first" and "second" in this document are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more.

[0068] To address the problems existing in the prior art, embodiments of this application provide a pre-calibration method for the installation position of an optical slit, used to pre-calibrate a threshold during the movement of the optical slit, preparing for subsequent automatic adjustment of the optical slit installation position. (Refer to...) Figure 1 As shown, the pre-calibration method includes the following steps:

[0069] S101: A drive mechanism and a reset mechanism are respectively installed on both sides of the mounting slot to build a power system.

[0070] S102: Connect the light source and the optical fiber, and place one end of the optical fiber and the detector on the front and back of the mounting slot respectively to build an optical path system.

[0071] In this step, the other end of the optical fiber is connected to a light source, which is used to emit light and transmit it through the optical fiber.

[0072] S103: Install the optical slit in the mounting slot and on one side close to the drive mechanism.

[0073] In this step, the center of the mounting slot has a channel, one end of which is connected to one end of the optical fiber and remains coaxial. Therefore, when the optical slit is installed in the mounting slot and close to the side of the drive mechanism, the optical slit and the channel are not coaxial in the initial state.

[0074] S104: Control the operation of the drive mechanism to push the optical slit within the mounting slot toward the reset mechanism.

[0075] In this step, to ensure the reliability of optical power data acquisition, the speed is reduced when the driving mechanism pushes the optical slit to the vicinity of the center of one end of the optical fiber.

[0076] S105: The detector receives light passing through the optical slit in real time, calculates and outputs the optical power value, and obtains the optical power data curve.

[0077] In this step, since the detector and the center of the mounting slot are coaxially set, as the optical slit moves from the side near the drive mechanism toward the reset mechanism, due to its own obstruction, the optical power received by the detector will increase from small to large and then decrease again, thereby detecting and outputting the optical power data through the optical path.

[0078] It is understandable that when the optical power is at its maximum, the center of the optical slit is coaxial with the center of one end of the optical fiber, which means they are aligned.

[0079] S106: Obtain the optical power peak value P from the optical power data curve, and set a first threshold Y1, a second threshold Y2 and a third threshold Y3 based on the optical power peak value P.

[0080] In this step, in order to improve the accuracy of setting the first threshold Y1, the second threshold Y2 and the third threshold Y3, multiple optical slits can be installed sequentially in the mounting groove, and the optical slits can be pushed to move toward the reset mechanism in the mounting groove by the driving mechanism, so that the detector can obtain multiple corresponding optical power data curves;

[0081] Multiple corresponding optical power peaks P are obtained from the multiple optical power data curves, and the multiple optical power peaks P are averaged to obtain the optical power average. ;

[0082] Based on the average optical power Set the first threshold Y1, the second threshold Y2, and the third threshold Y3.

[0083] Additionally, it should be noted that due to noise present when acquiring the optical power peak value P, the following formula can be used to obtain the optical power peak value P from the optical power data curve to improve the accuracy of the acquisition:

[0084] k1=(P m -P n ) / δt;

[0085] k2=(P m +1-P n +1) / δt;

[0086] k3 = (P m +2-P n +2) / δt;

[0087] Where m is a natural number, m≥1, n=m+5, and δt represents the time difference between Pm and Pn;

[0088] If k1, k2, and k3 are all less than 0, the peak optical power P is obtained from the corresponding optical power data curve. The obtained peak optical power P is then displayed on the host computer. Here, k1, k2, and k3 represent the slopes of the optical power data curves.

[0089] S107: Based on the first threshold Y1, the second threshold Y2 and the third threshold Y3, control the driving mechanism and the reset mechanism to automatically adjust the installation position of the optical slit.

[0090] In this embodiment, by using the above method, the first threshold Y1, the second threshold Y2 and the third threshold Y3 are obtained, thereby realizing the automatic adjustment of the subsequent optical slit installation position.

[0091] Embodiments of this application provide an automatic adjustment method for the mounting position of an optical slit. This automatic adjustment method automatically aligns the center of one end of an optical fiber with the center of the optical slit, and then mounts the aligned optical slit on a spectrometer used for etching and thin film process endpoint detection. (Refer to...) Figure 2 and Figure 3 As shown, the method includes:

[0092] S201: Install the optical slit in the installation groove and close to one side of the driving mechanism.

[0093] S202: Control the operation of the driving mechanism to push the optical slit to move towards the reset mechanism in the installation groove.

[0094] S203: When the real-time optical power value P obtained by the detector S reaches the set first threshold Y1, control the driving mechanism to stop moving.

[0095] Specifically in this step, in the time period from 0 to t1, the real-time optical power value P S generally increases gradually until it reaches the optical power peak P. When the real-time optical power value P obtained by the detector S is equal to the first threshold Y1, and the real-time optical power value P obtained by the detector S is decreasing in size, such as Figure 3 in the time period from t1 to t2, at this time, the driving mechanism can be controlled to stop operating.

[0096] Herein, it should be noted that the first threshold Y1 = a * P, where a is the proportionality coefficient of the first threshold, and P is the optical power peak obtained by using the above embodiment. When 0 < P ≤ 5 mW, 40% ≤ a < 45%; when 5 < P ≤ 10 mW, 45% ≤ a ≤ 50%; when 10 < P ≤ 15 mW, 50% < a ≤ 60%.

[0097] S204: Control the operation of the reset mechanism to push the optical slit to move towards the driving mechanism in the installation groove.

[0098] S205: When the real-time optical power value P obtained by the detector S reaches the set second threshold Y2, control the reset mechanism to reduce the speed.

[0099] In this step, such as Figure 3 in the time period from t2 to t3, within this time period, the reset mechanism can move at full speed. When the real-time optical power value P obtained by the detector S is equal to the second threshold Y2, and the size of the optical power value obtained by the detector is increasing, such as Figure 3 in the time period from t3 to t4, at this time, the reset mechanism can be controlled to reduce the speed.

[0100] Herein, the second threshold Y2 = b * P, where b is the proportionality coefficient of the second threshold, and 80% ≤ b ≤ 90%.

[0101] Understandably, when the controller controls the reset mechanism to move at full speed, it cannot move the optical slit to the center of the mounting slot to achieve precise matching. To improve the accuracy and efficiency of optical slit installation, this application requires controlling the reset mechanism to move the optical slit to a suitable position and reduce its speed to prevent overshoot caused by excessively high motor speed in the reset mechanism.

[0102] Specifically, in this embodiment, the speed of the reset mechanism is reduced by decreasing the voltage U supplied to it to (0.1-0.2)U.

[0103] S206: When the detector acquires the real-time optical power value P S When the set third threshold Y3 is reached, the reset mechanism is controlled to stop moving.

[0104] In this step, the third threshold Y3 = c * P, where c is the proportional coefficient of the third threshold, and 98% ≤ c ≤ 100%. After the control reset mechanism stops running, the position of the optical slit is adjusted, and the optical slit can be fixed to the mounting groove by dispensing adhesive.

[0105] In this embodiment, the position of the optical slit is adjusted by controlling the movement of the driving mechanism and the reset mechanism. This method is applicable to the position adjustment of optical slits of various specifications, improves the efficiency of optical slit installation, and ensures the accuracy and consistency of the optical slit installation position of the spectrometer.

[0106] In another embodiment provided in this application, an automatic adjustment device for an optical slit is provided, which can implement the automatic adjustment method for the installation position of the optical slit, as described above. Figure 4 and Figure 5As shown, the automatic adjustment device includes a fixed base 1, a drive mechanism 4, a reset mechanism 5, a detector 6, and a controller. The fixed base 1 has a channel and a mounting slot 11. The channel connects to the mounting slot 11, which is used to mount an optical slit 2. An optical fiber 3 is connected to the back of the mounting slot 11, with one end of the fiber 3 coaxial with the channel and the other end connected to a light source. The drive mechanism 4 is located on one side of the fixed base 1 and has a push rod 41, which pushes the optical slit 2 to move towards the other side of the fixed base 1. The reset mechanism 5 is located on the other side of the fixed base 1 and has a reset rod 51, which pushes the optical slit 2 towards the drive mechanism 4. The detector 6 is positioned corresponding to the channel and located on the front of the mounting slot 11 to receive light passing through the optical slit 2 and convert it into optical power data. The controller is electrically connected to the detector 6, the drive mechanism 4, and the reset mechanism 5.

[0107] In this embodiment, the controller controls the operation of the reset mechanism 5 and the drive mechanism 4 based on the optical power detected by the detector 6, thereby realizing automatic adjustment of the position of the optical slit 2, which greatly improves the adjustment efficiency and ensures the accuracy and consistency of the product after installation.

[0108] In some embodiments, both the driving mechanism and the reset mechanism include a driving assembly 7. The driving assembly 7 includes a mounting plate 71, a driver 72, and a transmission assembly 73. The mounting plate 71 is connected to the fixed base, and the driver 72 is mounted on the mounting plate 71 and connected to the transmission assembly 73. The transmission assembly 73 in the driving mechanism is connected to the push rod, and the transmission assembly 73 in the reset mechanism is connected to the reset rod.

[0109] Further, the transmission assembly 73 includes a lead screw sleeve 731, a secondary gear 732, and a connecting rod 733. The driver 72 is a motor, and the shaft of the driver 72 is connected to the lead screw sleeve 731 to move the lead screw sleeve. The side wall of the lead screw sleeve near the mounting groove 11 has a first rack structure 7311. The secondary gear 732 is rotatably mounted on the mounting plate 71. The secondary gear 732 has a gear structure 7321 and an arc-shaped second rack structure 7322. The second rack structure 7322 meshes with the first rack structure 7311. The gear structure 7321 is coaxially arranged with the shaft of the secondary gear 732. The outer side wall of the connecting rod 733 has a third rack structure 7331, which meshes with the gear structure 7321.

[0110] In the drive mechanism 4, the connecting rod 733 is connected to the push rod 41, and in the reset mechanism 5, the connecting rod 733 is connected to the reset rod 51.

[0111] In some embodiments, the automatic adjustment device for the optical slit 2 further includes a mounting bracket, the mounting base 1 having a mounting opening, the mounting bracket being detachably disposed at the mounting opening, and the mounting bracket having the channel and the mounting groove 11.

[0112] In this embodiment, the mounting bracket can be configured with corresponding mounting slots 11 according to different specifications of the optical slits 2. Since the mounting bracket is detachably connected to the fixed base 1, the corresponding mounting bracket can be selected for different specifications of optical slits 2, so that the automatic adjustment device of the optical slit 2 can be used to adjust the position of the optical slits 2 of different specifications.

[0113] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A method for pre-calibrating the installation position of an optical slit, characterized in that, For pre-calibrating the threshold during the movement of the optical slit, the pre-calibration method includes: Drive mechanisms and reset mechanisms are respectively arranged on both sides of the installation groove to build a power system; Connect the light source and the optical fiber, and place one end of the optical fiber and the detector on the front and back of the installation groove respectively to build an optical path system; Install the optical slit in the installation groove and close to one side of the drive mechanism; Control the operation of the drive mechanism to push the optical slit to move in the installation groove towards the reset mechanism; The detector receives the light passing through the optical slit in real time, calculates and outputs the optical power value, and obtains an optical power data curve; Obtain the optical power peak P from the optical power data curve, and set the first threshold Y1, the second threshold Y2, and the third threshold Y3 based on the optical power peak P; Based on the first threshold Y1, the second threshold Y2, and the third threshold Y3, control the drive mechanism and the reset mechanism to automatically adjust the installation position of the optical slit; When the detector acquires the real-time optical power value P S When the set first threshold Y1 is reached, the drive mechanism is controlled to stop moving, including: When the detector acquires the real-time optical power value P S The real-time optical power value P obtained by the detector is equal to the first threshold Y1. S As the size gradually decreases, the drive mechanism is controlled to stop operating; Wherein, the first threshold Y1 = a*P, a is the proportional coefficient of the first threshold. When 0 < P ≤ 5 mW, 40% ≤ a < 45%; when 5 < P ≤ 10 mW, 45% ≤ a ≤ 50%; when 10 < P ≤ 15 mW, 50% < a ≤ 60%; When the detector acquires the real-time optical power value P S When the set second threshold Y2 is reached, the reset mechanism is controlled to reduce its speed, including: When the detector acquires the real-time optical power value P S When the value of the light power obtained by the detector is equal to the second threshold Y2 and gradually increases, the reset mechanism is controlled to reduce its speed. Wherein, the second threshold Y2 = b*P, b is the proportional coefficient of the second threshold, and 80% ≤ b ≤ 90%; When the detector acquires the real-time optical power value P S When the set third threshold Y3 is reached, the reset mechanism is controlled to stop moving; The third threshold Y3 = c*P, c is the proportional coefficient of the third threshold, and 98% ≤ c ≤ 100%.

2. The pre-calibration method according to claim 1, characterized in that, Install multiple optical slits in the installation groove in sequence, and push the optical slits to move in the installation groove towards the reset mechanism through the drive mechanism, so that the detector obtains corresponding multiple optical power data curves; Multiple corresponding optical power peaks P are obtained from the multiple optical power data curves, and the multiple optical power peaks P are averaged to obtain the optical power average. ; Based on the average optical power Set the first threshold Y1, the second threshold Y2, and the third threshold Y3; wherein, The first threshold Y1=a* , where 'a' is the scaling factor for the first threshold, when 0 < When ≤5mW, 40%≤a<45%; when 5< ≤10mW, 45%≤a≤50%; when 10< ≤15mW, 50% <a≤60%; The second threshold Y2=b* b is the proportionality coefficient of the second threshold, and 80%≤b≤90%; The third threshold Y3=c* c is the proportionality coefficient of the third threshold, and 98%≤c≤100%.

3. The method according to claim 1, characterized in that, Obtaining the optical power peak P from the optical power data curve includes: k1=(P n -P m ) / δt; k2=(P n+1 -P m+1 ) / δt; k3=(P n+2 -P m+2 ) / δt; Where m is a natural number, m≥1, n=m+5, and δt represents P. n The corresponding time minus P m The corresponding time; If k1, k2, and k3 are all less than 0, then the optical power peak P is obtained.

4. An automatic adjustment method for the mounting position of an optical slit, used to automatically align the center of one end of an optical fiber with the center of the optical slit, and to mount the aligned optical slit on a spectrometer used for semiconductor etching and thin film process endpoint detection, characterized in that, The method includes: Install the optical slit in the installation groove and close to one side of the drive mechanism; Control the operation of the drive mechanism to push the optical slit to move in the installation groove towards the reset mechanism; When the detector acquires the real-time optical power value P S When the set first threshold Y1 is reached, the drive mechanism is controlled to stop moving; Control the operation of the reset mechanism to push the optical slit to move in the installation groove towards the drive mechanism; When the detector acquires the real-time optical power value P S When the set second threshold Y2 is reached, the reset mechanism is controlled to reduce its speed; When the detector acquires the real-time optical power value P S When the set third threshold Y3 is reached, the reset mechanism is controlled to stop moving; When the detector acquires the real-time optical power value P S When the set first threshold Y1 is reached, the drive mechanism is controlled to stop moving, including: When the detector acquires the real-time optical power value P S The real-time optical power value P obtained by the detector is equal to the first threshold Y1. S As the size gradually decreases, the drive mechanism is controlled to stop operating; Wherein, the first threshold Y1 = a*P, a is the proportional coefficient of the first threshold. When 0 < P ≤ 5 mW, 40% ≤ a < 45%; when 5 < P ≤ 10 mW, 45% ≤ a ≤ 50%; when 10 < P ≤ 15 mW, 50% < a ≤ 60%; When the detector acquires the real-time optical power value P S When the set second threshold Y2 is reached, the reset mechanism is controlled to reduce its speed, including: When the detector acquires the real-time optical power value P S When the value of the light power obtained by the detector is equal to the second threshold Y2 and gradually increases, the reset mechanism is controlled to reduce its speed. Wherein, the second threshold Y2 = b*P, b is the proportional coefficient of the second threshold, and 80% ≤ b ≤ 90%; The third threshold Y3 = c*P, c is the proportional coefficient of the third threshold, and 98% ≤ c ≤ 100%.

5. The method according to claim 4, characterized in that, Install multiple optical slits in the installation groove in sequence, and push the optical slits to move in the installation groove towards the reset mechanism through the drive mechanism, so that the detector obtains corresponding multiple optical power data curves; Multiple corresponding optical power peaks P are obtained from the multiple optical power data curves, and the multiple optical power peaks P are averaged to obtain the optical power average. ; Based on the average optical power Set the first threshold Y1, the second threshold Y2, and the third threshold Y3; wherein, The first threshold Y1=a* , where 'a' is the scaling factor for the first threshold, when 0 < When ≤5mW, 40%≤a<45%; when 5< ≤10mW, 45%≤a≤50%; when 10< ≤15mW, 50% <a≤60%; The second threshold Y2=b* b is the proportionality coefficient of the second threshold, and 80%≤b≤90%; The third threshold Y3=c* c is the proportionality coefficient of the third threshold, and 98%≤c≤100%.

6. The method according to claim 4, characterized in that, The controlling the reset mechanism to reduce the speed includes: The voltage U supplied to the reset mechanism is automatically reduced to 0.2U.

7. An automatic adjustment device for an optical slit, characterized in that, For implementing the pre-calibration method according to any one of claims 1 to 3 or the automatic adjustment method according to any one of claims 4 to 6, the automatic adjustment device comprises: A mounting base having a channel and a mounting slot, the channel connecting the mounting slot for mounting an optical slit; A drive mechanism is provided on one side of the fixed base. The drive mechanism has a push rod for pushing the optical slit to move toward the other side of the fixed base. A reset mechanism is provided on the other side of the fixed base. The reset mechanism has a reset rod, which is used to push the optical slit to move toward the drive mechanism. A detector, configured corresponding to the channel, is used to receive light passing through the optical slit and convert it into optical power data; The controller is electrically connected to the detector, the drive mechanism, and the reset mechanism.

8. The automatic adjustment device for the optical slit according to claim 7, characterized in that, Both the driving mechanism and the reset mechanism include a driving component; The drive assembly includes a mounting plate, a driver, and a transmission assembly. The mounting plate is connected to the fixed base, and the driver is mounted on the mounting plate and connected to the transmission assembly. In the driving mechanism, the transmission component is connected to the push rod, and in the reset mechanism, the transmission component is connected to the reset rod.

9. The automatic adjustment device for the optical slit according to claim 8, characterized in that, The transmission assembly includes a lead screw sleeve, a secondary gear, and a connecting rod; The driver is a motor, and the drive shaft is connected to the lead screw sleeve to move the lead screw sleeve; The lead screw sleeve has a first rack structure on one side wall near the mounting groove; The secondary gear is rotatably mounted on the mounting plate. The secondary gear has a gear structure and an arc-shaped second rack structure. The second rack structure meshes with the first rack structure. The gear structure is coaxially arranged with the shaft of the secondary gear. The outer wall of the connecting rod has a third rack structure, which meshes with the gear structure; In the driving mechanism, the connecting rod is connected to the pushing rod, and in the reset mechanism, the connecting rod is connected to the reset rod.

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